VGScienta Pressure Measurement

397

Item Page

Introduction to Pressure Measurement .................................... 398

Pirani Gauge Range ......................................................................... 399

Pirani Principles of Operation ..................................................... 399

Pirani Gauge Heads ........................................................................ 400

Ion Gauges ........................................................................................ 402

Ion Gauge Principles of Operation ............................................. 402

Ion Gauge Heads ............................................................................. 403

Ion Gauge Heads - Spares and Accessories ............................. 404

Ion Gauge Connection Leads ...................................................... 405

IGC3 Ion Gauge and Process Vacuum Controller ................. 406

Wide Range Pressure Measurement .......................................... 410

Pressure Measurement

398 www.vgscienta.com

PressureMeasurement

Pressure Measurement

IntroductiontoPressureMeasurementVacuum pressure measurement is broadly divid-ed into two categories: high and low vacuum. Many of the different techniques used to meas-ure these categories have an overlap at some point in the pressure range. By combining several different types of gauge it is possible measure system pressure from 10 mbar down to 10-11 mbar.

For measuring in the low vacuum range (30 mbar to 10-3 mbar) we offer a range of Pirani gauges; for pressures below this (10-3 mbar to 10-11

mbar) we offer a range of ionisation gauges.

VG Scienta offers both types of gauges in various options, along with a high performance gauge controller. However, for the user who requires a more basic configuration, a low cost alternative gauge and controller is available. This offers vacuum pressure measurement in the range 1000 mbar to 10-10 mbar.

399www.vgscienta.com

PressureMeasurement

Pirani Gauge Range

IntroductiontothePiraniGaugeRangeThe Pirani gauge is a roughing pressure vacuum gauge. It uses the thermal conductivity of gases to measure pressure. VG Scienta has two dif-ferent types of Pirani gauge measuring slightly different pressure ranges; they are both available in a variety of styles with a range of mounting flanges.

PrinciplesofOperationThe Pirani gauge head is based around a heated wire placed in a vacuum system, the electrical resistance of the wire being proportional to its temperature.

At atmospheric pressure, gas molecules collide with the wire and remove heat energy from it (effectively cooling the wire). As gas molecules are removed (when the system is pumped down) there are less molecules and therefore less col-lisions. Fewer collisions mean that less heat is removed from the wire and so it heats up. As it heats up, its electrical resistance increases. A sim-ple circuit utilising the wire detects the change in resistance and, once calibrated, can directly correlate the relationship between pressure and resistance.

This effect only works in the pressure region from atmosphere to approx 10-3 mbar. Therefore other types of gauge have to be used to measure pressures lower than this.

The VG Scienta range of Pirani gauges is divid-ed into two types: constant current, and constant resistance. The name refers to how the electrical measurement of the wire is controlled.

The constant current type has a power sup-ply that gives a constant current all the time to the filament. Therefore the filament resistance changes are measured.

The constant resistance type has a power sup-ply that changes the current supplied to keep the resistance of the filament the same. It has a slightly larger pressure range but requires more complicated electronics to control it.


PressureMeasurement

Pirani Gauge Heads

IMPORTANTPRODUCTINFORMATION

The head control electronics are mounted directly on top of the Pirani head in the non-bakeable versions. The electronics are located at the end of a bakeable lead assembly in the case of the bakeable heads. These electronics are NOT bakeable and must be mounted away from all heat sources.

The Pirani gauge range is divided into the con-stant current and constant resistance types; these are listed on the next page. They are also classi-fied by the controllers that will operate them.

ZPVGM5KF

ZPVG92

ZPVGM2

All dimensions in mm.


