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TAMAGAWA SEIKI CO., LTD. 1 Confidential
Tamagawa Seiki Co., Ltd. Motion Control Laboratory
Approach to Configure Dynamic Measurement System of Inertial
Measurement Unit
Tri-Axis 6-Degrees of Freedom (DoF) Vibration Table
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TAMAGAWA SEIKI CO., LTD. 2 Confidential
6 DoF (Multi-axial Inertia Sensor) Measurement Instrument
Generate linear and rotational movement with 6-axial
thruster
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TAMAGAWA SEIKI CO., LTD. 3 Confidential
Tamagawa has successfully won the 6 DoF measurement equipment
project from National Institute of Advanced Industrial Science and
Technology （AIST）
Axes Structure
Tamagawa aims to be the pioneer of complex vibration for
Gyro/IMU by measurement and calibration.
Approaches to standardize 6 DoF measurement (for IMU)
The machine controls the rotation and linear motion
simultaneously by changing the phase of each axis
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TAMAGAWA SEIKI CO., LTD. 4 Confidential
Feedback Control of Vibration Table
The largest advantage of using transfer function is the easiness
of finding out frequency response.
Upon measurement, acquire transfer function in advance and carry
out calibration of the
corollary.
Ｙ１
Y2
X2
X1 Z1
Z2 Z3
Z4
/G(S) x K
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TAMAGAWA SEIKI CO., LTD. 5 Confidential
Movement path of vibration table during combined vibration（X-Y
Surface）
周波数比 位相差=0° 位相差=45° 位相差=90°
f1：f2=1：1
f1=5Hzf2=5Hz
f1：f2=1：2
f1=5Hzf2=10Hz
Y
X
Y
X
Y
X
Y
X
Y
X
Y
X
Phase difference = 0 ° Phase difference = 90 ° Frequency ratio
Phase difference = 45 °
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TAMAGAWA SEIKI CO., LTD. 6 Confidential
Item Specification（1）
Sine Wave Exciting Force 3kN
Frequency Range 5～200Hz（Specification by installed pick-up）
（＊Setting range：5～2000Hz） 1～20Hz（Necessary to replace the
pick-up）
Acceleration Range Sine Wave：0.023m/sec2～49m/sec2
Shock Wave：MAX98m/sec2
Angular Velocity Range 0.1～30rad/sec2（On the shaking table
surface）
Maximum Displacement 30mmp-p
Maximum Angular Displacement
0.15radp-p （This is representative value at top surface center
position of
the vibration table. Rotational center arbitrary, however, other
specification would restrain performance.）
Maximum Weight on Board (Pay load)
5kg（25kgMAX at any center of gravity of shaking table
surface）
Vibration Table Size 300×300mm
Temperature of Vibration Table Top
Ambient Temperature within ±3℃
Specification of Vibration Table Equipment
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TAMAGAWA SEIKI CO., LTD. 7 Confidential
Maximum Operation Characteristic Diagram (No load: Mass of
moving parts 60 kg) Acceleration range: 0.023 m/s2 – 9.8 m/s2 Max.
displacement: 30 mmp-p
Acc
eler
atio
n (m
/s2)
Frequency (Hz)
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TAMAGAWA SEIKI CO., LTD. 8 Confidential
Acc
eler
atio
n (m
/s2)
Frequency (Hz)
Maximum Operation Characteristic Diagram (No load: Mass of
moving parts 60 kg) Acceleration range: 0.023 m/s2 – 49 m/s2 Max.
