Vacuum Solutions Application Support Service LEYBOLD …

MAG W 2010 CHT

Turbomolecular Pump with Magnetic Bearing

MAG.DRIVE 2000

Electronic Frequency ConverterSoftware version 1.4.xx

Cat. Nos.121 31121 44

Operating Instructions

Vacuum Solutions Application Support Service LEYBOLD VACUUM

GA 05.139/1.02

http://www.ptbsales.com

Contents Page1 Description . . . . . . . . . . . . . . . . . . . . . . . . . 31.1 System overview . . . . . . . . . . . . . . . . . . . . . . 31.2 Compatibility with pumped media . . . . . . . . . . 41.3 Design of the MAG . . . . . . . . . . . . . . . . . . . . 41.4 Function and design of the MAG.DRIVE . . . . 51.5 Standard specification . . . . . . . . . . . . . . . . . . 61.6 Technical data . . . . . . . . . . . . . . . . . . . . . . . . 61.7 Ordering information . . . . . . . . . . . . . . . . . . . 8

2 Installation . . . . . . . . . . . . . . . . . . . . . . . . 132.1 General safety information . . . . . . . . . . . . . . 132.2 Unpacking - storing - transportation . . . . . . . 132.3 Operating environment . . . . . . . . . . . . . . . . 142.4 Connecting the MAG

to the vacuum chamber . . . . . . . . . . . . . . . . 142.5 Connecting the backing pump . . . . . . . . . . . 192.6 Connecting the cooling water . . . . . . . . . . . . 202.7 Connecting the purge gas . . . . . . . . . . . . . . 222.8 Installing the MAG.DRIVE . . . . . . . . . . . . . . 242.8.1 Power supply connection X10 . . . . . . . . . . . 252.8.2 Pump connection . . . . . . . . . . . . . . . . . . . . . 262.8.3 Control plug X14 . . . . . . . . . . . . . . . . . . . . . 272.8.4 Interface connector . . . . . . . . . . . . . . . . . . . 31

3 Operation . . . . . . . . . . . . . . . . . . . . . . . . . 323.1 General operation rules . . . . . . . . . . . . . . . . 323.2 Operation with the START and STOP keys . 343.3 Remote control . . . . . . . . . . . . . . . . . . . . . . 35

4 Plug-in Control . . . . . . . . . . . . . . . . . . . . . 364.1 Operation with plug-in control . . . . . . . . . . . 364.2 Operating statuses . . . . . . . . . . . . . . . . . . . 384.3 Operating menu . . . . . . . . . . . . . . . . . . . . . . 404.3.1 Basic menu . . . . . . . . . . . . . . . . . . . . . . . . . 404.3.2 Settings converter . . . . . . . . . . . . . . . . . . . . 414.3.3 Settings pump . . . . . . . . . . . . . . . . . . . . . . . 424.3.4 Settings temperature management system . 424.3.6 Total view of the menu . . . . . . . . . . . . . . . . . 434.4 Temperature management system . . . . . . . . 44

5 Maintenance . . . . . . . . . . . . . . . . . . . . . . . 465.1 Removing the pump from the system . . . . . . 465.2 Service at Leybold’s . . . . . . . . . . . . . . . . . . 48

6 Troubleshooting . . . . . . . . . . . . . . . . . . . . 506.1 Warning messages . . . . . . . . . . . . . . . . . . . 506.2 Failure messages . . . . . . . . . . . . . . . . . . . . 526.3 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . 57

Certifications . . . . . . . . . . . . . . . . . . . . . . . . 58Forms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64

Figures

The references to diagrams, e. g. (1/2) consist of the Fig.No. and the Item No. in that order.

We reserve the right to alter the design or any data givenin these Operating Instructions. The illustrations are notbinding.

The Operating Instructions are included with the pumpand the converter. If they have different numbers, theversion delivered with the pump describes the pumpcorrectly and the version delivered with the converterdescribes the converter correctly.

Concerning the converter description, this GA05.139/1.02 is nearly identical to GA 05.135/3.02 forthe standard MAG versions.

See also the last page.

2 GA 05.139/1.02 - 06/99

Description

3GA 05.139/1.02 - 06/99

1 Description1.1 System overviewThe Leybold MAG pumping system consists of:

• The MAG W 2010 CHT turbopump

The MAG are turbomolecular pumps utilizing magne-tic bearings.They are designed to evacuate vacuumchambers down to pressure values in the high-vacu-um range and to pump high gas throughputs.

The pump design allows high temperatures (HT) atthe connection flanges without reduction of the maxi-mum gas throughput.

• The MAG.DRIVE 2000 frequency converter

The electronic converter converts the single-phaseline supply voltage into a three-phase DC voltage todrive the pump motor. It also evaluates measured sig-nals and controls - the pump functions- the temperature management system (TMS) and - the active magnetic bearing system

The MAG.DRIVE 2000 can be operated with theSTART and STOP keys, via a plug-in control, or via anetwork interface.

• A cable set consisting of:- BEARING cable- DRIVE/TMS cable

Fig. 1 MAG W 2010 CHT

Each Fuse 4 A

Fig. 2 MAG.DRIVE Front panel

Description

1.2 Compatibility with pumped media

The MAG W 2010 CHT is specifically designed for theneeds of the semiconductor industry.

All materials used inside the pump are compatible withtypical gases used for semiconductor processes. Typicalgases are: Cl2, HBr, HF, SF6, Halocarboncompounds,

NF3, SiH4, SiH2Cl2, PH3, AsH3, P, As.

CautionPlease consult Leybold regarding themedia which can safely be handled with thisunit.

Corrosion protection

To protect the pump from corrosive gases it is mandatoryto use dry Nitrogen purge during operation of thepump.The purge gas protects the bearing section andthe motor from corrosive gases.

The rotor and the stator of the pump are KEPLA®-coatedto prevent corrosive attack caused by the processgases. The corrosion protection of the pump is effectiveonly when the pump is protected from moisture duringstandstill and storage. If the process gas contains moi-sture, contact Leybold for recommendations.

Sublimation

Some media (e.g. AlCl3) can sublimate in the pump and

form deposits. Thick coatings can infringe on the requi-red operating clearence and ultimately cause the pumpto seize. These deposits can also react with moistureand generate corrosive gases (e.g. HCl).This can beco-me very critical when the pump is exposed to air. Depo-sits can be avoided in many processes by heating thepump with TMS (Temperature Management System).

The TMS is integrated in all CHT-versions. The purposeof the TMS is to keep the baseflange temperature in aconstant range. To achieve the temperature the pump isequipped with a heaterband.

Some media ( e.g. metall organic compounds ) candecompose at the hot surface of the pump and build lay-ers. Please direct any inqueries to the manufacturer.

CautionIn order to handle gases or media (e.g.AlCl3, WOCl4) which can form deposits insi-

de the pump it is required to use the TMS(Temperature Management System). Thetemperature selected for such processeshas to be set to the maximum value (62°C).

4 GA 05.139/1.02 - 06/99

Ignition danger

During operation the pressure inside the MAG is so lowthat there is no danger of ignition (at pressures belowabout 100 mbar). A hazardous condition will be createdif flammable mixtures enter the hot pump at pressuresabove 100 mbar. During operation the pump can reachtemperatures as high as 120°C (248°F). If the pump isdamaged, sparks could occur which could ignite explosi-ve mixtures.

1.3 Design of the MAGThe MAG comprises basically the pump housing, themultistage rotor with the stator package, the drive, and amagnetic bearing.

Rotor

The rotor is made from a high strength aluminium alloy.The rotor and the stator plates are protected with a spe-cial ceramic layer ( KEPLA-COAT® ). The rotor is a multi-stage axial-flow turbine with a screw stage.

The rotor is machined from one piece and the geometryof the the blades is optimized for high compression andpumping speed of the typical gases used in semicon-ductor manufacturing processes ( e.g. SF6, Ar, BCl3).

BearingsThe MAG has a built-in precision 5-axis controlledmagnetic bearing. The rotor is suspended by trouble-free magnets:• along two orthogonal axes in each of two radial planes• and completely in the axial direction

The bearing concept allows for low vibration operationsand insures operation of the pump in any mounting posi-tion. Magnetic bearings also guarantee ultra-clean vacu-um because no grease is used for lubrication of bea-rings.

Two touch down bearings are provided to stabilize therotor mechanically if impacts occur during operation.They are only used in case of the breaking of the powersupply or BEARING cable during operation, strongshocks, or faulty electronics.

GA 05.139/1.02 - 06/99

Description

5

Motor and control

A DC motor without commutator is used to power therotor.

Drive voltage for the motor and the operating voltage forthe magnetic bearing are supplied by the MAG.DRIVEfrequency converter. It also handles the automatic moni-toring of these systems.

The pump is equipped with a data storage device whichstores the important operating parameters during thecomplete operation time of the pump.

The converter monitors continously all important opera-ting parameters and provides warning and alarm signalsin case the operating conditions exceed the specificationor the set threshold.

1.4 Function and design ofthe MAG.DRIVE

The MAG.DRIVE 2000 electronic converter is used todrive the MAG turbo-molecular pumps.

The electronic converter converts the single-phase linesupply voltage into a three-phase DC voltage to controland monitor the electronically-commutated DC motor. Italso evaluates measured signals and controls (open-loop and closed-loop) the pump functions.

The temperature management system (TMS) and themagnetic bearing control system are integrated into theconverter. The TMS regulates the pump temperature byswitching the heating on/off or cooling the pump. Themagnetic bearing control system actively controls thepump rotor in five axes (closed-loop control).

All parameters required for pump operation and thelisted faults and operating hours are stored in a non-volatile memory in the pump. When the converter is swit-ched on, the data are loaded into the converter from thepump.

The outputs of the electronic converter are no-load andshort-circuit proof.

For remote control via control connector X14 we recom-mend that either a relay or optocoupler is used to provi-de electrical decoupling.

Housing

The converter is supplied with a closed housing. It canbe installed in a 19” cabinet; see Section 2.8.

Front panel

Main switch

9-pin connecting socket for the plug-in control or forconnection of a serial interface

2 short-stroke keys

1 green/red STATUS LED

1 green COM LED (communications interface)

1 green MAIN LED (line supply voltage)

2 fuses TMS (Temperature Management System)

The optional plug-in control has 10 keys and 1 LCD with2 lines, each 16 characters. The plug-in control displaysoperating statuses and failures and allows the configura-tion of the pumping system.

Rear panel

X14 50-pin D socket connector for remote monitoringand open-loop control

X19 3-pin Hirschmann connector for the connection tothe mains supply

X20 55-pin MIL standard socket connector for internalsensors and magnetic bearing connection

X21 41-pin MIL standard socket connector for the motor,TMS, and purge valve connection

Spare slot for optional network cards, e.g. DeviceNet

GA 05.139/1.02 - 06/99

Description

6

1.6 Technical dataMAG W 2010 CHTPumping speed for N2 measured with splinter guard (PNEUROP) 1650 l·s-1

Gas flow (continuous operation with Argon) 1300 sccm

Compression for N2 >108

Ultimate pressure as to DIN 28 400 < 10-8 mbar

Max. forevacuum pressurewith Nitrogen 3.5 mbarwith Argon 4.3 mbar

Rotor Speed 28,800 min-1

Run-up time < 8 min

Braking time with/without venting 1 / < 7.5 min

Cooling waterCooling connection,Swagelok tube OD 1/4“Cooling water temperature 10 to 30 °C

50 to 86 °FInlet pressure 2 to 6 bar (absolute)

(i.e. 1 to 5 bar over atmosphere)

Base flange temperature 30 to 62 °C(controlled) 86 to 144 °F

Weight approx. 65 kg

High-vacuum connection flange DN 250 ISO-FMax. high-vacuum flange temperature 85 °C

185 °F

Forevacuum connection flange DN 40 KF

Recommended backing pump DRYVAC 50

Admissible ambient temperature 5 to 40 °C40 to 104 °F

Storage temperature -10 to +60 °C14 to 140 °F

Max. relative air humidity 95% (non-condensing)

Degree of protection IP 20(EN 60529)

Purge Gas

Purge gas: dry nitrogen, argon or similar

Purge gas throughput 0.5 to 0.65 mbar·l·s-1

30 to 40 sccm

Connection: VCR Nut 1/4“

1.5 Standard specificationMAG

The turbomolecular pumps are shipped complete, sealed in a PE bag containing a desiccant.

