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Coming from Synchrotron technologies TGM -Series Toroidal Grating Monochromators

TGM -Series - HORIBA...(gr/mm) nm eV TGM300 540 00 900* 550 10 - 50 25 - 124 1.8 nm/mm at 10 nm, 1.6 nm/mm at 50 nm 0.20 at 30 nm 540 00 910* 550 15 - 150 10 - 83 1.8 nm/mm at 15 nm,

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Page 1: TGM -Series - HORIBA...(gr/mm) nm eV TGM300 540 00 900* 550 10 - 50 25 - 124 1.8 nm/mm at 10 nm, 1.6 nm/mm at 50 nm 0.20 at 30 nm 540 00 910* 550 15 - 150 10 - 83 1.8 nm/mm at 15 nm,

Coming from Synchrotron technologies

TGM -SeriesToroidal Grating Monochromators

Page 2: TGM -Series - HORIBA...(gr/mm) nm eV TGM300 540 00 900* 550 10 - 50 25 - 124 1.8 nm/mm at 10 nm, 1.6 nm/mm at 50 nm 0.20 at 30 nm 540 00 910* 550 15 - 150 10 - 83 1.8 nm/mm at 15 nm,

Monochromators to explore the 8 - 400 nm spectral range

The TGM (Toroidal Grating Monochromator) series are grazing monochromators especially designed for analyzing the whole VUV wavelength range from 8 to 400 nm.

Synchrorton compatible

Tunable light source

High throughtputAberration corrected VLS gratings

EUV spectroscopy

High resolution

Applications

• FUV/EUV Reflectometry

• VUV tunable filter/light source

• Transmission

measurements

• Laser harmonic filter

• Plasma physics study

Thanks to its original optical design based on toroidal Variable Line Spacing (VLS technology) grating, the TGM series is a low aberration grazing monochromator with an unmatched throughput. Coupled with a single channel detector, this device analyzes VUV radiations, such as those emitted from UV plasma sources. It can also be used as a stand alone tunable light source when equipped with dedicated UV light source.

TGM are available in three configurations (TGM300, TGM1200 and TGM1900) depending on the spectral range and resolution you want to achieve.

Benefits

• Optimized for throughput

• High S/N ratio measurement

• Versatility under vacuum

• A few 10-6 mbar– option a few 10-9 mbar

• Easy integration in any setup

• Synchrotron compatible with master gratings and UHV option

• Easy to operate

• Easy computer control

• Easy programmable with SDK

Features

• Single Toroidal Grating design

• Low astigmatism level

• Dual grating Slider option

• High Vacuum compatible

• Entrance and exit slits fixed in position

• Choice of master or replica gratings

• Fully automated wavelength drive

• USB2 controller

• HORIBA Scientific software

Options

• Ultra High Vacuum (UHV, 10-9 mbar) version

• Slider for grating change under vacuum

Accessories

• EUV/UV Light Sources

• Single channel detection

• Mirror chambers

• Sample compartments

• Laser kit for easy alignement

Page 3: TGM -Series - HORIBA...(gr/mm) nm eV TGM300 540 00 900* 550 10 - 50 25 - 124 1.8 nm/mm at 10 nm, 1.6 nm/mm at 50 nm 0.20 at 30 nm 540 00 910* 550 15 - 150 10 - 83 1.8 nm/mm at 15 nm,

An original HORIBA Scientific Concept

The TGM series bring up to date the concept of the first VUV instrument in the world designed around a single toroidal aberration corrected grating (LHT30, HORIBA Scientific patent), while improving the resolution and reducing the stray light. Its optical design dramatically reduces astigmatism and results in excellent luminosity and spectral purity, even at low wavelength.

First dedicated to synchrotrons, TGM are now available in tabletop version for a wide range of applications.

The new generation of toroidal monochromator

Gratings available

ModelGratings Spectral range

Exit DispersionResolution**

(FWHM in nm)Part NumberDensity(gr/mm)

nm eV

TGM300

540 00 900* 550 10 - 50 25 - 124 1.8 nm/mm at 10 nm, 1.6 nm/mm at 50 nm 0.20 at 30 nm

540 00 910* 550 15 - 150 10 - 83 1.8 nm/mm at 15 nm, 1.2 nm/mm at 150 nm 0.25 at 50 nm

540 00 920* 275 50 - 300 4 - 25 3.5 nm/mm at 50 nm, 2.3 nm/mm at 300 nm 0.40 at 110 nm

TGM1200

540 00 800 950 12.5 - 52.5 24 - 100 0.3 nm/mm at 12.5 nm, 0.34 nm/mm at 52.5 nm 0.02 at 22 nm

540 00 810 250 50 - 200 6 - 25 1.1 nm/mm at 50 nm, 1.3 nm/mm at 200 nm 0.07 at 90 nm

540 00 820 125 85 - 400 3 - 15 2.1 nm/mm at 85 nm, 2.6 nm/mm at 400 nm 0.16 at 165 nm

TGM 1900540 00 600 1800 8 - 32 39 - 155 0.08 nm/mm at 8 nm, 0.11 nm/mm at 32 nm 0.01 at 26 nm

540 00 610 450 32 - 128 10 - 39 0.3 nm/mm at 32 nm, 0.4 nm/mm at 128 nm 0.04 at 100 nm

* Gratings are available in master or replica version** using 10 µm x 2 mm slits

TGM300 TGM1200 TGM1900Optical design Toroidal VLS Grating (single optic)

Focal length 320 mm 1000 mm 1146 mm

Aperture f/16 f/32 f/34

Optic coating Pt or Au

Deviation angle 142° 146° 150°

Drive Sine arm

Vacuum a few 10-6 mbar (HV version) or a few 10-9 mbar (UHV version)

Pumping flange DN63 LF (DN100 CF) DN100 LF (DN 100 CF) DN100 LF (DN 100 CF)

Entrance/exit port Micrometric slits (10 µm to 2 mm)

Entrance/exit flange

DN40 KF (DN 40 CF)

Software HORIBA Scientific software

PC Interface USB2

TGM Specifications

Page 4: TGM -Series - HORIBA...(gr/mm) nm eV TGM300 540 00 900* 550 10 - 50 25 - 124 1.8 nm/mm at 10 nm, 1.6 nm/mm at 50 nm 0.20 at 30 nm 540 00 910* 550 15 - 150 10 - 83 1.8 nm/mm at 15 nm,

HORIBA Scientific,Your partner in VUV Spectroscopy

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France: Tel: +33 (0)1 69 74 72 00

USA: Tel: +1 732 494 8660

Japan: Tel: +81-(75)313 8123

Germany: Tel: +49 (0)6251 8475-0

UK: Tel: +44 (0)20 8204 8142

Italy: Tel: +39 2 5760 3050

China: Tel: +86 (0)21 6289 6060

Brazil: Tel: +55 (0)11 5545 1500

Other: Tel: +33 (0)1 69 74 72 00

www.horiba.com/scientific

[email protected]

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