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Pirani Gauge Heads

PiraniGaugeHeads

FlangeOD Bakeout Connector Pressure Dimension Control mm inch Temperature,°C Detail mbar A Unit OrderCode KF10 50 DIN 3 to 1x10-3 93 mm IPGC2(1) ZPVGM5KF

34 1.33 250 DIN 3 to 1x10-3 117 mm IPGC2(1) ZPVGM92

70 2.75 250 DIN 3 to 1x10-3 117 mm IPGC2(1) ZPVGM2

KF10 50 4 Flat Pin 3 to 1x10-3 93 mm IGC/PIR1(2) ZPVG5KF

34 1.33 250 4 Flat Pin 3 to 1x10-3 117 mm IGC/PIR1(2) ZPVG92

70 2.75 250 4 Flat Pin 3 to 1x10-3 117 mm IGC/PIR1(2) ZPVG2

Adaptor to convert from KF10 to Edwards ½" union fitting ZPVGEKF

KF10 50 Mini DIN 3 to 1x10-3 93 mm IGC3(3) ZPVGI5KF

34 1.33 250 Mini DIN 3 to 1x10-3 117 mm IGC3(3) ZPVGI92

70 2.75 250 Mini DIN 3 to 1x10-3 117 mm IGC3(3) ZPVGI2

(1) If Pirani is run with another type of controller, full pressure range may not be possible. (2) Controller is no longer available, included for information only.(3) Full specifications for the IGC3 controller can be found on pages 406 to 409.

SpareandAccessoriesforPiraniGaugeHeads

GaugeHead Sealing Mounting OrderCode KF10toEdwards½"inch Gasket Kit ZPVGM5KF ZPVGEKF ZKK10VCS ZKKF16CA

ZPVGM92 - ZCU19 ZM4B20

ZPVGM2 - ZCU38 ZM6B35

ZPVG5KF ZPVGEKF ZKK10VCS ZKKF16CA

ZPVG92 - ZCU19 ZM4B20

ZPVG2 - ZCU38 ZM6B35

ZPVGI5KF ZPVGEKF ZKK10VCS ZKKF16CA

ZPVGI92 - ZCU19 ZM4B20

ZPVGI2 - ZCU38 ZM6B35


PressureMeasurement

Ion Gauges

IntroductiontoIonGaugesWhen operating below the Pirani gauge range, an ion gauge can be used to measure pressure. There are a range of gauge heads and filament materials to cover specific pressure ranges and vacuum requirements in this region.

The VG Scienta ion gauge heads all operate using the same principle. Subtle differences in design and construction determine the pressure range and robustness of the different gauges.

PrinciplesofOperationThe ion gauge consists of three distinct parts; the filament, the grid, and the collector. The filament produces electrons by thermonic emis-sion. A positive charge on the grid attracts the

electrons away from the filament; they circulate around the grid passing through the fine struc-ture many times until eventually they collide with the grid. Gas molecules inside the grid may col-lide with circulating electrons. The collision can result in the gas molecule being ionised. The col-lector inside the grid is negatively charged and attracts these positively charged ions. Likewise they are repelled from the positive grid at the same time. The number of ions collected by the collector is directly proportional to the number of molecules inside the vacuum system. By this method, measuring the collected ion current gives a direct reading of the pressure.

The above is a simplification of what happens. The design of the gauge head affects how effi-ciently electrons are produced, how long they survive, and how likely they are to collide with a molecule. These factors combine together to result in the gauge sensitivity. As a general rule, the higher the sensitivity, the more efficient the operation of the gauge.

There are other factors which determine the lowest pressure that a gauge head can measure. One of these limiting factors is the X-ray limit. When an electron collides with the grid, there is a probability of a photoelectron being pro-duced. Once generated, there is also a chance that the photoelectron will hit the collector and produce an electron. Unfortunately, the collector does not know the electrical difference between collecting a positive charge or losing a negative charge. This means that every time an electron is knocked off the collector, the electronics meas-ure it as receiving a positive ion instead. This effect is very small and depends on the design of the gauge head. It normally generates a current measured in the picoamp range. At 10-10 to 10-11 mbar, however, this is also the current produced by the gauge head itself. If pressure is plotted against current, the graph can be seen to tail off as this X-ray current becomes the dominant effect. The X-ray current therefore limits the lowest pressure that the ion gauge can measure.


PressureMeasurement

Ion Gauge Heads (VIG2x and VIG1x Series)

IonGaugeHeadsWe have two ranges of gauge heads, the VIG1x and the VIG2x series. They are distinct from one another and cover different pressure ranges. The heads are all listed in the table below.

