Taurus Modeling Environment, Taurus Visual User Guidejmbussat/Physics290E/Fall-2006/TCAD... · 2006-11-02 · This manual includes details for using Taurus Visual and contains tutorials

Taurus Modeling EnvirnomentTaurus Visual User GuideVersion X-2005.10, October 2005

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Copyright Notice and Proprietary InformationCopyright 2005 Synopsys, Inc. All rights reserved. This software and documentation contain confidential and proprietary information that is the property of Synopsys, Inc. The software and documentation are furnished under a license agreement and may be used or copied only in accordance with the terms of the license agreement. No part of the software and documentation may be reproduced, transmitted, or translated, in any form or by any means, electronic, mechanical, manual, optical, or otherwise, without prior written permission of Synopsys, Inc., or as expressly provided by the license agreement.

Right to Copy DocumentationThe license agreement with Synopsys permits licensee to make copies of the documentation for its internal use only. Each copy shall include all copyrights, trademarks, service marks, and proprietary rights notices, if any. Licensee must assign sequential numbers to all copies. These copies shall contain the following legend on the cover page:

“This document is duplicated with the permission of Synopsys, Inc., for the exclusive use of __________________________________________ and its employees. This is copy number __________.”

Destination Control StatementAll technical data contained in this publication is subject to the export control laws of the United States of America. Disclosure to nationals of other countries contrary to United States law is prohibited. It is the reader’s responsibility to determine the applicable regulations and to comply with them.

DisclaimerSYNOPSYS, INC., AND ITS LICENSORS MAKE NO WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, WITH REGARD TO THIS MATERIAL, INCLUDING, BUT NOT LIMITED TO, THE IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE.

Registered Trademarks (®)Synopsys, AMPS, Arcadia, C Level Design, C2HDL, C2V, C2VHDL, Cadabra, Calaveras Algorithm, CATS, CRITIC, CSim, Design Compiler, DesignPower, DesignWare, EPIC, Formality, HSIM, HSPICE, Hypermodel, iN-Phase, in-Sync, Leda, MAST, Meta, Meta-Software, ModelTools, NanoSim, OpenVera, PathMill, Photolynx, Physical Compiler, PowerMill, PrimeTime, RailMill, RapidScript, Saber, SiVL, SNUG, SolvNet, Superlog, System Compiler, Testify, TetraMAX, TimeMill, TMA, VCS, Vera, and Virtual Stepper are registered trademarks of Synopsys, Inc.

Trademarks (™)Active Parasitics, AFGen, Apollo, Apollo II, Apollo-DPII, Apollo-GA, ApolloGAII, Astro, Astro-Rail, Astro-Xtalk, Aurora, AvanTestchip, AvanWaves, BCView, Behavioral Compiler, BOA, BRT, Cedar, ChipPlanner, Circuit Analysis, Columbia, Columbia-CE, Comet 3D, Cosmos, CosmosEnterprise, CosmosLE, CosmosScope, CosmosSE, Cyclelink, Davinci, DC Expert, DC Expert Plus, DC Professional, DC Ultra, DC Ultra Plus, Design Advisor, Design Analyzer, Design Vision, DesignerHDL, DesignTime, DFM-Workbench, Direct RTL, Direct Silicon Access, Discovery, DW8051, DWPCI, Dynamic-Macromodeling, Dynamic Model Switcher, ECL Compiler, ECO Compiler, EDAnavigator, Encore, Encore PQ, Evaccess, ExpressModel, Floorplan Manager, Formal Model Checker, FoundryModel, FPGA Compiler II, FPGA Express, Frame Compiler, Galaxy, Gatran, HANEX, HDL Advisor, HDL Compiler, Hercules, Hercules-Explorer, Hercules-II,

Hierarchical Optimization Technology, High Performance Option, HotPlace, HSIMplus

, HSPICE-Link, iN-Tandem, Integrator, Interactive Waveform Viewer, i-Virtual Stepper, Jupiter, Jupiter-DP, JupiterXT, JupiterXT-ASIC, JVXtreme, Liberty, Libra-Passport, Library Compiler, Libra-Visa, Magellan, Mars, Mars-Rail, Mars-Xtalk, Medici, Metacapture, Metacircuit, Metamanager, Metamixsim, Milkyway, ModelSource, Module Compiler, MS-3200, MS-3400, Nova Product Family, Nova-ExploreRTL, Nova-Trans, Nova-VeriLint, Nova-VHDLlint, Optimum Silicon, Orion_ec, Parasitic View, Passport, Planet, Planet-PL, Planet-RTL, Polaris, Polaris-CBS, Polaris-MT, Power Compiler, PowerCODE, PowerGate, ProFPGA, ProGen, Prospector, Protocol Compiler, PSMGen, Raphael, Raphael-NES, RoadRunner, RTL Analyzer, Saturn, ScanBand, Schematic Compiler, Scirocco, Scirocco-i, Shadow Debugger, Silicon Blueprint, Silicon Early Access, SinglePass-SoC, Smart Extraction, SmartLicense, SmartModel Library, Softwire, Source-Level Design, Star, Star-DC, Star-MS, Star-MTB, Star-Power, Star-Rail, Star-RC, Star-RCXT, Star-Sim, Star-SimXT, Star-Time, Star-XP, SWIFT, Taurus, TimeSlice, TimeTracker, Timing Annotator, TopoPlace, TopoRoute, Trace-On-Demand, True-Hspice, TSUPREM-4, TymeWare, VCS Express, VCSi, Venus, Verification Portal, VFormal, VHDL Compiler, VHDL System Simulator, VirSim, and VMC are trademarks of Synopsys, Inc.

Service Marks (SM)MAP-in, SVP Café, and TAP-in are service marks of Synopsys, Inc.

SystemC is a trademark of the Open SystemC Initiative and is used under license.ARM and AMBA are registered trademarks of ARM Limited.All other product or company names may be trademarks of their respective owners.

Printed in the U.S.A.

Taurus Visual User Guide, Version X-2005.10

WHAT’S NEW IN THIS RELEASE

What’s New in This Release0

For additional information about Taurus Visual, see:

• The documentation installed with the Taurus Visual software and available through the Taurus Visual Help menu.

• The Taurus Visual release notes, available on SolvNet (see Accessing SolvNet on page vii).

• Documentation on the Web, which provides PDF documents and is available through SolvNet at http://solvnet.synopsys.com.

Note:The only change to this manual is the version number. See the release notes for current platform information. Go to the Synopsys Web page at http://solvnet.synopsys.com and click SlovNet.

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What’s New in This Release

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ABOUT THIS GUIDE

About This Guide0

OverviewThis manual includes details for using Taurus Visual and contains tutorials for1D, 2D, and 3D visualizations.

This manual contains the following chapters:

What’s New in This Release

Describes the enhancements and bug fixes.

About This Guide Includes conventions, related publications, and customer support information.

Chapter 1 Introduces Taurus Visual.

Chapter 2 Introduces the fundamental concepts of Taurus Visual.

Chapter 3 Gets you started and defines key terms used in the visualiza-tion program.

Chapter 4 Describes the use of Taurus Visual for 2D and 3D plots.

Chapter 5 Describes the use of Taurus Visual for 1D plots.

Chapter 6 Contains application information for using Taurus Visual for 3D simulation

Chapter 7 Presents tutorials for 1D, 2D, and 3D visualizations.

Chapter 8 Describes the command system.

Appendix A Describes integration with Taurus Workbench.

Appendix B Lists common Tcl commands used in Taurus Visual.

Appendix C Lists filed names in TIF and TDF data.

Index Lists key terms.

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About This Guide Conventions

Related PublicationsFor additional information about Taurus Visual, see:

• Synopsys Online Documentation (SOLD), which is included with the software for CD users or is available to download through the Synopsys Electronic Software Transfer (EST) system

• Documentation on the Web, which is available through SolvNet at http://solvnet.synopsys.com

• The Synopsys MediaDocs Shop, from which you can order printed copies of Synopsys documents, at http://mediadocs.synopsys.com

• You might also want to refer to the documentation for the following related Synopsys products:- For information on Taurus-Process installation procedures, see the TCAD

Products and Utilities Installation Manual.- Taurus-Process uses many references from the changing body of industry

literature. Where appropriate, you are directed to source material. References are included in the Taurus-Process Reference Manual, Chapter 3, “References.”

ConventionsThe following conventions are used in Synopsys documentation.

Convention Description

Courier Indicates command syntax.

Courier italic Indicates a user-defined value in Synopsys syntax, such as object_name. (A user-defined value that is not Synopsys syntax is indicated by regular text font italic.)

Courier bold Indicates user input—text you type verbatim—in Synopsys syntax and examples. (User input that is not Synopsys syntax, such as a user name or pass-word you enter in a GUI, is indicated by regular text font bold.)

[ ] Denotes optional parameters, such as pin1 [pin2 ... pinN]

| Indicates a choice among alternatives, such as low | medium | high(This example indicates that you can enter one of three possible values for an option: low, medium, or high.)

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Customer Support About This Guide

If a button label appears grayed out, the button is not currently active. Attempts to click the button are ignored.

Customer SupportCustomer support is available through SolvNet online customer support and through contacting the Synopsys Technical Support Center.

Accessing SolvNetSolvNet includes an electronic knowledge base of technical articles and answers to frequently asked questions about Synopsys tools. SolvNet also gives you access to a wide range of Synopsys online services, which include downloading software, viewing Documentation on the Web, and entering a call to the Support Center.

To access SolvNet:

1. Go to the SolvNet Web page at http://solvnet.synopsys.com.

2. If prompted, enter your user name and password. (If you do not have a Synop-sys user name and password, follow the instructions to register with SolvNet.)

3. If you need help using SolvNet, click SolvNet Help in the Support Resources section.

Contacting the Synopsys Technical Support CenterIf you have problems, questions, or suggestions, you can contact the Synopsys Technical Support Center in the following ways:

• Open a call to your local support center from the Web by going to http://solvnet.synopsys.com (Synopsys user name and password required), then clicking “Enter a Call to the Support Center.”

_ Connects terms that are read as a single term by the system, such as set_annotated_delay

Control-c Indicates a keyboard combination, such as holding down the Control key and pressing c.

\ Indicates a continuation of a command line.

/ Indicates levels of directory structure.

Edit > Copy Indicates a path to a menu command, such as opening the Edit menu and choosing Copy.

Convention Description

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About This Guide Customer Support

• Send an e-mail message to your local support center:- E-mail [email protected] from within North America. - Find other local support center e-mail addresses at

http://www.synopsys.com/support/support_ctr.• Telephone your local support center:

- Call (800) 245-8005 from within the continental United States.- Call (650) 584-4200 from Canada.

• Find other local support center telephone numbers at http://www.synopsys.com/support/support_ctr.

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Table of Contents

CONTENTS

What’s New in This Release iii

About This Guide v

Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vRelated Publications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . viConventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . viCustomer Support . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vii

Accessing SolvNet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . viiContacting the Synopsys Technical Support Center . . . . . . . . . . . . . . vii

Chapter 1 Introduction 1-1

Taurus Modeling Environment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1Overview of Taurus Visual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1GUI Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

Using the Mouse . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2Window Button Conventions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2Menu Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3

Keyboard Accelerators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

Chapter 2 Fundamentals 2-1

Plot Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1Plots . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2Plot Controls . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

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Chapter 3 Getting Started 3-1

Installation Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1Starting Taurus Visual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1Using Online Help . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2Key Terms. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

Chapter 4 Using Taurus Visual 4-1

Creating Plots . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1Using the Display Bar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2

edit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2mesh . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2region . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2fields . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2bounds. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2P/N . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3axes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3volume . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3plane . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3overlay (tv2D) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

Using Tools . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4select . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4pan . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5zoom . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5rotate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5probe . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6ruler . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6cutline . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7label . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7line . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8

Using Plot Menu Controls . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8Plot Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9

Duplicate a 2D Plot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10Plot Properties Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10

Fields Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10Scalar Controls . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12Vector Controls . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13

Regions Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14Materials Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-15Junctions Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-16Axis Page (3D Plots) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17Flowlines Page (3D Plots) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-17

Creating Flowlines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-18Creating 1D Plots . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21

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Animation with Glyphs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-21Plot Cut Controls Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-23

Cutvolume Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-23Cutplane Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-24Cutline Page . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-25

Cutline Options. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-25Modifying Existing Cutlines . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-26

Comparing Fields between Two Simulation Structures (Diff Fields) . 4-26Field Data Calculation (2D Plots). . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-27

Generating a New Field . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-28Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-29Table of Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-30

Using Edit and View Menu Options. . . . . . . . . . . . . . . . . . . . . . . . . . . 4-32Page Layout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-33Interact Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-33Options Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-33Undo Transform. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-35Redo Transform . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-35Reset Transform. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-35Edit Transform . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-36

Causing Follower Plot Actions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-36Creating Follower Plots . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-36

Action Rules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-37Printing Plots or Saving to a File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-37

Page Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-38Loading and Saving Plot State . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-38Reload Simulation Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-39

Chapter 5 1D Plots 5-1

Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1Creating Plots . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2

Plot Properties Editor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3Curve Plot. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5Curve Family Plot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6Parameter Plot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8Histogram Plot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10Pin Plot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12Smith Chart. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-14

Reload Simulation Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-15Working with Data Tables and the SpreadSheet . . . . . . . . . . . . . . . . . 5-16

Correlating SpreadSheet Data with Plots. . . . . . . . . . . . . . . . . . . . . 5-17Importing and Exporting Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-17Restricting Rows . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-17Adding and Removing Columns . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-18

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Functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-18Data Formats. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-20

TV1D Data Format . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-20TCAD TIF Format for I-V curves . . . . . . . . . . . . . . . . . . . . . . . . . . 5-21

Chapter 6 Application Notes for 3D Simulators 6-1

Raphael . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1Loading and Initial Display of Raphael Data. . . . . . . . . . . . . . . . . . . 6-2

Other Combinations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4Taurus Lithography. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4

Loading/Initializing Taurus Lithography 3D Planar AAM Data. . . . 6-5Displaying the Evolving Resist Surface. . . . . . . . . . . . . . . . . . . . . . . 6-6

Displaying Other Latent Image Fields . . . . . . . . . . . . . . . . . . . . . . 6-7Other Ways to Visualize the Structure Layers . . . . . . . . . . . . . . . . 6-8Other Combinations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9

Taurus Topography. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-10Loading, Initializing Taurus Topography 3D Data, and Displaying an Isosurface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-10

Other Combinations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14

Chapter 7 Taurus Visual Tutorial 7-1

Fundamentals and Basic Usage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1Task 1: Loading a 2D File and Plot Description . . . . . . . . . . . . . . . . 7-2Task 2: Using the Display Bar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-4Task 3: Using the pan and zoom Tools . . . . . . . . . . . . . . . . . . . . . . . 7-5Task 4: Displaying Regions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-7Task 5: Displaying Fields . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-9Task 6: Using the probe Tool. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-13Task 7: Using the cutline Tool . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-14Task 8: Managing Page Layout . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-16Task 9: Creating Labels and Lines. . . . . . . . . . . . . . . . . . . . . . . . . . 7-18Task 10: Printing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-22Task 11: Deleting Plots . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-23

Follower Plots Tutorial . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-24Task 1: Loading Two Plot Files . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-24Task 2: Creating a Follower Plot and Using the Display Bar . . . . . 7-25Task 3: Using the Tools Bar for Follower Plots . . . . . . . . . . . . . . . 7-26

1D Plots. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-28Task 1: Displaying a Curve Plot . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-28 Task 2: Editing the Curve Plot Data Table with the SpreadSheet . 7-32 Task 3: Saving Data Tables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-36 Task 4: Editing and Deleting a Curve Plot . . . . . . . . . . . . . . . . . . . 7-37

xii TV 2005.10


Task 5: Displaying a Curve Family Plot . . . . . . . . . . . . . . . . . . . . . 7-37 Task 6: Displaying a Parameter Plot. . . . . . . . . . . . . . . . . . . . . . . . 7-39 Task 7: Deleting Data Tables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-41

3D Plot Tutorial . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-43Task 1: Getting TV Started and Loading a 3D Structure Plot File . 7-43Task 2: Using the Tools and Undoing Transformations . . . . . . . . . 7-44Task 3: Using the Volume Display . . . . . . . . . . . . . . . . . . . . . . . . . 7-46Task 4: Using the Plane Display . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-48Task 5: Using Transparency Controls . . . . . . . . . . . . . . . . . . . . . . . 7-53

Chapter 8 Command System 8-1

Taurus Visual Commands. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1Startup Command File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-2Syntax Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-2

General Commands. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-3TvPlot. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-3

load . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-3loadData . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4reload . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4show, hide, showOnly and toggle. . . . . . . . . . . . . . . . . . . . . . . . . . 8-4set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4rename . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-4Setting Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-5transform. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-5reset. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-5Parameters for 2D Plot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-5Parameters for 3D Plot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-6select . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-6delete. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-7

TvWindow . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-7TvFont . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-7

create. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-8configure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-8names . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-8families . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-8

TvLabel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-9TvPrint . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-10

2D/3D Plot Commands. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-10TvRegion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-10TvField . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-11TvContour . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-12TvVector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-12TvJunction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-13TvDepletion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-13

TV 2005.10 xiii


TvCutline . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-13TvProbe (2D Plots) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-14

1D Plot Commands. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-15TvPlot1D . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-15TvAxis1D. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-16TvCurvePlot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-16

create. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-16set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-17

TvFamilyPlot . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-17create. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-17set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-17

TvParamPlot. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-18create. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-18set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-18

TvCurve . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-19TvTable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-20

load . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-20import . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-20Arithmetic Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-21set and get method for Tcl . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-23save . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-24

Default Preference Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-25Command Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-26

Example 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-26Example 2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-26Example 3 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-27Example 4 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-27

Comment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-27Example 5 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-28

Comment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-28Example 6 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-28

Comment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-28

Appendix A: Using TV with Taurus Workbench A-1

Integration. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A-1

xiv TV 2005.10


Appendix B: Tcl Command Reference B-1

Appendix C: Field Names in TIF and TDF Data C-1

Index Index-1

TV 2005.10 xv


xvi TV 2005.10

CHAPTER 1

T

Introduction1

Taurus Modeling EnvironmentTaurus Visual (TV) is part of the Taurus Modeling Environment (TME), a unified scripting infrastructure that combines Taurus Visual (TV), Taurus Workbench (TWB), and Taurus Layout (TLO). A brief introduction of each tool follows:

• Taurus Visual is used to visualize results generated by physical simulation software tools in one (1D), two (2D), and three dimensions (3D). You may visualize data for an initial understanding and analysis, then modify the plots to gain a new perspective.

• Taurus Workbench is a virtual IC factory that simulates semiconductor manu-facturing processes and predicts product characteristics. Taurus Workbench provides simulation management and data management so that the engineer can easily and efficiently predict product characteristics. Utilities include Design of Experiment (DOE), Response Surface Modeling (RSM), statistical analysis, plotting, visualization, optimization; and aids the engineer in explor-ing, refining, and centering a design. Taurus WorkBench is an open environ-ment in which to integrate, not only Synopsys TCAD products, but also inhouse and third-party tools and simulators. Job farming allows simulations to be executed in parallel across a network for faster results

• Taurus Layout is an interactive program that provides a direct interface to mask layout information for a variety of Synopsys TCAD simulators, includ-ing TSUPREM-4, and Raphael. Also, Taurus Layout can be used within the Taurus Workbench environment. Taurus Layout also has a direct interface to Raphael-NES.

Overview of Taurus VisualYou can use Taurus Visual to create plots that display fields, geometries, and regions, including results such as P/N junctions and depletion layers. Taurus Visual allows you to view I-V curves and doping profiles and provides tools to zoom, pan, and rotate images. You can also extract data using rulers and probes.

V 2005.10 1-1

Introduction Taurus Visual User Guide

You can annotated plots with labels, lines and legends, and then print or save to a file.

The graphical user interface (GUI) provides direct and easy to use operations, as well as advanced controls for expert users. With the Taurus Visual GUI, you can systematically visualize devices in 1D, 2D, and 3D. Taurus Visual executables include the following:

• tv for visualizing 3D simulation data

• tv2d for visualizing 2D simulation data


GUI ConventionsThe following sections describe conventions in using the mouse, window buttons and tool icons, and menu bars.

Using the Mouse

1. Select an object with a single click of the LEFT (SELECT) mouse button.

2. Add to a selection: use the LEFT mouse button while holding down the CTRL key.

3. Double-click to edit the contents of an object; press RETURN to accept changes.

The RIGHT mouse button (MENU) opens a popup menu, if one is avail-able.

Window Button Conventions

Many of the Taurus Visualwindows have one or more push buttons arrayed across the bottom. Click them using the LEFT (SELECT) mouse button. The functions of these buttons are as follows:

Button Function

OK The entries or changes you have made in the window are accepted and the window is closed.

Apply The entries or changes you have made in the window are accepted, but the window is not closed. This allows you to con-tinue making changes in this window. For windows that perform an action (such as a Load window), the action is performed and the button may be labeled with the appropriate action verb such as Load rather than Apply.

1-2 TV 2005.10

Taurus Visual User Guide GUI Conventions

If a button label appears grayed out, the button is not currently active. Attempts to click the button are ignored.

Menu Conventions

Throughout this guide, the shorthand convention “execute Menu➔ Item” means to use the MENU mouse button to select an Item from Menu.

1. To do this, move the cursor to the desired Menu, and then press and hold the MENU mouse button to display the items available under the menu.

2. While continuing to hold the MENU mouse button, drag the mouse down until the desired Item is highlighted; then release the mouse button.

If a menu item appears in light, faint lettering, the item is not currently available. Attempts to select the item are ignored.

KeyboardAccelerators

For those who prefer to use the keyboard instead of the mouse for menu selection, there are keyboard shortcuts (accelerator keys) for many of the menu selection operations. For example, in Figure 1-2, the first letter of each of the menu bar items is underlined (File, Edit, and View).

You can display a menu by pressing and holding the ALT key, followed by the desired letter. For example, ALT-F will display the File menu. Once a menu is dis-played, notice that one letter in each item is underlined. Make your selection by pressing the corresponding letter on your keyboard.

Reset The entries or changes you have made in the window since the most recent Apply are ignored, and the window is reset to the state it was in at the most recent Apply.

Cancel The entries or changes you have made in the window since the most recent Apply are ignored, the window is reset to the state it was in at the most recent Apply, and the window is closed.

Help A help button opens online help for the active window.

Close The window is closed.

Button Function

Figure I-2 Select File➔ Open (Add)... menu item

TV 2005.10 1-3


Once a menu is displayed, you may move up and down the menu using the up-arrow ↑ and down-arrow ↓ keys. You may move left and right (from menu to menu) using the left-arrow ← and right-arrow → keys. Press RETURN to make your menu selection.

Troubleshooting

Note:First, make sure that you have a frame buffer that supports 24-bit color.

By default, the CDE (Common Desktop Environment) software on Solaris systems is configured such that the default X visual is an 8-bit PseudoColor visual, even if the hardware supports a 24-bit TrueColor visual. The Galaxy toolkit which is used to build the GUI components has a bug such that if the default visual is not a 24-bit visual, Galaxy refuses to use any such visual, so it displays using a degraded color cube (the CDE environment allocates a certain number of colors for itself, and Galaxy is forced to use whatever is left over).

To correct this problem and make CDE use the full 24-bit color available, the X server must be reconfigured. Here is the official Sun documentation describing how to do this:

SunSolve Document infodoc/13458.

INFODOC ID: 13458

SYNOPSIS: How to bring CDE in 24 bit mode

DETAIL DESCRIPTION:

Running CDE in 24 bit Mode

Follow these steps:

1. cp /usr/dt/config/Xservers /etc/dt/config/Xservers (NOTE: /etc/dt/config directory does not exist by default, you must create it.)

2. Change the following line of the Xserver file you just copied:

:0 Local local_uid@console root /usr/openwin/bin/Xsun :0 -nobanner

to this:

:0 Local local_uid@console root /usr/openwin/bin/Xsun :0 -nobanner -dev /dev/fb defdepth 24

After the modifications have been saved, you will need to reboot the system for the changes to take effect. Xservers is read by dtlogin so you can restart dtlogin to re-read this file, but it is suggested that you reboot the system instead.

For users of Sun Workstations running SunOS: For proper operation of Taurus Visual, you must choose Move Pointer, not Click Select for establishing window

1-4 TV 2005.10

Taurus Visual User Guide Troubleshooting

focus. This selection is made in the Miscellaneous category of the SunOS workspace Properties tool. If you use the Click Select method, you may experience various problems, including nonresponsive Product buttons, segmentation faults, abrupt program termination, and so on.

TV 2005.10 1-5


1-6 TV 2005.10

CHAPTER 2

T

Fundamentals2

This chapter describes the fundamental concepts needed to use Taurus Visual.

Plot PageThe Taurus Visual main window (Figure 2-1) consists of a plot page and sur-rounding plot controls. The plot page can display one or more 1D, 2D, or 3D plots. New plots can be created by loading simulator structure files in Synopsys TCAD’s Technology Interchange Format (TIF) or the binary Technology Data Format (TDF). Also, you can create new plots with a cutplane in an existing 3D plot (which creates a new 2D plot) or a cutline in an existing 2D plot (which cre-ates a new 1D plot). I-V curve data and other curve data can be plotted. Plots are arranged in the plot page according to the selected View menu➔ Page Layout option.

V 2005.10 2-1

Fundamentals Taurus Visual User Guide

PlotsAll controls surrounding the plot page apply to the active plot, which displays a red frame. Only one plot is active at a time. When two or more plots are displayed, click the mouse Select button in any other visible plot to make it the current active plot. All controls will change to reflect the new active plot’s type. There are four plot types:

• 3D structure plot – created from a TDF file

• 2D structure plot – created from a TIF or TDF file

• 2D cutplane plot – created from a cutplane in a 3D structure plot

Figure 2-1 Main window with four plots (clockwise) — 3D structure plot - top left, 2D cutplane plot - top right, 1D cutline plot - bottom right, and 2D structure plot - bottom left

Plot Page

3D Structure Plot2D Cutplane Plot

2D Structure Plot1D Cutline Plot

Selection Frame

PlotStatusLine

Display Toggle Bar

Tools Bar

Message Line

Fields Sash

Fields List

Menus

Active Plot (Red)

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Taurus Visual User Guide Plot Controls

• 1D plot – created from a cutline in a 2D structure plot, 2D cutplane plot, or a 1D datafile

You can select multiple plots by pressing the CtrL key while clicking the mouse select button in any inactive plot. These plots are follower plots and display green borders. Certain actions in the active plot, such as zoom, pan, rotate, cutline, and field selection, are replicated in the follower plots. See “Causing Follower Plot Actions,” p. 4-36.

The Plot Status Line, which is directly under the plot page, displays the name of the selected graphic object in the active plot and the active plot’s plot ID. Plot ID is described in “Plot Description,” p. 4-9. When the graphics engine is comput-ing, the box on the right side of the Plot Status Line turns green. The box is gray when idle. Three shortcut buttons for changing the plot layout also are on the Plot Status Line.

Plot ControlsPlot controls are available in the Tools bar, Fields list, horizontal display bar (toggle buttons below the plot page), and main window menus. You can use the Fields sash to cover or extend the Fields list by dragging the mouse select but-ton over the sash. The message line at the bottom of the main window provides information about the Taurus Visual program’s current state and actions per-formed in the main window. Figure 2-1 shows the location of these controls and information areas, and includes a plot page with four plots displayed, each a dif-ferent plot type.

• Tools bar: gives you quick access to visualization tools that can be used with the mouse in the active plot.

• Fields list: lets you select one or more fields for display in the plot.

• Display bar: toggle buttons on this horizontal bar show or hide plot compo-nents when selected or unselected.

• Menus on the main window menu bar: provide access to specialized function-ality.

Menu Function

File Load new plot data, print plots, and quit Taurus Visual.

Edit Change plot objects such as lines and labels.

View Manage the plot page and view properties such as Reset Transform.

Plot Control the active plot.

Data Access 1D plot data.

Help Access online help.

TV 2005.10 2-3

Fundamentals Taurus Visual User Guide

Plots contain plot objects that can be visualized and manipulated with various controls. Many of these objects are components of the plot structure, e.g., regions and field contours. Other objects are more generic, e.g., labels, legends, and axes.

