1

Prof. Johnny Kin On SIN

IEEE Fellowfor contributions to the design and

commercialization of power semiconductor devices

The Hong Kong University of Science and TechnologyDept. of Electronic and Computer Engineering

Clear Water Bay, Hong Kong

2

Modern Intelligent Power Module

Using VLSI technologies to design compact, low cost, fast acting and efficient power switches for hundreds of amps and thousands of volts!

Power Semiconductor Devices Design

Old Mechanical Switch

Multi-chipIGBT

Assembly

3

Power Semiconductor Devices Design (cont’d)

P-pillar Trench

Source Trench

Drain Trench

Poly-Si: Top Gate

Ldrift

Poly-Si: Trench Gate

A power semiconductor device mounted on a lead frame

SEM micrograph of a power semiconductor device

The power devices designed require very fine geometry (in the order of 100nms) and are built over a large area.

4

Commercialization of Power DevicesMillions of parts used in applications:

Power Modules

Automotive

Appliances

PortableElectronics

Consumer Electronics