Welcome Welcome to to

Boin GmbHBoin GmbH

WAFERMAPWAFERMAP

PANELMAPPANELMAP

WAFERView.OCXWAFERView.OCX

WAFERMAPWAFERMAP

• Award winning software package

• Collect, edit, visualize and analyze measured physical parameters on semiconductor wafers

• Import data from various metrology tools

- Ellipsometers

- 4 point probes

- Thickness gauges Supported File Formats

We add customer imports

upon request

• 9 different visualization plots from 1D to 3D

• Data operations and filtering

• File comparison

• Statistical Process Control SPC

- Browser

- Trend chart

• Inter-application Communication (Active X)

•

WAFERMAPWAFERMAP

New features:

• New easy to use XML-based Boin file format

• Multiple wafers and multi-measurements in one file

• Import of multi-measurement wafers at once

• Free rotation of 3D plots

•

WAFERMAPWAFERMAP

New Release: Version 3.0

WAFERMAPWAFERMAP

New features:

• Export of *.jpg and *.bmp

• Export of *.html

• … and many more

New Release: Version 3.0

WAFERMAPWAFERMAP

• Compare your measurements

• Work off-line

• Work outside the clean room

WAFERMAP is your choice

• Advanced Micro Devices• ASM • Atmel• Canon• Hitachi• Hypernex • Infineon• Intel• Jordan Valley SC• LSI Logic• Mattson Technology• Motorola/ Freescale

• Nicolet• Osram • Philips, Philips Analytical• Mitsubishi• Seagate• Sematech • ST Microelectronics• Sumitomo Eaton Nova• Silicon Valley Group• Thermawave• Tokyo Electron• Tru-Si• Varian

WAFERMAPWAFERMAP

References – Partial List of WAFERMAP Customers

References – OEM Customers

WAFERMAPWAFERMAP

• Cyrium

• Foothill Instruments

• Jenawave

• Jordan Valley

• KLA - Tencor

• LayTec

• Napson

• Sigmatech

• SOPRA

• Technos

• Tepla AG

• Thermawave

• Thermo Electron

• Carl Zeiss

Sell WAFERMAP as analysis and visualization tool together with your equipment

PANELMAPPANELMAP

• Transfer of Award winning technology to flat panel geometry

• Collect, edit, visualize and analyze measured physical parameters on LCD, TFT, flat panels

• Import data from different metrology tools

- Ellipsometers

- 4 point probes

- Thickness gauges

Supported File Formats

We add customer imports

upon request

• 9 different visualization plots from 1D to 3D

• Data operations and filtering

• File comparison

• Statistical Process Control SPC

- Browser

- Trend chart

• Inter-application Communication (Active X)

•

PANELMAPPANELMAP

• New easy to use XML-based Boin file format

• Multiple panels and multi-measurements in one file

• Import of multi-measurement panels at once

• Free rotation of 3D plots

• Export of *.jpg and *.bmp

• Export of *.html

• … and many more

•

PANELMAPPANELMAP

PANELMAPPANELMAP

• Compare your measurements

• Work off-line

• Work outside the clean room

PANELMAP is your choice

• Provides Boin visualization techniques as integration tool

• 9 different plots from 1D to 3D

• Easy to use integration

• Detailed Property pages for each plot

• Detailed Method descriptions

WAFERView.OCXWAFERView.OCX

WAFERView.OCXWAFERView.OCX

• Integrate award winning Boin technology directly into your own equipment software

• Save development costs

• Save development time

WAFERView.OCX is your choice

WAFERView.OCXWAFERView.OCX

References – Partial List of WAFERView.OCX Customers

• Nicolet

• SOPRA

• Thermawave

• Thermo Electron

• Timbre

Thank you very muchThank you very much for your interest infor your interest in

Boin productsBoin products