136
Surface Chemical Analysis by XPS and SIMS Prof. Ian W. Fletcher Surface Engineering & Analysis Laboratory School of Mechanical and Systems Engineering, Newcastle University, Stephenson Building, Claremont Road, Newcastle upon Tyne NE1 7RU Tel. (office M35) +44 (0)191 208 6788 (lab G15a) +44 (0)191 208 5857 (mobile) +44 (0)7754 735869 email: [email protected] www.ncl.ac.uk/nexus 1 - a means to one’s ends or an end to one’s means?

Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

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Page 1: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

Prof Ian W Fletcher

Surface Engineering amp Analysis Laboratory

School of Mechanical and Systems EngineeringNewcastle UniversityStephenson BuildingClaremont RoadNewcastle upon TyneNE1 7RU

Tel (office M35) +44 (0)191 208 6788(lab G15a) +44 (0)191 208 5857(mobile) +44 (0)7754 735869

email ianfletchernclacuk

wwwnclacuknexus1

- a means to onersquos ends or an end to onersquos means

Surface Chemical Analysisby XPS and SIMS

Outline

bull SEAL

bull XPS and SIMS

bull What information is available

bull Examples

bull Conclusions

2

- a means to onersquos ends or an end to onersquos means

Surface Chemical Analysisby XPS and SIMS

The Surface Engineering and Analysis Laboratory - SEAL

3

- a means to onersquos ends or an end to onersquos means

SEAL

NEXUSNational EPSRC XPS

Usersrsquo Service

New Ion Beam Tools- ToFSIMS- Helium Ion

Surface Chemical Analysisby XPS and SIMS

An end to onersquos means

bull tendency to avoid surface analysis because it is too expensive

bull commercial charges up to pound3000 per day

bull EPSRC Mid-range XPS facility at Newcastle ndash lsquoNEXUSrsquofree to EPSRC fundable researchers

bull SEAL Ion Beam Toolsmay need to make a small charge to cover running costs

bull SEAL has the best instrument base for surface analysis in Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

4

- a means to onersquos ends or an end to onersquos means

Surface Chemical Analysisby XPS and SIMS

An end to onersquos means

bull not here

bull means to onersquos ends helliphelliphelliphelliphellip

5

- a means to onersquos ends or an end to onersquos means

Surface Chemical Analysisby XPS and SIMS

6

What can we dobull determine the elemental chemical and molecular composition of

the outermost surface regions of organic and inorganic materials using spectroscopy imaging and depth profiling

How do we do itbull X-Ray Photoelectron Spectroscopy XPS or ESCA

bull Static Secondary Ion Mass Spectrometry SSIMS

bull Dynamic Secondary Ion Mass Spectrometry DSIMS

Surface Chemical Analysisby XPS and SIMS

7

Surface Chemical Analysisby XPS and SIMS

8

What is a surface

~1microm

1-10 nm

Sampling Depths

SEM EDXIR Raman

SSIMS ~1nmXPS ~10nm

Surface Chemical Analysisby XPS and SIMS

9

Real surfaces arerarely pure materials

Surface ne Bulk material

Segregation Surface EngineeringMigration coatingsPhase Separation treatmentCrystallinity flame plasma EBMW chemicalContamination AdsorptionDegradation Corrosion

tribology Oxidationheat light etc Hydrolysischemical

What is on thereSurfactants PolymersAnti-oxidants ResinsLubricants slip agents BiomaterialsMould Release agents OligomersInorganicsContaminantsReaction Process deposits etc

Surface ne Bulk material

Segregation Surface EngineeringMigration coatingsPhase Separation treatmentCrystallinity flame plasma EBMW chemicalContamination AdsorptionDegradation Corrosion

tribology Oxidationheat light etc Hydrolysischemical

What is on thereSurfactants PolymersAnti-oxidants ResinsLubricants slip agents BiomaterialsMould Release agents OligomersInorganicsContaminantsReaction Process deposits etc

Surface Chemical Analysisby XPS and SIMS

10

XPS (ESCA)

X-rayshν

~ 5nm

hν = KE + BE + φe-

KE = hν - BE - φ

BE = hν - KE - φφ

BE

KE

Binding EnergyKinetic Energy

Surface Chemical Analysisby XPS and SIMS

11

λ vs photoelectron KE

Surface Chemical Analysisby XPS and SIMS

12

Aluminium foil

Mg 1s

C kvv

O kllAl 2s Al 2p

C 1s

O 1s

Mg kllMg 2s Mg 2p

VB

Binding Energy eV

Inte

nsity

cp

s

Auger peaks

Surface Chemical Analysisby XPS and SIMS

13

Aluminium foil

O 1s C 1s Al 2p

Mg 1s

C kvv

O kllAl 2s Al 2p

C 1s

O 1s

Mg kllMg 2s Mg 2p

VB

Surface Chemical Analysisby XPS and SIMS

14

Ultra-highVacuum Chamber

~ 5nm

X-Rays

Sample

emittedphotoelectrons

e-

X-RaySource

Electron EnergyAnalyser

SpectrumImage

I

Energy

O1s

N1s

C1s

XPS (ESCA)X-ray Photoelectron Spectroscopy

bull detects all elements except Hbull detects 1 atom in 1000bull sampling depth from ~ 1nm to ~ 10nmbull relative quantification of elements and chemistrybull chemical information rArr bonding oxidation state

functional groups etc

bull 1-D linescansbull 2-D imaging at ~ 2microm resolutionbull 3-D depth profiles

bull solids and liquidsbull electrical conductors and insulatorsbull analysis at -150degC up to 600degCbull automation

Surface Chemical Analysisby XPS and SIMS

15

PET

coating

O1s C1s

N1s

VB

Okll

Relative Atomic Percentage Compositions - number density

271(286)

729(714)

249 73120

Surface Chemical Analysisby XPS and SIMS

16

PET

C1s O1s

N1s

Surface Chemical Analysisby XPS and SIMS

17

Valence Band

Valence Band

PET

coating

O2s

C2s C2p+O2p

Surface Chemical Analysisby XPS and SIMS

18

θ = 90deg

Samplingdepth d 3λ d= 3λsinθ

θ = 30deg

Tilt the sample to change the photoelectron lsquotake off anglersquoAngle resolved XPS

λ = inelastic mean free path between collisions lsquoimfprsquo

I Itotal = 1 - e -nλ

n of total signal1 6322 8653 9504 9825 9936 997

Typical sampling depths (lsquo3 λrsquo)~10nm in organic materials~5nm in oxides~3nm in metals

d

Surface Chemical Analysisby XPS and SIMS

19

Angle-resolved XPS

bull tilt the sample hellip ARXPS

or

bull collect photoelectrons leaving the surface from a range of angles at the same time hellip PARXPS

Thermo lsquoThetaprobersquo

Surface Chemical Analysisby XPS and SIMS

20

316L Stainless Steel Surface ndash etched and air exposed

~ 25 depth nm ~10Tardio et al Comparative study of the native oxide on 316L stainless steel

J Vac Sci Technol A 33 (5) 2015

Surface Chemical Analysisby XPS and SIMS

21

Imaging XPS

bull element and chemical state imagesbull 2microm spatial resolution

bull Useful to align small area spectroscopy

Surface Chemical Analysisby XPS and SIMS

22

Al on Si SEM test pattern

Si image used to define55microm analysis areas

700 x 300microm

Si area

Al area100microm Al bars100microm Si squares 400microm FOV

Surface Chemical Analysisby XPS and SIMS

23

Al on Si SEM test pattern - 100microm bars

ldquoHyperspectral Imagingrdquobull Record images at different BErsquosbull Select area rArr regenerate spectra

O1s images 533 - 527eV 02eV step

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample damagelsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

24

Surface Chemical Analysisby XPS and SIMS

What is SIMS

25

Surface Chemical Analysisby XPS and SIMS

0 20 40 60 80 100 120 140 160 180 200

200 220 240 260 280 300 320 340 360 380 400

400 420 440 460 480 500 520 540 560 580 600

mz

Mass Spectrometer

lt1nm

Primary ionsSecondary ions

20microm

SSIMSStatic Secondary Ion Mass Spectrometry

26

Surface Chemical Analysisby XPS and SIMS

sputtered moleculesfragmentsionsatomselectronsphotons

mixing implantation sampling

10nm 8nm 1-2nm

primary ion

SSIMS

27

Surface Chemical Analysisby XPS and SIMS

SSIMSStatic Secondary Ion Mass Spectrometry

28

Surface Chemical Analysisby XPS and SIMS

Any type of mass spectrometer can be used

Quadrupole

Magnetic sector

Time-of-Flight rArr lsquoToFSIMSrsquo

bull high transmission = high signal levels

bull parallel detection = fast acquisition

bull high mass resolution

bull pulsed system

SSIMSStatic Secondary Ion Mass Spectrometry

29

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 88
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  • Slide Number 91
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  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
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  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 2: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

Outline

bull SEAL

bull XPS and SIMS

bull What information is available

bull Examples

bull Conclusions

2

- a means to onersquos ends or an end to onersquos means

Surface Chemical Analysisby XPS and SIMS

The Surface Engineering and Analysis Laboratory - SEAL

3

- a means to onersquos ends or an end to onersquos means

SEAL

NEXUSNational EPSRC XPS

Usersrsquo Service

New Ion Beam Tools- ToFSIMS- Helium Ion

Surface Chemical Analysisby XPS and SIMS

An end to onersquos means

bull tendency to avoid surface analysis because it is too expensive

bull commercial charges up to pound3000 per day

bull EPSRC Mid-range XPS facility at Newcastle ndash lsquoNEXUSrsquofree to EPSRC fundable researchers

bull SEAL Ion Beam Toolsmay need to make a small charge to cover running costs

bull SEAL has the best instrument base for surface analysis in Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

4

- a means to onersquos ends or an end to onersquos means

Surface Chemical Analysisby XPS and SIMS

An end to onersquos means

bull not here

bull means to onersquos ends helliphelliphelliphelliphellip

5

- a means to onersquos ends or an end to onersquos means

Surface Chemical Analysisby XPS and SIMS

6

What can we dobull determine the elemental chemical and molecular composition of

the outermost surface regions of organic and inorganic materials using spectroscopy imaging and depth profiling

How do we do itbull X-Ray Photoelectron Spectroscopy XPS or ESCA

bull Static Secondary Ion Mass Spectrometry SSIMS

bull Dynamic Secondary Ion Mass Spectrometry DSIMS

Surface Chemical Analysisby XPS and SIMS

7

Surface Chemical Analysisby XPS and SIMS

8

What is a surface

~1microm

1-10 nm

Sampling Depths

SEM EDXIR Raman

SSIMS ~1nmXPS ~10nm

Surface Chemical Analysisby XPS and SIMS

9

Real surfaces arerarely pure materials

Surface ne Bulk material

Segregation Surface EngineeringMigration coatingsPhase Separation treatmentCrystallinity flame plasma EBMW chemicalContamination AdsorptionDegradation Corrosion

tribology Oxidationheat light etc Hydrolysischemical

What is on thereSurfactants PolymersAnti-oxidants ResinsLubricants slip agents BiomaterialsMould Release agents OligomersInorganicsContaminantsReaction Process deposits etc

Surface ne Bulk material

Segregation Surface EngineeringMigration coatingsPhase Separation treatmentCrystallinity flame plasma EBMW chemicalContamination AdsorptionDegradation Corrosion

tribology Oxidationheat light etc Hydrolysischemical

What is on thereSurfactants PolymersAnti-oxidants ResinsLubricants slip agents BiomaterialsMould Release agents OligomersInorganicsContaminantsReaction Process deposits etc

Surface Chemical Analysisby XPS and SIMS

10

XPS (ESCA)

X-rayshν

~ 5nm

hν = KE + BE + φe-

KE = hν - BE - φ

BE = hν - KE - φφ

BE

KE

Binding EnergyKinetic Energy

Surface Chemical Analysisby XPS and SIMS

11

λ vs photoelectron KE

Surface Chemical Analysisby XPS and SIMS

12

Aluminium foil

Mg 1s

C kvv

O kllAl 2s Al 2p

C 1s

O 1s

Mg kllMg 2s Mg 2p

VB

Binding Energy eV

Inte

nsity

cp

s

Auger peaks

Surface Chemical Analysisby XPS and SIMS

13

Aluminium foil

O 1s C 1s Al 2p

Mg 1s

C kvv

O kllAl 2s Al 2p

C 1s

O 1s

Mg kllMg 2s Mg 2p

VB

Surface Chemical Analysisby XPS and SIMS

14

Ultra-highVacuum Chamber

~ 5nm

X-Rays

Sample

emittedphotoelectrons

e-

X-RaySource

Electron EnergyAnalyser

SpectrumImage

I

Energy

O1s

N1s

C1s

XPS (ESCA)X-ray Photoelectron Spectroscopy

bull detects all elements except Hbull detects 1 atom in 1000bull sampling depth from ~ 1nm to ~ 10nmbull relative quantification of elements and chemistrybull chemical information rArr bonding oxidation state

functional groups etc

bull 1-D linescansbull 2-D imaging at ~ 2microm resolutionbull 3-D depth profiles

bull solids and liquidsbull electrical conductors and insulatorsbull analysis at -150degC up to 600degCbull automation

Surface Chemical Analysisby XPS and SIMS

15

PET

coating

O1s C1s

N1s

VB

Okll

Relative Atomic Percentage Compositions - number density

271(286)

729(714)

249 73120

Surface Chemical Analysisby XPS and SIMS

16

PET

C1s O1s

N1s

Surface Chemical Analysisby XPS and SIMS

17

Valence Band

Valence Band

PET

coating

O2s

C2s C2p+O2p

Surface Chemical Analysisby XPS and SIMS

18

θ = 90deg

Samplingdepth d 3λ d= 3λsinθ

θ = 30deg

Tilt the sample to change the photoelectron lsquotake off anglersquoAngle resolved XPS

λ = inelastic mean free path between collisions lsquoimfprsquo

I Itotal = 1 - e -nλ

n of total signal1 6322 8653 9504 9825 9936 997

Typical sampling depths (lsquo3 λrsquo)~10nm in organic materials~5nm in oxides~3nm in metals

d

Surface Chemical Analysisby XPS and SIMS

19

Angle-resolved XPS

bull tilt the sample hellip ARXPS

or

bull collect photoelectrons leaving the surface from a range of angles at the same time hellip PARXPS

Thermo lsquoThetaprobersquo

Surface Chemical Analysisby XPS and SIMS

20

316L Stainless Steel Surface ndash etched and air exposed

~ 25 depth nm ~10Tardio et al Comparative study of the native oxide on 316L stainless steel

J Vac Sci Technol A 33 (5) 2015

Surface Chemical Analysisby XPS and SIMS

21

Imaging XPS

bull element and chemical state imagesbull 2microm spatial resolution

bull Useful to align small area spectroscopy

Surface Chemical Analysisby XPS and SIMS

22

Al on Si SEM test pattern

Si image used to define55microm analysis areas

700 x 300microm

Si area

Al area100microm Al bars100microm Si squares 400microm FOV

Surface Chemical Analysisby XPS and SIMS

23

Al on Si SEM test pattern - 100microm bars

ldquoHyperspectral Imagingrdquobull Record images at different BErsquosbull Select area rArr regenerate spectra

O1s images 533 - 527eV 02eV step

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample damagelsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

24

Surface Chemical Analysisby XPS and SIMS

What is SIMS

25

Surface Chemical Analysisby XPS and SIMS

0 20 40 60 80 100 120 140 160 180 200

200 220 240 260 280 300 320 340 360 380 400

400 420 440 460 480 500 520 540 560 580 600

mz

Mass Spectrometer

lt1nm

Primary ionsSecondary ions

20microm

SSIMSStatic Secondary Ion Mass Spectrometry

26

Surface Chemical Analysisby XPS and SIMS

sputtered moleculesfragmentsionsatomselectronsphotons

mixing implantation sampling

10nm 8nm 1-2nm

primary ion

SSIMS

27

Surface Chemical Analysisby XPS and SIMS

SSIMSStatic Secondary Ion Mass Spectrometry

28

Surface Chemical Analysisby XPS and SIMS

Any type of mass spectrometer can be used

Quadrupole

Magnetic sector

Time-of-Flight rArr lsquoToFSIMSrsquo

bull high transmission = high signal levels

bull parallel detection = fast acquisition

bull high mass resolution

bull pulsed system

SSIMSStatic Secondary Ion Mass Spectrometry

29

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 3: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

The Surface Engineering and Analysis Laboratory - SEAL

3

- a means to onersquos ends or an end to onersquos means

SEAL

NEXUSNational EPSRC XPS

Usersrsquo Service

New Ion Beam Tools- ToFSIMS- Helium Ion

Surface Chemical Analysisby XPS and SIMS

An end to onersquos means

bull tendency to avoid surface analysis because it is too expensive

bull commercial charges up to pound3000 per day

bull EPSRC Mid-range XPS facility at Newcastle ndash lsquoNEXUSrsquofree to EPSRC fundable researchers

bull SEAL Ion Beam Toolsmay need to make a small charge to cover running costs

bull SEAL has the best instrument base for surface analysis in Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

4

- a means to onersquos ends or an end to onersquos means

Surface Chemical Analysisby XPS and SIMS

An end to onersquos means

bull not here

bull means to onersquos ends helliphelliphelliphelliphellip

5

- a means to onersquos ends or an end to onersquos means

Surface Chemical Analysisby XPS and SIMS

6

What can we dobull determine the elemental chemical and molecular composition of

the outermost surface regions of organic and inorganic materials using spectroscopy imaging and depth profiling

How do we do itbull X-Ray Photoelectron Spectroscopy XPS or ESCA

bull Static Secondary Ion Mass Spectrometry SSIMS

bull Dynamic Secondary Ion Mass Spectrometry DSIMS

Surface Chemical Analysisby XPS and SIMS

7

Surface Chemical Analysisby XPS and SIMS

8

What is a surface

~1microm

1-10 nm

Sampling Depths

SEM EDXIR Raman

SSIMS ~1nmXPS ~10nm

Surface Chemical Analysisby XPS and SIMS

9

Real surfaces arerarely pure materials

Surface ne Bulk material

Segregation Surface EngineeringMigration coatingsPhase Separation treatmentCrystallinity flame plasma EBMW chemicalContamination AdsorptionDegradation Corrosion

tribology Oxidationheat light etc Hydrolysischemical

What is on thereSurfactants PolymersAnti-oxidants ResinsLubricants slip agents BiomaterialsMould Release agents OligomersInorganicsContaminantsReaction Process deposits etc

Surface ne Bulk material

Segregation Surface EngineeringMigration coatingsPhase Separation treatmentCrystallinity flame plasma EBMW chemicalContamination AdsorptionDegradation Corrosion

tribology Oxidationheat light etc Hydrolysischemical

What is on thereSurfactants PolymersAnti-oxidants ResinsLubricants slip agents BiomaterialsMould Release agents OligomersInorganicsContaminantsReaction Process deposits etc