You can use the Select tool to click any area of the active plot. The name of the top plot object under the cursor is displayed in the Plot Status Line directly under the plot page. For instance, if the display bar Region button is on and you click over a region, its name will be displayed. If you click over a label, the label name will be displayed. You can select and move labels, lines, and legend objects.

2-4 TV 2005.10

CHAPTER 3

T

Getting Started3

Installation ProcedureTo install Taurus Visual, follow procedures described in the TCAD Product and Utilities Installation Manual.

Starting Taurus VisualThere are three Taurus Visual executables:

• tv for visualizing 3D simulation data



Start the Taurus Visual program by typing in a UNIX shell:

tv or tv2d or tv1d

Alternatively, open the Taurus Visual visualization program through any other Synopsys TCAD product with links to Taurus Visual.

Note:tv2d and tv1d are considerably faster than tv and should be used when visualizing simulation results generated by 2D simulations.

Note:Actions differ between 3D and 2D plots. Differences are described by referring to the executable name “tv” or “tv2d” in the following docu-mentation.

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Getting Started Taurus Visual User Guide

Shortly after the program colophon window opens, the Taurus Visual main window follows (Figure 3-1).

Using Online Help

Figure 3-1 Taurus Visual main window

There is extensive online help throughout Taurus Visual. You can accessed help from Help menus or Help buttons. • Help menus group subjects that are relevant to the window with the menu.

• Help buttons are used when there is a single help context. You can navigate with hypertext to other help subjects by clicking the underlined items.

• An overview of Taurus Visual and Help Contents is available from the Help menu in the Main Window.

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Taurus Visual User Guide Key Terms

Key TermsThe following terms are used in this manual to describe specific buttons, win-dows, and actions used to achieve visualization.

Key Term Description

active plot The primary plot on which you can perform actions; always bor-dered with a red frame.

axes Display button that shows the axis and grid according to settings in the Plot Properties editors.

boundary The edges around regions.

bounds Display button that shows boundaries around all regions of a plot.

curve plot A plot of two variables, an independent variable and a depen-dent variable.

cutline A 1D line through a 2D structure.

cutplane A 2D plane through a 3D structure.

cutvolume The remaining 3D volume defined by a 2D plane that divides the original volume with one side removed.

display bar A set of buttons below the plot page that can be used to show or hide plot components.

fields Solution values computed on a mesh; display button.

Fields list The names of the fields that are computed on the mesh for a given structure.

follower plot This plot replicates actions that are performed in the active plot; these plots have green frames.

mesh The nodes and edges of the solution grid; display button.

message line

Information text displayed at the bottom of the main window.

page layout The rule used to locate the display of two or more plots in the main window visible plot area; page layout selector opens when you execute View➔ Page Layout….

plot frame The boundary around a plot in the plot page; red for active plot, green for follower plot, gray for neither.

plot ID The identifier for a plot in the plot page.

plot order The sequence number of plots in the plot page. The first plot is in the top left position; the last plot is in the bottom right posi-tion. Plot numbers increase in row major order.

plot page The visible area in the main window that displays one or more plots.

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Getting Started Taurus Visual User Guide

Plot Status Line

Provides the plot ID and name of the currently-selected object for the active plot.

plot type Category of plot based on its dimensionality and origin.

P/N Junctions

The isoline for net doping = 0. Depletion edges can also be dis-played. A display button.

region An area defined by a contiguous mesh boundary in the structure. Regions consist of one material. A display button.

structure plot

Plot generated from a simulator results file containing meshes, fields and/or geometries.

TDF file Binary Technology Data Format (TDF) file containing 1D, 2D, or 3D results from a simulator.

TIF file ASCII Technology Interchange file (TIF) containing 1D or 2D results from a simulator.

Tools bar Vertical set of buttons that represents different tools used to define mouse actions in the plot page.

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CHAPTER 4

T

Using Taurus Visual4

The Taurus Visual main window plot page can display one or more 1D, 2D, or 3D plots. New plots are created dynamically and are positioned in the plot page according to the selected option in the Page Layout window (p. 4-33), which is opened from the View➔ Page Layout… menu in the main window, or by shortcut buttons in the Plot Status Line.

Creating PlotsYou can create new plots by one of the following methods:

• Loading simulator structure data files in Synopsys TCAD’s ASCII Technol-ogy Interchange Format (TIF) or the binary Technology Data Format (TDF).

• Using cutplanes or cutlines. Plot creation with a cutplane or cutline is described beginning on p. 4-24.

The Plot➔ Cut Controls… window provides three pages to control Cutvol-ume, Cutplane, and Cutline actions. The following describes plot creation from structure data files.

1. Use the main window File➔ Open (Add)… menu to load simulator data to create a new plot in the plot page.

2. Select this menu item to open a File Chooser to load 1D TIF (.ivl) or .data files, 2D TIF or 2D or 3D TDF files generated by Synopsys TCAD simulators or other simulators that can produce either of these formats directly or through translators:

a. Navigate to the directory that contains the desired file using the controls on the left side of the browser to move up and down the directory tree.

b. Select the desired file and click the OK button. The Taurus Visual pro-gram determines the type of file, binary or ASCII.

Actions are performed on the active plot identified by a red frame. Only one plot is active at a time.

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Using Taurus Visual Taurus Visual User Guide

Note:The controls and menus in the Taurus Visual main window change when a new active plot is selected. They are specific to the active plot’s type, and their actions apply only to the active plot.

Using the Display Bar

The display bar is the horizontal array of on/off toggle buttons below the plot page. Based on the active plot’s type, the display bar provides controls to show or hide plot components. You can display multiple components concurrently. To show or hide the component in the active plot, click the mouse select button on a button to toggle it.You can control the following components:

edit

mesh

region

fields

bounds

Displays the Plot Properties window for editing.

Displays the structure mesh as nodes and lines. If the region button is on, the mesh is displayed in a single color (default is black). If the region button is off, the mesh is displayed in the region color.

Displays the structure regions using the material color of each region.

Displays the selected fields from the Fields list as scalar con-tours or vector controls based on the field type. Fields are dis-played over regions.

Displays the boundary around all regions. Boundaries are dis-played over all other components.

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Taurus Visual User Guide Creating Plots

Note:For 3D plots, TV will draw the boundary lines not only for the region boundaries but also for external edges. The supplementary angle to determine if a boundary of two faces is a edge or not can be specified in the View Options window. (The default angle is 30 degrees.)

P/N

axes

volume

plane

overlay (tv2D)

Displays P/N junctions and depletion layers in accordance with the display properties set in the Plot➔Properties…➔ Junctions page.

Displays the axis and grid in accordance with the Plot➔ Prop-erties...➔ Axis page.

Displays the default cutvolume in a 3D structure plot. Use the Plot➔ Cut Controls…➔ Cutvolume page to control the cutvolume. Viewing is enhanced by using the rotate tool and toggling on the fields and bounds buttons.

‘

Creates and displays the default cutplane in a 3D structure plot. Use the Plot➔ Cut Controls...➔ Cutplane page to control the cutplane. Viewing is enhanced by using the rotate tool and by turning off the region and fields buttons and turning on the bounds button.

Is only enabled when follower plots (for 2D only) have been designated (see Causing Follower Plot Actions, p. 4-36). When the overlay toggle is on, the content of the follower plot is drawn on top of the master plot.

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Use the Fields list to select specific fields for display. The fields are displayed when the fields button is selected in the display bar:

1. Select a single field using the mouse select button.

2. Select multiple fields by pressing the Control key while using the mouse SELECT button.

3. Toggle multiple fields on and off using the Control key with the mouse select button.

• Note: The second or subsequent selected scalar fields that use a fill contour style will be hidden by the first field.

4. Use the Plot➔ Properties...➔ Fields page to change their style to show contour lines.

5. Use this page also to directly select additional fields for display by selecting a field in the Fields list and selecting the Show Fields checkbox.

Using Tools

Tools are available in the Tools bar at the left side of the Taurus Visual main window. Only tools compatible with the plot type (1D, 2D, 3D) of the active plot are displayed. Each tool performs specific actions when the mouse is used in the active plot. To use a tool, select it with the mouse select button and move the cursor to the active plot to perform the desired action.

Tools can be used to manipulate the plot or to manipulate certain types of plot objects, such as legends.

select

1. To select an active plot, click the mouse select button within an unselected plot. (The first click of the mouse selects the active plot.)

2. Click subsequent objects within the plot. The name of the object is displayed in the Plot Status Line below the plot page. For instance, for a structure plot with the region button on in the display bar, a mouse click over any region displays the name of the region.

In 3D plots, fields are displayed over regions. If the fields button is turned on, the selected object will be either contour or vector depending on the type of the top-displayed field. 2D plots always display the region name independent of the fields button.

3. Drag the mouse over labels, lines, or legends to move them in 2D plots.

Use to select plots in the plot page, to select objects within a plot, and to drag objects.

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For 3D plots, use the pan and zoom tools to move or to change the scale of certain objects (such as legends), once selected. They cannot be dragged with the select tool.

pan

zoom

1. To zoom into a specific area in the plot, press the select mouse button and drag a rectangular box.

a. For 3D plots, to increase the plot or object size, zoom in, press the middle button and drag up in the plot. To decrease plot or object size, press and drag down in the plot.

b. For 2D plots, the plot scale increases to fit the area shown within the rect-angle. Single click to zoom 200% centered at this location. For zoom out mode, press the SPACEBAR. Single click to zoom 50%.

2. When the View➔ Preserve Aspect Ratio checkbox is off for 2D plots:

a. In 2D plots, using the LEFT mouse button for a rectangular box will change the aspect ratio.

Note:In 3D plots, the aspect ratio is always preserved.

rotate

1. Press the mouse SELECT button and drag in the plot.

a. The plot rotates to follow the mouse. To rotate a face, for instance, set the mouse cursor in the center of the face and drag.

2. To rotate a corner, place the mouse cursor on the corner and drag.

Scrolls the plot or selected object.

Press the select button and drag the mouse in the plot to move it or the object within the plot frame. For 2D plots, drag a line; the plot scrolls the beginning point to the end point.

Changes the plot scale or the scale of the selected object.

Use in 3D plots to change the viewing angle.

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probe

1. Press the mouse select button in the plot. For 2D, the X and Y crosshair lines are displayed and a Probe Tool window opens. For 3D, the X, Y, and Z crosshair lines are displayed.

2. Drag the mouse or click to update the dialog. Values are displayed for all fields. If the field is a vector, the magnitude and X and Y scalar components are displayed.

3. Select fields (Control key and click to multiple-select) and use the Hide Selected button to reduce the visible list.

4. To show other field values, select them in the Fields list.

5. User can specify the number of digits and the format to display the field val-ues and coordinates.

ruler

1. Press the mouse select button and drag in the plot to create the ruler.

The ruler will display both X and Y scales based on the starting and ending points of the drag.

Displays field values at specific locations within a 2D structure, 3D structure, or cutplane plot.

Figure 4-1 Probe Tool window

Displays a scale in structure coordinates drawn on top of the structure plot.

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2. To dismiss the ruler, select another tool.

cutline

1. Use the Plot➔ Cut Controls…➔ Cutline page to specify the type of cutline to be created before using the cutline tool.

2. The default is a horizontal or vertical line. Click and drag the cutline tool to create a new cutline.

label

1. Click the mouse select button within the plot frame at the location of the desired label to open the Text Editor.

2. Type the desired label and set style properties.

3. Click the OK or Apply buttons to display the label in the plot.

4. To edit the label, select it with the select tool (label shows in the plot status line) and select Edit➔ Edit Object..., or double-click the label for 2D plots.

Use the Text Editor to set new style properties or change the text.

5. To dismiss the label, use the select tool and execute the Edit➔ Clear.

6. To pan the label in 2D plots, select and drag it with the select tool. In 3D plots, select it and use the pan tool.

Use in a 2D structure or cutplane plot to create a 1D cutline plot.

Add or edit labels.

Figure 4-2 Text Editor

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line (for 2D plots)

1. Press the mouse select button and drag within the plot to create a line.

2. To edit the line, select it with the select tool (line shows in the Plot Status Line) and select the Edit➔ Edit Line... menu item, or double-click it.

3. Use the Line Editor window to set new style properties or add arrowheads.

4. To dismiss the line, select it with the select tool and execute the Edit➔ Clear menu item.

Using Plot Menu Controls

Draw and edit lines in plots.

Figure 4-3 Line Editor

Extensive controls for the active plot are available in the Taurus Visual main window plot menu. The menu items above the separator open windows, including Plot Description, Plot Properties, and Plot Cut Controls. Several of these windows are notebook style with multiple pages.

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Plot Description The Plot Description window provides information about the active plot. The information content is based on the plot type (Figure 4-4).

Plot ID The plot identifier is displayed in the Plot Status Line. The default identifier is:

• 2D and 3D structure plots – <data file name>, not the complete UNIX path

• 2D cutplane plot – 3D Source Plot ID: Cutplane<number>, where <num-ber> is the Cutline ID in the Source Plot

• 1D Cutline Plot – 2D Source Plot ID: Cutline<number>, where <number> is the Cutline ID in the Source Plot

Data File The full UNIX path to the TIF or TDF data file that contains the structure geome-try, mesh, fields, and other data loaded for this plot. This file is only displayed for 2D and 3D structure plots along with the following summary information:Name, Comment, Time

The text values for the last one of these records in the TDF data file. The Name record usually includes the simulator name. Time is the original time of file cre-ation. For a TIF data file, Name is set to “TIF,” Comment is set to the TIF infor-mation group (n) record, and Time is set to the time of conversion from TIF to TDF, which is usually the current time.

Regions, Materials,Nodes, Triangles,

Fields

The number of each item in this structure.

Source Plot ID The identifier of the source plot for cutplane and cutline plots.

Cutline ID The identifier of the cutline in the source plot.

Figure 4-4 Plot Description window for selected 2D structure plot

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Duplicate a 2D Plot

5. A 2D structure data can be duplicated when you need to compare different attributes of the same structure data such as electron field side by side with hole field. Select a 2D plot where you are going to duplicate the data, then select Plot->Duplicate... A new 2D plot is generated sharing the same data. (2D plots only).

Plot Properties EditorThe Plot Properties editor is a notebook-style window. This editor provides four or six pages:

• Fields

• Regions

• Materials

• Junctions

• Axis (3D plots only)

• Flowlines (3D plots only)

These pages can be used to control properties related to the structure displayed in the plot.

Fields Page

The Fields page contains two major control areas (see Figure 4-6). The left side of the page provides a Fields list and controls for properties of the selected field. Only one field can be selected at a time. The selected field is scalar or vector.

Figure 4-5 Contour plot of Boron for Structure A (left), Structure B (center) and the difference between the structure A and B. (right)

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Taurus Visual User Guide Plot Properties Editor

To display the field in the plot, select the Show Field checkbox.

1. To display the field in the plot, select the Show Field checkbox.

2. To display the magnitude or one of the components of a vector field, select Scalar checkbox to activate the popdown list, then select one of the compo-nents. Scalar checkbox is located under the Fields list and provided when a vector field is selected.

Note:The vector field in the 1D cutline plot corresponds to the selected value in the Fields Page.

3. To display the scale legend in the plot in a default or custom style, use the Show Legend checkbox and Style… button.

4. Select the legend with the select tool and drag it. For 3D plots, use the pan or zoom tool to change its position or size. For 2D plots, you can change the size in the View ➔ Options… window.

The right side shows two control panels. Only one is visible, based on whether the selected field is scalar or vector.

1. Scalar Controls - Linear, Log (of the absolute value), or Signed Log

2. Range Controls - using the Min and Max sliders, limit the field range for display, or type values directly into the associated text boxes. Making the Min and Max values equal produces an isoline in 2D and an isosurface in 3D. You can set the Min and Max values outside the actual data range, so that multiple plots may be viewed with the same contour colormap.

Figure 4-6 Plot Properties editor with Fields page showing scalar contours controls for 3D plots

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Note:Drawing fill contours with a restricted range can be considerably slower when zoomed into areas with concentric contours in 2D plots.

3. Select Full Colormap to use the full color map between the Min and Max range settings.

Scalar Controls To specify contour properties for scalar field values:

1. Select the desired color map from the Options window and set the number of contour values in the adjacent text box.

2. To display Lines, Fills, or Isolines or any combination, use the checkboxes.

3. To force all contour lines to be drawn in the color shown in the color box, select the Monochrome toggle

4. To change the value or enter a new value in the text box, use the Isoline slider.

5. For 3D plots, select the Isosurface toggle to activate these controls. Isosur-faces can be displayed concurrently with contour lines and fills.

6. To move the isosurface between the minimum and maximum values of the selected field use the slider.

Note:Some field data sets contain insufficient data to draw an isosurface at the maximum and/or minimum values. In these cases, no surface is drawn, and the field legend indicates that there is invalid data. Move the slider slightly off the maximum or minimum for the surfaces to begin drawing.

7. Select the Monochrome toggle and specify a color with the Color Chooser. This color will be used for the isosurface for all values of the selected field.

8. To display another field as a Mapped Field on the isosurface, select it in the Map to Field popdown list and click the checkbox on.Map to Field

This panel provides controls to display contours of a second field on the selected field’s isoline (2D structure or cutplane plot) or isosurface (3D structure plot) (tv).

Note:In version 2000.2, Map to Field is only available for 3D plots.

1. To set the contour limits, use the Field Range controls.

2. Choose a field from the Map to Field popdown list.

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3. Map the field selected from this list onto the displayed contours by clicking on the Map to Field checkbox.

Both fields show as selected in the Taurus Visual main window Fields list.

4. To change contour properties for the Map field, select it in the Fields list in the Fields page and set properties.

Vector Controls Vectors are displayed as directed arrows from each mesh node. The amplitude is indicated by arrow length and color from the selected color map:

1. To display single color vectors, select the Monochrome toggle. Set color using the Color Chooser.

2. Control the length of vector arrows by using the Scale text box. Vector lengths are scaled by the scale ratio between 0 and 1000.

Figure 4-7 Vector panel in Plot Properties editor Fields page for 2D plots

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Regions Page

The Regions page contains a list of all regions in the plot structure (see Figure 4-8).

1. You can select one or more regions simultaneously. The Name, Material, and Color are displayed for the top selected region in the list.

2. You can show or hide the Regions, Fields, Mesh, or Bounds in the region using the Show checkboxes.

3. For the selected regions, set the Mesh Color for drawing the mesh over the region when the region is displayed.

a. The mesh still uses the region color when the mesh is drawn without the region displayed.

b. Typically, you would select all Regions in the list box and then set a new mesh color.

c. The default color is black.

4. For 3D plots only, you can set the Transparency, Specular, and Ambient properties of the selected regions by using the sliders or entering values in the associated text boxes.

a. Zero transparency makes the region invisible, 1.0 is 100% opaque.

b. The Specular property controls the apparent glossy effect. 1.0 is high gloss.

c. The Ambient property affects the amount of ambient light on the sur-face. 1.0 is high ambient light.

Figure 4-8 Plot Properties editor Regions page for 3D plots

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Materials Page

The Materials page contains two lists. The Materials list shows all materials in the plot structure or all materials in the TIF or TDF file list of material properties.

Only one Material can be selected. The Regions list shows the regions that are made of the selected Material. Default colors are used from the Materials database (see Figure 4-9).

1. To override these colors, use the Set… button to open the Color Chooser.

2. A Material is identified as an Electrode by the checkbox.

3. To show or hide the Materials legend, toggle the checkbox.

4. To specify custom styles with the Legend Style Chooser, click the Style… button.

5. To select the legend, use the select tool and drag it.

a. For 3D plots, use the pan or zoom tool to change its position or size.

b. For 2D plots, change the size in the View ➔ Options… window.

Figure 4-9 Plot Properties editor with Materials page visible

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Junctions Page

The Junctions page provides controls to display P/N Junctions and Depletion Edges (see Figure 4-10).

You can display P/N Junctions and Depletion Edges as a Line and/or Fill. In addition, P/N Junctions can be displayed as an Isosurface in tv.

You can set colors using the Color Chooser.

Junctions are defined to be the isoline where net doping equals zero.

Depletion Edges are defined as the isoline where the carrier concentration is 1/2 of the background doping. For p-type regions the isoline is where:

For n-type regions the isoline is where:

Figure 4-10 Plot Properties editor with Junctions page

pNnet----------

12---, where p=hole concentration=

nNnet----------

12--- , where n=electron concentration=

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Axis Page (3D Plots)

The Axis page provides controls to display a grid over the plot (see Figure 4-11).

Flowlines Page (3D Plots)

Note:For the 2000.2 release, flowlines are an option only for 3D plots.

In Taurus Visual, you can display flowlines for any vector field in a 3D or 2D plot. Given a starting point, the flowline traces the path that a particle would follow through the vector field. In 3D plots, you can define starting points by using:

• An isosurface

• A plane with a uniform grid

• Starting points set with the select tool

Figure 4-11 Plot Properties editor with Axis page for a 3D plot

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In 2D plots, define starting points by using a line with a uniform spacing of starting points or by selecting starting points with the select tool. Figure 4-12 shows flowlines displayed in a simple 3D example generated by Davinci.

1. In either a 3D or 2D plot, you can select a single flowline and create a 1D plot to show the values of any field as a function of the distance along the flowline. Essentially, this is another form of a 1D cutline plot.

2. For both 3D and 2D plots, an animation function can display a glyph on each flowline. Each glyph will follow the flowline at a speed relative to the magni-tude of the vector field at the current location of the glyph.

All controls for flowlines are accessible from the Plot➔ Plot Properties… ➔ Flowlines page.

CreatingFlowlines

If vector fields are present in a plot:

1. Open the Plot Properties editor by executing Plot➔ Plot Properties… and go to the Flowlines page (see Figure 4-13).

2. Select the vector field in the Flowline Field pulldown list.

3. To change the color of flowlines, use the Color control.

4. To contour the flowlines with the values of the map field using the selected colormap, select the Map to Field checkbox and select any field from the adjacent popdown list.

Figure 4-12 Flowlines of electric field generated from an isosurface showing glyph trace markers

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The Mesh: pulldown menu lets you select the starting points for flowlines. Typi-cally, it is best to set the desired starting point controls before finally toggling on the Show Flowlines checkbox.

3D IsosurfaceStarting Points

Selecting Isosurface causes flowlines to be started from each mesh point in the isosurface.

The Nodes text box indicates the number of nodes to be used to start flowlines, and provides a filter to reduce the number of visible flowlines.

You must first turn on an isosurface using the Fields page. It is best to only have the fields and bounds display buttons on.

Note:If there are no flowlines when either the isosurface or 2D plane is very close to an electrode or other region boundary, try moving the plane or isosurface slightly away from the boundary to make the flowlines appear.

3D Plane StartingPoints

The plane option creates a 2D plane in the 3D structure with a uniform mesh. Flowlines start from each node in the mesh.

• The Show Plane checkbox can be used to hide or show the plane and its mesh.

• The Edit Plane… button opens the Plane Mesh dialog to control the uni-form mesh and to position the plane in the 3D volume (see Figure 4-14). The translation and rotation controls can be used to position the plane either by using the sliders or typing in values in the text boxes.

Figure 4-13 Plot Properties editor Flowlines page: main flowline controls

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• The View➔ Show Axis Glyph checkbox menu can be used to display the axis directions to help visualize the effect of using the translate and rotation controls.

The position of the plane also can be controlled using the select, pan, zoom, and rotate tools:

1. Make sure the plane is visible, using the Show Plane control, and the Add Points checkbox is off.

2. To make the plane the selected object (lower left of plot page displays “Object FlowLinePlane”), use the select tool.

3. To position the plane with the mouse, use the pan, zoom, or rotate tools.

a. Only the MIDDLE mouse button can be used for zoom, similar to chang-ing the size of legends.

b. Drag up to enlarge the plane; drag down to make the plane smaller.

2D Line StartingPoints

2D line starting points are used only in 2D plots. This mode is similar to the 3D plane mode; however, a uniform spacing of points is used on a line that can be placed in the 2D plot vector field. • You can specify this line using the Line Start and Line End point text boxes

(see Figure 4-15).

Figure 4-14 Plane Mesh dialog: “3D Plot Flowline Plane Controls”

Figure 4-15 2D plot flowline line controls

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• Use either the probe or ruler tool to find values for your desired start and end points. The pan and zoom tools cannot be used to position this line.select Tool Used For Starting Points: Rather than display flowlines from mesh nodes, use the select tool to:

1. Click the Add Points checkbox on.

2. In either the isosurface or plane mode, use the select tool to start new points by clicking on these surfaces.

3. To view only points started in this manner, set the Mesh: pulldown menu to Points Only. You can start new points in this mode, as well.

4. To remove flowlines generated by the select tool, use the Clear Points button.

5. If a new value is typed into a Starting Point X/Y/Z text box (Figure 4-13), use the Add Point button to start a new flowline from that coordinate.

6. To start a flowline in a 2D plot, click anywhere over the vector field and a flowline will be started from that point.

Creating 1D Plots 1D plots can be created to show field values along the length of a selected flowline:

1. Select the flowline to be used for the 1D plot. This can be done two ways.

a. With the Add Points checkbox off, use the select tool and click the desired line. It displays using a dashed style including the Highlight Color.

b. You can also click the Add Points checkbox to the on position. Now use the select tool to add a new point, which automatically becomes the selected flowline.

2. Select the 1D Plot Fields to be exported to the 1D plot. Use the Control key and select or unselect the desired fields.

3. To open the 1D plot, use the Create 1D Plot button. (This is analogous to creating 1D plots using the cutline tool.)

Animation withGlyphs

Glyphs can be displayed on each flowline and made to move along the flowline at a speed relative to the magnitude of the vector at the current location of the glyph. The Flowline Glyphs dialog (Figure 4-16) is opened by clicking the Glyphs… button on the Plot➔ Properties…➔ Flowlines page

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.

The following controls can be used:

• Show Glyphs checkbox activates the animation capability and shows the glyphs for each flowline.

• Scale text item indicates relative size for the glyph—default = 1.

• Color: Glyph color—default = green.

• Steps text item: Total number of movement steps—default = 20.

• Step Size slider indicates the step distance.

You can change the range of the step distance by using the text box at the right end. tv attempts to establish default settings based on the maximum amplitude of the vector field.

If all flowlines are starting in an area of low vector magnitude, you may have to change the step distance significantly to see glyph movement. Sometimes the right side of the slider text box must be set many orders of magnitude higher and the slider moved near the right end.

The reverse can be true when tracing flowlines through the highest amplitude areas in order to slow the glyph movement. One solution is to turn on the vector field with the flowlines. This shows where the high magnitude vectors exist and the proximity of the starting points for the visible flowlines.

Note:The Step Size slider and (total) Steps controls work together.

• Run toggle: turns animation on and off.

• Cycle toggle: off state stops animation when (total) Steps has been reached. On state is a continuous run mode. Glyphs go to the end of their respective flowline (or until they reach Steps) and start over at the beginning.

• Reset button: moves all glyphs back to the flowline starting point. If Run is on, it continues the animation.

• Close button: closes the dialog.

Figure 4-16 Flowline Glyphs dialog

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Taurus Visual User Guide Plot Cut Controls Window

Plot Cut Controls WindowThe Plot Cut Controls window provides three pages to control Cutvolume, Cutplane, and Cutline actions.

Cutvolume Page

A cutvolume is created in a 3D structure plot by using the display bar (cut)volume button.

The Cutvolume page of the Plot Cut Controls window displays the selected field in the volume consisting of the structure between the maximum Z axis value and 50% of the value.

1. Fields button must be selected in the display bar. The remainder of the structure field is not visible.

2. Cutvolume page controls allow moving the plane that defines the cutvolume from one end to the other along the selected axis by using the sliders or associated text boxes.

3. Perpendicular Axis: for the plane can be changed using the X,Y,Z option menu.

4. Cut Above Plane checkbox selects which of the two volumes created by the definition plane is to be visible. The visible volume can either be above or below the cutvolume definition plane.

Figure 4-17 Plot Cut Controls window with Cutvolume page visible and Rotate Plane controls visible

TV 2005.10 4-23


5. Rotate Plane checkbox opens further controls to set the definition plane’s rotation around either axis in the plane and the center of rotation. Use either the sliders or associated text boxes.

Cutplane Page

A cutplane is created in a 3D3D structure plot by using the display bar (cut)plane button. This displays the field, selected in the popdown list, in a cutplane located inside the structure halfway between the maximum and minimum Z axis values.

