Studying micro-objects with SEM (Scanning electron microscope) Student: Michał Łępicki (Warsaw University of Technology) Supervisor: Oleg Leonidovich Orelovich

Studying micro-objects with Studying micro-objects with SEM (Scanning electron SEM (Scanning electron

microscope)microscope)

Student:Student:Michał Łępicki (Warsaw University of TechnologyMichał Łępicki (Warsaw University of Technology))

SupervisorSupervisor::Oleg Leonidovich OrelovichOleg Leonidovich Orelovich

Center of Applied Physics of Flerov Laboratory of Nuclear Center of Applied Physics of Flerov Laboratory of Nuclear ReactionsReactions JINR JINR

IntroductionIntroduction











Program of practicesProgram of practices

Layout and performance of SEMLayout and performance of SEM Preparing and coating samplesPreparing and coating samples Operating SEMOperating SEM Electron data processingElectron data processing

Layout and performance of Layout and performance of SEMSEM

1-3 Electron gun

4, 10 Aperture

5-6 Condenser lenses

7 Scanning coils

8 Stigmator

9 Objective lens

11 X-ray detector

12 Pre-amplifier

13 Scanning circuits

14 Specimen

15 Secondary electron detector

16-18 Display/Control circuits

Layout and performance of Layout and performance of SEMSEM

Preparing and coating Preparing and coating samplessamples

General view of ion sputter


Reasons of coating Reasons of coating specimensspecimens

The surface of sample must be The surface of sample must be electro conductive to minimalize electro conductive to minimalize charging from beamcharging from beam

The surface must be thermo The surface must be thermo conductive to minimalize local conductive to minimalize local heatingheating

The material of sample must have a The material of sample must have a high atomic number to increase high atomic number to increase secondary electron emissionsecondary electron emission



Gold coated sample

Sample without coating

Operating SEMOperating SEM


Tilt 0 deg – shadowless illumination Tilt 30 deg

Operating SEMOperating SEM

Tilt 0 degTilt 30 deg

TIL

T

Electron data processingElectron data processing

A/D

Electron data processingElectron data processingN=1,75*10^7 [channels/cm^2] R=0,5μm average channel

radius

13,8% surface cross section (SCS)

SCS= Pi*R^2*N*100%

Drain waterDrain water 70ml 70ml filtratedfiltrated

Drain waterDrain water 70ml 70ml filtratedfiltrated

Puddle water Puddle water 5050ml filtratedml filtrated

PuddlePuddle water water 50ml 50ml filtratedfiltrated

Me operating SEMMe operating SEM

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Studying micro-objects with SEM (Scanning electron microscope) Student: Michał Łępicki (Warsaw University of Technology) Supervisor: Oleg Leonidovich Orelovich