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Wafer mapping sensorASW Series
Translucent wafer
mode (8 and 12
inch models)
Free from
Electrostatic effects
(comb sensor unit)
(12 Inch) (8 Inch) (6 Inch)
Applicable to 6, 8
and 12 inch wafers
To detect Silicon Carbide, Sapphire,
Silicon and other translucent wafers.
(*1): Latch mode is for detecting an edge of a wafer. Perform detection test in advance.
The sensor may not detect the edge depending on the thickness or shape of the wafer.
The wafer mapping sensor speeds upthe sensing process while maintaining relaiable detection.
Each comb (sensor unit) can be replacedin a single operation.
Easy maintenance !
Electrostatic malfunction free
● Reliably detects SiC single crystal and other translucent wafers.
● Mixed wafers like Silicon and glass wafers in a cassette are detectable.
Easy
maintenance
Cost saving
The comb unit contains only optical structures with no electrical parts.
N o r m a l m o d e
L a t c h m o d e
: Wafers of 30% or less tansmissivity
: Wafers of 70% or less transmissivity (*1)
Equipped with two detection modes the sensor is capable to
detect the latest high transmittance wafers. (8 and 12 inch models)01POINT
02POINT
03POINT
● Output inhibit functionEnables to inhibit all outputs regardless to the sensor state.
Two sensors connected in parallel can be controlled by a single input. ● Remote teaching and light emission inhibit functionThe output operation can be checked by the light emission inhibit
function. Teaching is restarted when the function is reset and the sensor
gains the best sensitivity.
● Trouble output and self diagnosis functionGenerates an alarm during the teaching process. Each channel output
turns on and off consecutively when a trouble occurs such like low
receiving light intensity, comb breakage or foreign light disturbance.
● CE compliant8 and 12 inch models are CE compliant.
● Robot cable and discrete outputAll models are equipped with discrete output for each channel.
Highly flexible robot cable is employed for 6 and 8 inch models.
■ SPECIFICATIONS
■ INPUT/OUTPUT CIRCUIT
10.0mm
25ch
DC12〜24V ±10% ripple 10% or less
1.9W or less
35ms or less
Connector type OMRON MIL connector XG4A-3031
Approx. 270g(non including cable)
ASW−SG125VF
12 inch normal mode: transmittance: 30% or lesslatch mode: transmittance: 70% or less
NPN open collectorRating: sink current 30VDC or less,
30mA or less
Light emission inhibit at ON.
Re-teaching at OFF.
Reset the latch output and inhibit light emission at ON.
Re-teaching at OFF.
Normal mode:
Latch mode:
Light emission inhibit at ON
Re-teaching at OFF.
Model
ApplicableWafer
Wafer pitch
Number of channels
Detection method
C o m b
Power supply
Current consumption
Operation mode
Output mode
Response time
Light source
Output inhibit input
Light emissioninhibit input / re-teaching(self diagnosis function)
Connection
Mass
Material
Accessories
6.35mm4.76mm
25ch25ch 26ch
Through beam
DC24V ±10% ripple 10% or less
1.8W or less250mA or less
12ms or less
Infrared LED(870nm)Infrared LED(830nm)
Open collector or contact inputOutput inhibit ON: 1.5V or less OFF: 4V or more
Attached cable with connector (Fujitsu FCN-361J040-AU)
Sensor unit : Polycarnonate Housing : Aluminum
Operation manual
Replaceable
ASW−SG85FASW−SG625AP ASW−SG85F−Y05 ASW−SG86F ASW−SG86F−Y05
6 inch transmittance: 30% or less
8 inch normal mode: transmittance: 30% or lesslatch mode: transmittance:70% or less
Dark ONNormal mode / Latch mode selectable(with switch)
ON/OFF when trouble
Dark ONON/OFF when trouble
NPN open collector Rating: sink current 30VDC or less, 20mA or less
Open collector input or contact input Light emission inhibit ON: 1.5V or less OFF: 4V or more
Ambient illumination
Ambient temperature
Ambient humidty
Protective structure
Vibration
Shock
1500 l x or less
-10 - +55℃(non-freezing)
35 - 85%RH (non-condensation)
IP40
10-55Hz double amplitude 0.5mm X, Y, Z directions, 2 hours each
300m/s2 X, Y, Z directions, 3 times each
Cable length: 3mCable length: 3m Cable length: 0.5m Cable length: 3m Cable length: 0.5m
Approx. 390g Approx. 250g Approx. 400g Approx. 260gApprox. 330g
(For a noise prevention, a capacitor is installed between the 0V power supply and the sensor’s aluminum case.
