Upload
others
View
7
Download
0
Embed Size (px)
Citation preview
1
Speeding Ahead with a Bright Light on Texas Instruments Digital Micro-mirror Device (DMD)
Rick Oden Ph.D.TI Fellow – Texas Instruments Inc. : [email protected]
ABSTRACT Through the 22 years since TI began commercial manufacturing of DMD (we are at an anniversary as of last week), many successes & changes have been encountered by the technology & business during this journey. The successes are a testimony not only to the manufacturing, design/modeling & materials & packaging capabilities –but, also to the passionate pursuit of excellence by its employees. In the course of this discussion, I will not only present to you the various directions these ‘dinky little mirrors’ are applied currently, but also provide some color to paths we are scoping for future opportunities of this massively-arrayed, surface-MEMS technology.
Outline• A little about Texas Instruments –
– History of Corporation– Technology segments & expanse of business– A little on the MEMS opportunity
• A lot more about DLP® Products and Micromirrors –– A history of the technology…– We do ‘it’ a little differently…– How does the technology work?– Where are we applying it for business advantage ($)
Texas Instruments – Corporate History
A history of great invention through the years
Oil exploration Defense systems Integrated circuit
1930s 1940s 1950s
1970s-’80s
Processors Applied research in Kilby Labs
2010 to present
Analog and Embedded Processing
2000-2010
Technologies that improve how we live our lives
Diverse and global workforce
MEMS – a Ubiquitous Technology
MEMS – a Ubiquitous Technology & Impact
0
5
10
15
20
2015 2016 2017 2018 2019 2020 2021
$11.9
$20.0MEMS Market: Forecasted Revenue ($B)
Sources: [1][3][4] Yolé Développement. [2] Grand View Research
MEMS – a Ubiquitous Technology & Impact
Sources: [1][3][4] Yolé Développement. [2] Grand View Research
0
0.5
1
1.5
2
2016 2017 2018 2019 2020 2021 2022
AutomotiveConsumerIndustrialHealthcareOther
MEMS Market: Sector Revenue ($B) in U.S.
MEMS – a Ubiquitous Technology & Impact
Sources: [1][3][4] Yolé Développement. [2] Grand View Research
0
5
10
15
20
25 Others
Environmental MEMS
Oscillators
RF MEMS
Microfluidics
PIR & thermopiles
Microbolometers
Optical MEMS
Inertial combos
Digital compass
Gyroscopes
Accelerometers
Microphones
Pressure sensors
Inkjet heads
MEMS Market Breakdown
MEMS – a Ubiquitous Technology & Impact
Sources: [1][3][4] Yolé Développement. [2] Grand View Research
0200400600800
10001200
Bosc
hST
Mic
roel
ectro
nics
Texa
s In
stru
men
tsAv
ago
Hew
lett
Pack
ard
Qor
voKn
owle
s El
ectro
nics
Inve
nsen
seD
enso
Pana
soni
cN
XPSe
nsat
aC
anon
Infin
eon
AKM
Anal
og D
evic
esM
urat
aAm
phen
olH
oney
wel
lAA
CU
TCAL
PS E
lect
ricFl
ir Sy
stem
sM
easu
rem
ent…
TSM
CG
oerte
kR
ohm
Sony
Om
ron
Epso
n
MEMS Market: Top manufacturers by revenue ($M)
*Includes MEMS sensors
DLP Products Division of Texas Instruments– Massively arrayed MEMS Micromirrors
Possible unknowns on MEMS-based DLP Technology
Each DLP chip can contain up to 8 million individually controlled micromirrors
80+ percent of digital movie theatres use MEMS-
based DLP Cinema® display technology
worldwide
Dr. Larry Hornbeck invented the digital micromirror device
(DMD) in 1987
He has since received an Academy Award of Merit
D L P t e c h n o l o g y i s f l e x i b l e e n o u g h t o b e
u s e d a c r o s s a u t o m o t i v e ,
i n d u s t r i a l a n d c o n s u m e r
a p p l i c a t i o n s
*Dr. Larry Hornbeck received the 2014 Scientific and Technical Academy Award® of Merit (Oscar© statuette)
TI DLP® Products: a history of innovation
1987Dr. Larry Hornbeck invents digital micromirror device (DMD), known as the DLP® chip
1998DLP Products receives first Emmy® Award for Outstanding Achievement In Engineering Development
2004DLP Products becomes highest volumeMEMS supplier worldwide
2009Consumer devices begin to ship worldwide featuring DLP Pico™ technology based projectors
2011Half of all movie theatres converted from film to digital enabled by DLP Cinema technology
2012New DLP development kit launches allowing developers to use DLP technology in new markets
2013Increasing adoption of DLP Pico solutions
For more than two decades, award-winning DLP Product innovations have solved some of the world’s most complex display and light control applications.
