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22 bd Benoni Goullin 44200 NANTES - FRANCE +33 2 40 18 09 16 [email protected] www.systemplus.fr Spectral Engines Nirone Sensor X MEMS Fabry-Perot interferometer in a very tiny NIR spectrometer SP20558 - MEMS report by Sylvain Hallereau Laboratory Analysis by Nicolas Radufe May 2020 – Sample REVERSE COSTING® – STRUCTURAL, PROCESS & COST REPORT

Spectral Engines Nirone Sensor X - System Plus Consulting · Physical Analysis 14 o Summary of the Physical Analysis o Nirone Sensor X Spectral Sensor disassembly 17 Module Disassembly

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Page 1: Spectral Engines Nirone Sensor X - System Plus Consulting · Physical Analysis 14 o Summary of the Physical Analysis o Nirone Sensor X Spectral Sensor disassembly 17 Module Disassembly

©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 1

22 bd Benoni Goullin44200 NANTES - FRANCE +33 2 40 18 09 16 [email protected] www.systemplus.fr

Spectral Engines Nirone Sensor XMEMS Fabry-Perot interferometer in a very tiny NIR spectrometer

SP20558 - MEMS report by Sylvain HallereauLaboratory Analysis by Nicolas Radufe

May 2020 – Sample

REVERSE COSTING® – STRUCTURAL, PROCESS & COST REPORT

Page 2: Spectral Engines Nirone Sensor X - System Plus Consulting · Physical Analysis 14 o Summary of the Physical Analysis o Nirone Sensor X Spectral Sensor disassembly 17 Module Disassembly

©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 2

Table of Contents

Overview / Introduction 4

o Executive Summary

o Reverse Costing Methodology

Company Profile 8

o Spectral Engines

o VTT Memsfab

Physical Analysis 14

o Summary of the Physical Analysis

o Nirone Sensor X Spectral Sensor disassembly 17

✓ Module Disassembly and Dimension

✓ Metal Parts

✓ PCB

✓ BOM

o FPI Sensor Component 32

✓ IR Filter

o FPI MEMS Die 39

✓ Die Views and Dimensions

✓ Die Cross-Section

✓ Die Process

✓ Die Process

o InGaAs Photodiode 61

o Comparison Sensor X, Nanolambda NSP32 and the consumer

Physic SCiO 69

Sensor Manufacturing Process 74

o Global Overview

o FPI MEMS Front-End Process and Fabrication Unit

o TO5 Metal Can Package

o PCB and System Assembly Process

o Final Test and Assembly Unit

Cost Analysis 83

o Summary of the Cost Analysis

o Yields Explanation and Hypotheses

o Spectral Engines Nirone Sensor X 86

✓ Wafer Front-end Cost

✓ Die Cost

o InGaAs Photodiode 92

o IR Filters

o NIR FPI Sensor 100

✓ Package Cost

✓ NIR FPI Sensor Cost

o Nirone Sensor X 103

✓ BOM Cost

✓ Summary of the Assembling

✓ Added Value Cost

✓ Nirone Sensor X Cost

o Cost Comparison 114

Selling Price 115

Feedbacks 118

Company Services 120

Page 3: Spectral Engines Nirone Sensor X - System Plus Consulting · Physical Analysis 14 o Summary of the Physical Analysis o Nirone Sensor X Spectral Sensor disassembly 17 Module Disassembly

©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 3

Overview / Introductiono Executive Summaryo Reverse Costing Methodologyo Glossary

Company Profile

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Feedbacks

Related Reports

About System Plus

Executive Summary

This full reverse costing study has been conducted to provide insights on technology data, manufacturing cost and selling price of theSpectral Engines, NIRONE Sensor X a NIR spectrometer.

The Nirone Sensor X module developed by Spectral Engines, is a Near Infra-Red (NIR) spectrometer, covering wavelengths from 1550 nm to 1950 nm. The Nirone Sensor X module has been developed for applications including pharmaceutical composition analysis, textile, plastic, agriculture and consumer.

