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Vacuum Symposium is now in its 6 th year (VS6). Although Vacuum Symposium UK is an independent body we are grateful for the continued support from the IOP, BVC and our Industrial sponsors. Over the last 6 years the aim of Vacuum Symposium UK has been exactly the same model as the RGA User Group Meetings, but embraces a wider cross-section of vacuum users: regular ‘free to attend’ meetings that allow interaction between academics, industrial users and manufacturers. Vacuum Symposium provides a series of Technical Meetings, Poster Sessions, Vacuum Training and this year we are proud to be presenting the 1 st Harry Leck Memorial Medal. We continue to grow our Technical Meetings through the support of Meeting Organisers who provide a full day of oral presentations that cover various topics/applications and are delivered by leading scientists, invited speakers and users with practical and extensive knowledge. Our Training Courses are well attended; the courses are given by trainers chosen by the Vacuum Symposium Committee with attendees receiving a certificate of attendance. The Poster Session has grown alongside our Technical Meetings, and a Vacuum Poster Prize is awarded each day and is open to all attendees and exhibitors. I would like to take this opportunity to welcome you all to VS6 and to thank all the Sponsors and supporters of Vacuum Symposium. I also feel it appropriate to thank all on the Vacuum Symposium Committee for their hard work and support over the year. I take great pleasure in working with them and seeing our shared vision going from strength to strength. Robin Hathaway

Vacuum Symposium is now in its 6 th year (VS6). Although … · ionization (DAPCI) has been developed and deployed for the analysis of residual nitroaromatic explosives on surfaces

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Page 1: Vacuum Symposium is now in its 6 th year (VS6). Although … · ionization (DAPCI) has been developed and deployed for the analysis of residual nitroaromatic explosives on surfaces

Vacuum Symposium is now in its 6th year (VS6).

Although Vacuum Symposium UK is an independent body we are grateful for the continued support from the IOP, BVC and our Industrial sponsors.

Over the last 6 years the aim of Vacuum Symposium UK has been exactly the same model as the RGA User Group Meetings, but embraces a wider cross-section of vacuum users: regular ‘free to attend’ meetings that allow interaction between academics, industrial users and manufacturers.

Vacuum Symposium provides a series of Technical Meetings, Poster Sessions, Vacuum Training and this year we are proud to be presenting the 1st Harry Leck Memorial Medal.

We continue to grow our Technical Meetings through the support of Meeting Organisers who provide a full day of oral presentations that cover various topics/applications and are delivered by leading scientists, invited speakers and users with practical and extensive knowledge.

Our Training Courses are well attended; the courses are given by trainers chosen by the Vacuum Symposium Committee with attendees receiving a certificate of attendance.

The Poster Session has grown alongside our Technical Meetings, and a Vacuum Poster Prize is awarded each day and is open to all attendees and exhibitors.

I would like to take this opportunity to welcome you all to VS6 and to thank all the Sponsors and supporters of Vacuum Symposium.

I also feel it appropriate to thank all on the Vacuum Symposium Committee for their hard work and support over the year. I take great pleasure in working with them and seeing our shared vision going from strength to strength.

Robin Hathaway

Page 2: Vacuum Symposium is now in its 6 th year (VS6). Although … · ionization (DAPCI) has been developed and deployed for the analysis of residual nitroaromatic explosives on surfaces
Page 3: Vacuum Symposium is now in its 6 th year (VS6). Although … · ionization (DAPCI) has been developed and deployed for the analysis of residual nitroaromatic explosives on surfaces

Functional Thin Films Thursday 15th October 2015 Meeting Agenda 0920 – 0935 Registration and Coffee in Foyer 0935 – 0940 Opening Remarks 0940 – 1010 Invited - Structure and Properties of Transparent Conducting Oxide Semiconductors. Prof. Chris McConville 1010 – 1030 Invited - Deposited Ionic Oxide Semiconductors for Thin Film Transistors and Solar Cells. Dr. Kham Niang 1030 – 1050 Nanoparticle Polymer Composite Thin-Films in the Mid Infrared. Timothy Threadgold 1050 – 1120 Supporting the Research of Graphene and Other Emerging 2D Materials. J. Patrick Frantz 1120 – 1140 Tea/Coffee Break 1140 – 1210 Invited - Titania- and Titanium Nitride- Based Functional Films by Magnetron Sputtering Processes. Prof. Peter Kelly 1210 -1230 Catalytic nanoparticles in solid oxide fuel cells based on triode operation. Dr. Vicky Broadley 1230 – 1250 Creating self-healing moisture barriers by vacuum plasma. Dr. Dermot Monaghan 1250 – 1310 Batch and Roll-to-Roll Atomic Layer Deposition (ALD) processing for ultra-barrier and other applications. Dr. Alf Smith 1310 – 1410 Lunch Break and Poster Sessions – Exhibition Visit

Page 4: Vacuum Symposium is now in its 6 th year (VS6). Although … · ionization (DAPCI) has been developed and deployed for the analysis of residual nitroaromatic explosives on surfaces

Emerging Technologies in Vacuum Science Wednesday 14th October 2015 Meeting Agenda 0920 – 0930 Welcome and Introduction. John Colligon 0930 – 1000 Near-ambient pressure x-ray photoelectron spectroscopy. Joachim Schnadt 1000 – 1030 Analytic microscopy of superconducting materials. Susannah Speller 1030 – 1100 Tea/Coffee in Exhibition area 1100 – 1130 The He spin echo spectrometer and the scanning He atom microscope, Holly Hedgeland 1130 – 1200 UHV atomic force microscopy and development of a new understanding of the atomic resolution AFM imaging of molecules Adam Sweetman 1200 – 1230 In-vacuum realisation of the new definition of the kilogram. Stuart Davidson 1230 – 1400 Exhibition and Lunch Break 1400 – 1430 Phase change material opto-electro-mechanics. Harish Bhaskaran 1430 – 1500 Photocatalytic thin films. Glen West 1500 – 1530 Ultra-high vacuum compatible electrospray ion beam deposition for the deposition of complex, fragile and non- volatile molecules on surfaces in vacuum. James N. O’Shea 1530 - 1535 Symposium ends. Exhibition continues.

