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Unit for Nano Fabrication
Clean Room Principles
July 2008
Safety - General
It is FORBIDDEN to enter the clean room without signing in with the personal ID card
Guests will receive “VISITOR” card The ID card is for the personal use ONLY Never work in the Clean Room alone Regular working hours: from 8AM to 5PM; work out of
working hours needs authorization All the chemicals going into the clean room must be
approved and cataloged by Noa Mazorsky
Safety – Alarms
Fire Alarm Security Alarm Exhaust Alarm
Go out from the clean room
Call for a UNF staff member
Safety – Emergency Exits
Safety– Emergency Electricity Breakers
Safety – Fire Extinguishers
Safety – Emergency Showers
Clean Room Protocol - Purpose Promote Successful Clean Room Operations Ensure Safety in the Clean Environment Provide Operational Conditions that Meet
Process & User Needs
Perspective
• The protocol provides basic awareness and general guidelines for clean room users
• Successful clean room operation relies on each user’s understanding, participation and self discipline
• The success of each user relies on trust, understanding and shared responsibility among all users
What is a Clean Room?
A clean environment designed to reduce the contamination of processes and materials. This is accomplished by removing or reducing contamination sources.
Principles of the Clean Environment Air is highly (HEPA) filtered
(99.99% @ 0.3) Layout should minimize
particle sources in filtered air stream
Air flow should remove most particles generated by process
Types of Contamination
ParticulateDust, skin, hair, makeup…
ChemicalOil, grease, metal ions, perfume…
BiologicalBacteria, fungi,
RadiationUltraviolet light…
Particle Characteristics
50 micron particles are visible Average human hair is about 100 microns Time to fall 1 meter in still air
33 seconds for 10 micron particle 48 minutes for 1 micron particle
Humans generate >1x105 particles per minute when motionless (fully gowned)
Humans can generate >1x106 particles when walking in the clean room
Contamination Sources
People ~75% Ventilation ~15% Room Structure ~5% Equipment ~5%
Contamination Control
Personnel Control Dress code Personal Hygiene Gowning
Environmental Control Entrance and exit Materials and supplies Cleaning and maintenance Atmospheric
Dress Code
No sleeveless shirts No shorts or skirts No slippers or sandals No jewelry that can puncture garments or
gloves Avoid clothing that sheds
Personal Hygiene
Control Dermatitis & Dandruff Do not smoke before entry
Wait at least 20 min. after smoking to enter the clean room
No chewing gum or tobacco No Cosmetics should be worn Facial hair will need to be covered
Gowning
Proper gowning order Hair cover Shoe covers Mouth cover (only for those with mustache or beard) Coverall Booties Gloves Safety Glasses
The use of gloves in the e-LINE room is not obligatory, but ONLY in this room.
Gowning Basics
Garments should not be removed from clean room unless in approved container
Don’t walk out of the clean room with your garments on
Change garments when soiled or showing any visible signs of wear
Don’t reach inside your garment while in the clean room
Garment Reuse and Storage
Reusable – Store in the Gowning Room Coveralls Booties (not the blue disposables) Safety Glasses
Not Reusable – Throw in trash Hair cover Blue disposable shoe covers Gloves Mouth cover
Entry & Exit
The use of the access card is a MUST (entry and exit)
Enter and exit quickly Each user must use their own access card
including visitors Use the passthrough access for small objects
Materials and Supplies
Do not carry non-clean room items into the clean room
Do not carry clean room items out of the clean room Do not use pencils or erasers Paper should be kept in a plastic sleeve Do not cut the clean room wipers Clean everything you carry into the clean room
Chemicals
Do not take new chemicals into the clean room without permission of Noa Mazurski
Always read MSDS for every chemical you use Large quantities of chemicals must be stored outside the
clean room Chemicals inside the clean room should be properly
stored in their storage cabinets All chemical containers should be clearly labeled with
their contents and Hazard Classification Unattended chemicals and experiments should be
labeled with the owners name, immediate contact number, list of all chemicals involved, and estimated time of return or completion.
Chemical Handling
Do not transport chemicals in open containers Chemicals should be used inside approved hoods Full apron, Trionic gloves and full face shield are
required for using all acids Gloves, lab coat, and safety glasses are considered
minimum personal protective equipment when handling ANY chemical
Chemical Handling
In case of a small spill Inform all users in the clean room Clearly mark the affected area Use appropriate absorbent material to clean up the spill
In case of large spill Inform all users in the clean room Clearly mark the affected area and evacuate Contact UNF staff immediately
Chemical Handling
Chemical waste should be properly disposed in the appropriate waste container into the hoods
No chemicals may be poured down the drains Waste containers should be properly marked as
such If you have questions about disposal contact a staff
member
In Case of Emergency
Always follow the rules set forth by UNF staff If an emergency requires evacuation, leave
the clean room immediately, do not stop to un-gown
Inform other users before leaving
Equipment use
All users must be trained before using any equipment
All equipment use should be scheduled Before operating any equipment check with UNF
staff if it is useable If you are unable to use scheduled time please
delete your reservation It is every users responsibility to report damaged or
malfunctioning equipment It is every users responsibility to properly operate
and clean each piece of equipment that they use
Housekeeping
Every user is responsible for keeping the clean room clean
Always clean your workspace before leaving Don’t leave or store items on or in equipment Store your personal items (samples, wafers, tools)
in the locker located in the clean room main corridor Do not set liquids on any equipment Properly store all materials before leaving the clean
room Last one out should make sure the room is in a safe
idle mode
Violations of Rules
First time Warning Report to Advisor
Second time Suspension of access Report to Advisor Retraining may be required
Third Offense Suspension of access Report to Advisor Access will not be renewed until an acceptable
resolution is reached by the UNF Managing Clean Room Protocol re-training will be required
Services rates
Clean room use: 5$ per hour In addition to the clean room fee, each system has its
own rate – consult the nanocenter website for details (http://www.nanoscience.huji.ac.il/unf/info.htm)
Incorrect use of the ID card for enter or exit the clean room confuses the doors control system. In case of uncertainty on the worked hours for an specific day, 8 hours will be taken into account.