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VDM300 DI Water Vapor Delivery ModuleThe VDM300 provides highly accurate delivery of ultra-high-purity deionized (DI) water vapor. For key photoresist strip and post-metal-etch processes, the VDM300 reduces process variability through accurate and repeatable water vapor fl ow delivery; in addition, it offers a wider control range and quicker control time.
• ±1% S.P. fl ow accuracy for precise and repeatable vapor delivery
• Widest fl ow control range enables greater process recipe fl exibility
• Decreases the chance of non-volatile contaminants in DI Water being transmitted into the water vapor
For more technical information and application support, visit our website.
Key Features
Highest Flow Accuracy• Industry-leading vapor delivery accuracy
• Up to thirty times more accurate than other systems
• Uses same signal processing & calibration techniques as Brooks GF100 Series MFCs
Connectivity• Meets ETG & SEMI EtherCAT
protocol specifi cations
• Enables high-speed real-time control and advanced diagnostics
• Future-proofs your systems as industry expands EtherCAT use
ER
RO
R %
SP
Set Point (Nominal)
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0 0.1 0.10.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1
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-30
VDM300 B12VDM300 B14VDM300 B15VDM300 + SpecVDM300 - SpecVODM + SpecVODM - Spec
User-Friendly BEST Software• Intuitive graphical user interface
• Easily change mode of operation, specifi c attributes & log data
• Enhances data collection and troubleshooting
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— Flow Setpoint (% of FS)— Flow (% of FS)— Value Current (mA)— Temperature (C)
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— Flow Setpoint (% of FS)— Flow (% of FS)— Value Current (mA)— Temperature (C)
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— Flow Setpoint (% of FS)— Flow (% of FS)— Value Current (mA)— Temperature (C)
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— Flow Setpoint (% of FS)— Flow (% of FS)— Value Current (mA)— Temperature (C)
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