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1 Vibration Control Eric E. Ungar, Sc.D., PE Eric E. Ungar, Sc.D., PE Acentech Acentech Incorporated Incorporated Hal Amick, PE Hal Amick, PE Colin Gordon & Associates Colin Gordon & Associates Vibration Control - Outline Vibration Control - Outline ! How Vibrations are Characterized (EEU) How Vibrations are Characterized (EEU) ! The Role of the Advanced Technology Bldg. (EEU) The Role of the Advanced Technology Bldg. (EEU) ! Vibration Measurements (HA) Vibration Measurements (HA) ! Effects of Vibrations on Instruments (HA) Effects of Vibrations on Instruments (HA) Example Example Microscope Microscope Generic Vibration Criteria Generic Vibration Criteria ! Reducing Vibrations within the Building (EEU) Reducing Vibrations within the Building (EEU) ! Reducing Vibrations at the Instrument (HA) Reducing Vibrations at the Instrument (HA) Internal Isolation Internal Isolation External Isolation External Isolation

Vibration Control - Outline - Acentech · 1 Vibration Control Eric E. Ungar, Sc.D., PE Acentech Incorporated Hal Amick, PE Colin Gordon & Associates Vibration Control - Outline! How

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Page 1: Vibration Control - Outline - Acentech · 1 Vibration Control Eric E. Ungar, Sc.D., PE Acentech Incorporated Hal Amick, PE Colin Gordon & Associates Vibration Control - Outline! How

1

Vibration Control

Eric E. Ungar, Sc.D., PEEric E. Ungar, Sc.D., PEAcentech Acentech IncorporatedIncorporated

Hal Amick, PEHal Amick, PEColin Gordon & AssociatesColin Gordon & Associates

Vibration Control - OutlineVibration Control - Outline

!! How Vibrations are Characterized (EEU)How Vibrations are Characterized (EEU)!! The Role of the Advanced Technology Bldg. (EEU)The Role of the Advanced Technology Bldg. (EEU)!! Vibration Measurements (HA)Vibration Measurements (HA)!! Effects of Vibrations on Instruments (HA)Effects of Vibrations on Instruments (HA)

Example Example �� MicroscopeMicroscopeGeneric Vibration CriteriaGeneric Vibration Criteria

!! Reducing Vibrations within the Building (EEU)Reducing Vibrations within the Building (EEU)!! Reducing Vibrations at the Instrument (HA)Reducing Vibrations at the Instrument (HA)

Internal IsolationInternal IsolationExternal IsolationExternal Isolation

Page 2: Vibration Control - Outline - Acentech · 1 Vibration Control Eric E. Ungar, Sc.D., PE Acentech Incorporated Hal Amick, PE Colin Gordon & Associates Vibration Control - Outline! How

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How Vibrations are Characterized

The Role of the Advanced Technology Bldg.

Eric E. Ungar, Sc.D., PEEric E. Ungar, Sc.D., PEAcentech Acentech IncorporatedIncorporated

Vibration DefinitionsVibration Definitions

!! Vibration:Vibration:BackBack--andand--forth motion about an equilibrium positionforth motion about an equilibrium position

!! Most Important in BuildingsMost Important in BuildingsVertical Vertical �� Due to interior and nearby disturbancesDue to interior and nearby disturbancesHorizontal Horizontal �� Due to seismic activity and windDue to seismic activity and wind

!! Ground motions often reported in Peak Particle Ground motions often reported in Peak Particle Velocity (PPV)Velocity (PPV)PPV = Greatest value of 3PPV = Greatest value of 3--D (D (triaxialtriaxial) vector amplitude in ) vector amplitude in

some observation periodsome observation period

Generally we need more detail Generally we need more detail

Eric E. UngarEric E. Ungar

Page 3: Vibration Control - Outline - Acentech · 1 Vibration Control Eric E. Ungar, Sc.D., PE Acentech Incorporated Hal Amick, PE Colin Gordon & Associates Vibration Control - Outline! How

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Sinusoidal Vibrations: AmplitudesSinusoidal Vibrations: Amplitudes