It is best to visualize this plane with only the bounds button selected in the display bar. Alternatively, you can select region buttons can be selected in the display bar and the regions made somewhat transparent using the Plot➔ Properties...➔ Regions page controls.

Note:Do not select the fields button in the display bar since this will show the field over the entire volume.

The cutplane controls allow moving the plane from one end to the other along the selected axis by using the slider or associated text box. The Perpendicular Axis for the plane can be changed using the Axis option menu. Use the Create 2D Plot button to create a new 2D cutplane plot. As the cutplane is moved in the 3D structure plot, the 2D cutplane plot updates to show properties at the new location.

Use the Rotate Plane checkbox to open further controls to set the cutplane’s rotation around either axis in the plane and the center of rotation. Either the sliders or associated text boxes can be used.

Figure 4-18 Plot Cut Controls window with Cutplane page visible and Rotate Plane controls visible

4-24 TV 2005.10

Taurus Visual User Guide Plot Cut Controls Window

Cutline Page

The top panel provides controls for creating new cutlines. Controls in the bottom panel allow changes to be made to existing cutlines.

New cutlines are created with the cutline tool from the Taurus Visual main window Tools bar.

1. Select the type of cutline by clicking the appropriate cutline options button in the Plot Cut Controls…➔ Cutline page.

2. Use the Taurus Visual main window Tools bar cutline tool to create the new cutline using the following rules.

Cutline Options

Select the Absolute toggle to use the structure coordinates or the Relative toggle to have the cutline origin always start at coordinates (0,0), respectively. For absolute coordinates, the projection of the cutline on the Y axis or the X axis is used, whichever is longer.

Figure 4-19 Plot Cut Controls window with Cutline page visible

Press the mouse SELECT button and drag in the plot to create a cutline in an arbi-trary direction.

Press the mouse SELECT button and drag in the plot to display a horizontal or vertical cutline. The cutline snaps in place based on the mouse position being closer to horizontal or vertical.

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ModifyingExisting Cutlines

Existing cutlines can be modified by using the controls in the bottom panel on the Cutline page. A list of existing cutlines in the active plot is displayed at the left.

1. Select a cutline in this list with the mouse SELECT button.

2. Use the controls to view the selected cutline’s starting and ending points or to change its location by entering new values in the respective text boxes.

3. To move the selected cutline by an increment, enter the start and ending values in the text boxes and click the appropriate arrow buttons.

Comparing Fields between Two Simulation Structures (Diff Fields)

When you need to compare fields between two different structures, select Plot->Diff Fields. A new plot is generated to display the differences.

1. Select a plot. This is the baseline structure. (Plot A)

2. Select a plot as a follower plot by Ctrl key and click. The frame border becomes green. (Plot B)

3. Select Plot->Diff Fields.

Then a new data is generated with the calculation result of,

Field value (Plot A data) - Field Value (PLot B data)

Note:Taurus Visual calls an internal function of Taurus Process mesher to perform the field data comparison. To use the function, Taurus TSU-PREM-4 (version 2003.12 or later) must be installed. The interpolation of data for different mesh structures is handled by Taurus. You can com-pare data saved in TIF and TDF format.

Note:The data files of Plot A and Plot B must be in the directory where those files were loaded into Taurus Visual.

The result plot is set as a follower plot of Plot A and follows the basic rule of mas-ter-follower relationship (described in Creating Follower Plots, p. 4-36) except the result plot keeps its own field range. To set different plot options to the result plot, reselect the result plot as an active plot, then open the Plot Properties editor clicking edit button.

Note:Comparison time depends on the data size. If you decide to perform other operations in Taurus Visual before the result plot is generated, Taurus Visual may not set the master-follower relationship correctly.

4-26 TV 2005.10

Taurus Visual User Guide Field Data Calculation (2D Plots)

Field Data Calculation (2D Plots)You can create a new field specifying an expression in the Field Data dia-log.

Figure 4-20 2D and the cutline plots with a new field data

The new field becomes a part of the original set of field data., so user can,

• Draw the contours.

• Probe the new field’s value using the probe tool.

• Create the 1D plot using the cutline tool.

• Create another new field specifying the new filed in the expression.

The button to open the dialog panel is under the field list in the Taurus Visual main window. The button is available when the active plot is a 2D plot.

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Figure 4-21 Field Data Dialog

Generating a New Field

1. Open the Field Data dialog clicking the calc button.

2. Specify an expression in the Expression: text box.

3. Specify the new field’s name and unit. (Optional)

4. Select scale.

5. Click Add Field button.

In the Field Data Dialog,

• Available functions are,

Four basic operations of arithmetic such as +, -.

The mathematical functions such as log() and abs().

Relational Operators such as > and <=, and the ternary operation.

Some special functions for Vector field.

Dot product

xcomp(), ycomp(), zcomp to take the component.

• You can type the expression in the Expression: text box directory, or use add to expression buttons to copy a selected field name and function from the lists to the text box.

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Note:If the Units: text box is empty when you copy a field name using add to expression button, TV will copy the unit of the selected field to the Units: text box. User can change the unit manually.

• New field name is optional. TV will create a unique name if user does not specify it.

Note:New field name has to be different from already existing field’s name.

Note:Do not use a new field name such as Arsenic+Phosphorous when you intend to use the new field to create another new field. The expression parser will not be able to distinguish if Arsenic+Phophorus is a field name or an expression.

• Vector and Scalar type were automatically identified by TV.

• For Relational Operators such as > and <= will generate a field which con-tains 1 or 0.

• The ternaly operator is also available. For example, the expression:

FieldName1 >= 0 ? FieldName1 : 0

will generate a new field which has the same value as FieldName1 where the values is equal or larger than 0, but replace the original value with 0 if the original values is smaller than 0.

Examples

The following operation are possible with a 2D device structure which are saved in tif and tdf files. Use the probe tool to see the calculated values.

(Example 1)

In the 2-D plot of a process simulation result, generate a new field with the result of the addition of Phosphorus and Arsenic.

1. Type “Phosphorous+Arsenic” in the Expressions: text box. User could copy field names and the functions to build the expression using add to expres-sion button. Field name is case-insensitive.

2. Type the new field name “AsAndP” in the New Field name: text box.

3. Type the unit “cm-3” in the Units: test field.

4. Select the scale.

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5. Click Add Field button. The new field should be generated and added to the device struture..

Figure 4-22 Example1

(Example 2)

1. In the 2-D plot of a device simulation result, generate a field with absolute value of x component of the ElectricField.

2. Type “abs(xcomp(ElectricField))” in the Expression: text box. xcomp() is the function to extract the x component of a vector field.

Note:If you use a function for vector fields with scalar fields, TV will show an error message and the calculating will not be performed.

Type the new field name “EField_absX” in the New Field name: text box.

Type the unit “Vcm-1” in the Units: text box.

Select the scale.

Click Add Field button. The new field should be generated and added to the device structure.

Figure 4-23 Example 2

Table of Functions

Functions with argument x are for scalar data. If a vector field data is specified, the operation will be performed to each component.

Functions with argument v are for only vector data.

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Table 4-1Available Functions

Functions Description

* Multiply

/ Divide

% Modulus

+ Addition

- Subtraction

^ Exponentiation

== Equal

!= Not equal

< Less than

<= Less than or equal

> Greater than

>= Greater than or equal

&& Logical AND

|| Logical OR

exp(x) Exponential

log(x) Natural log

log10(x) Log base 10.

sqrt(x) Square root

abs(x) Absolute value

ceil(x) Least integral value greater than x.

floor(x) Greatest integral value less than or equal to x

sin(x) Sine

cos(x) Cosine

tan(x) Tangent

asin(x) Arc sign

scos(x) Arc cosine

atan(x) Arc tangent

sinh(x) Hyperbolic sine

cosh(x) Hyperbolic cosine

tanh(x) Hyperbolic tangent

dot(v1, v2)

xcomp(v) X component of v

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Using Edit and View Menu OptionsThe Edit menu controls plot objects that can be added, removed, or edited. These include annotation lines and labels:

1. Select the object.

2. Select either the Clear or Edit Object menu.

Controls are provided in the main window under the View menu for managing the placement of plots on the plot page. Currently enabled controls are:

• Page Layout…

• Interact Mode

• Transform controls

• Options...

ycomp(v) Y component of v

zcomp(v) Z component of v

mag(v) Magnitude of v

Functions Description

Figure 4-24 View menu

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Taurus Visual User Guide Using Edit and View Menu Options

Page Layout

The second option is row major (shown in Figure 4-25), displaying all plots by maintaining the row size as larger than the column size. The third option is similar, but is column major.

Interact ModeIn tv, View➔ Interact Mode provides two cascading menus to select Wireframe or Surface rendering when panning, zooming, or rotating the plot. Surface mode redraws the entire plot throughout the action. Wireframe only draws the boundary edges during the action and redraws the entire plot at the conclusion. Wireframe is useful for complex 3D plots.

Options Window

This opens a window that contains controls for setting plot options.

• Plot Background and Foreground colors can be set. Clicking the Flip button switches the foreground and background colors.

• Preserve Aspect Ratio checkbox affects all scaling actions with the zoom tool. See zoom, p. 4-5 for details. With the Preserve Ratio Aspect off, the plot can be distorted by using different scale factors for the X, Y, and Z axis. The current plot aspect ratio will be preserved when the checkbox is clicked on (in the Options window for tv2d).

Execute View➔ Page Layout… to open the Page Layout window (Figure 4-1). The first option provides a stacked view. Only one plot is visible in the plot page. If there are multiple plots, other plots will not be visible. Use the two middle buttons to select a different visible plot.

Next Page

Previous Page

Figure 4-25 Page Layout window

Use the four buttons to move the active plot in the plot order. Plot order starts at the top left plot and grows sequentially from left to right, top to bottom. The bot-tom right plot is the last plot in the plot order.

Close dismisses the window. The Help button opens an online Help window.

Move to frontMove ForwardMove BackwardMove to Back

TV 2005.10 4-33


• In tv, the orientation controls flip the Y axis In tv2d, the orientation con-trols flip the Y axis, and legends can be resized.

• Click the Smooth Edges on activating shading for smoother edges. Turning this checkbox off will give sharply defined features.

• Draw Fields Over Regions controls the visibility of fields when drawn with regions in complex 3D plots.

In tv, the Jitter Scale determines the resolution between objects when several objects are plotted on top of each other. For example:

• When both mesh and fields are being plotted, and the mesh has the higher jitter level, then the Jitter Scale determines how much on top the grid is plotted.

• If several mesh layers are seen beneath the surface (and the figure looks spaghetti-like) lower the Jitter Scale and less mesh will be shown.

• If too little mesh is visible, try raising the Jitter Scale.

Figure 4-26 Options windows for tv and tv2d

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Taurus Visual User Guide Using Edit and View Menu Options

Bound Angle is to specify the threshold angle for the external edge extarction. The value is the supplementaly angle to determin if a boundary between two faces is a edge or not.

Figure 4-27 Boundary lines with the Bound Angle = 30 ( center) and Bound Angle = 5 (Left)

Undo Transform

This command undoes the last scale (zoom), translation (pan), or rotation action.

Note:tv can undo or redo only the last action; tv2d can undo or redo all previous actions.

Redo Transform

This command restores the last transformation that was reversed with Undo.

Reset Transform

View➔ Reset Transform normalizes and centers the active plot to fit within the plot frame.

TV 2005.10 4-35


Edit Transform

Edit Transform opens the Transform Editor window (see Figure 4-28). Use this editor to pan, zoom, or rotate by an exact amount.

Note:In tv2d, be sure to type in all four zoom numbers and hit RETURN to guarantee acceptance, as the defaults are not always usable.

Causing Follower Plot ActionsFollower plots replicate actions that are performed in the active plot. This allows the same action to be repeated in two or more related plots. Follower plots obey different rules based on whether they are the same or different plot types than the active plot.

Creating Follower Plots

Select follower plots with the select tool.

1. Press the Ctrl key and click the mouse select button within any plot frame that is not the active plot.

A green frame borders the selected plot to indicate that it is a follower plot. You can select any number of follower plots.

2. To unselect all follower plots, click the mouse select button in any other desired active plot without the Ctrl key.

Figure 4-28 Transform Editor windows for tv and tv2d

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Taurus Visual User Guide Printing Plots or Saving to a File

Action Rules Follower plots perform actions in accordance with the following rules:

1. If the follower plot is the same plot type as the active plot (for instance, both are 2D structure plots), the follower plot immediately changes its structure transformational coordinates to be identical to the active plot.

2. Any subsequent pan, zoom, or rotate action performed in the active plot is replicated in the follower plot.

3. In tv2d, use of the overlay toggle will cause the contents of the follower plot to be displayed on top of the master plot.

Note:If the follower plot structure coordinates are different from the active plot, it may significantly change size or even disappear since it is following the range of coordinates visible in the active plot.

4. If the follower plot is not the same plot type as the active plot, transformations are not coordinated, and pan, zoom, or rotate actions will not be replicated.

5. All follower plots, regardless of their plot type, attempt to replicate actions in the active plot for fields and their properties, display bar components, and cutlines. These actions are coordinated only after they have been performed in the active plot. They are not coordinated at follower plot creation.

6. If the action is not possible in the follower plot (for instance, selecting a field in the active plot that is not available in the follower plot), the action is ignored in the follower plot.

Printing Plots or Saving to a FileThe Print window provides controls to print either of the two choices:

1. Active plot

2. All plots in the plot page

1. Use the Printer text box to enter the name of the desired printer. The named printer will be used, unless the Print to File checkbox is selected. The

Figure 4-29 Print window

TV 2005.10 4-37


default print command is displayed in the Print Command text box. You can enter a custom print command.

2. Use the Print What option menu to specify Active Plot or All Plots in Page. Then select the number of copies.

3. Print to File is PostScript format. Click the File… button to open a File Chooser and specify the directory path and filename. When Print to File is selected, the Print EPS toggle appears. Use this option to generate an encap-sulated postscript file to be imported into other programs.

4. By default, the plot background and foreground colors are set to white and black, respectively. You can override this with the Print Plot Background Color checkbox (tv2d).

5. Click the Page Setup… button to set page options.

Page SetupThe Page Setup notebook window is used to set plot orientation and paper type.

Loading and Saving Plot StatePlot->Save Plot State... can be used to save a command file representing the current plot properties.

The previously saved plot state (or any command file) can be loaded by selecting Plot->Load Commands...

When TV loads a 3D or 2D data file, it tries to locate a command file of the same name, with the ".tcl" extension, first in the current working directory, and then in the directory from which the data file is loaded. If found, it will execute the commands in this file. Therefore, if a command file is saved along with a 3D or 2D data file, the plot state will be applied when the data is loaded.

Figure 4-30 Page Setup notebook window showing Page Layout page

4-38 TV 2005.10

Taurus Visual User Guide Reload Simulation Data

Reload Simulation DataWhen simulation data of a 2D plot is updated on your disk, the plot can be updated by File->Reload. Setting of transform, show, or hide states of Mesh, Region, Field, Boundary, P/N junction components and the properties of Fields, Regions, Materials are preserved. If cutlines are specified in the original plot, new 1D plots are generated automatically based on the reloaded simulation structure.

Note:In 2004.12, Reload function is not available for 3D plots.

TV 2005.10 4-39


4-40 TV 2005.10

CHAPTER 5

T

1D Plots5

Taurus Visual can plot curve, scatter, or histogram plots from data sets that are saved as tv1d data tables.

1. To create these plots, load 1D data from a TIF file (.ivl extension), a tv1d data file (.data extension) or from a cutline in a 2D plot.

2. To initialize tv1d for displaying plots, you must always start by creating a data table in tv1d.

Note:The tv1d component is available in all three Taurus Visual executa-bles: tv, tv2d, and tv1d.

OverviewData tables can be visualized in two ways:

• Curve, scatter, or histogram plot

• Spreadsheet of data values

Multiple data tables can be visualized in the same plot. Each data table can be used to display one or more curves in the plot. Use the SpreadSheet window to directly view and manipulate data values for any data table. The SpreadSheet window is available through the Data➔ Spreadsheet… menu (see Working with Data Tables and the SpreadSheet, p. 5-16).

An import and export function for data tables and their corresponding spread-sheets is available. New data can be imported, such as experiment data to compare with simulation data. The export function can create a data file with data from any selected columns in a spreadsheet.

The plot types available are:

• Three types of curve plots (curve plot, curve family plot, parameter plot)

• Scatter plot (only the data points)

• Blind plot

V 2005.10 5-1

1D Plots Taurus Visual User Guide

• Histogram plot

Variables in a data table can be selected for the independent axis (x) and depen-dent axis (y). Both the top and bottom axis can be used for independent variables, and the left and right axis can be used for dependent variables. Various line styles, colors, symbol styles, and colors for data points can be selected.

Three types of coordinate systems can be applied to the plot and/or data:

• Cartesian

• Polar

• Smith

Annotation objects, such as text, lines with arrows, boxes, and legends can be included in plots. These can be selected and dragged anywhere on the plot. Text, lines, and boxes also can be edited.

Besides the standard tools for selection, pan and zoom, special tools for probing values at data locations and creating tangent lines are available.

Creating Plots1. To load new 1D data, in the Taurus Visual main window, execute

File‘Open (Add)…. This opens the File Chooser to select the desired data file and read data from that file to create a new data table.

Depending on the state of data in the loaded data file, plot curves may or may not be displayed at the conclusion of loading the data. This section describes how each plot type can be created from data in a data table.

Taurus Visual accepts two file formats:

• tv1d data format identified by files ending with a .data extension

• Synopsys TCAD TIF format for I-V curves identified by an .ivl extension (see Data Formats, p. 5-20 for a description of these formats).

2. For any 1D plot in the plot page, open the Plot Properties editor to select and manipulate different plot types. The Plot Properties editor works with data tables and uses a similar procedure for defining all the plot types:

Curve Plot General, dependent variable/independent variable graphs

Curve Family Plot

A set of curves for the same dependent and independent variables; each curve displayed from a different data table

Parameter Plot A dependent variable/independent variable plot that is parame-terized by selected values from one or more other variables in a data table

Histogram Plot A frequency plot for a single variable

Pin Plot A plot (access from Curve Plot page) to display Harmonic Balance simulation results.

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3. To open the Plot Properties editor, either double-click in a plot visible on the plot page or execute Plot‘Plot Properties….

Plot Properties Editor

The Plot Properties editor is a notebook style window (see Figure 5-1). This editor always contains the first page, General, and the last page, Axis. Based on the selection of either Curve Plot or Histogram Plot on the General page, other pages will be available for the specific plot types.

1. Use the General page to specify the plot title, coordinate systems, legend, and region visibility.

2. Use the controls on the Axis page to customize each axis.

3. Use the specific plot pages to create plots. All Plot Properties editor pages work in a similar manner.

Scatter Plot A Curve Plot (access from Curve Plot page) with the visibil-ity lines off and the symbols on

Smith Chart A polar plot (access from Curve Plot page) to display com-plex-valued quantities such as a scattering parameters.

Figure 5-1 Plot Properties editor with the General page and Plot Type Curve Plot selected

TV 2005.10 5-3


The pages are divided into two tables, one at the top and the other directly below.

The upper table is where plots are specified, and the lower table lists all curves associated with the plot specification. See Figure 5-2.

For each plot type, a plot chooser is used to specify a set of curves or bins for a histogram plot.

4. Click the Create… or Edit… button to open the plot chooser. Each chooser opens with a selected data table.

5. To create a new line in the top table that represents the defined plot specifica-tion, lick the OK or Apply button in the chooser.

Each page displays four buttons below the upper table:

6. Once a plot is specified and selected in the upper table, use the lower table to display all curves associated with that plot specification.

In the lower table, each row represents a single curve that can be visualized with controls to Show or hide the curve and adjust styles for the curve’s lines and data symbols.

7. Select a row and click the cell below Show to turn that curve’s visibility on or off based on the properties set for lines and symbols.

Create... Opens a plot chooser to specify a new plot

Edit… Opens the plot chooser to edit the selected plot in the top table

Duplicate Creates a new plot specification as a duplicate of the selected plot specification in the top table

Delete Removes the selected plot specification

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Curve Plot The Curve Plot page is used to specify and visualize general, two-variable plots with a dependent and independent variable (see Figure 5-2- and 5-4).

The Curve Plot Chooser (Figure 5-3) is used to select the data table and the independent variable (X Axis).

1. Open it by clicking the Create… or Edit… button on the Curve Plot page.

2. In the upper table of the Plot Properties editor, specify whether the X Axis is to be top or bottom.

3. Click the box to toggle the axis location.

Figure 5-2 Plot Properties editor with Curve Plot page showing mos_breakdown:0_0.ivl in the upper table with V(Drain) as X Variable and the lower table scrolled to I(Drain) with Show on

Figure 5-3 Curve Plot Chooser

TV 2005.10 5-5


4. To show or hide all curves from the plot specification, toggle the Show col-umn box.

Curve FamilyPlot

The Curve Family Plot page is used to display a set of curves for the same dependent and independent variables; each curve is displayed from a different data table (see Figure 5-5- and 5-7).

Figure 5-4 Corresponding plot for Figure 5-2

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The Curve Family Plot Chooser (Figure 5-6) is used to select a data table that has the desired independent and dependent variables.

1. Open this window by clicking the Create… or Edit… button on the Curve Family Plot page. This will create a set of curves, each one taken from any data table that has these two variables (identified by variable name).

Figure 5-5 Plot Properties editor with Curve Family Plot page showing all four mos_breakdown... data

Figure 5-6 Curve Family Plot Chooser with X Variable as V(Drain) and Y Variable as I(Drain)

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Parameter Plot The Parameter Plot page of the Plot Properties editor is used to display a parameterized plot (see Figure 5-8- and 5-10). The independent and dependent variables are selected from a data table. One or more additional variables are selected to parameterize the plot. A curve is generated for each selected value from the parameter variable.

All data values from the selected independent and dependent variables are plotted as a curve that corresponds to the same row in the data table where the parameter variable has the selected value for parameterization.


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Use the Parameter Plot Chooser to specify the data table, independent and dependent variables, and the parameterization variables (see Figure 5-9). It is opened by clicking the Create… or Edit… button on the Parameter Plot page.

Figure 5-8 Plot Properties editor showing Parameter Plot page with parameter.data loaded and set up to place vth on X Axis, tox on Y Axis, and dose selected as the parameter plot

Figure 5-9 Parameter Plot Chooser with data from parameter.data set as described in Figure 5-8

TV 2005.10 5-9


Note:The label of curves which are show in the legend can be modified by user. Click the Label button in the General page to open the Legend Label editor.

Histogram Plot The Histogram Plot page is used to display a frequency plot as a histogram (see Figure 5-11-, 5-12, and 5-13). Only the Data Table needs to be selected in the Histogram Plot Chooser. Controls are slightly different for histogram plots. A Bins control allows specifying the number of divisions to be used.


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Figure 5-11 Plot Properties editor with Histogram Plot page

Figure 5-12 Histogram Plot Chooser

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Pin Plot The Pin Plot is used to display discrete data points such as the results of Harmonic Balance simulation. To generate a Pin Plot:

1. Follow the instructions to generate a Curve Plot.

2. Turn off the visibility of lines to connect data points and (horizontal line mark in the cell below Lines).

3. Turn on the visibility of lines to connect a data point and X axis (vertical line mark in the cell below Lines).

Note:The method to convert a frequency domain data to a time domain data is provided by tv command. See Chapter 8, toTimeDomain, p. 8-23.

Figure 5-13 Histogram plot showing bins corresponding to Plot Properties editor Histogram Plot page in Figure 5-11

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Figure 5-14 Plot Properties editor showing the setting to generate a Pin Plot.

Figure 5-15 Pin plot showing Ic (collector current) spectrum corresponding to Plot Properties editor Curve Plot page in Figure 5-14

TV 2005.10 5-13


Smith Chart You can generate a Smith Chart to visualize S-parameter.

If your S-parameter is saved in the real number column and the imaginary number column, then:

1. Select Smith from the Plot Coordinates and Cartesian from the Data Coordinates in the General page.

2. Go to the Curve Family Plot page and open the Curve Family Plot Chooser.

3. Select the real number column to be X Variable.

4. Select the imaginary number column to be Y Variable.

Figure 5-16 Curve Family Plot Chooser with X Variable as the real number of s11 (SR(gate,gate)) and Y Variable as the imaginary number of s11 (SI(gate,gate)).

If your S-parameter is saved in the r column and the x column of the expression of a normalized impedance Z = r+ jx,

1. Select Smith from the Plot Coordinates and Smith from the Data Coordinate in the General page.

2. Go to the Curve Family Plot page and open the Curve Family Plot Chooser.

3. Select the r column to be X Variable.

4. Select the x column to be Y Variable.

Note:You will need to modify the axis label on the Axis page since the default label is based on the column name.

5-14 TV 2005.10

Taurus Visual User Guide Reload Simulation Data

Reload Simulation DataWhen simulation data of a 1D plot is updated on your disk, you can update the plot using File->Reload.

• Preserve the setting of the plot and data coordinates and the plot type.

• Preserve the current maximum and minimum values of the axes if you set the values, or if you used zoom or pan before Reload. Otherwise, update the max-imum and minimum values to the new data range.

• Update the plot creating the curves.

• Each curve should reserve the states of:

• Show or not shown

• Line and symbol’s color and type

• Location of the x and y axes

• Curve label (name in the legend)

• Preserve the table name.

• If a column no longer exists in the reloaded table, the column will be deleted from the table, and any corresponded curves in the 1D curve plot also will be deleted.

TV 2005.10 5-15


Working with Data Tables and the SpreadSheetA data table contains application data that consists of i rows of data values and j columns of variables that have data for i = 0 to the total number of rows. Each variable has a name and can have an identifier for its units. Each data table has a name and is referred to by this name.

The Data➔ Tables… menu opens the Data Tables window that lists all data tables that have been loaded into tv1d (see Figure 5-17). Any data table can be selected in the list and removed with the Delete button. The selected data table’s Name can be edited by typing in the text box and pressing the Return key.

The Data➔ Spreadsheet… menu opens a SpreadSheet window showing data from a data table (see Figure 5-18). Use the SpreadSheet to visualize any data table by choosing the desired data table name from the popdown menu list. The SpreadSheet window provides direct visualization of the data values and meth-ods to edit these values.

You can disable, enable, or delete rows (not used in a plot). You can cut or paste columns, and add new columns with a new variable name. You can edit directly any cell (i,j) value or compute it as a function involving 0 or more other cell val-ues. For instance, you can create a new column with values that are a function of the values of one or more existing columns.

Note:Version 2004.06 or later, arithmetic operation is available in TV com-mand system. See Chapter 8, General Commands, p. 8-3.

Figure 5-17 Data Tables window with several data tables loaded, the four mos files and parameter.data file

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Taurus Visual User Guide Working with Data Tables and the SpreadSheet

.

Correlating SpreadSheet Data with Plots

One or more data cells can be selected in the SpreadSheet for a column of data. If the current spreadsheet data table is visualized in a plot with the column vari-able as a dependent or independent variable in one of the curves, and if the data Symbols are on, then the data symbol also shows in highlight style (filled with its color). This selection works both ways. You can select the symbol in the plot, and the corresponding SpreadSheet cell will also select.

Importing and Exporting Data

The File‘Import… and File‘Export… menus open a browser for selecting a data file for Import or naming a data file for Export. Import opens the desig-nated file and loads its data into a new data table, which will be shown in the spreadsheet.

1. To Export, select the data table columns that are to be used to export data by clicking the variable names at the top of the column. Data from each column will be written into the export data file in the tv1d .data format.

Restricting Rows

1. By executing the Row‘Disable or Row‘Enable menus, you can temporarily remove selected rows from plots. When a row is disabled, it shows “nil” and appears in disabled text (lighter). Disabled rows of data are not included in any plot.

Figure 5-18 SpreadSheet window with one of the mos data tables showing

TV 2005.10 5-17


2. Use Row‘Enable again to make the row available for plots. If a row of data is no longer desired, you can delete it with the Row‘Delete menu. This row of data is completely removed from the data table.

Adding and Removing Columns

Execute the Column‘New… menu to add a new column to the SpreadSheet. A window opens to allow you to type a column name. Create data values for this column using the Spreadsheet‘Functions… menu.

1. If columns of data are no longer desired in a data table, removed them with the Column‘Cut menu.

2. Add the last cut column as the last column in the data table by using the Column‘Paste menu. These menus help to eliminate unwanted variables and reorganize remaining variables by cutting and pasting them into the desired order.

