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Carles Colldelram MEDSI2016 Barcelona 16/09/2016
The Nanobender: a New X-Ray Mirror Bender with Nanometer Figure
CorrectionCarles Colldelram1, Josep Nicolas2, Claude Ruget1Llibert Ribo1, Albert Tomàs3, Carlos Martín-Nuño3,
David Úbeda31. ALBA-CELLS Synchrotron, Cerdanyola del Vallès, Spain
2. SLAC national accelerator laboratory, Menlo Park, United States3. Sener Ingenieria y Sistemas, Cerdanyola del Vallès, Barcelona, Spain
Carles Colldelram MEDSI2016 Barcelona 16/09/2016
Summary 2
Presentation Summaryo Precedents
o New concepts
o Bender design
o Correctors design
o Construction
o Measurements & Results
o Next Steps
o Active Optics
o Conclusions
Carles Colldelram MEDSI2016 Barcelona 16/09/2016
Precedents 3
o Protein Crystallography Beam Lineo Vertical Focusing Mirror: Outsourced
o Include a Gravity compensatorso We request to place more compensator
to play with figure correction
ALBA BL13 Beam Line
Carles Colldelram MEDSI2016 Barcelona 16/09/2016
Precedents 2010 4
BL13 VFM Optimization
o We corrected the slope error by means the gravity compensatorso Optimization of the compensators positiono Manual compensatorso This compensators are not thought for this function: not friendly
adjustment
This 300 mm long mirror was optimized from 0,242 µrad to 0,055 µradBy means two of the gravity compensators both pushing from below
Mirror by InsyncBender by Irelec
Before Correction: 0,242 µradAfter Correction: 0,055 µrad
Carles Colldelram MEDSI2016 Barcelona 16/09/2016
Precedents 2012 5
BL13 VFM In-Situ measurement
-150 -100 -50 0 50 100 150-2
-1
0
1
2
3
4
Position (mm)
Res
idua
l Pro
file
(nm
)
NOMIn situ
In-Situ measurement after 2 years agrees with the laboratory optimization and measurement
The simulation of the beam by means ray-tracing with the measured corrected mirror
figure
Carles Colldelram MEDSI2016 Barcelona 16/09/2016
New concepts 6
Geometrical vs Force constrains
Applied Forces
Optical surface with slope error
The hard way The soft way
…By means of stable-force actuators”
By means Rigid mechanics which introduce the required deformation vs
Carles Colldelram MEDSI2016 Barcelona 16/09/2016
Bender design
Bender Mechanism:Encapsulated
Correctors
Lay-out
Mirror
PusherPuller
Carles Colldelram MEDSI2016 Barcelona 16/09/2016
Bender design
Bender Mechanismo Based on compression springs
o Convectional motion system for the compression
Range
o Force gauge measurement
o Off-axis relieving Force transmission
o Punctual contacts
o Flexion at 25 mm from the support
o Radius of curvature: 500 m
o Forces up to 500 N
o Force Resolution: 0,001 N
o Focus independent of figure correction
Carles Colldelram MEDSI2016 Barcelona 16/09/2016
Bender design
The correctorso 22 mm width
o High resolution force correctors
o Ultra low k springs
o Forces up to 40 N, ±20 N.