!! Conceptually simplest vibration is sinusoidal or Conceptually simplest vibration is sinusoidal or �simple harmonic��simple harmonic�

)sin( φω += tYy

Y = Amplitude (Zero-to-Peak)2Y = Double Amplitude (Peak-to-Peak)T = Period [sec]

Eric E. UngarEric E. Ungar

Sinusoidal Vibrations: root-mean-squareSinusoidal Vibrations: root-mean-square

f = frequency [cycles/sec = Hz] = 1/T

ω = radian frequency [radians/sec] = 2πf

Root-mean-square (rms) value =

2)(1 2/1

20

0

YdttyT

yTt

trms =

= ∫

+

Eric E. UngarEric E. Ungar

Page 4: Vibration Control - Outline - Acentech · 1 Vibration Control Eric E. Ungar, Sc.D., PE Acentech Incorporated Hal Amick, PE Colin Gordon & Associates Vibration Control - Outline! How

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Vibration metrics: displacement, velocity, accelerationVibration metrics: displacement, velocity, acceleration

If y(t) is a displacement,

Velocity:

Acceleration:

Amplitude relations:

ωYV = 2ωω YVA ==

)sin()sin(/ φωφωω +−=+−== tAtVdtdva

)cos()cos(/)( φωφωω +=+== tVtYdtdytv

)sin()( φω += tYty

fπω 2=where:

Eric E. UngarEric E. Ungar

Periodic VibrationsPeriodic Vibrations

!! Practical vibrations are rarely simply sinusoidalPractical vibrations are rarely simply sinusoidal!! Fourier analysis: sum of sinusoidal componentsFourier analysis: sum of sinusoidal components

!! If motion repeats after each interval If motion repeats after each interval TT (the (the �Period�) it is called �periodic�; otherwise it is �Period�) it is called �periodic�; otherwise it is called �complex�called �complex�

∑∞

=

+=1

)sin(n

nnn tYy φω 1ωω nn =;

Eric E. UngarEric E. Ungar

Page 5: Vibration Control - Outline - Acentech · 1 Vibration Control Eric E. Ungar, Sc.D., PE Acentech Incorporated Hal Amick, PE Colin Gordon & Associates Vibration Control - Outline! How

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Random Vibrations Random Vibrations

!! Vibration is �deterministic� if value at any future time can Vibration is �deterministic� if value at any future time can be predicted from past historybe predicted from past history

!! Vibration is �random� if it is unpredictable, except Vibration is �random� if it is unpredictable, except statistically. Random vibrations are �stationary� if the statistically. Random vibrations are �stationary� if the statistics do not change with time.statistics do not change with time.

!! In Buildings:In Buildings:Machinery:Machinery: deterministic, often periodic, usuallydeterministic, often periodic, usually

complexcomplexBackground:Background: random, stationary in some intervalsrandom, stationary in some intervalsActivities:Activities: transient pulsestransient pulses

Eric E. UngarEric E. Ungar

Vibration SpectraVibration Spectra

!! �Spectrum� = Frequency distribution of �Spectrum� = Frequency distribution of amplitudesamplitudes

!! For spectrum of periodic motion, use Fourier For spectrum of periodic motion, use Fourier analysisanalysis

Eric E. UngarEric E. Ungar

Page 6: Vibration Control - Outline - Acentech · 1 Vibration Control Eric E. Ungar, Sc.D., PE Acentech Incorporated Hal Amick, PE Colin Gordon & Associates Vibration Control - Outline! How

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Vibration Spectrum � Random MotionVibration Spectrum � Random Motion

!! For spectrum of For spectrum of randomrandom motionmotionAssume that the motion observed during a recording Assume that the motion observed during a recording

interval interval TTRR repeats continually, and apply Fourier repeats continually, and apply Fourier analysis to that intervalanalysis to that interval

Amplitudes Amplitudes YYnn depend on record length depend on record length TTRR. We need . We need specify it or equivalent information, such as the specify it or equivalent information, such as the �analysis bandwidth��analysis bandwidth�

∆f=f1/(number of spectrum �lines�); f1=1/TR

Note: if Note: if TTRR is doubled, we get twice as many components. is doubled, we get twice as many components. Old Old YYnn�s�s then are half as large.then are half as large.