In the Nirone Sensor X module, the IR light source is an incandescent lamp. The measurement of the NIR spectrum is performed by an innovative MEMS Fabry-Perot Interferometer (FPI) developed by the VTT Technical Research Centre of Finland. The electrostatically controlled FPI is manufactured with thin-film micromachining technology and is compatible with all semiconductor foundries. Today manufactured on 150mm diameter wafers by VTT MEMSFab, this technology can be manufactured in large volume and for a low cost in 200mm wafer diameter foundry without important investment. An InGaAs standard photodiode measures the NIR light during the measurement to create the spectrum.

The module also integrates a color sensor from ams AG and a microcontroller from STMicroelectronics to manage power and communication.

A comparison between the Nirone Sensor X and two other spectrometers, the NanoLambda NSP32 and Consumer Physics SCiO, is performed in this report.

This reverse costing study provides insights into technological data, manufacturing cost, and selling price of housing, electronic board, FPI MEMS and InGaAs photodiode, for the spectral sensor supplied by Spectral Engines.

Page 4: Spectral Engines Nirone Sensor X - System Plus Consulting · Physical Analysis 14 o Summary of the Physical Analysis o Nirone Sensor X Spectral Sensor disassembly 17 Module Disassembly

©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 4

Overview / Introduction

Company Profile

Physical Analysis o Nirone Sensor X

o Spectral Sensor o Disassemblyo Spectral Sensor PCBo Module BOM

o IR Sensor o Views & Dimensionso Sensor Cross-Sectiono IR Filtero FPI MEMS Dieo InGaAs Photodiode

o Comparison

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Feedbacks

Related Reports

About System Plus

Nirone Sensor X - Overview & Dimensions

1.6 cm

3.2 cm

3.5 cm

Spectral Sensor– Overview©2020 by System Plus Consulting

Page 5: Spectral Engines Nirone Sensor X - System Plus Consulting · Physical Analysis 14 o Summary of the Physical Analysis o Nirone Sensor X Spectral Sensor disassembly 17 Module Disassembly

©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 5

Overview / Introduction

Company Profile

Physical Analysis o Nirone Sensor X

o Spectral Sensor o Disassemblyo Spectral Sensor PCBo Module BOM

o IR Sensor o Views & Dimensionso Sensor Cross-Sectiono IR Filtero FPI MEMS Dieo InGaAs Photodiode

o Comparison

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Feedbacks

Related Reports

About System Plus

Electronic Board - Top Side

Page 6: Spectral Engines Nirone Sensor X - System Plus Consulting · Physical Analysis 14 o Summary of the Physical Analysis o Nirone Sensor X Spectral Sensor disassembly 17 Module Disassembly

©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 6

Overview / Introduction

Company Profile

Physical Analysis o Nirone Sensor X

o Spectral Sensor o Disassemblyo Spectral Sensor PCBo Module BOM

o IR Sensor o Views & Dimensionso Sensor Cross-Sectiono IR Filtero FPI MEMS Dieo InGaAs Photodiode

o Comparison

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Feedbacks

Related Reports

About System Plus

IR Sensor - Package Opening

Top Side of the sensor without the cap – Optical View©2020 by System Plus Consulting

Backside view of the cap – Optical View©2020 by System Plus Consulting

Page 7: Spectral Engines Nirone Sensor X - System Plus Consulting · Physical Analysis 14 o Summary of the Physical Analysis o Nirone Sensor X Spectral Sensor disassembly 17 Module Disassembly

©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 7

Overview / Introduction

Company Profile

Physical Analysis o Nirone Sensor X

o Spectral Sensor o Disassemblyo Spectral Sensor PCBo Module BOM

o IR Sensor o Views & Dimensionso Sensor Cross-Sectiono IR Filtero FPI MEMS Dieo InGaAs Photodiode

o Comparison

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Feedbacks

Related Reports

About System Plus

IR Sensor - Cross-Section

Page 8: Spectral Engines Nirone Sensor X - System Plus Consulting · Physical Analysis 14 o Summary of the Physical Analysis o Nirone Sensor X Spectral Sensor disassembly 17 Module Disassembly

