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Take advantage of our experience and forward-thinking.Backed by 35 years of experience in laser material processing ROFINprovides innovative solutions for the photovoltaic industry. Processing ofsolar cells like drilling, cutting, scribing, doping and ablation of dielectriclayers are the key competences as well as thin film applications, edgeisolation and marking of silicon wafers. Working closely with our clientsand partners we have established great expertise for laser applicationin PV manufacturing. ROFIN is the only supplier worldwide offering thecomplete range of lasers and laser systems for processing solar cells.
EasyMark
� Low cost marking/scribing system
� Very easy handling� Ideally suited for scribe
and break applications� Various types of 1064 nm
laser sources available
MPS
� Medium-sized modular laserworkstation
� High precision processing forthin film and c-Si applications
� Granite base available� Various motion systems with
up to +/- 1 μm accuracy
CombiLine Advanced
� RT version with fast turning 800 mm rotary table, throughput up to 700wafers/h
� WT version with flexiblefixture arrangementsand optional x/y table
� 300 mm motorized z-axis� Optional vision system for
wafer recognition
Precision R&D System
� Integration of up to 3 laser sources
� Suitable for thin film andc-Si applications
� Accuracy of NC axes:± 5 µm, repeatability± 1 µm for x/y- axis
� Max. travel 300 x 600 mm
APPLICATION DEVELOPMENT PRECISION R&D SYSTEM
COMBILINE ADVANCED
The laser systemprovider
worldwide
R&Dand low volumesystems
MPS (Modular Processing System)WAFER VACUUM FIXTURE
EASYMARK
WE ARE WHERE YOU ARE!
ROFIN
� Leading manufacturer for lasers and laser solutions for material processing
� Sales and service teams in 40countries around the world
� Widest range of lasersources, laser systems and customized solutions
� Large application lab for a wide spectrum of pv material processing
CASSETTE LOADING SYSTEM
Benefits
� Compliance with highest safety standards and CE signed
� Excellent laser expertise� High-precision laser processes� Low breakage rate and total
cost of ownership
Features
� Throughput range:1800 – 3600 wafer/h
� Standardized HMI software and advanced BeckhoffPLC control
� Automatic self-calibrating highspeed scanner systems
� High precision waferalignment with up to5 CCD cameras
� QC-system with laser power control and multiple wafersensors
� Optional MES host interface according to SEMI PVstandard
� Integrated exhaust and filter system suitable for clean rooms
� Inline, cassette or stackhandling for all commonstandards and degrees of automation
The DUAL LINE c-Si is a modular machine platform designed for highthroughput solar cell manufacturing with multiple installations at lea-ding PV manufactures worldwide. The core of the machine is a highprecision granite base to support laser optics and rapid wafer hand-ling units. It is equipped with two independently operating lines forcell transport and one laser process chamber each. In general themachine can be placed in-line with other processing machines orconfigured with stack and/or cassette handling systems for batchtype operation. The machine can be configured with a wide range ofROFIN laser sources in 1064, 532 and 355 nm wavelengths.Various pulse length regimes from continuous wave to femtosecondare also available. In particular this machine is addressing high cellefficiency processes as MWT cell drilling, laser doping and openingof dielectric layers on the cell front or back side.