∫− ⋅= R

R

T

TR

n dttntyT

Y 1sin)(21 ω RTf /22 11 ππω ==

Eric E. UngarEric E. Ungar

Power Spectral Density (PSD)Power Spectral Density (PSD)

!! �Power spectral density� normalizes spectra in �Power spectral density� normalizes spectra in relation to bandwidthrelation to bandwidth

fj = center frequency of band = center frequency of band ∆fj

Mean square velocity in band is independent of bandwidthMean square velocity in band is independent of bandwidth

Units of Units of PSDPSD: : m2/Hz or or (in/sec)2/Hz, etc., etc.

Root(PSD)Root(PSD) has units of has units of m/√Hz or or (in/sec)/√Hz

j

favgj f

yfPSD j

∆= ∆,

2 )()(

( ) ∫ ∑−== R

R

T

T nR

avg YdttyT

y 222 )(21

Eric E. UngarEric E. Ungar

Page 7: Vibration Control - Outline - Acentech · 1 Vibration Control Eric E. Ungar, Sc.D., PE Acentech Incorporated Hal Amick, PE Colin Gordon & Associates Vibration Control - Outline! How

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Vibration StatisticsVibration Statistics

!! Stationary random vibrations may also be Stationary random vibrations may also be characterized in terms of probability characterized in terms of probability distributions:distributions:

!! Probability magnitudes for levels are often stated Probability magnitudes for levels are often stated in terms of �percentile levels�, e.g.,in terms of �percentile levels�, e.g.,

L10=Level that is exceeded 10% of the time

Eric E. UngarEric E. Ungar

Levels and DecibelsLevels and Decibels

!! Sound = Vibration of Air PressureSound = Vibration of Air PressureMay cause internal vibrations in sensitive equipmentMay cause internal vibrations in sensitive equipment

!! Levels and Decibels (dB)Levels and Decibels (dB)

Vibration Velocity Level = Vibration Velocity Level = LLvv

Sound Pressure Level (SPL) = Sound Pressure Level (SPL) = LLpp

>> The reference values >> The reference values vvrefref and and pprefref must be statedmust be stated

[ ] [ ]refrmsrmsv vvvvdBLref 1022

10 log20log10)( ==

[ ]refrmsp ppL 10log20=

Eric E. UngarEric E. Ungar

Page 8: Vibration Control - Outline - Acentech · 1 Vibration Control Eric E. Ungar, Sc.D., PE Acentech Incorporated Hal Amick, PE Colin Gordon & Associates Vibration Control - Outline! How

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Vibration Basics - SummaryVibration Basics - Summary

!! Sinusoidal vibrationsSinusoidal vibrationsDisplacement, velocity, acceleration relationsDisplacement, velocity, acceleration relationsAmplitudes, rootAmplitudes, root--meanmean--squaresquare

!! Periodic vibrations: SpectraPeriodic vibrations: Spectra

!! Random VibrationsRandom VibrationsSpectra and Power Spectral Density (PSD)Spectra and Power Spectral Density (PSD)Probability distributionsProbability distributions

!! Levels and DecibelsLevels and Decibels

!! NEXT:NEXT: Relevance to BuildingsRelevance to Buildings

Eric E. UngarEric E. Ungar

Typical Vibration Sources in a BuildingTypical Vibration Sources in a BuildingEric E. UngarEric E. Ungar

Page 9: Vibration Control - Outline - Acentech · 1 Vibration Control Eric E. Ungar, Sc.D., PE Acentech Incorporated Hal Amick, PE Colin Gordon & Associates Vibration Control - Outline! How

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Vibration SourcesVibration Sources

!! Vibrations of sensitive instruments may be Vibrations of sensitive instruments may be caused by �caused by �

!! Locally induced floor vibrationsLocally induced floor vibrations

!! Vibrations transmitted from elsewhereVibrations transmitted from elsewhere

!! Air pressure fluctuations (acting on an Air pressure fluctuations (acting on an instrument or on floor)instrument or on floor)

