HAL Id: hal-00256243https://hal.archives-ouvertes.fr/hal-00256243

Submitted on 22 Jul 2008

HAL is a multi-disciplinary open accessarchive for the deposit and dissemination of sci-entific research documents, whether they are pub-lished or not. The documents may come fromteaching and research institutions in France orabroad, or from public or private research centers.

L’archive ouverte pluridisciplinaire HAL, estdestinée au dépôt et à la diffusion de documentsscientifiques de niveau recherche, publiés ou non,émanant des établissements d’enseignement et derecherche français ou étrangers, des laboratoirespublics ou privés.

Swelling and optical properties of Si3N4 films irradiatedin the electronic regime

B. Canut, A. Ayari, J. Dupuis, M. Lemiti, A. Fave, S. Ramos

To cite this version:B. Canut, A. Ayari, J. Dupuis, M. Lemiti, A. Fave, et al.. Swelling and optical properties of Si3N4films irradiated in the electronic regime. The Seventh International Symposium on Swift Heavy Ionsin Matter, Jun 2008, Lyon, France. hal-00256243

"!#$%&('*),+-$./0 !12"3.45"

2 5672"89:;9" <20

=>@?BA/CED*FHGJILKM@N:> NPOQA/RTSEUMWVX> YZD*[\D]S_^G(M `a>Wbc.deSfFgS\G(MWN:> hQAXi8cGjM*kl>XmPAdnE^To

prqtsWuwvyxzvyvW|XuE~"TsW/vT(sXWL2.xu\|r./s@("sWxz.tuxv|\./s@("sWxz.tuxvlW|sXt|9Q./s r~"(:%.X ( PxLsWW(x jsXv x¡tx¢XX| /W (£]¤_¥X¦X¥ ¨§x ©LTXª sXs. £ «sW

¬ svt­|XT(X(gW­s¨~"(sW¡TªXgx©(vtx/s®jv ~"TsWTjvy(gxuJjvfxLsW("sx@(guJxvy­|9XW(ªXtX¯sXT|2°5H(ªWX(vy xLgl|²±³2.uxL¢.­|vtx´(g­H/sX|XsWuJT­(vX~"s.uwv tX(vWuJ("s@xµ2(guJxzv|²\.sW(sWxµ2(guJxzvy

lW|XH(sX«t|9r.s r~"W(¶X· ¥¸T 2P«xs.9WxL(svyxL¡tx©¢.­|Xz X £]¤¥ ¦¥ X§x© jXtªXTssX £ t(s@T

¹3ºr»«¼½X¾5¿W¼

Wx x©Ts¸sWxLv Àx|".tuX¡ Á BsXÂv©Wx(¯sW(uuÃ(À|(ÄXXuÅxzv «|¸suÅx©©xµ/s<Ã(¡t(guª<©Ã%ÄXguJuÀWt(XTZx(Æ.(ÄWX"|XjÄWuJxzvfxLsÇy\±5²§ "È TsW|x_t«| xL(vy|:jvÉÊ~"qÂÃ"xLv&±8ªxsWuP¡ X &(§ËWÄ&vyÌZÍWxPX¡tW(sXTBX¡ ÁZÎ Ï ÐQÆPÑÓÒÕÔWÊu­uJWÃsxLs¨ÄXgjWxuÃ"t¯¸v WuÕBxt|Xxjvfxs4/sW|XxLv x/sWuW(XT_«(v txÖ«|Zª/ÄXg(|2<xsWsv]Jvg/sWxBuJÃ"xLsX ¤ |XísÇ_W×*Ø T¦ ÔÚÙP¯X(§PÔ s ÑÏ È WÆ«|¸vt<|(PBtvtxLs<(s.|Z¡t_Pvtx2s<X¡jvyX(ªW vT¯XuxLsWx Ð ~"ÛÕÔqts®vyW­ÄXÀTuJsv8uÀv©.|/BÃ""xs2uwv x(vy|B/v .(E|Xxjvfxs ¤ xsX|.(«|¸T¡_¡y/vtu xz¯./v@X¡ÄWsXPuJÃ"( ©xsWZ«sX|À(¡tjvfx@¸xÚsX|XjÍÜ|(g(uÕÔ £ g/aÄ tX¡x ©<Jv©@uÀvt(ÄWxvtu­«u¨L.®Æu¨ZsXËÃ"TÀ<(«uwXg(|¡tluJ(PÄWTu¨x_|Xxjvf(|jv\vyXBxLXuwvQ¡tLWsX(u"ÇÝ Ï Ð ( ÑÚÒ È Ô £ À7Ävtx(\uÀÄWTjvtXuÕÄW vtX<xLsxLBXÞÀ¡tjvtx@xv©¡v @²v Wjv@x uruÕxL¡©vt«|9vyÃ(g|uEv.­WxzBÃ@jsXv@u\jv³xLsWÆyuxsW"¡WTsW(uÔßE.uJtuÀWzvfu@xL|Xjs.¨(sTPxLvsvQ|(t«uJ"¡\|WjsWuxàv<Ts|Zt¡tjvfxz2BxLsX|X(Íxsx_«|WxzTv«|Wx Ð ~ Û ÔXÊ|X|Wxvtx/sXÆ<(«uwXgj<(svyuÅÆÄWT_¡y2<|¨ª ©xÄWuÕ<jv f2/g­xLsP¡tW©TXt(<jsvWÃ"xLv ¨v Wx©uQxzsvy(tÄXtjvyjvfxLsÔ