STACK LOADING SYSTEM
DUAL LINE c-Si
One supplier - all technologies
HIGH-TECH LASER FOR PHOTOVOLTAICS
StarPico and StarFemto
� High precision processingand high pulse peak power
� Cold laser ablation ofthin layers
� Multiple wavelength options1064 nm, 532 nm, 355 nm
� Ideal for 24/7 productionin industry
STARPICO & STARFEMTO
SCRIBING OF FLEXIBLE SUBSTRATES
POWERLINE SL
THINFILM SCRIBING
POWERLINE E SHG / THG
OPENING OF DIELECTRIC LASYERS
POWERLINE L 100 SHG
DOPING/SELECTIVE EMITTER
POWERLINE F 20 -100
ISOLATION & MARKING
POWERLINE F 30 LP
LASER FIRED CONTACT & DRILLING
PowerLine SL 3/20
� Exceptional beam quality� Excellent pulse-to-pulse stability� High long term stability with
temperature management system� Integrated shutter and
safety circuits
PowerLine E SHG/THG
� Different power ranges� Several wavelengths� Single and double scanner
configuration� Various scanning head options
PowerLine L 100 SHG
� High average power andhigh pulse energy
� Round, square and rectangularfiber beam delivery possible
� Top hat beam profile� Excellent pulse-to-pulse stability
PowerLine F 20 -100
� Different power ranges for various applications
� Completely air-cooled� Low operating costs� Single and double scanner
PowerLine F 30 LP
� Compact setup� Excellent pulse-to-pulse stability� High pulse energy� Air cooling
IsolationOpening of Dielectric layersCutting �
EWT/MWT �
LFC �
SE DopingMarkingThin Film P1, P2, P3Scribing of flexible substrates
Isolation �
Opening of dielectric layersCutting �
EWT/MWT �
LFCSE DopingMarking �
Thin Film P1, P2, P3 �
Scribing of flexible substrates �
Isolation �
Opening of dielectric layers �
CuttingEWT/MWTLFCSE DopingMarkingThin Film P1, P2, P3 �
Scribing of flexible substrates �
IsolationOpening of dielectric layersCuttingEWT/MWTLFCSE DopingMarking �
Thin Film P1, P2, P3 �
Scribing of flexible substrates �
Isolation �
Opening of dielectric layers �
CuttingEWT/MWT �
LFCSE Doping �
Marking �
Thin Film P1, P2, P3Scribing of flexible substrates
IsolationOpening of dielectric layersCuttingEWT/MWTLFCSE Doping �
MarkingThin Film P1, P2, P3Scribing of flexible substrates
LASERSYSTEMS FOR PV MANUFACTURING� SOLAR POWER � LASER � ROFIN
WE THINK LASER
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WE THINK LASER
SOLUTIONS FROM A SINGLE SOURCE� WWW.ROFIN.COM/SOLAR
LASER MICROROFIN-BAASEL LasertechGmbH & Co. KGPetersbrunner Str. 1b82319 StarnbergPhone +49(0)8151-776-0Fax: +49(0)8151-776-4159Email: [email protected]
LASER MACROROFIN-SINAR Laser GmbHBerzeliusstraße 8722113 HamburgPhone:+49(0)40-733 63-0Fax: +49(0)40-733 63-4100Email: [email protected]
LASER MARKINGROFIN-SINAR Laser GmbHDieselstraße 1585232 Bergkirchen/GündingPhone:+49(0)8131-704-0Fax: +49(0)8131-704-4100Email: [email protected]
A: Phone: +49-(0)8151-776-0E-mail: [email protected]: Phone: +31-(0)78-69310-37E-mail: [email protected]: Phone: +1-905-607-0400E-mail: [email protected]: Phone: +41-(0)32--3221010E-mail: [email protected]: Phone: +45-6317-1797E-mail: [email protected]: Phone: +34-948-324-600E-mail: [email protected]: Phone: +33-(0)-1-6911-3636E-mail: [email protected]: Phone: +358-(0)20-769-9900E-mail: [email protected]: Phone: +44-(0)-1327-701-100E-mail: [email protected]: Phone: +39-039-2729-1E-mail: [email protected]: Phone: +81-(0)46-229-8655E-mail: [email protected]: Phone: +86-21-68552216E-mail: [email protected]: Phone: +886-2-2790-1300E-mail: [email protected]: Phone: +82-(0)2837-1750E-mail: [email protected]: Phone: +65-6482-1091E-mail: [email protected]: Phone: +1-734-455-5400E-mail: [email protected]
Medical DeviceTechnology
JewelrySemiconductor Solar Power
PV Manufacturing
Flexible Packaging