!! Sound (acting on instrument or on floor)Sound (acting on instrument or on floor)

Eric E. UngarEric E. Ungar

External SourcesExternal Sources

!! Traffic Traffic �� Street, Subway, RailStreet, Subway, Rail

!! Nearby Machinery Nearby Machinery �� Can include items in nearby Can include items in nearby buildingsbuildings

!! Construction ActivitiesConstruction Activities

!! Sound Sound �� Can include aircraftCan include aircraft

!! Ambient Ambient �� Wind and wavesWind and waves

Eric E. UngarEric E. Ungar

Page 10: Vibration Control - Outline - Acentech · 1 Vibration Control Eric E. Ungar, Sc.D., PE Acentech Incorporated Hal Amick, PE Colin Gordon & Associates Vibration Control - Outline! How

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A Major External SourceA Major External SourceEric E. UngarEric E. Ungar

Internal SourcesInternal Sources

!! People Walking, FootfallsPeople Walking, Footfalls

!! Carts and dollies, fork liftsCarts and dollies, fork lifts

!! Doors opening and closing: Impacts and Pressure Doors opening and closing: Impacts and Pressure ChangesChanges

!! NoiseNoise

!! Maintenance and Installation WorkMaintenance and Installation Work

!! Other Research or Production EquipmentOther Research or Production Equipment

Eric E. UngarEric E. Ungar

Page 11: Vibration Control - Outline - Acentech · 1 Vibration Control Eric E. Ungar, Sc.D., PE Acentech Incorporated Hal Amick, PE Colin Gordon & Associates Vibration Control - Outline! How

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Typical Vibrations in BuildingsTypical Vibrations in Buildings

10

100

1,000

10,000

100,000

1.25 1.

6 2

2.5

3.15 4 5

6.3 8 10

12.5 16 20 25

31.5 40 50 63 80 100

125

160

200

1/3 Octave Band Center Frequency (Hz)

Vib

ratio

n V

eloc

ity ( µ

in/s

ec)

footfall-induced vibrations typical stiff building building

environmental vibration sourcesstreet subway freighttraffic train

ambeint - quiet urban

Eric E. UngarEric E. Ungar

Building Services EquipmentBuilding Services Equipment

!! HVAC:HVAC: Vibration, Noise, Pressure Vibration, Noise, Pressure FluctuationsFluctuations

!! Exhaust:Exhaust: Fans in hoods or other service Fans in hoods or other service fansfans

!! Electrical Electrical EqptEqpt:: Emergency generators, transformersEmergency generators, transformers

!! Pumps:Pumps: Water, VacuumWater, Vacuum

!! Plumbing: Plumbing: Turbulence, PulsationsTurbulence, Pulsations

!! Ducting:Ducting: Turbulence, NoiseTurbulence, Noise

Eric E. UngarEric E. Ungar

Page 12: Vibration Control - Outline - Acentech · 1 Vibration Control Eric E. Ungar, Sc.D., PE Acentech Incorporated Hal Amick, PE Colin Gordon & Associates Vibration Control - Outline! How

12

Questions? . . . .Questions? . . . .

Vibration Measurements

Effects of Vibrations on Instruments

Hal Amick, PEHal Amick, PEColin Gordon & AssociatesColin Gordon & Associates

Page 13: Vibration Control - Outline - Acentech · 1 Vibration Control Eric E. Ungar, Sc.D., PE Acentech Incorporated Hal Amick, PE Colin Gordon & Associates Vibration Control - Outline! How

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Vibration MeasurementsVibration Measurements

!! Measurement ProcessMeasurement ProcessInstrumentationInstrumentation

!! Sensor Sensor �� accelerometer or velocity sensoraccelerometer or velocity sensor!! AmplifierAmplifier!! Signal processing systemSignal processing system

AttachmentAttachmentData captureData capture

!! Data ReductionData ReductionDownload to computerDownload to computerProcessProcess

!! Convert from format of signal processing to that needed for Convert from format of signal processing to that needed for presentationpresentation

!! Data PresentationData PresentationPurpose determines formatPurpose determines formatDocumentationDocumentation

Hal AmickHal Amick

Time or Frequency Domain?Time or Frequency Domain?

