Vacuum / High Purity Product General IntroductionGeneral Introduction

KING LAI HYGIENIC MATERIALS CO., LTD.

Introduction

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Introduction

CUSTOMER SUCCESS IS OUR SUCCESSKi L i f d d i 1991 T i i i t Chi i 2000 i fKing Lai, founded in 1991 Taiwan, expansion into China in 2000, is one ofthe fastest growing manufacturers for components and fittings in sanitarypiping systems.

There are four sales divisions:Sanitary, Bio‐ pharmaceutical, Vacuum and High purity.

King Lai is constantly improving and upgrading to meet all technologicaladvancement. King Lai’s ISO 9001 certification and 3A certification are theresults of our dedication to customer service and product quality. Withthis in mind, we are proud to say “customer success is our success”.

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Introduction

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KL Groups Organization

KL Groups HQ

Kunshan, China

King Lai Hygienic Kunshan King Lai King Lai Hygienic Materials Co., Ltd

Taiwan

Hygienic Materials Co., Ltd

China

Vacuum Product Manufacturing

UHP Products Manufacturing

Weld fitting Manufacturing

UHP Products Manufacturing

Company History1998

Vacuum Production

2002

2005Member of SEMI

2009ISO 9001‐2000

Certification (Polaris)PED Certification

1991Founded in Taiwan

2002Member of TaiwanVacuum Society

(Polaris)ISO 14001‐2004Certification (TW)BSI: EMS 544433

2007Established Polaris in 

Kunshan (CN)HQ M d t K h (CN)

2013BPE Certificate application

Sanitary Production HQ Moved to Kunshan (CN)

2008Vacuum Chamber Production

UHP ProductionV A l V l

19973A CertificationISO 9001‐2000

C tifi ti (TW)

2004BPE ProductionISO 9001‐2000

C tifi ti (CN)

2011T2 LOCATION: More CNC machining for chamber 

d ti

2000

Vacuum Angle Valve Production

ISO 9001‐2000

Certification (TW)BSI: FM 52537

Certification (CN)BSI: FM 85641

production.Hard anodize processing

2006 G P bli2000Expand Production 

Facilityin Kunshan (CN)

2006Expand Kunshan (CN) Facility 

Member of TSIAMember of ISPE

Gone PublicExpend CNC center in Kunshan 

KL Groups Product LinesBPE

Bio-Technologies

SANITARYFood Industries

High Purity: Cas flowsTubing: Construction BPETubing: Construction VACCUM: 

Thin Film Technologies

SANITARYHigh PurityTubing

VACUUM

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S I d t i S i d t Di l S l ll LED li hti G t R&D

Vacuum & UHP Products‐Market ViewServe Industries Semiconductor Display Solar cell LED lighting Government R&D

Application Vacuum High Purity

T S d d W ld bl C i S d d W ld bl C i

fittingHV/ UHV fittingInstrument High purityPump line

Type Standard Weldable Customize

Formed valve Vacuum

Standard Weldable Customize

fittingHV/ UHV flanges, fitting, tubing hardware

fittingInstrument fittings & valves

High purity weldment

Pump lineFormed bellowsMetal hose 

valve Vacuum chamber

Product Line

ype

Constructor Constructor

Busine

ss Ty Private Label

Distributor

Integrator

Private Label

Distributor

Integrator Integratorg g g

Vacuum & UHP Products‐Facility View

Vacuum & UHP Products‐Tooling View

Transfer Gas delivery

Gas delivery line

valve delivery system

LoadlockProcessingBuffer Chamber Bubbler

Door valve Isolation & Throttling valve

Chamber

valve

HV pump

Pumping & Foreline components &

Local scrubber components & components &

Isolation valve

Dry pump

pIsolation valve

L lLocal scrubber

Components‐ KF/ISO Components

KF/ISO Assembly:* Application:  High Vacuum* Material:  SS 304 / SS 304L / SS 316L / Aluminum* Flange Size:  KF 10 ~ ISO 500* Tube/Pipe Size:  ½” ~ 16”* Surface Finish:  Rumbled / Tumbled / Bead Blasted* Vacuum Range:  760 Torr ~ 1 x 10 ‐8 Torr* Gasket:  Viton / Buna‐N / Silicon* Temperature:  ≤ 200  ℃ (150℃ sustained) 

Viton oViton o--ring sealedring sealed

Components‐ CF Components

CF Assembly:* Application:  Ultra‐High Vacuum* Material:  SS 304 / SS 304L / SS 304ESR / SS 316L/ / /* Flange Size:  CF 1.33” ~ CF 16.5”* Tube/Pipe Size:  ½” ~ 6”* Surface Finish:  Rumbled / Tumbled / Bead Blasted* Vacuum Range:  760 Torr ~ 1 x 10 ‐12 Torr* Gasket:  OFHC Copper or Silver Plated Copper* Temperature:  ‐190 ℃ ~ 450 ℃