The maximum effective life time of the desiccant is oneyear.

The intake flange is sealed with a transport seal, theforevacuum flange with a plastic cap.

For the intake flange, a centering ring with FPM O-ring,outer ring, and a splinter guard are enclosed.

We also provide the bolts for attaching the pump to yourtool. To avoid any safety risk we highly recommend usingonly the bolts provided with the pump. Refer also to Sec-tion 2.4 „Connecting the MAG ...“.

The electronic frequency converter MAG DRIVE as wellas the cables required for operation must be orderedseperately.

In addition, a seal kit is included to seal the pump tightlyif it is removed from the process.

MAG.DRIVE

• Converter

• Line supply cable with USA connector, approx. 3m

• Line supply cable with EURO connector, approx. 3 m

• 2 spare fuses for the TMS (miniature fuses 5 x 20mm, F4A; according to IEC 127-2/1) and 2 fuse hol-ders 6.3 x 30 mm

• Connector for control plug X14 (pins 47/48 bridged)

Cable Set

• BEARING cable

• DRIVE/TMS cable

GA 05.139/1.02 - 06/99

Description

7

X19

X14X20

X21

Each Fuse 4 A

Start Stop

Esc Mon Prog Enter

+_

Each Fuse 4 A

Fig. 3 Front panel

X14 Connection control plug

X19 Mains connection

X20 Connection magnetic bearing

X21 Connection pump motor andTMS

Fig.4 Rear panel with connections

MAG.DRIVE 2000

MAG.DRIVE 2000 with plug-in control

Description

1.7 Ordering dataOrder No.

MAG W 2010 CHT 121 31

Seal Kit DN 250 standard 200 91 641

Seal Kit DN 250 metal 200 07 901

MAG.DRIVE 2000 converter 121 35

MAG.DRIVE 2000 converter (AMAT part no.) 121 44

Plug-in control 121 36

MAG.DRIVE 2000 with DeviceNet 121 37

Connecting cables, converter — pump see Fig.5

19“ installation frame 161 00

Connector for hardware interface from 25 pins to 50 pins on request

Purge/vent valve 121 33

8 GA 05.139/1.02 - 06/99

Technical data (continued)

MAG.DRIVE

Voltage range 200 - 240 V +10% -15%Line supply frequency 50 / 60 Hz

LoadStand-by approx. 100 WContinuous (rated speed) 810 WMaximum 1800 W

Max. voltage motor 60 VMaximum pump current 20 A rms

Continuous pump current, max. 15 A rms

Maximum frequency 480 Hz

Load capability, relay output 42 V, 1 A

Temperature during operation 0-45° CStorage temperature - 10° C to + 60° C

Relative air humidity Class F acc. to DIN 400 40

Overvoltage category IIContamination level 2in accordance with EN 61010

Weight 10 kg

The units have degree of protection IP20 in accordancewith EN 60529

(protection against the ingress of solid foreign bodies >12 mm diameter (finger). It is not protected against theingress of water with damaging effects.)

An increased degree of protection, e.g. IP54 can only beimplemented by mounting the converter in an additionalhousing.

Description

9GA 05.139/1.02 - 06/99

0°

270° 90°

40°

180°

BEARINGconnection

DRIVE/TMSconnection

Connecting cables converter — pump

Length Cable Cable outlet Cable outlet Order No.Converter Pump

—————————————————————————————————————————1.5 m BEARING bended 40° bended 140° 121 291.5 m DRIVE/TMS bended 40° bended 225° (DRIVE) 121 30

bended 185° (TMS)

3 m BEARING straight straight 121 173 m DRIVE/TMS straight straight 121 18

5 m BEARING bended 225° straight 121 195 m DRIVE/TMS bended 180° straight 121 20



20 m BEARING bended 225° bended 235° 121 4520 m DRIVE bended 180° bended 235° 121 46

(only for MAG W 2010 C)

Fig. 5 Overview and ordering data for connecting cables

0°

DRIVEconnection

BEARINGconnection

TMSconnection

180°

225°

Description

10 GA 05.139/1.02 - 06/99

Fig. 6 Dimensional drawing and standard fixing of the MAG.DRIVE; dimensions in mm

START

STOP

Com

Status

Main

X7

FusesTMS

MAG.DRIVE 2000

Each Fuse 4 A

19“ installation frame

4 x M3 screws

455

113

196

128135

27max. 115

122.4

198Ø 3.3

Each Fuse 4 A

straight plugs

bended plugs

Description

11GA 05.139/1.02 - 06/99

Fig. 7 MAG W 2010 CHT, Dimensions in mm

DN

40

DN 250 ISO F

272

386

303

16

ø355

ø335

ø261

400

ø199

320.

5

ø284

201

ø310

336

12x60 (=360 )

°

11

ø310

30°

°

18°51°

18°

10

30°

35°

421

102

115

Description

12 GA 05.139/1.02 - 06/99

10-1

10-2

10-3

10-4

50 sccm

100 sccm

200 sccm

500 sccm

1000 sccm

10-2 10-1 1 10Torr

Torr

Fig. 9 MAG W 2010 CHT: operation diagram for nitrogen

Hig

h va

cuum

pre

ssur

e

Forevacuum pressure

Rotor speed 480 HzPurge gas flow 36 sccm Nitrogenwith splinter guardForepump D 65 B + WS 251Pipe 1 m DN 40according to PNEUROP

1500

1000

500

0

2000

10-2 10-1 1Torr

10-310-4

l/s

MAG W 2010 C

High Vacuum Pressure

Fig. 8 Pumping speed curve for Nitrogen

Pum

ping

spe

ed

Rotor speed 480 HzPurge gas flow 36 sccm Nitrogenwith splinter guardForepump D 65 B + WS 251Pipe 1 m DN 40according to PNEUROP

HT

Installation

13GA 05.139/1.02 - 06/99

WarningUnauthorized opening of the convertervoids the warranty.Before opening the converter, always dis-connect it from the mains and the pump! Before disconnecting any cables make surethat the converter is switched off and thepump has come to a standstill.When applying external voltage in excessof 42 V to terminals of the device, observelocal safety regulations!Unauthorized device conversion and modi-fications are prohibited for safety reasons.

Please keep this Operating Instruction for future referen-ce.

2.2 Unpacking - storing -transportation

Remove the equipment from the transportation box andkeep the packaging. Make sure that the product has notbeen damaged during transportation. If this unit is dama-ged contact your carrier and inform LEYBOLD if neces-sary. For storage of the product, use the packaging pro-vided.

Lift the pump by the crane eyelets or move it with at leasttwo persons.

You can position the pump on the base plate for trans-port with a lift-truck. Protect the pump against slippingand tipping over.

CautionBe careful not to damage the sockets andcoolant connections during transportation.

Do not stand below the pump while connecting or remo-ving the MAG.

The MAG is shipped in a sealed PE bag with desiccant.Do not open the sealed package until immediately befo-re installing.

Do not remove the covers and blanking flanges until youare ready to make the connections, to ensure that theMAG is installed under the cleanest possible conditions.

2 Installation2.1 General safety informationWarning

Indicates procedures that must be strictly observed toprevent hazards to persons.

Caution

Indicates procedures that must be strictly observed toprevent damage to, or destruction of the MAG.

WarningNever expose any parts of the body to thevacuum.

WarningThe converter has dangerous voltagelevels.

Failure to strictly follow the instructions inthis Manual can result in death, severebodily injuries or significant material dama-ge.

Only suitably qualified personnel are per-mitted to work on the pump or converter.Personnel must be completely knowledgea-ble of all warning information and measureswhich are specified in this Instructionmanual for transporting, installing, and ope-rating the unit.

Qualified personnel

Qualified electrical personnel in this instruction manualmeans a person who has received electrical engineeringinstruction or is an electrical expert in accordance withEN 60204, Part 1, 3.30 respectivly 3.55.

WarningThe device contains electrostatically sensi-tive devices (ESD)!

Installation

14 GA 05.139/1.02 - 06/99

1

2

1 Aluminum cover2 Screws

Fig. 10 Removing the transport seal

2.3 Operating environmentWhen using the MAG inside a magnetic field, themagnetic induction at the pump housing must not ex-ceed 5 mT; (1 mT (milliTesla) = 10 G (Gauß))

Exceeding this limit can cause excessive rotor heatingdue to the eddy currents generated in this situation. It istherefore necessary to provide suitable shielding in suchcases.

The standard version of the MAG is resistant to radiationat levels up to 103 Gy. (1 Gy (Gray) = 100 rad)

The ambient temperature must not exceed 40°C (104 °F).

The noise level when the pump is running is below 70dB(A). No acoustic insulation is required.

2.4 Connecting the MAG tothe vacuum chamber

The MAG is shipped in a sealed PE bag with desiccant.Do not open the package until immediately before instal-ling.

Do not remove the covers and blanking flanges until youare ready to make the connections, to ensure that theMAG is installed under the cleanest possible conditions.

Pay attention to maximum cleanliness when connecting.

Remove the transport seal from the intake flange. To doso unscrew the screws (10/2) and remove the aluminumcover. We recommend saving the transport seal formaintenance.

Foreign objects entering the pump through the high-va-cuum flange can cause serious damage to the rotor.That’s why the splinter guard must always be installed.

Damages caused during operation without the splinterguard are excluded from warranty.

CautionInstall the splinter guard as shown in Fig.11. Installing the splinter guard upside downmay lead to contact between splinter guardand rotor during fast venting of the pump.

Correct

Wrong

Fig. 11 Installing the splinter guard

Installation

15GA 05.139/1.02 - 06/99

Fig. 12 Connection elements

Intake flange

Forevacuum flange

Cooling water outCooling water in

Purge gas connector(behind the pump)

WarningThe pump must be securely attached. If thepump should suddenly seize, inadequateattachment could cause the pump to breakaway or allow internal pump parts to be dis-charged. Never operate the pump (in benchtests, for instance) without its being con-nected at the vacuum chamber.

If the pump should suddenly seize, the dec-celeration torque of 60,000 Nm will have tobe absorbed by the system. To accomplishthis, use all 12 bolts provided by Leybold forfastening the high-vacuum flange; see alsoFig. 15.

Mount the MAG as close as possible to the vacuumchamber. If the MAG is permanently flanged to a vacu-um chamber with a weight exceeding 500 kg, it will notbe necessary to secure it in any other way.

The vacuum chamber must be securely attached to thefloor or a solid wall.

In case of lighter vacuum vessels secure the pump addi-tionally. The pump’s bottom is equipped with tapperedholes for fastening a support; see Fig. 14.