-1500

-500

500

1500

0 1 2 3 4Time, Seconds

Velo

city

, µin

/sec

1

10

100

1000

0 20 40 60 80 100

Frequency, Hz

rms

Velo

city

, µin

/s

FFTFFTFFT

PreferredPreferred

Hal AmickHal Amick

Amick, H., and Bui, S. K., �A Review of Several Methods for Processing Vibration Data,� Proceedings of SPIE Conference on Vibration Control and Metrology, pp. 253-264, San Jose, CA (November 1991)

Page 14: Vibration Control - Outline - Acentech · 1 Vibration Control Eric E. Ungar, Sc.D., PE Acentech Incorporated Hal Amick, PE Colin Gordon & Associates Vibration Control - Outline! How

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Relevant Spectrum FormatsRelevant Spectrum Formats

(i.e., appropriate for steady(i.e., appropriate for steady--state environments with significant random content) state environments with significant random content)

!! Constant BandwidthConstant BandwidthFast Fourier Transform (FFT)Fast Fourier Transform (FFT)

!! Proportional BandwidthProportional BandwidthOneOne--third octave band (bandwidththird octave band (bandwidth = 0.23= 0.23ffcc))

!! Power Spectral Density (PSD)Power Spectral Density (PSD)AccelerationAcceleration22 / Hz/ Hz

Hal AmickHal Amick

PreferencesPreferences

!! Frequency domainFrequency domainMajority of practitioners use FFT for diagnostics and 1/3 Majority of practitioners use FFT for diagnostics and 1/3

octave band for assessmentoctave band for assessmentAlso used: FFT alone, PSDAlso used: FFT alone, PSDResponse spectra Response spectra notnot used (but being considered by ISO used (but being considered by ISO

committee)committee)

!! Energy Average statistics; RMS amplitudeEnergy Average statistics; RMS amplitude

!! We use velocityWe use velocity(With spectra, the actual metric isn�t critical as long as it is(With spectra, the actual metric isn�t critical as long as it is

defined.)defined.)

Hal AmickHal Amick

Page 15: Vibration Control - Outline - Acentech · 1 Vibration Control Eric E. Ungar, Sc.D., PE Acentech Incorporated Hal Amick, PE Colin Gordon & Associates Vibration Control - Outline! How

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Example � �Typical� Site Vibration MeasurementsExample � �Typical� Site Vibration Measurements

!! Measure data �live�, Measure data �live�, obtaining spectrum obtaining spectrum directly with directly with analyzeranalyzer

!! Measure in constant Measure in constant bandwidth (FFT)bandwidth (FFT)

!! Convert to oneConvert to one--third octave bandsthird octave bands

a) Narrowband (Bandwidth = 0.375 Hz)

1

10

100

1000

0 20 40 60 80 100

Frequency, Hz

rms

Velo

city

, m

icro

inch

/sec

0102030405060

rms

Velo

city

Le

vel,

dB

b) One-Third-Octave Bands

1

10

100

1000

1 10 100Frequency, Hz

rms

Velo

city

, m

icro

inch

/sec

0102030405060

rms

Velo

city

Leve

l, dB

Hal AmickHal Amick

Effects of Vibrations on InstrumentsEffects of Vibrations on Instruments

!! What do Vibrations What do Vibrations do?do?

!! Determining Vibration SensitivityDetermining Vibration SensitivityConceptConceptExample Example �� Optical MicroscopeOptical MicroscopeManufacturers� SpecificationsManufacturers� Specifications

!! Generic Vibration CriteriaGeneric Vibration CriteriaManufacturers� SpecificationsManufacturers� SpecificationsVelocity �Bound�Velocity �Bound�

Hal AmickHal Amick

Page 16: Vibration Control - Outline - Acentech · 1 Vibration Control Eric E. Ungar, Sc.D., PE Acentech Incorporated Hal Amick, PE Colin Gordon & Associates Vibration Control - Outline! How