Metal sealedMetal sealed

Vacuum Weld Fittings & Components

VacuumWeld Fittings:Vacuum Weld Fittings:* Application:  Facility pumping & exhaust line construction (Orbital Welder)* Material:  SS 304 / SS 304L  / SS 316L* Size: ¾” ~ 6”Size:  ¾    6  * Products: Tubing, Elbows, Tees, Reducers and Valves* Surface Finish:  Tumbled / AP / MP / EP

Vacuum Poppet Angle & Inline Valves

Vacuum Isolation Poppet valveVacuum Isolation Poppet valveppppVacuum: HV gradeVacuum: HV gradeLeak rate: 1ELeak rate: 1E--9 mbar l/s, He9 mbar l/s, HeReliability: 1 million cyclesReliability: 1 million cycles

1 year1 yearyyAvailable for welded bellows sealed andAvailable for welded bellows sealed andBellowsBellows--lesslessApplication for Application for 11 Pumping line isolationPumping line isolation1.1. Pumping line isolation Pumping line isolation 2.2. Foreline isolationForeline isolation

Vacuum Components Transfer Valve

Vacuum Transfer valveVacuum Transfer valveVacuum: HV gradeVacuum: HV gradeLeak rate: 1ELeak rate: 1E--9 mbar l/s, He9 mbar l/s, HeReliability: 1 million cyclesReliability: 1 million cycles( depend on process)( depend on process)( p p )( p p )Both Aluminum alloy or SUS valve bodies Both Aluminum alloy or SUS valve bodies are available.are available.Bellows sealed and bellowsBellows sealed and bellows--less are available.less are available.Application for Application for ppppVac to Vac transfer substrate Vac to Vac transfer substrate

High Purity Fitting

Application:

1. Fab facility bulk gas installationSurface for Surface for EPEP 2. CDA tube installation

3. Special gas line installation

EPEPBABAMPMP

Instrument Fittings (Swagelok Compatible)

Two-Ferrules are Applicable in :Process Control Systems / Bulk Gas Systems / Semiconductor Tools / PetrochemicalSuitable For:

High Pressure / Shock Resistance / Vacuum / Thermal Shock

High Purity Regulators

High Purity Weldments

Weldments:* Application: CDA / Bulk Gas / UHP Gas / Special Gas

Surface forSurface forEPEPApplication:  CDA / Bulk Gas / UHP Gas / Special Gas

* Material:  SS 316L * Welding Environment:  Class 100 Cleanroom* I ti H li L k T t / B

BABAMPMP

* Inspection:  Helium Leak Test / Borescope

Bubblers

BubblersBubblersMake: HP gradeMake: HP gradeMake: HP gradeMake: HP gradeLeak rate: Leak rate: 11EE--10 10 mbar l/s, Hembar l/s, HeMaterial: Material: Body: SUSBody: SUS316316L L Fittings & valves: Swagelok ( or equivalent )Fittings & valves: Swagelok ( or equivalent )Fittings & valves: Swagelok ( or equivalent )Fittings & valves: Swagelok ( or equivalent )Application for Application for Consumable liquid form materialsConsumable liquid form materialsFor PECVD, MOCVD…. Processing. For PECVD, MOCVD…. Processing.

DOT comply & certificate under Auditing

Gas Delivery System

A li tiApplication:FAB Facility GasCVD processing systemy

Re-arrangement facility gaslineand special process gasline for customize design + fabricationgFabrication ability:•Weldments Orbital welding•Frames + plates machining & welding•Module assembly•Leak check•Leak check•Electronic functional test

Main Material

Material:   Stainless Steel304 / 304L / 304ESR316 / 316L / 316LN316 / 316L / 316LN316Ti 

Aluminum6061 T6

CopperC101 / C103

China

Global Supply Chain‐Major SuppliersSweden

SandvikSolid Bar / Hollow Bar

Outokumpu

OutikumpuCoil

SandvikTube

KoreaSpace Solution

Edge Welded Coil Polaris

Tube

BellowsGST

Formed Bellows

TaiwanGloria

Solid Bar / Hollow Bar / Sheet

Major OEM Equipment Maker Customers

Major Private Label Customers

감사합니다Danke Dank

ありがとう Grazias

Merci

ขอบคณครับขอบคณคะ

Grazie

謝謝

ขอบคณคะSalamat

Obrigado 謝謝ObrigadoTERIMA KASIH