á@â"ãåäæW¥E ÔL·Ô u ¥E Ô /Ô £ ¡ ¥ ·XÔÚÙ³Ô ±8u

ç"ètéBêlë ìÀíXîæ qtÀÆ|XxvtxsWux x(s¨s@xvgx|X«/uJÃ"« xsXW/ÄXvyxTÄXt/ÄW(vyx©Tu(Ô

ï H_tuÀÄW/s.|XxzsX"Tv©.wÔß\fÔ.ð(ñ8ÙÙ Á Á Ù®·ÆBÙ Á ­£ jÍðñ8ÙXÙ Á Á Ù¸·Ù

ííWìwèîÕî ðªX s. ÔÓsXv xLsWuw ¤ LXsÔÚ¡

Ù

. vy7xvtu-¡©TWWªW <((XTsWx(«©&TPx©(«ÌTsX| Ävtx&ÄXg/ÄW(vyx©Tu&uJx x©TsËsWxzvytx|X ¡yxsW|Xu%¸«s

TÄÄ@xT(vyxsulxLsP<x©(t/µ/vsWxu(Ô £ QxzsWuÀvs./«.v Xx urP(vytx«5T(s4uJ(Wulvt"|Xx©T(v©gx©"xs<¡tx|Z¡¡g((v

v t(s@uJx ugvygu QuZ&X.:uwv 2«X:L(.ÆxLs s.s ¤ WXjvfx©L&P(®2tx (u QuZ&ªX«_gxÆ¡X¨<Xx©uÀv XÀ2|/ÄWsv|XxL¡t¡WuJx /sÙ uP(ssXvyxt(¡tjvtxµs«(vyxzsX¡tÄW/v .Xzvyx&T©u Á Ô8Ê­<XsXÌvWsXPtWu

vyXsWxL¢XuÃWxj< ©Ã%v©W"|ÄWXuÕxzvfxLs¡]ux x©T/s<sWxµvytx©|X¡tx©L<u2Ã"X(2¨WXuJsXÃ ¤ Ä tuÕuÕXÀ"jWPx(« ¤.(ÄWX ¤ |XjÄWuJxLvtxLs Ç©\±*r§ "È ÃWx j Ä tuÅ(svyu v X |/.(svy( ¡aÄXÀuÕuxsW u vyXxj@xLXPjvytx© TsX|

.P2sW(WuZ.x Ð ~ Û (2(ÀuBÃ"xvXx/t¡_«(vxLWxsX|XjÍ© Ô /uÀÄ@xvxvyu®¡Xs.|2TPs2v Hxs2vÆt«u vlTsX|&v©.

Ä./vsXvxQ(ÄÄx((vyx/sWuBxLsX.Xz.|X³vyXZguwÄWsXuÅ¡lu(x x©T/s:sWxvtx©|¸vt:uwÃ"x¡vHT(xsxL_t|XxjvfxsÜÀ(PxÚsWuuÀvtx©*©xLvvtLBuwvyX|x©T| WjÍW«jÄv]xsPv.BuÅB¡EPuxLsWXB(.u vy ©xLsW9v Wjv ¥ ÔqsBÄWt(Wx©XulÃ"2¯© Ã"¨X(2

j2x|(s./T||P(.ZvtxLssX|¡t_Pvtxs:X¡jvfjXTªW®v t¯Xu"xsÜ(<ÄWWu®@x Ð ~"Ûl(.tu"| ÄXWuJxvy|/s

uÅx©x/sªZ\±8r§ ÔXßE.BxL ¡EvW"Ä tuÅjsvåu v X|ëuvtTBÄ@LPs2v8vTuJxzs@Tuwvyx(vyxsWu­ªuÀv©.|..xsX

/v XT5Æ|Xxvtxs ¤ xLsX|WT|¨T¡_¡y/vtuQ©xL¯Wl/v³¡ Ä@LsXuwÃ" xLsX"sX|"tÆ¡ _«(vyxzWxs.|XjÍPÃ"txLsX Ô

"!#%$&'($)*+#,&$ %,$

ßE.Zuwv ©vtxLsXÜuÀXªWu vtvtTu9Ã"(gZQÖ ¤ ÀÃs~#vXÄW 2x©Ç È Ã"¡tuÃBxvy&ZtuJx u vfxµ@xv Ü¡≈

ΩÔ Ô*Wx ©xs

sWxLv©gx|¨¡yx©ZuÃ"(gÄXÀÄXt|<xsZs4xsW|/Wuwv gx«2v©ÄW98±8r§ t««v\ªPWuxsW®vztTjvtx/s4¡\|XxvtT|ZuÅxsX

Ç_@x.- Û0/ ÊØ 1 È Ã"xLv®/sWx Ç~2- Ð È jvvPÄXT_vXg¶¡&·3Õ4©· ÔÊt|XxLsX-v -ÄXg¡tx©P(vt

<(«uwXgj<(svyuBTsX|3²2vWT¡tÀ|:ªX¯u(v©vy(gxs uÕÄXjvyt2®jv©eÇ©" È 5v ¡x L v @xƯsWTuJuBs.|xzvyuP|TsXuJxv Ã"(g Á sX TsX|ÙÔ WÔÚ( ÑÓÐ tuwÄWTjvtxLX«zWÔQß\X:uwPÄ.©TuZÃ"(À:xLt|XxvtT| Ã"xLv±ª x©sXuZX¡ X Ìej§