If the pump is exposed to shocks, e.g. by a gate valve,secure the pump so that it is supported in the direction ofthe shock.

Earthquake protection

For earthquake protection fix the pump as shown in Fig.13,14 and 15. Depending on the chamber’s weight andfixing use the boreholes in the pump’s bottom in additi-on.

The standard fixing for the converter is shown in Fig. 6.

We recommend installing an isolation valve between thepump and the chamber. The valve should be closedduring wet cleans of the chamber and in case of pumpfailures which will lead to a pump shut down. The valveshould normally be closed with power off.

WarningThe pump can become so hot during ope-ration (> 85°C, > 185 °F) that it representsa burn hazard:Provide protection against contact with thehot components.

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Installation

16

M = 60,000 NmM = 60,000 Nm

Correct

Wrong

Fig. 13 Vacuum chamber fixed to the floor

125°

70 °30

°

ø310

15 °

Fig. 14 Fixing the pump at the bottom

Boreholes M8,15 mm deep

Installation

17GA 05.139/1.02 - 06/99

21.5

ll > 15 mm in aluminiuml > 10 mm in steel

Outer ring (stainless steel)

Sealing (FPM)

Centering ring (stainless steel)

Splinter guard

Max. torque = 60,000 Nm

Fig. 15 Fixing the intake flange

Bolts: M10 x 35 / M10 x 40Quality 12.9 according to DIN 898: 0,2% yield strength > 1080 N/mm2

Bolt torque: 40 Nm

Installation

18 GA 05.139/1.02 - 06/99

Fig. 16 Layout of a turbomolecular pump system

Key to Fig. 161 Turbomolecular pump2 Forevacuum gauge point3 Backing pump4 Anti-vibration bellows5 Forevacuum valve6 High vacuum valve7 Purge gas connection8 Valve in the roughing line9 Electronic frequency converter

— — — — roughing line; recommendedif shorter cycle times are to be achieved

— · — · — · — · BEARING and DRIVE/TMS cable

Installation

19GA 05.139/1.02 - 06/99

2.5 Connecting the backingpump

A two stage rotary vane pump or dry-compressionbacking pump is required to support operation of theMAG.

We recommend using our DRYVAC or TRIVAC pump forthis purpose.

In case of high gas throughput, it may also be necessaryto use a roots blower to achieve the backing pressurenecessary for operating the MAG. We recommend ourRUVAC blower for this purpose or our DRYVAC 251/501systems.

Fig. 16 shows schematically the design of a pumpsystem incorporating a MAG with an additional forelinevalve and an isolation valve between chamber andMAG.

The foreline isolation valve is recommended to protectthe MAG from shock venting in case of uncontrolled shutdown of the backing pump. This valve must be able toclose fast enough to avoid pressure increase in theMAG.

In case of an oil-sealed backing pump the foreline isola-tion valve protects the MAG from backstreaming oilvapor during standstill.

Connect the forevacuum flange of the MAG to thebacking pump.

The torque on the forevacuum connection flange mustnot exceed the values shown in Fig. 17.

WarningThe forevacuum line must be tight. Hazar-dous gases can escape at leaks or thegases being pumped can react with the airor humidity. We recommend a leak check.

M

Mq

M < 150 NmMq < 150 Nm

Fig. 17 Maximum torques for the forevacuum connection

Installation

20 GA 05.139/1.02 - 06/99

Fig. 18 Recommended cooling water flow

5 10 15 20 25 30 35 40°C

300

250

200

150

120

100

50

0

l/h

Operation window

Flo

w

Temperature0 1 2 3 4 5 6bar over

atmosphere

300

250

200

150

120

100

50

0

l/h

Pressure

Flo

w

2.6 Connecting the coolingwater

Cooling water specifications

Inlet temperature 10 - 30 °C

Inlet pressure 2 to 6 bar absolutei.e.1 to 5 bar over atmoshere

Cooling water requirement See Fig. 18

Appearance Colorless, clear, free of oils and greases

Sediments < 250 mg/l

Particle size < 150 µm

Electrical conductivity < 500 µS/cm

pH value 7 to 8.5

Overall hardness (total alkaline earths) max. 20 ° German hardness scale

(= 3.57 mmol/l)

Further information on request.

Connect the cooling water to the connectors; see Fig.19.

CautionMake sure that you do not mix up the inletand the outlet connection. If it is mixed upthe water valve will not work correctly.

Turn off the cooling water supply when the pump isswitched off in order to avoid condensate formation inthe pump.

If you do not close the cooling water it may take longerto achieve ultimate pressure after start up of the system.

An internal bypass in the cooling water distributor allowsoperating the MAG in series with other cooling waterconsumers.

Installation

21GA 05.139/1.02 - 06/99

Fig. 19 Connecting the cooling water

Cooling water out

Cooling water in

Cooling water in

WRONGCooling water out

IN OUT

Cooling valve

MAG cooling circuit

Installation

22 GA 05.139/1.02 - 06/99

2.7 Connecting the purgegas

The MAG is equipped with a purge gas connector. Toensure protection of the pump a constant purge gasthroughput of 30 to 40 sccm is required. You may use aflow controller to ensure the flow. Inadequate purge gasflow voids the warranty.

Connect purge gas to the VCR nut 1/4“ as shown in Fig.20.

WarningMonitor the purge gas continuously.Insufficient purge gas flow can result in:- Process gases entering the motor andbearing area of the MAG- Process gases escaping from the purgegas connector- Humidity entering the pump.

Installation

23GA 05.139/1.02 - 06/99

Fig. 20 Purge gas connection with connection kit

VCR Nut 1/4“

Port connector:Tube to VCR

Male connector: Tube OD 1/4“ -ISO male pipe size: 1/4“

WarningThe connecting cables between the conver-ter and pump may only be inserted or remo-ved when the pump is switched off andstands still after the run-down procedureand the converter is isolated from the linesupply.

To avoid contact with hazardous voltages,the safety sleeves must be mounted pro-perly on • the DRIVE/TMS connector at the conver-ter (see Fig. 21) and • the TMS connector on the pump.

Do not switch on frequency converter untilall cables have been connected properly.

WarningUnauthorized opening of the convertervoids the warranty.Hazardous voltages are present inside theconverter. Death or severe injury can occurif you come into contact with these hazar-dous voltages. Before opening the conver-ter, isolate the converter from the line supp-ly, and lock the switch so that it cannot beaccidentally switched on again.In addition the pump has to stand stillbecause it works as generator as long as itrotates, and the pump cables have to bedisconnected.

Installation instructions to maintain EMC

The MAG.DRIVE 2000 complies with the Electromagne-tic Compatibility (EMC) Directives of the EC. In order tomaintain this the following installation instructions mustbe observed:

• To connect the pump to the converter the prescribedLeybold cables must be used.

• The connection cables to the analog interface (con-trol plug X14) and to the serial interface (connectorX7) must be shielded. The shields must be connectedto the metal housings of the SUB-D-connector andSUB-D-socket.

Installation

24 GA 05.139/1.02 - 06/99

2.8 Installing the MAG.DRIVE

The converter can be installed in a 19” cabinet. It is 1/2of 19“ wide and has 3 height units. For easier installati-on we offer an installation frame; see Section 1.7. If youuse this installation frame, remove the converter’s rub-ber feet when installing the converter.

CautionIn order to guarantee sufficient cooling,there must be a minimum clearance of 1height unit (44.2 mm) at the bottom and 1height unit at the top. During operation thetemperature of the ambient air must notexceed 45 °C.

WarningThe pump may be operated only with a sui-table frequency converter and a suit-able connector cable.

The MAG W 2010 CHT can only be opera-ted with the MAG.DRIVE 2000 converterand not with the MAG.DRIVE L or L2.

Peak voltages of up to 130 V may be pre-sent at the connector line between the fre-quency converter and the pump; mains vol-tage is present at the heater.Route all cables so as to protect them fromdamage.

The protection rating for the connectors is IP 30.

Do not expose the pump, the frequency converter or theconnections to dripping water.

Install 16 A fuses for the converter.

When connecting the frequency converter to a polypha-se network between two phases, provide additionalexternal fuse protection for both phases (fuse ampera-ge: 16 A).

WarningOnly adequately trained electrical/electronicpersonnel may connect-up the equipmentin accordance with valid IEC (international),EN (European) and/or national guidelines,or under their management and supervisi-on.

Installation

2.8.1 Power supply connection X19

The converter is ready to be connected to line supplyvoltages between 200-240 V 50/60 Hz. The connectionis established using the power cable supplied, which isinserted at connector X19 at the rear of the converter.

CautionThe converter will be damaged if it is ope-rated with the incorrect supply voltage.

25GA 05.139/1.02 - 06/99

1 2 3s

1 = Phase L2 = Not assigned3 = Neutral NS = PE

Fig. 22 Connector assignment X19, supply connection

Fig. 21 Mounting the safety sleeves; rear side of the converter shown.

Mount the safety sleeve onto the pump’s TMS connection too.

1. 2.

Installation

2.8.2 Pump connection

WarningTo avoid contact with hazardous voltages incase of malfunction the pump must beconnected to PE, see Fig. 24.

Connect the converter (X20) to the magnetic bearingconnection of the pump (X23) using the BEARINGcable.

Connect the converter (X21) to the pump motor connec-tion (X25) and to the TMS connection (X30) using thecombined DRIVE/TMS cable.

Also refer to Fig. 21 and 23.

Make sure that you have fixed all cables properly. Pushthe safety sleeves onto the the DRIVE/TMS connector atthe converter and the TMS connector on the pump andtighten the screws.

26 GA 05.139/1.02 - 06/99

X19

X14X20

X21

Fig. 23 Block wiring diagram

X25 X23 X30

MAINS

Control plug

TMS

BEARING

DRIVE

2.8.3 Control plug X14

Emergency off

Make sure that pins 47 and 48 are connected via a jum-per if you don’t connect an emergency off switch.

A plug for the control plug X14 with a jumper connectedbetween pins 47 and 48 is included in the standard spe-cification.

GA 05.139/1.02 - 06/99

Installation

27

EMERGENCY OFF X14.47

EMERGENCY OFF X14.48

EMERGENCY OFF active

Fig. 25 Control plug X14: Emergency off

Borehole M8, 15 mm deep

for PE connection

Fig. 24 PE connection for the pump

Description of the Emergency Off connection

Pins 47 and 48 of control plug X14 make it possible todisable the output stage of the frequency converter viathe hardware. The power flow to the motor is then inter-rupted.

The two pins must be connected to each other to ensu-re proper operation.

If the two pins are to be monitored by the system control,a floating (dry) contact must be available on the systemside; load carrying capacity: 42 VDC, 100 mA.

The contact used and the connecting cable must be pro-tected against line supply voltage through double or rein-forced insulation such that no hazardous contact linesupply voltage can be applied to pins 47 and 48 in theevent of a fault.

Installation

Relay outputs

The MAG.DRIVE 2000 converter has 9 relay outputs.They have changeover contact. Five relay outputs arepermanently assigned a signal.

Failure

Normal operation

Warning

Acceleration

Deceleration

The option relays can output one of the following signals:

Threshold bearing temperature reached

Threshold motor current reached

Threshold frequency reached

No cooling water

No purge gas1)

TMS temperature OK

Vent1)

Start command applied

Power supply O.K.

Pump standstill

Option relay 6 can store the selected signal. The optionrelays 7, 8, and 9 cannot store the selected signal per-manently and change to the default setting after a powerinterruption. We recommend using only the default set-tings for the option relays 7, 8, and 9.