Do not conduct withstand voltage Test between any input / output and the sensor case. )
■ OPRATING ENVIROMENT ■ COMPONENTS
ASW-SG625AP
ASW-SG85F
ASW-SG86F
ASW-SG85F-Y05
ASW-SG86F-Y05
ASW-SG125VF
12-24VDC
5VDCLight emissioninhibit input
Output inhibit input
0V
(Capacitor ground)(Capacitor ground)
24VDC
5VDC
Light emissioninhibit inputOutput inhibit input
CH and troubleoutputs
CH and Trouble outputs
0V
■ PIN CONFIGURATION DIAGRAM
Comb
Switch cover
Connector:OMRONXG4A-3031
+24V+24V+24V0V0V0V*1*1*2*2
CH1CH2CH3Ch4Ch5Ch6Ch7CH8CH9CH10CH11CH12CH13Ch14CH15CH16Ch17CH18CH19CH20CH21CH22CH23CH24CH25
CH26 *4
B7B10B11B8B13B14B16B17B19B20A1A2A3A4A5A6A7A8A9A10A11A12A13A14A15A16A17A18A19A20B1B2B3B4B5B6B9
Sensor Connector number
*3
*1:Light emission inhibit input*2:Output inhibit input
*3:Trouble output*4:ASW-SG86F
External wiring and connector number
Comb
8 inch 12 inch
Switch cover
CH1(1st beam axis)mark
*M4×8screw
Connector FujitsuFCN-361J040-AU
Fixing plate for packing(Remove before using sensor)
*(The M4×8 screw are used to fix the fixing plate. Do not use these screws to mount the pudoduct. )
Inte
rnal
circuit
Inte
rnal
circuit
Inte
rnal
circuit
■Dimension (Unit:mm)
ASW-SG625AP
14
Ø6
※1 tail of the protrusion end of the comb
R0.62
(23°)
4
10
(10)2-M4 tap×depth:8
60
L3
2W
25
50
1.8P
4
1.8
※2
※1
L1L2
Cable
sensor unit
optical axiscenter position
B
0.35 A,Bopticalaxis centerposition
1(optical axis width)
3(optical axis width)
(common to each)
ASW-SG85FASW-SG85F-Y05ASW-SG86FASW-SG86F-Y05
Comb sensor unitModel:ASW-F2500
158.75
152.46.35
26
25
166.9
160.554.55
175
168.65ASW-SG85F
ASW-SG85F-Y05
ASW-SG86F
ASW-SG86F-Y05
P(Pitch)Model W
(Width)N
(Channel) L1 L3L2
10
5φ2.2 φ12
(27.5)25
1.8
Comb sensor unitModel:ASW-F2500
10
5φ2.2
φ1
2
(27.5)25
1.8
14
Ø6
10
Cable
sensor unit
optical axiscenter position
3(optical axis width)
※1 tail of the protrusion end of the comb
0.4 0.41
R0.6
2
(23°)
4
optical axis center position
1(optical axis width)
(10)2-M4 Tap×8 60
130
2
25
50
1.82.96
4
1.8
※2
※1
120.8114.24
0.35 A,BAoptical
axis 1ch(common to each)
The dimension shown in these drawingapply to the bottom end (※2), not the protrusion end(※1) of the comb.
ASW-SG125VF
B
16
14
14
optical axis center position
3(optical axis width)
(0.7)
A
260
10
70Connector160
The dimension shown in these drawingapply to the bottom end (※2), not the protrusion end(※1) of the comb.
5
2-M4 depth:82-M4 depth:8
2-M4(through hole)
(14.4)
1.8
211
1.8
4 ※2
※1
251.8240
8
3.5(M4 tap)7(M4 tap)3.5
optical axis(CH1) (CH25)
optical axis 25
optical axiscenter position
1 pin
12
180
210
Optical axis1 ch
Comb sensor unitModel:ASW-F1600
10
16
2
1.8
φ1φ2.2
5
(18.5)
R0.6
2
0.40.4 1
1(optical axis width)
optical axis center position
4
※1 tail of the protrusion end of the comb
(23°)
8.2
0.4 0.41
opticalaxis 1ch
A
0.35 A,B(common to each)
B
The dimension shown in these drawingapply to the bottom end (※2), not the protrusion end(※1) of the comb.
20
20
50
10