«((tvtT|®Tv vyX­q" ª.ÆT<©xs.¨¡8ÉÊ~"qT( (tjvy8xs<TsZÇ £ sWT È ÔÊX|WxsW¨vy4­q©eXX ¥T|X5 ¦ .v @­ (vt/sWx­TsW|BsXLT8uwvÄÄWxLsXBÄWÃ(tuQ(vvWlsWxzv gx©|uÕX¡­Ã"(g¨ × Ø «¦ ÔÚÙB¯X§PÔ sXPÑLÏs.|

6®Ø ÔÓÙX¯Xj§PÔ sX ÑLÏ ltuwÄWTjvtxLX«zWÔHßåW:¡.(sWTuZsXX«| ¡g 7¨vf Á Î ÏÐ ÑÒ 2s Î T Ò

xLt|Xxvt|<uwXÀ¡ ¨TsW|¸vWBxLt|Xxvtxs¡yÍÃÆu­x<xàvf|®vy 7 ( ÑÓÒ ÔÚu ÑLÏ xsÀ|ÆEvyZ(2Xx|Zs24/W W(jvfxLsX

Á¡v @ vy(tX(vyu(ÔßE. |Xxjvfxs ¤ xsW|X(| |XxuJt|X:Ãu-xs@(uwvyx(v |aª £ 2Xtx (v«sWuJ¡X xsW¡_«À|

uÀÄ@(jvytXuÕ/Ä3Ç £ ß]q È WuxLs &/.ÄW(jvy_X WZ±*(t¯XxsH<ÆuÀÄWjv g/ÄW/v®jvy(ÄX(vyxsX:xLsvyX<ÙX( ÑLÏ ·ZT ÑLÏ ÃTW(sXXBª.EtsXXÔXXÃ"©xLsX<(¡t¡ÀvtuÃ"(g¨j@xµ|Xjs.(|Z¡ttX#uwvy(Ä<Xx/Xv*<(uÀXg(P(svtu

ª.jvÃ/svW<xL_|XxjvyT|ÖsX¸TsX|¸ÄXgxuwvyxzs.¸t«WuJxLsX®ßrsW(XTÊÄXXuÀvĸÄXt¡yx© ZvTwÔWqts:À|(rvf

uÀv©.|/#vW xsW¡W(sXT ¡x /s˪.BªXt|<sv:s#v XÂt¡_«(vxLW xLsX|(Í ¡@x Ð ~ Û ZÃ"1X(2 T/ªxsWT|

ÄXg¡tx©Pjvyf Ç_|Xjvy(t<xLs vtxLs ¡#v ¡tx vWx(¯sWuÕu «¡©v x©À|XxL(vyx /s È Ã"xLv /Ävfx(ÂÀ(¡tjvfxµ2xv

<(«uwXgj<(svyuBxÚs3v .¸XX s ÃW«©s v tTs ./Ô*ßEWx uBL(vvTvys@xL¢XZëu9ÄWTÀ¡X<(|&WuJxLs&QPªX| ¦ B±8(t¯XxLsHLZHuÀÄXjvytÄ..v XPjvy(ÕÔ@ßEWB/ÄvfxL8(XvTÀxLÖjvfxLsXu­Ã"TÀBTXBÄW(<jsvy|Zª

xzÄ.uJP(v gxl<ÆTuÕXÀTPjsXv u\WuJxLsX"TªWxLs ­.s§"qÕ\uÕÄXT(v©guÅ(ÄWx©xLÄXuÅPjvy(ÕÔ

$ + *, ,

í ë! í#"#$TèjíBíLî ëìwíWèTì íîÅêè % '&

ßE.xLsX¡t/t|&ª.uJtÄvxsªWsX|XuBuÅtxzªW«|3v Wx ¤ ~ ª.sX|XxLsXXuP«(Ä&vyX Á XÆÑLÏlÃ(W(sXXªX

sX. ÔWÊ¡vt(QªXuJxLsXPuwªWuwv _«(vxµs¡g#vWB_Tà £ ß]q1uwÄWv2vyWj«t®ÄW /v©vyT|xs¡txXg ª.(¡gÀ

TsX|%¡vf(x©À«|WxzTvxsÔßE.|(g(«uJ¡PTªuŪXsXTe2tuwXuv W¡WTsXΦ

xsW|Xx(vtTu3|u vyWjvtxµs%2¡

sWxLv©tWsaªW/s.| u¶u%ÂÀuJWvX¡x /s ª.2BªXTg|P(svtÔß\XÂt|WxL(vyxs ¤ xsX|.(| | xµuJg|(xs Wx Ð ~ Û Ã"u

|jvy(_<xsXT|¨¡_g vyWgvtxL.</sv( ¡5g(P«xsWxLsX¸@x ¤ ~%ªW/s.|XuåvXxLW(sP¡tWsWT/ÔßEWxu\ÄX<jvy(*Ãu|(¡txsWT|¨u ÃWt¨q)H(s@|4qHg¨v©WBTtP¡åvyWBªXuÕXÄ2vyx/sªXs.|«ÀuÕÄXs.|XxzsXZvyZv W9@xL_.xs

TsX|xt|WxL(vy|ev .«vytuwÄ.jvtx2zWÔ £ xLWt& ÜuJXÃBuBvX:(.XLvtx/s ¡( @TÀuÕWu¸vX&¡tL@(sXΦÔQßE.x©u

