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E n a b l i n g N e w H o r i z o n s
Sustainability inSemiconductor FacilitiesPeter Csatáry, SVP for Technology
SEMICON Taiwan, September 2015
© M+W Group2 150903-Semicon-SustainabilitySemiconductor-MWGroup-Csatary.pptx / 10.08.2015
Driving Megatrends: Challenges:
Motivation for SustainabilityDriving Megatrends and Challenges
Globalization of Value Chains
Demographic Change
Climate Change
Urbanization
Megatrends and their challenges are shaping the future of our society
Climate Protection
Productivity, Growth and Prosperity
Efficient use of Resources
Infrastructure & Mobility
Technology & Innovation
Information- & Knowledge-Technologies
Healthcare
Renewable Energy Production
© M+W Group3 150903-Semicon-SustainabilitySemiconductor-MWGroup-Csatary.pptx / 10.08.2015
Challenges: M+W Group Portfolio:
Motivation for SustainabilityChallenges and M+W Group Portfolio
Megatrends and their challenges for our business
Climate Protection
Productivity, Growth and Prosperity
Efficient use of Resources
Infrastructure & Mobility
Technology & Innovation
Information- & Knowledge-Technologies
Healthcare
Renewable Energy Production
© M+W Group4 150903-Semicon-SustainabilitySemiconductor-MWGroup-Csatary.pptx / 10.08.2015
M+W Group at a Glance
Mission Statement:
“M+W creates customer value through a unique combination oflean and sustainable, high-technology engineering and
project management solutions in an injury-free environment.”
Mission Statement
Leading global engineering and construction company Unique skillset in the delivery of complex technology-intensive
factories and facilities Special expertise in cleanroom technology and controlled
environments Established in Germany in 1912 Figures 2014
Order Intake: € 2.7 bnSales: € 2.5 bnEmployees: 7,050
© M+W Group5 150903-Semicon-SustainabilitySemiconductor-MWGroup-Csatary.pptx / 10.08.2015
Sustainability – Three Strategic Principlesthat are Implicit in everything we do
As a frontrunner in sustainability, M+W Group aims to challenge the balance ofresponsibility for people, the environment and the value creation
Ecology
SUSTAINABILITYat M+W Group
© M+W Group6 150903-Semicon-SustainabilitySemiconductor-MWGroup-Csatary.pptx / 10.08.2015
Challenges
Sustainability in Semiconductor FacilitiesInfluencing Factors, Challenges and Solutions
Fab Complexity
InfluencingFactors
ProcessRequirements
Costs
ScheduleTime to Market
Economy
Waste Water
ExhaustChemical
Special Gases
Ecology Social
Natural Gas
Electrical Power
Raw MaterialsBulk Gases
ProductContamination
EnvironmentalProtection
Operators
SafetyRequirements
Energy EfficiencyWater Efficiency Material EfficiencySolutions
Design ProcessSite Selection Innovations
© M+W Group7 150903-Semicon-SustainabilitySemiconductor-MWGroup-Csatary.pptx / 10.08.2015
Sustainability in Semiconductor FacilitiesHigh Complexity and Challenges
Production equipment for a wafer fab require over 200 various facility supply anddisposal systems
Effluents and byproducts of the manufacturing process need appropriateand sophisticated treatment systems
Utility systems as well as the entire fab complex are supported by secondaryfacility systems such as chilled water, hot water, make-up air etc.
