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Surface Texture Measuring Instruments Compact & Touch operetion type SURFCOM Series

Surface Texture Measuring Instrumentseurope.accretech.de/cms/upload/pdf/metrology/SURFCOM/SURFCO… · Straightness accuracy (0.05 + 1.5L/1000) μm L: Measuring length (mm) ... Shaft

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Page 1: Surface Texture Measuring Instrumentseurope.accretech.de/cms/upload/pdf/metrology/SURFCOM/SURFCO… · Straightness accuracy (0.05 + 1.5L/1000) μm L: Measuring length (mm) ... Shaft

Surface Texture Measuring Instruments

Compact & Touch operetion typeSURFCOM Series

Page 2: Surface Texture Measuring Instrumentseurope.accretech.de/cms/upload/pdf/metrology/SURFCOM/SURFCO… · Straightness accuracy (0.05 + 1.5L/1000) μm L: Measuring length (mm) ... Shaft

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Supported Languages English, Japanese,

German, French, Italian, Spanish and Chinese!

JIS2001 compliant!

Simplified automatic 16% rule application

SURFCOM 480B-12

Operator-oriented Operation for the WorkplaceNew Surface Texture Measuring Instrument for Easy Operation

Surface Texture Measuring Instrument

TFT Color LCD Touch Panel Supports International StandardsThe color LCD touch panel with a wide field of view features high clarity. Simply touch the desired icon to perform operation. Touch panel input can be performed by using your finger or with the touch-pen provided, facilitating on-site measurements.

The customize function can be used to create a special menu where only the icons that are used most frequently are displayed, substantially enhancing operational efficiency.

The unit incorporates 34 types of roughness parameters (Ra, Rz, Ry, Sm, S, tp, etc.) and 32 types of waviness parameters. The steps on electrical parts, film thickness, surface area and other items can be analyzed.

The AI (artificial intelligence) function automatically selects the ideal cut-off value, measuring range and other conditions by simply entering the parameters and allowable values denoted on the machining drawing. This automates measurement.

Six types of automatic tilt correction are provided: Linear, first half,latter half, both end, round surface and spline curve (patented).

This function guides the user through the measuring procedures, enabling beginners to make measurements.

The waveform on the screen is enclosed by two cursors, allowing the desired evaluation range to be set and the parameters to be calculated.

Customize Icons Host of Analysis Functions

AI Function (patented) Tilt Correction Function

Guidance FunctionEvaluation Range Setting (patented)

A short note or diagram can be entered with the touch pen and printed using the memo function.

Memo Function Measuring conditions, measured result management or measured data can be output in binary and text format. This data can be easily read from the PC card slot on a personal computer. Storage of data on CF cards and other types of memory cards is possible to use.

PC Card Slot

The 480A supports analysis parameters for JIS (2001/1994/1982), ISO, DIN, ASME and CNOMO standards, and can be switched between English, Japanese, German, Italian, French, Spanish and Chinese. In addition, any power source between AC100V and 240V can be used, and the unit satis-fies the European Directives for the CE Marking.

Page 3: Surface Texture Measuring Instrumentseurope.accretech.de/cms/upload/pdf/metrology/SURFCOM/SURFCO… · Straightness accuracy (0.05 + 1.5L/1000) μm L: Measuring length (mm) ... Shaft

Model SURFCOM 480B

Measuring RangeX-axis (horizontal) 100mmZ-axis (vertical) 800μm (Measuring range/resolution: 800μm/10nm, 80μm/1nm, 8μm/0.1nm)

Straightness accuracy (0.05 + 1.5L/1000) μm L: Measuring length (mm)

Analysis items

Conformance Complies with JIS-2001, JIS-1994, JIS-1982, ISO-1997, ISO-1984, DIN-1990, ASME-1995, CNOMO

ParametersRa, Rq, Ry, Rp, Rv, Rc, Rz, Rmax, Rt, Rz.J, R3z, Sm, S, R Δa, R Δq, R λa, R λq,TILT A, Ir, Pc, Rsk, Rku, Rk, Rpk, Rvk, Mr1, Mr2, VO, K, tp, Rmr, tp2, Rmr2, R δc,AVH, Hmax, Hmin, AREA, NCRX, R, Rx, AR, NR, CPM, SR, SAR