¯.xsXvtx(uPjÍ.WxLªWxzv uBt(Ä@xL|:|X(g(TuJ¡*( v©Ã ¡y©X(s.uPÇ,+ ÏÒ ÑÚÒ È ¡tX XÃT|&ª:uJ /Ä@jXTsXZ(v

xLsXv Z«|Xxv­¡yW(s.(uÇ+& ÎP ÏÒ8ÆPÑÓÒ È sW|BªB¡tXfvyX(8|XTtÆ«uÕ­(v³uL2à _vt­vv W­WxX«u v@¡tWsWuJÔÊ

uÀÄXvvyÆtxsXPÄXt(uÅu­uÀÄWTÀxLBÄWXuÕ|Bv ®vyX"| xLuÅÀ|(Q(g(vtx/s4(W|¸«T/s2v*¡tQuJ.j<¨¡tL@(sWT¨|(ÄXsW|(s.(Ô

-ë2(g²v.xu XÄXvW(uxuPXuwv"ªX:_W| /v"u(ÄLPsvT%(X«jvy(gxzÖvtxLsWuWuÕxLsX XvW(t¡g|

-../

=

ªXT¯XuÅ(v©vy(gxzsWuÀÄWvXPjvy©ÜÇyl" È |Xx| s./vQj2x|(s.B(s uxzsWx¡yx©(sv]P(v tx«E uuÕu­¡©vyx_t«|Xxvtx©sÔ

£ X Ã"xzsX | TuÕÆtxÄvtx/s XxWsaxs#%ÄXgjWxWuÌÄXTÄW( vyW ¯.xsXvtx(u|XxuÀÄL(.T|#xLs ¡txXg W¶ÃuxLsXv Ä y«v (vy|"uÅu X<xLsXv©XTvXvX|XxuwXt|X(*tvtxLsPxÚsBux©x (s¨s@xvgx|XXT(Xgu]2xlªX/v P««jvysWxL­(s.|¨sXX«

ÄXgTuJuÅu(Ô(l®|X(sX/vfxLsXσ× sW|

σ68v©WtuJÄ.jvtx2(tuu ¤ uÕjvfxLsWur«uJuÕW(xjvf(|¨vy¨v©W«uJv ÃB<XsXx uwPuÃ"

XW­¡yxzv©vy|v©WjÍÄW(gxz®(sv«X|2vlªvyÃ" ¤ jÍ.ÄXsWjsvfxz«X|W((TB¡ s.jvtx/sWuð

(Ø (ÔÚjÍXÄ@Ç ¤

σ6 Ô

ΦÈ ñ4Ç ¤ (

È Ô (ÍXÄWÇ ¤

σ×ÔΦÈ Ç È

ʶWX|Bg(PTsv@2¡vW|(v ­ÃuHª2v xsWT|BªB@uJxLsX¨vyX­¡tX XÃ"xsW¨¡txLv*ÄX<jvf(gu9ð (Ø: 1&

σ×Ø3 ¥

sX Ò sW|σ6 Ø ÔÚZsX Ò ÔXßEWx u­v©vyEXÆz@BxuªX4sX"2t|XQ¡QBsxv.|¨@xL.(åv W(sZvyX¨sW(T|TPX

(guÅu ¤ uÕT(vxs¸Æur(ÆTWvT|¨ªX¨v W­.LÄP¡ vW¨Xlq© (X|­uuÀX<xsWBT/sXWsvyxs «W| xLuÕÄWTTZsv³jsW_X

Ø%Ùj§ ¡y2­v @¸v.«v²jvf/<u(Ô*Ê uws@(t/:ªWv©Ã"«js:v©W|T¸«ÄXtTuÕu(u¨@xLzÆu vtxµ s.|xsW«Tuwvyx

uÅÃ"xLsX ¤ |2Ãs(L|ZÄWuJuxLªWz¸«Í.ÄWLxLsZv©Wx u­|x©uÕt(ÄTsWjWÔ qys/vX\Ã"g|Xu.vyX¨ªXg(¯.xLsX¡@x ¤ ~ ª@/s.|Xuª

T(v©g/sWx"jÍW«xzv (vyx/sWuÄXt/ªXTªWz<XÃ"(guHvzW¨|XxuÀÄLTZTsvv XÀuÕXXL|<(sXT_.x©TuX¡\Wx sW|B~Âvt<ujÔÊ­sW/v .Æ

uÀvtx¯.xsX<sXuJT¢WsW("¡5v @¨xLt|Xxvtxsxurv.vy(tX(v8uÕÃ" xLsX ÔWvy(ÄZ./xLv*<(uÀWtPjsvfuJW||XT|Z¡gÄXg¡tx©Pjvy(uÅ((sWu«(ÀXuÕu­v X¸ªWg|TªWjvÃ(Ts vyXBÄ tx u vfxzs.¸TsW| vWBªWBªXt|XT|ÖsWTu9«t¸g(ÄWfvy|«u9