Page 5: Vacuum Symposium is now in its 6 th year (VS6). Although … · ionization (DAPCI) has been developed and deployed for the analysis of residual nitroaromatic explosives on surfaces

RGA12 – Advances in Mass Spectrometry Wednesday 14th October 2015 Meeting Agenda 0920 – 0945 Meeting Registration 0945 – 1000 Welcome and Introduction 1000 – 1020 A Hand held ionisation source for ambient RGA. Fred Jjunju 1020 – 1045 Invited - Imaging mass spectrometry. Dr Syed Sarfaraz Uddin 1045 – 1130 Exhibition and Coffee Break 1130 – 1150 Double Deflection and Enhanced Detection-The use of novel ion optics for Metastable Rejection and improved Detection in the low ppb Range. Jonathan Leslie 1150 – 1220 Sensitivity enhancements for atmospheric sampling mass spectroscopy. Dr. Rob Grant 1230 – 1400 Lunch and Exhibition 1400 – 1430 Invited – A low power, novel ion source for RGA. (Session 2) Dr Aurika Janulyte 1430 – 1500 Operating a RGA to obtain top mass spectral peaks. Mariya Juno 1500 – 1505 Meeting closes, Exhibition and prize giving

Page 6: Vacuum Symposium is now in its 6 th year (VS6). Although … · ionization (DAPCI) has been developed and deployed for the analysis of residual nitroaromatic explosives on surfaces

Technologies Plasma Workshop Wednesday 14th October Meeting Agenda

Page 7: Vacuum Symposium is now in its 6 th year (VS6). Although … · ionization (DAPCI) has been developed and deployed for the analysis of residual nitroaromatic explosives on surfaces

Poster Session

Wednesday 14th and Thursday 15th October 2015

Poster sessions will take place on both days of VS6. Everyone attending this year’s event is invited to present a poster which may be on work related to any of this year’s meeting topics or any aspect of vacuum in general. This year the Vacuum Symposium Poster Prizes (£100 and certificate on both days) will be sponsored by Hiden Analytical (Day 1) and Oerlikon Leybold (Day 2). Posters will be judged on the basis of scientific content, effectiveness of communication and overall appearance. Poster prizes will be awarded at 16:00 on Wednesday and 14:30 on Thursday.

Page 8: Vacuum Symposium is now in its 6 th year (VS6). Although … · ionization (DAPCI) has been developed and deployed for the analysis of residual nitroaromatic explosives on surfaces

Training Courses

Wednesday 14th and Thursday 15th October 2015

The purpose of these courses is to present this basic knowledge in a straightforward and accessible way. The principles and practice that are involved in creating and measuring a vacuum will be dealt with and illustrated by worked examples from various applications. Ultra-high vacuum, important in many applications, will be discussed only briefly in courses VTC1 and VTC2, however they will serve as a good introduction to the course “Clean Vacuum & UHV” (VTC3) which addresses the matter of UHV in more detail. VTC4 is a new course – an introduction to leak detection. These courses are aimed at newcomers to the field, those who wish to refresh their knowledge, and those who wish to go further into UHV practicalities. They will be appropriate for new graduate students in physics, chemistry and engineering for whom vacuum techniques will be a working tool. After attending any of these courses participants should be able to analyse the behaviour of their own vacuum systems with increased understanding, and have the basis for evaluating the effectiveness of proposed designs. The material is presented in an informal/tutorial style with an effort to address participants’ needs. A copy of the Training Slides on a CD + a Certificate of Attendance will be provided. The trainers hand these out after the course. Delegates may choose to attend one course, two, or perhaps three; it is not possible to attend all due to overlap.

Page 9: Vacuum Symposium is now in its 6 th year (VS6). Although … · ionization (DAPCI) has been developed and deployed for the analysis of residual nitroaromatic explosives on surfaces

RGA12 – Advances in Mass Spectrometry Wednesday 14th October 2015 Meeting Agenda 1000 – 1045 Session 1 1045– 1130 Tea/Coffee Break and Exhibition 1130 – 1230 Session 2 1230 – 1400 Lunch, Exhibition and Poster Session1400 – 1500 Session 3 RGA 12 will bring together both manufacturers and users of RGA Instruments to discuss advances in techniques and applications for RGA. Steady demand for vacuum systems, as emerging technologies place demand on suppliers (LED, PV, Sensors), continues to drive the development of instrumentation for testing the vacuum environment. RGAs, based on a quadrupole mass spectrometer, are the classic measuring instrument for evaluating for leaks and residual gas composition in a vacuum system. They are used in high vacuum applications such as research chambers, surface science research systems, accelerators, scanning microscopes, microelectronics fab, etc.