Option relay 7 Start command applied

Option relay 8 Power supply O.K.

Option relay 9 Pump standstill

The selection of signals for the option relay and theadjustment of their thresholds can be achieved via theoperator control menu; see Section 4.3.2.

Analog output

The converter has an analog output which provides ananalog signal (0..10 V) with a 10-bit resolution. The ana-log output function can be alternatively used to output

motor current

actual frequency

motor temperature

rotor displacement signals (PW24, PV13, PZ12)

The output value can be increased or reduced by a scalefactor; see Section 4.3.2 Settings Converter.

—————1) not active at MAG W 2010 CHT

28 GA 05.139/1.02 - 06/99

Fig. 26 Assignment control plug X14

X14 50 pole Sub-D I/OPIN SIGNAL1 Relay 1 n.o. FAILURE

2 Relay 2 n.o. NORMALOPERATION

3 Relay 3 n.o. WARNING

4 Relay 4 n.o. ACCELERATION

5 Relay 5 n.o. DECELERATION

6 Relay 6 n.o. OPTION




10 GND

11 Dig. input REMOTE/LOCAL

12 Dig. input START/STOP

13 Dig. input TMS OFF

14 Dig. input PURGE GAS OFF1)

15

16 Analog input 1

17 Analog input 2

18 Relay 1 com. FAILURE

19 Relay 2 com. NORMALOPERATION

20 Relay 3 com. WARNING

21 Relay 4 com. ACCELERATION

22 Relay 5 com. DECELERATION

23 Relay 6 com. OPTION




27 GND

28 +15V

29 +15V

30 GND

31 GND

32 Analog_GND

33 Analog_GND

34 Relay 1 n.c. FAILURE

35 Relay 2 n.c. NORMALOPERATION

36 Relay 3 n.c. WARNING

37 Relay 4 n.c. ACCELERATION

38 Relay 5 n.c. DECELERATION

39 Relay 6 n.c. OPTION




43 GND

44 Dig. input VENTING ON1)

45 Dig. input Reserve

46 Dig. input Reserve

47 Dig. input EMERGENCY OFF

48 Dig. input EMERGENCY OFF

49

50 Analog output

Installation

29GA 05.139/1.02 - 06/99

X14.17

0

1 Analog input 2

Relay 4 AccelerationAcceleration X14.21

X14.4

X14.37

Relay 5 DecelerationDeceleration X14.22

X14.5

X14.38

Functionanalog input 2

Analog input 2Frequency

setpoint

X14.16

Analog input 1

Analog input 1

X14.32/33Analog ground

X14.35

&X14.19

X14.2Actual frequency

Normal operation

Start commandapplied Relay 2 Normal Operation

WarningX14.20

X14.3

X14.36

Relay 3 Warning

.

X14.18

X14.

1X14

34

No failure

Relay 1 Failure

Fig. 27 Function diagram outputs, Part 1 & inputs

Installation

30 GA 05.139/1.02 - 06/99

0

X14.23/24/25/26

X14.6/7/8/9

X14.39/40/41/42

X X14.50

X14.32/33

X14.24/28+15 V

8

Venting

Threshold

0

1

2

4

5

6

Rotor displacementPVW13peakPVW24peak

PZ12peak

Current limiting80 mA

1

2

3

4

5

6

7

9

Pump standstillStart command

Power supply o.k.

Threshold

Threshold

Motor- or bearing-temperature

Motor current

Act. frequency

Functionsignal relay

Functionanalog output

Analog output

Analog ground

Scale

No cooling water

No purge gas

TMS temp. o.k.

Relay 6/7/8/9 Option

Fig. 28 Function diagram outputs, Part 2—————1) not active at MAG W 2010 CHT

1)

1)

Installation

31GA 05.139/1.02 - 06/99

Analog inputs

The converter has two analog inputs with a 10-bit reso-lution.

Input signal: 0...10V

A supplementary function can be set for analog input 2via the operator control menu; see Section 4.3.2:

No function: The input signal can be output viathe serial interface.

Frequency setpoint: In addition to the function descri-bed above, the drive frequency set-point is entered via analog input 2.

Digital inputs

The converter has 5 digital inputs with the followingfunctions:

TMS OFF

Purge gas OFF1)

Vent ON1)

The functions are active if a High signal (15 V; e.g. Pins28 or 29) is connected at the digital input.

Remote

Start (if Remote is active)

The functions Start and Remote are active if a Low sig-nal (GND; e.g. Pins 27 or 43) is connected at the digitalinput.

—————1) not active at MAG W 2010 CHT

15

69

1 +5V Power supply for plug-in control

2 TXD

3 RXD

4 n.c.

5 GND

6 -5V Power supply for plug-in control

7 Reset out for plug-in control

8 select plug-in control input

9 Boot input

Fig. 29 Connector assignment, interface X7(front side)

2.8.4 Interface connector

A 9-pin sub-D socket is provided at the front panel. Theconnector X7 is assigned the serial interface RS 232. Itis only to be used by the Leybold Service.

3 Operation3.1 General operation rulesThe magnetic bearing in the MAG are immune to wear.In addition to the magnetic bearings, the MAG is equip-ped with touch-down bearings which protect the rotoragainst mechanical contact with the stator if the pump issubjected to external shock loading or when the pump isswitched off. These touch-down bearings have a limitedservice life. Please observe the following in order toobtain maximum service life.

• Avoid shock and vibrations when the pump is run-ning. Shocks perpendicular to the rotation axis areparticularly harmful. If the pump appears to be run-ning in the mechanical bearings continuously it isswitched off.

• Do not suddenly expose the MAG to an already eva-cuated vacuum chamber. The pressure surge maycause the rotor to make contact with the touch-downbearings. This will cause increased wear.

• Do not disconnect the MAG and MAG.DRIVE whilethey are operating. If MAG and MAG.DRIVE havebeen disconnected accidently re-connect them.

• When venting the MAG the values shown in the pres-sure rise curve must be maintained; see Fig. 30.

• Do not stop the MAG with the mains. Use the STOPkey or a stop command. Switching off the mains whilethe pump is running will wear out the touch down bearings.

The pump may make noise during the run-up and run-down phases. This has neither an influence on the pumpnor on the process.

WarningMonitor the purge gas continuously.Insufficient purge gas flow can result in:- Process gases entering the motor andbearing area of the MAG- Process gases escaping from the purgegas valve- Humidity entering the pump.

Refer to Section 2.7.

WarningThe pump will be hot during operation. Burnhazard!

Operation

32 GA 05.139/1.02 - 06/99

Operation

33GA 05.139/1.02 - 06/99

103

Forevacuum pressure/mbar

102

101

100

10-1

10-2

10-3

Fig. 30 Curve for safe venting of the MAG;pressure rise as a function of venting time

0 10 20 30 40 50 60Time/s

Operation

34 GA 05.139/1.02 - 06/99

3.2 Operation with theSTART and STOP keys

Switching on

• Switch on the MAG.DRIVE.

The MAIN LED lights green.

If the pump has the optional TMS (including e.g. the redheater band) the heater will be activated. The setpointtemperature will be reached within 30 - 60 minutesdepending on cooling water temperature and flow.

In case of corresponding connection the backing pumpwill be activated when switching on the MAG.DRIVE.

• Open the purge gas supply. With a converter withdefault settings the pump’s purge gas valve is open.

• Open the cooling water supply.

• Press the START key.

The pump runs-up. The STATUS LED is slowly flashinggreen. When the STATUS LED is lit permanently greenthe pump is in normal operation.

The backing pump and the MAG can be switched onsimultaneously. In such a situation the MAG serves fromthe very outset as an effective baffle.

Switching off

• Press the STOP key.

The STATUS LED is fast flashing green. When the STA-TUS LED is off the pump has come to a standstill.

• Close the cooling water supply when the pump isswitched off in order to avoid condensate formation inthe pump.

The backing pump may be switched off once the MAGhas stopped.

If the MAG has been used for pumping corrosive gasesit should be purged with dry nitrogen for one hour befo-re switching off. During down times of the system takecare that neither ambient air nor cleaning agents enterthe pump.

After a failure has occured and has been removed, ack-nowledge the failure message by pressing the STOPkey.

Significance of the lamps

COM (green)Is lit if communication has been established via theinterface.

STATUS (green/red)Red, steady light = FailureRed, flashing = WarningGreen, flashing (slow) = Start delay, AccelerationGreen, flashing (fast) = Deceleration,

Kinetic bufferingGreen, steady light = Normal operation

MAIN (green)

This lamp is lit if the power is switched-on, and all of thesupply voltages for operation are available.

Flashes when the power fails as long as the powersupply voltages in the converter are maintained by thekinetic buffering.

GA 05.139/1.02 - 06/99

Operation

35

Remote

Start

Masse

X1.1

X1.2

X1.3

Switch closed: STARTSwitch open: STOP

Remote X14.11

Start X14.12

Ground X14.10

Fig. 32 Connecting-up example remote control

3.3 Remote controlThe pump can be switched-on or off using the START/STOP keys or via control connector X14.

• X14.11 not connected = Start/Stop via the operatorcontrol panel

• Jumper X14.11-X14.10 = Start/Stop via control inputX14.12

0

1

P12

0

1

2

S

R

Q

Q

&

-1

s

0

1

2

≥1

≥1

START

REMOTE

+15 V

X14.11

X14.12

X14.30/31

P36

= 1X14.48

X14.47

Shutdown

Start delay time

STARTpump

STOPpump

(braking the pumpwith the pulsed resistor)

STARTkey pad

STOPkey pad

STOPinterface

STARTinterface

NoFailure

Operating mode:Programming only via

serial interface

Failurescausesbraking operation

0 V = 015 V = 1

~ 3 kOhm

Fig. 31 Function diagram START/STOP

Plug-in control

4 Plug-in control4.1 Operation with plug-in

controlObserve the general operation rules givenin Section 3.1

Switching on

• Switch on the MAG.DRIVE. The display reads

Ready0.0 A 0 Hz

If the pump has the optional TMS (including e.g. the redheater band) the heater will be activated. The setpointtemperature will be reached within 30 - 60 minutesdepending on cooling water temperature and flow.

In case of corresponding connection the backing pumpwill be activated when switching on the MAG.DRIVE.

• Open the purge gas supply.

• Open the cooling water supply.

• Press the START key.

The pump runs-up.

Acceleration20.0 A 250 Hz

is diplayed until the frequency setpoint has been rea-ched. Then

Normal Operation1.0 A 480 Hz

is displayed.

The backing pump and the MAG can be switched onsimultaneously. In such a situation the MAG serves fromthe very outset as an effective baffle.

Switching off

The MAG.DRIVE controls the venting automatically pro-vided purge gas is connected to the MAG and theMAG.DRIVE is programmed correspondingly („Venton“).

• Press the STOP key.

Deceleration20.0 A 400 Hz

will be displayed. When the display reads

Ready0.0 A 0 Hz

the pump has come to a standstill.

• Close the cooling water supply when the pump isswitched off in order to avoid condensate formation inthe pump.

The backing pump may be switched off once the MAGhas stopped.

If the MAG has been used for pumping corrosive gasesit should be purged with dry nitrogen for one hour befo-re switching off. During down times of the system takecare that neither ambient air nor cleaning agents enterthe pump.

36 GA 05.139/1.02 - 06/99

Plug-in control

37GA 05.139/1.02 - 06/99

Start Stop

Esc Mon Prog Enter

+_

Acceleration

17.5A 254Hz HOK

Key Function

Esc • Returns to the operating display from the storage procedurewithout storage.