¡ sWjvfx/s¡ v W9¡yWsW(xzsP¡txLWtXªÔjßå.­/ªXv xsWT|¨¯XxsX(vyx(uuÅ(PuEvt"¡W ö ¤ uwXTÄX|BXWuwX.u vyxsX

lv©Ã"PÇtEPXt È u vtÄBÄWtX(«uJur¡t*vWvTtX(v*uÕéxLsWÔ-Ã"jWTÀvW©xL<xzvyT|BsXBªW(8X¡*|(v ÇtuJÄ.x«©ÓP(vXÃ-¡tWsWTu È (sW|¸v WBÍÄWTÀxLP(svyXs.(©v«xsvfx(ulWxzs.|X(\@u²v sX¡txL_#v Wx©ulXÄX/v .uJx ujÔ £ EvyWxug(uÅ/s@

Ã"lX(.­uJxBÄWz¡txv©vy|9v Xl¡tzWs.­j.Wvyx/sPX¡∆

ª"WuxLsX"²±5 xLuuÕsPÃWx@js"ª4ð

∆ Ø

∆

ÔÇ ¤ (ÍXÄ®Ç ¤

σ ΦÈtÈ Ç© È

ßE. uÕ(v Tvxs®W«.∆

Ø: sW<x uåW(PWx<uJxLsWTxzv³jÍ@(«(|Xus.v Wxt|P2¡Wv©@xLsxvfx« j2(vWx©T¯sX«uJu

ÇØ Á &s È Ô v Ìv XWx¡tLW(sXTu¸.uJT|Xåv WZsXX(|P(.tjvyT|xLsÌv XXs.|tz.xsXuJx x«/s

uÀXªWu vy_vt«/W|ÌÄWj&gX&xLsvW WLXZjÍ.ÄX(s.uJx/s¡lvW&x_«| xL(v|Ìv WjvÀÔ,-Ã"(.(À\ÄXg¡tx Pjvy

uÅÆs.u­ÄW(t¡XZ|sÜxL_|Xxjvf(|uJTBÄWu­¡vf(l¡XfvyW(H/ÄX©vPjvyxÚs 4¡åvyW¨sWxzvytx©|Pj.lÇWuJxLsX 1

¥2XfÔ,- £ |/WtxsX/sWW/X È |Xx|sXv"j2x|(sXTs<guÀvtÄXxLvtÔ\Êu¸sWuÕ(¢.js@T/Ev W&uwé xsX

((Xgu/sWLxs v WZ@x Ð ~ Û (.ÆÕÔXsÄXÀ@x.u­Ã"_¯.u­ .BªTjsÜ|Xj.v |ZvZv.PuJÃ xLsX¡lxLsWuÕWvguxLt|Xxvt| xzsv X/µjvts.xÌg(WxLPÔåqys vWTuJu v X|XxuQÄWÆ¡tt<|XuxsWuxsWX(.u vy ©xs@vT_.«vuHvyX

|js@uJxv©Ì©Xuu¸tuÀÄXsWuxÚªW¡t9vyW .XzX®&(ÍÄX«sXuxLsÃuZjÍ.ÄLxÚsW(|ªÜ(_.uwv ©xsW ¤ TPXÄW/WuBÄXX«u

X(sXWxLs&v W(uÕ¡/XLTsvlP(v tx«©u X ­ªX:¸vy_TsWuxvtx/s:vy3<s s. Tf.u vy©xs@u vyWjv Xt2

|(¡t(v(XÀ((vyuZxÚsv©.TuÕ¡sWs ¤ T<2ÄX.xÖªW&x/s@xLPvy(Àx u ÙX Á ÔEqtsv W ÄXt«uJ(svTuÅ/Ev X

uÅx©x/s sxÓvgx|X%j2(:xu Æzg(|/ T<_ÄX.Xu(sW| vyX¶W© Wxau vyÄ ./xLvX«X«u <(TuÕXÀT| ¡vyÆxLt|Xxvtx /s(µ|&2txXxLsXvtZ¡t vWZtL(ÍX(vyx/s3¡²vyXuwv g(uu¨(sWT_vy(|:xs&vWP¡tx©L;|XÀxsXvW¸\±³å§ ÄXgTuJu(Ô±*g¡tx©<(v©<ÄW(t¡t_P|ZÃ"xv uJsWu­LWTEvXsPv©.XuJWuJT|xLsZv©WÄXg(us/v]Ã"_¯<Ã"/W|Z 2övt

<(«uwXg4vzWZªXsW|XxzsX3¡²vyWjsXvyxguwTBÄ@L «sX|3vzXXu¨vyT/sW¡x7v©@xu¨XÄ..vzWuxLu(ÔeÀT/WTÀ5v W¡xzvvfx©sX

«(t|XxLsXP¢X(vyx/s<Çf È (|Xuåvf®uwÃ"©xLsXP(gXuJu ¤ uÕvtxLsσ

Ø ¦ Ô ÁBÎP ÑÚÏ Û T Ò ÃWx©(<x uxvvyxZTu Ã

v Ws vyXP|P(PtXuJu ¤ uÅ(jvfx/sσ× @xL<jvtsWx¨ÄXtWTuJuÕujÔWßEWx u­tu @àvåuJXÃ"uv vQs4PuJP 5ÄX©vHX¡

v WÆ|XxvtxLs ¤ xLsW|/X«(|9vy(¯(svytxª2v «u]vy9v XvW¡ÄW(sWjÍXÄXs@uJxsB¡ v @­uÅx©x(sBsWxv gx©|vT_.jvÀÔ

lèì $ è íXè $ # &Wè

£ xzXXt<Ù|WxLuÕÄWWu1vyW¸t¡ (vxLWxLv©ÜuwÄ.jvy¸gg|T|&s:@x Ð ~ Û/ 2x]v .«vyuªW(¡tg¸TsW|¡vf(lx©t_«|WxzTvxsv

|Xx¡¡t(ÀTsv¡yW(s.(uÔXqts«©\«uJuųTs(sXvyxt¡ (vxL.®ªWX(2xXlxu(Wx©|jsWT| ÔWßEWBt¡t©«jvtxLWxzv< x©u«©uÕ9vf