Page 10: Vacuum Symposium is now in its 6 th year (VS6). Although … · ionization (DAPCI) has been developed and deployed for the analysis of residual nitroaromatic explosives on surfaces

A Handheld Ionization for RGA

F. P. M. Jjunjua, S. Mahera,, A. Lib, S. U. Syedc, B. Smitha, R. M. A. Heerenc, R. Graham Cooksb, and S. Taylora+ aDepartment of Electrical Engineering and Electronics, University of Liverpool, L69 3GJ, UK bChemistry Department, Purdue University, West Lafayette, IN 47907, USA cM4I, the Maastricht Multi Modal Molecular Imaging Institute, University of Maastricht Universiteitssingel 50 6229 ER Maastricht, The Netherlands +Professor Stephen Taylor; Department of Electrical Engineering and Electronics, University of Liverpool, Brownlow Hill, Liverpool A novel, lightweight (0.6 kg), solvent and gas-cylinder free, handheld ion source based on desorption atmospheric pressure chemical ionization (DAPCI) has been developed and deployed for the analysis of residual nitroaromatic explosives on surfaces in open air, offering portability for in-field analysis for RGA and other applications e.g. security. The handheld ion source is battery and generates both positive and negative in open air at atmospheric pressure. The generated ions are pneumatically transported to the surface to be interrogated by ambient air at a rate of 1 - 3.5 L/min, compressed using a small on-board diaphragm pump. The portable handheld ion source allows liquid or solid samples to be examined almost instantaneously without any sample preparation in the open environment. Advantages of low carrier gas and low power consumption (< 6 W), as well as zero solvent usage have aided in developing the field-ready, handheld device for trigger-based, “near real-time” sampling/ionization.

Page 11: Vacuum Symposium is now in its 6 th year (VS6). Although … · ionization (DAPCI) has been developed and deployed for the analysis of residual nitroaromatic explosives on surfaces

A Position Sensitive Ion Imaging Detector for Performance Enhancement of a Mass Spectrometer Instrument Sarfaraz U. A. H. Syeda,b,d, Dmytri Byelova, Hans R.Poolmana, Stephen Taylorc and Ron M. A. Heerenb,d aAmsterdam Scientific Instruments, Science Park 105, 1098XG Amsterdam, The Netherlands bTI-COAST, Science Park 904, 1098 XH Amsterdam, The Netherlands cDepartment of Electrical Engineering and Electronics, University of Liverpool, Liverpool, L69 3GJ, UK dM4I, The Maastricht MultiModal Molecular Imaging Institute, University of Maastricht, Universiteitssingel 50, 6229 ER Maastricht, The Netherlands

Mass spectrometry (MS) is widely regarded as one of the most sensitive analytical diagnostic tool that can provide detailed information on the molecular composition of the sample under investigation. Attributes of MS such as versatility, accuracy, mass range, and sensitivity have ensured that it has been deployed in a wide range of applications, varying considerably from the modest residual gas analyzer to high-performance mass spectrometer for chemical analysis of simple and complex molecules. The two most important performance parameters of MS are sensitivity and mass resolution. In recent years, there has emerged an increasing trend to make the mass spectrometers with extremely high sensitivity and high mass resolving power in order to increase the range of applications. We present novel results involving the employment of a micro-pixelated position-sensitive ion imaging (Ionpix) detector to different MS instrument such as Time-of-Flight and Quadrupole Mass Spectrometer. Ionpix was able to offer enhanced sensitivity and the ability to enhance mass resolving power via spatial information of mass resolved ion images. Ionpix detector also brings in the capabilities of stigmatic ion imaging when employed with Time-of-flight instrument.

Page 12: Vacuum Symposium is now in its 6 th year (VS6). Although … · ionization (DAPCI) has been developed and deployed for the analysis of residual nitroaromatic explosives on surfaces

Double Deflection and Enhanced Detection-The use of novel ion optics for Metastable Rejection and improved Detection in the low ppb Range.

Jonathan Leslie MKS Instruments, Spectra Products

During electron ionisation in a Quadrupole Mass Spectrometer (QMS), metastable neutrals are produced in addition to positive ions. The ion source in current QMS Residual Gas Analysers (RGA) is coupled with “line of sight” into the mass analyser and detector, conversion of the metastable neutral into an ion and electron can cause increased noise, especially at lower masses. The use of ion optics with novel cylindrical geometries between the ion source and mass analyser, enables a focused beam of ions to be displaced onto a second parallel axis, then back to the original axis. The cylindrical geometry provides good focusing resulting in no loss of signal, combined with a simple and robust mechanical design.

Page 13: Vacuum Symposium is now in its 6 th year (VS6). Although … · ionization (DAPCI) has been developed and deployed for the analysis of residual nitroaromatic explosives on surfaces

Development of a Plasma Based Ion Source for High Sensitivity Atmospheric Sampling QMS Systems

Dr Rob Grant Aurora Technology Consultants Limited, UK

The development path towards a plasma based, high sensitivity ion source for integration with a membrane permeation cell for water vapour transmission rate, WVTR, measurement will be explained. The new source overcomes some of the issues associated with conventional high sensitivity ion sources based on electron impact ionisation and in particular delivers low energy soft ionisation that results in significantly reduced molecular fragmentation, minimal isotopic scrambling of hydrogen isotopes and does not ionise the carrier gas.