VIG2xSeriesThe VIG2x series of heads (VIG22 and VIG24) use the same construction; they only differ by filament materials used. The construction of the gauge is a ceramic feedthrough base with a high-ly insulated collector pin (remember that you are trying to measure very low currents). The grid is made from very thin molybdenum. It is made to be as large as possible (to maximise the volume for possible electron to molecule collisions) but also to have a very small surface area (to minimise the chance of electrons colliding with, and being collected by, the grid). This design ensures that the electrons stay out in the field as long as possible before being collected. The collector wire is made from very thin tungsten to minimise the risk of x-ray formation whilst still allowing the collection of positive ions.

VIG1xSeriesThe VIG1x series of heads (VIG17 and VIG18) have the same construction as the VIG22 series. Again a ceramic feedthrough base is used but with an even more highly insulated collector pin than the 2x series. The grid is made from very thin molybdenum and is made to be as large as possible (to maximise area of possible electron/molecule collision volume) but also to have an even smaller surface area than the 22 series (to minimise the chance of electrons being col-lected by the grid). The grid also has a top and bottom which ensures that the field produced is as uniform as possible (no end effects). The collector wire is even thinner tungsten to further minimise the risk of x-ray formation whilst still allowing the collection of positive ions.

(1) Number in brackets is maximum temperature attainable whilst connected to appropriate bakeable lead assembly.(2) W = tungsten, Th Ir = thoriated iridium.

VIG2x series ion gauge head.

VIG1x series ion gauge head.

Note: all ion gauges require a minimum port inside diameter of 35 mm.

VIGSeriesIonGauges

Gauge X-rayFlangeOD Bakeout Filament Sensi- Pressure Limit Dimensionsinmmmm inch Temp(1),°C Materials(2) tivity Rangembar inmbar A B C D E F G H OrderCode 70 2.75 400 (250) 2 x W 19 10-3 to 10-11 3 x 10-11 83 28 35 24 16 34 70 34 ZVIG17

70 2.75 400 (250) 2 x Th Ir 19 10-3 to 10-11 3 x 10-11 83 28 35 24 16 34 70 34 ZVIG18

70 2.75 400 (250) 2 x W 17 10-3 to 10-10 3 x 10-10 72 28 35 21 14 34 70 34 ZVIG22

70 2.75 400 (250) 2 x Th Ir 17 10-3 to 10-10 3 x 10-10 72 28 35 21 14 34 70 34 ZVIG24


PressureMeasurement

Ion Gauge Heads - Spares and Accessories

has a lower work function (it is very efficient at releasing electrons by thermionic emission), which means that it runs at a lower temperature than tungsten to release the same number of ionising electrons. This means that less CO and CO2 is produced, less molecular cracking takes place, and the filament can survive exposure to air whilst hot (for a short period!).

TungstenFilamentsTungsten has the ability to take a lot of power; this meant that in the days of dirty vacuum sys-tems (untrapped diffusion pumps etc.) the gauge heads could be degassed at powers of up to 100 watts to remove oil contamination. Tungsten has the disadvantage of becoming very brittle (due to crystal growth) when it is heated, which means that it is easily broken by vibration. In addition it will instantly oxidise if let up to air whilst hot. The hot filament also generates CO and CO2 inside the vacuum system and causes larger gas molecules to be split into fragments.

IonGaugeHeads-SparesandAccessories

GaugeHead BakeableLeadAssembly(2) Non-BakeableLeadAssembly(2) Order Spare IGC IGCI1+2 Varian IGC IGCI1+2 Varian Code Filaments Series Series Multigauge Series Series Multigauge ZVIG17 ZWW17 ZLIGB3 ZIPGB3 ZMGLIGB3 ZLIGNB3 ZIPGC204 (4m) ZMGLIGN3