• Returns to the operating display from any point of the basicmenu.

Mon • No function

Prog • Selects the programming menu from the operating display.• Confirms to store changed parameters to the EEPROM

Enter • Switches forward to the next submenu

Start • Starts the pump (only possible if there is no fault).The start key is only active if the user is in the basic menu or in the operating display.

Stop • Stops the pump• Returns to the operating display from the programming menu.• Acknowledges a failure after the cause of the failure has

been removed.

+ • Increases a parameter value or proceeds to the next option.

– • Lowers a parameter value or returns to the previous option.

< • Selects the programming menu from the operating display.• Switches back to the last main menu.

> • Selects the programming menu from the operating display.• Switches forward to the next main menu.

Fig. 33 Functions of the front panel keys

Acceleration17.5A 254Hz HOK

Operating display

Operating status

Motor current / Actual frequency / TMS status code

If a critical operating status occurs this warning isdisplayed alternating with the operating display.

FailureAccel. Time

Failure message

Failure cause

TMS status codeNo. Code Description

——————————————————————————1 H Heating pump

2 H O K Temp. TMS ok, heater ON

3 O K Temp. TMS ok (range Tset ± 2K)

4 C O K Temp. TMS ok, cooling ON

5 W Warning Temp. TMS

O F F TMS cancelled via control plug X14

see also Section 4.4 „TMS“

Fig. 34 Display

Plug-in control

38 GA 05.139/1.02 - 06/99

4.2 Operating statusesSwitch-On Guard

The converter goes into the “Switch On Guard” operatingstatus after the power is switched on and after initializa-tion. If there is no warning or failure, it changes over intothe “Ready” condition.

After a failure has been acknowledged, the convertergoes into the “Switch On Guard” operating status. Thefailure must be acknowledged a second time, so that itthen goes into the “Ready” condition.

Ready

The converter is ready and waits for the START com-mand. All parameters can be interrogated or changed viathe operator control panel or the serial interface.

The basic menu parameters (refer to 4.3, operatingmenu) can be scanned via the operator control panel.

Acceleration

The pump continuously accelerates with the maximumcurrent. The acceleration time is monitored to ensurethat it lies within a programmed value (refer to the menu“settings pump/Accel. Time”). If the converter hasn’t rea-ched the normal operating mode during the monitoringtime, then it is shutdown with the failure message „Accel.Time”.

Normal operation

After a programmable frequency threshold has been rea-ched (refer to the menu “settings pump/Normal Operati-on”), the converter goes into the normal operation modebut the pump continues to accelerate up to the frequen-cy setpoint.

Overload

The speed is continuously monitored and controlled. Ifthe speed, even at maximum current, cannot be held atthe setpoint, as a result of external influences, e.g.excessive gas intake, the speed reduces until the con-verter goes into the „Overload“ operating condition whenthe programmable frequency threshold is fallen below(refer to the menu “settings pump/Normal Operation”).The acceleration time is restarted. If the converter hasn’tgone into the normal operating mode after the monito-ring time, it is shutdown with the failure message „FailureOverload Time“.

Mains Down

If the power fails when the converter is switched on, theconverter regenerates due to the pump up to a minimumfrequency of < 170 Hz. When the power returns, thepump is again accelerated up to the frequency setpoint.

The acceleration time is now restarted. If the converterhasn’t gone into the normal operating mode after themonitoring time, it is shutdown with the failure message„Accel. Time” .

Deceleration

After a stop command, the pump is braked down to aspeed < 1 Hz as quickly as possible. A brake resistor isintegrated into the converter which converts the regene-rative energy into heat.

Failure

The converter was shutdown with a failure message andwaits for a failure acknowledgement after the failure hasbeen removed. The failure type can be read from the dis-play. The failure message can be acknowledged bydepressing the STOP key or via the serial interface.

Plug-in control

39GA 05.139/1.02 - 06/99

Mains switched on

Initialization

Switch On Guard

Acceleration

Normal Operation Mains Down

Overload

Deceleration

Failure

After a failure, quit a second time

START command

Mains ok

Frequency > P 25 x P24

Mains failure

Mains failure

Frequency > P25 x P24 Frequency < P25 x P24

Mains failure

STOP command

If a failure occurs the pump is decelerated

Frequency < 1 Hz

Failure occurs

Failure acknowledgement

only possible if f<5 Hz

Ready

Start Delay

STOP command

Parameter:P24 = Frequency setpointP25 = Factor normal operation

Fig 35 Diagram: Operation status

4.3.1 Basic menu

Menu item Description Adjustable value / option Ac-cess

min. max. stan- Unitvalue value dard

Ready Operating display - - - - -

Freq. Setpoint Sets the speed for operation 150 480 480 Hz r/w!! Every change is directly writteninto the pump’s data storageand is valid immediately!!

Operation Hours Total operating hours of the pump actual value h r

Motor Temp. Motor temperature actual value °C r

Converter Temp. Temperature of the power actual value °C relectronic

Bearing Temp. Temperature of the magnetic actual value °C rbearing

Actual Value TMS Temperature of the Temperature actual value °C rManagement System

Cooling Temp. Cooling water temperature actual value °C r

Actual PVW 13 Rotor displacement in the magnetic bearing actual value % rplane VW13

Actual PVW 24 Rotor displacement in the magnetic bearing actual value % rplane VW24

Actual PZ 12 Rotor displacement in the magnetic bearing actual value % raxis Z12

Power Power consumption of the drive actual value W r

Software Version Actual software version actual value - r

Plug-in control

40 GA 05.139/1.02 - 06/99

Ready0.0 A 0 Hz

Enter

Freq. Setpoint480 Hz

Enter

Operation Hours0.00 h

Enter

Motor Temp.50 °C

Enter

Converter Temp.40 °C

Enter

Bearing Temp.50 °C

Enter

Actual PVW 1310%

Enter

Actual PVW 2410%

Enter

Actual PZ 125%

Enter

Power400 W

Enter

Not Active

Actual Value TMS63 °C

Enter

Not Active

Cooling Temp.20 °C

Enter

r (read) = value can only be readr /w (read/write) = value can be read and written

4.3 Operating menu

Software Version104.xx

Enter

Pump Standstill

Power Supply OK

Plug-in control

41GA 05.139/1.02 - 06/99


4.3.2 Settings converter



Option Relay 1 Relay with change-over Threshold bearing (Relay 6) contact; the operator can temperature reached °C r/w

select one of the functions Threshold motor described current reached A

Threshold frequency the thresholds are adjusted reached Hzin the following menu items No cooling water -

no purge gas -TMS temperature o.k. -

Vent -Start command applied -Power supply o.k. -

Pump standstill -

Option Relay 2 Start command applied -(Relay 7)

Option Relais 3 Power supply o.k. -(Relay 8)

Option Relais 4 Pump standstill -(Relay 9)

Threshold Threshold bearing temp. 0 100 60 °C r/wfor option relay

Threshold Threshold motor current 0 20 10 A r/wfor option relay

Threshold Threshold frequency 0 480 300 Hz r/wfor option relay

Analog Output Analog output 0...10V; Motor current; the operator can select 20 A =10Vxscale factor V r/wone of the functions Act. frequency ; described 500 Hz = 10Vxscale factor V

Bearing temp.; 100 °C = 10Vxscale factor V

Actual PVW13; 100% = 10Vxscale factor V

Actual PVW24; 100% = 10Vxscale factor V

Actual PZ12; 100% = 10Vxscale factor V

Scale Factor Scale factor for the analog output 0 2 1 - r/w

Analog Input 2 Analog input 0...10V ; No function - r/woptionally frequency setpoint via analog input 2 Function frequency (10V = max. frequency setpoint) setpoint -

Start Delay Waiting time between start command and acceleration 0 1200 0 s r/w

Display Display language English - r/wGerman -

Bus Address Bus adress for the converter by operation via 0 31 0 - r/wserial interface RS232/485

German

Start Command

Enter

Threshold60 °C

Enter

Threshold10.0 A

Enter

Threshold300 Hz

Enter

Actual PZ12

Actual PVW24Actual PVW13

Bearing Temp.Actual Frequency

Analog OutputMotor Current

Enter

Scale factor1.0 x

Enter

Freq. Setpoint

Analog Input 2No Function

Enter

Start Delay0 s

Enter

DisplayEnglish

Enter

Bus Address0

Enter

Enter

Option Relay 3Power Supply OK

Enter

Option Relay 4Pump Standstill

Enter

Option Relay 2Start Command

The setttings of the option relays2 to 4 can be changed similar tooption relay 1 but they cannot bestored in the pump’s data storagedevice. After each power off theoption relays 2 to 4 are in thedefault state.

VentTMS OK

No Purge GasNo Cooling Water

Frequency

Set Converter

Enter

Motor Current

Option Relay 1Bearing Temp.

Plug-in control

42 GA 05.139/1.02 - 06/99

4.3.3 Settings pump



Normal Operation Threshold for normal operation corresponding to the 35 99 95 % r/wfrequency setpoint

Max. Accel. Time Monitor time for acceleration and overload 600 3600 1000 s r/w

Pump Type Displays the installed pump type Installed pump type - r

4.3.4 Settings temperature management system



TMS Setpoint Setpoint Temperature- 20 62 62 °C r/wManagement-System

4.3.5 Settings purge / vent (Not active at MAG W 2010 CHT)



Purge / Vent The operator can select one Purge OFF - r/wof the beside standing Purge ON -options for purge and vent Controlling purge / vent

via control plug X14 -

Option P / V Displays the factory installed option for purge and vent Installed option - r

Set Pump

Enter

Normal Operation95 %

Enter

Max. Accel. time800 s

Enter

Pump TypeMAG 1600/2000 CT

Enter

Set TMS

Enter

TMS Setpoint60 °C

Enter


Via X14Purge ON

Set Purge/Vent

Enter

Purge/VentPurge OFF

Enter

Option P/VOption 1

Enter

Plug-in control

43G

A05.139/1.02 - 06/99

4.3.6To

tal view o

f the m

enuPump Standstill

Power Supply OK

Start Command

Enter

Threshold60 °C

Enter

Threshold10.0 A

Enter

Threshold300 Hz

Enter

Actual PZ12

Actual PVW24Actual PVW13

Bearing Temp.Actual Frequency

Analog OutputMotor Current

Enter

Enter

Option Relay 3Power Supply OK

Enter

Option Relay 4Pump Standstill

Enter

Option Relay 2Start Command

Vent

Programming menu

Stop

Data to Eeprom?Prog=yes Esc=no

Prog

Ready00.0 A 0000 Hz

Esc

Data are storedin the EPROM

To exit the programming menu

Ready0.0 A 0 Hz

Enter

Freq. Setpoint480 Hz

Enter

Operation Hours0.00 h

Enter

Motor Temp.50 °C

Enter

Converter Temp.40 °C

Enter

Bearing Temp.50 °C

Enter

Actual PVW 1310%

Enter

Actual PVW 2410%

Enter

Actual PZ 125%

Enter

Power400 W

Enter

Not Active

Actual Value TMS63 °C

Enter

Not Active

Cooling Temp.20 °C

Enter

Basic menu

Via X14Purge ON

Set Pump

Enter

Normal Operation95 %

Enter

Max. Accel. time800 s

Enter

Pump TypeMAG 1600/2000 CT

Enter

Set TMS

Enter

TMS Setpoint60 °C

Enter

Set Purge/Vent

Enter

Purge/VentPurge OFF

Enter

Option P/VOption 1

Enter

or

Main menus

Software Version104.xx

Enter German

TMS OK

No Purge GasNo Cooling Water

Frequency

Set Converter

Enter

Motor Current

Option Relay 1Bearing Temp.