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Operating a RGA to Obtain Flat Top Mass Spectrapeaks

M.J Anthony Joseph Department of Electrical Engineering and Electronics, University of Liverpool, UK

High transmission efficiency is advantageous for many mass spectrometry applications including Residual Gas Analysis (RGA). For isotope ratio measurement, high quality flat top peak shapes are desirable to avoid the effect of RF drift (mass drift) during analyses. For the first time a novel three dimensional (3D) quadrupole mass spectrometer (QMS) simulation model was used to find the conditions necessary to optimize QMS transmission efficiency for a range of operating parameters. In addition, the conditions necessary to obtain flat topped mass spectral peaks (with high QMS transmission) were also determined. The theoretical predictions from the 3D model were confirmed by experimental results which show approximate flat top peaks with a single filter QMS. The use of a 3D simulation is important to determine the optimal geometric configuration (ion source aperture and distance to mass filter) for given operating parameters. Simulation results show that optimum ion transmission through a single filter QMS is obtained if the ions spend around 1 cycle (only) of RF voltage in the fringe field region between the ion source and the mass filter. The significance of the work is that it allows QMS transmission efficiency (and hence instrument sensitivity) to be optimized for a given instrument without unduly sacrificing resolution. Key words: Residual Gas Analysis (RGA), Quadrupole mass spectrometer (QMS), Quadrupole mass filter (QMF), Transmission efficiency, Fringe fields, Source gap, Ion source aperture, Flat top peak.

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Functional Thin Films Thursday 15th October 2015 Meeting Agenda 0940 – 1120 Session 1 1120 – 1140 Tea/Coffee Break and Exhibition 1140 – 1310 Session 2 1310 – 1410 Lunch, Exhibition and Poster Session This one-day meeting will bring together scientists and technologists with expertise in the design, development, characterisation and production of functional thin film materials and integrated devices for a broad spectrum ofscientific and industrial applications. The aim being to share knowledge, ideas and experiences. The meeting comprises a programme of invited speakers, oral presentations and a poster session (which will be combined with other meetings for added interest). The programme will allow time for delegates to network with others and to visit the exhibition

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Electronic Structure and Properties of Transparent Conducting Oxide Semiconductors C.F. McConville Department of Physics, University of Warwick, Coventry CV4 7AL UK

Oxide semiconductors have become of great technological interest and importance in recent years with significant opportunities to improve existing materials and device applications. This is particularly true for a sub-group of materials that display both optical transparency and high electrical conductivity, so-called transparent conducting oxides (TCO’s). The fact that some of these materials, such indium tin oxide (ITO), have been around for many years and seen significant industrial use as transparent conductors in a relatively low quality form, has perhaps contributed to the belated recognition of using these materials as semiconductors in their own right to form the active region of a device. However, now it is possible to grow oxide materials with high structural quality by molecular beam epitaxy (MBE) and other growth techniques, examples of the surface and bulk electronic properties of In2O3, CdO and ZnO will be discussed, along with the effects of modifying these surfaces by controlled adsorption. The valence band density of states and the surface electronic properties of these TCO’s have been studied using high-resolution angle-resolved photoemission spectroscopy (ARPES), while core-level photoemission spectroscopy with hard x-rays (HAXPES) is compared with theoretical DFT band structure calculations. A common property of these oxide semiconductors is the presence of an electron accumulation layer at the surface. While this is similar to that found at the surfaces of materials such as InN and In-rich InGaN, it is in marked contrast to the electron depletion typically observed at the surfaces of conventional III-V and II-VI semiconductor materials. More unusual still is the quantized nature of this surface 2D electron gas. The origins of these phenomena will be discussed in terms of the band structure and intrinsic properties of the materials.

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Vacuum Deposited Ionic Oxide Semiconductors for Thin Film Transistors and Solar Cells K. M. Niang, S. Han and A. J. Flewitt Electrical Engineering Division, Department of Engineering, University of Cambridge, 9 JJ Thomson Avenue, Cambridge CB3 0FA, United Kingdom. Amorphous ionic oxide semiconductors have been identified as a promising alternative to hydrogenated amorphous silicon (a-Si:H) for thin film transistors (TFTs) due to their higher carrier mobility and suitability for large-area electronics.1 Various deposition techniques have been employed, such as pulsed laser deposition, sputtering, chemical vapour deposition, atomic layer deposition and low cost low cost sol-gel processing. Among these, vacuum processed technology has been so far the only practical solution for the large area electronics industry.2 Here at the Electronic Devices and Materials group in the Electrical Engineering Department of Cambridge University, we employ vacuum depositions such as High Target Utilization Sputtering (HiTUS)3 and Plasma Enhanced Chemical Vapour Deposition (PECVD). I will present various functional thin films developed for TFTs and solar cell applications, in particular, indium free n-type semiconductor Zinc Tin Oxide and p-type semiconductor Cuprous Oxide using HiTUS. In addition, I will present the ongoing work on other materials such as Zinc Oxynitride, Copper Nitride and previously developed Hafnium Oxide.4 Secondly, I will present the design and installation of a PECVD system dedicated to the deposition of metal oxides. I will discuss the challenges encountered in the growth of metal oxides by CVD with regard to handling of the required organometallic liquid precursors which are often highly volatile and pyrophoric, and compare different liquid delivery systems available today. I will report results on the n-type semiconductor Zinc Oxide and Tin Oxide thin films produced.

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Nanoparticle Polymer Composite Thin-Films in the Mid Infrared Timothy Matthew Threadgold Infrared Multilayer Laboratory, School of Systems Engineering, University of Reading Nanoparticle composites are an emerging class of materials of increasing interest in a diverse range of research areas and products, from sunscreen to super-hydrophobic surfaces. However there are many challenges to designing and creating nanostructured materials for specific purposes and ensuring their functionality; despite this, their potential is attracting wide attention. In this presentation, we describe the results from research performed on metal and metal-oxide nanoparticle thin-films as functional optical materials in the mid infrared. The methods used to simulate the composite materials will be presented, including combining Monte Carlo particle simulation with effective medium approximation to approximate the bulk optical properties. This will include the implementation of the methods as a system design and the limitations of the simulated results. Further, results of the transmission profiles of spin-coated nano composite thin films in the mid infrared (λ = 1-45 µm), and the physical characteristics of these films will be presented.