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Typical Effects of VibrationsTypical Effects of Vibrations

!! Optical DevicesOptical Devices�Jiggle� or blurring of images�Jiggle� or blurring of images �� Impairment of visual Impairment of visual

observationobservation

!! Electron Beam DevicesElectron Beam DevicesStraight lines become wavyStraight lines become wavy �� Assessment errors, Assessment errors,

measurement errorsmeasurement errors

!! ProbeProbe--Type DevicesType DevicesVibratory forces in sensor misinterpretedVibratory forces in sensor misinterpreted

!! LongLong--beambeam--path Devicespath DevicesBeams deflectedBeams deflected, often causing energy loss or misalignment, often causing energy loss or misalignment

Hal AmickHal Amick

Reasons for Vibration SensitivityReasons for Vibration Sensitivity

!! Vibrations (and sometimes sound) cause internal Vibrations (and sometimes sound) cause internal deformationsdeformationsInstrument is more responsive at its resonancesInstrument is more responsive at its resonances

!! Floor vibrations are a mixture of random and Floor vibrations are a mixture of random and singlesingle--frequency vibrations.frequency vibrations.What if excitation matches resonance?What if excitation matches resonance?

!! Perform vibration sensitivity tests to develop Perform vibration sensitivity tests to develop criteriacriteriaIdentify resonancesIdentify resonancesFind �threshold� amplitude at which vibration�s effects Find �threshold� amplitude at which vibration�s effects

become a problembecome a problem

1

10

100

1000

0 20 40 60 80 100

Frequency, Hz

rms

Velo

city

, µin

/s

Hal AmickHal Amick

Page 17: Vibration Control - Outline - Acentech · 1 Vibration Control Eric E. Ungar, Sc.D., PE Acentech Incorporated Hal Amick, PE Colin Gordon & Associates Vibration Control - Outline! How

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Example � Nikon MicroscopeExample � Nikon Microscope

!! Shake microscope Shake microscope base at a fixed base at a fixed frequencyfrequency

!! Increase amplitude of Increase amplitude of motion until effect of motion until effect of vibration becomes vibration becomes visiblevisible

!! PlotPlot!! Repeat at new Repeat at new

frequencyfrequency!! Dips in curve Dips in curve

associated with associated with internal resonancesinternal resonances

****

* = Resonances* = Resonances

Nikon Microscope 1000xPerception Threshold

side-to-side100

1000

10000

1 10 100 1000

Frequency, Hz

rms

Velo

city

Am

plitu

de, µ

in/s

Amick, H., and Bui, S. K., �A Review of Several Methods for Processing Vibration Data,� Proceedings of SPIE Conference on Vibration Control and Metrology, pp. 253-264, San Jose, CA (November 1991)

Example � Nikon Microscope � 2 Example � Nikon Microscope � 2

!! Perform test in three Perform test in three directionsdirections

!! Plot points representing Plot points representing �threshold of �threshold of perception�perception�

!! �Fit� appropriate lower�Fit� appropriate lower--bound curvesbound curvesShown is lower bound of � Shown is lower bound of �

\\ -- Constant AccelerationConstant Acceleration_ _ -- Constant VelocityConstant Velocity/ / -- Constant DisplacementConstant Displacement

!! Note what happens at Note what happens at lower frequencieslower frequencies

10

100

1000

10000

1 10 100Frequency, Hz

rms

Velo

city

, µm

/s

VerticalFront-to-BackSide-to-SideLower Bound

Hal AmickHal Amick

Hal Amick & Michael Stead, �Vibration Sensitivity of a Laboratory Bench Microscope,� Presented at the First Pan-American/Iberian Meeting on Acoustics; 144th Meeting of the Acoustical Society of America, 2-6 December 2002, Cancun, Mexico

Page 18: Vibration Control - Outline - Acentech · 1 Vibration Control Eric E. Ungar, Sc.D., PE Acentech Incorporated Hal Amick, PE Colin Gordon & Associates Vibration Control - Outline! How

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Example � Nikon Microscope � 3 Example � Nikon Microscope � 3