Ö«t®v*( Ttjvy(gx©uÀvtxL­ÃTWL(sXv©λ

Ø Á sXvÃ.(t­s<xuåv W­tÆ¡ À««vyxLWxLsX|Xj͸¡³v W­sWxvgx|XL(.(ETsW|¨v*xvtu

v @xL¯/s.uwu(ÔHÊv®xsW(tTuJxLsX xztt|Xxjvfx©/s%¡yW(s.(uJls.(Ts¶sWÆvf&uJWx¡v®¡¨vWuJÄXT(v©t&vy2ÃTÀ|XuZv.ÌWxL

Ã@©sXvtuÅxs.|x©T(vyxzsXTsxLsXtuÅ&¡­v ÄXÀ|/WjvsWÇΦÈ Ô vtÇ

ΦÈ Ô £ g v.Ä t¡tx 2Pv©<(ÆuwWt(P(svyu

|uJ(gxLªW(|TªX/W« Ã"Pªv©ÆxzsP¡tx zËv @xƯs.uJuBðXv\ØBñ∆

ÔXÊu9®sWuÕ¢/.(sX2vyXB|Xv<xLsX(vyx/sÜ2¡λ

¡gÂt/¡y©(vyxz2xzv©"«©XÃ"u]vzl|(v <xsXvtxsB¡s«À|XxLsXvvW­¡WÃ"xLsX"À«vtxsð

ÇÙ È

+

=

qys¸vWx u(ÄWÄXtTWÃ"9sW(.(vv.¨uÕP³Ã@ jsXv<|X(Ä.(sX|(sWT¨X¡*s/@(*vW_TsXX"(/@Tt(|PªBvW

λ .Xu­Ç X ZsW ¤ ÙXZsX È Ô.ßEXB(.XLvtx/s¡\sul¸¡ s.jvtxs¡EvW¨¡tL@jsW

Φx©ulÄW/v vy(|xsZ¡txXÀ Á Ô

(¡tgx_|Xxjvfxs%ÇΦ

Ø# È ­sWªvyxLsXus Ø Ô ¦ ¶Ã­@xT%xu&uÅ3vt vW:ÀÄWv«| WX¡BÔÚ¶¡X

uÀvXxxµP(v©gx©Wx Ð ~ Û ¡tx©L<u ԫʨ¡vt(8xg|XxL(vyx©/s@(v.g(¡_Æjvtx@­xLsW|jÍB¡t«©©uQ|Xís"v"<xsWxBX-.Xl2¡

Ô ¡t vyWP(ÍWxBX¡tWsWT­Ç Á¨ÎB ÏÐ ÑÓÒ È ÔßEWx©u5vytsX|X«/sW¡xtP|ª/ xÄXuÕXPjvy©WTsBªXluJTÀxLªXT|9vf

v WuJÃ"©xÚs %¡¡t(vPÃWx j xLBÄxu&|X(t«uJ¡Bv©@Ìv«X(v<|X(s.uJxzv WÔ­Êt|XxzsX¶vy vyXÃ"© ¤ ¯sW/ÃslL(WuxÚWu ¤ XuÕvvxW¡t_PW«/vWg(¡_Æjvtx@"xsW|jÍ4X¡E"|Xx ( ((v ÀxPjvf(ÀxL@/ªWj.urv.9¡tX XÃ"xsWPjÍ.ÄXt/uÕuxLsÜð

Ç ÁWÈ

ÃWt²~"xu]vyWÊ@|t¨sXBªW(gαxuåv W­vt<xÄXX(gxuJªx xzvW(;x©uEvWl<©T(W(PuÅuå«sX|

ρx©uEvtX

Pvt(gxL­|(sWuÕxzv©WÔQÊuuÕX<xzsXv Xv­v X:j2(BÍXÄXs.uJx/sXWtuZ/s@s vWªW(,|Xxtjvtxs¶Ç "È rvX

tL(vyxz2¸WXLXPX(sX.¸X¡rvyWzTXxu¨Wx@(s&ª Ô³l2s.uJT¢/Wsvtz.vWZ|XTsXuxv©ρX¡rvtX

xLt|Xxvt|W(*Ts¨ª.­|XT|X«|¨¡©g u vfjÄBW«xv@|/vlu­ð lèWTÀρ)Px u¸v.Ì|XTsXuxv©

¡W­ÄWtx©uÀvtxs.²\±³²§ @x Ð ~"Û*¡Àx Çρ) Ø4Ù³Ô Ô Æ ÑÓÐ È Ô(l|X(s./vtxLsXͨvyXgjvfxµ2­|jsWuÅxzv©

TsX|¶¨vyWtjvfx (vyW­¢X(vyxsPÇ ÁXÈ PÆ"ªWlÀTÃÀxv©vfjsulð

Ç_ È

ßE.uÕ ÄX«Zvt(gu®ÍTsX|Ì(gs./vxLs.|XjÄW(s.|(svfEuBv.«3tªW/v ¡XsWjvfxLs2¡lv W&xL_|Xxjvfxs¡WsWT.Ô