Holistic resource management approach is mandatory to optimize thesustainability of a wafer fab
Cleanroom
© M+W Group8 150903-Semicon-SustainabilitySemiconductor-MWGroup-Csatary.pptx / 10.08.2015
Sustainability in Semiconductor FacilitiesMaterials in Manufacturing
Source:Article from Dr. Mike Cooke„Semiconductor chemistrycomes to the force „ Fabtech;09/18/2008 , own estimates
New materials need to be evaluated with regard to minimizehazards, environmental impacts (production, discharge) and CO2 footprint
Growing quantityof elements usedin semiconductorindustry
© M+W Group9 150903-Semicon-SustainabilitySemiconductor-MWGroup-Csatary.pptx / 10.08.2015
Design Impact on SustainabilityIntegrated Project Delivery (IPD)
OwnerOwnerCMCM
ProcureProcure
SubsSubsDesignDesign
IPD
More efficient project execution= More sustainability – lower demand of energy, material and staff
Enhanced by ourcoordinated range of in
house services
© M+W Group10 150903-Semicon-SustainabilitySemiconductor-MWGroup-Csatary.pptx / 10.08.2015
Design Impact on SustainabilityGreen Building Certification Systems
Sustainable Sites(SS Credits)
Site SelectionDevelopment Density & Community ConnectivityBrownfield RedevelopmentAlternative Transportation: Public Transportation AccessSite Development: Maximize Open SpaceStormwater Design: Quantity and Quality ControlHeat Island Effect: Non-Roof / RoofLight Pollution Reduction
Water Efficiency(WE Credits)
Water use reduction, Irrigation etc.Innovative Wastewater Technologies
Energy andAtmosphere(EA Credits)
Minimize Energy PerformanceRefrigerant ManagementOn-Site RenewablesEnhanced CommissioningGreen Power
Materials andResources(MR Credits)
Storage & Collection of RecycleablesBuilding ReuseConstruction Waste ManagementMaterial ReuseRegional MaterialsRapidly Renewable MaterialsCertified Wood
Indoor EnvironmentQuality(EQ Credits)
Minimum IAQ PerformanceEnvironment Tobacco Smoke ControlOutdoor Air MonitoringIncreased VentilatonMaterials (Paints, Sealing's, etc.)Indoor Chemical/Pollution ControlThermal ComfortDaylight Utilization
Innovation & DesignProcess(ID Credits)
Innovation in DesignAccredited Professional
GB certification systems arepredominantly non-process related
20.3%
7.2%
24.6%18.8%
21.7%
7.2% Sustainable Sites
Water Efficiency
Energy and Atmosphere
Materials and Resources
Indoor Environment Quality
Innovation and DesignProcess
© M+W Group11 150903-Semicon-SustainabilitySemiconductor-MWGroup-Csatary.pptx / 10.08.2015
UPW4.6% UPS + PowerSystems
1.1%
Equipment40.8%
Administration1.1%
Vacuum1.0%
Exhaust3.5%
FFU Cleanroom2.0%
Other Gases0.6%
Chiller + CHW Pumps18.9%
CDA3.5%
Gas Farm13.3%
Cooling Tower incl Pumps3.3%
PCW Pumps1.8%
Lighting1.6%
Other Fans2.9%
Equipment40.8%
Energy Conservation & Efficiency inGreen Building Certification Systems
GB certification systems focus on component & individual system efficiencies No consideration is given to actual process (specifications) and process-specific
supply & disposal systems
Energy Conservation and Efficiency has to consider the overall concept, system andcomponents, as well as the core process requirements into account
Energy Management complements Green Building Certification Systems
Impact to system capacities and annual energy consumption
Electrical Power ShareProcess Equipment 40%Building <1%
Electrical Power ShareProcess Supply Systems 30%Other Facility Systems 30%
© M+W Group12 150903-Semicon-SustainabilitySemiconductor-MWGroup-Csatary.pptx / 10.08.2015
1.Establish TargetEnergy Goals &
Baseline 2.Model Energy
Consumption &Review
3.Identify
Improvements(Measures)
6.Economical
Analysis
5. Evaluation ofEnergy Saving
Potential byEnergy Modeling
4.Design + Budget
Estimation ofMeasures
7.Select Measures
(Decision)
8.ImplementMeasures
Sustainability in Semiconductor FacilitiesEnergy Management
Investment plays an important role on overall project economics Difficult to recover high investments through operational cost savings
But excessively low investment plans result in: „Design to Budget“ Less efficient facility systems Little implementation of energy conservation & efficient concepts Each discipline reduces construction cost without consideration of other systems
How to achieve an optimum ?