ZVIG18 ZTIR23 ZLIGB3 ZIPGB3 ZMGLIGB3 ZLIGNB3 ZIPGC204 (4m) ZMGLIGN3

ZVIG22 ZWW17 ZLIGB3 ZIPGB3 ZMGLIGB3 ZLIGNB3 ZIPGC204 (4m) ZMGLIGN3

ZVIG24 ZTIR23 ZLIGB3 ZIPGB3 ZMGLIGB3 ZLIGNB3 ZIPGC204 (4m) ZMGLIGN3

EarlierSeriesIonGaugeHeads

ZHWW ZWW17 - - - - - -

ZVIG10 ZWW17 - - - - - -

ZVIG10A(1) ZWW17 - - - - - -

ZVIG20(1) ZWW - - - - - -

ZVIG21(1) ZTTCIR - - - - - -

ZVIG30(1) - - - - - - -

ZVIG23(1) ZWIR23 ZLIGB3 ZIPGB3 ZMGLIGB3 ZLIGNB3 ZIPGC204 (4m) ZMGLIGN3

ZVIG17M(1) ZWW17 ZLIGMB3 - - - - -

ZVIG18M(1) ZTIR23 ZLIGMB3 - - - - -

ZVIG24M(1) ZTIR23 ZLIGMB3 - - - - -

ZVIG8 ZIR23 - - - ZLIG8NB3 ZIPGC803 ZMGLG8N3

ZVIG8KF ZIR23 - - - ZLIG8NB3 ZIPGC803 ZMGLG8N3

(1) These gauge heads are no longer available and are included for reference only.(2) All leads are 3 metre lengths as standard unless otherwise indicated.


Thoriated iridium must not be degassed at more than 30 Watts power as the thoria coating may evaporate.Thoria dust must not be inhaled.

There are two kinds of filament material that VG Scienta use: tungsten and thoriated iridium. They both have different properties that make them useful as filament materials.

The current ion gauge heads (and some of the obsolete ones) have a number of spares and accessories available; these include items such as spare filament and connector leads.

ThoriatedIridiumFilamentsThoriated iridium filaments are based on an irid-ium wire coated with a thin thoria coating. This


PressureMeasurement

Ion Gauge Connection Leads

A lead is required to connect an ion gauge head to a controller. Leads are available in both bakeable and non-bakeable materials. The advantage of a bakeable lead is that the gauge can still be operated (and pressure monitored) whilst the system is being baked (as long as it does not exceed the tempera-ture limit of the lead). It also means that the gauge head can be degassed whilst the system is still hot.

Our standard lead length is 3 metres; we make spe-cial length leads of up to 10 metres (the longest we recommend that you use). For further information please contact our Technical Service Department or your local representative with details of your requirements.

IonGaugeConnectionsLeads

SpareIon Controller GaugeHead Bakeout Length GaugeHeads Type Connector Temperature,°C inm OrderCode ZVIG17, 18, 22 and 24 IGC3 ZVIGSK 250 1 ZIPGB1 ZVIG17, 18, 22 and 24 IGC3 ZVIGSK 250 2 ZIPGB2 ZVIG17, 18, 22 and 24 IGC3 ZVIGSK 250 3 ZIPGB3 ZVIG17, 18, 22 and 24 IGC3 ZVIGSK 250 5 ZIPGB5 ZVIG17, 18, 22 and 24 IGC3 ZVIGSK 250 10 ZIPGB10 ZVIG17, 18, 22 and 24 IPGC Series ZVIGSK 250 3 ZIPGB3 ZVIG17, 18, 22 and 24 IPGC Series ZVIGSK 250 5 ZIPGB5

ZVIG17, 18, 22 and 24 IGC Series ZVIGSK 250 3 ZLIGB3

ZVIG17, 18, 22 and 24 IGC Series ZVIGSK 250 5 ZLIGB5

ZVIG17, 18, 22 and 24 IGC-M Series ZVIGSK 250 3 ZLIGMB3

ZIPGB3.ZLIGB3.

Standard DIN and mini DIN.


The picture to the left depicts the two standard 3 pin plugs. The older style controllers have the larger size 3 pin plug on the left of the picture, the new ZIGC controllers are fitted with the smaller 3 pin plug as standard, to the right of the picture. For more informa-tion on cabling and interconnects please don't hesitate to contact our Technical Support Department.