-ë2(grTÀ|XxLsXvy¢/X(vfxLsÇÀ È åv @:(XÄW«uÇyÍ2² È (Wvy|(v9(¶¡W(sXTÌ¡tt2 vyX&tuwWvtu

|XxuÀÄW(.|xLs&¡xWtuª&s.| Á <u .W| xLs/sX<uwv _«xvlxLsXBÄXuÕuxsW vz tXv XPgx.xzsÔ2ßEW¸|jvy

|XxuÀÄW(.|xLs&¡xWt Á ªtPxs&¡ 5«gPjsv]Ã"xzvyZv©@xLutxzvytx/s@jÍ@T(ÄvQxLsv WBuÅ(uX¡Ev ¨v Ã" WxWuwv

¡tW(sXTuBÇ Î: ÏÐ sW| ÁZÎ& ÏÐ Ñ Ò È ÔEqys:|W|Xxzvyx/svfvBÄWuuJxLªX ZjÍÄW(gxLZTsv«EXsXTÆ©vyxsvtxLuÅE/s.(Ts

xLsXX¯.­./txjvfxsZ¡vyW­(vyZxµ­ÄWXz«tx©uJTªXx© xv©αv*xLXP|TPX j.LurvP(ÍÄW«xLs®vzTuJ|j@xL(vyxsWu¡Õ

lÄXXg­©xÚsW((8¡xLv©vyxsXWÔ

∆+

•=

∆+

=

+−

•ρ

=

! "

##

••••====++++−−−−

$%

&&

∆=∆

"!$#&%('$*)+-,).(!/0+12"4356) +,78!$94)"):4)<;-#=!$>;#=)<?@/)ABCED;<)C$+F@/+<?)"4GIHKJMLON

P Q5R"S:+ 7) #T-U1VI)W#+C>+=4!$XC$D(;<) CYCZ!$#=C[)<#*+; ;\!$@*]+ ) CY"^Y,()_#57`:>+<#=?)a!EDb!$3b]:+<)aZc)E::^[?'

:)<+FC4?A=!*+C); #=)F+d)!$3e)f+<#?)6C)-(g57hD]ij!/klmn3!#e)o>?)<.13:>D);F)EUVI ) 3=3);-+ +<; #T4p) C

!)A#T)<:>+q+-j4!$W!3e)*r#.)F2b]#=)Z)F$I4s)A+\X5]0#!$;<)\2d)<CWZ+F@/]:t)<-UJb!@*]:5)@8) $+F#j7u)-q(]) #T^@8) $v'D24?

wO+F@+\YZ]()<;-#=!d;F!$]$7Y!$#Op)Cg?x@/) +\ZD#T) @/)F$'e+#=)s#T)<yED4#.)FCz=!x;<!03>#@A7[](!()F4 UKV|)W3=:^D); )

)-,(!:gD!!$3z) P >Q5R"SY#.)<3=#+;-jt,)~4C) q'8)-q$#=+<; )<C3&#T!$@ #.)F3=:>);-jg,t7+FC]#T!$3=:5!$@/) #j7('/A+\3=tT) C

d+ 5Z3+\; !#57x)z3#+<@8) "!#%!3 )zJb:>+FD24DX>!$v!E5)<!$#7U|=+W3D$D#T)"!$#=%'I")W]:>+F`=!x]) #=3!#@

4#=#+C>+=!E Dv4?sC33=) #T) )<:) ; #=!E4;*Z>!$]$]4?s]!") #.b+ Cs]#=!d)<;=5:t),):!$;<4>)\2'>a!$#TC$) #I!s]#.)F;42))

#=)<.!:4C3!#d")<:5:g0?+FC!.DCE7)43=:4D)-(;)!3)C$+<@/+F?)@i!$#]$!:4!?E7;!E$jgD!D!#

C2;\!EEj4$D!$D|#+_; %26!A)b#.) 3=#+;-j^,)o>(C$) qi;-+F?[)(U

UF!2:)'/U JoU P +<#&+\2+=' P U JoU P + +v']]:U-HK7( UGM)-5TU* 0[l k0U N/U6#T!$@+FX )Ej; %$c2%E7('_ U GM)!\:5B0?() #.'"<U#o]]:jUH6$7-U#%$* &$6k[k$0U k ' U H U ' )<#5Rh52v)<'"FUO]0]:U-HK7(-U#0" $6kk$kKU *U)(AUop) #T:5)\' P ![:jU ' )<#?$7+=)F#ZU P !:jU\Jo)\:5:4*&0l" $$ kU l (AU+c)<d%!E,'_L/UG +!<+F#.!E,+\' NsU AUFNh4@s4#.!E,'" U<Rh!$hJ #j7(Z=U P !:jU * l$Kk$ U

& P U)" U-, 4%:4)'\L/U."U P %$D#=+-j!E,'<N/UBV U-/h!):0!)F#.' R"D;<:jUFr#.U\+ C) 6U- $$ 1l[0U AU[J +<[D$='*Uo7+ #T5'/U"+=2+'%"X>GoUNh) @/+<'EU<GM)<@8g='2"U1+,)'2*U P !$D3' P U<wO+F@8!0v'ER"D;F:jU=r#ZU+FC) 6U- &&~ $$0 KU AU P )_@h@+_;-)<'e UGM)<@sgj5'IJ U1J +$)<:3<#=)E'IJ U|N"D$p(!04'4AU P p+'5*U1J + D$'6"UeG +FD?5)F#.'IV|4P !:C71:>@/ &* 6k U