Functions

Use the Spreadsheet‘Functions… menu to open the SpreadSheet Functions window. This window contains controls to specify functions for set-ting spreadsheet cell (row i, column j) values (see Figure 5-19).

1. Select the rows and columns that are to be modified by the function.

2. Enter the i,j Range at the top of the window or select the range in the spread-sheet and click the Selected Cells button.

3. Compose the desired function in the Cell panel text field.

4. Type the function in the Cell panel text field or select the expressions in the popdown menu and append to the function with the Append Expression button.

5. If desired, enter variable names instead of j column numbers in the function.

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Taurus Visual User Guide Working with Data Tables and the SpreadSheet

6. Once the Range is specified and the function is complete, click the OK or Apply button to apply the function to every SpreadSheet cell in the speci-fied range.

Functions can include values from other i,j cells. For instance, suppose a new col-umn has been added to the spreadsheet titled Log X. This is to be derived from the existing column X by taking its log. The function would be log(At(i,X)), and the range would be the Log X column number, rows 0 through the number of rows.

Or if you want to change column 4 to be itself + column 2, divide by 3.

The range is column 4, rows 0 through the number of rows, and the function is

OldAt(i,4) + (At(i,2) / 3)

Figure 5-19 SpreadSheet Functions window

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Data FormatsIn tv1d there are two recognized data formats; the tv1D data format and the TIF (Technology Interchange Format) for I-V curves.

TV1D Data Format

The tv1d data format is used to provide a general ASCII text file data capability with a simple row/column format for importing and exporting application data to and from tv1d. The format consists of five header lines followed by data in a row/column format. This data directly maps into the tv1d data table. The file name requires a .data extension.

• The .data format consists of multiple columns of numbers. Refer to the file circle.data included in the examples/curve directory (Figure 5-20).

• The first line contains two integers separated by any number of spaces. The first integer gives the number of columns of data, and the second integer gives the number of rows of data. In circle.data, there are four columns of numbers and 101 rows.

• The second line of the data file contains any character string (including spaces) to label the data set. In circle.data, the data set label is Circular_Data. Once loaded, this becomes the database name.

• The third line of the data file contains Column Attributes, which are character strings with the following meanings:

ar - Active Response Data (Dependent Variables)

af - Active Factor Data (Independent Variables)

ir - Inactive Response Data

if - Inactive Factor Data

All active data is plotted; for each independent (af) specification, the system creates a plot with all dependent variables (ar) plotted. In addition, the other

4 101Circular_Dataif ir af arTheta R X YRadians Microns Microns Microns0 1 1 00.0628319 1 0.998027 0.06279050.125664 1 0.992115 0.1253330.188496 1 0.982287 0.1873810.251327 1 0.968583 0.248690.314159 1 0.951057 0.3090170.376991 1 0.929776 0.3681250.439823 1 0.904827 0.4257790.502655 1 0.876307 0.4817540.565487 1 0.844328 0.5358270.628319 0.809017 0.587785

. . .

Figure 5-20 Partial listing of circle.data input file

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Taurus Visual User Guide Data Formats

independent variables (af) are used as parametric constants in the current plot. Refer to Parameter Plot, p. 5-8 for parametric plot generation.

• The fourth line of the data file contains character strings to label the columns of data (variables). For example, in circle.data, the four variables Theta, R, X, and Y are separated by at least one space. Thus, the first column of data in circle.data is Theta, the second column is R, and so on.

• The fifth line in the data file contains another set of character strings for the units of each variable, separated by at least one space. In circle.data, the units for Theta, R, X, and Y are, respectively, Radians, Microns, Microns, and Microns.

• After the units line are the actual data points. In circle.data there are 101 rows of data representing 101 data points. In addition to numbers, the data file can also contain NIL entry points specified as NIL or nil. This point will neither be used for plotting nor considered when performing a probe or tangent func-tion. As a result, a disjointed graph or a break in the curve is plotted.

When you create your own data file for tv1d, be sure to give it the file extension .data. This tells the program that you are loading a data file (as opposed to a .ivl file).

TCAD TIF Format for I-V curves

Technology Interchange Format (TIF) is the format used by Synopsys TCAD device simulators, such as Medici and Davinci, for I-V data that can be used for visualization or other purposes. The file name should have an .ivl extension. The specific TIF I-V data records are used for storing the terminal voltages and cur-rents, as well as calculated or derived quantities, device dimensions, and so forth.

Since some of these lines (di, du, dd) can become very long, the length is restricted to 110 characters. Longer lines are continued over several statements. A line is continued by placing the continuation character “=” at its end.

dset <char name>

char name Name of the following data set

di <char name1> <char name2>… <char nameN>

char name1-nameN Names of the data items in the data set

du <char units1> <char units2> … <char unitsN>

char units1-unitsN Units of the data items in the data set

dd <float value1> <float value2> … <float valueN>

float value1-valueN Values of the data items

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A sample of a partial TIF.ivl file sample is shown in Figure 5-21.

h TIF V1.2.0 MEDICI_LOG 2.3.1 21-Apr-97 02:54:44 bench3.inp cd GEN blnk blnk blnk cart2D 1.00000E+00 0.00000E+00dset MEDICI_DATA di time V(Base) VA(Base) I(Base) + di Q(Base) FE(Base) HE(Base) V(Emitter) + di VA(Emitter) I(Emitter) Q(Emitter) FE(Emitter) + di HE(Emitter) V(Collector) VA(Collector) I(Collector) + di Q(Collector) FE(Collector) HE(Collector) II # du seconds Volts Volts Amps/um + du Coul/um Amps/um Amps/um Volts + du Volts Amps/um Coul/um Amps/um + du Amps/um Volts Volts Amps/um + du Coul/um Amps/um Amps/um Amps/um # dd 0.0000000E+00 0.0000000E+00 0.0000000E+00 0.0000000E+00 + dd -5.8342770E-19 0.0000000E+00 0.0000000E+00 0.0000000E+00 + dd 0.0000000E+00 0.0000000E+00 3.6385647E-17 0.0000000E+00 +

Figure 5-21 Partial listing of typical TIF .ivl file

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CHAPTER 6

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Application Notes for 3D Simulators6

Taurus Visual can be used to visualize results produced by Synopsys TCAD’s 3D simulators: Taurus Process, Taurus Device, Taurus Lithography (lithography), Taurus Topography, Davinci (device), Taurus Topography (deposition and etch), Raphael (interconnect). These programs can generate a Technology Data Format (TDF) file that can be loaded into Taurus Visual by using the Taurus Visual main window File‘Open (Add)… menu.

The following notes provide application information for using tv to visualize results generated by Raphael, Taurus Lithography, Taurus Topography, Taurus Process, and Taurus Device.

Note:Visualization performance depends on the size of physical memory where Taurus Visual executes versus the total number of mesh nodes in the simu-lation data for a given plot. Taurus Topography and Taurus Lithography simulation can often generate 500,000 to 1,000,000 nodes or more. For these plots 64 MB of physical memory is inadequate. 128 MB to 256 MB is required for reasonable performance. While visualization can still be performed on low memory machines, you must wait until each action com-pletes (indicated by the green box turning to gray at the lower right corner of the plot page) before performing the next action. This low perfor-mance is caused by excessive memory swapping.

RaphaelTaurus Visual enables you to visualize 3D and 2D simulation results generated by Raphael, Version 4.0 or later. Use the tv executable for 3D simulation results, and use tv2d for 2D simulation results. You can visualize interconnect geometries as solid, filled geometries and/or as external edge boundaries. In tv, the filled struc-tures also can be made partially transparent. The mesh can be visualized and con-

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Application Notes for 3D Simulators Taurus Visual User Guide

toured, and isosurface views of solution fields can be displayed. You can visualize geometries and fields simultaneously.

Loading and Initial Display of Raphael Data

1. After generating a .tdf file with Raphael, start Taurus Visual and use the File➔ Open (Add)… menu item to display the File Chooser. Navigate to the directory with the .tdf file and select this file. Select the OK button to load the file and create an initial 3D plot or 2D plot of the Raphael simulation data.

2. For a 3D plot, use the rotate tool to create a 3D perspective. Select the rotate tool, press the select mouse button with the cursor in the center of the struc-ture boundary, and drag to the right and down slightly.

3. Use the display bar in the Taurus Visual main window to visualize the inter-connect geometries or solution field values. You can select any combination of these buttons.

Figure 6-1 Raphael sram simulation results displayed using Taurus Visual region button and rotate tool

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Taurus Visual User Guide Raphael

4. To change the scale to see more or less detail, use the Taurus Visual main window zoom tool.

Creating a 2DCross-section

through the 3DVolume in a 3D

Plot

You can create a 2D cross-section in the 3D volume by turning on the (cut)plane button in the display bar. This plane can be perpendicular to the X, Y, or Z Axis, and can be moved along the selected axis using the cutplane controls by selecting the Plot➔ Cut Controls… menu item. A separate 2D plot can be created using the cutplane controls. In the 2D plot, you can use a probe tool and cutline tool.

1. In the display bar, select the bounds and plane buttons and deselect all other buttons.

2. Open the cutplane controls by executing Plot➔ Cut Controls…➔ Cut-plane page and select the desired field in the popdown list.

3. Use the Perpendicular Axis: popup menu to change to the X, Y, or Z Axis option menu and use the slider to move the cutplane through the volume.

4. Select the Create 2D Plot button to create a new plot that shows the cutplane as a separate 2D plot.

a. Click the select mouse button in this plot to make it the active plot (red frame), and use the probe tool or other controls to view selected field values in the cutplane.

Display Button Description

mesh Displays the Raphael mesh used to compute field values.

region Displays the interconnect geometries in a solid, filled style. In tv, you can make these transparent by executing Plot➔ Properties… and using the controls on the Regions page.

fields Displays the selected solution field in the Fields list in the style set in the Plot Prop-erties editor Fields page. You can display each field as any combination of contour Lines or Fill, or as an Isosurface by selecting the appropriate checkbox. The con-tour display can show a restricted range by using the Field Range controls. For both a fill with restricted range and/or isosurface, you can display another field mapped onto the current field. Use the Map to Field popdown list to select another field, and select the adjacent Show column box.

bounds Displays the geometries as external edge boundaries.

axes Displays the axis and grid in accordance with the Plot➔ Properties...➔ Axis page.

volume Displays the default cutvolume in a 3D structure plot. Use the Plot➔ Cut Con-trols…➔ Cutvolume page to control the cutvolume. Viewing is enhanced by using the rotate tool and toggling on the fields and bounds buttons.

plane Creates and displays the default cutplane in a 3D structure plot. Use the Plot➔ Cut Controls...➔ Cutplane page to control the cutplane. Viewing is enhanced by using the rotate tool and by turning off the region and fields buttons and turning on the bounds button.

TV 2005.10 6-3


b. Reselect the 3D plot to make it the active plot, and use the cutplane con-trols to position the plane in the volume. The 2D plot will update to show the new position.

Creating a Partial3D Volume in a 3D

Plot

To create a partial 3D volume, turn on the (cut)volume button in the display bar. The definition plane for this volume can be perpendicular to the X, Y, or Z Axis, and can be moved along the selected axis using the cutvolume controls by execut-ing Plot➔ Cut Controls…➔ Cutvolume page. Select the Cut Above Plane checkbox to display the volume on either side of the definition plane.

1. In the display bar, select the bounds and volume buttons and unselect all other buttons.

a. Select the desired field in the Fields list.

b. Select the fields button in the display bar.

2. Open the cutvolume controls by executing Plot➔ Cut Controls…➔Cutvolume page.

3. Use the Perpendicular Axis: popup menu to change to the X, Y, or Z Axis option menu and use the slider to move the definition plane through the vol-ume.

a. Select the Cut Above Plane checkbox to change the volume to either side of the definition plane.

OtherCombinations

It is often useful to combine several of the approaches described. For instance, you can display:

• Both the cutvolume and cutplane together, with the cutplane oriented around a different axis.

• Isosurface in conjunction with either a cutplane or cutvolume.

• A contour fill with a restricted range along with an isosurface and/or contour lines.

For many of these displays, you can show the interconnect geometries as either boundaries with the bounds button in the display bar or as solid fills with the region button in the display bar and execute Plot➔ Properties…➔ Regions page to make selected geometries semitransparent.

Taurus LithographyTaurus Visual can be used to visualize simulation results generated by the 3D Pla-nar AAM of Taurus Lithography. Use the tv executable. The following provides recommended actions to load and visualize Taurus Lithography simulation results after an exposure, a post-exposure bake, or a resist development step.

A primary goal for this visualization is to display the evolving resist surface at dif-ferent development times computed by Taurus Lithography 3D. This can be done using the Taurus Visual contour controls or isosurface controls.

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Taurus Visual User Guide Taurus Lithography

T

Note:Three-dimensional contour visualization in fill mode can be slow, espe-cially for dense meshes. Displaying only the isosurface is faster.

To examine simulation results for the latent image after an exposure or post-expo-sure bake step, Taurus Visual can display the bulk intensity and absorbed energy distributions during exposure throughout all layers of the thin film stack. In photo-active layers of conventional novolac resist, Taurus Visual can display the PAC concentration distribution after exposure and after post-exposure bake steps, as well as the inferred development rate distribution for photoactive layers. In photo-active layers of chemically amplified DUV resist, Taurus Visual can display the PAG concentration distribution after exposure, and the acid and protected site con-centration distributions after post-exposure bake.

Taurus Lithography 3D saves its simulation results in TDF files (identified by suffix .tdf) using one or more three-dimensional scalar fields on a single, rectilin-ear mesh. Moreover, the field information saved can be optionally limited to a sin-gle field.

Loading/Initializing Taurus Lithography 3D Planar AAM Data

1. After generating a TDF file with Taurus Lithography 3D AAM, start Taurus Visual and use the File➔ Open (Add)… menu to display the File Chooser.

2. Navigate to the directory with the TDF file and select this file.

3. Select the OK button to load the file and create an initial 3D plot of the Taurus Lithography structure data.

The default viewing orientation of a Taurus Lithography 3D Planar structure is a top-down view of the X,Y plane, with the structure’s Z Axis pointing out of the screen. This corresponds to looking down at the wafer and its rectangular simula-tion region, and sighting along the optical axis of the projection stepper.

To create a 3D perspective:

1. Execute View➔ Interact Mode➔ Wireframe.

2. Select the rotate tool in the Taurus Visual main window to enable rotation of the structure.

a. To rotate, press the select mouse button with the cursor just left of the center of the bottom edge of the structure's boundary.

b. Drag to the middle of the structure and slightly left.

3. After creating a 3D perspective, deselect the fields button and select the bounds button.

Different layers will be outlined along the lateral circumference of the bound-ing box of the simulation structure (in the case of a thin film stack with more than one layer).

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Note:The semi-infinite layers that are defined above and below the simulation structure by Taurus Lithography are not saved in the TDF file, and are not visualized.

Displaying the Evolving Resist Surface

The Taurus Lithography 3D Planar AAM does not directly produce a physical relief image in the resist layer. Instead, it computes a develop time distribution throughout the volume of the layer. The isosurface of this distribution at the nomi-nal develop time is the physical relief image. (The region button cannot be used to exhibit separate layers at present; it should be unselected.)

To visualize the resist development:

1. Select the Plot➔ Properties… menu item.

a. On the Fields page, select the dev_time field, unselect the Fill check-box.

b. Select the Isosurface checkbox.

2. With dev_time selected in the Fields list, select the fields button in the Taurus Visual main window display bar to show the isosurface.

a. Use the slider control on the Plot Properties editor Fields page to move the isosurface through time. The develop time units are minutes.

b. (You may want to rotate the structure to a different perspective, and you may want to hide the legend by deselecting the Show Legend checkbox or alter its style to make it transparent using the Style… button.)

3. Use the Taurus Visual main window zoom tool to change scale to see more or less detail.

Note:The total time for which resist development front is advanced is always larger than nominal development time. The develop time distribution is set to this total time in any undeveloped regions of the resist layer.

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T

Displaying OtherLatent Image

Fields

The other latent image fields also should be visualized using isosurfaces.

1. To see the bulk intensity during exposure, select intensity from the Fields list.

2. Select energy to see the absorbed energy during exposure. Select the pac field to visualize the PAC concentration distribution after exposure.

3. To see the PAC distribution after PEB, select the pac_peb field. For chemi-cally amplified DUV resists, the pac, duv-acid and duv-prosite fields corre-spond to the post-exposure PAG and post-exposure-bake acid and protected site concentration distribution, respectively.

The dev_rate field corresponds to the develop rate distribution (in micron/minute).

Figure 6-2 Taurus Lithography-generated .tdf file showing developed surface at six seconds and one minute

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Other Ways toVisualize the

Structure Layers

The layer_index field is added by Taurus Visual to help visualize individual lay-ers in the simulation structure. It is defined as the Taurus Lithography numerical layer index of the layer that contains the given structure node. Layers are num-bered sequentially from the bottom upwards, with layer index number 2 assigned to the bottom layer.

1. To visual the interfaces separating different layers in simulation structures with multiple layers, select the layer_index on the Fields list and plotting isosurfaces at half-integer values beginning with 2.5.

2. Use the bounds button to outline different layers within the bounding box of the simulation structure.

3. To simultaneously visualize all layers, use the contour controls in Fill mode.

a. Select the Fill checkbox and unselect the Line checkbox and Isosurface toggle in the Plot Properties editor Fields page for the layer_index field.

Using the FieldContour Controls

to See theRemaining Resist

as a Volume

For the resist development step, the remaining resist can be displayed as a volume by using the contour controls in Fill mode:

1. Deselect the Line checkbox and Isosurface toggle, and, if necessary also deselect the Fill checkbox.

2. Set the Field Range controls for the dev_time field to the desired values (see below).

3. Select the Fill checkbox and select the fields button in the display bar.

Use the Field Range controls to visualize the remaining surface:

1. Set the Max slider to a fixed point and only adjust the Min slider.

2. Move the Min slider to a value halfway between the initial Min and Max val-ues.

(This is typically the nominal development time.)

3. Use the slider or text box to change the Min value to see how the resist evolves at different time steps.

4. To see the volume of resist material dissolved between two development times, set the Min and Max values to these times.

Using the Map toField to See the

Dissolution Rate

The speed of the advancing resist surface can be superimposed on the resist sur-face as a colored contour map:

1. To display the resist surface, use the isosurface controls rather than the fill controls.

2. From the Map to Field popdown list, select the dev_rate field, and turn the column box on.

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through the 3DVolume

You can create a 2D cross section of any 3D field distribution by using the (cut) plane button in the display bar. This plane can be perpendicular to the X, Y, or Z Axis and can be moved along the selected axis. A separate 2D plot also can be created. In the 2D plot, you can use the probe tool and cutline too;:

1. In the display bar, select the bounds button and deselect all other buttons.

a. Select the plane button.

b. Select the desired field in the popdown list.

2. Adjust the cutplane by executing Plot➔ Cut Controls…➔ Cutplane page.

a. Change the Perpendicular Axis: popup menu to the X, Y, or Z Axis.

b. Use the slider to move the cutplane through the volume.


a. Click the mouse in this plot to make it the active plot (red frame).

b. Use the probe tool or other controls to view the field values in the cut-plane.

c. Reselect the 3D plot to make it the active plot and use the cutplane con-trols to position the plane in the volume. The 2D plot will update to show the new position.

When the field being displayed is defined only in a photoactive layer, and the definition plane coincides with the interface, this layer, and a layer where the field is not defined round-off error may cause the cross-section to disappear.

4. To correct this, move the cutplane slightly into the photoactive layer by offset-ting the Z Axis value a small amount relative to the z-coordinate of the inter-face.

Creating a Partial3D View

For easier viewing, cut away part of an isosurface or 3D contour by using the (cut)volume button in the display bar. The definition plane for this volume can be perpendicular to the X, Y, or Z Axis and can be moved along the selected axis:

1. Select the desired field in the Fields list.

a. In the display bar, select the bounds, fields, and volume buttons.

b. Deselect all other buttons.

2. Adjust the cutvolume by executing Plot➔ Cut Controls… ➔ Cutvolume page.

a. Change the Perpendicular Axis: popup menu to the X, Y, or Z Axis.

b. Use the slider to move the definition plane through the volume.

c. Use the Cut Above Plane checkbox to change the volume to either side of the definition plane.

OtherCombinations

It is often useful to combine several of the approaches described. For instance, both the cutvolume and cutplane can be displayed together with the cutplane ori-ented around a different axis. Also, it is often useful to display an isosurface in

V 2005.10 6-9


conjunction with either a cutplane or cutvolume. You can display a contour fill with a restricted range along with an isosurface and/or contour lines. Contour lines are especially useful for outlining the intersection of an isosurface or 3D contour with a cutvolume, or with the bounding box of the simulation structure.

Taurus TopographyTaurus Visual can be used to visualize simulation results generated by the Taurus Topography 3D AAM. Use the tv executable. The following provides recom-mended actions to load simulation data, initialize for visualization, and visualize the structure after a deposition or etch step.

A primary goal for this visualization is to display the structure with its evolving surface during different times computed by Taurus Topography 3D simulation. This can be done using the Taurus Visual contour controls or isosurface controls.

Note:Contour visualization can be slow due to the dense mesh used by Taurus Topography. Displaying only the isosurface is faster.

Loading, Initializing Taurus Topography 3D Data, and Displaying an Isosurface

1. After generating a .tdf file with the Taurus Topography 3D AAM, start Taurus Visual:

a. In the Taurus Visual main window menu, execute File➔ Open (Add)… to display the File Chooser.

b. Navigate to the directory with the .tdf file and select this file.

c. Select the OK button to load the file and create an initial 3D plot of the Taurus Topography structure data.

2. Perform the following actions to initialize for visualization with an isosurface:

a. In the View➔ Interact Mode menu, select Wireframe.

b. Use the Taurus Visual main window rotate tool to turn the structure to create a 3D perspective. To do this, select the rotate tool, press the select mouse button with the cursor in the center of the structure bound-ary, and drag to the right and down slightly.

c. In the Taurus Visual main window display bar, unselect the fields but-ton, and select the bounds button.

d. Deselect all other buttons.

e. Select the Plot➔ Properties… menu item.

f. On the Fields page, select the Time field, unselect the Fill checkbox, and select the Isosurface checkbox.

g. Select the fields button in the display bar to show the isosurface.

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Taurus Visual User Guide Taurus Topography

h. Use the slider control on the Plot Properties editor Fields page to move the isosurface through time.

Note:You may want to rotate the structure to a different perspective, and you may want to hide the legend by unselecting the Show Legend checkbox or alter its style to make it transparent using the Style... button.

i. Use the Taurus Visual main window zoom tool to change scale to see more or less detail.

Using FieldContour Controls

to See EvolvingSurface as a

Volume

For either deposition or etch steps, use the contour controls by selecting the Fill checkbox and unselecting the Line checkbox and Isosurface toggle in the Plot Properties editor Fields page for both the Time and Material fields. Then select the fields button in the display bar.

Use the Field Range controls to visualize the evolving surface as follows:

1. To visualize a structure after a deposition step:

a. With Time selected, use the Field Range controls to fix the Min value and adjust only the Max value.

b. Move the Max slider to a value only slightly higher than the Min value.

c. Change Map to Field popdown list from Time to Material.

d. Select the Show column box for the Map to Field.

e. Use the slider or text box to change the Max value to see how the struc-ture evolves at different time steps.

2. To visualize a structure after an etch step:

a. With Time selected, use the Field Range controls to fix the Max value and adjust only the Min value.

b. Move the Min slider to a value only slightly lower than the Max value.

c. Change Map to Field popdown list from Time to Material.

d. Select the column box for the Map to Field.

e. Use the slider or text box to change the Min value to see how the structure evolves at different time steps.


through the 3DVolume

To create a 2D cross-section in the 3D volume, use the (cut)plane button in the display bar. This plane can be perpendicular to the X, Y, or Z Axis and can be moved along the selected axis using the cutplane controls by executing Plot➔ Cut Controls… in the Taurus Visual main window menu. You can create a sepa-rate 2D plot using the cutplane controls. In the 2D plot, you can use a probe tool and cutline tool:

1. In the display bar, select the bounds and plane buttons.

a. Deselect all other buttons.

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2. Open the cutplane controls window by executing Plot➔ Cut Controls…➔ Cutplane page.

a. Select either Time or Material in the popdown list.

3. Use the Perpendicular Axis: popup menu to change to the X, Y, or Z Axis option menu>

a. Use the slider to move the cutplane through the volume.


a. Click the mouse cursor in this plot to make it the active plot (red frame).

b. Use the probe tool or other controls to view the Time and Material val-ues in the cutplane.

Creating a Partial3D Volume

You can create a partial 3D volume by using the (cut)volume button in the dis-play bar. The definition plane for this volume can be perpendicular to the X, Y, or Z Axis and can be moved along the selected axis using the cutvolume controls by selecting the Plot➔ Cut Controls… menu item. Use the Cut Above Plane checkbox to display the volume on either side of the definition plane.

1. Select either Time or Material in the Fields list.

a. In the display bar, select the bounds, fields, and volume buttons.

b. Deselect all other buttons.

2. Open the cutvolume controls by executing Plot➔ Cut Controls…➔Cutvolume page.

3. Use the Perpendicular Axis: popup menu to change to the X, Y, or Z Axis, option menu.

a. Use the slider to move the definition plane through the volume.

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Taurus Visual User Guide Taurus Topography

b. Use the Cut Above Plane checkbox to change the volume to either side of the definition plane.

Figure 6-3 Taurus Topography example of a profile with cutplane plot at 0.9 minutes

Figure 6-4 Taurus Topography example of a profile with cutplane plot at 1.2 minutes

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OtherCombinations

It is often useful to combine several of the approaches described. For instance, you can display:

• Both the cutvolume and cutplane together with the cutplane oriented around a different axis.

• Isosurface in conjunction with either a cutplane or cutvolume.

• A contour with a restricted range along with an isosurface and/or contour lines.

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CHAPTER 7

T

Taurus Visual Tutorial7

This chapter provides four tutorials:

• Fundamentals and Basic Usage, p. 7-1

• Follower Plots Tutorial, p. 7-24

• 1D Plots, p. 7-28

• 3D Plot Tutorial, p. 7-43

Fundamentals and Basic UsageThis section teaches the three basic concepts of the Taurus Visual main window Figure 7-1: plot page, active plots, and plot objects.

Figure 7-1 Empty Taurus Visual main window

Menu Bar

Plot Page

Plot StatusLine

Message LineDisplay Bar

Fields List

Tools Bar

Fields Sash

Selection Frame(Red when Active)

Page Layoutmode button& arrows

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Taurus Visual Tutorial Taurus Visual User Guide

Task 1: Loading a 2D File and Plot Description

2. Navigate to the examples directory to locate the file metal1.tif. Use the controls on the left side of the chooser to move up and down the directory tree. You can also use the History menu or the directory path option menu to find the file.

3. Select metal1.tif and click the OK button. a. The File Chooser closes. In a moment, metal1.tif is loaded into the plot

page (see Figure 7-3).

b. The Plot Status Line contains the file name metal1.tif, which is used as the plot identifier.

Goals Learn how to load files into the plot page using tv2d, and use the Plot menu to find out basic information about the plot you loaded.

Context To load 2D plots, use the tv2d executable (for 3D plots, use the tv executable).

1. In the main window menu bar, execute File➔ Open (Add)….

The File Chooser opens (see Figure 7-2).

Figure 7-2 File Chooser

Move Up

Move Down

Directory path option menuClick toopen menu

File metal1.tif

History Menu

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Taurus Visual User Guide Fundamentals and Basic Usage

Figure 7-3 Taurus Visual main window with metal1.tif file loaded

4. Execute Plot➔ Description…

a. The Plot Description window opens to display data about the active plot (Figure 7-4).

b. For more details about the Plot Description window, click the Help but-ton.

Figure 7-4 Plot Description window

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5. Click the Close button to dismiss the Plot Description window.

Task 2: Using the Display Bar

1. On the display bar, notice that the region and axes buttons are on.

2. Click some of the other buttons on and off and note the results.

3. Click all buttons off except for the mesh button.a. The mesh is displayed in the region colors (see Figure 7-5).

4. Click the region button on.a. Now the mesh is displayed in a single color, black, with the region colors

in the background.

Goals Learn how to use the display bar buttons.

Context The Taurus Visual main window is onscreen and metal1.tif is loaded into the plot page.

