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WWW.SUNYIT.EDU WWW.SUNYCNSE.COM
Applied Power Electronics Conference (APEC) 2015
Paul A. Farrar Jr. SUNY Polytechnic Institute
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SUNY Polytechnic Sites
NY PEMC - Albany
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Integrated Device Manufacturers
Materials & Site Services Partners
Open Innovation Eco-System
Industry Consortia
Avalanche Technology
Derivative Development Partners
UNYCNSE.COMCNSE Confidential and Proprietary
Equipment Suppliers
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High Volume Manufacturing
Capability
Experienced High Volume CMOS Manufacturing
Customer Centric Development
Team
Targeted Customers/Applications
Development and Commercialization
CNSE – FOUNDRY Cooperation Model
Capability Benefit
CNSE comprehensive development facility Flexible and IP protected environment for commercialization of technologies
FOUNDRY technology and manufacturing infrastructure
Cost effective and fast path to high volume manufacturing
Fast process transfer methodology Seamless path from concept to HVM
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NanoFab 300 North (NY PEMC)
ZEN Building
NanoFab East
NanoFab 300/450 Extension
Albany NanoTech Complex
NanoFab 300
South
> 1,000,000 sq.ft. of cutting-edge facilities, with 135,000 sq. ft. of 300mm and 450 mm cleanrooms with a current expansion to 1,300,000 sq. ft.
More than 300 industry partners including electronics, energy, defense & biohealth Over $20Bil investments and over 3,100 R&D jobs currently on site
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CNSE Silicon Capabilities
EUV 3300
300 mm Cleanroom
24/7 pilot line operation Capacity of ~5,000 wafer starts per month Leading-edge lithography (MUV, 193i, EUV, e-beam) Backwards compatible to 65 nm; license to produce 10-7 nm CMOS node development 193i lithography and RIE etch for low loss photonics devices Waveguides, hi-speed modulators, filters, gratings, Ge detectors
Full 2.5D/3D integrated process developed and implemented 3D Integration DtW and WtW bonding
1st of a kind 450mm tool set Advanced 3D packaging development @ Utica Location
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Collaboratively work with Industry Suppliers and IDMs to develop and test 450mm equipment and build up infrastructure to meet industry needs
Consists of 5 member companies (Intel, TSMC, GLOBALFOUNDRIES, IBM, Samsung) and New York State partnering with SUNY Poly
Full flow 28 nm and below capability by mid 2016
Over forty 1st of a kind tools on-site
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NY Governor Andrew M. Cuomo announced that NY State will partner with over 100 private companies, led by GE, to
launch the New York Power Electronics Manufacturing Consortium (NY PEMC).
Develop the next generation of materials and processes used on wide band gap semiconductors in partnership
Over $500 million invested
Create thousands of high-skilled, high-paying focusing on the development and manufacture of the next generation of materials used on semiconductors 8
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Advantages of silicon carbide (SiC) power devices
Higher max. temperature: TSiC≥ 200oC vs. TSi ≤ 175o
Reduced power losses… by more than 50%
2X higher power density… more compact / powerful
More reliable in high temperature environments
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PEMC SiC Manufacturing Facility located at SUNY Poly: SiC production capabilities yielding between ~30,000-50,000 wafers/year Equipment will be specified as 200mm, capable of processing 150mm SiC wafers. Cleanroom processing area class 100 with proper ESD controls in place. MES managed processing facility under ISO 9001 Quality system Full complement of metrology and analytical equipment suite
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State-of-the-Art 6 inch Capability
Reactive Ion Etching
Metallization
Wet processing
Photolithography
Furnace
Metrology/ Analytical
Activation
Implant Test and Dice
• Qualified 1.2kV MOSFET baseline SiC process capability • Parametric Test and Dice capability.
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Proven MOSFET Device Process Flow
Alignment Marks
P-Well Implant
N-plus Implant
P-plus Implant
P-JTE Implant
Field Oxide
Gate
Inter-Layer Dielectric
Ohmic Contacts
Gate Pad
Pad Metal
Passivation
Backmetal
Polyimide
Activation
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NY SiC Timeline
2H 2014 1H 2015 2H 2015 1H 2016 2H 2016
1st SiC MOSFET
Qualified SiC MOSFET
ISO certified
Equipment Installation
Process Verification
Q l f d S C MOSFET
MOSFET yield, reliability optimization
RFP and PO process
RFP and POR
Tool Set Selected
Equipment Installation
Fab Prep Fab Prep
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Consortium Membership includes: Access to PEMC’s ISO 9001 Quality Certified SiC production facility capable of yielding between ~30,000-50,000 wafers/year Access State-of-the-Art equipment set for device and process development using Company flow or Consortiums 1.2kV baseline MOSFET flow SUNY Poly’s Proven Environment for Partnership Development and IP Protection
Full complement of metrology and analytical equipment suite
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Questions & Discussion
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DC-AC Inverter
>5kW/Kg 200°C
Data Center Products Wind, Solar +1-2% efficiency
1.5-2.2kV SiC
MV Drives 4-6kV MW class
with 2.2kV or higher voltage SiC
System
Increasing TRL / MRL 4-7
HVDC / MVDC
MV Motor Drive
PV Inverter
Wind Converter
Data Center
Aviation
EV Charger
DC-DC
D600V
H10kV
PV3.3kV
WW1.2kV
D20V
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Governor Cuomo’s initiative to transform SUNY campuses and other university communities into tax-free communities for new and expanding businesses. Business will locate in these zones and for 10 years enjoy
No state income tax No business or corporate state or local taxes No sales tax No property tax No franchise fees
Prospective businesses must satisfy various criteria, including being new to NYS or determined by the Commissioner to be creating net new jobs within the first year and beyond
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