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Test of mass flow controller. Jiaming Yu. Gas: 7%CO 2 93%Ar. * : There is a leak of 17.1 SCCM. - PowerPoint PPT Presentation
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Test of mass flow controller
Jiaming Yu
Gas: 7%CO2
93%Ar
Range: 10SCCM
Calculated flow (SCCM) 2.0 4.0 6.0 8.0 10.0
Measured flow (SCCM) 1.9 3.9 6.4 8.6 10.5
Range: 20SCCM
Calculated flow (SCCM) 4.0 8.0 12.0 16.0 20.0
Measured flow (SCCM) 4.1 7.7 12.5 17.3 21.4
Range: 200SCCM
Calculated flow (SCCM) 40.0 80.0 120.0 160.0 200.0
Measured flow (SCCM) 43.9 86.9 129.0 171.4 214.3
Range: 2SLM*
Calculated flow (SLM) 0.4 0.8 1.2 1.6 2.0
Measured flow (SLM) 0.4 0.9 1.4 1.9 2.4
* : There is a leak of 17.1 SCCM.