2015
1996First commercial DLP system ships; enables first ultra portable projector
Dr. Hornbeck receives the 2014 Scientific and Technical Academy Award® of Merit (Oscar® statuette) for the invention of the digital micromirror device (DMD) technology as used in DLP Cinema® projection.
Photo credit: Michael Yada / ©A.M.P.A.S.
First automotive‐qualified DLP chipset for head‐up display (HUD) applications
15
Pixel – Package – Optics Interplay
16
Pixel – Package – Optics Interplay
17
Pixel – Package – Optics Interplay
18
Pixel – Package – Optics Interplay
19
Pixel – Package – Optics Interplay
20
Pixel – Package – Optics Interplay
21
System Optics or Display - LED
22
System Optics or Display - LED
DMD CMOS Drive Scheme
Vm VmVa
Va
24ArcViaArcVia
M3 Address Electrode
M3 Address Electrode
Mirror Control Bus
Mirror Control Bus
Arc ViaArc Via
DMD Superstructure – Metal 3 - Address
Spring TipSpring TipHingeVia
HingeVia
Raised Address Electrode
Raised Address Electrode
DMD Superstructure – Metal 4 - Hinge
Mirror ViaMirror Via
DMD Superstructure – Metal 5 - Mirror
8
Pixel Node Timeline
Packaging
Smart Homes and Appliances
Infrared (IR) Sensing
Wearable Technology
Automotive Head-up Displays
What’s next…
MEMS Are All Around Us
Wearable Technology
Wearables bring HD mobile displays to the masses
Smarter• Enable information overlays for visual aid or entertainment in just about any
environment• Consumers can easily experience augmented reality (AR) in their full field of
vision compared to LCD technology
Smaller• Immersive experience with pocket-size colorful, crisp and bright displays• A cinema experience, made personal: Ranges from watching movies or TV on-
the-go, to experiencing new worlds wherever you are
Smart Homes and Appliances
MEMS deliver intelligent displays to smart homes and IoT devices
Smarter• Replace traditional touchpads with projection displays in homes, businesses and retailers to
provide an “on-demand” and reconfigurable interactive control• Projection-based lighting fixtures can share content, create a mood or deliver dynamic
pictures and information• Voice-activated personal assistants could show search results, traffic reports or visuals for
news stories
Smaller• Make convenient, portable displays a reality without the need for obtrusive installation• Integrating intelligent displays into appliances, such as cooktops or refrigerators, is now
possible with smaller chips and ultra-short throw optical solutions
Automotive Head-up Displays
MEMS drive augmented reality in the next generation of vehicles
Smarter• Wide field-of-view and augmented reality (AR) displays the information drivers need
to keep their eyes on the road• Versatile and advanced HD display solutions ensure a less distracted driving
experience • MEMS-based HUD enables clear image visibility regardless of weather, temperature
or polarization
Smaller• After-market HUD provides small, hands-free guidance, communication and
entertainment controls for vehicles without integrated solutions• Pico projection enables small size, low power, economical cost, and proven
reliability
Infrared (IR) Sensing
Using light as a sensor in consumer applications
Smarter• Consumers are empowered to know more about the ingredients or quality of foods• Doctors, patients and inspectors can test authenticity of pharmaceutical and medicinal
products
Smaller• Battery-operated portable analyzers transfer analysis out of testing labs and into the
hands of consumers• Cloud-based computing can manage the reference databases and material analysis• Wireless connectivity can send analysis results to smartphones or tablets
What’s next…
The future is bright for MEMS-based displays in consumer electronics
• MEMS-based electronics will continue to become ever-present in consumers’ lives
• There will continue to be a growing advantage for colorful, sharp and bright displays in homes, vehicles and wearable devices
• MEMS advancements will help innovators unlock endless opportunities for smaller, smarter, and more personal experiences in automotive and consumer electronics
• MEMS suppliers, like TI, are eager to keep pushing innovation in response to the great products and solutions OEMs continue to design
Hot off the Press…
DIY lithography System…