Page 20: Vacuum Symposium is now in its 6 th year (VS6). Although … · ionization (DAPCI) has been developed and deployed for the analysis of residual nitroaromatic explosives on surfaces

Supporting the Research of Graphene and Other Emerging 2D Materials

J. Patrick FrantzPlanarTECH 10 Wellington Street, Cambridge, CB1 1HW, England

The isolation and characterization of the two-dimensional form of carbon - graphene – at the University of Manchester in 2004 has set off a flurry of academic research (and commercial activity) into both this new material and other emerging “2D” materials, such as hexagonal boron nitride, molybdenum disulfide, and others. These atomically thin materials can demonstrate significantly different properties than in bulk or even thin film form. This talk will introduce these materials and properties at a high-level and introduce how planarTECH enables researchers to advance their work in this space. Recent commercial advances in these materials will also be discussed.

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Titania- and Titanium Nitride- Based Functional Films by Magnetron Sputtering Processes PJ Kelly Surface Engineering Group, Manchester Metropolitan University, Chester Street, Manchester, M1 5GD, UK.

Magnetron sputtering is a versatile technique for the production of high quality coatings and functional films for a wide range of applications. Furthermore, the process is readily scalable from the laboratory to industry. This presentation will describe the production and characterization of a range of titanium-based functional films to demonstrate the flexibility of this technique. Firstly, photocatalytic doped titania coatings will be discussed, which combine ‘self-cleaning’, antimicrobial and hydrophilic properties. The key factors influencing photocatalytic activity are considered and antimicrobial activity against E coli is demonstrated. Coatings doped with tungsten are active only in the light, whereas coatings doped with molybdenum are active in light and dark conditions, demonstrating dual functionality. The ability to deposit active coatings directly onto polymeric substrates in a single stage process through the use of the recently introduced HiPIMS (high power impulse magnetron sputtering) technique is also demonstrated. Following this, nanocomposite titanium nitride coatings doped with silver will be discussed. These coatings, which combine antimicrobial and tribological properties, are targeted for use on pin tracts in external fixation devices. Structurally, the coatings consist of a titanium nitride matrix surrounding silver nanoparticles. The TiN matrix provides high hardness and wear resistance, whilst the Ag nanoparticles are inherently antimicrobial. NBT and zone of inhibition results against common human pathogens are presented. Increasing the silver content increases the antimicrobial efficacy, and tends to reduce sliding wear friction, but also reduces hardness and wear resistance. For both coating types, the key features of the magnetron deposition process will be discussed and their impact on the resulting film properties will be considered.

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Catalytic Nanoparticles in Solid Oxide Fuel Cells based on Triode operation

Vicky Broadley & David Joyce Mantis Deposition Ltd

Fuel cell power plants usually employ fuel reforming methods to convert hydrocarbon fuels into hydrogen. Solid Oxide Fuel Cells (SOFC) provide a means for direct conversion of hydrocarbon fuels into electrical energy which potentially offers significant cost savings but only if the electrode materials can operate for a reasonable length of time under the associated harsh conditions. The European funded consortium, T-CELL, was established to investigate a novel triode architecture for cell and stack design which has been shown [1] to improve the thermodynamic efficiency and power output when a current is supplied to the auxiliary circuit. The concept is a three electrode design where the anode and cathode operate in a conventional SOFC geometry while an auxiliary electrode runs in electrolytic mode. The project also addresses some of the challenges associated with degradation factors in these devices. Although carbon formation is more likely in the Ni-modified electrodes used in this project there are still cost benefits to using these materials. Theoretical studies [2] have shown that the performance of Ni based electrodes can be improved by adding a small amount of gold to a supported catalyst. In addition, sulphur poisoning can be irreversible in SOFC systems operating at intermediate temperatures (typically 700-850C). Again Ni containing materials can be particularly susceptible but utilising the catalytic synergies in Ni-Mo-Au nanoclusters can mitigate the problems. In this paper we describe our work on the growth and characterisation of Ni, Au and Mo alloy nanoparticles formed by inert gas phase condensation. We will discuss how control of the thermodynamics in the nanoparticle

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formation process affects the structure of the particles and what impact they will have on the performance of SOFC devices.

[1] S.P. Balomenou & C.G. Vayenas; Journal of the Electrochemical Society; 151 (11) A1874-A1877 (2004)

[2] F. Besenbacher et al. Science 279 (1998) 1913

* Supported by the EU 7th Framework Program (FP7 / 2007-2013) Fuel Cells and Hydrogen Joint Technology Initiative (T-CELL Project: Grant Number 298300)

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Creating Self-healing Moisture Barriers by Vacuum Plasma V.Bellido-Gonzalez1, B.Daniel1, J. Brindley1, H.Li1, D.P.Monaghan1, I.Fernandez2, A.Wennberg2

1 Gencoa Ltd, Physics Road, Liverpool, L249HP,UK,

2 Nano4energy, C/o Escuela Técnica Superior de Ingenieros Industriales (ETSII-UPM), Instituto de Fusión Nuclear, C/ José Gutiérrez Abascal 2,Madrid 28006, Spain,