Surface Chemical Analysisby XPS and SIMS

10

XPS (ESCA)

X-rayshν

~ 5nm

hν = KE + BE + φe-

KE = hν - BE - φ

BE = hν - KE - φφ

BE

KE

Binding EnergyKinetic Energy

Surface Chemical Analysisby XPS and SIMS

11

λ vs photoelectron KE

Surface Chemical Analysisby XPS and SIMS

12

Aluminium foil

Mg 1s

C kvv

O kllAl 2s Al 2p

C 1s

O 1s

Mg kllMg 2s Mg 2p

VB

Binding Energy eV

Inte

nsity

cp

s

Auger peaks

Surface Chemical Analysisby XPS and SIMS

13

Aluminium foil

O 1s C 1s Al 2p

Mg 1s

C kvv

O kllAl 2s Al 2p

C 1s

O 1s

Mg kllMg 2s Mg 2p

VB

Surface Chemical Analysisby XPS and SIMS

14

Ultra-highVacuum Chamber

~ 5nm

X-Rays

Sample

emittedphotoelectrons

e-

X-RaySource

Electron EnergyAnalyser

SpectrumImage

I

Energy

O1s

N1s

C1s

XPS (ESCA)X-ray Photoelectron Spectroscopy

bull detects all elements except Hbull detects 1 atom in 1000bull sampling depth from ~ 1nm to ~ 10nmbull relative quantification of elements and chemistrybull chemical information rArr bonding oxidation state

functional groups etc

bull 1-D linescansbull 2-D imaging at ~ 2microm resolutionbull 3-D depth profiles

bull solids and liquidsbull electrical conductors and insulatorsbull analysis at -150degC up to 600degCbull automation

Surface Chemical Analysisby XPS and SIMS

15

PET

coating

O1s C1s

N1s

VB

Okll

Relative Atomic Percentage Compositions - number density

271(286)

729(714)

249 73120

Surface Chemical Analysisby XPS and SIMS

16

PET

C1s O1s

N1s

Surface Chemical Analysisby XPS and SIMS

17

Valence Band

Valence Band

PET

coating

O2s

C2s C2p+O2p

Surface Chemical Analysisby XPS and SIMS

18

θ = 90deg

Samplingdepth d 3λ d= 3λsinθ

θ = 30deg

Tilt the sample to change the photoelectron lsquotake off anglersquoAngle resolved XPS

λ = inelastic mean free path between collisions lsquoimfprsquo

I Itotal = 1 - e -nλ

n of total signal1 6322 8653 9504 9825 9936 997

Typical sampling depths (lsquo3 λrsquo)~10nm in organic materials~5nm in oxides~3nm in metals

d

Surface Chemical Analysisby XPS and SIMS

19

Angle-resolved XPS

bull tilt the sample hellip ARXPS

or

bull collect photoelectrons leaving the surface from a range of angles at the same time hellip PARXPS

Thermo lsquoThetaprobersquo

Surface Chemical Analysisby XPS and SIMS

20

316L Stainless Steel Surface ndash etched and air exposed

~ 25 depth nm ~10Tardio et al Comparative study of the native oxide on 316L stainless steel

J Vac Sci Technol A 33 (5) 2015

Surface Chemical Analysisby XPS and SIMS

21

Imaging XPS

bull element and chemical state imagesbull 2microm spatial resolution

bull Useful to align small area spectroscopy

Surface Chemical Analysisby XPS and SIMS

22

Al on Si SEM test pattern

Si image used to define55microm analysis areas

700 x 300microm

Si area

Al area100microm Al bars100microm Si squares 400microm FOV

Surface Chemical Analysisby XPS and SIMS

23

Al on Si SEM test pattern - 100microm bars

ldquoHyperspectral Imagingrdquobull Record images at different BErsquosbull Select area rArr regenerate spectra

O1s images 533 - 527eV 02eV step

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample damagelsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

24

Surface Chemical Analysisby XPS and SIMS

What is SIMS

25

Surface Chemical Analysisby XPS and SIMS

0 20 40 60 80 100 120 140 160 180 200

200 220 240 260 280 300 320 340 360 380 400

400 420 440 460 480 500 520 540 560 580 600

mz

Mass Spectrometer

lt1nm

Primary ionsSecondary ions

20microm

SSIMSStatic Secondary Ion Mass Spectrometry

26

Surface Chemical Analysisby XPS and SIMS

sputtered moleculesfragmentsionsatomselectronsphotons

mixing implantation sampling

10nm 8nm 1-2nm

primary ion

SSIMS

27

Surface Chemical Analysisby XPS and SIMS

SSIMSStatic Secondary Ion Mass Spectrometry

28

Surface Chemical Analysisby XPS and SIMS

Any type of mass spectrometer can be used

Quadrupole

Magnetic sector

Time-of-Flight rArr lsquoToFSIMSrsquo

bull high transmission = high signal levels

bull parallel detection = fast acquisition

bull high mass resolution

bull pulsed system

SSIMSStatic Secondary Ion Mass Spectrometry

29

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
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  • Slide Number 21
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  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
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  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
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  • Slide Number 105
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  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
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  • Slide Number 113
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  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
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  • Slide Number 122
  • Slide Number 123
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  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
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  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 4: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

An end to onersquos means

bull tendency to avoid surface analysis because it is too expensive

bull commercial charges up to pound3000 per day

bull EPSRC Mid-range XPS facility at Newcastle ndash lsquoNEXUSrsquofree to EPSRC fundable researchers

bull SEAL Ion Beam Toolsmay need to make a small charge to cover running costs

bull SEAL has the best instrument base for surface analysis in Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

4

- a means to onersquos ends or an end to onersquos means

Surface Chemical Analysisby XPS and SIMS

An end to onersquos means

bull not here

bull means to onersquos ends helliphelliphelliphelliphellip

5

- a means to onersquos ends or an end to onersquos means

Surface Chemical Analysisby XPS and SIMS

6

What can we dobull determine the elemental chemical and molecular composition of

the outermost surface regions of organic and inorganic materials using spectroscopy imaging and depth profiling

How do we do itbull X-Ray Photoelectron Spectroscopy XPS or ESCA

bull Static Secondary Ion Mass Spectrometry SSIMS

bull Dynamic Secondary Ion Mass Spectrometry DSIMS

Surface Chemical Analysisby XPS and SIMS

7

Surface Chemical Analysisby XPS and SIMS

8

What is a surface

~1microm

1-10 nm

Sampling Depths

SEM EDXIR Raman

SSIMS ~1nmXPS ~10nm

Surface Chemical Analysisby XPS and SIMS

9

Real surfaces arerarely pure materials

Surface ne Bulk material

Segregation Surface EngineeringMigration coatingsPhase Separation treatmentCrystallinity flame plasma EBMW chemicalContamination AdsorptionDegradation Corrosion

tribology Oxidationheat light etc Hydrolysischemical

What is on thereSurfactants PolymersAnti-oxidants ResinsLubricants slip agents BiomaterialsMould Release agents OligomersInorganicsContaminantsReaction Process deposits etc

Surface ne Bulk material

Segregation Surface EngineeringMigration coatingsPhase Separation treatmentCrystallinity flame plasma EBMW chemicalContamination AdsorptionDegradation Corrosion

tribology Oxidationheat light etc Hydrolysischemical

What is on thereSurfactants PolymersAnti-oxidants ResinsLubricants slip agents BiomaterialsMould Release agents OligomersInorganicsContaminantsReaction Process deposits etc

Surface Chemical Analysisby XPS and SIMS

10

XPS (ESCA)

X-rayshν

~ 5nm

hν = KE + BE + φe-

KE = hν - BE - φ

BE = hν - KE - φφ

BE

KE

Binding EnergyKinetic Energy

Surface Chemical Analysisby XPS and SIMS

11

λ vs photoelectron KE

Surface Chemical Analysisby XPS and SIMS

12

Aluminium foil

Mg 1s

C kvv

O kllAl 2s Al 2p

C 1s

O 1s

Mg kllMg 2s Mg 2p

VB

Binding Energy eV

Inte

nsity

cp

s

Auger peaks

Surface Chemical Analysisby XPS and SIMS

13

Aluminium foil

O 1s C 1s Al 2p

Mg 1s

C kvv

O kllAl 2s Al 2p

C 1s

O 1s

Mg kllMg 2s Mg 2p

VB

Surface Chemical Analysisby XPS and SIMS

14

Ultra-highVacuum Chamber

~ 5nm

X-Rays

Sample

emittedphotoelectrons

e-

X-RaySource

Electron EnergyAnalyser

SpectrumImage

I

Energy

O1s

N1s

C1s

XPS (ESCA)X-ray Photoelectron Spectroscopy

bull detects all elements except Hbull detects 1 atom in 1000bull sampling depth from ~ 1nm to ~ 10nmbull relative quantification of elements and chemistrybull chemical information rArr bonding oxidation state

functional groups etc

bull 1-D linescansbull 2-D imaging at ~ 2microm resolutionbull 3-D depth profiles

bull solids and liquidsbull electrical conductors and insulatorsbull analysis at -150degC up to 600degCbull automation

Surface Chemical Analysisby XPS and SIMS

15

PET

coating

O1s C1s

N1s

VB

Okll

Relative Atomic Percentage Compositions - number density

271(286)

729(714)

249 73120

Surface Chemical Analysisby XPS and SIMS

16

PET

C1s O1s

N1s

Surface Chemical Analysisby XPS and SIMS

17

Valence Band

Valence Band

PET

coating

O2s

C2s C2p+O2p

Surface Chemical Analysisby XPS and SIMS

18

θ = 90deg

Samplingdepth d 3λ d= 3λsinθ

θ = 30deg

Tilt the sample to change the photoelectron lsquotake off anglersquoAngle resolved XPS

λ = inelastic mean free path between collisions lsquoimfprsquo

I Itotal = 1 - e -nλ

n of total signal1 6322 8653 9504 9825 9936 997

Typical sampling depths (lsquo3 λrsquo)~10nm in organic materials~5nm in oxides~3nm in metals

d

Surface Chemical Analysisby XPS and SIMS

19

Angle-resolved XPS

bull tilt the sample hellip ARXPS

or

bull collect photoelectrons leaving the surface from a range of angles at the same time hellip PARXPS

Thermo lsquoThetaprobersquo

Surface Chemical Analysisby XPS and SIMS

20

316L Stainless Steel Surface ndash etched and air exposed

~ 25 depth nm ~10Tardio et al Comparative study of the native oxide on 316L stainless steel

J Vac Sci Technol A 33 (5) 2015

Surface Chemical Analysisby XPS and SIMS

21

Imaging XPS

bull element and chemical state imagesbull 2microm spatial resolution

bull Useful to align small area spectroscopy

Surface Chemical Analysisby XPS and SIMS

22

Al on Si SEM test pattern

Si image used to define55microm analysis areas

700 x 300microm

Si area

Al area100microm Al bars100microm Si squares 400microm FOV

Surface Chemical Analysisby XPS and SIMS

23

Al on Si SEM test pattern - 100microm bars

ldquoHyperspectral Imagingrdquobull Record images at different BErsquosbull Select area rArr regenerate spectra

O1s images 533 - 527eV 02eV step

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample damagelsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

24

Surface Chemical Analysisby XPS and SIMS

What is SIMS

25

Surface Chemical Analysisby XPS and SIMS

0 20 40 60 80 100 120 140 160 180 200

200 220 240 260 280 300 320 340 360 380 400

400 420 440 460 480 500 520 540 560 580 600

mz

Mass Spectrometer

lt1nm

Primary ionsSecondary ions

20microm

SSIMSStatic Secondary Ion Mass Spectrometry

26

Surface Chemical Analysisby XPS and SIMS

sputtered moleculesfragmentsionsatomselectronsphotons

mixing implantation sampling

10nm 8nm 1-2nm

primary ion

SSIMS

27

Surface Chemical Analysisby XPS and SIMS

SSIMSStatic Secondary Ion Mass Spectrometry

28

Surface Chemical Analysisby XPS and SIMS

Any type of mass spectrometer can be used

Quadrupole

Magnetic sector

Time-of-Flight rArr lsquoToFSIMSrsquo

bull high transmission = high signal levels

bull parallel detection = fast acquisition

bull high mass resolution

bull pulsed system

SSIMSStatic Secondary Ion Mass Spectrometry

29

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
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  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
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  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
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  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 5: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

An end to onersquos means

bull not here

bull means to onersquos ends helliphelliphelliphelliphellip

5

- a means to onersquos ends or an end to onersquos means

Surface Chemical Analysisby XPS and SIMS

6

What can we dobull determine the elemental chemical and molecular composition of

the outermost surface regions of organic and inorganic materials using spectroscopy imaging and depth profiling

How do we do itbull X-Ray Photoelectron Spectroscopy XPS or ESCA

bull Static Secondary Ion Mass Spectrometry SSIMS

bull Dynamic Secondary Ion Mass Spectrometry DSIMS

Surface Chemical Analysisby XPS and SIMS

7

Surface Chemical Analysisby XPS and SIMS

8

What is a surface

~1microm

1-10 nm

Sampling Depths

SEM EDXIR Raman

SSIMS ~1nmXPS ~10nm

Surface Chemical Analysisby XPS and SIMS

9

Real surfaces arerarely pure materials

Surface ne Bulk material

Segregation Surface EngineeringMigration coatingsPhase Separation treatmentCrystallinity flame plasma EBMW chemicalContamination AdsorptionDegradation Corrosion

tribology Oxidationheat light etc Hydrolysischemical

What is on thereSurfactants PolymersAnti-oxidants ResinsLubricants slip agents BiomaterialsMould Release agents OligomersInorganicsContaminantsReaction Process deposits etc

Surface ne Bulk material

Segregation Surface EngineeringMigration coatingsPhase Separation treatmentCrystallinity flame plasma EBMW chemicalContamination AdsorptionDegradation Corrosion

tribology Oxidationheat light etc Hydrolysischemical

What is on thereSurfactants PolymersAnti-oxidants ResinsLubricants slip agents BiomaterialsMould Release agents OligomersInorganicsContaminantsReaction Process deposits etc

Surface Chemical Analysisby XPS and SIMS

10

XPS (ESCA)

X-rayshν

~ 5nm

hν = KE + BE + φe-

KE = hν - BE - φ

BE = hν - KE - φφ

BE

KE

Binding EnergyKinetic Energy

Surface Chemical Analysisby XPS and SIMS

11

λ vs photoelectron KE

Surface Chemical Analysisby XPS and SIMS

12

Aluminium foil

Mg 1s

C kvv

O kllAl 2s Al 2p

C 1s

O 1s

Mg kllMg 2s Mg 2p

VB

Binding Energy eV

Inte

nsity

cp

s

Auger peaks

Surface Chemical Analysisby XPS and SIMS

13

Aluminium foil

O 1s C 1s Al 2p

Mg 1s

C kvv

O kllAl 2s Al 2p

C 1s

O 1s

Mg kllMg 2s Mg 2p

VB

Surface Chemical Analysisby XPS and SIMS

14

Ultra-highVacuum Chamber

~ 5nm

X-Rays

Sample

emittedphotoelectrons

e-

X-RaySource

Electron EnergyAnalyser

SpectrumImage

I

Energy

O1s

N1s

C1s

XPS (ESCA)X-ray Photoelectron Spectroscopy

bull detects all elements except Hbull detects 1 atom in 1000bull sampling depth from ~ 1nm to ~ 10nmbull relative quantification of elements and chemistrybull chemical information rArr bonding oxidation state

functional groups etc

bull 1-D linescansbull 2-D imaging at ~ 2microm resolutionbull 3-D depth profiles

bull solids and liquidsbull electrical conductors and insulatorsbull analysis at -150degC up to 600degCbull automation

Surface Chemical Analysisby XPS and SIMS

15

PET

coating

O1s C1s

N1s

VB

Okll

Relative Atomic Percentage Compositions - number density

271(286)

729(714)

249 73120

Surface Chemical Analysisby XPS and SIMS

16

PET

C1s O1s

N1s

Surface Chemical Analysisby XPS and SIMS

17

Valence Band

Valence Band

PET

coating

O2s

C2s C2p+O2p

Surface Chemical Analysisby XPS and SIMS

18

θ = 90deg

Samplingdepth d 3λ d= 3λsinθ

θ = 30deg

Tilt the sample to change the photoelectron lsquotake off anglersquoAngle resolved XPS

λ = inelastic mean free path between collisions lsquoimfprsquo

I Itotal = 1 - e -nλ

n of total signal1 6322 8653 9504 9825 9936 997

Typical sampling depths (lsquo3 λrsquo)~10nm in organic materials~5nm in oxides~3nm in metals

d

Surface Chemical Analysisby XPS and SIMS

19

Angle-resolved XPS

bull tilt the sample hellip ARXPS

or

bull collect photoelectrons leaving the surface from a range of angles at the same time hellip PARXPS

Thermo lsquoThetaprobersquo

Surface Chemical Analysisby XPS and SIMS

20

316L Stainless Steel Surface ndash etched and air exposed

~ 25 depth nm ~10Tardio et al Comparative study of the native oxide on 316L stainless steel

J Vac Sci Technol A 33 (5) 2015

Surface Chemical Analysisby XPS and SIMS

21

Imaging XPS

bull element and chemical state imagesbull 2microm spatial resolution

bull Useful to align small area spectroscopy

Surface Chemical Analysisby XPS and SIMS

22

Al on Si SEM test pattern

Si image used to define55microm analysis areas

700 x 300microm

Si area

Al area100microm Al bars100microm Si squares 400microm FOV

Surface Chemical Analysisby XPS and SIMS

23

Al on Si SEM test pattern - 100microm bars

ldquoHyperspectral Imagingrdquobull Record images at different BErsquosbull Select area rArr regenerate spectra

O1s images 533 - 527eV 02eV step

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample damagelsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

24

Surface Chemical Analysisby XPS and SIMS

What is SIMS

25

Surface Chemical Analysisby XPS and SIMS

0 20 40 60 80 100 120 140 160 180 200

200 220 240 260 280 300 320 340 360 380 400

400 420 440 460 480 500 520 540 560 580 600

mz

Mass Spectrometer

lt1nm

Primary ionsSecondary ions

20microm

SSIMSStatic Secondary Ion Mass Spectrometry

26

Surface Chemical Analysisby XPS and SIMS

sputtered moleculesfragmentsionsatomselectronsphotons

mixing implantation sampling

10nm 8nm 1-2nm

primary ion

SSIMS

27

Surface Chemical Analysisby XPS and SIMS

SSIMSStatic Secondary Ion Mass Spectrometry

28

Surface Chemical Analysisby XPS and SIMS

Any type of mass spectrometer can be used

Quadrupole

Magnetic sector

Time-of-Flight rArr lsquoToFSIMSrsquo

bull high transmission = high signal levels

bull parallel detection = fast acquisition

bull high mass resolution

bull pulsed system

SSIMSStatic Secondary Ion Mass Spectrometry

29

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 81
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  • Slide Number 83
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  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
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  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 6: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