ENERGY MANAGEMENT
Low Investment Energy Efficiencyvs.
© M+W Group13 150903-Semicon-SustainabilitySemiconductor-MWGroup-Csatary.pptx / 10.08.2015
Alternative Energy Supply Systems(Renewables)
Alternative Energy Supply Systems(Renewables)
Heating and Cooling Generation Systems(Renewables)
Heating and Cooling Generation Systems(Renewables)
Thermal Energy Supply &Distribution System Optimization
Thermal Energy Supply &Distribution System Optimization
HVAC and ProcessSupply Systems (PCW, CDA)
HVAC and ProcessSupply Systems (PCW, CDA)
Energy Management/Efficiency During DesignThe Five Step “Inside – Out” Approach
ProductionEnergy Efficiency
ProductionEnergy Efficiency
Improvement andOptimization fromInside to Outside
Step 5
Step 4
Step 3
Step 2
Step 1
© M+W Group14 150903-Semicon-SustainabilitySemiconductor-MWGroup-Csatary.pptx / 10.08.2015
Sustainability in Semiconductor FacilitiesLife Cycle Assessment
Manufacturing of(intermediate)
products
Utility generation,distribution
GlobalWarming
Eutrophication
Acidification
Resource depletion
Wastetreatment
Directimpacts
Indirectimpactsources
TransportationExtraction ofraw materials
LCA is a systematic technique for the evaluation of (potential) environmental impactsassociated with products, processes or services over their entire life cycle.
© M+W Group15 150903-Semicon-SustainabilitySemiconductor-MWGroup-Csatary.pptx / 10.08.2015
Sustainability in Semiconductor FacilitiesLCA - Advantages & Results
Calculate, track and benchmark environmental performance Analyze environmental hot-spots in the manufacturing process or supply chain Identify effective measures to reduce environmental footprint Basis for making environmentally sound decisions Involve stakeholders Show your commitment to
sustainable development Reduce risks
Carbon footprint breakdown [%]of a semiconductor R&D site in Europe
© M+W Group16 150903-Semicon-SustainabilitySemiconductor-MWGroup-Csatary.pptx / 10.08.2015
Sustainability EnhancementsGeneral Overview & Examples
Abbreviations:MAU = make-up air,GEX= general exhaust, ACEX = acidexhaust,CAEX = caustic exhaustPCW = process cooling water, UPW = ultrapure water, WW = wastewater
EnergyEfficiency
WaterEfficiency
Materials / Chemicals / Consumables Efficiency
MAU CoolingOptimization
GEX Recycling
GEX-MAUEnergy Recovery Low Chemistry
Scrubber
ConcreteCooling
DecentralizedRAHU
HighTemperature
PCW
Chilled WaterTemperatureOptimization
Ground(Water)Cooling
Solar Cooling
Photovoltaic
N2 Storage
Heat ExchangerTemperatureOptimization
WT – WWTHeat Recovery
UPWRecycling
Solvent WasteTreatment
Water re- &down cycling
UPWProduction
Drain Segregation
AdvancedHF-Treatment
Cu-WWTreatment
Cu Reclaim
Slurry Treatment
AmmoniaReclaim
TMAH Reclaim
OrganicSanitary WW
Building MaterialsSEMI-ProductMaterials
CogenerationTrigeneration
SolarHeating
BuildingTightness
FreeCooling
Cooling WaterHeat Recovery
© M+W Group17 150903-Semicon-SustainabilitySemiconductor-MWGroup-Csatary.pptx / 10.08.2015
UPW Recycling / Re-Claim / Re-use up to 90% realized in existing projects Last rinse recycling Re-claim in facility systems
Waste water supply to cooling tower Waste water from UPW plant
(with low salt concentration)supplied cooling tower
30% make-up water savings
Sustainability EnhancementsWater Efficiency
Last Rinse Recycling
Production FacilitiesWWTWatertreatment
Recycling