There is a strong need to protect current and future thin film devices from the effects of moisture attack from the environment in which they operate. Typically, such barriers are also required to be transparent as part of their functionality. This paper will illustrate a method to create single and multilayer barrier structures that can offer a high degree of protection of the underlying devices. These structures are created by a mixture of vacuum plasma processes – both physical vapour deposition (PVD) and chemical vapour deposition (CVD). The effectiveness of the structures has been assessed by an acid vapour etching of a sacrificial layer to mimic the underlying device. A mode of hybrid PVD/PECVD deposition has been developed that can create a single layer coating structure with enhanced levels of protection normally only associated with multi-layer structures. The key to the effectiveness of a single layer is ability to ‘heal’ itself during deposition so that through layer defects are not present in the structure. This ability has been termed a ‘self-healing’ moisture barrier due to the unusual ability to prevent defects during deposition.

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Batch and Roll-to-Roll Atomic Layer Deposition (ALD) Processing for Ultra-barrier and other Applications

Dr. Alf Smith Centre for Process Innovation (CPI), United Kingdom

CPI has been developing barrier technologies for the last few years and has focused attention on the application of Atomic Layer Deposition (ALD) techniques to it. The novel features of the ALD process (conformality, high density and amorphous structure) at controllable nano-meter thicknesses of the coatings are attractive for the application of barrier coatings on both rigid and flexible substrates. Batch ALD coating of AlOx barrier layers directly onto solar cell devices and also onto polymer films has produced extrinsic (large area) moisture barrier levels of <2x10-5 g/m2/day and intrinsic (barrier material) moisture barrier levels of around 1x10-6 g/m2/day. In addition, CPI is developing roll to roll (R2R) ALD processes using spatial ALD to allow the continuous deposition onto flexible rolls of material at reasonable line speeds. The presentation will cover aspects of this work and the development of the R2R-ALD platform operational at CPI.

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Emerging Technologies in Vacuum Science Wednesday 14th October 2015 Meeting Agenda 0930 – 1030 Session 1 1030 – 1100 Tea/ Coffee Break and Exhibition 1100 – 1230 Session 2 1230 – 1400 Lunch, Exhibition and Poster Sessions 1400 – 1530 Session 3 A vacuum environment is essential for many industrial processes and scientific analysis systems. This meeting aims to highlight some of the more recent developments in surface coating and analysis methods which traditionally require vacuum for their operation. Scientists interested in materials analysis, surface treatment, thin films, nanostructural materials drawn from 5 Institute of Physics groups have put together this programme of speakers who will present papers and join a discussion of some of the newer vacuum-based analysis and processing systems. The proposed new International Standard for the Kilogram may appear to be an unlikely topic for a vacuum meeting but, as it does require a measurement in vacuum, a highly topical paper on this from the National Physical Laboratory is included. Owing to the multi-disciplinary nature of the applications speakers will introduce their work at a fundamental level so that attendees can gain from their knowledge, ideas and experiences. Delegates will learn about some exciting developments in surface analysis techniques, molecular deposition systems, superconductors, photocatalytic surfaces and phase changes in thin films and will also have ample opportunity to network with like minded individuals.

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Near-ambient Pressure X-ray Photoelectron Spectroscopy

Joachim Schnadt Division of Synchrotron Radiation Research, Department of Physics, Lund University, Box 118, 221 00 Lund, Sweden Near-ambient pressure x-ray photoelectron spectroscopy (NAPXPS) is a technique which, while pioneered in the 1970s, has developed rapidly first during the past 15 years. While conventional x-ray photoelectron spectroscopy (XPS) is limited to a vacuum environment of 10-6 mbar or better, technical measures employed in NAPXPS allow to relieve the vacuum constraint and enable XPS measurements in ambient pressures of 1 mbar and more. Hence, XPS experiments can be carried out on samples in realistic or close-to realistic pressures comparable to the water vapour pressure at room temperature. XPS experiments can even be carried out while chemical reactions between a solid and a vapour phase are ongoing, which allows to address surface-bonded reaction intermediates and reaction kinetics. I will give an overview over the technique and then focus on examples from catalysis and atomic layer deposition (ALD) obtained at the at the Swedish synchrotron radiation facility MAX IV Laboratory.

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Analytic Microscopy of Superconducting Materials

Susannah Speller Department of Materials, University of Oxford, Oxford, UK

The unique electronic and magnetic properties of superconducting materials can be exploited in a wide range of both large scale and small scale devices. However, performance of these materials is strongly influenced by the chemistry and microstructure of the superconductor. In the Materials Department in Oxford we focus on improving understanding of the relationships between processing, microstructure and properties of superconductors using a range of advanced analytic microscopy techniques. In this talk I will illustrate our current research using two rather different examples. The first example concerns the development of lead-free superconducting joints for magnet applications, a collaborative project with Siemens Magnet Technology. The second relates to understanding how phase separation in new iron-based superconducting single crystals influences their fundamental properties. Techniques discussed will include advanced analytic electron microscopy, such as high-resolution electron backscatter diffraction, as well as synchrotron-based photoemission microscopy carried out at Diamond Light Source and Elettra Synchrotron.

High-resolution electron backscatter diffraction map of Cs

xFe

2-ySe

2 crystal

Chemical phase map of In-Sn-Bi solder measured using energy dispersive X-ray mapping.