Evaluation curvesSection profi le curve, roughness curve, fi ltered waviness curve, fi ltered center line waviness curve, rolling circle waviness curve,rolling circle center line waviness curve, DIN4776 special curve, roughness motif curve, waviness motif curve, envelope waviness curve

Surface Characteristics graphs Bearing area curve, amplitude distribution (ADF) curve, power graph

Tilt correctionLinear correction, round surface correction, fi rst half correction, latter half correction, both end correction,spline correction (linear, round surface, and both end correction are supported in an arbitrary range)

Vertical (Z-axis) 50, 100, 200, 500, 1K, 2K, 5K, 10K, 20K, 50K, 100K, 200K,* 500K,* autoHorizontal (X-axis) 1, 2, 5, 10, 20, 50, 100, 200, 500, 1K, 2K, auto

Filter types Standard fi lter (2RC), phase compensation fi lter (2RC), phase compensation fi lter (Gaussian)Measuring Speed 0.03, 0.06, 0.15, 0.30, 0.60, 1.5, 3, 6mm/s (8 speeds)Detector Tip radius: 2μm, Material: Diamond, Measuring force: 0.75mN

Special functionsMeasuring AI AI functions provide for easy procedures, enabling beginners to make measurements.Step analysis function Ideal for fi lm thickness and surface area measurement of semiconductor parts.PC card Data output as text fi le for transfer to a personal computer.

Standard accessories Standard specimen (E-MC-S24B), recording paper (E-CH-S21A), touch pen (E-MA-S54A), instruction manual

Dimensions andweight

Power Source AC100–240V ±10%, 50/60Hz, 90VAInstallation dimensions 1000 (W)×800 (D)×750 (H)mmWeight 88kg (for SURFCOM 480B-12)

3

*When high-magnifi cation pickup is used

Surface Texture Measuring Instrument

■Sample Display

The customize function on the menu allows icons to be edited and arranged as desired.

■ Sample data sheet

■ Main Menu

■ Sample Customized Screens

■ Analysis Results

Load curve

Amplitude distributioncurve

Power graph

Page 4: Surface Texture Measuring Instrumentseurope.accretech.de/cms/upload/pdf/metrology/SURFCOM/SURFCO… · Straightness accuracy (0.05 + 1.5L/1000) μm L: Measuring length (mm) ... Shaft

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LCD Panel Simplifies Operation

Highly Portable Compact Unit

Supports International StandardAnalysis Parameters

● Simply select the desired operation from the color LCD touch panel with a wide field of view or the reasonable monochrome LCD.

The customize function can be used to create a special menu where only the icons that are used most frequently are displayed, substantially enhancing operational efficiency.

The unit incorporates 34 types of roughness parameters (Ra, Rz, Ry, Sm, S, tp, etc.) and 32 types of waviness parameters. The steps on electrical parts, film thickness, surface area and other items can be analyzed.

The AI (artificial intelligence) function automatically selects the ideal cut-off value, measuring range and other conditions by simply entering the parameters and allowable values denoted on the machining drawing. This automates measurement.

Six types of automatic tilt correction are provided: Linear, first half, latter half, both end, round surface and spline curve (patented).

This function guides the user through the measuring procedures, enabling beginners to make measurements.

The waveform on the screen is enclosed by two cursors, allowing the desired evaluation range to be set and the parameters to be calculated.

Customize Icons Host of Analysis Functions

AI Function (patented) Tilt Correction Function

Guidance FunctionEvaluation Range Setting (patented)

A short note or diagram can be entered with the touch pen and printed using the memo function.

Memo Function Measuring conditions, measured result management or measured data can be output in binary and text format. This data can be easily read from the PC card slot on a personal computer. Storage of data on CF cards and other types of memory cards is possible to use.

PC Card Slot

Monochrome LCD

TFT color LCD

Supported Languages

English, Japanese, German, French, Italian,

Spanish and Chinese!