6

What can we dobull determine the elemental chemical and molecular composition of

the outermost surface regions of organic and inorganic materials using spectroscopy imaging and depth profiling

How do we do itbull X-Ray Photoelectron Spectroscopy XPS or ESCA

bull Static Secondary Ion Mass Spectrometry SSIMS

bull Dynamic Secondary Ion Mass Spectrometry DSIMS

Surface Chemical Analysisby XPS and SIMS

7

Surface Chemical Analysisby XPS and SIMS

8

What is a surface

~1microm

1-10 nm

Sampling Depths

SEM EDXIR Raman

SSIMS ~1nmXPS ~10nm

Surface Chemical Analysisby XPS and SIMS

9

Real surfaces arerarely pure materials

Surface ne Bulk material

Segregation Surface EngineeringMigration coatingsPhase Separation treatmentCrystallinity flame plasma EBMW chemicalContamination AdsorptionDegradation Corrosion

tribology Oxidationheat light etc Hydrolysischemical

What is on thereSurfactants PolymersAnti-oxidants ResinsLubricants slip agents BiomaterialsMould Release agents OligomersInorganicsContaminantsReaction Process deposits etc

Surface ne Bulk material

Segregation Surface EngineeringMigration coatingsPhase Separation treatmentCrystallinity flame plasma EBMW chemicalContamination AdsorptionDegradation Corrosion

tribology Oxidationheat light etc Hydrolysischemical

What is on thereSurfactants PolymersAnti-oxidants ResinsLubricants slip agents BiomaterialsMould Release agents OligomersInorganicsContaminantsReaction Process deposits etc

Surface Chemical Analysisby XPS and SIMS

10

XPS (ESCA)

X-rayshν

~ 5nm

hν = KE + BE + φe-

KE = hν - BE - φ

BE = hν - KE - φφ

BE

KE

Binding EnergyKinetic Energy

Surface Chemical Analysisby XPS and SIMS

11

λ vs photoelectron KE

Surface Chemical Analysisby XPS and SIMS

12

Aluminium foil

Mg 1s

C kvv

O kllAl 2s Al 2p

C 1s

O 1s

Mg kllMg 2s Mg 2p

VB

Binding Energy eV

Inte

nsity

cp

s

Auger peaks

Surface Chemical Analysisby XPS and SIMS

13

Aluminium foil

O 1s C 1s Al 2p

Mg 1s

C kvv

O kllAl 2s Al 2p

C 1s

O 1s

Mg kllMg 2s Mg 2p

VB

Surface Chemical Analysisby XPS and SIMS

14

Ultra-highVacuum Chamber

~ 5nm

X-Rays

Sample

emittedphotoelectrons

e-

X-RaySource

Electron EnergyAnalyser

SpectrumImage

I

Energy

O1s

N1s

C1s

XPS (ESCA)X-ray Photoelectron Spectroscopy

bull detects all elements except Hbull detects 1 atom in 1000bull sampling depth from ~ 1nm to ~ 10nmbull relative quantification of elements and chemistrybull chemical information rArr bonding oxidation state

functional groups etc

bull 1-D linescansbull 2-D imaging at ~ 2microm resolutionbull 3-D depth profiles

bull solids and liquidsbull electrical conductors and insulatorsbull analysis at -150degC up to 600degCbull automation

Surface Chemical Analysisby XPS and SIMS

15

PET

coating

O1s C1s

N1s

VB

Okll

Relative Atomic Percentage Compositions - number density

271(286)

729(714)

249 73120

Surface Chemical Analysisby XPS and SIMS

16

PET

C1s O1s

N1s

Surface Chemical Analysisby XPS and SIMS

17

Valence Band

Valence Band

PET

coating

O2s

C2s C2p+O2p

Surface Chemical Analysisby XPS and SIMS

18

θ = 90deg

Samplingdepth d 3λ d= 3λsinθ

θ = 30deg

Tilt the sample to change the photoelectron lsquotake off anglersquoAngle resolved XPS

λ = inelastic mean free path between collisions lsquoimfprsquo

I Itotal = 1 - e -nλ

n of total signal1 6322 8653 9504 9825 9936 997

Typical sampling depths (lsquo3 λrsquo)~10nm in organic materials~5nm in oxides~3nm in metals

d

Surface Chemical Analysisby XPS and SIMS

19

Angle-resolved XPS

bull tilt the sample hellip ARXPS

or

bull collect photoelectrons leaving the surface from a range of angles at the same time hellip PARXPS

Thermo lsquoThetaprobersquo

Surface Chemical Analysisby XPS and SIMS

20

316L Stainless Steel Surface ndash etched and air exposed

~ 25 depth nm ~10Tardio et al Comparative study of the native oxide on 316L stainless steel

J Vac Sci Technol A 33 (5) 2015

Surface Chemical Analysisby XPS and SIMS

21

Imaging XPS

bull element and chemical state imagesbull 2microm spatial resolution

bull Useful to align small area spectroscopy

Surface Chemical Analysisby XPS and SIMS

22

Al on Si SEM test pattern

Si image used to define55microm analysis areas

700 x 300microm

Si area

Al area100microm Al bars100microm Si squares 400microm FOV

Surface Chemical Analysisby XPS and SIMS

23

Al on Si SEM test pattern - 100microm bars

ldquoHyperspectral Imagingrdquobull Record images at different BErsquosbull Select area rArr regenerate spectra

O1s images 533 - 527eV 02eV step

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample damagelsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

24

Surface Chemical Analysisby XPS and SIMS

What is SIMS

25

Surface Chemical Analysisby XPS and SIMS

0 20 40 60 80 100 120 140 160 180 200

200 220 240 260 280 300 320 340 360 380 400

400 420 440 460 480 500 520 540 560 580 600

mz

Mass Spectrometer

lt1nm

Primary ionsSecondary ions

20microm

SSIMSStatic Secondary Ion Mass Spectrometry

26

Surface Chemical Analysisby XPS and SIMS

sputtered moleculesfragmentsionsatomselectronsphotons

mixing implantation sampling

10nm 8nm 1-2nm

primary ion

SSIMS

27

Surface Chemical Analysisby XPS and SIMS

SSIMSStatic Secondary Ion Mass Spectrometry

28

Surface Chemical Analysisby XPS and SIMS

Any type of mass spectrometer can be used

Quadrupole

Magnetic sector

Time-of-Flight rArr lsquoToFSIMSrsquo

bull high transmission = high signal levels

bull parallel detection = fast acquisition

bull high mass resolution

bull pulsed system

SSIMSStatic Secondary Ion Mass Spectrometry

29

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
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  • Slide Number 83
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  • Slide Number 85
  • Slide Number 86
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  • Slide Number 88
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  • Slide Number 90
  • Slide Number 91
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  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
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  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
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  • Slide Number 130
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  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 7: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

7

Surface Chemical Analysisby XPS and SIMS

8

What is a surface

~1microm

1-10 nm

Sampling Depths

SEM EDXIR Raman

SSIMS ~1nmXPS ~10nm

Surface Chemical Analysisby XPS and SIMS

9

Real surfaces arerarely pure materials

Surface ne Bulk material

Segregation Surface EngineeringMigration coatingsPhase Separation treatmentCrystallinity flame plasma EBMW chemicalContamination AdsorptionDegradation Corrosion

tribology Oxidationheat light etc Hydrolysischemical

What is on thereSurfactants PolymersAnti-oxidants ResinsLubricants slip agents BiomaterialsMould Release agents OligomersInorganicsContaminantsReaction Process deposits etc

Surface ne Bulk material

Segregation Surface EngineeringMigration coatingsPhase Separation treatmentCrystallinity flame plasma EBMW chemicalContamination AdsorptionDegradation Corrosion

tribology Oxidationheat light etc Hydrolysischemical

What is on thereSurfactants PolymersAnti-oxidants ResinsLubricants slip agents BiomaterialsMould Release agents OligomersInorganicsContaminantsReaction Process deposits etc

Surface Chemical Analysisby XPS and SIMS

10

XPS (ESCA)

X-rayshν

~ 5nm

hν = KE + BE + φe-

KE = hν - BE - φ

BE = hν - KE - φφ

BE

KE

Binding EnergyKinetic Energy

Surface Chemical Analysisby XPS and SIMS

11

λ vs photoelectron KE

Surface Chemical Analysisby XPS and SIMS

12

Aluminium foil

Mg 1s

C kvv

O kllAl 2s Al 2p

C 1s

O 1s

Mg kllMg 2s Mg 2p

VB

Binding Energy eV

Inte

nsity

cp

s

Auger peaks

Surface Chemical Analysisby XPS and SIMS

13

Aluminium foil

O 1s C 1s Al 2p

Mg 1s

C kvv

O kllAl 2s Al 2p

C 1s

O 1s

Mg kllMg 2s Mg 2p

VB

Surface Chemical Analysisby XPS and SIMS

14

Ultra-highVacuum Chamber

~ 5nm

X-Rays

Sample

emittedphotoelectrons

e-

X-RaySource

Electron EnergyAnalyser

SpectrumImage

I

Energy

O1s

N1s

C1s

XPS (ESCA)X-ray Photoelectron Spectroscopy

bull detects all elements except Hbull detects 1 atom in 1000bull sampling depth from ~ 1nm to ~ 10nmbull relative quantification of elements and chemistrybull chemical information rArr bonding oxidation state

functional groups etc

bull 1-D linescansbull 2-D imaging at ~ 2microm resolutionbull 3-D depth profiles

bull solids and liquidsbull electrical conductors and insulatorsbull analysis at -150degC up to 600degCbull automation

Surface Chemical Analysisby XPS and SIMS

15

PET

coating

O1s C1s

N1s

VB

Okll

Relative Atomic Percentage Compositions - number density

271(286)

729(714)

249 73120

Surface Chemical Analysisby XPS and SIMS

16

PET

C1s O1s

N1s

Surface Chemical Analysisby XPS and SIMS

17

Valence Band

Valence Band

PET

coating

O2s

C2s C2p+O2p

Surface Chemical Analysisby XPS and SIMS

18

θ = 90deg

Samplingdepth d 3λ d= 3λsinθ

θ = 30deg

Tilt the sample to change the photoelectron lsquotake off anglersquoAngle resolved XPS

λ = inelastic mean free path between collisions lsquoimfprsquo

I Itotal = 1 - e -nλ

n of total signal1 6322 8653 9504 9825 9936 997

Typical sampling depths (lsquo3 λrsquo)~10nm in organic materials~5nm in oxides~3nm in metals

d

Surface Chemical Analysisby XPS and SIMS

19

Angle-resolved XPS

bull tilt the sample hellip ARXPS

or

bull collect photoelectrons leaving the surface from a range of angles at the same time hellip PARXPS

Thermo lsquoThetaprobersquo

Surface Chemical Analysisby XPS and SIMS

20

316L Stainless Steel Surface ndash etched and air exposed

~ 25 depth nm ~10Tardio et al Comparative study of the native oxide on 316L stainless steel

J Vac Sci Technol A 33 (5) 2015

Surface Chemical Analysisby XPS and SIMS

21

Imaging XPS

bull element and chemical state imagesbull 2microm spatial resolution

bull Useful to align small area spectroscopy

Surface Chemical Analysisby XPS and SIMS

22

Al on Si SEM test pattern

Si image used to define55microm analysis areas

700 x 300microm

Si area

Al area100microm Al bars100microm Si squares 400microm FOV

Surface Chemical Analysisby XPS and SIMS

23

Al on Si SEM test pattern - 100microm bars

ldquoHyperspectral Imagingrdquobull Record images at different BErsquosbull Select area rArr regenerate spectra

O1s images 533 - 527eV 02eV step

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample damagelsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

24

Surface Chemical Analysisby XPS and SIMS

What is SIMS

25

Surface Chemical Analysisby XPS and SIMS

0 20 40 60 80 100 120 140 160 180 200

200 220 240 260 280 300 320 340 360 380 400

400 420 440 460 480 500 520 540 560 580 600

mz

Mass Spectrometer

lt1nm

Primary ionsSecondary ions

20microm

SSIMSStatic Secondary Ion Mass Spectrometry

26

Surface Chemical Analysisby XPS and SIMS

sputtered moleculesfragmentsionsatomselectronsphotons

mixing implantation sampling

10nm 8nm 1-2nm

primary ion

SSIMS

27

Surface Chemical Analysisby XPS and SIMS

SSIMSStatic Secondary Ion Mass Spectrometry

28

Surface Chemical Analysisby XPS and SIMS

Any type of mass spectrometer can be used

Quadrupole

Magnetic sector

Time-of-Flight rArr lsquoToFSIMSrsquo

bull high transmission = high signal levels

bull parallel detection = fast acquisition

bull high mass resolution

bull pulsed system

SSIMSStatic Secondary Ion Mass Spectrometry

29

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
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  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 81
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  • Slide Number 83
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  • Slide Number 86
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  • Slide Number 88
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  • Slide Number 90
  • Slide Number 91
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  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
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  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
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  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
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  • Slide Number 113
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  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
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  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
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  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 8: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

8

What is a surface

~1microm

1-10 nm

Sampling Depths

SEM EDXIR Raman

SSIMS ~1nmXPS ~10nm

Surface Chemical Analysisby XPS and SIMS

9

Real surfaces arerarely pure materials

Surface ne Bulk material

Segregation Surface EngineeringMigration coatingsPhase Separation treatmentCrystallinity flame plasma EBMW chemicalContamination AdsorptionDegradation Corrosion

tribology Oxidationheat light etc Hydrolysischemical

What is on thereSurfactants PolymersAnti-oxidants ResinsLubricants slip agents BiomaterialsMould Release agents OligomersInorganicsContaminantsReaction Process deposits etc

Surface ne Bulk material

Segregation Surface EngineeringMigration coatingsPhase Separation treatmentCrystallinity flame plasma EBMW chemicalContamination AdsorptionDegradation Corrosion

tribology Oxidationheat light etc Hydrolysischemical

What is on thereSurfactants PolymersAnti-oxidants ResinsLubricants slip agents BiomaterialsMould Release agents OligomersInorganicsContaminantsReaction Process deposits etc

Surface Chemical Analysisby XPS and SIMS

10

XPS (ESCA)

X-rayshν

~ 5nm

hν = KE + BE + φe-

KE = hν - BE - φ

BE = hν - KE - φφ

BE

KE

Binding EnergyKinetic Energy

Surface Chemical Analysisby XPS and SIMS

11

λ vs photoelectron KE

Surface Chemical Analysisby XPS and SIMS

12

Aluminium foil

Mg 1s

C kvv

O kllAl 2s Al 2p

C 1s

O 1s

Mg kllMg 2s Mg 2p

VB

Binding Energy eV

Inte

nsity

cp

s

Auger peaks

Surface Chemical Analysisby XPS and SIMS

13

Aluminium foil

O 1s C 1s Al 2p

Mg 1s

C kvv

O kllAl 2s Al 2p

C 1s

O 1s

Mg kllMg 2s Mg 2p

VB

Surface Chemical Analysisby XPS and SIMS

14

Ultra-highVacuum Chamber

~ 5nm

X-Rays

Sample

emittedphotoelectrons

e-

X-RaySource

Electron EnergyAnalyser

SpectrumImage

I

Energy

O1s

N1s

C1s

XPS (ESCA)X-ray Photoelectron Spectroscopy

bull detects all elements except Hbull detects 1 atom in 1000bull sampling depth from ~ 1nm to ~ 10nmbull relative quantification of elements and chemistrybull chemical information rArr bonding oxidation state

functional groups etc

bull 1-D linescansbull 2-D imaging at ~ 2microm resolutionbull 3-D depth profiles

bull solids and liquidsbull electrical conductors and insulatorsbull analysis at -150degC up to 600degCbull automation

Surface Chemical Analysisby XPS and SIMS

15

PET

coating

O1s C1s

N1s

VB

Okll

Relative Atomic Percentage Compositions - number density

271(286)

729(714)

249 73120

Surface Chemical Analysisby XPS and SIMS

16

PET

C1s O1s

N1s

Surface Chemical Analysisby XPS and SIMS

17

Valence Band

Valence Band

PET

coating

O2s

C2s C2p+O2p

Surface Chemical Analysisby XPS and SIMS

18

θ = 90deg

Samplingdepth d 3λ d= 3λsinθ

θ = 30deg

Tilt the sample to change the photoelectron lsquotake off anglersquoAngle resolved XPS

λ = inelastic mean free path between collisions lsquoimfprsquo

I Itotal = 1 - e -nλ

n of total signal1 6322 8653 9504 9825 9936 997

Typical sampling depths (lsquo3 λrsquo)~10nm in organic materials~5nm in oxides~3nm in metals

d

Surface Chemical Analysisby XPS and SIMS

19

Angle-resolved XPS

bull tilt the sample hellip ARXPS

or

bull collect photoelectrons leaving the surface from a range of angles at the same time hellip PARXPS

Thermo lsquoThetaprobersquo

Surface Chemical Analysisby XPS and SIMS

20

316L Stainless Steel Surface ndash etched and air exposed

~ 25 depth nm ~10Tardio et al Comparative study of the native oxide on 316L stainless steel

J Vac Sci Technol A 33 (5) 2015

Surface Chemical Analysisby XPS and SIMS

21

Imaging XPS

bull element and chemical state imagesbull 2microm spatial resolution

bull Useful to align small area spectroscopy

Surface Chemical Analysisby XPS and SIMS

22

Al on Si SEM test pattern

Si image used to define55microm analysis areas

700 x 300microm

Si area

Al area100microm Al bars100microm Si squares 400microm FOV

Surface Chemical Analysisby XPS and SIMS

23

Al on Si SEM test pattern - 100microm bars

ldquoHyperspectral Imagingrdquobull Record images at different BErsquosbull Select area rArr regenerate spectra

O1s images 533 - 527eV 02eV step

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample damagelsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