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The He Spin Echo Spectrometer and the Scanning He Atom Microscope Holly Hedgeland University College London, UK Helium spin echo spectroscopy (HeSE) affords us non-intrusive insight into the picosecond surface dynamics of diffusion and vibration, which remains difficult to obtain through more standard experimental approaches. The power of the technique is illustrated by considering the surface diffusion of aromatic molecules through van-der-Waals landscapes, extracting potential energy surfaces and adsorbate-substrate friction coefficients from the trajectories of the molecules, and providing accurate benchmarks for the latest theoretical approaches. Significant advances have also been made in the development of scanning helium microscopy (SHeM) as a tool for the real space imaging of delicate surfaces. A beam of inert helium atoms has long been suggested as a potential tool for delivering uniquely surface sensitive images with atomic resolution and no surface damage, irrespective of the conductivity of the sample; technological barriers have now been overcome by a group based at the University of Cambridge, allowing the delivery of the first generation of functional microscopes with sub-micron resolution.

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UHV Atomic Force Microscopy and Development of a New Understanding of the Atomic Resolution AFM Imaging of Molecules A. M. Sweetman1,*, S. P. Jarvis1,*, H. Sang2,3,*, I. Lekkas1, P.Rahe1, Yu Wang2, J. Wang2, N. Champness4, L. Kantorovich3, & P. Moriarty1,†

1School of Physics & Astronomy, University of Nottingham, Nottingham NG7 2RD, U.K. 2School of Physics and Technology, Centre for Electron Microscopy, Wuhan University, Wuhan 430072, China 3Department of Physics, King’s College London, The Strand, London WC2R 2LS, U.K. 5School of Chemistry, University of Nottingham, Nottingham NG7 2RD, U.K.

Non-contact atomic force microscopy (NC-AFM) has been shown to offer unprecedented intra-molecular resolution of planar organic molecules on metal surfaces via the use of functionalized tips [1]. Recent results obtained using similar protocols have demonstrated intermolecular contrast assigned to the hydrogen bonding between molecules (Figure 1) [2], but the interpretation of these results has proved controversial [3,4].

In this talk we will highlight how interpretation of images of hydrogen-bonded systems necessitates detailed consideration of the coupled tip-molecule system, including the role of tip relaxation: analyses based on intermolecular charge density in the absence of the tip fail to capture the essential chemical physics underpinning the imaging mechanism. We focus on how the role of the tip structure severely complicates the interpretation of such images, and discuss the interpretation of these features considering the combined tip-sample system.

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[1] L. Gross et al Science 337. 1326-1329 (2013)

[2] J. Zhang, et al. Science 342, 611-614 (2013)

[3] P. Hapala et al. Phys. Rev. B 90, 085421 (2014)

[4] A. Sweetman, S.P. Jarvis and H.Sang et al., Nature Comms. 5, 3931 (2014)

Fig. 1: Constant height ∆f image of H-bonded NTCDI network taken at 5K demonstrating both intra- and inter-molecular contrast [4].

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Addressing the Requirements for the Successful Implementation of the Redefinition of the Kilogram Stuart DavidsonNational Physical Laboratory, UK In the next few years the world’s measurement system, the SI, will be changing. One of the most significant changes will be the replacement of the existing definition of the kilogram, which depends on the stability of an artefact made in the 19th century, with a definition based on a constant, the Planck constant h, which lies at the heart of modern quantum physics. This change will strengthen, stabilise, and reunify the SI and, in addition, provide advantages to science and engineering. The kilogram is the last of the seven base units of the SI to be defined in terms of a material artefact rather than by relation to an invariant of nature. Progress is being made towards a redefinition in terms of the Planck constant realised via the watt balance and Avogadro experiments. The accuracy of these experiments is nearing that required by the mass community (2 parts in 108) and it is likely that the redefinition will be ratified in late 2018.

While ensuring the long term stability of the unit of mass, the change to the definition of the kilogram presents issues which need to be addressed in order to effectively implement the redefinition, to ensure continuity of the mass scale and to efficiently disseminate the new definition to the user community. After redefinition the realisation of the SI unit of mass will be possible via either the Avogadro or watt balance approaches. The two experiments work in a vacuum and so a link between mass standards in air (such as the International Prototype Kilogram used to realise the current mass unit) and standards realised in vacuum will need to be established for initially fixing the Planck constant and subsequently for dissemination of the unit of mass.

This paper describes research undertaken to prepare for the redefinition. Next generation mass standards, compatible with use in vacuum, have been developed to improve mass stability while optimising vacuum/air transfer characteristics. Methods for the

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transfer between and storage in vacuum, inert gas and air have been investigated both gravimetrically and using surface analysis techniques such as X-ray photoelectron spectroscopy (XPS) and ellipsometry to characterise surface sorption effects. Additionally new cleaning techniques for primary mass standards using UV activated ozone and low pressure plasma have been developed to replace current manual cleaning methods. The implementation of this research will ensure the maximum benefit is realised from the redefinition of the kilogram in terms of a fundamental constant.

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Phase Change Material Opto-Electro-Mechanics

Harish Bhaskaran

Materials Department, University of Oxford, Oxford, UK

Phase change materials based on chalcogenide glasses (GeSbTe, AgInSbTe, etc.) are a special class of functional materials highly relevant to both optical and electronic data storage technologies. Information is recorded locally as change in the solid phase of the material, namely amorphous or crystalline phase. Each of these phases has very different optical, electrical and even mechanical properties. The first part of this talk will discuss recent results in mixed-mode optoelectronic properties of phase change materials with exciting applications in future solid state nano-displays. The second part of this talk part will present a new electro-mechanical framework that combines phase change materials with 2D active electrodes with potential applications in future tunable resonators for telecom systems.