1

10

100

1000

10000

1 10 100 1000

Frequency, Hz

rms

Velo

city

, µm

/s

40x100x400x1000x

1000x

400x

100x

40x

1

10

100

1000

10000

0 200 400 600 800 1000 1200

Magnification, timesVe

rtic

al F

loor

Am

plitu

de,

µm

/s

A

B

C

VC

Criteria as functions of frequency and magnificationCriteria as functions of frequency Criteria as functions of frequency and magnificationand magnification

Velocity criteria as function of magnificationVelocityVelocity criteria as function of criteria as function of magnificationmagnification

Hal AmickHal Amick

Hal Amick & Michael Stead, �Vibration Sensitivity of a Laboratory Bench Microscope,� Presented at the First Pan-American/Iberian Meeting on Acoustics; 144th Meeting of the Acoustical Society of America, 2-6 December 2002, Cancun, Mexico

Typical Manufacturer�s Spec (TEM)Typical Manufacturer�s Spec (TEM)

a) Vertical

10

100

1000

10000

1 10 100

Frequency, Hz

rms

Velo

city

, µin

/s

I

IIIII

b) Horizontal

10

100

1000

10000

1 10 100

Frequency, Hz

rms

Velo

city

, µin

/s

I

II

III

Hal AmickHal Amick

Page 19: Vibration Control - Outline - Acentech · 1 Vibration Control Eric E. Ungar, Sc.D., PE Acentech Incorporated Hal Amick, PE Colin Gordon & Associates Vibration Control - Outline! How

19

One Popular Family of �Generic� Vibration CriteriaOne Popular Family of �Generic� Vibration Criteria

NanotechnologyNanotechnologyCurve ACurve AVCVC--EEBBNBBN--EE3.1 (125)3.1 (125)

Semiconductor Semiconductor PhotolithographyPhotolithographyCurve BCurve BVCVC--DDBBNBBN--DD6.3 (250)6.3 (250)

Curve CCurve CVCVC--CCBBNBBN--CC12.5 (500)12.5 (500)

NonNon--Photo Photo SemiconductorSemiconductorCurve DCurve DVCVC--BBBBNBBN--BB25 (1000)25 (1000)

�Generic� lab�Generic� labCurve ECurve EVCVC--AABBNBBN--AA50 (2000)50 (2000)

Surgical suitesSurgical suitesCurve FCurve F100 (4000)100 (4000)

Typical Typical Application*Application*

ASHRAE ASHRAE designationdesignation

IEST IEST designationdesignation

Old BBN Old BBN designationdesignation

1/3 O.B. 1/3 O.B. Amplitude,Amplitude,

µµm/s (m/s (µµin/s)in/s)

* See references cited at end

for detailed recommendations

* See references cited at end

for detailed recommendations

Hal AmickHal Amick

Compare Relevant Generic Vibration CriteriaCompare Relevant Generic Vibration Criteria

0.1

1

10

100

1000

1 10 100

Frequency, Hz

rms

Velo

city

, µm

/s

OfficeVC-AVC-BVC-DVC-ENIST-ANIST-A1

Hal AmickHal Amick

Page 20: Vibration Control - Outline - Acentech · 1 Vibration Control Eric E. Ungar, Sc.D., PE Acentech Incorporated Hal Amick, PE Colin Gordon & Associates Vibration Control - Outline! How

20

SummarySummary

!! Vibration MeasurementsVibration MeasurementsEquipment and data processingEquipment and data processingTypical dataTypical data

!! Determining Vibration SensitivityDetermining Vibration SensitivityExample: MicroscopeExample: MicroscopeExample of good manufacturer�s specificationExample of good manufacturer�s specification

!! Generic Vibration CriteriaGeneric Vibration CriteriaOriginal �BBN� criteria by Ungar and GordonOriginal �BBN� criteria by Ungar and GordonModification proposed by Ungar et alModification proposed by Ungar et alCriteria from NIST AML projectCriteria from NIST AML project

!! Compared Generic Criteria with some Manufacturers� SpecsCompared Generic Criteria with some Manufacturers� Specs

Hal AmickHal Amick

Questions? . . . .Questions? . . . .