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IGC3 Ion Gauge and Process Vacuum Controller

IntroductiontotheIGC3IonGaugeController• Precision HV/UHV ion gauge controller• Pump down/vent control• Multi-step bakeout control• Timer function (e.g. TSP)• Intelligent analogue output• 7 trips and 2 digital inputs• Full process interlocking• 19 inch, 1U format

The VG Scienta IGC3 ion gauge-based process vacuum controller combines the functionality of several vacuum system controllers into a single easy to use unit, reducing hardware, wiring and cost.

The IGC3 combines the latest microprocessor technology with simple, well-established ion gauge power supply design to ensure ease of use, stability and reliability.

ElectricalandMechanicalThe IGC3 is housed in a 1U 19 inch rack mount-ing unit making for simple mechanical installa-tion. All electrical connections are via standard plugs and sockets.

• 1U 19 inch rack mounting• Bright VFD display• User-defined unit naming for ease of identification• Intuitive five button touch panel interface

sets all parameters• Universal QM ion gauge connector• Digital I/O via standard male DB25 connector• Analogue output via standard mini-jack connector• RS232/485 serial communications via two

standard RJ45 connector simplifies daisychaining

The IGC3 controller is suitable for all HV/UHV ion gauges.

• Emission current settings of 0.1, 0.2, 0.5, 1, 2, 5 and 10 mA (user definable min/max) Auto-range mode automatically selects appropriate emission for pressure range

• Seven degas levels between 1 and 30 W (nominal)

• User set ramp/soak degas programme• Sensitivity 1.0 – 99.0• Supports two filaments; tungsten and thoriated iridium• User-defined filter response

TripOutputs• Four change-over relays: 1 A @ 24 VDC/

0.5A @ 115 VAC• Three open collector outputs: 150 mA @

24 V• Assignable to any IGC3 function including:

ion gauge, bakeout, timer etc., or communications driven (e.g. valve)


PressureMeasurement


OptionSlotsIGC3 is has two user-configurable option slots which can accommodate:

• Pirani boards: monitor backing pressure. supports system pump-down

• Type K thermocouple amplifier: supports on/off system bakeout control with

integrated pressure and external interlocking

TwoDigitalInputs• Two opto-isolated digital inputs• Provides user-defined external interlock protection of ion gauge, bakeout, pump-down etc.

PumpDown• Pump down a system to user-defined

parameters; auto start of ion gauge with up to nine attempts

• Vent ion gauge protection

Bakeout• Ramped temperature control of heaters for

gentle bakeout heating/cooling• Up to six ramp/soak steps of up to 99.9

hours each• Fully pressure and interlock protected

Timer• Timed operation of external devices (e.g. sublimation pump)• Pressure and interlock protected

AnalogueOutput• Sensitivity and emission corrected• User-definable voltage output range; can be

configured for inverted operation• User-defined pressure range; ideal for pressure/flux monitoring where output can

be tailored to match the range of interest

(1) Pirani head includes cable.

GaugesandAccessoriesfortheIGC3Controller

PiraniGaugeHeads(1)(bakeout) IonGaugeHeads BakeableLeadsLength ZPVGI5KF (50 ºC) VIG17 ZIPGB1 (1 m)

ZPVGI92 (250 ºC) VIG18 ZIPGB2 (2 m)

ZPVGI2 (250 ºC) VIG22 ZIPGB3 (3 m)

VIG24 ZIPGB5 (5 m)

ZIPGB10 (10 m)

CommunicationAll aspects of IGC3 can be controlled manually from the front panel or using serial communica-tions (e.g. from process control software).

• Native MODBUS protocol allows full floating point resolution data transfer.

Grouping of frequently needed and related parameters together provides optimised data throughput

• Enhanced MODBUS allows data to be written to, and read from, the unit in a single

data message, doubling data throughput• Multi-drop RS232 and RS485 interfaces as standard. Up to sixteen IGC3s using

RS485. Up to eight IGC3s running from a standard PC port using the multi-drop

IGC3 basic dimensions (mm).


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NOTE: You can only add up to a total of two boards, but in any combination


We can provide UK, USA and European style mains power leads. This determines the style of mains plug. Please specify which type you require when ordering.