24

Surface Chemical Analysisby XPS and SIMS

What is SIMS

25

Surface Chemical Analysisby XPS and SIMS

0 20 40 60 80 100 120 140 160 180 200

200 220 240 260 280 300 320 340 360 380 400

400 420 440 460 480 500 520 540 560 580 600

mz

Mass Spectrometer

lt1nm

Primary ionsSecondary ions

20microm

SSIMSStatic Secondary Ion Mass Spectrometry

26

Surface Chemical Analysisby XPS and SIMS

sputtered moleculesfragmentsionsatomselectronsphotons

mixing implantation sampling

10nm 8nm 1-2nm

primary ion

SSIMS

27

Surface Chemical Analysisby XPS and SIMS

SSIMSStatic Secondary Ion Mass Spectrometry

28

Surface Chemical Analysisby XPS and SIMS

Any type of mass spectrometer can be used

Quadrupole

Magnetic sector

Time-of-Flight rArr lsquoToFSIMSrsquo

bull high transmission = high signal levels

bull parallel detection = fast acquisition

bull high mass resolution

bull pulsed system

SSIMSStatic Secondary Ion Mass Spectrometry

29

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
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  • Slide Number 125
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  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 9: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

9

Real surfaces arerarely pure materials

Surface ne Bulk material

Segregation Surface EngineeringMigration coatingsPhase Separation treatmentCrystallinity flame plasma EBMW chemicalContamination AdsorptionDegradation Corrosion

tribology Oxidationheat light etc Hydrolysischemical

What is on thereSurfactants PolymersAnti-oxidants ResinsLubricants slip agents BiomaterialsMould Release agents OligomersInorganicsContaminantsReaction Process deposits etc

Surface ne Bulk material

Segregation Surface EngineeringMigration coatingsPhase Separation treatmentCrystallinity flame plasma EBMW chemicalContamination AdsorptionDegradation Corrosion

tribology Oxidationheat light etc Hydrolysischemical

What is on thereSurfactants PolymersAnti-oxidants ResinsLubricants slip agents BiomaterialsMould Release agents OligomersInorganicsContaminantsReaction Process deposits etc

Surface Chemical Analysisby XPS and SIMS

10

XPS (ESCA)

X-rayshν

~ 5nm

hν = KE + BE + φe-

KE = hν - BE - φ

BE = hν - KE - φφ

BE

KE

Binding EnergyKinetic Energy

Surface Chemical Analysisby XPS and SIMS

11

λ vs photoelectron KE

Surface Chemical Analysisby XPS and SIMS

12

Aluminium foil

Mg 1s

C kvv

O kllAl 2s Al 2p

C 1s

O 1s

Mg kllMg 2s Mg 2p

VB

Binding Energy eV

Inte

nsity

cp

s

Auger peaks

Surface Chemical Analysisby XPS and SIMS

13

Aluminium foil

O 1s C 1s Al 2p

Mg 1s

C kvv

O kllAl 2s Al 2p

C 1s

O 1s

Mg kllMg 2s Mg 2p

VB

Surface Chemical Analysisby XPS and SIMS

14

Ultra-highVacuum Chamber

~ 5nm

X-Rays

Sample

emittedphotoelectrons

e-

X-RaySource

Electron EnergyAnalyser

SpectrumImage

I

Energy

O1s

N1s

C1s

XPS (ESCA)X-ray Photoelectron Spectroscopy

bull detects all elements except Hbull detects 1 atom in 1000bull sampling depth from ~ 1nm to ~ 10nmbull relative quantification of elements and chemistrybull chemical information rArr bonding oxidation state

functional groups etc

bull 1-D linescansbull 2-D imaging at ~ 2microm resolutionbull 3-D depth profiles

bull solids and liquidsbull electrical conductors and insulatorsbull analysis at -150degC up to 600degCbull automation

Surface Chemical Analysisby XPS and SIMS

15

PET

coating

O1s C1s

N1s

VB

Okll

Relative Atomic Percentage Compositions - number density

271(286)

729(714)

249 73120

Surface Chemical Analysisby XPS and SIMS

16

PET

C1s O1s

N1s

Surface Chemical Analysisby XPS and SIMS

17

Valence Band

Valence Band

PET

coating

O2s

C2s C2p+O2p

Surface Chemical Analysisby XPS and SIMS

18

θ = 90deg

Samplingdepth d 3λ d= 3λsinθ

θ = 30deg

Tilt the sample to change the photoelectron lsquotake off anglersquoAngle resolved XPS

λ = inelastic mean free path between collisions lsquoimfprsquo

I Itotal = 1 - e -nλ

n of total signal1 6322 8653 9504 9825 9936 997

Typical sampling depths (lsquo3 λrsquo)~10nm in organic materials~5nm in oxides~3nm in metals

d

Surface Chemical Analysisby XPS and SIMS

19

Angle-resolved XPS

bull tilt the sample hellip ARXPS

or

bull collect photoelectrons leaving the surface from a range of angles at the same time hellip PARXPS

Thermo lsquoThetaprobersquo

Surface Chemical Analysisby XPS and SIMS

20

316L Stainless Steel Surface ndash etched and air exposed

~ 25 depth nm ~10Tardio et al Comparative study of the native oxide on 316L stainless steel

J Vac Sci Technol A 33 (5) 2015

Surface Chemical Analysisby XPS and SIMS

21

Imaging XPS

bull element and chemical state imagesbull 2microm spatial resolution

bull Useful to align small area spectroscopy

Surface Chemical Analysisby XPS and SIMS

22

Al on Si SEM test pattern

Si image used to define55microm analysis areas

700 x 300microm

Si area

Al area100microm Al bars100microm Si squares 400microm FOV

Surface Chemical Analysisby XPS and SIMS

23

Al on Si SEM test pattern - 100microm bars

ldquoHyperspectral Imagingrdquobull Record images at different BErsquosbull Select area rArr regenerate spectra

O1s images 533 - 527eV 02eV step

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample damagelsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

24

Surface Chemical Analysisby XPS and SIMS

What is SIMS

25

Surface Chemical Analysisby XPS and SIMS

0 20 40 60 80 100 120 140 160 180 200

200 220 240 260 280 300 320 340 360 380 400

400 420 440 460 480 500 520 540 560 580 600

mz

Mass Spectrometer

lt1nm

Primary ionsSecondary ions

20microm

SSIMSStatic Secondary Ion Mass Spectrometry

26

Surface Chemical Analysisby XPS and SIMS

sputtered moleculesfragmentsionsatomselectronsphotons

mixing implantation sampling

10nm 8nm 1-2nm

primary ion

SSIMS

27

Surface Chemical Analysisby XPS and SIMS

SSIMSStatic Secondary Ion Mass Spectrometry

28

Surface Chemical Analysisby XPS and SIMS

Any type of mass spectrometer can be used

Quadrupole

Magnetic sector

Time-of-Flight rArr lsquoToFSIMSrsquo

bull high transmission = high signal levels

bull parallel detection = fast acquisition

bull high mass resolution

bull pulsed system

SSIMSStatic Secondary Ion Mass Spectrometry

29

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
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  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 83
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  • Slide Number 86
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  • Slide Number 88
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  • Slide Number 90
  • Slide Number 91
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  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
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  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
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  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
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  • Slide Number 113
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  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
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  • Slide Number 122
  • Slide Number 123
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  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
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  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 10: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

10

XPS (ESCA)

X-rayshν

~ 5nm

hν = KE + BE + φe-

KE = hν - BE - φ

BE = hν - KE - φφ

BE

KE

Binding EnergyKinetic Energy

Surface Chemical Analysisby XPS and SIMS

11

λ vs photoelectron KE

Surface Chemical Analysisby XPS and SIMS

12

Aluminium foil

Mg 1s

C kvv

O kllAl 2s Al 2p

C 1s

O 1s

Mg kllMg 2s Mg 2p

VB

Binding Energy eV

Inte

nsity

cp

s

Auger peaks

Surface Chemical Analysisby XPS and SIMS

13

Aluminium foil

O 1s C 1s Al 2p

Mg 1s

C kvv

O kllAl 2s Al 2p

C 1s

O 1s

Mg kllMg 2s Mg 2p

VB

Surface Chemical Analysisby XPS and SIMS

14

Ultra-highVacuum Chamber

~ 5nm

X-Rays

Sample

emittedphotoelectrons

e-

X-RaySource

Electron EnergyAnalyser

SpectrumImage

I

Energy

O1s

N1s

C1s

XPS (ESCA)X-ray Photoelectron Spectroscopy

bull detects all elements except Hbull detects 1 atom in 1000bull sampling depth from ~ 1nm to ~ 10nmbull relative quantification of elements and chemistrybull chemical information rArr bonding oxidation state

functional groups etc

bull 1-D linescansbull 2-D imaging at ~ 2microm resolutionbull 3-D depth profiles

bull solids and liquidsbull electrical conductors and insulatorsbull analysis at -150degC up to 600degCbull automation

Surface Chemical Analysisby XPS and SIMS

15

PET

coating

O1s C1s

N1s

VB

Okll

Relative Atomic Percentage Compositions - number density

271(286)

729(714)

249 73120

Surface Chemical Analysisby XPS and SIMS

16

PET

C1s O1s

N1s

Surface Chemical Analysisby XPS and SIMS

17

Valence Band

Valence Band

PET

coating

O2s

C2s C2p+O2p

Surface Chemical Analysisby XPS and SIMS

18

θ = 90deg

Samplingdepth d 3λ d= 3λsinθ

θ = 30deg

Tilt the sample to change the photoelectron lsquotake off anglersquoAngle resolved XPS

λ = inelastic mean free path between collisions lsquoimfprsquo

I Itotal = 1 - e -nλ

n of total signal1 6322 8653 9504 9825 9936 997

Typical sampling depths (lsquo3 λrsquo)~10nm in organic materials~5nm in oxides~3nm in metals

d

Surface Chemical Analysisby XPS and SIMS

19

Angle-resolved XPS

bull tilt the sample hellip ARXPS

or

bull collect photoelectrons leaving the surface from a range of angles at the same time hellip PARXPS

Thermo lsquoThetaprobersquo

Surface Chemical Analysisby XPS and SIMS

20

316L Stainless Steel Surface ndash etched and air exposed

~ 25 depth nm ~10Tardio et al Comparative study of the native oxide on 316L stainless steel

J Vac Sci Technol A 33 (5) 2015

Surface Chemical Analysisby XPS and SIMS

21

Imaging XPS

bull element and chemical state imagesbull 2microm spatial resolution

bull Useful to align small area spectroscopy

Surface Chemical Analysisby XPS and SIMS

22

Al on Si SEM test pattern

Si image used to define55microm analysis areas

700 x 300microm

Si area

Al area100microm Al bars100microm Si squares 400microm FOV

Surface Chemical Analysisby XPS and SIMS

23

Al on Si SEM test pattern - 100microm bars

ldquoHyperspectral Imagingrdquobull Record images at different BErsquosbull Select area rArr regenerate spectra

O1s images 533 - 527eV 02eV step

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample damagelsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

24

Surface Chemical Analysisby XPS and SIMS

What is SIMS

25

Surface Chemical Analysisby XPS and SIMS

0 20 40 60 80 100 120 140 160 180 200

200 220 240 260 280 300 320 340 360 380 400

400 420 440 460 480 500 520 540 560 580 600

mz

Mass Spectrometer

lt1nm

Primary ionsSecondary ions

20microm

SSIMSStatic Secondary Ion Mass Spectrometry

26

Surface Chemical Analysisby XPS and SIMS

sputtered moleculesfragmentsionsatomselectronsphotons

mixing implantation sampling

10nm 8nm 1-2nm

primary ion

SSIMS

27

Surface Chemical Analysisby XPS and SIMS

SSIMSStatic Secondary Ion Mass Spectrometry

28

Surface Chemical Analysisby XPS and SIMS

Any type of mass spectrometer can be used

Quadrupole

Magnetic sector

Time-of-Flight rArr lsquoToFSIMSrsquo

bull high transmission = high signal levels

bull parallel detection = fast acquisition

bull high mass resolution

bull pulsed system

SSIMSStatic Secondary Ion Mass Spectrometry

29

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 81
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  • Slide Number 83
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  • Slide Number 86
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  • Slide Number 98
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  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 11: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

11

λ vs photoelectron KE

Surface Chemical Analysisby XPS and SIMS

12

Aluminium foil

Mg 1s

C kvv

O kllAl 2s Al 2p

C 1s

O 1s

Mg kllMg 2s Mg 2p

VB

Binding Energy eV

Inte

nsity

cp

s

Auger peaks

Surface Chemical Analysisby XPS and SIMS

13

Aluminium foil

O 1s C 1s Al 2p

Mg 1s

C kvv

O kllAl 2s Al 2p

C 1s

O 1s

Mg kllMg 2s Mg 2p

VB

Surface Chemical Analysisby XPS and SIMS

14

Ultra-highVacuum Chamber

~ 5nm

X-Rays

Sample

emittedphotoelectrons

e-

X-RaySource

Electron EnergyAnalyser

SpectrumImage

I

Energy

O1s

N1s

C1s

XPS (ESCA)X-ray Photoelectron Spectroscopy

bull detects all elements except Hbull detects 1 atom in 1000bull sampling depth from ~ 1nm to ~ 10nmbull relative quantification of elements and chemistrybull chemical information rArr bonding oxidation state

functional groups etc

bull 1-D linescansbull 2-D imaging at ~ 2microm resolutionbull 3-D depth profiles

bull solids and liquidsbull electrical conductors and insulatorsbull analysis at -150degC up to 600degCbull automation

Surface Chemical Analysisby XPS and SIMS

15

PET

coating

O1s C1s

N1s

VB

Okll

Relative Atomic Percentage Compositions - number density

271(286)

729(714)

249 73120

Surface Chemical Analysisby XPS and SIMS

16

PET

C1s O1s

N1s

Surface Chemical Analysisby XPS and SIMS

17

Valence Band

Valence Band

PET

coating

O2s

C2s C2p+O2p

Surface Chemical Analysisby XPS and SIMS

18

θ = 90deg

Samplingdepth d 3λ d= 3λsinθ

θ = 30deg

Tilt the sample to change the photoelectron lsquotake off anglersquoAngle resolved XPS

λ = inelastic mean free path between collisions lsquoimfprsquo

I Itotal = 1 - e -nλ

n of total signal1 6322 8653 9504 9825 9936 997

Typical sampling depths (lsquo3 λrsquo)~10nm in organic materials~5nm in oxides~3nm in metals

d

Surface Chemical Analysisby XPS and SIMS

19

Angle-resolved XPS

bull tilt the sample hellip ARXPS

or

bull collect photoelectrons leaving the surface from a range of angles at the same time hellip PARXPS

Thermo lsquoThetaprobersquo

Surface Chemical Analysisby XPS and SIMS

20

316L Stainless Steel Surface ndash etched and air exposed

~ 25 depth nm ~10Tardio et al Comparative study of the native oxide on 316L stainless steel

J Vac Sci Technol A 33 (5) 2015

Surface Chemical Analysisby XPS and SIMS

21

Imaging XPS

bull element and chemical state imagesbull 2microm spatial resolution

bull Useful to align small area spectroscopy

Surface Chemical Analysisby XPS and SIMS

22

Al on Si SEM test pattern

Si image used to define55microm analysis areas

700 x 300microm

Si area

Al area100microm Al bars100microm Si squares 400microm FOV

Surface Chemical Analysisby XPS and SIMS

23

Al on Si SEM test pattern - 100microm bars

ldquoHyperspectral Imagingrdquobull Record images at different BErsquosbull Select area rArr regenerate spectra

O1s images 533 - 527eV 02eV step

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample damagelsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

24

Surface Chemical Analysisby XPS and SIMS

What is SIMS

25

Surface Chemical Analysisby XPS and SIMS

0 20 40 60 80 100 120 140 160 180 200

200 220 240 260 280 300 320 340 360 380 400

400 420 440 460 480 500 520 540 560 580 600

mz

Mass Spectrometer

lt1nm

Primary ionsSecondary ions

20microm

SSIMSStatic Secondary Ion Mass Spectrometry

26

Surface Chemical Analysisby XPS and SIMS

sputtered moleculesfragmentsionsatomselectronsphotons

mixing implantation sampling

10nm 8nm 1-2nm

primary ion

SSIMS

27

Surface Chemical Analysisby XPS and SIMS

SSIMSStatic Secondary Ion Mass Spectrometry

28

Surface Chemical Analysisby XPS and SIMS

Any type of mass spectrometer can be used

Quadrupole

Magnetic sector

Time-of-Flight rArr lsquoToFSIMSrsquo

bull high transmission = high signal levels

bull parallel detection = fast acquisition

bull high mass resolution

bull pulsed system

SSIMSStatic Secondary Ion Mass Spectrometry

29

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
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  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
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  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 81
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  • Slide Number 83
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  • Slide Number 86
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  • Slide Number 88
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  • Slide Number 90
  • Slide Number 91
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  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
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  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
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  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
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  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 12: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

12

Aluminium foil

Mg 1s

C kvv

O kllAl 2s Al 2p

C 1s

O 1s

Mg kllMg 2s Mg 2p

VB

Binding Energy eV

Inte

nsity

cp

s

Auger peaks

Surface Chemical Analysisby XPS and SIMS

13

Aluminium foil

O 1s C 1s Al 2p

Mg 1s

C kvv

O kllAl 2s Al 2p

C 1s

O 1s

Mg kllMg 2s Mg 2p

VB

Surface Chemical Analysisby XPS and SIMS

14

Ultra-highVacuum Chamber

~ 5nm

X-Rays

Sample

emittedphotoelectrons

e-

X-RaySource

Electron EnergyAnalyser

SpectrumImage

I

Energy

O1s

N1s

C1s

XPS (ESCA)X-ray Photoelectron Spectroscopy

bull detects all elements except Hbull detects 1 atom in 1000bull sampling depth from ~ 1nm to ~ 10nmbull relative quantification of elements and chemistrybull chemical information rArr bonding oxidation state

functional groups etc

bull 1-D linescansbull 2-D imaging at ~ 2microm resolutionbull 3-D depth profiles

bull solids and liquidsbull electrical conductors and insulatorsbull analysis at -150degC up to 600degCbull automation

Surface Chemical Analysisby XPS and SIMS

15

PET

coating

O1s C1s

N1s

VB

Okll

Relative Atomic Percentage Compositions - number density

271(286)

729(714)

249 73120

Surface Chemical Analysisby XPS and SIMS

16

PET

C1s O1s

N1s

Surface Chemical Analysisby XPS and SIMS

17

Valence Band

Valence Band

PET

coating

O2s

C2s C2p+O2p

Surface Chemical Analysisby XPS and SIMS

18

θ = 90deg

Samplingdepth d 3λ d= 3λsinθ

θ = 30deg

Tilt the sample to change the photoelectron lsquotake off anglersquoAngle resolved XPS

λ = inelastic mean free path between collisions lsquoimfprsquo

I Itotal = 1 - e -nλ

n of total signal1 6322 8653 9504 9825 9936 997

Typical sampling depths (lsquo3 λrsquo)~10nm in organic materials~5nm in oxides~3nm in metals

d

Surface Chemical Analysisby XPS and SIMS

19

Angle-resolved XPS

bull tilt the sample hellip ARXPS

or

bull collect photoelectrons leaving the surface from a range of angles at the same time hellip PARXPS