Scale factor1.0 x

Enter

Freq. Setpoint

Analog Input 2No Function

Enter

Start Delay0 s

Enter

DisplayEnglish

Enter

Bus Address0

Enter

Key Function

Esc • Returns to the operating display from the storage procedurewithout storage.

• Returns to the operating display from any point of the basicmenu.

Mon • No function

Prog • Selects the programming menu from the operating display.• Confirms to store changed parameters to the EEPROM

Enter • Switches forward to the next submenu

Start • Starts the pump (only possible if there is no fault).The start key is only active if the user is in the basic menu or in the operating display.

Stop • Stops the pump• Returns to the operating display from the programming menu.• Acknowledges a failure after the cause of the failure has

been removed.

+ • Increases a parameter value or proceeds to the next option.

– • Lowers a parameter value or returns to the previous option.

< • Selects the programming menu from the operating display.• Switches back to the last main menu.

> • Selects the programming menu from the operating display.• Switches forward to the next main menu.

or oror

Not active at MAG W 2010 CHT

Plug-in control

44 GA 05.139/1.02 - 06/99

4.4 Temperature Manage-ment System

Function description

The TMS is only in function, when a MAG1600/2000 CTor CHT version is connected. The heater will be activa-ted when the mains is switched on. The TMS controls theheating and water cooling to maintain the pump at thespecified setpoint temperature.

Settings

The temperature (TMS) setpoint can be programmed viathe front panel keys when the pump stands still.

Principally the factory presetting will be used. The settingis saved in the pump’s memory chip. Before changingany setpoint value request Leybold!

For the setting refer to 4.3.4 Operating menu, SettingsTMS.

Heat up

The setpoint temperature will be reached within 30 to 60minutes depending on cooling water temperature andflow. If the flow is very high and the temperature low ahigh temperature setpoint might not be reached. Fortemperature sensitive applications observe the coolingwater specifications (refer to Section 1.6 and 2.6).

CautionIn order to guarantee correct temperaturesetting of the pump it is required to providethe cooling water within the envelopedescribed in Section 2.6.

TMS status code

The TMS status code is displayed on the operation dis-play, see Section 4.

Actual temperature

The actual temperature is displayed on the operatingdisplay (refer to 4.3.1 Operating menu, Basic menu)

Signal TMS OK

If the actual TMS temperature lies in the range ±5K fromthe setpoint temperature, the TMS OK signal can be out-put via the option relay. The option relay must be pro-grammed for this function (refer to Section 2.8.3 Controlplug X14, Relay outputs)

Warning message (Temp > Tset+5K)

If the actual temperature exceeds the warning tempera-ture the converter displays the message:

WarningTMS

Plug-in control

45GA 05.139/1.02 - 06/99

T - 5 K

T - 2 K

T + 2 K

T + 5 K

2)

2)

T + 15 K

1) 1 2 3 2 3 4 3 2 2 133 4 455

Sollwert TMS

TMS Code

Heizung EIN

Kühlung EIN

TMS OK

Warnung TMS

Störung TMS

1) The TMS status code is displayed on the operation display; see Section 4.

2) Heater or cooling active

Fig. 36 Function diagram TMS for the MAG.DRIVE 2000

Setpoint temp. T

TMS Code

Heater ON

Cooling ON

TMS ok

Warning Temp. TMS

Failure TMS 5

5 MaintenanceThe MAG is nearly maintenance-free. Wear only occursat the touch-down bearings when hard shocks have tobe supported or when the pump frequently runs downwithout venting.

Maintenance is also required after removing the bearingcable during operation of the pump.

Under these conditions the rotor can not be controlled bythe magnet bearing and the pump will have a full rundown on the touch down bearing.

The rotor has to be changed after 40,000 hours of ope-ration or after 5 years.

Depending on the installation site the converter maycollect grime (dust, moisture) on the inside. Such conta-mination may lead to malfunctions, overheating or shortcircuits. Therefore the converter must be cleaned after 5years.

Only the Leybold service can change the rotor and cleanthe converter.

5.1 Removing the pumpfrom the system

MAG which have been used in semiconductor processesare contaminated by semiconductor process gases.Most of these gases form acids when exposed to moistair which causes serious corrosion damage to the pump.

To prevent corrosion damage during storage and ship-ping, use the seal kit.

Failure to seal a contaminated MAG voids the warranty.

The seal kit contains the following

- dry cartridge,

- plastic cap for forevacuum connection flange,

- plastic adhesive film and

- aluminum cover and screws for the high-vacuumconnection flange.

CautionFor safety reasons we recommend to use ametal seal kit (order no. 200 07 901; seeFig. 38) for shipping of contaminatedpumps. For storage of contaminated pumpsduring tool maintenance the seal kit provi-ded with the pump can be used.

Proceed as follows to seal the turbomolecular pumpimmediately after removing it from your process.

Purge the pump for two hours with the backing pumprunning. This helps to remove a large quantity of the pro-cess gases from the pump. We recommend purging thepump via the intake flange and the purge valve withapprox. 200 sccm.

Press the STOP button at the MAG.DRIVE and wait untilthe pump has come to a standstill.

Afterwards turn the mains switch to the „0“ position.

The cables between the MAG and MAG.DRIVE may bedisconnected only after the MAG has come to a full still-stand and the mains is switched off.

WarningWhen the pump has been pumping hazar-dous gases, ensure that proper safety pre-cautions are taken before opening the inta-ke or exhaust connections.

Use gloves or protective clothing to avoidskin contact with toxic or highly corrosivesubstances. Work under a fume hood ifavailable.

Disconnect the cables from the pump.

Disconnect the cooling water lines. Remaining coolingwater may flow out. Protect all parts below.

Remove 10 of the 12 bolts which hold the intake flange.The 2 remaining bolts must be directly opposite.

Disconnect the forevacuum line.

Support the pump with a lift-truck at the base plate andremove the 2 remaining bolts.

Clean the intake and forevacuum connection flange asnecessary for good adhesion of tape.

Place the dry cartridge into the forevacuum port. Don’tuse loose crystals.

Firmly seal all ports with plastic adhesive film.

Cover the forevacuum connection port with its plasticcap.

GA 05.139/1.02 - 06/99

Maintenance

46

Maintenance

47GA 05.139/1.02 - 06/99

Fig. 37 Sealing the MAG tightly

ring nut (2x)

aluminum cover

plastic adhesive film

washer (6x)

screw (6x)

nut (4x)

dry cartridge

plastic adhesive film

plastic cap

Seal the high-vacuum connection flange with the coverand the screws.

Pack the pump so that it may not be damaged duringtransportation. Particularly protect the flanges, the coo-ling water connectors and the current feedthrough.

Maintenance

5.2 Service at Leybold’sIf you send a pump to Leybold indicate whether thepump is free of substances damaging to health orwhether it is contaminated. If it is contaminated also indi-cate the nature of hazard. To do so, you must use a pre-printed form which we shall send to you upon request.

A copy of this form is printed at the end of the OperatingInstructions: „Declaration of Contamination of VacuumEquipment and Components“.

Either fasten this form at the pump or simply enclose it tothe pump.

Don’t pack the form with the pump into the PE bag.

This declaration of contamination is necessary to comp-ly with legal requirements and to protect our staff.

Leybold must return any pump without a declaration ofcontamination to the sender’s address.

48 GA 05.139/1.02 - 06/99

Maintenance

49GA 05.139/1.02 - 06/99

Fig. 38 Sealing the MAG tightly with the metal seal kit

bolts

collar flange

retaining ring

blank flange

Centering ring with O-ring

desiccant

nuts

sealing disc

screwed sealing plug forpurge gas connector

cap

polyethylene bag with cable tie

desiccant

centering ring with O-ring

blank flange

clamping ring

Troubleshooting

50 GA 05.139/1.02 - 06/99

Warning Message on Display

Motor Temp.

Temperature sensor insidethe motor reads a highertemperature value than thewarning threshold (100 °C).

Bearing Temp.

Temperature sensor insidethe pump reads a highertemperature value than thewarning threshold (75 °C).

Converter Temp.

Temperature sensor inside ofthe converter reads a highertemperature value than thewarning threshold (70 °C).

Cooling Temp.

Temperature sensor at coo-ling water block reads a hig-her temperature value thanthe warning threshold (45°C).

Measures

Take the actual motor temperature readingfrom the display; see Section 4.3.1.Reduce gas load. If the warning persistscontact Leybold service.

Contact Leybold service.

Apply cooling water according to specificati-ons. Check cooling water tubes for deposits.See also Section 2.6.

Allow pump to cool down between thecycles.

Check chamber temperature.

If the red LED at the water valve is on dis-connnect and connect the connector. Thevalve must make noises. If not contact Ley-bold.

Allow converter to cool down between thecycles.

Refer to Section 2.8 for the correct mountingof the converter in a rack; max. ambienttemperature 45 °C.


Possible Cause

Motor temperature exceeds the warningthreshold e.g. due to a high gas load.

Drive failure or internal converter failure.

Cooling water flow too low or cooling watertemperature too high.

Frequent acceleration and deceleration ofthe pump.

Temperature at the high-vacuum connectionflange or at the isolation valve is muchhigher than 85 °C.

Water valve malfunction.

Frequent acceleration and deceleration ofthe pump.

No sufficient air circulation.


6.1 Warning messages

6 TroubleshootingIn case of a malfunction, the MAG will be braked and thefirst line of the display shows

FAILURE

Malfunction messages can be cancelled once the pumphas come to a stop and after the malfunction has beenrectified; do so with the STOP function (button or serialinterface).

WarningThe MAG shall be stopped completely andthe mains power cord detached before youopen the MAG.DRIVE. Since dangerousvoltages may nonetheless be encountered,the housing must be opened only by a qua-lified electrician.

Troubleshooting

51GA 05.139/1.02 - 06/99

Warning Message on Display

TMS

TMS temperature sensorreads a temperature higherthan the TMS setpoint +5 °C.

Unbalanc. PVW13Unbalanc. PVW24Unbalanc. PZ12

A rotor displacement excee-ding the warning thresholdoccured. The code designa-tes the affected axis.

Overload

The rotational speed drop-ped below normal operationfrequency.

Mains down

The converter is in the gene-rator mode.

Op. Without Purge

The warning indicates that aC/CT type of pump is opera-ted while the purge gasvalve is closed.

Protection

The pump drive is blocked.

PK Communication

Converter does not commu-nicate with the memory chipinside of the pump.

Measures


Check the TMS setpoint (default 62 °C). Forthe correct setting refer to Section 4.3.4.


If the red LED at the water valve is on dis-connnect and connect the connector. Thevalve must make noises. If not contact Ley-bold.

If warning message persists contact Leyboldservice.

Check the chamber pressure during operati-on.


Reduce backing pressure. Additionally,check process gas flow.

Set parameter „Normal Operation“ to default95%. Refer also to Section 4.3.3.

Reconnect converter to the mains.

Switch on the converter.

Set purge gas function to Purge ON. (Keypanel or control connector X14).

Deactivate „Emergency off“ via control plugX14.

Check BEARING connector and cable fordamages or bent pins. Contact Leybold ser-vice if the cable is damaged.


Possible Cause


Wrong TMS temperature setpoint.

Temperature at the high-vacuum connectionflange or at the isolation valve is muchhigher than 85 °C.