" U IU%,M5) ?:t)_#='8"FU HIU9c5)F#.d+<; %('5:/U0GM4>@/+ #=%'<;<=>??A@BDCFE>GIHJLKBMNAKBC9H-OP>RQPST>BOP@BPUVK<=W=HJF'Lh!:jUd'H1)F#&?[+<@8!E'_Rh)FYX"!$#&%(' $lU $ 9Uh:4+<d)<%Z(oD[C)<' U +;F)_%(' H|$7( U P +-TU P !:U5+ [k' $$ 9k0U%# AUOJ +FD$='fw"U[O#=)<5) #T'7"Uf ) 35+\'fHIUf !$#.)55' P U]\oD:4C P +_:>)<@8' P UbwO+<@/!2'fH UOV()-,)+ #TC'fUVI!D:>)F@/!E(C0)<' R"D;<:U=r#dU<+FC)-U+^ U

#% 9UVI!ED:)<@/!E(C)<'2`_)3>+ '2"FU U(Jb!r+$=45'/U P ; +<#5R!_'0JU[V#=+ D$@/+'(R"D;<:UE=.#dU$+FCh) 6U & [9 &0U k JoU\V#=+FD@/+<$'<U\VI!ED:4)<@/!C)<'"<U UJb!Z+F$4'" U " UD(o#=!$p'a/U P ; "+ #5b!['\HK$7-U w),6U+c& $$$$ k0U JoUV#=+FD@/+<['U1O!; ;<+3Dv!'AAU4c) $7[+<?!$D[p' P U8h:4+<D@Zd[!<)<#='6/U P ; +\#5R!' U V !ED:)-@i!$C$)'R"D(;<:jUF=Z5#dUF+<C)-Ua $$ U

l 2' U HK+ D:4)' ' U ' :W!<+_:4C0)\'" U 9UF+F#j)!X5ND+F#jj'"FU Uc:>p):4:+<'<L"+<; DD@ k* $KklU

$

[ <

1?$D#T) 6' ,!:4D$=!E !$3o) P 5X>R+ pv!$#&]$4!$p+Cj+\35)<#"p+2)\:54)Y.DpZ#=+<; !E"+s+Y35D;-j>! !$3o=)4#=#+C>+=!E*3:>D) ;F) $)-L Hp/##&+\C>+F!E2.U

1?$D#T) 1:D) ;\)oC$)])C);<) M!$3C2!$#=C) #+\C*2c)<:5:4?*4/##&+\C>+=)FC P 4QjR"SIU5+<|wc)<:+-j^,()+ @8!$D$$e!$3K) P 5X5Rp!Cg? C[)<CED;<)FC3=#=!@ KV5w Z])F;\#T!$;F!E]7U[V|)A;F!$$^[D!ED(o;D#j,()"5 +3=45>?=!^)oC$+ + D24?"+oC[!$D$p:)o) q[]!$()->+\:C$)<;<+7*3D(; !eU

5p P j) ]s()^?[$6@/)<+\ZD#=)<@/)bC)FCED;<)FC3=#T!$@]#=!35:!$@/)-#57UV|)"; !$4[D!EDb; D#,)"5 +A3^?*=!i)"C$+2+D(g?A+c2?:)o)-q(]!)->+\:C$)<;<+7*3D(;\!E6U

1?$D#T)bk wc)<3:)<; 4,457hZ]()<;-#+o!3 P Q R S P $5+#?)-jp() 3=!$#T)f+FCA+<35)<#6>#=#&+\C>+=!E*+K^;F#.) +\4?A3=:4D) (;<)<U

1?$D#T)[ =03=:4D)-(;)f!$3)O>#=#+C>+=!$/!A)b#=)_3#=+\;\4,)o4(C0)-q"i!$30GIH1J LN P QjR"S

5+< ' ,!:^D$!E !$3 x=C)<CED(;<)FC3=#=!@#T)<3=:>);-jg,t7W+FC/]0#=!3:!@8)-#57 ,)_#=2D(f()i3:>D) ;\)ΦUV|)*;<!$=gD(!ED

;D#j,)oIC#+<"!"?$D4C) 5)b)-7)EU

5p0wO+-j5! ,) #.dD)b#=)E:4+ 4,)OC)-(^7 !36#&#=+\C>+=)<C P Q R S U

V|()AC+<.)FCWZ#&+\>?[$ :4)A]+<v24?#!$D?s()*!#=>?4W3^o@8!r !$3C$+ +/Φ $ Q ; @,4+A)*Jb:>+FDv^D(X

!d!(j$3=!$#&@/D:>+O5+v2D$@84?A+O;<!$(Z+ $]![:^+\#=52+Fp5:5 >7α)U

+= !"

"# =

! " #

Φ $&% q ('*)+)!,(-/.0

Φ $21 q 3'*)+)!,45- .#Φ $ (' ). ,6 - .

0Φ $87 q 3' )9. ,4 - .

:Φ $<; q 3' ). ,4 -/.&Φ $ =' )?> ,6 - .

@Φ $<7 q (' )?> ,( -/.AΦ $8; q 3' )?> ,4 -/.

-

" 7

k

%

Φ "! $#&%'( Φ *),+- . ! #/%0 Φ 213+4 "! 5#&%

67

89

;