Thermo lsquoThetaprobersquo

Surface Chemical Analysisby XPS and SIMS

20

316L Stainless Steel Surface ndash etched and air exposed

~ 25 depth nm ~10Tardio et al Comparative study of the native oxide on 316L stainless steel

J Vac Sci Technol A 33 (5) 2015

Surface Chemical Analysisby XPS and SIMS

21

Imaging XPS

bull element and chemical state imagesbull 2microm spatial resolution

bull Useful to align small area spectroscopy

Surface Chemical Analysisby XPS and SIMS

22

Al on Si SEM test pattern

Si image used to define55microm analysis areas

700 x 300microm

Si area

Al area100microm Al bars100microm Si squares 400microm FOV

Surface Chemical Analysisby XPS and SIMS

23

Al on Si SEM test pattern - 100microm bars

ldquoHyperspectral Imagingrdquobull Record images at different BErsquosbull Select area rArr regenerate spectra

O1s images 533 - 527eV 02eV step

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample damagelsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

24

Surface Chemical Analysisby XPS and SIMS

What is SIMS

25

Surface Chemical Analysisby XPS and SIMS

0 20 40 60 80 100 120 140 160 180 200

200 220 240 260 280 300 320 340 360 380 400

400 420 440 460 480 500 520 540 560 580 600

mz

Mass Spectrometer

lt1nm

Primary ionsSecondary ions

20microm

SSIMSStatic Secondary Ion Mass Spectrometry

26

Surface Chemical Analysisby XPS and SIMS

sputtered moleculesfragmentsionsatomselectronsphotons

mixing implantation sampling

10nm 8nm 1-2nm

primary ion

SSIMS

27

Surface Chemical Analysisby XPS and SIMS

SSIMSStatic Secondary Ion Mass Spectrometry

28

Surface Chemical Analysisby XPS and SIMS

Any type of mass spectrometer can be used

Quadrupole

Magnetic sector

Time-of-Flight rArr lsquoToFSIMSrsquo

bull high transmission = high signal levels

bull parallel detection = fast acquisition

bull high mass resolution

bull pulsed system

SSIMSStatic Secondary Ion Mass Spectrometry

29

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 83
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  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 13: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

13

Aluminium foil

O 1s C 1s Al 2p

Mg 1s

C kvv

O kllAl 2s Al 2p

C 1s

O 1s

Mg kllMg 2s Mg 2p

VB

Surface Chemical Analysisby XPS and SIMS

14

Ultra-highVacuum Chamber

~ 5nm

X-Rays

Sample

emittedphotoelectrons

e-

X-RaySource

Electron EnergyAnalyser

SpectrumImage

I

Energy

O1s

N1s

C1s

XPS (ESCA)X-ray Photoelectron Spectroscopy

bull detects all elements except Hbull detects 1 atom in 1000bull sampling depth from ~ 1nm to ~ 10nmbull relative quantification of elements and chemistrybull chemical information rArr bonding oxidation state

functional groups etc

bull 1-D linescansbull 2-D imaging at ~ 2microm resolutionbull 3-D depth profiles

bull solids and liquidsbull electrical conductors and insulatorsbull analysis at -150degC up to 600degCbull automation

Surface Chemical Analysisby XPS and SIMS

15

PET

coating

O1s C1s

N1s

VB

Okll

Relative Atomic Percentage Compositions - number density

271(286)

729(714)

249 73120

Surface Chemical Analysisby XPS and SIMS

16

PET

C1s O1s

N1s

Surface Chemical Analysisby XPS and SIMS

17

Valence Band

Valence Band

PET

coating

O2s

C2s C2p+O2p

Surface Chemical Analysisby XPS and SIMS

18

θ = 90deg

Samplingdepth d 3λ d= 3λsinθ

θ = 30deg

Tilt the sample to change the photoelectron lsquotake off anglersquoAngle resolved XPS

λ = inelastic mean free path between collisions lsquoimfprsquo

I Itotal = 1 - e -nλ

n of total signal1 6322 8653 9504 9825 9936 997

Typical sampling depths (lsquo3 λrsquo)~10nm in organic materials~5nm in oxides~3nm in metals

d

Surface Chemical Analysisby XPS and SIMS

19

Angle-resolved XPS

bull tilt the sample hellip ARXPS

or

bull collect photoelectrons leaving the surface from a range of angles at the same time hellip PARXPS

Thermo lsquoThetaprobersquo

Surface Chemical Analysisby XPS and SIMS

20

316L Stainless Steel Surface ndash etched and air exposed

~ 25 depth nm ~10Tardio et al Comparative study of the native oxide on 316L stainless steel

J Vac Sci Technol A 33 (5) 2015

Surface Chemical Analysisby XPS and SIMS

21

Imaging XPS

bull element and chemical state imagesbull 2microm spatial resolution

bull Useful to align small area spectroscopy

Surface Chemical Analysisby XPS and SIMS

22

Al on Si SEM test pattern

Si image used to define55microm analysis areas

700 x 300microm

Si area

Al area100microm Al bars100microm Si squares 400microm FOV

Surface Chemical Analysisby XPS and SIMS

23

Al on Si SEM test pattern - 100microm bars

ldquoHyperspectral Imagingrdquobull Record images at different BErsquosbull Select area rArr regenerate spectra

O1s images 533 - 527eV 02eV step

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample damagelsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

24

Surface Chemical Analysisby XPS and SIMS

What is SIMS

25

Surface Chemical Analysisby XPS and SIMS

0 20 40 60 80 100 120 140 160 180 200

200 220 240 260 280 300 320 340 360 380 400

400 420 440 460 480 500 520 540 560 580 600

mz

Mass Spectrometer

lt1nm

Primary ionsSecondary ions

20microm

SSIMSStatic Secondary Ion Mass Spectrometry

26

Surface Chemical Analysisby XPS and SIMS

sputtered moleculesfragmentsionsatomselectronsphotons

mixing implantation sampling

10nm 8nm 1-2nm

primary ion

SSIMS

27

Surface Chemical Analysisby XPS and SIMS

SSIMSStatic Secondary Ion Mass Spectrometry

28

Surface Chemical Analysisby XPS and SIMS

Any type of mass spectrometer can be used

Quadrupole

Magnetic sector

Time-of-Flight rArr lsquoToFSIMSrsquo

bull high transmission = high signal levels

bull parallel detection = fast acquisition

bull high mass resolution

bull pulsed system

SSIMSStatic Secondary Ion Mass Spectrometry

29

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
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  • Slide Number 11
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  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
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  • Slide Number 21
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  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 83
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  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
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  • Slide Number 90
  • Slide Number 91
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  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
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  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
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  • Slide Number 105
  • Slide Number 106
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  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
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  • Slide Number 113
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  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
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  • Slide Number 122
  • Slide Number 123
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  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
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  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 14: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

14

Ultra-highVacuum Chamber

~ 5nm

X-Rays

Sample

emittedphotoelectrons

e-

X-RaySource

Electron EnergyAnalyser

SpectrumImage

I

Energy

O1s

N1s

C1s

XPS (ESCA)X-ray Photoelectron Spectroscopy

bull detects all elements except Hbull detects 1 atom in 1000bull sampling depth from ~ 1nm to ~ 10nmbull relative quantification of elements and chemistrybull chemical information rArr bonding oxidation state

functional groups etc

bull 1-D linescansbull 2-D imaging at ~ 2microm resolutionbull 3-D depth profiles

bull solids and liquidsbull electrical conductors and insulatorsbull analysis at -150degC up to 600degCbull automation

Surface Chemical Analysisby XPS and SIMS

15

PET

coating

O1s C1s

N1s

VB

Okll

Relative Atomic Percentage Compositions - number density

271(286)

729(714)

249 73120

Surface Chemical Analysisby XPS and SIMS

16

PET

C1s O1s

N1s

Surface Chemical Analysisby XPS and SIMS

17

Valence Band

Valence Band

PET

coating

O2s

C2s C2p+O2p

Surface Chemical Analysisby XPS and SIMS

18

θ = 90deg

Samplingdepth d 3λ d= 3λsinθ

θ = 30deg

Tilt the sample to change the photoelectron lsquotake off anglersquoAngle resolved XPS

λ = inelastic mean free path between collisions lsquoimfprsquo

I Itotal = 1 - e -nλ

n of total signal1 6322 8653 9504 9825 9936 997

Typical sampling depths (lsquo3 λrsquo)~10nm in organic materials~5nm in oxides~3nm in metals

d

Surface Chemical Analysisby XPS and SIMS

19

Angle-resolved XPS

bull tilt the sample hellip ARXPS

or

bull collect photoelectrons leaving the surface from a range of angles at the same time hellip PARXPS

Thermo lsquoThetaprobersquo

Surface Chemical Analysisby XPS and SIMS

20

316L Stainless Steel Surface ndash etched and air exposed

~ 25 depth nm ~10Tardio et al Comparative study of the native oxide on 316L stainless steel

J Vac Sci Technol A 33 (5) 2015

Surface Chemical Analysisby XPS and SIMS

21

Imaging XPS

bull element and chemical state imagesbull 2microm spatial resolution

bull Useful to align small area spectroscopy

Surface Chemical Analysisby XPS and SIMS

22

Al on Si SEM test pattern

Si image used to define55microm analysis areas

700 x 300microm

Si area

Al area100microm Al bars100microm Si squares 400microm FOV

Surface Chemical Analysisby XPS and SIMS

23

Al on Si SEM test pattern - 100microm bars

ldquoHyperspectral Imagingrdquobull Record images at different BErsquosbull Select area rArr regenerate spectra

O1s images 533 - 527eV 02eV step

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample damagelsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

24

Surface Chemical Analysisby XPS and SIMS

What is SIMS

25

Surface Chemical Analysisby XPS and SIMS

0 20 40 60 80 100 120 140 160 180 200

200 220 240 260 280 300 320 340 360 380 400

400 420 440 460 480 500 520 540 560 580 600

mz

Mass Spectrometer

lt1nm

Primary ionsSecondary ions

20microm

SSIMSStatic Secondary Ion Mass Spectrometry

26

Surface Chemical Analysisby XPS and SIMS

sputtered moleculesfragmentsionsatomselectronsphotons

mixing implantation sampling

10nm 8nm 1-2nm

primary ion

SSIMS

27

Surface Chemical Analysisby XPS and SIMS

SSIMSStatic Secondary Ion Mass Spectrometry

28

Surface Chemical Analysisby XPS and SIMS

Any type of mass spectrometer can be used

Quadrupole

Magnetic sector

Time-of-Flight rArr lsquoToFSIMSrsquo

bull high transmission = high signal levels

bull parallel detection = fast acquisition

bull high mass resolution

bull pulsed system

SSIMSStatic Secondary Ion Mass Spectrometry

29

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
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  • Slide Number 108
  • Slide Number 109
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  • Slide Number 112
  • Slide Number 113
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  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 15: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

15

PET

coating

O1s C1s

N1s

VB

Okll

Relative Atomic Percentage Compositions - number density

271(286)

729(714)

249 73120

Surface Chemical Analysisby XPS and SIMS

16

PET

C1s O1s

N1s

Surface Chemical Analysisby XPS and SIMS

17

Valence Band

Valence Band

PET

coating

O2s

C2s C2p+O2p

Surface Chemical Analysisby XPS and SIMS

18

θ = 90deg

Samplingdepth d 3λ d= 3λsinθ

θ = 30deg

Tilt the sample to change the photoelectron lsquotake off anglersquoAngle resolved XPS

λ = inelastic mean free path between collisions lsquoimfprsquo

I Itotal = 1 - e -nλ

n of total signal1 6322 8653 9504 9825 9936 997

Typical sampling depths (lsquo3 λrsquo)~10nm in organic materials~5nm in oxides~3nm in metals

d

Surface Chemical Analysisby XPS and SIMS

19

Angle-resolved XPS

bull tilt the sample hellip ARXPS

or

bull collect photoelectrons leaving the surface from a range of angles at the same time hellip PARXPS

Thermo lsquoThetaprobersquo

Surface Chemical Analysisby XPS and SIMS

20

316L Stainless Steel Surface ndash etched and air exposed

~ 25 depth nm ~10Tardio et al Comparative study of the native oxide on 316L stainless steel

J Vac Sci Technol A 33 (5) 2015

Surface Chemical Analysisby XPS and SIMS

21

Imaging XPS

bull element and chemical state imagesbull 2microm spatial resolution

bull Useful to align small area spectroscopy

Surface Chemical Analysisby XPS and SIMS

22

Al on Si SEM test pattern

Si image used to define55microm analysis areas

700 x 300microm

Si area

Al area100microm Al bars100microm Si squares 400microm FOV

Surface Chemical Analysisby XPS and SIMS

23

Al on Si SEM test pattern - 100microm bars

ldquoHyperspectral Imagingrdquobull Record images at different BErsquosbull Select area rArr regenerate spectra

O1s images 533 - 527eV 02eV step

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample damagelsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

24

Surface Chemical Analysisby XPS and SIMS

What is SIMS

25

Surface Chemical Analysisby XPS and SIMS

0 20 40 60 80 100 120 140 160 180 200

200 220 240 260 280 300 320 340 360 380 400

400 420 440 460 480 500 520 540 560 580 600

mz

Mass Spectrometer

lt1nm

Primary ionsSecondary ions

20microm

SSIMSStatic Secondary Ion Mass Spectrometry

26

Surface Chemical Analysisby XPS and SIMS

sputtered moleculesfragmentsionsatomselectronsphotons

mixing implantation sampling

10nm 8nm 1-2nm

primary ion

SSIMS

27

Surface Chemical Analysisby XPS and SIMS

SSIMSStatic Secondary Ion Mass Spectrometry

28

Surface Chemical Analysisby XPS and SIMS

Any type of mass spectrometer can be used

Quadrupole

Magnetic sector

Time-of-Flight rArr lsquoToFSIMSrsquo

bull high transmission = high signal levels

bull parallel detection = fast acquisition

bull high mass resolution

bull pulsed system

SSIMSStatic Secondary Ion Mass Spectrometry

29

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
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  • Slide Number 6
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  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
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  • Slide Number 46
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  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
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  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 16: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

16

PET

C1s O1s

N1s

Surface Chemical Analysisby XPS and SIMS

17

Valence Band

Valence Band

PET

coating

O2s

C2s C2p+O2p

Surface Chemical Analysisby XPS and SIMS

18

θ = 90deg

Samplingdepth d 3λ d= 3λsinθ

θ = 30deg

Tilt the sample to change the photoelectron lsquotake off anglersquoAngle resolved XPS

λ = inelastic mean free path between collisions lsquoimfprsquo

I Itotal = 1 - e -nλ

n of total signal1 6322 8653 9504 9825 9936 997

Typical sampling depths (lsquo3 λrsquo)~10nm in organic materials~5nm in oxides~3nm in metals

d

Surface Chemical Analysisby XPS and SIMS

19

Angle-resolved XPS

bull tilt the sample hellip ARXPS

or

bull collect photoelectrons leaving the surface from a range of angles at the same time hellip PARXPS

Thermo lsquoThetaprobersquo

Surface Chemical Analysisby XPS and SIMS

20

316L Stainless Steel Surface ndash etched and air exposed

~ 25 depth nm ~10Tardio et al Comparative study of the native oxide on 316L stainless steel

J Vac Sci Technol A 33 (5) 2015

Surface Chemical Analysisby XPS and SIMS

21

Imaging XPS

bull element and chemical state imagesbull 2microm spatial resolution

bull Useful to align small area spectroscopy

Surface Chemical Analysisby XPS and SIMS

22

Al on Si SEM test pattern

Si image used to define55microm analysis areas

700 x 300microm

Si area

Al area100microm Al bars100microm Si squares 400microm FOV

Surface Chemical Analysisby XPS and SIMS

23

Al on Si SEM test pattern - 100microm bars

ldquoHyperspectral Imagingrdquobull Record images at different BErsquosbull Select area rArr regenerate spectra

O1s images 533 - 527eV 02eV step

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample damagelsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

24

Surface Chemical Analysisby XPS and SIMS

What is SIMS

25

Surface Chemical Analysisby XPS and SIMS

0 20 40 60 80 100 120 140 160 180 200

200 220 240 260 280 300 320 340 360 380 400

400 420 440 460 480 500 520 540 560 580 600

mz

Mass Spectrometer

lt1nm

Primary ionsSecondary ions

20microm

SSIMSStatic Secondary Ion Mass Spectrometry

26

Surface Chemical Analysisby XPS and SIMS

sputtered moleculesfragmentsionsatomselectronsphotons

mixing implantation sampling

10nm 8nm 1-2nm

primary ion

SSIMS

27

Surface Chemical Analysisby XPS and SIMS

SSIMSStatic Secondary Ion Mass Spectrometry

28

Surface Chemical Analysisby XPS and SIMS

Any type of mass spectrometer can be used

Quadrupole

Magnetic sector

Time-of-Flight rArr lsquoToFSIMSrsquo

bull high transmission = high signal levels

bull parallel detection = fast acquisition

bull high mass resolution

bull pulsed system

SSIMSStatic Secondary Ion Mass Spectrometry

29

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 17: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

17

Valence Band

Valence Band

PET

coating

O2s

C2s C2p+O2p

Surface Chemical Analysisby XPS and SIMS

18

θ = 90deg

Samplingdepth d 3λ d= 3λsinθ

θ = 30deg

Tilt the sample to change the photoelectron lsquotake off anglersquoAngle resolved XPS

λ = inelastic mean free path between collisions lsquoimfprsquo

I Itotal = 1 - e -nλ

n of total signal1 6322 8653 9504 9825 9936 997

Typical sampling depths (lsquo3 λrsquo)~10nm in organic materials~5nm in oxides~3nm in metals

d

Surface Chemical Analysisby XPS and SIMS

19

Angle-resolved XPS

bull tilt the sample hellip ARXPS

or

bull collect photoelectrons leaving the surface from a range of angles at the same time hellip PARXPS

Thermo lsquoThetaprobersquo

Surface Chemical Analysisby XPS and SIMS

20

316L Stainless Steel Surface ndash etched and air exposed

~ 25 depth nm ~10Tardio et al Comparative study of the native oxide on 316L stainless steel

J Vac Sci Technol A 33 (5) 2015

Surface Chemical Analysisby XPS and SIMS

21

Imaging XPS

bull element and chemical state imagesbull 2microm spatial resolution

bull Useful to align small area spectroscopy

Surface Chemical Analysisby XPS and SIMS

22

Al on Si SEM test pattern

Si image used to define55microm analysis areas

700 x 300microm

Si area

Al area100microm Al bars100microm Si squares 400microm FOV

Surface Chemical Analysisby XPS and SIMS

23

Al on Si SEM test pattern - 100microm bars

ldquoHyperspectral Imagingrdquobull Record images at different BErsquosbull Select area rArr regenerate spectra