IGC3ControllerItem Notes OrderCode Controller NB: will only run one ion gauge 110/120 VAC or 220/240 VAC ZIGC3

Add-onInternalBoard

Item Notes OrderCode

Bakeout Thermocouple Board ‘K’ Type only ZIGMTC

Pirani Board With DIN conversion cable ZIGMPVG

IGC3Controllers-LeadsandGauges IonGaugeLeads OrderCode 1 m Ion Gauge Lead Fully Bakeable ZIPGB1

2 m Ion Gauge Lead Fully Bakeable ZIPGB2




IonGaugeHeads Ion Gauge Closed Grid / Tungsten Filament ZVIG17

Ion Gauge Closed Grid / Iridium Filament ZVIG18

Ion Gauge Open Grid / Tungsten Filament ZVIG22

Ion Gauge Open Grid / Iridium Filament ZVIG24

PiraniGaugeLeads Pirani Gauge KF10 Flange Bakeable to 50 ºC ZPVGI5KF

Pirani Gauge 34mm OD CF Flange Bakeable to 250 ºC ZPVGI92

Pirani Gauge 70mm OD CF Flange Bakeable to 250 ºC ZPVGI2

IGC3Controllers-SparesandAccessoriesItem Notes OrderCode Accessory Pack: Connectors and Fuses One set supplied with ZIGC3 ZIGMACC

Pirani Conversion Lead For Mini DIN on ZIGMPVG to large 5 ZIGMPCAB Pin DIN on Pirani Head Lead Note: These are supplied with the ZIGMPVG

Spare Filaments for Ion Gauges Thoria Coated 1 Set for ZVIG18 and 24 ZTIR23

Spare Filaments for Ion Gauges Tungsten 2 Sets for ZVIG17 and 22 ZWW1

DB25 to Screw Terminal Converter Converts the trip/digital input connector ZIGDB25C for solder free wiring


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IGC3Controller-CommunicationCablesCable OrderCode RS232 Communications cable from PC to first ZIGC3 in a daisy chain DB9 PC serial connector, 3m long ZIGDBC09

DB25 PC serial connector, 3m long ZIGDB25C

1m long daisy chain cable ZIGDCC01

3m long daisy chain cable ZIGDCC03


IGC3Controller-SoftwareSoftwarePackage OrderCodeVACIG for Windows XP and above ZIGVACXP

Communications Documentation Pack ZIGCOMDP

Win32 DLL with Header parameter values and MODBUS data string ZIGWIN32

CommunicationCablesUp to eight ZIGC3's can be controlled directly from each PC serial port. These options provide cabling from the PC to the first ZIGC3, and between ZIGC3 for daisy-chaining purposes.

IGC3Controller-Thermocouples Item OrderCode 5 m Thermocouple ZIGTCC05

10 m Thermocouple ZIGTCC10


Please see the questionnaire on our website for a step-by-step guide to configuring and ordering your IGC3.

VACSup:DevelopersSoftwareSupportZIGC3 permits full control monitoring using industry-standard MODBUS protocol over multi-drop RS232 or RS485 buses. A range of facilities to help the user to implement their own communications package, or integrate ZIGC3 support into existing packages

VACTool:SoftwareConfiguration/DataMonitoringToolThis stand-alone Win32 programme allows any number of ZIGC3's to be controlled and moni-tored from the PC. Features include: access to all parameters, parameter file sets for ZIGC3 configuration, monitoring and logging of all data with graphical callback.

ThermocoupleforBake-outModuleTwo metre length of bakeable (350 ºC) type K thermocouple terminating in a washer with a 6 mm diameters hole. Non-bakeable section 3 or 8 m long terminated with thermocouple module connector.

IGC3Software


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Wide Range Pressure Measurement

IntroductiontotheWideRangeGaugeVG Scienta wide range gauge display control unit is designed for use with the ZPGSH and ZPGSU standard version wide range gauges, and the ZPGCH compact version wide range gauge (see page 411). The display unit is capable of being rack mounted. The display unit will allow continuous pressure measurement from atmosphere to UHV, control the degas of gaug-es and has up to six setpoints available.