Best of Class Straightness Accuracy

0.3 μ m/50mm !!

Simplified 16% rule

automatic discrimination

Operator-oriented Operation for the WorkplaceCompact Field Surface Measuring Instrument

● Select the desired standard: JIS, ISO, DIN, ASME or CNOMO.

Satisfies European Directives for CE Marking

● The unit is small enough for use at virtually any location.

Surface Texture Measuring Instrument

Page 5: Surface Texture Measuring Instrumentseurope.accretech.de/cms/upload/pdf/metrology/SURFCOM/SURFCO… · Straightness accuracy (0.05 + 1.5L/1000) μm L: Measuring length (mm) ... Shaft

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■Convenient Mode Select Function for System Manager/Operator

Supported Languages

English, Japanese, German, French, Italian,

Spanish and Chinese!

All functions are displayed forthe system manager.

■Flexible Data Analysis

Only required functions are displayed for the operator.

CustomizedscreenAll-function screen

RS-232C(E-SC-S288A)

PC card(E-MU-S50C)

NOTE PC

Desktop computer

■Sample Data Sheet

■ Outstanding Analysis Functions

● Step Profile Evaluation ● R-Surface Correction

【Example Measurement】Hybrid IC

【Example Measurement】Shaft

Can be used for hybrid IC, magnetic head, and other step measurement, film measurement, and surface area measurement.

A notched workpiece measuring function makes it possible to eliminated unused parted.

Measurement

points

PC card(E-MU-S50C)及びPC接続用RS-232Cケーブル(E-SC-S288A)はオプションです。

5.08 5.08 5.08

Surface Texture Measuring Instrument

integrated measuring system

Analysis withACCRETECH’s

Display in

Page 6: Surface Texture Measuring Instrumentseurope.accretech.de/cms/upload/pdf/metrology/SURFCOM/SURFCO… · Straightness accuracy (0.05 + 1.5L/1000) μm L: Measuring length (mm) ... Shaft

Model SURFCOM 130A

Measuring RangeX-axis (horizontal) 50mmZ-axis (vertical) 800μm (Measuring range/resolution: 800μm/10nm, 80μm/1nm, 8μm/0.1nm)

Straightness accuracy 0.3μm/50mm

Analysis items

Standards Complies with JIS-2001, JIS-1994, JIS-1982, ISO-1997, ISO-1984, DIN-1990, ASME-1995, CNOMO

ParametersRa, Rq, Ry, Rp, Rv, Rc, Rz, Rmax, Rt, Rz.J, R3z, Sm, S, R Δa, RΔq, Rλa, Rλq,TILT A, Ir, Pc, Rsk, Rku, Rk, Rpk, Rvk, Mr1, Mr2, VO, K, tp, Rmr, tp2, Rmr2, Rδc,AVH, Hmax, Hmin, AREA, NCRX, R, Rx, AR, NR, CPM, SR, SAR

Evaluation curvesSection profi le curve, roughness curve, fi ltered waviness curve, fi ltered center line waviness curve, rolling circle waviness curve,rolling circle center line waviness curve, DIN4776 special curve, roughness motif curve, waviness motif curve, envelope waviness curve

Surface Characteristics graphs Bearing area curve, amplitude distribution (ADF) curve, power graph

Tilt correctionLinear correction, round surface correction, fi rst half correction, latter half correction, both end correction,spline curve correction (linear, round surface, and both end correction possible at arbitrary range)

Vertical (Z-axis) 50, 100, 200, 500, 1K, 2K, 5K, 10K, 20K, 50K, 100K autoHorizontal (X-axis) 1, 2, 5, 10, 20, 50, 100, 200, 500, 1K, 2K, 5K, auto

Filter types Standard fi lter (2RC), phase compensation fi lter (2RC), phase compensation fi lter (Gaussian)Measuring Speed 0.3, 0.6, 1.5, 3mm/s (4 speeds)Detector Tip radius: 2μm, Material: Diamond, Measuring force: 0.75mN

Special functionsAI Function AI functions provides for easy procedures, enabling beginners to make measurements.Step analysis Ideal for fi lm thickness and surface area measurement of semiconductor parts.PC card Data output as text fi le for transfer to a personal computer.