O1s images 533 - 527eV 02eV step

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample damagelsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

24

Surface Chemical Analysisby XPS and SIMS

What is SIMS

25

Surface Chemical Analysisby XPS and SIMS

0 20 40 60 80 100 120 140 160 180 200

200 220 240 260 280 300 320 340 360 380 400

400 420 440 460 480 500 520 540 560 580 600

mz

Mass Spectrometer

lt1nm

Primary ionsSecondary ions

20microm

SSIMSStatic Secondary Ion Mass Spectrometry

26

Surface Chemical Analysisby XPS and SIMS

sputtered moleculesfragmentsionsatomselectronsphotons

mixing implantation sampling

10nm 8nm 1-2nm

primary ion

SSIMS

27

Surface Chemical Analysisby XPS and SIMS

SSIMSStatic Secondary Ion Mass Spectrometry

28

Surface Chemical Analysisby XPS and SIMS

Any type of mass spectrometer can be used

Quadrupole

Magnetic sector

Time-of-Flight rArr lsquoToFSIMSrsquo

bull high transmission = high signal levels

bull parallel detection = fast acquisition

bull high mass resolution

bull pulsed system

SSIMSStatic Secondary Ion Mass Spectrometry

29

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
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  • Slide Number 103
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  • Slide Number 105
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  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 18: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

18

θ = 90deg

Samplingdepth d 3λ d= 3λsinθ

θ = 30deg

Tilt the sample to change the photoelectron lsquotake off anglersquoAngle resolved XPS

λ = inelastic mean free path between collisions lsquoimfprsquo

I Itotal = 1 - e -nλ

n of total signal1 6322 8653 9504 9825 9936 997

Typical sampling depths (lsquo3 λrsquo)~10nm in organic materials~5nm in oxides~3nm in metals

d

Surface Chemical Analysisby XPS and SIMS

19

Angle-resolved XPS

bull tilt the sample hellip ARXPS

or

bull collect photoelectrons leaving the surface from a range of angles at the same time hellip PARXPS

Thermo lsquoThetaprobersquo

Surface Chemical Analysisby XPS and SIMS

20

316L Stainless Steel Surface ndash etched and air exposed

~ 25 depth nm ~10Tardio et al Comparative study of the native oxide on 316L stainless steel

J Vac Sci Technol A 33 (5) 2015

Surface Chemical Analysisby XPS and SIMS

21

Imaging XPS

bull element and chemical state imagesbull 2microm spatial resolution

bull Useful to align small area spectroscopy

Surface Chemical Analysisby XPS and SIMS

22

Al on Si SEM test pattern

Si image used to define55microm analysis areas

700 x 300microm

Si area

Al area100microm Al bars100microm Si squares 400microm FOV

Surface Chemical Analysisby XPS and SIMS

23

Al on Si SEM test pattern - 100microm bars

ldquoHyperspectral Imagingrdquobull Record images at different BErsquosbull Select area rArr regenerate spectra

O1s images 533 - 527eV 02eV step

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample damagelsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

24

Surface Chemical Analysisby XPS and SIMS

What is SIMS

25

Surface Chemical Analysisby XPS and SIMS

0 20 40 60 80 100 120 140 160 180 200

200 220 240 260 280 300 320 340 360 380 400

400 420 440 460 480 500 520 540 560 580 600

mz

Mass Spectrometer

lt1nm

Primary ionsSecondary ions

20microm

SSIMSStatic Secondary Ion Mass Spectrometry

26

Surface Chemical Analysisby XPS and SIMS

sputtered moleculesfragmentsionsatomselectronsphotons

mixing implantation sampling

10nm 8nm 1-2nm

primary ion

SSIMS

27

Surface Chemical Analysisby XPS and SIMS

SSIMSStatic Secondary Ion Mass Spectrometry

28

Surface Chemical Analysisby XPS and SIMS

Any type of mass spectrometer can be used

Quadrupole

Magnetic sector

Time-of-Flight rArr lsquoToFSIMSrsquo

bull high transmission = high signal levels

bull parallel detection = fast acquisition

bull high mass resolution

bull pulsed system

SSIMSStatic Secondary Ion Mass Spectrometry

29

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
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  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
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  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 81
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  • Slide Number 83
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  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
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  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 19: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

19

Angle-resolved XPS

bull tilt the sample hellip ARXPS

or

bull collect photoelectrons leaving the surface from a range of angles at the same time hellip PARXPS

Thermo lsquoThetaprobersquo

Surface Chemical Analysisby XPS and SIMS

20

316L Stainless Steel Surface ndash etched and air exposed

~ 25 depth nm ~10Tardio et al Comparative study of the native oxide on 316L stainless steel

J Vac Sci Technol A 33 (5) 2015

Surface Chemical Analysisby XPS and SIMS

21

Imaging XPS

bull element and chemical state imagesbull 2microm spatial resolution

bull Useful to align small area spectroscopy

Surface Chemical Analysisby XPS and SIMS

22

Al on Si SEM test pattern

Si image used to define55microm analysis areas

700 x 300microm

Si area

Al area100microm Al bars100microm Si squares 400microm FOV

Surface Chemical Analysisby XPS and SIMS

23

Al on Si SEM test pattern - 100microm bars

ldquoHyperspectral Imagingrdquobull Record images at different BErsquosbull Select area rArr regenerate spectra

O1s images 533 - 527eV 02eV step

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample damagelsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

24

Surface Chemical Analysisby XPS and SIMS

What is SIMS

25

Surface Chemical Analysisby XPS and SIMS

0 20 40 60 80 100 120 140 160 180 200

200 220 240 260 280 300 320 340 360 380 400

400 420 440 460 480 500 520 540 560 580 600

mz

Mass Spectrometer

lt1nm

Primary ionsSecondary ions

20microm

SSIMSStatic Secondary Ion Mass Spectrometry

26

Surface Chemical Analysisby XPS and SIMS

sputtered moleculesfragmentsionsatomselectronsphotons

mixing implantation sampling

10nm 8nm 1-2nm

primary ion

SSIMS

27

Surface Chemical Analysisby XPS and SIMS

SSIMSStatic Secondary Ion Mass Spectrometry

28

Surface Chemical Analysisby XPS and SIMS

Any type of mass spectrometer can be used

Quadrupole

Magnetic sector

Time-of-Flight rArr lsquoToFSIMSrsquo

bull high transmission = high signal levels

bull parallel detection = fast acquisition

bull high mass resolution

bull pulsed system

SSIMSStatic Secondary Ion Mass Spectrometry

29

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 18
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  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
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  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 20: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

20

316L Stainless Steel Surface ndash etched and air exposed

~ 25 depth nm ~10Tardio et al Comparative study of the native oxide on 316L stainless steel

J Vac Sci Technol A 33 (5) 2015

Surface Chemical Analysisby XPS and SIMS

21

Imaging XPS

bull element and chemical state imagesbull 2microm spatial resolution

bull Useful to align small area spectroscopy

Surface Chemical Analysisby XPS and SIMS

22

Al on Si SEM test pattern

Si image used to define55microm analysis areas

700 x 300microm

Si area

Al area100microm Al bars100microm Si squares 400microm FOV

Surface Chemical Analysisby XPS and SIMS

23

Al on Si SEM test pattern - 100microm bars

ldquoHyperspectral Imagingrdquobull Record images at different BErsquosbull Select area rArr regenerate spectra

O1s images 533 - 527eV 02eV step

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample damagelsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

24

Surface Chemical Analysisby XPS and SIMS

What is SIMS

25

Surface Chemical Analysisby XPS and SIMS

0 20 40 60 80 100 120 140 160 180 200

200 220 240 260 280 300 320 340 360 380 400

400 420 440 460 480 500 520 540 560 580 600

mz

Mass Spectrometer

lt1nm

Primary ionsSecondary ions

20microm

SSIMSStatic Secondary Ion Mass Spectrometry

26

Surface Chemical Analysisby XPS and SIMS

sputtered moleculesfragmentsionsatomselectronsphotons

mixing implantation sampling

10nm 8nm 1-2nm

primary ion

SSIMS

27

Surface Chemical Analysisby XPS and SIMS

SSIMSStatic Secondary Ion Mass Spectrometry

28

Surface Chemical Analysisby XPS and SIMS

Any type of mass spectrometer can be used

Quadrupole

Magnetic sector

Time-of-Flight rArr lsquoToFSIMSrsquo

bull high transmission = high signal levels

bull parallel detection = fast acquisition

bull high mass resolution

bull pulsed system

SSIMSStatic Secondary Ion Mass Spectrometry

29

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
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  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
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  • Slide Number 98
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  • Slide Number 101
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  • Slide Number 127
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  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 21: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

21

Imaging XPS

bull element and chemical state imagesbull 2microm spatial resolution

bull Useful to align small area spectroscopy

Surface Chemical Analysisby XPS and SIMS

22

Al on Si SEM test pattern

Si image used to define55microm analysis areas

700 x 300microm

Si area

Al area100microm Al bars100microm Si squares 400microm FOV

Surface Chemical Analysisby XPS and SIMS

23

Al on Si SEM test pattern - 100microm bars

ldquoHyperspectral Imagingrdquobull Record images at different BErsquosbull Select area rArr regenerate spectra

O1s images 533 - 527eV 02eV step

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample damagelsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

24

Surface Chemical Analysisby XPS and SIMS

What is SIMS

25

Surface Chemical Analysisby XPS and SIMS

0 20 40 60 80 100 120 140 160 180 200

200 220 240 260 280 300 320 340 360 380 400

400 420 440 460 480 500 520 540 560 580 600

mz

Mass Spectrometer

lt1nm

Primary ionsSecondary ions

20microm

SSIMSStatic Secondary Ion Mass Spectrometry

26

Surface Chemical Analysisby XPS and SIMS

sputtered moleculesfragmentsionsatomselectronsphotons

mixing implantation sampling

10nm 8nm 1-2nm

primary ion

SSIMS

27

Surface Chemical Analysisby XPS and SIMS

SSIMSStatic Secondary Ion Mass Spectrometry

28

Surface Chemical Analysisby XPS and SIMS

Any type of mass spectrometer can be used

Quadrupole

Magnetic sector

Time-of-Flight rArr lsquoToFSIMSrsquo

bull high transmission = high signal levels

bull parallel detection = fast acquisition

bull high mass resolution

bull pulsed system

SSIMSStatic Secondary Ion Mass Spectrometry

29

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
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  • Slide Number 125
  • Slide Number 126
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  • Slide Number 128
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  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 22: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

22

Al on Si SEM test pattern

Si image used to define55microm analysis areas

700 x 300microm

Si area

Al area100microm Al bars100microm Si squares 400microm FOV

Surface Chemical Analysisby XPS and SIMS

23

Al on Si SEM test pattern - 100microm bars

ldquoHyperspectral Imagingrdquobull Record images at different BErsquosbull Select area rArr regenerate spectra

O1s images 533 - 527eV 02eV step

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample damagelsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

24

Surface Chemical Analysisby XPS and SIMS

What is SIMS

25

Surface Chemical Analysisby XPS and SIMS

0 20 40 60 80 100 120 140 160 180 200

200 220 240 260 280 300 320 340 360 380 400

400 420 440 460 480 500 520 540 560 580 600

mz

Mass Spectrometer

lt1nm

Primary ionsSecondary ions

20microm

SSIMSStatic Secondary Ion Mass Spectrometry

26

Surface Chemical Analysisby XPS and SIMS

sputtered moleculesfragmentsionsatomselectronsphotons

mixing implantation sampling

10nm 8nm 1-2nm

primary ion

SSIMS

27

Surface Chemical Analysisby XPS and SIMS

SSIMSStatic Secondary Ion Mass Spectrometry

28

Surface Chemical Analysisby XPS and SIMS

Any type of mass spectrometer can be used

Quadrupole

Magnetic sector

Time-of-Flight rArr lsquoToFSIMSrsquo

bull high transmission = high signal levels

bull parallel detection = fast acquisition

bull high mass resolution

bull pulsed system

SSIMSStatic Secondary Ion Mass Spectrometry

29

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 2
  • Slide Number 3
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  • Slide Number 6
  • Slide Number 7
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  • Slide Number 11
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  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
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  • Slide Number 21
  • Slide Number 22
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  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
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  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
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  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 23: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

23

Al on Si SEM test pattern - 100microm bars

ldquoHyperspectral Imagingrdquobull Record images at different BErsquosbull Select area rArr regenerate spectra

O1s images 533 - 527eV 02eV step

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample damagelsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

24

Surface Chemical Analysisby XPS and SIMS

What is SIMS

25

Surface Chemical Analysisby XPS and SIMS

0 20 40 60 80 100 120 140 160 180 200

200 220 240 260 280 300 320 340 360 380 400

400 420 440 460 480 500 520 540 560 580 600

mz

Mass Spectrometer

lt1nm

Primary ionsSecondary ions

20microm

SSIMSStatic Secondary Ion Mass Spectrometry

26

Surface Chemical Analysisby XPS and SIMS

sputtered moleculesfragmentsionsatomselectronsphotons

mixing implantation sampling

10nm 8nm 1-2nm

primary ion

SSIMS

27

Surface Chemical Analysisby XPS and SIMS

SSIMSStatic Secondary Ion Mass Spectrometry

28

Surface Chemical Analysisby XPS and SIMS

Any type of mass spectrometer can be used

Quadrupole

Magnetic sector

Time-of-Flight rArr lsquoToFSIMSrsquo

bull high transmission = high signal levels

bull parallel detection = fast acquisition

bull high mass resolution

bull pulsed system

SSIMSStatic Secondary Ion Mass Spectrometry

29

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
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  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 81
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  • Slide Number 83
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  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
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  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
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  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
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  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
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  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
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  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 24: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample damagelsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

24

Surface Chemical Analysisby XPS and SIMS

What is SIMS

25

Surface Chemical Analysisby XPS and SIMS

0 20 40 60 80 100 120 140 160 180 200

200 220 240 260 280 300 320 340 360 380 400

400 420 440 460 480 500 520 540 560 580 600

mz

Mass Spectrometer

lt1nm

Primary ionsSecondary ions

20microm

SSIMSStatic Secondary Ion Mass Spectrometry

26

Surface Chemical Analysisby XPS and SIMS

sputtered moleculesfragmentsionsatomselectronsphotons

mixing implantation sampling

10nm 8nm 1-2nm

primary ion

SSIMS

27

Surface Chemical Analysisby XPS and SIMS

SSIMSStatic Secondary Ion Mass Spectrometry

28

Surface Chemical Analysisby XPS and SIMS

Any type of mass spectrometer can be used

Quadrupole

Magnetic sector

Time-of-Flight rArr lsquoToFSIMSrsquo

bull high transmission = high signal levels

bull parallel detection = fast acquisition

bull high mass resolution

bull pulsed system

SSIMSStatic Secondary Ion Mass Spectrometry

29

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
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  • Slide Number 16
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  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
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  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 25: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

What is SIMS

25

Surface Chemical Analysisby XPS and SIMS

0 20 40 60 80 100 120 140 160 180 200

200 220 240 260 280 300 320 340 360 380 400

400 420 440 460 480 500 520 540 560 580 600

mz

Mass Spectrometer

lt1nm

Primary ionsSecondary ions

20microm

SSIMSStatic Secondary Ion Mass Spectrometry

26

Surface Chemical Analysisby XPS and SIMS

sputtered moleculesfragmentsionsatomselectronsphotons

mixing implantation sampling

10nm 8nm 1-2nm

primary ion

SSIMS

27

Surface Chemical Analysisby XPS and SIMS

SSIMSStatic Secondary Ion Mass Spectrometry

28

Surface Chemical Analysisby XPS and SIMS

Any type of mass spectrometer can be used

Quadrupole

Magnetic sector

Time-of-Flight rArr lsquoToFSIMSrsquo

bull high transmission = high signal levels

bull parallel detection = fast acquisition

bull high mass resolution

bull pulsed system

SSIMSStatic Secondary Ion Mass Spectrometry

29

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
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  • Slide Number 11
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  • Slide Number 18
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  • Slide Number 21
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  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
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  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
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  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 26: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

0 20 40 60 80 100 120 140 160 180 200

200 220 240 260 280 300 320 340 360 380 400

400 420 440 460 480 500 520 540 560 580 600

mz

Mass Spectrometer

lt1nm

Primary ionsSecondary ions

20microm

SSIMSStatic Secondary Ion Mass Spectrometry

26

Surface Chemical Analysisby XPS and SIMS

sputtered moleculesfragmentsionsatomselectronsphotons

mixing implantation sampling

10nm 8nm 1-2nm

primary ion

SSIMS

27

Surface Chemical Analysisby XPS and SIMS

SSIMSStatic Secondary Ion Mass Spectrometry

28

Surface Chemical Analysisby XPS and SIMS

Any type of mass spectrometer can be used

Quadrupole

Magnetic sector

Time-of-Flight rArr lsquoToFSIMSrsquo

bull high transmission = high signal levels

bull parallel detection = fast acquisition

bull high mass resolution

bull pulsed system

SSIMSStatic Secondary Ion Mass Spectrometry

29

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
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  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
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  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
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  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 27: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

sputtered moleculesfragmentsionsatomselectronsphotons

mixing implantation sampling

10nm 8nm 1-2nm

primary ion

SSIMS

27

Surface Chemical Analysisby XPS and SIMS

SSIMSStatic Secondary Ion Mass Spectrometry

28

Surface Chemical Analysisby XPS and SIMS

Any type of mass spectrometer can be used

Quadrupole

Magnetic sector

Time-of-Flight rArr lsquoToFSIMSrsquo

bull high transmission = high signal levels

bull parallel detection = fast acquisition

bull high mass resolution

bull pulsed system

SSIMSStatic Secondary Ion Mass Spectrometry

29

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 15
  • Slide Number 16
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  • Slide Number 21
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  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
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  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
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  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
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  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 28: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

SSIMSStatic Secondary Ion Mass Spectrometry

28

Surface Chemical Analysisby XPS and SIMS

Any type of mass spectrometer can be used

Quadrupole

Magnetic sector

Time-of-Flight rArr lsquoToFSIMSrsquo

bull high transmission = high signal levels

bull parallel detection = fast acquisition

bull high mass resolution

bull pulsed system

SSIMSStatic Secondary Ion Mass Spectrometry

29

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 16
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  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
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  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
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  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
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  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 29: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