displacement: 30 mmp-p
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TAMAGAWA SEIKI CO., LTD. 9 Confidential
最大加速度
F：正弦波加振力 [N]α：最大加速度 [m/s2]m：可動部質量 [kg]M：供試品，補助テーブル，加振治具等の合計質量 [kg]
m：最大60kgM：最大25kg
最大加速度 35.3 m/s2正弦波加振力 3000 N可動部質量 60 kg供試品質量 25 kg補助テーブル質量 0
kg加振治具質量 0 kg
M m α[kg] [kg] [m/s2]
0 60 50.0
1 60 49.25 60 46.210 60 42.915 60 40.020 60 37.525 60 35.3
30
35
40
45
50
55
60
0 5 10 15 20 25 30
最大
加速
度（m
/s2 ）
合計質量M（kg）
MmF+
=a
Maximum acceleration: F: Sine wave exciting force [N] α: Maximum
acceleration [m/s2] m: Mass of moving parts [kg] M: Total mass of
samples, auxiliary tables and fixture [kg] m= Max. 60 kg M= Max. 25
kg
MmF+
=a
Total Mass (kg)
Max
. Acc
eler
atio
n (m
/s2)
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TAMAGAWA SEIKI CO., LTD. 10 Confidential
Service Flow of 6-Axis Simultaneous Measurement
Data analysis (Consultation)
Performance check with customer
OP
Mutual confirmation
Tamagawa
Customer
■Confirm level of replication ■Measurement method
■Check excess or deficiency ■Measurement data
Tamagawa
Customer
■Problem/Background ■Quotation
■Expectation
■Acceptability
Preparatory meeting
Acquisition of reference data
Examination of vibration table movement
*See next page for the details Filtering such as DC cut
Review of wave form replication method
Translation data Rotation data
IMU rental On site measurement
1. Replication of abnormality on the test course
2. Validation of sensor data 3. Review of effect to 6-axis
movement sensor Cost estimation of Equipment and labor etc.
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TAMAGAWA SEIKI CO., LTD. 11 Confidential
Start
Stop
Gravel road
Location of steps of water drain/manhole
IMUデータ
-30
-20
-10
0
10
20
30
0 10 20 30 40 50 60
時間（sec）
加速
度（m
/s2
）
X軸加速度 Y軸加速度 Z軸加速度
IMUデータ
-30
-20
-10
0
10
20
30
0 10 20 30 40 50 60
時間（sec）
角速
度（°
/s）
X軸角速度 Y軸角速度 Z軸角速度
Control and Action of Tri-Axis 6 DoF Vibration Table
Trial - Combined simulation test (Replication of 4-wheel vehicle
driving data (momentum))
IMU data IMU data
X-axis Y-axis Z-axis X-axis Y-axis Z-axis
Time (sec) Time (sec)
Ang
ular
Vel
ocity
Acc
eler
atio
n
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TAMAGAWA SEIKI CO., LTD. 12 Confidential
Trial - Combined simulation test (Replication of vehicle driving
data (momentum)) Replicate 2 wheeled vehicle’s driving data by
using 6 DoF vibration table from driving data acquired by IMU
(Prerequisite: Uniform motion = Zero momentum = Static)
Control and Action of Tri-Axis 6 DoF Vibration Table
BPF(5～50Hz)/fs=512Hz
-10
-5
0
5
10
7 8 9
時間（sec）
加速
度X出
力（m
/s2
）
目標波形
P.U.
Example of real wave form (6-degree of freedom X component)
Target wave form P.U. wave form (Replication of driving
data)
BPF(5～50Hz)/fs=512Hz
-15
-10
-5
0
5
10
15
0 10 20 30 40 50 60 70
時間（sec）
加速
度X出
力（m
/s2
）
目標波形
P.U.Magnified
IMU Data
Sampling conversion
Filter processing
Multi freedom conversion Wave form edge processing
Generation of control file
*fs: Select from frequency fixed by equipment
Unit conversion (Integration)
*fc: Optional setting
＊Acceleration->Displacement: mm ＊Angler velocity->Angle:
degree
Acquisition of Cal. data
Vibration test
スライド番号 1スライド番号 2スライド番号 3Feedback Control of Vibration
Tableスライド番号 5Specification of Vibration Table Equipmentスライド番号
7スライド番号 8スライド番号 9Service Flow of 6-Axis Simultaneous
Measurementスライド番号 11Control and Action of Tri-Axis 6 DoF Vibration
Table