Figure 7-5 Plot results after clicking the mesh button on

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Task 3: Using the pan and zoom Tools

1. pan:

a. On the Tools bar, click the pan tool on; on the display bar, click the region button on, and all other buttons off (see Figure 7-6).

At the bottom of the window, the Message Line displays instructions on using the pan tool. This line displays instructions for use of any selected tool.

b. Click in the plot structure and drag the cursor to the left.

A line is drawn in the direction of the pan. When you let go of the mouse button, the plot structure will move to that new location on the plot page.

c. In the menu bar, execute View➔ Reset Transform to restore the plot structure to its original location on the plot page.

2. zoom: a. In the Tools bar, click the zoom tool.

Goals Learn how to use the pan and zoom tools.

Context The Taurus Visual main window is on the screen and metal1.tif is loaded into the plot page.

Figure 7-6 Panning plot with region button on

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b. To create a zoom box, drag a rectangle on the plot structure around the gate (see Figure 7-7).

The area the rectangle contains, replaces the full view of the plot structure on the plot page (see Figure 7-8).

Figure 7-7 Bounding box drawn around gate

Figure 7-8 Zoomed view of bounded gate area fills plot page

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c. To zoom out of the plot, press the SPACEBAR (to go into unzoom mode) and click in the center of the plot structure. The plot zooms out by 50%. The plot cursor displays a minus in a magnifying glass to show that you are in unzoom mode.

d. To zoom in, press the SPACEBAR again and either click in the plot to zoom in by 200% or drag another zoom box. The plot cursor displays a plus in the magnifying glass for zoom mode.

e. Execute View➔ Reset Transform to restore the original plot structure.

Task 4: Displaying Regions

1. Selecting Regions:

a. Click the select tool in the Tools bar. On the display bar, click the bounds button on and all other buttons off to display the region bound-aries.

b. Click in the plot structure.

The Plot Status Line now displays the name of the region that you have selected and a green dashed line outlines that region.

c. Click the bounds button off and click the region button on.

d. Using the select tool, click the aluminum1::Elec region, which outlines the aluminum1 region (see Figure 7-9).

Goals Learn how to:

• Select regions in a plot page using the select tool.

• Display regions using the Plot Properties editor Regions page.


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e. The electrode region aluminum1::Elec is displayed as the object on the Plot Status Line. The electrode region is highlighted in white with green dashes to display that it is selected.

2. Displaying specific regions:

Figure 7-9 The aluminum1::Elec region is selected as object

a. Execute Plot➔ Properties. The Plot Properties editor opens.

b. On the Plot Properties editor, click the Regions tab to display the Regions page.

c. On the Regions list, drag the mouse down the list from aluminum2::Elec to aluminum1::Elec, so the two regions are selected. In the Show panel, click the Regions checkbox off (see Figure 7-10a).

d. Now the Electrode regions are no longer displayed on the plot structure (see Figure 7-10b).

e. In the Plot Properties editor, click the Regions checkbox back on.

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Task 5: Displaying Fields

1. On the display bar, click the fields and bounds buttons on and all other buttons off. Select Phosphorus from the Fields list.

2. Turning off Fields checkbox for selected regions:a. On the Plot Properties editor Regions page, drag the mouse from

aluminum2::Elec to bpsg1 to select those regions from the Regions list.

b. Turn the Fields checkbox off. The plot updates by removing the fields for the selected regions (see Figure 7-11).

Figure 7-10 Plot Properties editor Regions page with selected regions and corresponding plot structure

Goals Learn how to:

• Change how the fields are displayed using the Plot Properties editor Fields and Regions pages.

• Change the size and location of the FieldLegend.


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c. Turn the Fields checkbox back on.

3. Displaying contour lines: a. On the Plot Properties editor, click the Fields tab to display the Fields

page.

Note:The Phosphorus field is selected on this page (see Figure 7-12).

Figure 7-11 Plot update with Fields checkbox off

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b. On the Plot Properties editor, Fields page, click the Line checkbox on and the Fill checkbox off.

c. The contours for Phosphorus are now displayed in the line style (see Figure 7-13).

Figure 7-12 Plot Properties editor Fields page displaying Phosphorus field

Figure 7-13 Phosphorus bounds displayed in line style

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d. Click the Fill checkbox on to display the contours in black.

4. Changing the Field Range:a. On the Plot Properties editor, in the Field Range panel, drag the Min

slider to the right until the number box displays 8.

b. Drag the Max slider to the left until the number box displays 17. The plot structure and FieldLegend updates to this field range.

c. To use the initial color scheme for restricted field range, turn the Full Col-ormap checkbox off.

5. Changing the location of the FieldLegend:a. With the select tool on, click the Phosphorus field legend

(see Figure 7-14).

The Plot Status Line now shows that you have selected the FieldLegend object, and the field legend frame becomes segmented to indicate it is the active object.

b. With the select tool button on, drag the cursor to the left within the plot page. The FieldLegend moves to the left.

Figure 7-14 Dashed frame of FieldLegend showing active status

PhosphorusFieldLegend

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You can drag the object in any direction.

Task 6: Using the probe Tool

1. On the display bar, click all buttons off except the fields and bounds buttons. Select Arsenic from the Fields list.

2. Click the probe button on the Tools bar to open an empty Probe Tool window.

3. Probing anywhere in the plot structure:a. Click in the plot structure

6. Changing the size of the FieldLegend:a. Execute View➔ Options to open an Options window (see Figure 7-15).

b. Click the Small toggle. The legend decreases in size.

c. Click the Normal toggle to return the FieldLegend to its initial size.

d. Click the Close button in the Options window to dismiss it.

Figure 7-15 Options windows for tv and tv2d

Goals Learn how to use the probe tool.


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The Probe Tool window updates to display the X and Y coordinates, Region Name, Material, all of the Fields values, Mesh Node Number, and Mesh Element Number for that location on the plot (see Figure 7-16).

4. Probing only the mesh nodes in the plot structure:a. In the Probe Tool window, click the Snap to Mesh Node checkbox on.

b. On the display bar, click the mesh button on.

c. Drag the cursor in the plot structure. The probe tool cursor now snaps to the closest mesh node, and the Probe Tool window updates to reflect this movement of the cursor.

5. Dismiss the Probe Tool window by clicking the Close button.

Task 7: Using the cutline Tool

1. On the display bar, click the region and axes buttons on and all other buttons off. Select Arsenic from the Fields list.

2. Creating a cutline:a. In the Tools bar, click the cutline button on.

b. Drag a horizontal line under the gate, in the silicon1 (green) region, to open a one-dimensional plot on the plot page to the right of metal1.tif (see Figure 7-17).

The one-dimensional plot displays the Arsenic content on the X axis and the region of the plot structure where the cutline was created.

Figure 7-16 Plot and Probe Tool window reflecting data at cursor point

Goals Learn how to use the cutline tool.


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c. Resize the window by dragging the window border horizontally until the two plots are square.

3. Displaying different fields on the one-dimensional plot:a. Click the one-dimensional plot to make it the active plot.

Note: There are different buttons on the Tools and display bar for the one-dimensional plot (see Figure 7-18).

The Plot Status Line displays the plot identification metal1.tif:line0, where metal1.tif is its parent plot.

Figure 7-17 Resized window displaying two square plots

Figure 7-18 1D plot bounded by red frame indicating active plot status

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b. Hold the CONTROL key down and click the As Active field on in the Fields list. Now both the Arsenic and As Active fields are displayed in the one-dimensional plot.

c. Click the 2D metal1.tif plot.

Task 8: Managing Page Layout

b. Move the active plot to the front of the row by clicking the button.

The plot returns to the front of the row.

c. Click the button to move the active plot to the next location toward the back of the row. Click the button to move the active plot to the next location toward the front of the row.

These buttons also appear on the Taurus Visual main window Plot Status Line (See Figure 7-20).

3. Changing the Page Layout to Stack mode:a. Click the Stack button. Resize the Taurus Visual main window to its ini-

tial size.

The plot page is displayed in Stack mode (see Figure 7-21).

b. Click the button.

The next plot on the stack is displayed.

Goals Learn how to use the View menu Page Layout… functions and the Plot➔ Delete command.

Context The Taurus Visual main window is onscreen and metal1.tif is loaded into the plot page. Task 7 has been implemented to achieve a 1D plot which is displayed to the right of the metal1.tif plot. The metal1.tif plot is the active plot.

1. Execute View➔ Page Layout….

A Page Layout window opens (see Figure 7-19).

Notice that the Row Major button is the default selection.

2. Moving the Active Plot on the plot page:a. On the Page Layout window, move the active plot to the end of the row

by clicking the button.

The metal1.tif plot has moved to the end of the row (see Figure 7-20).

Figure 7-19 Page Layout window with Row Major button clicked

Stack button

Row Major button

Column Major button

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c. Click the button to display the previous plot in the stack.

4. Click the Row Major button to display the plot pages in Row Major mode again.

5. To toggle between Stack and Row Major mode or Stack and Column Major mode, click the Page Layout mode button on the Taurus Visual main window (see Figure 7-21).

6. Click the Close button to dismiss the Page Layout window.

Figure 7-20 1D metal1.tif plot moved to end of row

Figure 7-21 Plot page displayed in Stack mode

PageLayoutarrows

PageLayoutmodebutton

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Task 9: Creating Labels and Lines

1. Creating labels:

a. Click the region and axes buttons on and all other buttons off.

b. On the Tools bar, click the label button.

c. On the plot structure, click the silicon1 region (colored green).

A Text Editor window is displayed. (See Figure 7-22).

d. In the text box, delete label and type silicon. Click OK to close the Text Editor and display the silicon label display on your plot struc-ture.

e. Click the select tool on. Click your created label, silicon.

A dashed box surrounds the label, and the Plot Status Line now displays Object: Label:0 (see Figure 7-23).

Goals Learn how to insert and manipulate labels and lines.

Context The Taurus Visual main window is onscreen, metal1.tif shows on the plot page.

Figure 7-22 Text Editor window

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Figure 7-23 Bounding box around silicon label

f. Execute Edit➔ Edit Text to open the Text Editor.

g. Click in the text box and delete the string silicon. Type in the string aluminum. Click the OK button.

The Text Editor window closes and the label updates.

h. Drag the label up to the aluminum region (represented in blue) using the select tool.

The label now appears in the aluminum region.

i. Execute Edit➔ Clear to delete the label from the plot page.

2. Creating lines:a. On the Tools bar, click the line button on and drag a line in the plot win-

dow.

b. Click the select tool on.

c. Click your created line.

TV 2005.10 7-19


A small white box appears on both sides of the line, and the Plot Status Line displays Object: SimpleLine:0 (see Figure 7-24).

Figure 7-24 The line is selected

d. Execute Edit➔ Edit Line to open a Line Editor window (see Figure 7-25).

e. In the Line Editor window, click the Line Style button to open the Line Style Chooser (see Figure 7-26).

f. In the Line Style Chooser, select the dotted pattern from the Pattern popup menu. Click the OK button to update the Line Style but-ton on the Line Editor.

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g. Click the OK button in the Line Editor window. The line on the plot updates to the dotted style and the Line Editor window closes.

h. Execute Edit➔ Clear to remove the line.

Figure 7-25 Line Editor window

Figure 7-26 Line Style Chooser

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Task 10: Printing

A confirmation window opens telling you that the document has printed. This window will alert you if the document was not printed.

c. Click the OK button in this window to dismiss it.

The metal1.tif and metal1.tif:line0 plots are now being printed to the speci-fied printer. Note that the black background color is not printed.

2. Printing a plot to file:a. In the Print window, turn the Print to File checkbox on.

The Print window changes to display a File button, and the Printer text box changes to the File: text box (see Figure 7-28).

The default file name is tv.ps and is created in the directory in which you are running tv2d. To print to a different directory or create the file with a

Goals Learn how to print plots.

Context The Taurus Visual main window is on the screen and metal1.tif is loaded into the plot page with a cutline plot (created in Task 7: Using the cutline Tool, p. 7-14).

1. Printing multiple plots to the printer:

a. Execute File➔ Print to open the Print window (see Figure 7-27). The default printer name is laser1, and the default print command is lpr. If you have a different printer name or you use a different print command, enter those now.

b. Click the Print button.

Figure 7-27 Print window

Figure 7-28 Print window with Print to File checkbox on

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different name, you can either enter the directory path and filename into the File: text box or click the File… button, to open a file browser that will affect the File: text box entry.

b. In the Print What popup menu, select Active Plot. The printout will now contain only the selected plot, metal1.tif.

c. Click the Print Plot Background Color checkbox on. The printout will now display the black background color.

d. Click the Print button.

e. Click the OK button in the confirmation window to dismiss it.

The file has been created.

3. Dismiss the Print window by clicking the Close button.

Task 11: Deleting Plots

Goals Learn how to delete plots.

Context Taurus Visual main window is on the screen and metal1.tif is loaded into the plot page with a cutline plot (created in Task 7: Using the cutline Tool, p. 7-14).

a. Select the metal1.tif plot and execute Plot➔ Delete. The metal1.tif plot is deleted.

b. Execute Plot➔ Delete again to remove the 1D plot.

The 1D data table is left behind.

c. Execute Data➔ Data Tables.

d. On the Data Tables window, select the metal1.tif:line0 data table, and click the Delete button.

e. Click the Close button on the Data Tables window to dismiss it.

This concludes the “Fundamentals and Basic Usage” section of the tutorial.

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Follower Plots TutorialThis section teaches the basics of creating and using follower plots. This tutorial assumes that you have reviewed the Fundamentals and Basics Usage tutorial.

Task 1: Loading Two Plot Files

1. Execute File➔ Open (Add)… to open the File Chooser.

2. Navigate to the examples directory which contain the files sstbjt_sat.tdf and sstbjt_ts4.tdf.

3. Select sstbjt_sat.tdf and click the Apply button.

4. Select sstbjt_ts4.tdf and click the OK button. The File Chooser closes, and sstbjt_sat.tdf and sstbjt_ts4.tdf are loaded into the plot page, in Row Major mode.

5. Drag the window horizontally, until the two plots square (see Figure 7-29).

Goals Learn how to load two plots into the plot page, an active plot, and a follower plot.

Context The Taurus Visual main window, started by the tv2d executable, is onscreen.

Figure 7-29 Plot page displayed in Row Major mode

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Taurus Visual User Guide Follower Plots Tutorial

Task 2: Creating a Follower Plot and Using the Display Bar

1. Creating a follower plot:

a. Click sstbjt_ts4.tdf to make it the active plot.

b. Hold down the CONTROL key and click sstbjt_sat.tdf.

This plot is now surrounded by a green frame, to indicate that it is the fol-lower plot. The follower plot will follow most actions of the active plot.

2. Using the display bar on follower plots:a. Click the fields, axes, and bounds buttons on and all other buttons off.

Now the active plot displays the Arsenic contours, and the follower plot displays the Acceptors contour (see Figure 7-30).

b. In the Fields list, select Total Doping.

Now the field contours for Total Doping are displayed in the active plot. Since the follower plot also contains Total Doping in its Fields list, Total Doping is selected as its field as well. The follower plot’s field range is inherited from the active plot.

c. Click the other display buttons on and off and note the results on the active plot and its follower plot.

d. Click the overlay toggle on, the contents of the follower plot will be dis-played on top of the master plot.

Goals Learn how to create a follower plot and change the display for both the active plot and its follower plot.

Context Task 1 has been implemented to load sstbjt_ts4.tdf and sstbjt_sat.tdf on the Taurus Visual main window plot pages.

Figure 7-30 Contours: active plot Arsenic; follower plot Acceptors

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Task 3: Using the Tools Bar for Follower Plots

1. On the display bar, click the region and axes buttons on and all other buttons off to display both active plot and the follower plot regions.

2. zoom and pan Tools: a. Click the zoom button and drag a zoom box on the active plot to see that

the follower plot also zooms.

b. Execute View➔ Reset Transform to see that both the active plot and its follower plot return to their original size. The follower plot also follows panning actions.

3. Cutlines:a. Click the cutline button and drag a cutline in the middle of the plot struc-

ture to see that the follower plot also creates a cutline in the same location as the active plot. A one-dimensional cutline plot is created containing data from both two-dimensional plots.

b. Enlarge the window; drag its border horizontally (see Figure 7-31).

4. Creating cutline followers:a. Hold down the CONTROL key and click the one-dimensional plot.

Now there is one active plot, sstbjt_ts4.tdf, and two follower plots.

b. On the display bar, click the fields and bounds buttons on and all other buttons off. Select Net Doping from the Fields list.

Now all three plots display Net Doping information.

Goals Learn how to use the Tools bar for follower plots.

Context Task 1 has been implemented to load sstbjt_ts4.tdf and sstbjt_sat.tdf on the Taurus Visual main window. Task 2 has been implemented to make sstbjt_sat.tdf the follower plot of sstbjt_ts4.tdf.

Figure 7-31 One active plot and two follower plots

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Taurus Visual User Guide Follower Plots Tutorial

Note:Selecting one of the follower plots will make that plot the active plot. The other plots will no longer follow this active plot.

This concludes the follower plot tutorial.

TV 2005.10 7-27


1D PlotsThis section teaches how to display one-dimensional plots using Taurus Visual.

Task 1: Displaying a Curve Plot

1. Loading the mos_breakdown:0_0.ivl plot:

a. Execute File➔ Open(Add). The File Chooser opens. Navigate to the curve_examples directory.

b. In the File Chooser, execute Filters➔ .ivl/data (see Figure 7-32).

c. Select the file mos_breakdown:0_0.ivl and click the OK button. An empty 1D plot is loaded into the Taurus Visual plot page (see Figure 7-33).

Goals Learn how to display curve plots.

Context The Taurus Visual main window, started by the tv2d executable, is on screen.

Figure 7-32 File Chooser with Filters➔ .ivl/data

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Taurus Visual User Guide 1D Plots

2. Displaying a Curve Plot:a. Click the edit button or execute Plot➔ Properties to open the Plot Prop-

erties editor.

b. Select the Curve Plot tab to display the Curve Plot page (see Figure 7-34).

Figure 7-33 Taurus Visual main window plot page

Figure 7-34 Plot Properties editor Curve Plot page

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c. Click the Create... button to open the Curve Plot Chooser (see Figure 7-35).

d. In the Curve Plot Chooser, select V(Drain) from the X Variable list and click OK. The Curve Plot Chooser closes, and the Plot Properties edi-tor Curve Plot page updates to display the mos_breakdown:0_0.ivl curve list (see Figure 7-36).

e. In the Plot Properties editor Curve Plot page, scroll down to the middle of the Y Variable list and select I(Drain).

f. Click the box in the Show column of the I(Drain) row.

The Show column box now displays a green fill and a curve is displayed on the plot page (see Figure 7-37).

Note:The Show column box in the upper panel also must display a green fill to view the curve.

Figure 7-35 Curve Plot Chooser

Figure 7-36 Updated Plot Properties editor Curve Plot page displaying mos_breakdown:0_0.ivl data table

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3. Displaying Symbols at each data point:a. In the Plot Properties editor Curve Plot page, click the left box in the

I(Drain) row, Symbols column.

The Symbols column box for I(Drain) now displays a green fill and sym-bols are displayed on the plot (see Figure 7-38).

4. Displaying multiple curves with multiple axes:a. In the Plot Properties editor Curve Plot page, select the I(Source) row.

b. Click the Show and Symbols column boxes in the I(Source) row, so these two boxes display a green fill.

c. Click the L in the I(Source) row, Y Axis column.

Figure 7-37 Show column box is on and the curve is displayed on the plot page

Figure 7-38 Symbols column box on and corresponding plot displays symbols

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The L becomes an R. Now the I(Source) data points are displayed on the plot using the Y Axis on the right hand side of the plot (see Figure 7-39).

d. Click the Show column box off for the I(Source) row. The updated plot no longer displays the I(Source) curve.

5. Dismiss the Plot Properties editor by clicking the Close button.

Task 2: Editing the Curve Plot Data Table with the SpreadSheet

1. Selecting and changing the value of a data point:

a. Execute Data➔ SpreadSheet.

The SpreadSheet opens displaying the mos_breakdown:0_0.ivl data (see Figure 7-40).

Figure 7-39 I(Source) data points from Curve Plot page displayed in plot

Goals Learn how to use the SpreadSheet.

Context Task 1 has been completed; the mos_breakdown:0_0.ivl plot shows in the Taurus Visual main window.

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b. In the SpreadSheet, scroll to the right to the V(Drain) column. Scroll to the bottom of the column and click the second to last value, 5.959. On the plot, the symbol at this data point is now filled (see Figure 7-41).

c. Click one of the symbols on the plot.

That symbol’s value is now selected on the SpreadSheet.

d. In the SpreadSheet, double-click the value 5.959. The number box is now editable.

Figure 7-40 SpreadSheet displaying the mos_breakdown:0_0.ivl data

Figure 7-41 Symbol at data point is filled

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e. Change the value to 4 and press the RETURN key. The plot updates to reflect this new value.

2. Disabling a data point:• In the SpreadSheet, with the value 4 selected from the V(Drain) col-

umn, execute Row➔ Disable.

That row’s values change to nil and a gap at that value is displayed on the plot.

• Execute Row➔ Enable.

That row’s values are back to their original value and are displayed on the plot.

3. Deleting data points:a. In the SpreadSheet, with the value 4 selected from the V(Drain) column,

execute Row➔ Delete.

This row of values is deleted from both the SpreadSheet and the plot.

b. Scroll to the top of the SpreadSheet.

c. Select the first two values in the V(Drain) column by dragging the mouse over both values or by clicking the first value and then holding the Con-trol key down and clicking the second value.

d. Execute Row➔ Delete.

Both rows of values are deleted from the SpreadSheet and the plot.

4. Creating a new column on the SpreadSheet where the values are the log of the I(Drain) values:a. Execute Column➔ New. A Column Name window opens.

b. Enter the title log(I(Drain)) and click the OK button.

The new column is added to the far right of the existing columns.

c. Drag the mouse over all of the values in the log(I(Drain)) column.

d. Execute SpreadSheet➔ Functions to open the SpreadSheet Functions window (see Figure 7-42).

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e. In the SpreadSheet Functions window, click the Selected Cells button.

The i and j Range update to the selected column values. In the Cell panel, click the Clear button.

f. In the At (i,j) text box, enter the function: log10(At(i,15)).

g. Click the OK button.

The values in the log(I(Drain)) column update to be the log of the values in the I(Drain) column.

Note:Taking the log of zero or a negative value will cause a “-” to be displayed in the SpreadSheet. This value can’t be displayed as a curve and must be changed, deleted, or disabled.

5. Displaying a new column of data points on the plot:a. Execute Plot➔ Properties.

The Plot Properties editor Curve Plot page is displayed.

b. Turn the Show column box off for I(Drain).

c. Scroll to the bottom of the Y Variable list.

d. Click the box in the Show column, log(I(Drain)) row.

The plot updates to display the new curve (see Figure 7-43).

Figure 7-42 SpreadSheet Functions window

TV 2005.10 7-35


Task 3: Saving Data Tables

Figure 7-43 Updated plot displaying new curve

Goals Learn how to save a data table, using the SpreadSheet.

Context Task 1 is complete and the mos_breakdown:0_0.ivl plot is displayed in the Taurus Visual main window.

7-36 TV 2005.10


1. Saving a Data Table:

a. In the SpreadSheet, execute File➔ Export➔ To TV 1D. The File Chooser opens.

b. Enter the desired file name and click the OK button.

The file is created in your selected directory with the .data extension.

c. Save selected columns to a file instead of the entire data table by selecting the column titles before you execute File➔ Export.

d. To use the TWB SpreadSheet, execute File➔ Export➔ To TWB, which creates a .data file that the TWB SpreadSheet recognizes.

Task 4: Editing and Deleting a Curve Plot

1. Editing the curve plot to change the X Variable:

a. On the Plot Properties editor Curve Plot page, click the Edit... button.

The Curve Plot Chooser opens (see Figure 7-35 on page 7-30).

b. In the Curve Plot Chooser, select I(Drain) in the X Variable list and click OK.

The Plot Properties editor Curve Plot page updates to display the data table with the X Variable set to I(Drain).

2. Deleting a Curve Plot: a. On the Plot Properties editor Curve Plot page, click the Delete button.

The Curve Plot page updates deleting the curve lists.

Task 5: Displaying a Curve Family Plot

1. Loading the mos_breakdown data tables:

a. In the SpreadSheet, execute File➔ Import.

The File Chooser opens.

b. Navigate to the curve_examples directory and load mos_breakdown:0_1.ivl, mos_breakdown:0_2.ivl, and mos_breakdown:0_6.ivl.

The SpreadSheet updates.

c. Use the popup menu to select the different data tables.

Goals Learn how to Edit and Delete a curve plot.

Context Task 1 is complete and the mos_breakdown:0_0.ivl plot is displayed in the Taurus Visual main window.

Goals Learn how to display a plot of multiple data tables that are grouped together using the X and Y Variables that they have in common.

Context Task 4 is complete and an empty 1D plot is displayed on the plot page.

TV 2005.10 7-37


2. Displaying a curve family plot:a. In the Plot Properties editor, select the Curve Family Plot tab, so the

Curve Family Plot page is displayed.

b. Click the Create… button to open the Curve Family Plot Chooser (see Figure 7-44).

c. In the Curve Family Plot Chooser window, select V(Drain) from the X Variable list and I(Drain) from the Y Variable list.

d. Click the OK button.

The Plot Properties editor Curve Family Plot page updates to display a list of curves that contain the V(Drain) and I(Drain) variables (see Figure 7-45).

The Show column box for each curve is on by default.

The plot updates to display the four curves (see Figure 7-46).

Figure 7-44 Curve Family Plot Chooser

Figure 7-45 Plot Properties editor Curve Family Plot page

7-38 TV 2005.10


3. Deleting a Curve Family Plot:a. Click the Delete button.

The plot and Plot Properties editor Curve Family Plot page updates to delete the curve plot.

Task 6: Displaying a Parameter Plot

1. Loading the parameter.data data table:

a. In the SpreadSheet, execute File➔ Import.

The File Chooser opens.

b. Navigate to the 1D directory and load parameter.data to update the SpreadSheet.

c. Use the popup menu to select the different data tables.

2. Dismiss the SpreadSheet by executing File➔ Close.

3. Displaying a parameter plot:a. In the Plot Properties editor, select the Parameter Plot tab, displaying

the Parameter Plot page.

b. Click the Create… button to open the Parameter Plot Chooser.

Figure 7-46 Plot of data tables with the V(Drain) and I(Drain) variables

Goals Learn how to display a plot of selected data table values.

Context Task 4 is complete and an empty 1D plot is displayed on the plot page.

TV 2005.10 7-39


c. In the Parameter Plot Chooser, select Sample Data dose Ns from the Data Table list, vth from the X Variable list, tox from the Y Variable list and dose from the Parameter:Value list (see Figure 7-47).

d. Click the OK button.

The Plot Properties editor Parameter Plot page updates to display a list of dose parameter values (see Figure 7-48).

e. In the Plot Properties editor Parameter Plot page, click the Show col-umn box for each row in the Parameter:Value list. The plot updates to display the three curves (see Figure 7-49).

Figure 7-47 Parameter Plot Chooser

Figure 7-48 Updated Plot Properties editor Parameter Plot page displaying a list of dose parameter values

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4. Click the Close button on the Plot Properties editor Parameter Plot page to dismiss page.

Task 7: Deleting Data Tables

1. Deleting data tables:

a. Execute Data➔ Data Tables to open the Data Tables window (see Figure 7-50).

Figure 7-49 Updated plot displaying the three curves

Goals Learn how to delete data tables.

Context Task 6 is complete and five data tables are loaded.

TV 2005.10 7-41


b. In the Data Tables window, select all the data tables by dragging the mouse over all the data table names.

c. Click the Delete button.

All the data tables are deleted from the Data Tables window and the Tau-rus Visual main window updates to display an empty 1D plot.

2. Click the Close button on the Data Tables window to dismiss it.

This concludes the one-dimensional plots tutorial.

Figure 7-50 Data Tables window

7-42 TV 2005.10

Taurus Visual User Guide 3D Plot Tutorial

3D Plot TutorialThis section teaches how to visualize 3D plot structures using the plane and vol-ume display options and the transparency controls. This tutorial assumes that you have reviewed the Fundamentals and Basic Usage tutorial.