Standard accessories Standard specimen (E-MC-S24B), recording paper (E-CH-S21A), touch pen (E-MA-S54A), instruction manual

Dimensions andweight

Power Source AC100–240V ±10%, 50/60Hz, 30VAInstallation dimensions 700 (W) ×300 (D) ×150 (H) mmWeight 8kg

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Roll FootE-MA-S62AAttachment for placing the drive unit on a roll shaped object for measurementRoll outer diameter: φ60 mm or more

Battery Option SetE-MA-S65AF o r m e a s u r i n g a n d r e c o r d i n g i n a location where there is no power outlet available.I n c l u d e d i t e m s : A C a d a p t o r, b a t t e r y, charger

PC cardE-MU-S50CProvides storage for approximately 500 measurement conditions, or approximately 500 data measurements (100 text management items).Specifications: 64 MB

Compact Measuring StandE-ST-S130AThe height and inclination of the drive unit can be adjusted in accordance with the size and shape of the object being measured.Table size: 410x200mmMaximum measuring height: 200mm

Pickup Holder for All-OrientationsE-DH-S107AFor measuring surface roughness of slanted surfaces, vertical surfaces, ceiling surfaces, and other non-flat surfaces.Photograph shows unit with E-MA-S63A roll foot.

Pickup Holder for Horizontal TracingE-DH-S17AAttachment for horizontal tracing of items, such as a crankshaft, that have obstacles in the front and back in the measuring direction(using double-side straddling skid)

■ Options

Page 7: Surface Texture Measuring Instrumentseurope.accretech.de/cms/upload/pdf/metrology/SURFCOM/SURFCO… · Straightness accuracy (0.05 + 1.5L/1000) μm L: Measuring length (mm) ... Shaft

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TiMS has achievements at many users. It provides various function and complicated analysis

Newly developed ACCTee software is new generation of integrated software with new concept. It provide complicated analysis with comfortable operation.

・Data save to files

・ Allows analysis of measured data to be performed on-site. Computer-based operation allows sharing of data with other computers.

・Data Transfer using an RS-232C interface (S130A, S480B, E35A) or PC card (S130A, S480B).

Able to use PC based analysis softwareTiMS Light Offline ACCTee

・ Any parameter value obtained as measured results can be transferred via RS-232C data communication in real time to a cell in Microsoft Excel running on a computer connected to the S130A/S480B or HANDY SURF.(Waveform data cannot be transferred.)

・Also effective for collecting data from multiple workpieces.

■TESCHART − Excel Converter

S130A/S480B

RS232Ccable

Computer

TESCHART-Excel Converter

TiMS Light orOnline ACCTeeS130A

HandySurf

RS232C cable (E-SC-S288A)

RS232C cable (E-SC-S366A)

PC card (E-MU-S50C), PC Connection RS-232C cable (E-SC-S288A/S366A) are optional

S480B

Desktop computer

PC card(E-MU-S50C)

TiMS analysis display TiMS print display ACCTee analysis&print display

Page 8: Surface Texture Measuring Instrumentseurope.accretech.de/cms/upload/pdf/metrology/SURFCOM/SURFCO… · Straightness accuracy (0.05 + 1.5L/1000) μm L: Measuring length (mm) ... Shaft

Head Office 2968-2, Ishikawa-machi, Hachioji-city,Tokyo 192-8515, Japan TEL.81(42)642-1701 FAX.81(42)642-1821International Marketing Dept. 4, Higashi-Nakanuki-cho,Tsuchiura-city, Ibaraki 300-0006, Japan TEL.81(29)831-1240 FAX.81(29)831-6676

•We reserve the right to change the contents of this catalog, including product specifications, without notice when products are updated.

•ISO 9001 and ISO14001 awarded to the Hachioji and Tsuchiura Plants B-83-533-E-1012_1

http://www.accretech.jp