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Novel Photocatalytic Materials for Enhanced Activation by Sunlight

Glen West Manchester Metropolitan University, UK

Photocatalytic materials have seen significant growth in their utilisation for self-cleaning and antimicrobial applications, along with degradation of air- or water-borne pollutants, and the generation of hydrogen fuel from water. The most commonly employed and characterised material is titanium dioxide, however, there are limitations to its use – particularly with respect to the need for ultra-violet irradiance due to its high band-gap. A range of novel materials is being developed to allow better utilisation of visible and near-visible wavelengths in order to make photocatalytic devices that are active in sunlight or artificial indoor lighting. This presentation will address strategies to facilitate the production of vacuum-deposited photocatalytic thin films for solar activation.

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UHV-compatible Electrospray Deposition of Non-volatile Molecules

James N. O’Shea School of Physics and Astronomy, the University of Nottingham, UK The deposition of molecules on surfaces under UHV conditions has provided us with incredible insight into the chemical, electronic and geometric structure of molecule-surface interactions using techniques ranging from electron spectroscopy to scanning probe microscopy. Gaseous molecules are easily deposited in vacuum and larger molecules can be deposited by thermal evaporation or sublimation. But there comes a point where the molecule is so large or fragile that it has no significant vapour pressure below its decomposition temperature. Clearly the library of molecules that fall into this category is vast and includes polymers, many organometallic complexes, proteins and nanoparticle clusters. Using electrospray ionization we can take large, fragile and non-volatile molecules directly from solution into the gas-phase and capture the resulting beam into a vacuum system to be skimmed, cleaned and even mass-selected before impinging on an atomically clean surface in UHV. Electrospray deposition in vacuum has enabled us to apply surface science techniques to study dye molecules, macromolecules, nanorings, single molecule magnets and proteins on surfaces, and to begin building functional surfaces and devices with complex molecules.

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Technologies Plasma Workshop Wednesday 14th October 2015 Meeting Agenda The Technological Plasma Workshop (TPW) is principally a UK-based international forum in science and technology of plasmas and gas discharges. Delegates from all countries are very welcome to participate in this workshop. Since the EPSRC Technological Plasma Initiative in 1997, technological plasmas have found new applications in diverse fields ranging from nano-science, through biomedicine and environment, to space exploration. They offer major collaboration opportunities for academic and industrial communities and exciting career prospects for younger scientists and engineers. To support a full realisation of these opportunities, TPW aims to foster academic-industry collaboration and to engage young plasma scientists with a scientific programme anchored by leading plasma scientists.

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Circular Ion Sources for Plasma Enhanced Atomic Layer Deposition Applications H. Li, J. Brindley, A. Azzopardi, V. Bellido-Gonzalez, B. Daniel, Gencoa Ltd, Liverpool, United Kingdom A particular area of growth for atomic layer deposition (ALD) has been plasma enhanced ALD (PEALD). PEALD has been introduced in order to lower the deposition temperature and to control the properties of the film. Only last year a small circular ion source, which can replicate the functional properties of large linear ion sources, was introduced. The use of such a source is interesting for PEALD as the processes developed in the lab could be easily implemented at an industrial level. The present study will present the development of PEALD processes using such a circular ion source.

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VS6 Posters

Number Title Authors Day(s) 1 High Vacuum Electrospray

Deposition as a Tool for Probing Organic Photovoltaics using Synchrotron Radiation

Robert Temperton

14 and 15

2 Surface Resistance Measurements on Non-Evaporating Getter Thin Films

Lewis Gurran, Oleg B. Malyshev, Philippe Goudket, Kiril Marinov, Graeme Burt, Stuart Wilde and Reza Valizadeh

14 and 15

3 Imaging Surfaces with Helium Atoms

Matthew Bergin , Bill Allison, John Ellis, Andrew Jardine, David Ward

14 and 15

4 DBD Plasma Microbubble Reactor for Pre-treatment of Lignocellusic Biomass

Alexander Wright 14 and 15

5 Mitigation of Particles from Sputter Ion Pumps

A.D. Chew, R Coleman, T Wynohrad

14 and 15

6 Broadening Horizons: Applications of X-ray Photoelectron Spectroscopy

Marc Walker 14 and 15

7 Hydrogen Peroxide and Hydroxyl Radical Generation by Streamer Discharge

Zhongshu Zhang 14 and 15

8 Shallow Hollow Core Vacuum Panels Based on Tied Arch Skins

R. G. Ogden, S. Resalati, M. Heywood, C. C. Kendrick

14

9 Semi-Classical Diffusion of Hydrogen and Deuterium on Copper (111)

P.S.M. Townsend 14

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10 Development of Electrospray

Source for Deposition of Large Molecules for STM studies

Luis M. A. Perdigao 14

11 Superconducting Solders for the 21st Century

Susannah Speller 14

12 Optimisation of Acoustic Emission from Transit Plasma Discharges in Water

Ying Sun 14

13 A Handheld Ion Source for RGA

Fred Jjunju 14

14 Functionalization of TiO2 nanorods by Atmospheric pressure Plasma Jet (APPJ)

Avishek Dey, Anna V. Nomine′, Alexandre Nomine′, Nicholas S.J. Braithwate, Satheesh Krishnamurthy

15

15 Further Progress in Diamond Microplasmas

Paul May 15

16 Thin Film Metallic Photocathodes for use in normal conducting electron guns

Sonal Mistry 15

17 Title unknown Adrian Cross 15