Task 1: Getting TV Started and Loading a 3D Structure Plot File

1. In the Taurus Visual main window menu bar, execute Taurus Visual main window File➔ Open (Add)…. The File Chooser opens.

2. Navigate to the examples directory that contains the file mos-fet.tdf.

3. Select mosfet.tdf and click the OK button. The File Chooser closes and mosfet.tdf is loaded into the plot page (see Figure 7-51).

Goals Learn how to load a 3D structure plot file into the plot page.

Context To load 3D plots, use the tv executable (2D and 1D plots use the tv2d execut-able).

Figure 7-51 File mosfet.tdf loaded into plot page

TV 2005.10 7-43


Task 2: Using the Tools and Undoing Transformations

1. rotate Tool:

a. On the display bar, the region button should be on and all other buttons should be off.

b. On the Tools bar, click the rotate button on.

c. Place the cursor on the center of the plot structure and slowly drag to the right, until you see the source, drain, and gate regions rotate into view (see Figure 7-52).

.

Goals Learn how to use the select, zoom, pan, and rotate tools and the View➔ Undo Transform command.

Context The Taurus Visual main window is onscreen and mosfet.tdf is loaded into the plot page.

Figure 7-52 Source, drain, and gate regions rotated into view

7-44 TV 2005.10


d. Place the cursor on the gate and slowly drag downward, until you see a top view of the source, drain, and gate regions (see Figure 7-53).

2. Selecting regions:a. Use the select tool to display the different object regions on the Plot Sta-

tus Line.

3. pan Tool:a. Click the pan tool and drag the cursor to the left. The plot moves as you

drag the cursor.

6. Exact Transforms:a. Select View➔ EditTransform... to bring up the transform editor.

Figure 7-53 Top view of the source, drain, and gate regions

4. Undoing Transforms:a. Execute View➔ Undo Transform to undo the pan transformation. The

View➔ Undo, Redo, and Reset Transform menus will work for panning, zooming, or rotating.

5. zoom Tool:The zoom tool works differently for the tv executable in comparison to the tv2d executable.

a. In lieu of an unzoom mode, use the MIDDLE mouse button and drag downward to unzoom and upward to zoom.

b. Execute View➔ Undo Transform to undo the zoom.

The LEFT mouse button creates a zoom box, like in the tv2d execut-able.

TV 2005.10 7-45


b. Enter specific numeric values by which to pan, zoom, and rotate.

Task 3: Using the Volume Display

1. On the display bar, turn the fields, bounds, and volume buttons on and all other buttons off. On the Fields list, select GrossDoping.

The Taurus Visual main window displays the selected field as the volume of the structure.

Initially the volume is set to display 50% of the plot structure.

3. Changing the amount of volume displayed:a. In the Plot Cut Controls window, drag the Z-Distance slider to the left,

so the numeric field displays 0.6.

Goals Learn how to use the volume button and the Plot➔ Cut Controls command.

Context The Taurus Visual main window is on screen, mosfet.tdf is loaded into the plot page, and Task 2 has been implemented to rotate the plot.

2. Execute Plot➔ Cut Controls…. The Plot Cut Controls window opens, with the Cutvolume page displayed (see Figure 7-54).

Figure 7-54 Cutvolume page in the Plot Cut Controls window

7-46 TV 2005.10


In the Taurus Visual main window, the plot now displays 80% of the structure’s volume (see Figure 7-55).

b. In the Plot Cut Controls window, click Cut Above Plane off to change the plot’s display; now the other 20% of the plot volume is displayed.

c. Click the Cut Above Plane checkbox on.

4. Changing the Axis of the Volume Displayed:a. Click the Perpendicular Axis: popup menu and select the X axis

(see Figure 7-56).

On the Taurus Visual main window, the volume is now cut along the X axis (see Figure 7-56).

b. Click the Perpendicular Axis: menu again and select the Z axis.

5. Changing the Rotation of the Volume Displayed:

Figure 7-55 Z-Distance slider set to 0.6 and resulting plot

Figure 7-56 Perpendicular Axis: popup menu set to the X axis and resulting plot

TV 2005.10 7-47


a. Click the Rotate Plane checkbox on.

Now controls are available to move the rotation axis.

b. Drag the X-Rotation slider to the left, so the numeric field displays -50° (see Figure 7-57).

.

In the Taurus Visual main window, the volume is now cut along the Z axis that has been rotated -50××° along the X axis (see Figure 7-57).

c. Click the Reset button to restore all of the sliders to their original posi-tions; on the Taurus Visual main window, the volume is restored to its original state where 50% of the plot structure is displayed.

6. On the Plot Cut Controls window, click the Close button to dis-miss the window.

Task 4: Using the Plane Display

1. On the display bar, click the bounds and plane buttons on and all other buttons off.

Figure 7-57 Results of Perpendicular Axis: menu with Z axis selected and X-Rotation slider set to -50°

Goals Learn to use the plane display button and the Plot➔ Cut Controls commands.

Context The Taurus Visual main window is on the screen, mosfet.tdf is loaded into the plot page, and Task 2: Using the Tools and Undoing Transformations, has been implemented to rotate the plot.

7-48 TV 2005.10


.

A plane is cut from the 3D plot, with the Net Doping contours displayed (see Figure 7-58).

2. Selecting the plane:a. On the Tools bar, click the select button on. On the plot structure, click

the plane.

Now the object displayed on the plot status line is TVSliceContour.

3. Execute Plot➔ Cut Controls to open the Plot Cut Controls window.The Cutplane page is displayed.

4. Changing the location of the Plane:a. On the Plot Cut Controls window, drag the Z-Distance slider to the left,

so the numeric field displays 0.6 (see Figure 7-59).

Figure 7-58 Plane cut into 3D plot with Net Doping contours

TV 2005.10 7-49


b. In the Taurus Visual main window, notice the plane has moved.

5. Changing the Field Displayed on the plane:a. Select GrossDoping from the Show Field popup menu on the Plot Cut

Controls window to display the GrossDoping contours on the plane (see Figure 7-59).

6. Creating a 2D plot from the plane:a. In the Plot Cut Controls window, click the Create 2D Plot button.

A two-dimensional plot is created on the plot page to the right of mos-fet.tdf, displaying the regions (see Figure 7-60).

Figure 7-59 Plot Cut Controls window with Z-Distance set to 0.6 and plot results

7-50 TV 2005.10


b. Select the 2D cutplane plot to make it the active plot. Select GrossDoping from the fields list. Turn on the fields display.

c. Select the 3D plot, mosfet.tdf, to make it the active plot. In the Plot Cut Controls window, drag the slider to the right, so the numeric field dis-plays 1.8 (see Figure 7-61).

Both of the plots are updated to display the new plane’s contours.

7. Creating a 1D plot for the plane:a. Click the 2D plot.

Figure 7-60 2D plot right of mosfet.tdf

Figure 7-61 Plot Cut Controls window with Z-Distance set at 1.8 and plot results

TV 2005.10 7-51


The Tools and display bars differ from the three-dimensional plot. The Plot Status Line displays the plot identification mosfet.tdf:cutplane0 to indicate that this plot is a cutplane from mosfet.tdf.

b. On the Tools bar, click the cutline button. Drag a vertical line in the mid-dle of the plot.

A one-dimensional plot is created on the plot page to the right of mosfet.tdf:cutplane0.

c. Resize the window by dragging the window border horizontally until the three plots are square (see Figure 7-62).

d. Click the 3D plot. In the Plot Cut Controls window, drag the slider to the left, so the Z-Distance displays 0.6.

All three plots are updated to display the new plane's contours.

8. On the Plot Cut Controls window, click the Reset button. The Z-Distance slider resets and the plane is cut from the middle of the plot structure.

9. Click the Close button to dismiss the Plot Cut Controls window.

10. Click the two-dimensional plot. Execute Plot➔ Delete. The 2D plot is deleted.

a. Select the 1D plot and execute Plot➔ Delete again.

The 1D data table is left behind.

11. Drag the window border horizontally until the window is back to its original size before you started this tutorial.

Figure 7-62 Resized window displaying three squared plots

7-52 TV 2005.10


Task 5: Using Transparency Controls

1. On the display bar, click the region and plane buttons on, all other buttons off. There should be an outline of the plane displayed over the regions (see Figure 7-63).

2. Execute Plot➔ Properties or click the edit button to open a Plot Properties editor. a. Select the Regions tab, to display the Regions page.

b. On the Regions list, select all of the region objects by dragging the mouse from 1 to Drain:Elec.

Goals Learn how to use the Plot➔ Properties Regions page sliders.

Context The Taurus Visual main window is on the screen, mosfet.tdf is loaded into the plot page, and Task 2 has been implemented to rotate the plot.

Figure 7-63 Plot results with region, plane buttons on

TV 2005.10 7-53


3. Drag the Transparency slider to the left, so the numeric field dis-plays 0.5 (see Figure 7-64).

All of the regions on the plot are 50% visible. The plane is visible through the regions.

4. Click the Close button to dismiss the Plot Properties editor.

This concludes the 3D plot tutorial.

Figure 7-64 Plot Properties editor Regions page Transparency displayed at 0.5; resulting regions 50% visible

7-54 TV 2005.10

CHAPTER 8

T

Command System8

This chapter describes the command system available in Taurus Visual. The com-mand system can be used to write a command input file. When tv or tv2d is invoked passing a command input file as a command line argument, tv or tv2d reads and interprets each command in the file and takes the corresponding action.

Note:These commands may change as the command system is integrated with Synopsys TCAD simulators. The revised command system may not be backward compatible.

The Taurus Visual command system uses tool command language (Tcl), a simple scripting language for controlling and extending applications developed by John K. Ousterhout while at UC Berkeley. There are several good reference books available and a web site at sunscript.sun.com.

Taurus Visual executables include a Tcl interpreter for processing commands. Taurus Visual accepts any proper Tcl command plus specific commands defined by Taurus Visual. For a list of common Tcl commands, see Appendix B.

Taurus Visual can read commands from a command file. Another process can fork Taurus Visual and establish pipes with it to forward commands and receive return values through designated file descriptors.

Although you do not need to understand Tcl to use the command system, using standard Tcl commands with the special Taurus Visual defined commands facili-tates performing more complex actions.

Taurus Visual CommandsTaurus Visual commands consist of a command name followed by an action name followed by zero or more parameter values. Most Taurus Visual commands repre-sent a class of objects. For instance, the TvRegion command is used for regions. The command operates on the currently-selected object of that class. For each command, there may be more than one possible action. The default action is set,

V 2005.10 8-1

Command System Taurus Visual User Guide

i.e., set parameter values for the current object. This action does not need to be explicitly specified.

To invoke Taurus Visual with a command file, at the prompt type:

tv -load <filename>

where filename is the name of your command file. By convention, command filenames end with an .inp extension. If your command file is in a different direc-tory from the current directory, the path must be specified.

To invoke Taurus Visual with designated file descriptors for the purpose of for-warding commands to Taurus Visual, type:

tv -cmdin <fd> -cmdout <fd>

where:

• -cmdin <fd> is the file descriptor from which Taurus Visual reads com-mands.

• -cmdout <fd> is the file descriptor to which Taurus Visual writes return values.

Startup Command File

On startup, Taurus Visual looks for a ./.tvinit file or a $HOME/.tvinit file (in that order) and loads commands from this file if found.

To invoke Taurus Visual with a startup file other than the default .tvinit file, type:

tv -init <filename>

To suppress the automatic loading of a startup file, type:

tv -noinit

Syntax Conventions

Parameter names are preceded by a “-” character; actions come immediately after the command name, and have no “-” prefix.

An “R” in the left-hand column indicates a required parameter.

Types for parameters are contained in angle brackets, with the first word indicat-ing the type, and (optionally) a second word being a descriptive name for the parameter. Types are:

<string> String

<bool> Boolean. If no value is provided, ‘true’ is assumed.

<n> Numeric (int or float, represented internally as double)

<int> Integer

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Taurus Visual User Guide General Commands

Example rgb:FF0000 is red

rgb:00FF00 is green

rgb:0000FF is blue

These can be assigned to variables, for example (reading this from /usr/openwin/lib/rgb.txt, after converting values to hex):

Symbols used in the following Taurus Visual command definitions are:

{item1 item2 …} list

(item1 | item2 | …) exclusive choices

Note:The symbols “< >”, “|” and “( )” are not included in actual commands. Symbol “#” is used for comments. All text after a “#” symbol is ignored. A “\” is used for line continuation.

General Commands

TvPlot

load

The TvPlot load command opens a specified file, given its path name. The -createPlot parameter determines whether to automatically create 1D plots based on the active/inactive factors and responses in the .data data file. Set this parameter to false if you do not want the automatic curve plot. Then you can use a TvCurvePlot, TvFamilyPlot, or TvParamPlot command to create the 1D plot.

<color> rgb:RRGGBB, where RR, GG, and BB are hex numbers.

 Font name, defined using the TvFont command.

set SteelBlue rgb:4682b4

set maroon rgb:b03060

TvCurve -lineColor $SteelBlue

TvCurve -symbolColor $maroon

TvPlot load <string filename>

-createPlot <bool>

TV 2005.10 8-3


loadData

This is the same as load, except no plot is created. Only a new 1D data table is created.

Note:TvPlot loadData command will be differentiated into TvTable load command.

reload

Reload the data of currently selected plot. Setting of transform, show / hide state of each component, detail specification of field contour are preserved. The 1D curve plot of cutlines is updated.

show, hide,showOnly and

toggle

showOnly displays each component in the specified list, and only those compo-nents. show displays each component in the specified list and does not change any other component. hide hides each component in the specified list and does not change any other component. toggle turns on or off the visibility of each of the components in a specified list. Plot components can be any combination of: Mesh, Regions, Fields, Bounds, Junctions, and/or Axes. Currently, there are no 1D plot buttons.

set Use the TvPlot set action to change the page layout mode, plot orientation, background and foreground colors and 3D drawing method. set is the default action of TvPlot command the action name can be omitted.

rename

Renames the given plot. If neither -name nor -index is specified, renames the currently selected plot.

TvPlot loadData <string filename>

TvPlot reload

TvPlot (showOnly | show | hide| toggle ){components}

TvPlot

(-name <string> | -index <n>) -rename <string>

8-4 TV 2005.10


Those parameters are to rename a plot ID. To rename the table name of a 1D data, load the data using TvTable command. (See TvTable, p. 8-20.)

Setting Options

Use the TvPlot set action to change the page layout mode, plot orientation, background and foreground colors and 3D drawing method.

The -preserveAspectRatio parameter controls whether the plot aspect ratio is preserved when performing zoom operations (2D plots only).

The -jitterscale and -smoothShading parameters are for 3D plots. (See Chapter 4, Options Window, p. 4-33).

transform The TvPlot transform action is to transform a 2D or 3D plot.

reset

Resets the transform for a 2D or 3D plot.

Parameters for2D Plot

.

Transform (pan/zoom) a 2D plot by specifying the bounding box for the visible area of the plot (in world coordinates).

TvPlot set

-layout (stack | rowMajor | columnMajor)

-orientation (topLeft | bottomLeft)

-background <color>

-foreground <color>

-preserveAspectRatio <bool>

-jitterScale <n>

-smoothShading <bool>

TvPlot transform

-reset <bool>

TvPlot transform

-xmin <n> -ymin <n> -xmax <n> -ymax <n>

TV 2005.10 8-5


Note:All four parameters must be specified.

Transform (zoom/pan) a 2D plot by specifying a scaling factor and/or a translation vector. Use the -zoom parameter to apply a scaling factor relative to the current scaling factor. Alternatively, the -width and -height parameters can be used to set the viewable area (in world coordinates). The translation vector can be specified relative to the current translation by using deltaX and deltaY values (using the -pan parameter) or by specifying a new center point (using the -center parameter).

Parameters for3D Plot

.

Transforms (zoom/pan/rotate) a 3D plot. The scaling factor can be relative to the current scaling factor (using the -zoom parameter) or absolute (using the -scale parameter). Use -pan to specify a translation vector relative to the current transform, or -translate to specify a translation vector relative to the original transform. Use -rotate to rotate the plot around the current center point. Use -rotCenter to change the current center of rotation.

select

Makes a plot active, selected by name or index.

TvPlot transform

(-zoom <n> | -width <n> -height <n>)

-pan {<n dx> <n dy>} | -center {<n x> <n y>})

TvPlot transform

(-zoom <n> | -scale <n>)

(-pan {<n dx> <n dy>} | -translate {<n x> <n y>} | -translateX <n> -translateY <n>)

(-rotate {<n x> <n y> <n z>} | -rotateX <n> -rotateY <n> -rotateZ <n>)

(-rotCenter {<n x> <n y> <n z>} | -rotCenterX <n> -rotCenterY <n> -rotCenterZ <n>)

TvPlot select

(-name <string> | -index <n>)

8-6 TV 2005.10


delete .

Deletes an existing plot. If no plot is specified, the active plot will be deleted. A plot can be specified using either the -name or -index parameter.

TvWindow

Move the main Taurus Visual window to a particular location/size on the screen.

Note:The location/size does not include window manager decorations.

TvFont

Use the TvFont command to create or configure named fonts. A named font is a symbolic name that represents a particular font specification. A number of com-mands allow a font to be selected by name.

The list of available fonts is system dependent. Use the TvFont command to obtain a list of available font families.

The default font is called “default”. It will be used in subsequent commands when no font is explicitly specified.

The following actions are available:

TvPlot delete

(-name <string> | -index <n>)

TvWindow

-position {<x> <y>}

-size {<x> <y>}

action name

create Creates a named font

configure Changes the specification for any named font

names Returns a list of all named fonts

families Returns a list of available font families.

TV 2005.10 8-7


create

Creates a named font which can be used by other commands.

configure

Changes the specification for any named font. This command can be used to change the properties of the default font, or any font created using the TvFont create command.

names

Returns a list of all named fonts, which includes the default font plus any fonts that have been created using the TvFont create command.

families

Returns a list of available font families. Any name from this list can be used as the value of the -family parameter when using the ’TvFont create’ or TvFont configure’ commands.

TvFont create <name>

-family <string>

-weight <string>

-slant <string>

-size <n>

TvFont configure <name>

-family <string>

-weight <string>

-slant <string>

-size <n>

TvFont names

TvFont families

8-8 TV 2005.10


TvLabel

The TvLabel command sets a label in the currently selected plot. No action need to be specified for the TvLabel command.

Specify the bottom-left coordinates of the label in relative coordinate system by -point parameter. The x and y values must be 0.0 ~ 1.0.

TvLabel

R -label <string>

R -point {<n x> <n y>}

-name

-font 

-family <string>

-weight <string>

-slant <string>

-size <n>

-color

Definition of relative corrdinate

{0 0}

{1 0} {1 1}

{0 1}

TV 2005.10 8-9


TvPrint

Prints the current plot (-activePlot) or all plots (-allPlots, the default). By default, plots are printed with a white background color regardless of the back-ground color of the screen plot; setting -printBackgroundColor overrides this behavior. Use -printEPS to print Encapsulated Postscript, suitable for importing into other documents. Use -ncopies to select the number of copies to be printed. Use -paper to scale the plot to the given paper size.

2D/3D Plot Commands

TvRegion

The TvRegion command can be used to control the visibility of the regions, fields, mesh, and bounds for each of the regions specified using the -names parameter. The -color parameter sets the region color. The -useColor causes the region color to override the material color. It is set to true if -color is also spec-ified. The -meshColor sets the color of the mesh when the mesh is being dis-

TvPrint

(-printer <string> -printCommand <string> | -file <string>)

-printBackgroundColor <bool>

-printEPS <bool>

(-activePlot | -allPlots)

-ncopies <n>

-orientation (landscape | portrait)

-paper (letter | legal | A4)

TvRegion set

R -names {<string region-name> ...}

-show <list> {Regions Fields Mesh Bounds}

-color <color>

-useColor <bool>

-meshColor <bool>

-transparency <n>

-specular <n>

-ambient <n>

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Taurus Visual User Guide 2D/3D Plot Commands

played on top of a region. The -transparency, -specular and -ambient parameters apply only to 3D regions.

Gets the list of all region names.

TvField

Use the TvField command to select/deselect a field and to change the range over which data is visualized for that field. You can list fields by name (the print name for the field, as displayed in the TV field list) or by tag (the programmatic name as stored in TDF or TIF files, and in the field database sol.db).

Use -name to select the field using its print name, or use -tag to select a field using its tag name. Tag names are the names understood by simulation programs, and can be found in the sol.db file (for TDFfiles) or sol.dbs file (for TIF files).

Use -fullColormap to view the full range of colors between the min and max field range values. Set -rangeInside to true to display values that are between the min and max field range values, or set to false to display values that are below the min or above the max field range values.

Use -showVector to display vector fields as either vector glyphs (true) or sca-lar components (false). Use -vectorComponent to specify which vector com-ponent to display (the default is display the magnitude).

TvRegion names

TvField set

R -name <string field-name>

-tag <string>

-scale (linear | log | signedLog)

-rangeMin <n>

-rangeMax <n>

-fullColormap <bool>

-rangeInside <bool>

-showVector <bool>

-vectorComponent {magnitude | x | y | z}

-select <bool> # select ONLY the named field

-extend <bool> # select/deselect additional fields

-legend <bool> # show/hide the legend

-nvalues <int> # number of lines

TV 2005.10 8-11


Using the -select parameter selects only that field, deselecting all other fields. Using the -extend parameter selects/deselects the given field, without affecting the selection of any other field.

Gets the list of all field names. The fields can be listed by name (the print name for the field, as displayed in the TV field list) or by tag (the programmatic name as stored in TDF or TIF files, and in the field database sol.db).

TvContour

Use the TvContour command to set properties for contouring given fields. You must turn on the plot fields button to display the contours (see the TvPlot com-mand), and you must select the field with the TvField command.

TvVector

Use the TvVector command to set properties for displaying vector fields. Turn the plot fields button on to display the vectors (see the TvPlot command), and select the field with the TvField command.

TvField names TvField tags

TvContour set

R -field <string field-name>

-fill <bool>

-lines <bool>

TvVector set

R -field <string field-name>

-show <bool>

-scale <n>

8-12 TV 2005.10

Taurus Visual User Guide 2D/3D Plot Commands

TvJunction

Use the TvJunction command to set properties for the P/N Junction module. The parameters correspond to the controls available interactively through the Junctions page of the Plot Properties dialog.

To turn the Junctions on or off, use the TvPlot command. For example, TvPlot show Junctions.

TvDepletion

Use the TvDepletion command to set properties for Depletion module. The parameters correspond to the controls available interactively through the Junctions page of the Plot Properties dialog.

The Depletion module is part of the Junctions component. To turn the Depletion module on or off, use the TvPlot command. For example, TvPlot show Junctions.

TvCutline

TvJunction set

R -showLines <bool>

-showFill <bool>

-showSurface <bool>

-lineColor <color>

-pTypeColor <color>

-nTypeColor <color>

TvDepletion set

R -showLines <bool>

-showFill <bool>

-lineColor <color>

-fillColor <color>

TvCutline create

R -point {<n> <n>} -point {<n> <n>}

-select <bool>

-saveTable <filename>

TV 2005.10 8-13


Use the TvCutline command to generate cutlines on a 2D plot. It requires two points, specified with the -point parameter.

Use -select to select the cutline plot once it is created. Use -saveTable to save the cutline data table to a file.

TvProbe (2D Plots)

-arrayName parameter is required when none of -regionName, -materialName, -field parameters is specified.

-regionName, -materialName, -field parameters return the value and should be used in a Tcl line.

When -arrayName parameter is specified, the following Tcl array is created to save the values.

arrayName(X) arrayName(Y) arrayName(Z)

arrayName(Region) arrayName(Material)

arrayName(Field1) arrayName(Field2) .... same number as fileds.

TvProbe

R -point {<n> <n>}

-snapToMesh

-arrayName

or

-regionName <bool>

-materialName <bool>

-field <string>

set rname [TvProbe -point { 0.1 0.1 } -regionName]

8-14 TV 2005.10

Taurus Visual User Guide 1D Plot Commands

1D Plot Commands

TvPlot1D

Creates an empty 1D plot with the given plot identifier.

Sets general properties for a 1D plot. Use -font to set the title font. Use -regions to show or hide the regions.

TvPlot1D create

-id <string>

TvPlot1D set

-plotCoordinates (cartesian | polar | smith)

-dataCoordinates (cartesian | polar | smith)

-legend <bool>

-bounds <bool>

-background <color>

-foreground <color>

-title <string>

-font 

(synonym: -titleFont )

-legendFont 

-regions <bool>

TV 2005.10 8-15


TvAxis1D

Sets properties for a 1D axis. Both the x and y variables need to be set by other 1D plot commands before using the TvAxis1D command.

Use -useLabel to override the default label for a given axis. If -label is specified, -useLabel is true by default. Use -font to specify the label font. Use -ticks to display the axis ticks on either the inside or the outside of the axes. Inverts the min and max values for the given axis.

TvCurvePlot

create

Creates a new set of curve plot curves using the current data table unless the -table parameter is provided.

TvAxis1D set

R (-xAxis (bottom | top)) | (-yAxis (left | right))

-min <n>

-max <n>

-scale (linear | log | signedLog)

-showGrid <bool>

-showGridX <bool>

-showGridY <bool>

-useLabel <bool>

-label <string>

-font 

-ticks (in | out)

-invert

TvCurvePlot create

-table <string tableName>

R -xVariable <string>

-xAxis (top | bottom)

-show <bool>

-showAllLines <bool>

-showAllSymbols <bool>

8-16 TV 2005.10


set

Sets properties for an existing set of curve plot curves.

TvFamilyPlot

create

Creates a new set of curve family plot curves for the required x and y variable parameters.

set

TvCurvePlot set


-xVariable <string>


-show <bool>



TvFamilyPlot create




R -yVariable <string>

-yAxis (left | right)

-show <bool>



TvFamilyPlot set

-xVariable <string>


-yVariable <string>


-show <bool>

TV 2005.10 8-17


Sets properties for an existing set of curve family plot curves.

TvParamPlot

create

Creates a new set of parameter plot curves for the required x and y variable parameters. The curves are parameterized by the -params parameter

set

Sets properties for an existing set of parameter plot curves.



TvParamPlot create




R -yVariable <string>


-params {<string variable> ...}

-show <bool>



TvParamPlot set


-xVariable <string>


-yVariable <string>


-params {<string variable> ...}

-show <bool>



8-18 TV 2005.10


TvCurve

Sets properties for a specific curve in a set of curves. Use this command for any current curve plot, curve family plot, or parameter plot. For TvParameterPlot the order of -parameter and -value lists must match.

-curveLabel parameter sets a label of the curve which is displayed in the leg-end. Set the line pattern for a 1D curve using the -linePattern parameter. The pattern is defined as a list of numbers that represent line segment lengths. These values alternate between the on and off drawing state. The odd values alter-nate between the on and off drawing state. The odd values represent segments that are drawn (on), and the even values represent segments that are not drawn (off).

TvCurve set

R -yVariable <string> (for TvCurvePlot)

OR

R -table <string tableName> (for TvFamilyPlot)

OR

R -parameter {<string>...} (for TvParamPlot)

R -value {<n>...} (for TvParamPlot)

-curveLabel <string curveLabelForLegend>

-yAxis (left | right) (for TvCurvePlot)

-show <bool>

-lines <bool>

-vertLines <bool>

-lineWidth <n>

-lineColor <color>

-linePattern

-symbols <bool>

-symbolType (square|circle|diamond|plus|crosshairs |

triangle | x | y | asterisk | hourglass)

-symbolColor <color>

-symbolSize <n>

TV 2005.10 8-19


For example.

This would represent a line consisting of a 2-pixel segment followed by a 2-pixel gap, then a 4-pixel segment, then a 2-pixel gap. After that, the pattern repeats itself.

TvTable

load

Load a specified .data or .ivl file. A new table name can be set by -name parame-ter without specifying the original table name. Only specified columns are loaded when -columns parameter is used.

import

The import parameter is use to import of arbitrary columns of ascii data. Use -name to specify the table name. Use -skipRows to skip over header lines that are not part of the data. Use -columns to select only the given column numbers from the table. Note that column indices start at 1, not 0. Use -columnNames and -columnUnits to specify the names and units for each column. Default names and units will be used if none are specified.