Mechanical shocks, perhaps due to toolmaintenance.

Shock venting.

Converter failure.

Backing pressure too high during operation.

Parameters „Normal Operation“ are not setcorrectly.

Mains interrupted or converter switched offduring operation of the pump.

Purge gas function disabled.

Emergency off active.

BEARING cable damaged.

Memory chip inside of magnetic bearing car-tridge malfunctioning.

Troubleshooting

52 GA 05.139/1.02 - 06/99

Failure Message on Display

Motor Temp.

Temperature sensor insidethe motor reads a highertemperature value than thefailure threshold (100 °C).

Cooling Temp.

Temperature sensor at coo-ling water block reads a hig-her temperature value thanthe failure threshold (55 °C).

Measures

Acknowledge failure message.

Take the actual motor temperature reading from thedisplay; see Section 4.3.1.Reduce gas load. If the warning persists contactLeybold service.

Step 1: Check pump (temperature sensor)

Check pump connector X23. In particular measureresistance between pins X23/x and X23/w. Theresistance is typically 2kΩ ± 1 %. In case of abnor-mal values (> 3.4 kΩ) are measured contact Ley-bold service.

Step 2: Check BEARING cable

If step 1 was successful do the following:

Check BEARING cable for bent pinsMeasure the resistance between pins X20/x andX20/w with the cable connected to the pump. Theresistance is typically 2kΩ ± 1 %.

Replace the cable if it is damaged or in case themeasurement of the resistance shows abnormalvalues (> 3.4 kΩ) now.


Apply cooling water according to specifications.Check cooling water tubes for deposits. See alsoSection 2.6.

Step 1: Check cooling water temperature sen-sor

Check pump connector X30. In particular measureresistance between pins X30/S and X30/V. Theresistance is typically between 110 Ω and 130 Ω(20 °C to 70 °C).

Step 2: Check TMS cable and connectors


Check TMS cable for bent pinsMeasure the resistance between pins X26/W andX26/V with the TMS cable connected to the pump.The resistance is typically between 110 Ω and 130Ω (20 °C to 70 °C).

Replace TMS cable if it is damaged or in case themeasurement of the resistance shows abnormalvalues now.


Possible Cause

Motor temperature exceeds the failu-re threshold e.g. due to a high gasload.

Motor temperature sensor defective.

BEARING cable or connector dama-ged.

Converter failure.

Cooling water flow too low or coolingwater temperature too high.

Pt 100 (cooling water temperaturesensor) damaged.

TMS cable or connectors damaged.

Converter failure.

6.2 Failure messages

Troubleshooting

53GA 05.139/1.02 - 06/99


Bearing Temp.

Temperature sensor insidethe pump reads a highertemperature value than thefailure threshold (76 °C).

Converter Temp.

Temperature sensor inside ofthe converter reads a highertemperature value than thefailure threshold (90 °C).

Overload PZ 12Overload PV 13Overload PW 24

An abnormal displacementof the rotor occured at fre-quencies between 0 and 5Hz. The code designates theaffected axis.

Measures


Allow pump to cool down between the cycles.

Step 1: Check pump (temperature sensor)

Check pump connector X23. In particular measureresistance between pins X23/v and X23/u as wellas between pins X23/v and X23/t. The resistance istypically between 110 Ω and 130 Ω (20 °C to 70°C). In case abnormal values are measured contactLeybold service.

Step 2: Check BEARING cable


Check BEARING cable for bent pinsMeasure the resistance between pins X20/v andX20/u as well as between pins X20/v and X20/twith the cable connected to the pump. The resi-stance is typically between 110 Ω and 130 Ω (20°C to 70 °C).

Replace the cable if it is damaged or in case themeasurement of the resistance shows abnormalvalues now.


If the red LED at the water valve is on disconnnectand connect the connector. The valve must makenoises. If not contact Leybold.


Allow converter to cool down between the cycles.

Refer to Section 2.8 for the correct mounting of theconverter in a rack; max. ambient temperature 45°C.


Acknowledge failure message and restart thepump. If failure message persists contact Leyboldservice.

Remove transport seal; see Section 2.4.

Check BEARING connector and cable for bentpins. Contact Leybold service if the cable is dama-ged.

Possible Cause


Frequent acceleration and decelerati-on of the pump.

Pt 100 (temperature sensor bearing)damaged.

BEARING cable or connectors dama-ged.

Temperature at the high-vacuumconnection flange or at the isolationvalve is much higher than 85 °C.


Converter failure.

Frequent acceleration and decelerati-on of the pump.

No sufficient air circulation.

Converter failure.

Mechanical shocks, possibly due totool maintenance whwn the rotorstands still.

Pump is still protected with transportseal on power up.

BEARING cable or connector dama-ged.

Troubleshooting

54 GA 05.139/1.02 - 06/99


MB

An abnormal displacementot the rotor occured at fre-quencies between 146 Hzand 480 Hz.

MB-Code Wrong

Magnetic bearing controllerdoes not work.

Starting Time

The frequency has not rea-ched 40 Hz 2 minutes afterthe start command wasapplied.

Accel. Time

The pump does not reachthe normal operation fre-quency after the set maxi-mum acceleration time.

Overload Time

The rotational speed hasdropped below normal ope-ration frequency and staysthere for longer than themaximum „Accel. Time“.

Shutdown Freq.

Rotational speed droppedbelow the shutdown frequen-cy threshold (140 Hz).

Cooling Temp. SC

The cooling water tempera-ture sensor reads a tempera-ture lower than 1 °C.

Measures

Acknowledge failure message and restartthe pump. If failure message persistscontact Leybold service.

Check the chamber pressure during theoperation. Refer to Section 3.1 for correctventing of the pump.



Reduce backing pressure.

Check if the rotor rotates freely. ContactLeybold service if the rotor is damaged orblocked.

Reduce backing pressure.

Set parameter „Accel. Time“ to default 1000s; see Section 4.3.3.

Reduce backing pressure. Additionallycheck process gas flow.

Set parameter „Normal Operation“ todefault 95 % and parameter „Accel. Time“ todefault 1000 s; see Section 4.3.3.

Reduce backing pressure. Additionallycheck process gas flow.

Repeat step 1 of „failure Cooling Temp.“.Contact Leybold service if the resistance ofthe sensor is less than 100 Ω.

Repeat step 2 of „failure Cooling Temp.“.Contact Leybold service if the resistance ofthe sensor is less than 100 Ω.


Possible Cause

Mechanical shocks, possibly due to toolmaintenance.

Shock venting.

Converter failure.

Converter failure.

Backing pressure too high during start-up.

Rotor blocked.

Backing pressure too high during start-up.

Parameter „Accel. Time“ is not set correctly.


Parameters „Accel. Time“ or „Normal Opera-tion“ are not set correctly.


Temperature sensor Pt 100 short-circuited.

TMS cable short-circuited.

Converter failure.

Troubleshooting

55GA 05.139/1.02 - 06/99


Bearing Temp. SC

The magnetic bearing tem-perature sensor reads a tem-perature lower than 1 °C.

Motor Temp. SC

The motor temperature sen-sor reads a temperaturelower than 1 °C.

Connection pump

Frequency XX*

Abnormal motor current orfrequency

*XX is a code no. between43 and 55. It helps the Ley-bold service to find thecause of the failure.

No Motor Current

TMS 1

The converter measures aheating current of less than300 mA when heater is on.

Measures

Repeat step 1 of „failure Bearing Temp.“.Contact Leybold service if the resistance ofthe sensor is less than 100 Ω.

Repeat step 2 of „failure Bearing Temp.“.Contact Leybold service if the resistance ofthe sensor is less than 100 Ω.


Repeat step 1 of „failure Motor Temp.“.Contact Leybold service if the resistance ofthe sensor is less than 1.62 kΩ.

Repeat step 2 of „failure Motor Temp.“.Contact Leybold service if the resistance ofthe sensor is less than 1.62 kΩ.


Check if the BEARING cable is connected tothe pump and the converter. Acknowledgefailure message.


Acknowledge failure message. If failure per-sists contact Leybold service.


Check cables and connectors, straightenpins if required.

Deactivate „Emergency off“ via control plugX14 and acknowledge failure message.

Reconnect or replace DRIVE cable.

Step 1: Check fuse

Replace fuse TMS (F4A, 5x20 mm) if blown.

Step 2: Check pump (heating element)

Check if the connector of the heating ele-ment is connected.

Check pump connector X30. In particularmeasure resistance between pins X30/A andX30/B. The resistance is typically between70 Ω and 75 Ω. In case abnormal values aremeasured contact Leybold service.

Step 3: Check TMS/DRIVE cable


Check TMS/DRIVE cable for bent pinsMeasure resistance between pins X21/b andX21/d with the cable connected to the pump.The resistance is typically between 70 Ωand 75 Ω.

Replace the cable if it is damaged or in casethe measurement of the resistance showsabnormal values now.


Possible Cause

Temperature sensor Pt 100 short-circuited.

BEARING cable short-circuited.

Converter failure.

Temperature sensor KTY short-circuited.

BEARING cable short-circuited.

Converter failure.

BEARING cable not connected.

Converter failure.

The rotor frequency exceeds 515 Hz.

Converter failure.

On START command: DRIVE cable notconnected or connectors damaged.

Resultant message after activating „Emer-gency off“.

DRIVE cable interrupted during operation ofthe MAG.

Fuse TMS blown.

Heating element or internal pump connec-tion damaged.

TMS/DRIVE cable or connectors damaged.

Converter failure.

Troubleshooting

56 GA 05.139/1.02 - 06/99


TMS 2

The converter measures aheating current of more than4 A.

TMS 3

TMS temperature sensorreads a temperature higherthan 99 °C.

TMS 4

TMS temperature sensorreads a temperature lowerthan 1 °C.

TMS 5

TMS temperature sensorreads a temperature higherthan the TMS setpoint + 15°C.

Measures

Check the line voltage (200-240 V +10% / -15%).

Repeat step 2of failure TMS 1. In case the measu-red value is less than 60 Ω contact Leybold servi-ce.


Step 1: Check TMS sensor

Check pump connector X30. In particular measureresistance between pins X30/F and X30/H as wellas between pins X30/H and X30/G. The resistanceis typically between 110 Ω and 130 Ω (20 °C to 70°C).

Step 2: Additional TMS sensor test

If temperature sensor TMS (Pt 100) has the correctresistance, unplug it while the pump is on power.The water valve should open instantly with aclicking noise and a red LED inside the coolingwater valve connector lighting up. This LED shouldbe on if the actual TMS temperature is higher thanthe TMS setpoint + 2 °C.

Contact Leybold service if the sensor is defective.

Step 3: Check TMS/DRIVE cable

Check TMS/DRIVE cable connector X21. In parti-cular measure resistance between pins X21/K andX21/M as well as between pins X21/K and X21/L.The resistance is typically between 110 Ω and 130Ω (20 °C to 70 °C).

Contact Leybold service if the TMS/DRIVE cable isdamaged.


Repeat steps 1 and 2 of failure TMS 3. ContactLeybold service if the sensor is defective.

Repeat step 3 of failure TMS 3. Contact Leyboldservice if the cable is damaged.



Repeat step 2 of failure TMS 3. Contact Leyboldservice if cooling water valve is malfunctioning.

Check the TMS setpoint (default 62 °C). For thecorrect settings refer to Section 4.3.4.


Possible Cause

Overvoltage.

Heating element defective.

Converter failure.

TMS sensor damaged.

TMS/DRIVE cable damaged.