Any type of mass spectrometer can be used

Quadrupole

Magnetic sector

Time-of-Flight rArr lsquoToFSIMSrsquo

bull high transmission = high signal levels

bull parallel detection = fast acquisition

bull high mass resolution

bull pulsed system

SSIMSStatic Secondary Ion Mass Spectrometry

29

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
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  • Slide Number 11
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  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
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  • Slide Number 21
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  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 91
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  • Slide Number 94
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  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
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  • Slide Number 105
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  • Slide Number 119
  • Slide Number 120
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  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 30: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

wwwiontofcom

TOFSIMS

30

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
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  • Slide Number 50
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  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
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  • Slide Number 59
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  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
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Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 31: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

The Ion-Tof lsquoToF-SIMS IV ndash 200rsquo Instrument

bull 8rdquo sample capabilitybull automationbull -150degC to 600degC

bull Ga+ In+ Aun+ Bin+ SF5

+

Cs+ Ar+ and O2+ ion

sources

high signal levels for molecular species

imaging of molecularspecies at ~ 03microm resolution

31

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
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  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
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  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
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  • Slide Number 105
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  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 32: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

The Ionoptika J105 SIMS

Not only C60+ and Ar4000

+ but also

[H2O]6000+ cluster ion beam source helliphellip

32

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
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  • Slide Number 6
  • Slide Number 7
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  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
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  • Slide Number 46
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  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
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  • Slide Number 65
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  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
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  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 33: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

Ionoptika J105 SIMS

33

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
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  • Slide Number 9
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  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
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  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 34: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

bull Detects all elementsbull Mass range up to 20000 Dabull ppm - ppb sensitivity

bull Spectrometry ndash lsquofingerprintrsquo characteristic spectra from Static SIMSndash molecular identification of organic and inorganic speciesndash relative quantification of molecular speciesndash high mass resolution (m∆m ~10000+)

bull Imagingndash 03microm resolution

bull Depth profiles ndash inorganic and organic materialsndash ~1nm depth resolution

What information is available

34

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
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  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
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  • Slide Number 63
  • Slide Number 64
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  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
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  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 35: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

bull lsquoRetrospectiversquo spectrometry imaging and depth profilingndash Every 2D pixel or 3D voxel contains a full mass spectrum

bull Solids and liquids

bull Electrical conductors and insulators

bull Analysis at -150degC up to 600degC

ndash Thermal Desorption SIMS

What information is available

35

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
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  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
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  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
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  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 36: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

High Mass-Resolution SSIMS

bull m∆m = 10000+bull identify ion composition from accurate massbull resolve inorganic from organic species (eg Fe+ C4H8

+)bull elemental and molecular informationbull ppm sensitivitybull novel informationbull facilitates relative quantification

bull probe active surface chemistrybull identify poisons deactivation mechanismsbull oxidation state informationbull compound identification

36

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
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  • Slide Number 11
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  • Slide Number 14
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  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
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  • Slide Number 98
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  • Slide Number 101
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  • Slide Number 105
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  • Slide Number 119
  • Slide Number 120
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  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 37: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

37

30Si+29SiH+

28SiH2+

C2H6+

CH2NH2+

CH2O+

NO+

Si wafer mz 30

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 38: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

7095 71 7105 711 71150

1000

2000

3000

mz

Cou

nts

Untreated

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 1

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 2

7095 71 7105 711 71150

2000

4000

6000

mz

Cou

nts

Treatment 3

C4H7O C5H11C3H3O2

U

T1

T2

T3

Positive ionhigh mass resolutionSSIMS spectra

mz +71

Discrete peak areas

Relative quantification

38

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
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  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
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  • Slide Number 63
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  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
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  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 39: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

bull Topography independent mass resolution

also Large Depth of Field

Cr image of an M16 screw

39

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
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  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
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  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
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  • Slide Number 73
  • Slide Number 74
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  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 40: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

410390 43040

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
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  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
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  • Slide Number 46
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  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
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  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 41: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 600041K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

410405 41

MR = 41

41

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
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  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
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  • Slide Number 21
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  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 83
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  • Slide Number 86
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  • Slide Number 88
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  • Slide Number 90
  • Slide Number 91
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  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
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  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
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  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
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  • Slide Number 122
  • Slide Number 123
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  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
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  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 42: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

C3H5+

mz +41

MR = 1000

MR = 6000

41K+

29SiC+

28SiCH+

40CaH+

C13CO+

40Ca42Ca2+

500microm x 500microm

750microm x 750micromJ105

lsquoTraditionalrsquo design (Iontof PHI)

42

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
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  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
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  • Slide Number 49
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  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
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  • Slide Number 61
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  • Slide Number 63
  • Slide Number 64
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  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
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  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 43: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

Imaging SSIMS

Molecular species elements small fragment ionsca 300nm spatial resolutionlsquoHyperspectralrsquo Imaging - every pixel contains a full mass spectrum

Sciencedistribution location of speciesstructure property relationshipsmigration studiescoating defects small area analysis

Sales and Marketinggetting the message acrossldquoIf I canrsquot picture it I canrsquot understand itrdquo

43

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 2
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  • Slide Number 16
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  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
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  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 44: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

Total Ion Image PET trimermz +577

Segregation of PET trimer

Heated PET film

30microm

44

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
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  • Slide Number 11
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  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
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  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 45: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

20microm

Single 50microm particle on a 35rdquo Floppy Disk surface

Imaging SSIMS analysis

bull each pixel has a full mass spectrumbull select defined small areasbull regenerate spectra

PET particle on top of coating

bull clean upbull modify machinery

bull 100 pass rate for particulatesbull reduced costs

45

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
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  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
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  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
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  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 46: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

Coating problem

unexpected segregation of 2 coating componentsidentified by SSIMS

product not working at all6 months wasted project time

process modifiedrepeatable uniform coverage

product working as predicted

250microm x 250microm

46

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
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  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 91
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  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
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  • Slide Number 105
  • Slide Number 106
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  • Slide Number 108
  • Slide Number 109
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  • Slide Number 116
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  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
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  • Slide Number 126
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  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 47: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of coated polymer microspheres

30microm

Surfactant Contaminant

XPS indicated the average surfactant thickness = 09nm

Surfactant (green)Contaminant (red)

47

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
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  • Slide Number 11
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  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
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  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 91
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  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
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  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
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  • Slide Number 108
  • Slide Number 109
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  • Slide Number 111
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  • Slide Number 115
  • Slide Number 116
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  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
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  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
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  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 48: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

500microm x 500microm

Total Ion Image Diglycerides Na (green)Flavour Enhancer (red)

Static ToFSIMS images of a flavoured potato crisp

48

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 49: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

10microm 10microm

50microm 10microm

Molecular SSIMS images from human hair showing various treatment residues49

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 14
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  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
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  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
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  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 83
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  • Slide Number 97
  • Slide Number 98
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  • Slide Number 100
  • Slide Number 101
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  • Slide Number 111
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  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 50: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene fibres used in nappiesProduct Performance depends on

bull Fibre surface chemistry treatmentbull Surface coveragebull Porosity of the non-woven fabric

bull lsquoESCrsquo treatment more uniformly distributedbull lsquoESCrsquo treated fabric outperforms competitive materials

ESC Competitor20microm

50

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 81
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  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 51: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

SSIMS Images of Polypropylene carpet fibres

ldquoA picture paints a thousand wordshelliprdquoESC

30micromCompetitor

bull Tri-lobal fibresbull Treatment to reduce friction during processingbull lsquoESCrsquo treatment applied at 5x lower levelbull Outperformed competitive treatmentsbull Images used for Sales amp Marketing

51

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 2
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  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
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  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 81
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  • Slide Number 85
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  • Slide Number 99
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  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 52: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

Detection of Volatile Materials

250microm x 250microm 128microm x 128microm

Fragrances on Human hair

bull small molecules volatile mobile species analysis at -110 degC

bull treatment shown in lsquoyellow redrsquo [M-H]-

52

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
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  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 111
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  • Slide Number 116
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  • Slide Number 118
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  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
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  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 53: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

Secondary Ion Mass Spectrometry ndash lsquoSIMSrsquo

lsquoStaticrsquo mode lsquoDynamicrsquo modeSSIMS DSIMS

Low sample damage High sample lsquodamagersquolsquoFingerprintrsquo spectra Composition depth profiles

Primary Ion Dose Densitylt1x1012 ions cm-2 gt1x1013 ions cm-2

Typical surface = 1x1015 atoms cm-2

53

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 4
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  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
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  • Slide Number 105
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  • Slide Number 109
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  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
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  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
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  • Slide Number 122
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  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
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  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 54: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

0 5 10 15 20 25 30 35 40 45100

101

102

103

104

105

30Si+

11B+

Inte

nsity

co

unts

depth nm

1017

1018

1019

1020

1021

1022

11B

con

cent

ratio

n a

tom

scm

3

00 05 10 15 20 25 30

4x1020

6x1020

8x1020

1x1021

11B

con

cent

ratio

n a

tom

scm

2

depth nm

wwwiontofcom

Sample700 eV B+ implant in Silicon

54

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
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  • Slide Number 4
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  • Slide Number 6
  • Slide Number 7
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  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
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  • Slide Number 98
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  • Slide Number 105
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  • Slide Number 109
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  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
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  • Slide Number 119
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  • Slide Number 127
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  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 55: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

Depth Profile 2D Cross Section 3D Render

Overlay Imagered Al2green Inblue Ga2

red Al2green Ingrey GaAlblue Ga2

Field of View 60 x 60 microm2

3D Distributionexample Al2+GaAl

wwwiontofcom55

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
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  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 94
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  • Slide Number 97
  • Slide Number 98
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  • Slide Number 100
  • Slide Number 101
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  • Slide Number 103
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  • Slide Number 105
  • Slide Number 106
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  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
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  • Slide Number 115
  • Slide Number 116
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  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
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  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
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  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 56: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

Depth Profiling ndash Dynamic SIMS

56

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
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  • Slide Number 11
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  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
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  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 94
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  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
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  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
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  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
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  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
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  • Slide Number 122
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  • Slide Number 125
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  • Slide Number 127
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  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 57: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

Typical Questions Asked

Specific

bull Is there any X presentbull How much is presentbull How is it distributed

bull 1- or 2-Dbull depthbull 3-D

bull Locus of failure

General

bull What is itbull Where is itbull What is different between good

and bad samplesbull Why is it failingbull Why wonrsquot it stick

bull adhesionbull laminatesbull printing coating

bull Why is theirs better than ours

RampT Production Process monitoring development QC Patent protection SHE

57

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
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  • Slide Number 11
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  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
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  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 94
  • Slide Number 95
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  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
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  • Slide Number 103
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  • Slide Number 105
  • Slide Number 106
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  • Slide Number 108
  • Slide Number 109
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  • Slide Number 119
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  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 58: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

58

Typical applications

bull failure analysis ndash laminates metallised layers heat-sealadhesive joints coating issues

bull coating defectsbull printing defectsbull adhesive developmentsbull materials developments bull surface pre-treatmentbull primer developmentsbull contaminationbull corrosion studiesbull additive migration bloombull competitive material analysisbull pharmaceutical medicalbull hellip

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
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  • Slide Number 11
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  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
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  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 94
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  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
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  • Slide Number 103
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  • Slide Number 105
  • Slide Number 106
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  • Slide Number 108
  • Slide Number 109
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  • Slide Number 119
  • Slide Number 120
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  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 59: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

Latest developments hellip

bull Topography independent mass resolution

bull C60+ ion source

bull Ar4000+ cluster ion source

bull (H2O)6000+ cluster ion source

bull Mass Spec ndash Mass Spec MSMS

bull 10nm spatial resolution

bull SALVI

59

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
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  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
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  • Slide Number 21
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  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 83
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  • Slide Number 86
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  • Slide Number 91
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  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
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  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
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  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
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  • Slide Number 113
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  • Slide Number 115
  • Slide Number 116
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  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
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  • Slide Number 122
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  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
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  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 60: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

bull C60+ ion source

ndash 200nm spatial resolution

ndash enhanced signal levels for molecular species

ndash organic inorganic and mixed depth profiling

ndash analysis of buried interfaces

60

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
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  • Slide Number 11
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  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
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  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
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  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
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  • Slide Number 103
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  • Slide Number 105
  • Slide Number 106
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  • Slide Number 108
  • Slide Number 109
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  • Slide Number 116
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  • Slide Number 119
  • Slide Number 120
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  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 61: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

NIST NiCr sample 66 and 53 nm alternating layers C60+ ion source

Depth Profiling ndash Dynamic SIMS

61

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
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  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
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  • Slide Number 21
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  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 91
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  • Slide Number 94
  • Slide Number 95
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  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
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  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
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  • Slide Number 108
  • Slide Number 109
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  • Slide Number 120
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  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 62: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

bull Ar4000+ cluster ion source

ndash 500 1000 2000 and 4000 cluster sizes

ndash 2 micron spatial resolution

ndash analysis of real (contaminated) samples

ndash enhanced signal levels for molecular species

ndash organic depth profiling

ndash analysis of buried interfaces

62

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
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  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 91
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  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
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  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
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  • Slide Number 113
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  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
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  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
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  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 63: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

Imaging intact lipid species in mouse brain tissue

Large Image is 25 times 25 mm210 micrompixel

Detailed image has area 512 x 512 mm2 acquired at 2 micrompixel

Dose of 6e12 negative ion mode

63

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
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  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 88
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  • Slide Number 90
  • Slide Number 91
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  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
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  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
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  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
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  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
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  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
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  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 64: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

Single peak mass images full mass spectrum available at each pixel

mz 8874 PI(383)mz 7884 PS(361)mz 6874 SM(331)

Freeze dried biopsy tissue

0E+00

1E+05

2E+05

3E+05

500 600 700 800 900

coun

tsmz

Stroma

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Cancerous Region

0E+001E+052E+053E+05

500 600 700 800 900

coun

ts

mz

Dead Tissue

64

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
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  • Slide Number 14
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  • Slide Number 16
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  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 98
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  • Slide Number 101
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  • Slide Number 105
  • Slide Number 106
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  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 65: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

Tissue Imaging with Ar4000 on frozen hydrated tissue section

All data was acquired using 40 keV Ar4000

+ ion dose 1 times 1012

ionscm2 negative ion mode FOV is 5 mm

65

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
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  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
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  • Slide Number 101
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  • Slide Number 105
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  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 66: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

Depth profiling of Organic Materials

SSIMS destroys the surface

bull How to get more useful signal from the same amount of surface

bull Use cluster ion beams eg Auxn+ Bixn+ Ar4000

+

or polyatomic ions SF5+ C60

+ C24H12+

or low energy Cs+ eg 200eV

bull Lower impact energy per atomndash less mixing fragmentation and sub-surface damage

bull More signal from molecular species for a given ion doseeg Bi32+ ca 50000 x Ga+

bull No apparent damage66

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
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  • Slide Number 45
  • Slide Number 46
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  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
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  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 67: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

t=29 ps

15 keV Ga+ 15 keV C60+

C60 bombardment calculations Zbigniew Postawa Enhancement of Sputtering Yields due to C60 vs Ga Bombardment of Ag111 as Explored by Molecular Dynamics Simulations Z Postawa B Czerwinski M Szewczyk E J Smiley N Winograd and B J Garrison Anal Chem 75 4402-4407 (2003) Microscopic insights into the sputtering of Ag111 induced by C60 and Ga Bombardment ibid J Phys Chem B 108 7831-7838 (2004)

bull Larger volume is altered for Gabull 15x more material removed with C60

67

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
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  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
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  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 68: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

68

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 95
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  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
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  • Slide Number 103
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  • Slide Number 105
  • Slide Number 106
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  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
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  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
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  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
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  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 69: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

69

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 81
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  • Slide Number 83
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  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
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  • Slide Number 91
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  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
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  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
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  • Slide Number 122
  • Slide Number 123
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  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
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  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 70: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60

+

Ar2500+

Thick polymer coating containing drug on substrate

drug

polymer

substrate

Thin polymer layer on Si substrate

~ constant signal from molecular species

70

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
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  • Slide Number 83
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  • Slide Number 98
  • Slide Number 99
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  • Slide Number 101
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  • Slide Number 105
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  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 71: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

Modern Gas Cluster Ion Sources allow depth profiling through organic materials and devices with little or no damage to the molecular

structures hellip

71

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
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  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 83
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  • Slide Number 85
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  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
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  • Slide Number 103
  • Slide Number 104
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  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 72: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

3D Imaging Static SIMS - Yucca plant leaf

72

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
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  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
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  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
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  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 73: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

bull Full mass spectrum in each 2D pixel or 3D voxel

bull Big datafiles 1TB+

bull Principal Component Analysis bull Usually a slow process

bull New algorithm - PJCbull Very fastbull 10 seconds vs 27 hours

bull Quickly screen databull Reprocess to ID chemistry etcbull Overall a very powerful toolkit

3D Imaging Static SIMS - Yucca plant leaf

73

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
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  • Slide Number 11
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  • Slide Number 15
  • Slide Number 16
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  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 74: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

bull (H2O)6000+ cluster ion source

ndash 10 to gt100x more signal for protonated species compared to Ar4000

+

ndash 2 micron spatial resolution

ndash lower detection limits

bull analysis of real therapeutic dose levels

bull trace analysis

74

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
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  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
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  • Slide Number 18
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  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 86
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  • Slide Number 88
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  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
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  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
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  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 75: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

bull Mass Spec ndash Mass Spec MSMS

ndash Collision Induced Dissociation of secondary ion species produces spectra that are similar to lsquonormalrsquo mass spectra

ndash comparison with standard databases

ndash facilitates identification interpretation

75

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
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  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
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  • Slide Number 21
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  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 81
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  • Slide Number 85
  • Slide Number 86
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  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
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  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 76: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

MSMS of mz 49545

x50

DAG region of fly brain spectrum

MSMS of Diacylglycerides in Fly brainHigh energy CID (05 ndash 6 keV)Nitrogen collision gasToF-ToF

Povides detail on chain lengths and saturation and there increased specificity that tells us about the biology

76

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
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  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
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  • Slide Number 103
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  • Slide Number 105
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  • Slide Number 109
  • Slide Number 110
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  • Slide Number 116
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  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
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  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
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  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 77: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

bull 10nm spatial resolution

ndash Magnetic Sector upgrade to Zeiss Orion HIM

ndash Ne+ primary ions

77

Latest developments hellip

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 81
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  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
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  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 78: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

78

Examples of Applications

bull Based on real examples and real data

bull Some details changed to preserve confidentiality etc

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
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  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
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  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 83
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  • Slide Number 100
  • Slide Number 101
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  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
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  • Slide Number 115
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  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 79: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

79

Na 1sK 2s

N 1s

S 2p

Cl 2p

Aluminium foil

Aluminium foil + fingerprint

Mg 1s

C kvvO kll

Al 2s Al 2pC 1s

O 1s

Mg kllMg 2s Mg 2p

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
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  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 97
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  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 80: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

80

Relative Atomic Percentage Composition

Al foil ContaminatedMg 5 02O 58 24C 10 65Al 27 8

Na - 08K - 11Cl - 06S - 04

Canrsquot touch the sample for analysis

Care also with sample packaging

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
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  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
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  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 81: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