TreatmentTreatment type:Reduction of TOC contamination
Non recycleableWaste water
Reduction of Water Consumption up to 40 %
Production- Reduction of
waterconsumption byoptimization orsubstitution ofprocesses
FacilitiesReclaim- Usage of waste
for non processapplications e. g.cooling towermake up
Wastewatertreatment
Watertreatment
ReclaimRecycling
Avoidance
© M+W Group18 150903-Semicon-SustainabilitySemiconductor-MWGroup-Csatary.pptx / 10.08.2015
Sustainability EnhancementsEnergy Efficiency & Management - Example
Energy Efficiency Management done for R&D semiconductor facility duringcomplete design phase
Energy (electrical power, natural gas)& water consumption reduction of all facility systems
Operational cost savings
Capacity reduction of changed system & all surrounding and successive systems
Investment cost savingsLower capacity
Operational cost savingsLower power provision fee
Subject ElectricalPowerSaving
in MWh/a
NaturalGas
Savingin MWh/a
WaterSavingin m³/a
Energy +Water Cost
Savingin €/a
AdditionalInvestment
in €
PaybackPeriod
in Years
Distillation + Cogeneration -4,284 305,914 900,000 3.3Heat Recovery 215 11,670 23,018 479,037 1,450,000 3.4Extended Heat Recovery 292 16,097 31,120 658,946 2,770,000 5.0PCW Free Cooling 2,320 0 9,373 200,058 100,000 0.5PCW Generation with 12°C 637 0 22,980 605,000 0 0.0High Temperature PCW 1,516 0 7,309 116,454 250,000 2.4Heat Recovery + Free Cooling 1,731 11,670 30,648 613,271 1,700,000 3.1
© M+W Group19 150903-Semicon-SustainabilitySemiconductor-MWGroup-Csatary.pptx / 10.08.2015
Sustainability EnhancementsGeneral Exhaust Recycling & Re-Use
Discharge of risk-free General Exhaust into subfab or support areas(add. system “Recycling Exhaust”)
Reduction of investment & operational costs
Make-up Air
Hot Water System
Water Treatment
Cooling TowerCW System
WWT
Water
Electrical PowerNatural Gas Water
CHW System
Utility Supply
Secondary& TertiarySystems
Chiller
Boiler
Waste Water
GEX
Waste Water
Assumption:25,000 m² Fab (Europe)
GEX-Recycling 290,000 m³/h (30% o total GEX)
Electrical Power Saving 1,970 MWh/a
Natural Gas Savings 284,000 m³/a
CO2 Emission Savings 1,500 t/a
Operation Cost Savings 300,000 €/a
Chiller & Cooling Tower Capacity Savings 3,000 kW = Investment saving
© M+W Group20 150903-Semicon-SustainabilitySemiconductor-MWGroup-Csatary.pptx / 10.08.2015
Sustainability EnhancementsAlternative Energy Supply Concept
Electrical power saving 17,000 MWh/a
Higher natural gas demand 49,600,000 m³/a
CO2 emission reduction 26,800 t/a
Energy & Water cost reduction 5,480,000 €/a
Assumption: 25,000 m² Fab (Europe)
Trigeneration Plant:Base load covering of electrical power, hot and chilled water
© M+W Group21 150903-Semicon-SustainabilitySemiconductor-MWGroup-Csatary.pptx / 10.08.2015
Sustainability in Semiconductor FacilitiesSummary
Sustainable technologies are becoming more and more important for our clients
“Good design & construction” should include consideration of all green buildingaspects as well as process requirements
Overall knowledge & experience of the process,facility systems and energy supply sourcesis essential
Sustainability = Protection of the Environment
…is our motivation and implicit in everything we do
T H A N K Y O U !
M+W GroupLotterbergstraße 3070499 Stuttgart, Germany www.mwgroup.net
Peter CsatáryPhone: +49 711 8804-1441Mail: [email protected]
Enabling New Horizons