TvCurve

-linePattern {2 2 4 2}

TvTable load <string dataFileName>

-name <string>

-columns { <string columnName1> <string columnName2> .... }

TvTable import

-name <string tableName>

-file <string filename>

-skipRows <n>

-columns {<n>...}

-columnNames {<string>...}

-columnUnits {<string>...}

8-20 TV 2005.10


rename table

Renames the given table.

rename column .

Renames the given column.

rename units

Renames the units for the given column.

delete columns

The columns which are listed in {} are deleted.

ArithmeticOperation

Arithmetic operations are a part of set actions. The basic syntax is:

Once calculation results are added to the table by -setColumn parameter, the new column can be used by the following TvTable commands to perform other operations, and can be used to generate 1D plots.

Those arithmetic operations are available.

TvTable

-name <string tableName> -rename <string>

TvTable

-name <string tableName> -columnName <string> -rename <string>

TvTable

-name <string tableName> -columnName <string> -units <string>

TvTable

-name <string tableName> -deleteColumn { <string columnName1> <string columnName2> .... }

TvTable


-units <string>

-setColumn <string columnName>

-(One of the Arithnetic Operations)

TV 2005.10 8-21


expression

The result of the expression is calculated and then saved in the column specified by -setColumn parameter. If the column name already exists in the table, the values of the current column are replaced by the result.

Note:The expression is evaluated by Tcl. Use the dollar sign to specify a col-umn name.

You can use any standard Tcl arithmetic operator or function in the expression. For a list of available operators and functions, see Chapter B.

When a column name includes special characters, enclose the column name by {}.

derivative

-ddx parameter is to calculate the derivative of columnY with respect to col-umnX, and requires -setColumn parameter.

integral

-expr {expression}

# ex1: Calculate beta of a BJT.

TvTable load bjt_ac.ivl -name table1TvTable -name table1 -setColumn beta -expr {$I(Collector)/$I(Base)}

# ex2: Calculate Id taking the width (250um) into account.

TvTable load mos.data -name data1TvTable -name data1 -setColumn Id -expr {${|Itot(dev1.drain)|}*250}

-ddx {<string> columnYName> <string columnXName>}

# ex: Calculate and plot the ideality factor

# load the data.

TvTable load GaAsDiode.ivl -name table1TvTable -name data1 -setColumn logI -expr {log($I(Top))}

# calculate the ideality factor N.

TvTable -name data1 -setColumn slope -ddx {logI V(Top)}

TvTable -name data1 -setColumn N -expr {1/(0.0256*$slope)}

# create the 1D plot.

TvFamilyPlot create -xVariable V(Top) -yVariable N -show true

-integral {<string columnYName> <string columnXName>}

8-22 TV 2005.10


-integral parameter is to calculate the derivative of columnY with respect to columnX, and requires -setColumn parameter.

toTimeDomain

-toTimeDomain parameter is to convert a frequency domain data to a time domain data, and requires -setColumn parameter. When the conversion is suc-cessful, a new column Time is added to the table too.

set and getmethod for Tcl

You can copy a set of values specified by -values parameter to the column specified by -setColumn parameter. The value of -values parameter is a Tcl List name that can be constructed using standard Tcl list commands list, join, and append. The $ sign must be used to reference a Tcl list stored in a variable.

# ex: Set a cutline at x=0.1um in a 2D structure, then calcurate the

# integral of Arsenic concentration.

TvPlot load cmos09.tif

TvField -name Arsenic -select true

TvCutline create -point { 0.1 0.0 } -point { 0.1 10.0} -select

TvTable -name cmos09.tif:line0 -setColumn As_integral -integral { Distance Arsenic }

-toTimeDomain {<string columnNameFrequency> <string columnNameMagnitude> <string columnNameAngle>}

# ex: Load a result of a harmonic balance simulation, then convert the

# data to plot Ic vs Time.

TvTable load hbt_hb_005_005.data -name data

TvTable -name data -setColumn I -unis Amp -toTimeDomain { Frequency |Itot(hbt.collector)| angle(Itot(hbt.collector)) }

TvFamilyPlot create -xVariable Time -yVariable I

TvTable

-name <string tableName> -units <string unitsName> -setColumn <string columnName> -values <string $TclListName>

TvTable

-name <string tableName> -units <string unitsName> -setColumn <string columnName> -values { <n> <n> <n> ......... }

TV 2005.10 8-23


-getColumn parameter is to copy a column of the table to a Tcl List. TV sets a Tcl list and copy the values.

save

Saves a 1D table to the given file. Use -columnNames to save only the named columns.

# ex: Copy values from a Tcl list “DCdata” to the “Meas_Ic” column of the DCdata table.

TvTable load mosDC.ivl -name tableDC

set DataIc { 1e-6 1e-4 1e-3 1.1e-3 ............ }

TvTable -name tableDC -setColumn Meas_Ic -values $DataIc

TvTable

-name <string tableName> -units <string unitsName> -getColumn <string columnName> -listName <string TclListName>

# ex: Transfer a column of data 1 to the other table.

TvTable load mos09_1.ivl -name data1

TvTable load mos09_2.ivl -name data2

TvTable -name data1 -getColumn I(Collector) -listName Data1Ic

TvTable -name data2 -setColumn Ic_data2 -values $Data1Ic

TvTable save


-file <string filename>

-columnNames {string...}

8-24 TV 2005.10


Default Preference CommandsThese commands can be used to set default properties for a number of TV com-mands. They can be used anywhere that commands are loaded, but are most com-monly used in a .tvinit file in the user’s home directory.

Sets default properties for plots of the given dimensionality. If -dimension is not specified, or it is set to 0, the properties apply to plots of any dimensionality.

Sets the default title font used for 1D plots.

Sets the default properties for 1D curves.

Sets the default properties for 1D plot axes.

TvPlot default

-dimension <n>

-show {components}

-layout (stack | rowMajor | columnMajor)

-background <color> -foreground <color>

-preserveAspectRatio <bool>

-jitterScale

-smoothShading

TvPlot1D default

-font 

TvCurve default

-lines <boolean>

-lineWidth <n>

-lineColor <color>

-symbols <boolean>

-symbolColor <color>

-symbolSize <n>

-symbolType (...)

TvAxis1D default

-ticks (in | out)

-showGrid <bool>

-font 

TvPrint default (any TvPrint parameters)

TV 2005.10 8-25


Sets the default printing properties. Any parameter that is valid for the TvPrint command can be used here.

Command ExamplesThe following examples illustrate using the command system with Taurus Visual. Each example includes a sample command file. The sample files include both spe-cial Taurus Visual commands and general Tcl commands to show how they are used together to perform more sophisticated control of Taurus Visual actions.

The following examples use data files shipped with the Taurus Visual product and located in the examples directory. The example command files start with defining a Tcl variable named example_dir, which is the path to the appropriate examples directory. You can change the path to match your installation. The value of this variable is used in following TvPlot load commands by using the Tcl conven-tion of prepending a $ symbol:

$example_dir

to extract the variable’s value.

Example 1

Load a 2D data file and set the show properties

The metal1.tdf data file are loaded, and a plot is created with the regions, bounds, and axes buttons visible.

Example 2

Display field contours in specific regions

This example illustrates several new concepts. The TvField command selects Net Doping in the fields list. The TvContour command is used to set proper-ties for generating Net Doping contours. The TvRegion command turns off field contours in the five named regions by leaving Fields out of the -show list.

# -*-Tcl-*-set example_dir /usr/tma/TmaVisual_1.3.0/examplesTvPlot load $example_dir/metal1.tdfTvPlot show {Regions Bounds Axes}

# -*-Tcl-*-set example_dir /usr/tma/TmaVisual_1.3.0/examplesTvPlot load $example_dir/metal1.tdfTvField -name Net_Doping -select trueTvContour -field Net_Doping -fill true -lines true -nvalues 10TvRegion -names {aluminum1 aluminum2 bpsg1 bpsg2 bpsg3} \

-show {Regions Mesh Bounds}TvPlot show {Regions Fields Bounds Axes}

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Taurus Visual User Guide Command Examples

T

Finally, the TvPlot show action is included last to turn on the plot buttons including the fields button that turns on the contours.

Example 3

Using the pause command and sequencing actions

This example is similar to Example 2, with the addition of commands used to sequence through several fields, turning on contours one at a time with a pause command. The foreach command is a standard Tcl command used to loop through a list. One iteration of the loop will be performed for each item in the list, in this case, each field. To save redraws, the TvPlot toggle command is used to turn the fields display off before setting the next field’s contour properties. It is then used to turn fields back on.

Example 4

Creating a 1D curve plot

Comment This example illustrates the basic commands for creating 1D curve plots. First, the .tif data file is loaded to create a data table. It becomes the current data table. The TvCurvePlot create command is used to create a new set of curves from this data table, setting the X Variable to V(Drain). The -table parameter is not nec-essary in this case. It is included here to show how Medici generated the .tif file data tables in TV. Finally, the TvCurve command turns on the curve for Y equal I(Drain) displaying in the default style.

# -*-Tcl-*-set example_dir /usr/tma/TmaVisual_1.3.0/examplesTvPlot load $example_dir/metal1.tdfTvRegion -names {aluminum1 aluminum2 bpsg1 bpsg2 bpsg3} \

-show {Regions Mesh Bounds}TvPlot show {Regions Fields Bounds Axes}foreach field {Arsenic Boron Phosphorus Net_Doping Total_Doping}{TvPlot toggle {Fields}TvField -name $field -select trueTvContour -field $field -fill true -nvalues 10TvPlot toggle {Fields}pause 5 }

# -*-Tcl-*-set example_dir /usr/tma/TmaVisual_1.3.0/curve_examplesTvPlot load $example_dir/mos_breakdown:0_0.ivlTvCurvePlot create -table "mos_breakdown:0_0.ivl< MEDICI_DATA >" \

-xVariable V(Drain) -show trueTvCurve -yVariable "I(Drain)" -show true

V 2005.10 8-27


Example 5

Creating a 1D curve family plot

Comment This example is similar to the previous curve plot example, except in a curve fam-ily plot, multiple data files are loaded to create several data tables. A curve family plot curve set is created. By default all curves are turned on in their default style, for curve family plots. Notice the first three TvPlot commands use the loadD-ata action to load only data tables. The final TvPlot command uses the load action to produce the 1D plot.

Example 6

Creating a 1D parameter plot

Comment This example illustrates two new features:

• First, the -createPlot parameter is used in the TvPlot command to turn off new plot generation for a .data file. Parameter.data has af and ar values which would automatically create a new plot; however, in this example, you do not want that to happen.

• Second, create your own plot with the TvParamPlot command and then turn on the three curves with the TvCurve commands. For this example, the symbols are turned on.

# -*-Tcl-*-set example_dir /usr/tma/TmaVisual_1.3.0/curve_examplesTvPlot loadData $example_dir/mos_breakdown:0_0.ivlTvPlot loadData $example_dir/mos_breakdown:0_1.ivlTvPlot loadData $example_dir/mos_breakdown:0_2.ivlTvPlot load $example_dir/mos_breakdown:0_6.ivlTvFamilyPlot create -xVariable V(Drain) -yVariable I(Drain)

# -*-Tcl-*set example_dir /usr/tma/TmaVisual_1.3.0/curve_examplesTvPlot load -createPlot false $example_dir/parameter.dataTvParamPlot create -xVariable vth -yVariable tox -params doseTvCurve -parameter dose -value 100 -show true -symbols trueTvCurve -parameter dose -value 150 -show true -symbols trueTvCurve -parameter dose -value 200 -show true -symbols true

8-28 TV 2005.10

APPENDIX A

Using TV with Taurus WorkbenchA

This appendix describes how to integrate Taurus Visual within the Taurus Workbench design environment. The Taurus Workbench User Guide provides detailed instructions for integrating simulators and tools (see Taurus Workbench User Guide, Chapter 4).

While the following examples were written for 2D plots the same functions are now available for 3D plots.

IntegrationThe key to tool integration is the Taurus Workbench ToolKit and its associated Tool Drivers.

Create a new Tool Driver for tv2d in the Taurus Workbench Experiment window by selecting New from the popup menu in the ToolKit panel. Alternatively, select an existing Tool Driver and use Duplicate. Then double-click the new Tool Driver icon to open the Tool window where you edit the new Tool Driver properties.

The first command in a Tool Driver must be “unix” with a subcommand that describes the process to be run when the driver is invoked. For Taurus Visual the subcommand should be “tv2d -load <command-file> &”. Enter this in the Taurus Workbench Tool window as follows (see the Taurus Workbench User Guide for directions on how to enter commands and parameters):

TV 2005.10 A-1

Using TV with Taurus Workbench Taurus Visual User Guide

This is the first command for all Taurus Visual Tool Driver variants.

All following commands in the Tool Driver are appended sequentially to the command input file, represented by “#” in the first unix command. Therefore, making a specific Tool Driver is exactly the same as using a text editor to create a Taurus Visual command file as described in Chapter 8. Furthermore, when multiple wafers are dragged and dropped onto the Tool Driver, all commands are repeated in the command file for each wafer. Essentially, each wafer represents one plot and the associated commands describe how that plot should be initialized.

To create the most basic Tool Driver for either 1D or 2D plots add one additional command as follows:

This will create one 1D or 2D plot for each wafer using the default settings for Taurus Visual.

Even this most basic Tool Driver is useful. For instance, you can drag several wafers from the same level in Taurus Workbench to create multiple 2D plots and then use the follower plot functionality with cutlines to visualize differences in field values by overlaying the 1D plot curves (using curve family plot).

The 1D plot can zoom in or zoom out to see relative differences between the curves for a particular field. Individual data points can be selected and seen in the SpreadSheet to see absolute differences at these locations.

It is easy to create more sophisticated Tool Drivers by adding additional commands. The following Tool Driver illustrates setting up a series of 2D plots to visualize contours for a specific field:

Level Command Parameter1 Parameter2

1 unix

1.1 tv2d -load # &

Level Command Parameter1

2 TvPlot load .|.ivl (for 1D plot)

. (for 2D plot)


1 unix

1.1 tv2d -load # &

2 TvPlot load .

3 TvField -name Phosphorus -select true

A-2 TV 2005.10

Taurus Visual User Guide Integration

The following Tool Driver illustrates setting up 1D IV curve plots:

Note:In Taurus Workbench it is useful to select multiple wafers and create a curve family plot for the desired X and Y variable.

Use the following Tool Driver for this purpose to create multiple plots. All plots except the last one may need to be deleted because Taurus Workbench appends all commands to the command file for each selected wafer.

Many additional examples are contained in the standard and template project libraries shipped with Taurus Workbench.

4 TvPlot toggle {Fields}


Level Command Parameter1 Parameter2 Parameter3

1 unix

1.1 tv2d -load # &

2 TvPlot load .|.ivl

3 TvCurvePlot create -xVariable time

4 TvCurve set -yVariable I(1) -show true -symbols true

5 TvAxis1D -xAxis bottom -min le-12 -scale log

6 TvAxis1D -yAxis left -min le-18 -scale log

Level Command Parameter1 Parameter2 Parameter3

1 unix

1.1 tv2d -load # &

2 TvPlot load .|.ivl

3 TvFamilyPlot create

-xVariable time -yVariable I(1)

4 TvAxis1D -xAxis bottom -min le-12 -scale log

5 TvAxis1D -yAxis left -min le-18 -scale log

TV 2005.10 A-3

Using TV with Taurus Workbench Taurus Visual User Guide

A-4 TV 2005.10

APPENDIX B

Tcl Command ReferenceB

This appendix describes the Tcl commands used in Taurus Visual.

Table B-1 lists the built-in Tcl commands.

Table B-1. Built-in Tcl Commands

Command Definition

after Schedule a Tcl command for later execution.

append Append arguments to a variable's value. No spaces added.

array Query array state and search through elements.

binary Convert between strings and binary data.

break Premature loop exit.

catch Trap errors.

cd Change working directory.

clock Get tune an format date strings.

close Close an open I/O stream.

concat Concatenate arguments with spaces between. Splices lists.

console Control the console used to enter commands interac-tively.

continue Continue with next loop iteration.

error Raise an error.

eof Check for end of file.

eval Concatenate arguments and evaluate them as a command.

exec Fork and execute a UNIX program.

TV 2005.10 B-1

Tcl Command Reference Taurus Visual User Guide

exit Terminate the process.

expr Evaluate a math expression.

fblocked Poll an I/O channel to see if data is ready.

fconfigure Set and query I/O channel properties.

fcopy Copy from one I/O channel to another

file Query the file system.

fileevent Register callback for even-driven I/O.

flush Flush output from an I/O stream’s internal buffers.

for Loop construct similar to C for statement.

foreach Loop construct over a list, or lists, of values.

format Format a string similar to C sprintf.

gets Read a line of input from an I/O stream.

glob Expand a pattern to matching file names.

global Declare global variables.

history Command-line history control.

if Conditional command. Allows else and elseif clauses.

incr Increment a variable by an integer amount.

info Query the state of the Tcl interpreter.

interp Create additional Tcl interpreters.

join Concatenate list elements with a given separator string.

lappend Add elements to the end of a list.

lindex Fetch an element of a list.

linsert Insert elements into a list.

list Create a list out of the arguments.

llength Return the number of elements in a list.

load Load shared libraries that define Tcl commands.

lrange Return a range of list elements.

lreplace Replace elements of a list.

lsearch Search for an element of a list that matches a pattern.

lsort Sort a list.

namespace Create and manipulate namespaces.

open Open a file or process pipeline for I/O.


Command Definition

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Taurus Visual User Guide

T

package Provide or require code packages.

pause Pause process for a certain number of seconds.

pid Return the process ID.

proc Define a Tcl procedure.

puts Output a string to an I/O stream.

pwd Return the current working directory.

read Read blocks of characters from an I/O steam.

regexp Regular expression matching.

regsub Substitutions based on regular expressions.

rename Change the name of a Tcl command.

return Return a value from a procedure.

scan Parses a string according to a format specification.

seek Set the seek offset of an I/O stream.

set Assign a value to a variable.

socket Open a TCT/IP network connection.

source Evaluate the Tcl commands in a file.

split Chop a string into list elements.

string Operate on strings.

subst Substitutions without command evaluation.

switch Multi-way branch.

tell Return the current seek offset of an I/O stream.

time Measure the execution time of a command.

trace Monitor variable assignments.

unknown Unknown command handler.

unset Delete variables.

uplevel Execute a command in a different scope.

upvar Reference a variable in a different scope.

variable Declare namespace variables.

vwait Wait for a variable to be modified.

whiprocle A loop construct.


Command Definition

V 2005.10 B-3


Table B-2 lists the arithmetic operators.

Table B-3 lists the built-in math functions.

Table B-2. Arithmetic Operators

Symbol Definition

- ~ ! Unary minus, bitwise NOT, logical NOT.

* / % Multiply, divide, remainder.

+ - Add, subtract.

<< >> Left shift, right shift.

< > <= >= Comparison: less, greater, less or equal, greater or equal.

== != Equal, not equal.

& Bitwise AND.

^ Bitwise XOR.

| Bitwise OR.

&& Logical AND.

|| Logical OR.

x?y:z If x then y else z.

Table B-3. Built-in Math Functions

Command Definition

acos(x) Arc-cosine of x.

asin(x) Arc-sine of x.

atan(x) Arc-tangent of x.

atan2(y,x) Rectangular (x,y) to polar (r,th).

ceil(x) Least integral value greater than or equal to x.

cos(x) Cosine of x.

cosh(x) Hyperbolic cosine of x.

exp(x) Exponential, ex.

floor(x) Greatest integral value less than or equal to x.

fmod(x,y) Floating point remainder of x/y.

hypot(x,y) Returns sqrt(x*x + y*y). r part of polar coordinates.

log(x) Natural log of x.

log10(x) Log base 10 of x.

B-4 TV 2005.10


T

pow(x,y) x to the y power, xy.

sin(x) Sine of x.

sinh(x) Hyperbolic sine of x.

sqrt(x) Square root of x.

tan(x) Tangent of x.

tanh(x) Hyperbolic tangent of x.

abs(x) Absolute value of x.

double(x) Promote x to floating point.

int(x) Truncate x to an integer.

round(x) Round x to an integer.

rand() Return a random floating point value between 0.0 and 1.0.

srand(x) Set the seed for the random number generator to the integer x.

Table B-3. Built-in Math Functions

V 2005.10 B-5


B-6 TV 2005.10

APPENDIX C

T

Field Names in TIF and TDF DataC

The following table shows the mapping of the field names:

• TIF tag name is the field name that you will find it in a TIF data file.

• Print names are the field name for both of TDF anf TIF data in TV 2005.10. .

Table C-1. Field Name Mapping (Scalar Fields)

Tif Tag Name Print Name

Asa ActiveArsenic

Pa ActivePhosphorus

Fa ActiveFluorine

Sba ActiveAntimony

Ba ActiveBoron

Vac Vacancy

Inter Interfacel

clInter InterstitialCluster

As Arsenic

P Phosphorus

F Fluorine

Sb Antimony

B Boron

In Indium

Vac_s Vacancy

Inter_s Interstitial

itfAs InterfaceArsenic

V 2005.10 C-1

Field Names in TIF and TDF Data Taurus Visual User Guide

itfP InterfacePhosphorus

itfSb InterfaceAntimony

itfB InterfaceBoron

itfIn InterfaceIndium

Asc1 DdcArsenic

Pc1 DdcPhosphorus

Sbc1 DdcAntimony

Bc1 DdcBoron

Inc1 DdcIndium

Damage Damage

Xvel Xvel

Yvel Yvel

Si Silicon

O2 Oxygen

H2O OH

ORSOxygen O2

T Traps

Sxx Sxx

Syy Syy

Sxy Sxy

Szz Szz

Net NetDoping

Total TotalDoping

Donor DonorDoping

Accept AcceptorDoping

N-type Ntype

P-type Ptype

Ina ActiveIndium

Ala ActiveAluminum

Gaa ActiveGallium

v ElectricPotential

n Electrons



C-2 TV 2005.10


T

p Holes

tn ElectronTemperature

tp HoleTemperature

tl Temperature

jnm ElectronCurrentMagn

jpm HoleCurrentMagn

jdm DisplacementCurrentMagn

jcm ConductionCurrentMagn

jtm TotalCurrentMagn

flowline CurrentPotential

em ElectricFieldMagn

j.efield FieldAlongCurrent

qfn ElectronQuasiFermiLevel

qfp HoleQuasiFermiLevel

valenc.b HolePotential

conduc.b ElectronPotential

vacuum VacuumLevel

ii.gener ImpactIonization

bb.gener Band2bandGeneration

photogen PhotoGeneration

recombin Recombination

net.carr NetCarriers

net.char ElectricCharge

vnm ElectronVelocityMagn

vnp HoleVelocityMagn

g.gamn ElectronInjectionProbabiltiy

g.gamp HoleInjectionProbabiltiy

g.gamt TotalInjectionProbability

g.in ElectronInjectionCurrent

g.ip HoleInjectionCurrent

g.it TotalInjectionCurrent

x.mole XMoleFraction



V 2005.10 C-3

Field Names in TIF and TDF Data Taurus Visual User Guide

qpotn ElectronQuantumPotential

qpotp HoleQuantumPotential

Ge Germanium

n.mobil ElectronMobility

p.mobil HoleMobility

p.mobil Permittivity

richn ElectronRichardsonConstant

richp HoleRichardsonConstant

emass ElectronEffectiveMass

hmass HoleEffectiveMass

Table C-2. Field Name Mapping ( Vector Fields)


xvel, yvel MaterialVelocity

jnx, jny ElectronCurrent

jpx, jpy HoleCurrent

jdx, jdy DisplacementCurrent

jcx, jcy ConductionCurrent

jtx, jty TotalCurrent

ex, ey ElectricField

vnx, vny ElectronVelocity

vpx, vpy HoleVelocity



C-4 TV 2005.10

INDEX

T

Index
1D mode executable 3-1
1D plots 2-3, 5-1 to 5-22

bounded by red frame indicating active plot status Fig. 7-15

commands 8-15creating 4-21creating with cutline 7-14cutline plot Fig. 2-2metal1.tif moved to end of row Fig. 7-17overview 5-1save plot state 4-38, 4-39tutorial 7-28


2D plots

commands 8-10cutplane plot 2-2cutplane plot Fig. 2-2flowline line controls Fig. 4-20line starting points 4-20right of mosfet.tdf Fig. 7-51save plot state 4-38, 4-39structure plot 2-2structure plot Fig. 2-2


3D plots

commands 8-10isosurface starting points 4-19plane display 7-48plane starting points 4-19save plot state 4-38, 4-39structure plot 2-2structure plot Fig. 2-2structure plot file, loading 7-43transparency controls 7-53volume display 7-46

AAbsolute toggle, Cutline page 4-25

action rules 4-37

Active Factor Data (af) 5-20

active plot 2-2, 3-3

moving in plot order 4-33replicating actions in follower plots 4-36working with 4-1

Active Response Data (ar) 5-20

Add Point button, Flowlines page 4-21

Add Points checkbox, Flowlines page 4-21

adding and removing columns, SpreadSheet 5-18

aluminum1Elec region is selected Fig. 7-8

Ambient property, Regions page 4-14

animation with glyphs 4-21

Append Expression button, SpreadSheet Functions window 5-18

Apply button, SpreadSheet Functions window 5-19

axes button 4-3, 6-3

Axis option menu, Cutplane page 4-24

Axis page, Plot Properties editor 4-17, 5-3

Bbasic usage and fundamentals 7-1

Bins control, Plot Properties editor 5-10

boundary 3-3

bounding box

around silicon label Fig. 7-19drawn around gate Fig. 7-6

bounds button 4-2, 6-3

buttons

Add Point, Flowlines page 4-21Append Expression, SpreadSheet

Functions window 5-18Apply, SpreadSheet Functions window 5-19

V 2005.10 Index-1

Index Taurus Visual User Guide

axes 4-3, 6-3bounds 4-2, 6-3Clear Points, Flowlines page 4-21Close, Flowline Glyphs dialog 4-22Close, Page Layout window 4-33Close, Plot Description window 7-4Create 1D Plot, Flowlines page 4-21Create 2D Plot, Cutplane page 4-24, 6-3, 7-50Create..., Plot Properties editor 5-4cutline options, Cutline page 4-25Delete, Plot Properties editor 5-4display bar 7-4Duplicate, Plot Properties editor 5-4edit 4-2Edit Plane..., Flowlines page 4-19Edit..., Plot Properties editor 5-4fields 4-2, 6-3Help, Page Layout window 4-33Help, Plot Description window 7-3Hide Selected, Probe Tool window 4-6Line Style, Line Editor window 7-20mesh 4-2, 6-3OK, File Chooser 6-2, 6-10, 7-2OK, Print window 7-22OK, SpreadSheet Functions window 5-19overlay 4-3P/N 4-3Page Layout mode, Taurus Visual main window

7-17Page Setup... 4-38plane 4-3, 6-3, 7-48Print, Print window 7-22region 4-2, 6-3, 7-7Reset, Flowline Glyphs dialog 4-22Row Major, Page Layout window 7-16Row Major, Page Layout window Fig. 7-16Selected Cells, SpreadSheet Functions

window 5-18Stack, Page Layout window 7-16Style..., Fields page 4-11, 6-6, 6-11volume 4-3, 6-3

CCartesian coordinate system 5-2

causing follower plot actions 4-36

Cell panel, SpreadSheet Functions window 5-18

changing Field Range 7-12

checkboxes

Add Points, Flowlines page 4-21Cut Above Plane, Cutvolume page 4-23, 6-4Fields, Regions page 7-9Fill, Fields page 4-12, 6-6, 7-11Full Colormap, Fields page 7-12Isolines, Fields page 4-12Line, Fields page 4-12, 7-11Map to Field, Fields page 4-13Preserve Aspect Ratio, View menu 4-33Print to File, Print window 4-37, 7-22Print to File, Print window Fig. 7-22Regions, Regions page 7-8Rotate Plane, Cutplane page 4-24Rotate Plane, Cutvolume page 4-24Rotate Plane, Plot Cut Controls window 7-48Show Field, Fields page 4-11Show Flowlines, Flowlines page 4-19Show Glyphs, Flowline Glyphs dialog 4-22Show Legend, Fields page 4-11, 6-6, 6-11Show Plane, Flowlines page 4-19Snap to Mesh Node, Probe Tool window 7-14

circle.data input file, TV1D Fig. 5-20

Clear Points button, Flowlines page 4-21

Close button

Flowline Glyphs dialog 4-22Page Layout window 4-33Plot Description window 7-4

Color Chooserscalar controls 4-12vector controls 4-13

Color control, Flowline Glyphs dialog 4-22

Column Attributes, circle.data 5-20

Column Major mode 7-17

command definitions 8-3

1D plot commands 8-152D/3D plot commands 8-10

command examples 8-26

command save/load 4-10, 4-26, 4-38

command system 8-1 to 8-28

controls

Bins, Plot Properties editor 5-10Cutvolume page 4-23Field Range 6-3 to 6-11scalar, Fields page 4-12using Field Contour controls, Taurus-

Topography 6-8vector, Fields page 4-13

conventions

GUI 1-2

Index-2 TV 2005.10

Taurus Visual User Guide Index

keyboard accelerators 1-3menu 1-3mouse commands 1-2typographical 1-viwindow buttons 1-2

coordinate systems

Cartesian 5-2Polar 5-2Smith 5-2

correlating SpreadSheet data with plots 5-17

corresponding plots

Plot Properties editor, Curve Family Plot page Fig. 5-8

Plot Properties editor, Parameter Plot page Fig. 5-10

Create 1D Plot button, Flowlines page 4-21

Create 2D Plot button, Cutplane page 4-24, 7-50

Raphael 6-3Taurus-Lithography 6-9Taurus-Topography 6-12

Create... button, Plot Properties editor 5-4

creating

1D plots 4-212D cross-section, Raphael 6-32D cross-section, Taurus-Topography 6-11flowlines 4-18follower plots 4-36, 7-25labels 7-18lines 7-18partial 3D view, Taurus-Lithography 6-9partial 3D volume, Raphael 6-4partial 3D volume, Taurus-Topography 6-12plots 4-1, 5-2

curve family plot

creating 5-2displaying 7-37

Curve Family Plot Chooser 5-7, 7-38

X Variable as V(Drain) and Y Variable as I(Drain) Fig. 5-7

Fig. 7-38Curve Family Plot page

Plot Properties editor 5-6Plot Properties editor Fig. 5-7, 7-38

Curve Plot Chooser 5-5, 7-30, 7-37

Curve Plot Chooser Fig. 5-5, 7-30

Curve Plot page

Plot Properties editor 5-5, 7-29Plot Properties editor Fig. 5-5, 7-29

curve plots 3-3

curve family plot 5-2displaying 7-28editing and deleting 7-37histogram plot 5-2parameter plot 5-2scatter plot 5-3

Cut Above Plane checkbox, Cutvolume page 4-23


cutline ID, Plot Description window 4-9

cutline options button, Cutline page 4-25

Cutline page, Plot Cut Controls window 4-25

cutline tool 3-3, 4-7, 7-14

Raphael 6-3Taurus-Lithography 6-9Taurus-Topography 6-11used with 3D to 2D plots 7-52

cutlines

defined 3-3modify existing 4-26options 4-25

cutplane

button See plane button 6-3defined 3-3

Cutplane page

Plot Cut Controls window 4-24Plot Cut Controls window Fig. 4-24Plot Cut Controls window, Raphael 6-3Plot Cut Controls window, Taurus-Lithography

6-9Plot Cut Controls window, Taurus-Topography

6-12cutvolume

button See volume button 6-4defined 3-3

Cutvolume page

controls 4-23Plot Cut Controls window 4-23Plot Cut Controls window Fig. 7-46Plot Cut Controls window, Raphael 6-4Plot Cut Controls window, Taurus-Lithography

6-9Plot Cut Controls window, Taurus-Topography

6-12Cycle toggle, Flowline Glyphs dialog 4-22

TV 2005.10 Index-3


Ddata

exporting 5-17formats, TV1D 5-20importing 5-17loading 5-2

Data menu, main window 2-3

data tables

deleting 7-41saving 7-36working with 5-14

Data Tables window 5-16, 7-42

Fig. 7-42four mos files and parameter.data file loaded Fig.