WideRangeGaugeDisplayandControlUnit

OrderCode

Rack Mounted Display Unit, 110 VAC Version ZWPGC110

Rack Mounted Display Unit, 220 VAC Version ZWPGC220

DisplayandControlSystemMeasuring Accuracy ±25 % (10 to 10-2 mbar) ±15 % (10-2 to 10-8 mbar)Analogue Signal 0 to 10 V logarithmic: U= 0.625 V x log (p/10-12 mbar)Operating Voltage 24V DC +/- 10 %Current Normal operation 0.4 A max, 0.9 A degas maxInput Power Normal operation 10 W max, 22 W degas maxCathode Material Yttria-coated iridiumEmission Current 25 µA and 2 mA: degassing 20 mAGrid Potential 240 V, 400 V degasAmbient Temp 40 ºC maxSetpoint One set point available

SpecificationandOptionsLine Voltage 230 or 115 VAC (switchable by voltage selector on main input) Fuses Slow-blow fuses of 250 mA (230 V)/500 mA (115 V)Outputs Analogue pressure signal of the connected wide range gauge Relay output (24 V/1 A max)Weight 1.5 kgSize 128 mm x 142 mm x 170 mm (H x W x D)


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Wide Range Gauge Heads

WideRangeGaugeHeadsCFFlangeVersion• Measuring Range Standard 1000-10-10 mbar

Compact 1000-10-10 mbar• Bakeout Temperature Standard 250 ºC on the front flange Compact 180 ºC on the front flange• Replacement filaments available• Housing tube changeable

KFFlangeVersion• Measuring Range Standard 1000-10-8 mbar Compact 1000-10-8 mbar• Bakeout Temperature Standard 180 ºC on the front flange Compact 180 ºC on the front flange• Replacement filaments • Housing tube changeable

VG Scienta provides a number of complete gauging packages that include all the compo-nents necessary to install and operate the wide range gauge system (control, gauge head and cable). These are shown in the tables below.

KF version.

Conflat version.

WideRangeGaugeSets

MountingFlange Description OrderCode KF 25 HV Gauge Set, 220 VAC, with ZPGCH25K Head ZWPGHCC

70 mm OD Conflat UHV Gauge Set, 220 VAC, with ZPGSU2C Head ZWPGUCC

KF 25 HV Gauge Set, 110 VAC, with ZPGCH25K Head ZWPGHCCL

70 mm OD Conflat UHV Gauge Set, 110 VAC, with ZPGSU2C Head ZWPGUCCL

WideRangeGaugeHead-StandardVersionDescription OrderCode Standard Wide Range Gauge Head with a KF40 Mounting Flange ZPGSH40K

Standard Wide Range Gauge Head with a KF25 Mounting Flange ZPGSH25K

Standard Wide Range Gauge Head with a 70 mm OD Conflat Mounting Flange ZPGSU2C

Standard Replacement Twin Yttria coated Iridium Filaments for the ZPGSH40K, ZPGSH25K and ZPGSH2C Wide Range Standard Gauge Heads ZPGSF

WideRangeGaugeHeads-CompactVersionWide range compact disposable gauge head is fitted with non-replaceable twin yttria coated iridium filaments, and is mounted on to a KF25 flange. The wide range compact disposable gauge head will allow continuous pressure moni-toring from atmospheric pressure to 10-9 mbar.

WideRangeGaugeHeads-StandardVersionWide range standard gauge head is fitted with replaceable twin yttria coated iridium filaments, mounted to flanges either Conflat or Klein flanges. The wide range standard gauge head will allow continuous pressure monitoring from atmospheric pressure to 10-11 mbar.

WideRangeGaugeHead-CompactVersionDescription OrderCode Compact Wide Range Disposable Gauge Head with a KF25 Mounting Flange ZPGCH25K


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Wide Range Gauge Controller

NonBakeableCablesThese cables are designed for use with the dis-play/control units and either the compact or the standard version gauge heads. They range in length from 3 metres to 10 metres and are com-plete with all the necessary connectors.

WideRangeGauge-Non-bakeableCables

CableLength Description OrderCode 3 metres For use between ZWPGC110 or ZWPGC220, (standard or compact range) ZPGCC3

5 metres For use between ZWPGC110 or ZWPGC220, (standard or compact range) ZPGCC5



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VGScienta Pressure Measurement