o Resolution up to 0,001 N
o High stability:
o Independent to the set curvature, no
crosstalk
o No parasitic torsions
o UHV compatible (adaptive optics)
Carles Colldelram MEDSI2016 Barcelona 16/09/2016
Construction
Carles Colldelram MEDSI2016 Barcelona 16/09/2016
Measurements & results
ALBA NOMo This is a 1,5 m long highly accurate scanning
deflectometer by air bearings
o Ironless linear motor
o Optical set-upo Autocolimatoro Pentaprism
Date07/13 07/14 07/15 07/16
Tem
pera
ture
[deg
C]
22.3
22.305
22.31
22.315
22.32
22.325
22.33
22.335
22.34
22.345
22.35
The laboratory temperature is stabilized by means of a PID controlled post-heating system
Carles Colldelram MEDSI2016 Barcelona 16/09/2016
Measurements & results
Mathematical deformation Modelo LINEAR model, allows superposition
o Curvature of deformation is a piecewise linear function
o Surface deformation is a piecewise cubic polynomial
Euler – Bernoulli law
For an induced deformation of >600 nmafter removing curvature, the model isaccuarate below 1 nm
Carles Colldelram MEDSI2016 Barcelona 16/09/2016
Measurements & results
Bending performance
Strain Gauge [N]-55 -50 -45 -40 -35
E3-
Err
or [n
rad
RM
S]
-40
-30
-20
-10
0
10
20
30
40E3 vs Gauge
Strain Gauge [N]-55 -50 -45 -40 -35
E2-
Err
or [n
rad
RM
S]
-100
-80
-60
-40
-20
0
20
40
60
80
100E2 vs Gauge
Bending range 0-500 NBending resolution
Carles Colldelram MEDSI2016 Barcelona 16/09/2016
Measurements & results
Correctors performance
20 N is the force estimated to correct 0.5 μrad
rms mirrors for errors with period down to 22 mm
Resolution of 0.001N allows sub nanometer
correction, as well as stability
Measurement count5 10 15 20 25 30 35 40
Forc
e in
crem
ent [
mN
]
0
1
2
3
4
5
6
Resolution: 250 steps
Experiment count5 10 15 20
Forc
e D
evia
tion
[mN
]
-2
-1.5
-1
-0.5
0
0.5
1
1.5
2Contact repeatability at 3.23 N, σ=0.47 mN
Carles Colldelram MEDSI2016 Barcelona 16/09/2016
Measurements & results
Correctors performance
Repeatability on recovering a position between
motions to random points
Stability for 130h
Carles Colldelram MEDSI2016 Barcelona 16/09/2016
Measurements & results
Mirror OptimizationInitial slope error: 0,87 µrad RMSCorrected slope error: 0,115 µrad RMS
Position [mm]-200 -100 0 100 200
Hei
ght e
rror [
nm]
-5
-4
-3
-2
-1
0
1
2
3
4
5
AchievedOptimalDifference
Position [mm]-200 -100 0 100 200
Hei
ght e
rror [
nm]
-50
-40
-30
-20
-10
0
10
20
30
40
50
Initial surface error: 23,2 nm RMS Corrected surface error: 0,858 nm RMS
The mathematical model:
• Optimizes the correctors position
• Optimizes the corrector force (and its sense)
The model predicts the deformation of the mirror with accuracy better than 0.08 nm RMS
Carles Colldelram MEDSI2016 Barcelona 16/09/2016
Next steps
Corrector Improvements
o Corrector Repeatability: Done
o Remove the bender mechanics encapsulation
o Compact the bender mechanism
o Compact the correctors
Repeatability Long Range
Repeatability Short Range
Carles Colldelram MEDSI2016 Barcelona 16/09/2016
Next steps
Corrector Improvementso -k magnet system for spring k compensation
o Insensibility to magnet position in a ±1 mm
Mirr. Position [mm]-3 -2 -1 0 1 2 3
Forc
e D
evia
tion
[N]
-0.02
0
0.02
0.04
0.06
0.08
0.1
0.12
0.14
0.162.92 N3.54 N4.09 N6.30 N10.95 N
Carles Colldelram MEDSI2016 Barcelona 16/09/2016
Next steps
Corrector ImprovementsTo be implemented soon
o Spring length reduction by means the force compensation system:o Test prototype done and measured.o -k spring with magnet.
o Removal of the bearing friction on the spring articulation:o Test prototype doneo Zero-torque frictionless articulationo By means a flexure and magnet system
See the poster :ID: 2029 - MOPE01 Stabilization Methods for Force Actuators and Flexures
ES P201631142ES P201630506ES P201530735
Three patens
Carles Colldelram MEDSI2016 Barcelona 16/09/2016
Next steps
Active Optics
o With such figure error accuracy and resolution it is possible to
correct beam wavefront distortions
o With a double spring the corrector can switch from pusher to
puller just by moving along the range.
o Change the Stepper motor for a UHV compatible one.
o mount as many correctors as space allows.
Carles Colldelram MEDSI2016 Barcelona 16/09/2016
Conclusions
o The proposed solution of a bender with figure correctors based in force
constrains works at nanometer level
o A mirror bender with correctors without crosstalk is achieved.
o A very stable correctors have been design and implemented.
o New –k compensated correctors have been designed and tested. They keep
force constant within 1 mN in a range of motion of the mirror up to 2 mm.
o New, frictionless, torque free articulation has been designed, and is being
currently tested.
Carles Colldelram MEDSI2016 Barcelona 16/09/2016
Acknowledgments
Joan Casas
Jose Ferrer
Gabriel Peña
Llibert Ribó
Pablo Pedreira
…
Carles Colldelram MEDSI2016 Barcelona 16/09/2016
23
Thanks for your attention …
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