5-16default preference 8-25

Delete button, Plot Properties editor 5-4

deleting

data tables 7-41editing a curve plot 7-37plots 7-23

dependent variables 5-20

Depletion Edges, Junctions page 4-16

dev_rate field 6-8

dev_time field 6-6 to 6-8

disjointed graph 5-21

display bar

buttons, using 4-2, 7-4defined 3-3

display buttons

axes 4-3, 6-3bounds 4-2, 6-3edit 4-2fields 4-2, 6-3mesh 4-2, 6-3P/N 4-3plane 4-3, 6-3, 7-48region 4-2, 6-3volume 4-3, 6-3

displaying

curve family plot 7-37curve plot 7-28evolving resist surface, Taurus-Lithography 6-6fields 7-9isosurface, Taurus-Topography 6-10parameter plot 7-39regions 7-7specific regions 7-8

Duplicate button, Plot Properties editor 5-4

Eedit button 4-2

Edit menu

Clear option 7-19main window 2-3option, using 4-32

Edit Plane... button, Flowlines page 4-19

Edit... button, Plot Properties editor 5-4

editing

curve plot data table with SpreadSheet 7-32deleting a curve plot 7-37

editors, Plot Properties 4-10, 5-3, 7-9

empty Taurus Visual main window Fig. 7-1

evolving surface as a volume, Taurus-Topography 6-11

examples, command 8-26

executables 3-1

exporting data 5-17

FField Range

changing 7-12controls, Fields page 4-12panel, Fields page 7-12

Field Range controls


FieldLegend 7-12

fields

dev_rate 6-8dev_time 6-6 to 6-8displaying 7-9layer_index 6-8Material 6-11pac 6-7pac_peb 6-7Time 6-10, 6-11

fields button 4-2, 6-3

Fields checkbox, Regions page 7-9

Fields list 2-3, 4-4, 4-13

Taurus-Lithography 6-6Taurus-Topography 6-12

Fields page

Index-4 TV 2005.10


Plot Properties editor 4-10, 7-9Plot Properties editor Fig. 7-11scalar controls 4-12vector controls 4-13

File Chooser 7-28, 7-43

Fig. 7-2, 7-28Filters-.ivl/data Fig. 7-28

file loading, 2D 7-2

File menu

main window 2-3Taurus Visual main window 4-1

file mosfet.tdf loaded into plot page Fig. 7-43

Fill checkbox, Fields page 4-12, 6-6, 7-11

Flowline Field list, Flowlines page 4-18

Flowline Glyphs dialog 4-21

Close button 4-22Color 4-22Cycle toggle 4-22Fig. 4-22Reset button 4-22Run toggle 4-22Scale text item 4-22Show Glyphs checkbox 4-22Step Size slider 4-22Steps text item 4-22

flowlines

creating 4-18electric field, isosurface showing glyph trace

markers Fig. 4-18Flowlines page, Plot Properties editor 4-17

follower plots 3-3

action rules 4-37actions, causing 4-36creating 4-36, 7-25tutorial 7-24using the Tools bar 7-26

Full Colormap checkbox, Fields page 7-12

functions, SpreadSheet 5-18

fundamentals, Taurus Visual 2-1 to 2-4

fundamentals, tutorial 7-1

GGeneral page

Plot Properties editor 5-3Plot Properties editor Fig. 5-3

glyphs, animation 4-21

graphical user interface conventions 1-2

GUI conventions 1-2

HHelp button

Page Layout window 4-33Plot Description window 7-3

Help Contents 3-2

Help menu, main window 2-3, 3-2

help, online 3-2

Hide Selected button, Probe Tool window 4-6

Histogram Plot Chooser 5-10

Histogram Plot Chooser Fig. 5-11

histogram plot corresponding to Plot Properties editor Histogram Plot page Fig. 5-12

Histogram Plot page

Plot Properties editor 5-10Plot Properties editor Fig. 5-11

histogram plot, creating 5-2

History menu, File Chooser 7-2

II(Source) data points plot, Curve Plot page Fig. 7-32

i,j cell, SpreadSheet 5-16

importing data 5-17

Inactive Factor Data (if) 5-20

Inactive Response Data (ir) 5-20

independent variables 5-20

installation procedures 3-1

Interact ModeView menu 4-33Wireframe or Surface rendering 4-33

introduction 1-iii to ??, 1-v to ??typographical conventions 1-vi

Isoline slider, Fields page 4-12

Isolines checkbox, Fields page 4-12

Isosurface toggle, Fields page 4-12, 6-6

JJunctions page, Plot Properties editor 4-16

Kkey terms 3-3

TV 2005.10 Index-5


keyboard accelerators 1-3

Llabel tool 4-7

labels, creating 7-18

layer_index field 6-8

Line checkbox, Fields page 4-12, 7-11

Line Editor window 4-8, 7-20

Line Editor window Fig. 4-8, 7-21

line is selected Fig. 7-20

Line Style button, Line Editor window 7-20

Line Style Chooser 7-20

Line Style Chooser Fig. 7-21

line tool 4-8

lines, creating 7-18

listing of typical TIF .ivl file Fig. 5-22

lists

Fields 2-3, 4-4, 6-6Flowline Field, Flowlines page 4-18Map to Field 6-3 to 6-11Map to Field popdown, Fields page 4-12Map to Field popdown, Flowlines page 4-18Materials, Materials page 4-15Parameter-Value, Parameter Plot Chooser 7-

40Regions, Materials page 4-15Regions, Regions page 7-8X Variable, Curve Plot Chooser 7-30X Variable, Parameter Plot Chooser 7-40Y Variable, Curve Plot page 7-30Y Variable, Parameter Plot Chooser 7-40

Load Commands 4-10, 4-26, 4-38

loading

2D file into Taurus Visual 7-23D structure plot file 7-43data 5-2initial display of Raphael data 6-2initializing Taurus-Lithography 3D Planar AAM

data 6-5initializing Taurus-Topography 3D data 6-10simulator structure files 2-1two plot files 7-24

Mmain window with four plots Fig. 2-2

managing page layout 7-16

Map to Field checkbox, Fields page 4-13

Map to Field popdown list 4-12

Fields page 4-12Flowlines page 4-18Raphael 6-3Taurus-Lithography 6-8Taurus-Topography 6-11using 6-8

Material field 6-11

Materials list, Materials page 4-15

Materials page, Plot Properties editor 4-15

Max slider, Range control 4-11, 6-8, 6-11

menu conventions 1-3

menus

History, File Chooser 7-2main window 2-3Mesh, Flowlines page 4-19Plot 7-2View 4-32, 7-16, 7-26

mesh button 4-2, 6-3

Mesh pulldown menu, Flowlines page 4-19

mesh, defined 3-3

message line 3-3

Message Line, Taurus Visual main window 7-5

metal1.tif file loaded Fig. 7-3

Min slider, Range control 4-11, 6-8, 6-11

modes

Column Major 7-17Row Major 7-17Row Major Fig. 7-24Stack 7-16Stack Fig. 7-17unzoom 7-7

modifying existing cutlines 4-26

Monochrome toggle, Fields page 4-12 to 4-13

mosfet.tdf loaded into plot page Fig. 7-43

NNodes text box, Flowlines page 4-19

OOK button

File Chooser 6-2, 6-10, 7-2Print window 7-22SpreadSheet Functions window 5-19

Index-6 TV 2005.10


one active plot and three follower plots Fig. 7-26

one-dimensional mode executable 3-1

one-dimensional plots

creating with cutline tool 7-14tutorial 7-28

online help 3-2

Options window 4-12, 7-13

Fig. 4-34, 7-13View menu 4-33

overlay button 4-3

PP/N button 4-3

P/N Junctions, Junctions page 4-16

PAC concentration distribution 6-5, 6-7

pac field 6-7

pac_peb field 6-7

page layout 3-3

managing 7-16modes 7-16

Page Layout mode button, Taurus Visual main window 7-17

Page Layout window 4-33, 7-16

Fig. 4-33moving plots 7-16Row Major button clicked Fig. 7-16

Page Setup notebook window, Page Layout page Fig. 4-38

Page Setup... button, Print window 4-38

pages

Axis 4-17Axis Fig. 4-17Curve Family Plot 5-6Curve Family Plot Fig. 5-7Curve Plot 5-5, 7-29Curve Plot Fig. 5-5, 7-29Cutline 4-25Cutline Fig. 4-25Cutplane 4-24, 6-3 to 6-12, 7-49Cutplane Fig. 4-24Cutvolume 4-23, 6-4 to 6-12Cutvolume Fig. 4-23Fields 4-10, 7-9Fields Fig. 4-11, 4-13, 7-11Flowlines 4-17Flowlines Fig. 4-19General 5-3

General Fig. 5-3Histogram Plot 5-10Histogram Plot Fig. 5-11Junctions 4-16Junctions Fig. 4-16Materials 4-15Materials Fig. 4-15Parameter Plot 5-8, 7-39Parameter Plot Fig. 5-9Regions 4-14, 7-7 to 7-9Regions Fig. 4-14, 7-9

pan tool 4-5, 7-5, 7-45

panels

Cell, SpreadSheet Functions window 5-18Field Range, Fields page 7-12Range, SpreadSheet Functions window 5-19Show, Regions page 7-8

panning plot with region button on Fig. 7-5

parameter plot

creating 5-2displaying 7-39

Parameter Plot Chooser 5-9, 7-39

Fig. 7-40parameter.data set Fig. 5-9Parameter-Value list 7-40

Parameter Plot page

Plot Properties editor 5-8, 7-39Plot Properties editor Fig. 5-9

Parameter-Value list, Parameter Plot Chooser 7-40

partial listing of circle.data input file Fig. 5-20

Perpendicular AxisCutplane page 4-24Cutvolume page 4-23Plot Cut Controls window 7-47popup menu and resulting plot Fig. 7-47

Phosphorus bounds displayed in line style Fig. 7-11

plane button 4-3, 6-3, 7-48

plane cut in 3D plot, Net Doping contours Fig. 7-49

Plane Mesh dialog 4-19

Plane Mesh dialog 3D Plot Flowline Plane Controls Fig. 4-20

plane, 3D plots 7-48

Plot Cut Controls window 4-23

Cutline page 4-25Cutline page visible Fig. 4-25Cutplane page 4-24, 6-9, 7-49Cutplane page visible and Rotate Plane controls

visible Fig. 4-24

TV 2005.10 Index-7


Cutvolume page 4-23, 6-9, 7-46Fig. 7-46visible and Rotate Plane controls visible Fig.

4-23plot results of Z-Distance at 0.6 Fig. 7-50plot results of Z-Distance at 1.8 Fig. 7-51

Plot Description window 4-9, 7-3

Fig. 7-3for selected 2D structure plot Fig. 4-9

Plot menu 7-2

controls, using 4-8main window 2-3Taurus Visual main window 4-8

plot of data tables with V(Drain) and I(Drain) variables Fig. 7-39

plot page 3-3

main window 2-1order, stacked view 4-33Row Major mode Fig. 7-24Stack mode Fig. 7-17

Plot Properties editor 4-10, 4-18, 5-2

Axis page 4-17, 5-3Axis page for 1D cutline plot Fig 4-17Curve Family Plot page 5-6

Fig. 7-38showing all four mos_breakdown... data Fig.

5-7Curve Plot page 5-5, 7-29

Fig. 7-29showing mos_breakdown 0_0.ivl Fig. 5-5

Fields page 4-10, 6-6, 7-9displaying Phosphorus field Fig. 7-11showing scalar contours controls for 3D plots

Fig. 4-11Flowlines page 4-17Flowlines page main flowline controls

Fig. 4-19General page 5-3General page, Plot Type Curve Plot selected

Fig. 5-3Histogram Plot page 5-10Histogram Plot page Fig. 5-11Junctions page 4-16Junctions pages Fig. 4-16Materials page 4-15Materials page visible Fig. 4-15overview 5-3Parameter Plot page 5-8, 7-39Parameter Plot page with parameter.data

loaded Fig. 5-9

Regions page 4-14, 7-7 to 7-9selected regions and corresponding plot

structure Fig. 7-9Transparency at 0.5 Fig. 7-54visible Fig. 4-14

plot results

mesh button on Fig. 7-4region and plane buttons on Fig. 7-53

Plot Status Line 2-3, 3-4, 4-1, 7-2

plot types 2-2, 5-1

plot update with Fields off Fig. 7-10

plots

1D, creating with cutline 7-14components, showing, or hiding 2-3controls 2-3creating 2-2, 4-1, 5-2deleting 7-23display options 4-33frame 3-3ID 2-3, 3-3, 4-9order 3-3placement on plot page 4-32type 2-2, 3-4

Polar coordinate system 5-2

preference, default 8-25

Preserve Aspect Ratio checkbox, View menu 4-33

Print button, Print window 7-22

Print Command text box, Print window 4-38

Print Plot Background Color checkbox, Print window 4-38

Print to File checkbox

Print window 4-37, 7-22Print window Fig. 7-22

Print What option menu, Print window 4-38

Print window 4-37, 7-22

Page Setup... button 4-38Print Plot Background Color checkbox 4-38Print to File checkbox on Fig. 7-22Print What option menu 4-38Printer text box 4-37

printing plots or saving to a file 4-37

probe tool 4-6, 7-13


Probe Tool window 4-6, 7-13

Fig. 4-6Hide Selected button 4-6plot reflecting data at cursor point Fig. 7-14

Index-8 TV 2005.10


properties

Ambient 4-14Specular 4-14Transparency 4-14

purpose of Taurus Visual 1-1

RRange controls, Fields page 4-11

Range panel, SpreadSheet Functions window 5-19

Raphael 6-1

creating 2D cross-section 6-3creating partial 3D volume 6-4loading and initial display 6-2sram results using Taurus Visual region button

and rotate tool Fig. 6-2Redo transform control, View menu 4-35

region button 4-2, 6-3, 7-7

region, defined 3-4

regions

displaying 7-7displaying specific 7-8selecting 7-7

Regions checkbox 7-8

Regions list

Materials page 4-15Regions page 7-8

Regions page

Plot Properties editor 4-14, 6-3, 7-7 to 7-9Plot Properties editor Fig. 7-9

related publications

TCAD Products and Utilities Installation Manual 1-vi

Relative toggle, Cutline page 4-25

removing and adding columns, SpreadSheet 5-18

Reset button, Flowline Glyphs dialog 4-22

Reset Transform, View menu 4-35, 7-26

resized window

displaying three squared plots Fig. 7-52displaying two square plots Fig. 7-15

restricting rows 5-17

results of Perpendicular Axis menu with Z Axis and X-Rotation slider set to -50 degrees Fig. 7-48

Rotate Plane checkbox

Cutplane page 4-24Cutvolume page 4-24Plot Cut Controls window 7-48

rotate tool 4-5


round-off error 6-9

Row Major button

Page Layout window 7-16Page Layout window Fig. 7-16

Row Major mode 7-17, 7-24

Row Major mode Fig. 7-24

rows, restricting 5-17

ruler tool 4-6

Run toggle, Flowline Glyphs dialog 4-22

SSave Plot State 4-38, 4-39

saving data tables 7-36

saving to a file or printing plots 4-37

scalar controls, Fields page 4-12

Scale text box, Fields page 4-13

Scale text item, Flowline Glyphs dialog 4-22

scatter plot, creating 5-3

select File‘Save menu item Fig. 1-3

select tool 4-4 to 4-36, 7-7

select tool used for starting points 4-21

Selected Cells button, SpreadSheet Functions window 5-18

selecting regions 7-7

Show checkboxes

Bounds, Regions page 4-14Fields, Regions page 4-14Mesh, Regions page 4-14Regions, Regions page 4-14

Show column box

Curve Plot page 7-30on curve displayed Fig. 7-31Plot Properties editor 5-4

Show Field checkbox, Fields page 4-11

Show Field popup menu, Plot Cut Controls window 7-50

Show Flowlines checkbox, Flowlines page 4-19

Show Glyphs checkbox, Flowline Glyphs dialog 4-22

Show Legend checkbox, Fields page 4-11, 6-6, 6-11

Show panel, Regions page 7-8

Show Plane checkbox, Flowlines page 4-19

simulator structure files, loading 2-1

simulators

TV 2005.10 Index-9



sliders

Isoline, Fields page 4-12Max, Range control 6-8, 6-11Min, Range control 6-8, 6-11Step Size, Flowline Glyphs dialog 4-22Z-Distance, Plot Cut Controls window 7-46

Smith coordinate system 5-2

Snap to Mesh Node checkbox, Probe Tool window 7-14

source, drain, and gate regions rotated into view Fig. 7-44

Specular property, Regions page 4-14

SpreadSheet 5-1, 7-32

Fig. 5-17correlating data with plots 5-17mos_breakdown 0_0.ivl data Fig. 7-33working with 5-14

SpreadSheet Functions window 5-18, 7-34

SpreadSheet Functions window Fig. 5-19, 7-35

Stack button, Page Layout window 7-16

Stack mode 7-16

starting points

2D line 4-203D isosurface 4-193D plane 4-19

starting Taurus Visual 3-1, 7-43

Step Size slider, Flowline Glyphs dialog 4-22

Steps text item, Flowline Glyphs dialog 4-22

structure plot 3-4

Style... button, Fields page 4-11, 6-6, 6-11

symbol at data point is filled Fig. 7-33

Symbols column box 7-31

Symbols column box on and corresponding plot Fig. 7-31

TTaurus Visual

executables 3-1follower plots tutorial 7-24fundamentals and basic usage 7-1one-dimensional plots tutorial 7-28purpose 1-1starting 3-1, 7-1Taurus WorkBench, using with ?? to 9-3

three-dimensional plots tutorial 7-43tutorial 7-1 to 7-54using 4-1 to 4-38

Taurus Visual main window 2-1

Fig. 7-1metal1.tif file loaded Fig. 7-3plot page Fig. 7-29

Taurus-Lithography 6-4

.tdf file surface at 6 seconds and 1 minute Fig. 6-7creating 2D cross-section 6-9creating partial 3D view 6-9displaying evolving resist surface 6-6displaying other latent image fields 6-7loading and initializing 3D Planar AAM data 6-5using Map to Field 6-8

Taurus-Topography 6-10

creating 2D cross-section 6-11creating a partial 3D volume 6-12displaying an isosurface 6-10evolving surface as a volume 6-11example profile with cutplane plot at 0.9 minutes

Fig. 6-13example profile with cutplane plot at 1.2 minutes

Fig. 6-13loading and initializing 3D data 6-10using Field Contour controls 6-8, 6-11

Taurus-VisualTaurus-WorkBench, using with 9-1 to ??

TCAD Product and Utilities Installation Manual 3-1

TCAD Products and Utilities Installation Manual 1-vi

TCAD TIF format for I-V curves 5-21

TDF files 2-1, 3-4, 4-1, 6-5, 6-6

Technology Data Format (TDF) 2-1

Technology Interchange Format (TIF) 2-1

text boxes

Nodes, Flowlines page 4-19Print Command, Print window 4-38Printer, Print window 4-37Scale, Fields page 4-13

Text Editor window 4-7, 7-18

Text Editor window Fig. 4-7, 7-18

text items

Scale, Flowline Glyphs dialog 4-22Steps, Flowline Glyphs dialog 4-22

three-dimensional executable 3-1

three-dimensional plots, tutorial 7-43

TIF files 2-1, 3-4, 4-1

TIF format for I-V curves 5-21

Time field 6-10, 6-11

Index-10 TV 2005.10


toggles

Absolute, Cutline page 4-25Cycle, Flowline Glyphs dialog 4-22Isosurface, Fields page 4-12, 6-6Monochrome, Fields page 4-12 to 4-13Relative, Cutline page 4-25Run, Flowline Glyphs dialog 4-22

tools

cutline 3-3, 4-7, 6-3 to 6-11, 7-14label 4-7line 4-8pan 4-5, 7-5, 7-45probe 4-6, 6-3 to 6-12, 7-13rotate 4-5, 6-2 to 6-10ruler 4-6select 4-4 to 4-36, 7-7zoom 4-5, 6-3 to 6-11, 7-5

Tools bar 2-3, 3-4, 4-4

top view of source, drain, and gate regions Fig. 7-45

Transform Editor window Fig. 4-36

transparency controls, 3D plots 7-53

Transparency property, Regions page 4-14

tutorials

follower plots 7-24fundamentals and basic usage 7-1one-dimensional plots 7-28three-dimensional plots 7-43

TVgetting started 7-43using with Taurus WorkBench 9-1, 10-1, 1-1

TV commands 8-1

command definitions 8-3startup file 8-2syntax conventions 8-2

TV1D data format 5-20

TWB SpreadSheet 7-37

two plot files, loading 7-24

two-dimensional mode executable 3-1

typographical conventions 1-vi

UUndo transform control, View menu 4-35

undoing transformations and using the tools 7-44

unzoom mode 7-7

updated plot displaying

new curve Fig. 7-36three curves Fig. 7-41

updated Plot Properties editor

Curve Plot page, mos_breakdown 0_0.ivl data table Fig. 7-30

Parameter Plot page, dose parameter values Fig. 7-40

using

cutline tool 7-14display bar 4-2, 7-4Edit menu option 4-32Field Contour controls, Taurus-Topography 6-

11pan and zoom tools 7-5plane display, 3D plots 7-48Plot menu controls 4-8probe tool 7-13Taurus Visual 4-1 to 4-38tools and undoing transformations 7-44Tools bar for follower plots 7-26TV with Taurus WorkBench 9-1, 10-1, 1-1View menu option 4-32

Vvector controls, Fields page 4-13

Vector panel in Plot Properties editor Fields page for 2D plots Fig. 4-10, 4-13

View menu

Fig. 4-32Interact Mode 4-33main window 2-3option, using 4-32Options window 4-33Page Layout window 4-33, 7-16Redo transform control 4-35Reset Transform 4-35Reset Transform option 7-26Taurus Visual main window 4-32Undo transform control 4-35

visualizing the structure layers 6-8

volume button 4-3, 6-3

volume, 3D plots 7-46

Wwindow buttons conventions 1-2

windows

Curve Family Plot Chooser 5-7, 7-38Curve Family Plot Chooser Fig. 5-7, 7-38

TV 2005.10 Index-11


Curve Plot Chooser 5-5, 7-30, 7-37Curve Plot Chooser Fig. 5-5, 7-30Data Tables 5-16, 7-42Data Tables Fig. 5-16, 7-42File Chooser 7-28, 7-43File Chooser Fig. 7-28Flowline Glyphs 4-21Flowline Glyphs Fig. 4-22Histogram Plot Chooser 5-10Histogram Plot Chooser Fig. 5-11Line Editor 4-8, 7-20Line Editor Fig. 4-8, 7-21Line Style Chooser 7-20Line Style Chooser Fig. 7-21Options 4-12, 4-33, 7-13Options Fig. 4-34, 7-13Page Layout 4-33, 7-16Page Layout Fig. 4-33, 7-16Page Setup notebook Fig. 4-38Parameter Plot Chooser 5-9, 7-39Parameter Plot Chooser Fig. 5-9, 7-40Plane Mesh 4-19Plane Mesh Fig. 4-20Plot Cut Controls 4-23, 7-46, 7-49Plot Cut Controls Fig. 4-23, 4-24, 4-25Plot Description 4-9, 7-3Plot Description Fig. 4-9, 7-3Plot Properties editor 4-10 to 4-18Plot Properties editor Fig. 4-11 to 4-19Print 4-37, 7-22Print Fig. 4-37Probe Tool 4-6, 7-13Probe Tool Fig. 7-14SpreadSheet 5-1SpreadSheet Fig. 5-17SpreadSheet Functions 5-18, 7-34SpreadSheet Functions Fig. 5-19, 7-35Taurus Visual main 2-1Taurus Visual main Fig. 7-1Text Editor 4-7, 7-18Text Editor Fig. 4-7, 7-18Transform Editor Fig. 4-36

Wireframe 6-10

working with data tables and the SpreadSheet 5-14

XX Axis 5-5, 5-9, 7-48

X Variable list

Curve Plot Chooser 7-30Parameter Plot Chooser 7-40

X,Y,Z option menu, Cutvolume page 4-23

YY Axis 5-9

Y Variable list

Curve Plot page 7-30Parameter Plot Chooser 7-40

ZZ Axis 7-48

Z-Distance slider

Plot Cut Controls window 7-46plot result at 0.6 Fig. 7-47

zoom box 7-6

zoom tool 4-5, 7-5


zoomed view of bounded gate area Fig. 7-6

Index-12 TV 2005.10

Documents

Taurus Modeling Environment, Taurus Visual User Guidejmbussat/Physics290E/Fall-2006/TCAD... · 2006-11-02 · This manual includes details for using Taurus Visual and contains tutorials