81

Ag foil used for adhesive developments

Rel At CompAg C O

As received 51 40 9

Solvent wipe 02 85 15

Solvent wipe + rinse 03 85 15

Ultrasonic washing 35 43 22

Polymer surfaces more favourable than metals but bewareSolvent purity contaminationPlastic wash-bottlesContaminated glasswareExtractables in tissues cloths etc

Surface contamination and cleaning

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 82: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

82

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

bull very common family of materialsbull many applications (lubricant release agent anti-foamerhelliphelliphellip)bull mobile spreads easilybull cannot easily distinguish siloxanes from silicates by XPSbull very characteristic SSIMS spectra

bull enough silicone manufactured to cover the surface of the Earth to a level of several nm deep

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
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  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
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  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
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  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 81
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  • Slide Number 83
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  • Slide Number 86
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  • Slide Number 90
  • Slide Number 91
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  • Slide Number 94
  • Slide Number 95
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  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
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  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 83: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

83

Poly(dimethylsiloxane) PDMS

CH3|

( - Si - O - )n|CH3

Typical example

bull Polymer material used in adhesive applicationbull One lsquoGoodrsquo sample one lsquoBadrsquobull Whybull XPS 10 Si on Good 20 on Bad (Pure PDMS = 25 Si)bull SSIMS dominated by PDMS signal

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Cou

nts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Cou

nts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Cou

nts

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 81
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  • Slide Number 90
  • Slide Number 91
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  • Slide Number 93
  • Slide Number 94
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  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
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  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
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  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
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  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
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  • Slide Number 130
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  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 84: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

84

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 85: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

85

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additiveICI

Acq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 86: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

86

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
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  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
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  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 81
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  • Slide Number 94
  • Slide Number 95
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  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
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  • Slide Number 113
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  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
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  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 87: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

87

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
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  • Slide Number 12
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  • Slide Number 19
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  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
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  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 88: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

88

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
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  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 89: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

89

lsquoOily ragrsquo syndrome

bull Streaks and smears on extruded product hellipbull Extruder lips cleaned with a proprietary domestic spray cleanerbull lsquoSilicone freersquo according to manufacturer

bull Anti-foam additive

bull Always shoot the man with theoily rag

bull Cleanroom example hellipbull Aerospace example hellipbull Automotive example hellip

ICIAcq 98 May 13 +ToFSIMS 80 keV Cs+ Cal yes AcqTime 272 min Bin 6621 nsPulses 819200 Integral 1204014 Max 49394 Approx MnMw 24162451

100 110 120 130 140 150 160 170 180 190 2000

05

1

15

2x 10 4

mz

Coun

ts

0 10 20 30 40 50 60 70 80 90 1000

05

1

15

2x 10 5

mz

Coun

ts

200 210 220 230 240 250 260 270 280 290 3000

2000

4000

6000

mz

Coun

ts

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
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  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 90: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

90

High speed failures of novel suspension component

bull 3 major testing accidents at 170mph+bull adhesive failure between CF and Ti componentsbull cause traced to inadequate cleaning of machined Tibull fixed in time for the final races of 2001 seasonbull won the race amp Drivers and Constructors championships

bull new suspension design also used in 2002 2003 2004helliphellip

Ti

Adhesive film

Carbon Fibre component

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
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  • Slide Number 18
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  • Slide Number 20
  • Slide Number 21
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  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
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  • Slide Number 95
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  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 91: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

91

Not only fingerprints and PDMS but also

bull hydrocarbonsbull fluorocarbonsbull amidesbull anti-oxidantsbull UV stabilisersbull mould release agentsbull surfactantsbull mobile additivesbull oligomersbull particulatesbull hellip

bull one manrsquos product is another manrsquos contaminant

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
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  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
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  • Slide Number 105
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  • Slide Number 113
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  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 92: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

92

Failed coating example

bull high-end vehicle doors ndash extra holes in the door panel cut by hand to fit new lock design

bull painted as normal

bull paint blisters forming after several months service hellip

bull ToFSIMS analysis from underside of paint flake

traces of original cutting fluid

inadequate cleaning after cutting

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
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  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 93: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

93

Failed coating example

bull internal coating on pipework failing leading to corrosion

bull offshore application ndash expensive and difficult to repair

bull repeating pattern noticed every few metres along the pipe helliphellip

bull ToFSIMS analysis

traces of high pressure hydraulic oil between the coatingand the steel pipe surface

pipe manufacturing process issue identified

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
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  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
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  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
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  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
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  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 94: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

Print

Pretreat 1

PET

Pretreat 2

Metal

Pretreat 1 optimised for print adhesion

Pretreat 2 optimised for metal adhesion

Failure between metal and pretreat ldquo2rdquo

Why

94

Failed coating example

bull Bottle label falling off during re-use washing cycle

bull expected sequence wash rinse remove label

Glass

adhesive

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
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  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 95: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

95

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 96: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

XPS SIMS analysis of a coated can

metal processing cleaning inner coating outer coating printing lacquer

96

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 97: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

97

Plane of failure analyses

bull Packaging laminate

Sample after delamination

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PETAdhesion Pretreat

AdhesivePE

PETAdhesion Pretreat

PrintAdhesive

Aluminium MetalAdhesive

PET

Adhesion PretreatAdhesive

PE

Metal side

Film side

Failure surfaces

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
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  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
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  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
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  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 98: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

98

Identification of an Unknown Green Slime by XPS

Sample Relative Atomic Percentage Composition

C S O Cr Unknown 644 82 247 27 Cr Tosylate 618 88 265 29

(CH3-C6H4-SO3-)3Cr

Significant aromatic character in C1s spectrumOS ratio ~ 31SCr ratio ~ 31Cr as Cr III S oxidised sulphate or sulphonate-like

Overall results consistent with

bull Urgent problem - what is it and where did it come frombull Sample dried in air at 50degC for 1 hour

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136

Sample

Relative Atomic Percentage Composition

C

S

O

Cr

Unknown

644

82

247

27

Cr Tosylate

618

88

265

29

Page 99: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

99

Cr VI

Cr(OH)3

Cr2O3

Cr metal

XPS data

11 Cr40 as Cr VI

6 Cr10 as Cr VI

Determination of Cr VI content by XPSCr 2p high resolution spectra

Sampling depth3-5nm

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136
Page 100: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

100

Overlayer - substrate interactions

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

samplingdepth

molecules interacting with the surface

substrate

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136
Page 101: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

101

samplingdepth

bull Compare thin layer with a relatively thick layerbull Overlayer thickness determination

Overlayer - substrate interactions

molecules interacting with the surface

molecules interacting with molecules

substrate

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
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  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
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  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136
Page 102: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

102

Bond Type EnergykJmol-1

Ionic 600-1100Covalent 60-700Metallic 110-350

Broumlnsted Acid-Base Up to 1000Lewis Acid-Base Up to 80

Hydrogen Bonds (incl F) Up to 40Hydrogen Bonds (excl F) 10-25Permanent Dipole-Dipole 4-20

Dipole-Induced Dipole lt 2Dispersion Forces 008-40

prim

ary

bond

sse

cond

ary

bond

s

van

der

Waa

ls b

onds

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
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  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 98
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  • Slide Number 100
  • Slide Number 101
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  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
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  • Slide Number 108
  • Slide Number 109
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  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
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  • Slide Number 126
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  • Slide Number 134
  • Slide Number 135
  • Slide Number 136
Page 103: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

103

Adsorption Isotherms

bull XPS provides reliable quantitative surface chemical analysis

bull ToF-SIMS provides semi-quantitative molecular data

bull Both can be used to estimate density of bonding sites and bond type

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
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  • Slide Number 111
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  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
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  • Slide Number 136
Page 104: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

104

500microm x 500micromTreated Metal Surfacebull 2 additives A and Bbull competitive adsorption onto metal surfacebull ~4 nm thick layerbull TD SSIMS analysis from 30 - 400 degCbull use of molecular ions for each additivebull estimate desorption energies from T at the

maximum rate of desorption

XY at surface

XZ or YZ

ldquoThermal Desorptionrdquo SSIMS

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136
Page 105: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

105

45 degC

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136
Page 106: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

106

60 degC

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
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  • Slide Number 21
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  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136
Page 107: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

107

75 degC

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
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  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
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  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
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  • Slide Number 111
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  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
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  • Slide Number 128
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  • Slide Number 133
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  • Slide Number 136
Page 108: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

108

90 degC

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
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  • Slide Number 101
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  • Slide Number 105
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  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136
Page 109: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

109

105 degC

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
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  • Slide Number 11
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  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
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  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136
Page 110: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

110

120 degC

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
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  • Slide Number 86
  • Slide Number 87
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  • Slide Number 89
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  • Slide Number 91
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  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136
Page 111: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

111

135 degC

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
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  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136
Page 112: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

112

150 degC

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136
Page 113: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

113

165 degC

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136
Page 114: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

114

195 degC

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
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  • Slide Number 7
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  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
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  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136
Page 115: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

115

225 degC

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
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  • Slide Number 101
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  • Slide Number 104
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  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
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  • Slide Number 111
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  • Slide Number 118
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  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136
Page 116: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

116

255 degC

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136
Page 117: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

117

285 degC

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
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  • Slide Number 13
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  • Slide Number 16
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  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 103
  • Slide Number 104
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  • Slide Number 111
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  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136
Page 118: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

118

315 degC

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 100
  • Slide Number 101
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  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
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  • Slide Number 110
  • Slide Number 111
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  • Slide Number 113
  • Slide Number 114
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  • Slide Number 116
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  • Slide Number 118
  • Slide Number 119
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  • Slide Number 121
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  • Slide Number 123
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  • Slide Number 128
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  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136
Page 119: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

119

θ ~ 002deg

d ~ 03 microns per mm03nm per micron

θ

Buried Interfaces amp Depth Profiling of Organic Materials

bull Ultra Low Angle Microtomy - ULAMbull small samplesbull glass diamond knifebull prepare many samples

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
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  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
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  • Slide Number 115
  • Slide Number 116
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  • Slide Number 118
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  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
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  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
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  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136
Page 120: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

120

Depth Profiling of Organic Materials

bull ULAM

image

linescan

lsquobulkrsquo vs interface

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
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  • Slide Number 13
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  • Slide Number 20
  • Slide Number 21
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  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
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  • Slide Number 93
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  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136
Page 121: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

121

Depth Profiling of Organic Materials

bull ULAM

bull sampling depths

XPS ~ 10nm SSIMS ~ 1nm

bull spatial resolution depth resolution

XPS ~ 55 x 55 microm = ~ 17 nm at 002deg SSIMS ~ 100 x 100 microm = ~ 30 nm iSSIMS ~ 1microm = ~ 1 nm

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
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  • Slide Number 97
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  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
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  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
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  • Slide Number 111
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  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
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  • Slide Number 122
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  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136
Page 122: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

122

Depth Profiling of Organic Materials

bull ULAMbull spreading of mobile speciesbull cut inside to out as wellbull cryo prep

θ ~ 002degd ~ 03 microns per mm

03nm per micron

θ

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
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  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
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  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136
Page 123: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

123

Depth Profiling of Organic Materials

bull ULAMPanel 16 Linescan

0

10

20

30

40

50

60

70

80

90

-550 -450 -350 -250 -150 -50 50 150 250

Depth microm

Rel

ativ

e A

tom

ic P

erce

ntag

e C

ompo

sitio

n

0

2

4

6

8

10

12

O 1sC 1sF 1sTi 2pN 1sSi 2pMg 2sAl 2p

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
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  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136
Page 124: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

124

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136
Page 125: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

125

Depth Profiling of Organic Materials

bull ULAM

0

1000

2000

3000

4000

5000

6000

7000

8000

00 20 40 60 80

Depth Microns

Inte

nsity

C

ount

s

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
  • Slide Number 84
  • Slide Number 85
  • Slide Number 86
  • Slide Number 87
  • Slide Number 88
  • Slide Number 89
  • Slide Number 90
  • Slide Number 91
  • Slide Number 92
  • Slide Number 93
  • Slide Number 94
  • Slide Number 95
  • Slide Number 96
  • Slide Number 97
  • Slide Number 98
  • Slide Number 99
  • Slide Number 100
  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
  • Slide Number 110
  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136
Page 126: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

126

Depth Profiling of Organic Materials

bull ULAM

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
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  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
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  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
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  • Slide Number 134
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  • Slide Number 136
Page 127: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

127

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

No emissions

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
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  • Slide Number 118
  • Slide Number 119
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  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136
Page 128: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

128

Catalyst deactivation problem

bull Problem encountered during commissioning of a new plant design

bull Exhaust catalyst damaged withinminutes of start-up

Why

Fit a new pound05M catalyst or not

Urgent problem received on a Friday evening

Initial SSIMS and XPS analysis hellip

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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  • Slide Number 101
  • Slide Number 102
  • Slide Number 103
  • Slide Number 104
  • Slide Number 105
  • Slide Number 106
  • Slide Number 107
  • Slide Number 108
  • Slide Number 109
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  • Slide Number 111
  • Slide Number 112
  • Slide Number 113
  • Slide Number 114
  • Slide Number 115
  • Slide Number 116
  • Slide Number 117
  • Slide Number 118
  • Slide Number 119
  • Slide Number 120
  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
  • Slide Number 126
  • Slide Number 127
  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136
Page 129: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

Note Br present at ~ 5 atoms in 1000 by XPS

Bromomethane present in exhaust gas stream at low level

BUT ndash no reaction with catalyst under any conditions

200 250 300 350 400 450 5000

200

400

600

800

1000

mz

Counts

200 250 300 350 400 450 5000

500

1000

1500

mz

Counts

PtPtO

PtO2

Pt2O2

-

-Pt

PtBr

PtBr2

PtBr4

PtBr3

Active Catalyst

Deactivated Catalyst

129

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
  • Slide Number 12
  • Slide Number 13
  • Slide Number 14
  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
  • Slide Number 80
  • Slide Number 81
  • Slide Number 82
  • Slide Number 83
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  • Slide Number 103
  • Slide Number 104
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  • Slide Number 118
  • Slide Number 119
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  • Slide Number 121
  • Slide Number 122
  • Slide Number 123
  • Slide Number 124
  • Slide Number 125
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  • Slide Number 128
  • Slide Number 129
  • Slide Number 130
  • Slide Number 131
  • Slide Number 132
  • Slide Number 133
  • Slide Number 134
  • Slide Number 135
  • Slide Number 136
Page 130: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

52 54 56 58 60 62 640

500

1000

1500

mz

Cou

nts

C4H7

C4H9

C3H8N

C4H5

C4H6

C4H8

Fe- C5H5

C5H3

52 54 56 58 60 62 640

100

200

300

400

500

mz

Cou

nts

Cu

Cu

ActiveCatalyst

DeactivatedCatalyst

+

+

Note Cu present at only 1 atom in 1000 by XPS

130

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
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  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
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Page 131: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

131

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
  • Slide Number 9
  • Slide Number 10
  • Slide Number 11
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  • Slide Number 13
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  • Slide Number 15
  • Slide Number 16
  • Slide Number 17
  • Slide Number 18
  • Slide Number 19
  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
  • Slide Number 77
  • Slide Number 78
  • Slide Number 79
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Page 132: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

132

Catalyst deactivation problem

HeatExchangers

Exhaust Gas

Scrubbers

Catalyst BedGas torches

bull root cause identifiedbull temporary fixbull longer term solution pound10M cost

bull saved pound05M catalystbull license to operate pound200M investmentbull reputation

bull 2 similar plant designs hellip

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
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  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
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  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
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Page 133: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

133

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
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  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
  • Slide Number 76
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  • Slide Number 105
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  • Slide Number 111
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Page 134: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull XPS and SIMS should be considered whenever surface

chemistry is involved or when surface chemical information is required

bull Very powerful capabilities at SEAL ndash available to all

bull Capability = f equipment people (experience + ability)

bull Enabling support for research and development

bull Problem solving support for processes and production

bull Pushing the limits

bull If you have a problem if no one else can help and if you can find them maybe you can hire the SEAL Team 134

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
  • Slide Number 2
  • Slide Number 3
  • Slide Number 4
  • Slide Number 5
  • Slide Number 6
  • Slide Number 7
  • Slide Number 8
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  • Slide Number 11
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  • Slide Number 20
  • Slide Number 21
  • Slide Number 22
  • Slide Number 23
  • Slide Number 24
  • Slide Number 25
  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
  • Slide Number 36
  • Slide Number 37
  • Slide Number 38
  • Slide Number 39
  • Slide Number 40
  • Slide Number 41
  • Slide Number 42
  • Slide Number 43
  • Slide Number 44
  • Slide Number 45
  • Slide Number 46
  • Slide Number 47
  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
  • Slide Number 59
  • Slide Number 60
  • Slide Number 61
  • Slide Number 62
  • Slide Number 63
  • Slide Number 64
  • Slide Number 65
  • Slide Number 66
  • Slide Number 67
  • Slide Number 68
  • Slide Number 69
  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
  • Slide Number 72
  • Slide Number 73
  • Slide Number 74
  • Slide Number 75
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Page 135: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull If we canrsquot do it it probably canrsquot be done

135

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

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  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
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  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
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  • Depth Profiling ndash Dynamic SIMS
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  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
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Page 136: Surface Chemical Analysis by XPS and SIMS · 2017-11-22 · Image I Energy O1s N1s C1s XPS (ESCA) X-ray Photoelectron Spectroscopy ... high mass resolution (m/ ... getting the message

Surface Chemical Analysisby XPS and SIMS

Conclusionsbull SEAL has the best instrument base for surface analysis in

Europe including XPS ToFSIMS Gas Cluster Ion Beams and Helium Ion Microscopy facilities

bull Also UPS ISS SEM EDX FIB AES AFM SPM QCM GDOES White-Light Interferometry and Raman Microscopy

bull Thank you for the invitation and for your attention

136

  • Slide Number 1
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  • Slide Number 26
  • Slide Number 27
  • Slide Number 28
  • Slide Number 29
  • Slide Number 30
  • Slide Number 31
  • The Ionoptika J105 SIMSNot only C60+ and Ar4000+ but also [H2O]6000+ cluster ion beam source helliphellip
  • Ionoptika J105 SIMS
  • Slide Number 34
  • Slide Number 35
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  • Slide Number 48
  • Slide Number 49
  • Slide Number 50
  • Slide Number 51
  • Detection of Volatile Materials
  • Slide Number 53
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 55
  • Depth Profiling ndash Dynamic SIMS
  • Slide Number 57
  • Slide Number 58
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  • Depth profiling of organic materials using polyatomic ions Bixn+ SF5+ C60+ Ar2500+
  • Slide Number 71
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