Converter failure.

TMS sensor short-circuited.

TMS/DRIVE cable short-circuited.

Converter failure.


Cooling water valve malfunctioning.

Wrong TMS temperature setpoint.

Temperature at the high-vacuumconnection flange or at the isolationvalve is much higher than 85 °C.

Troubleshooting

57GA 05.139/1.02 - 06/99

Malfunction

Converter dead, LED„mains“ does not light upafter switching on.

Display malfunction, confu-sing messages. No reactionwhen pressing keys.

Vacuum chamber pressurerises above normal backingpressure while the pump isstopped.

No purge gas flow

Base pressure not reached.

MAG does not heat up.

Display blurred.

Measures

Check the line voltage.


Switch the converter off and on again. If theconverter still malfunctions contact Leyboldservice.

Open and close purge gas and/or ventingvalve via control plug X14. LED on the valvemust light up and a clicking noise can beheard. Foreline pressure drops while thevalve is closed.

Set purge flow according to specification.

Leave the pump system run for 3 to 5 hoursto reach a pressure below 10-5 mbar.

See TMS failures.

Operate the converter according to the spe-cifications.

Possible Cause

No power supply.

Fuse F1 blown or converter failure.

Converter failure.

Purge gas and venting valve open or mal-functioning.

Valve malfunctioning.

Degassing surfaces of rotor and stator. If thepump was stored in a humid environment orwas exposed to humid ambient air all surfa-ces will be covered with condensation.

TMS failure.

Ambient temperature too high or too low.

6.3 Malfunctions

Certifications

58 GA 05.139/1.02 - 06/99

Cologne, May 19, 1999

—————————————————————Stolle, Design Manager Turbomolecular pumps

We - LEYBOLD Vacuum GmbH - herewith declare thatoperation of the incomplete machine defined below, isnot permissible until it has been determined that themachine into which this incomplete machine is to beinstalled, meets the regulations of the EEC Directive onMachinery.

At the same time we herewith certify conformity withEEC Directive on Low-Voltages 73/23/EWG.

When using the appropriate Leybold accessories, e.g.connector lines and when powering the pump with thespecified Leybold frequency converters, the protectionlevel prescribed in the EMC Guidelines will be attained.

Designation: Turbomolecular pump

Model: MAG W 2010 CHT

Catalogue number: 121 31

EEC Manufacturer’s Declarationin the sense of EEC Directive on Machinery 89/392/EWG, Annex IIb

Applied harmonized standards:

• EN 292 Part 1 & 2 Nov. 1991

• EN 1012 Part 2 1996

• EN 60 204 1993

Applied national standards and technical specifications:

• DIN 31 001 April 1983

• DIN ISO 1940 Dec. 1993

Cologne, May 19, 1999

—————————————————————Dr. Mattern-Klosson, Business Area Manager Turbomolecular pumps

Certifications

59GA 05.139/1.02 - 06/99

EC declaration of manufacturein accordance with Art. 4 paragraph 2 of EC directive 89/392/EEC

Document No.: MSR 0898 / MAG.DRIVE 2000

Manufacturer: REFU elektronik GmbH

Product Identification: MAG.DRIVE 2000

Catalog No.: 121 35, 121 36, 121 37, 121 44

The product indicated solely for fitting in another machine. Commissioning isprohibited until the conformity of the end product with EC directive89/392/EEC has been established.

Standards applied: EN 60204-1

EN 61010-1

REFU elektronik GmbH

Metzingen, 1999.04.15

................................................... ...................................................

Harald Lautz, Herbert Schleicher,Head of Business Unit OEM Manager of Developement OEM

The savety notes given in the product documentation must be observed.

Certifications

60 GA 05.139/1.02 - 06/99

EC declaration of conformity

Document No.: NSR 0898 / MAG.DRIVE 2000



Catalog No.: 121 35, 121 36, 121 37, 121 44

Herewith, we declare that this product, as a result of ist design and type ofconstruction, and the version marketed by us, correspond to the basic healthand safety regulations specified in the EEC Directives.

This declaration is no longer valid if the product is modified without us beingin full agreement.

The product conforms to the EEC Low-Voltage Directive (73/23/EEC).

Standards applied: EN 61010-1

Display the CE-mark: August 1998



................................................... ...................................................


The savety notes given in the product documentation must be observed.

Certifications

61GA 05.139/1.02 - 06/99

Factory certificate

Document No.: EMV 0898 / MAG.DRIVE 2000



Catalog No.: 121 35, 121 36, 121 37, 121 44

The named product, when put to ist intended use, satisfies the requirementsof Directive 89/336/EEC concerning electromagnetic compatibility.

The applicable measurements were made taking into account the followingstandards:

EN 50081 Part 2EN 50082 Part 2

Note

Attention must be paid to the information provided on proper installation withrespect to elektromagnetic compatibility and to other pertinent notes in thedocumentation supplied with the product, as well as to the relevant informa-tion concerning electrical connection.



................................................... ...................................................


62 GA 05.139/1.02 - 06/99

The system MAG 2000

• turbomolecular pump

• connecting cables

• frequency converter

has been tested by the TÜV Rheinland of North Americaaccording to the requirements of

• NRTL(used standards UL 3101, EN 61010) and

• SEMI S2

The components are in compliance to the tested stan-dards.

NRTL Report No. E9814034E01

The tested system includes the following components:

Turbomolecular pump MAG (W) 1600/2000, Cat. Nos. 121 31, 121 32894 14, 894 15, 894 16, 894 17, 894 28, 894 29, 894 30, 894 31

Frequency converter MAG.DRIVE 2000,Cat. Nos. 121 35, 121 37, 121 44

Plug-in control, Cat. No. 121 36

BEARING cable, Cat. Nos. 121 17, 121 19, 121 21, 121 25, 121 29

DRIVE/TMS cable, Cat. Nos. 121 18, 121 20, 121 22, 121 26, 121 30

Certifications

Notes

63GA 05.139/1.02 - 06/99

64 GA 05.139/1.02 - 06/99

S AM P

L E

Declaration of Contamination of Vacuum Equipment and ComponentsThe repair and/or service of vacuum equipment and components will only be carried out if a correctly completed declaration hasbeen submitted. Non-completion will result in delay. The manufacturer could refuse to accept any equipment without a declara-tion.This declaration can only be completed and signed by authorized and qualified staff.

1. Description of Vacuum Equipment and Com-ponents

- Equipment type/model: _________________________________- Code No.: _________________________________- Serial No.: _________________________________- Invoice No.: _________________________________

- Delivery date: __________________________

2. Reason for Return________________________________________________________________________________________________________________________________________________________________________________________________________________________________________________________________________

3. Condition of the Vacuum Equipment and Com-ponents

- Has the equipment been used?yes no

- What type of pump oil/liquid was used? _________- Is the equipment free from potentially

harmful substances?yes (go to Section 5)no (go to Section 4)

4. Process related Contamination of Vacuum Equipment and Components:

- toxic yes no

- corrosive yes no

- explosive*) yes no

- biological hazard*) yes no

- radioactive*) yes no

- other harmful substances yes no

*) Vacuum equipment and components which have been contaminated by biological explosive or radioactive substances,will not accepted without written evidence of decontamination!

Please list all substances, gases and by-products which may have come into contact with the equipment:

Trade nameProduct name Chemical name Dangerous Measures First aid in case ofManufacturer (or Symbol) material class if spillage human contact

1.

2.

3.

4.

5.

Cop

ies:

Pag

e 1

(whi

te)

to m

anuf

actu

rer

or r

epre

sent

ativ

e -

Pag

e 2

(yel

low

) at

tach

to

cons

ignm

ent

pack

agin

g se

cure

ty -

Pag

e 3

(blu

e) c

opy

for

file

of s

ende

r

5. Legally Binding Declaration

I hereby declare that the information supplied on this form is complete and accurate. The despatch of the contaminatedvacuum equipment and components will be in accordance with the appropriate regulations covering Packaging, Transpor-tation and Labelling of Dangerous Substances.

Name of organisation or company:_____________________________________________________________________

Address: _____________________________ Post code:______________________________________

Tel.: ______________________________________________________________________________

Fax: _____________________________ Telex: _________________________________________

Name: ______________________________________________________________________________

Job title: ______________________________________________________________________________

Date: _____________________________ Company stamp:

Legally binding signature:____________________________________________________________________________

Copyright © 1991 by MaschinenbauVerlag GmbH, Lyoner Straße 18, 6000 Frankfurt/M. 71 Order No.: 2121

65GA 05.139/1.02 - 06/99

Form TMP-1 … Turbopump Field Failure ReportField Service IR No.: RMA No. (if returning to factory):

Service Center:

Customer:

Turbopump Model: Turbopump Pump Part Number:

Turbopump Serial Number:

Complaint:

Process:

OEM Equipment Name and Model:

Process Gas:

Was the turbopump replaced? Yes; No.

If yes, replacement pump P/N: replacement pump S/N:

Date Installed: Date Removed:

Date Received:

Date Examined: Examined by:

Received Condition:

Findings:

Cause of Failure:

Recommendations:

Remarks/Questions:

LEYBOLD AG

Fax to: Service LVFax#: (0049) 221 347 1945

LEYBOLD VACUUM

LEYBOLD VAKUUM GmbHBonner Strasse 498 (Bayenthal)D-50968 CologneTel.: + 49 (221) 347-0Fax: + 49 (221) 347-1250http://www.leyboldvac.dee-mail:[email protected]

LVS

VS

_017

46_1

999

P

G

06

.99

Prin

ted

in G

erm

any

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ine-

free

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ache

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aper

Tech

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ratio

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eser

ved

MAG W 1600 C, CT(Operation diagram & pum-ping speed curve missing)

MAG 2000 C, CT

MAG W 2000 C, CT

MAG W 1600 C, CT

MAG 2000 C, CT

MAG W 2000 C, CT

GA 05.130/1.02

(December 1997)

MAG.DRIVE L

MAG.DRIVE L2 (Trouble-shooting incomplete)

MAG.DRIVE L

MAG.DRIVE L2 (Trouble-shooting incomplete)

GA 05.130/2.02

(February 1998)

MAG 1600 C, CT

MAG W 1600 C, CT

MAG 2000 C, CT

MAG W 2000 C, CT

MAG.DRIVE L

MAG.DRIVE L2

GA 05.130/3.02

(May 1998)

MAG 1600 C, CT

MAG W 1600 C, CT

MAG 2000 C, CT

MAG W 2000 C, CT

MAG.DRIVE 2000GA 05.135/1.02

(August 1998)

MAG W 2010 C3 Beta site units

MAG.DRIVE 2000GA 05.136/1.02

(July 1998)

MAG W 2010 C MAG.DRIVE 2000GA 05.136/2.02

(October 1998)

MAG 1600 C, CT

MAG W 1600 C, CT

MAG 2000 C, CT

MAG W 2000 C, CT

MAG.DRIVE 2000GA 05.135/2.02

(October 1998)

Operating Instructions for MAG 2000 seriesOperating

InstructionsValid for pumps Valid for Converters

MAG 1600 C, CT

MAG W 1600 C, CT

MAG 2000 C, CT

MAG W 2000 C, CT

MAG.DRIVE 2000

including NRTL & SEMI S2 certifications

GA 05.135/3.02

(June 1999)

MAG W 2010 CHT MAG.DRIVE 2000

including NRTL & SEMI S2 certifications

GA 05.139/1.02

(June 1999)

Documents

Vacuum Solutions Application Support Service LEYBOLD …