©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 8

Overview / Introduction

Company Profile

Physical Analysis o Nirone Sensor X

o Spectral Sensor o Disassemblyo Spectral Sensor PCBo Module BOM

o IR Sensor o Views & Dimensionso Sensor Cross-Sectiono IR Filtero FPI MEMS Dieo InGaAs Photodiode

o Comparison

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Feedbacks

Related Reports

About System Plus

Fabry Perot Interferometer - DBR Mirror

Page 9: Spectral Engines Nirone Sensor X - System Plus Consulting · Physical Analysis 14 o Summary of the Physical Analysis o Nirone Sensor X Spectral Sensor disassembly 17 Module Disassembly

©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 9

Overview / Introduction

Company Profile

Physical Analysis o Nirone Sensor X

o Spectral Sensor o Disassemblyo Spectral Sensor PCBo Module BOM

o IR Sensor o Views & Dimensionso Sensor Cross-Sectiono IR Filtero FPI MEMS Dieo InGaAs Photodiode

o Comparison

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Feedbacks

Related Reports

About System Plus

IR Photodiode – Die Overview & Dimensions

Page 10: Spectral Engines Nirone Sensor X - System Plus Consulting · Physical Analysis 14 o Summary of the Physical Analysis o Nirone Sensor X Spectral Sensor disassembly 17 Module Disassembly

©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 10

Overview / Introduction

Company Profile

Physical Analysis

Manufacturing Process Flow

Cost Analysiso Cost Analysis Summaryo Yields Explanation &

Hypotheseso Spectral Engines FPI MEMSe

o Wafer Costo Die Cost

o InGaAs Photodiodeo IR Filters Costso NIR FPI Sensoro Nirone Sensor X

o BOMo Added Valueo Final Cost

o Cost Comparison

Selling Price Analysis

Feedbacks

Related Reports

About System Plus

Fabry Perot Interferometer Front-End Cost

Page 11: Spectral Engines Nirone Sensor X - System Plus Consulting · Physical Analysis 14 o Summary of the Physical Analysis o Nirone Sensor X Spectral Sensor disassembly 17 Module Disassembly

©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 11

Overview / Introduction

Company Profile

Physical Analysis

Manufacturing Process Flow

Cost Analysiso Cost Analysis Summaryo Yields Explanation &

Hypotheseso Spectral Engines FPI MEMSe

o Wafer Costo Die Cost

o InGaAs Photodiodeo IR Filters Costso NIR FPI Sensoro Nirone Sensor X

o BOMo Added Valueo Final Cost

o Cost Comparison

Selling Price Analysis

Feedbacks

Related Reports

About System Plus

Nirone Sensor X Spectral Sensor Cost Breakdown

Page 12: Spectral Engines Nirone Sensor X - System Plus Consulting · Physical Analysis 14 o Summary of the Physical Analysis o Nirone Sensor X Spectral Sensor disassembly 17 Module Disassembly

©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 12

Overview / Introduction

Company Profile

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Physical & Cost Comparison

Selling Price Analysis

Feedbacks

Related Reports

About System Pluso Company Serviceso Contacts

REVERSE COSTING ANALYSES - SYSTEM PLUS CONSULTING

Related Reports

MARKET & TECHNOLOGY REPORTS & MONITORS –YOLE DÉVELOPPEMENT

MEMS, Sensors & Actuators• Status of the MEMS Industry 2019

REVERSE COSTING ANALYSES - SYSTEM PLUS CONSULTING

MEMS• Hamamatsu C12880MA Micro-spectrometer• NanoLambda NSP32-V1 Nano Spectrometer • SCiO Molecular Sensor from Consumer Physics: Mobile

Spectrometer Dongle

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©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 13

COMPANYSERVICES

Page 14: Spectral Engines Nirone Sensor X - System Plus Consulting · Physical Analysis 14 o Summary of the Physical Analysis o Nirone Sensor X Spectral Sensor disassembly 17 Module Disassembly

©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 14

Overview / Introduction

Company Profile

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Physical & Cost Comparison

Selling Price Analysis

Feedbacks

Related Reports

About System Pluso Company serviceso Contact

Business Models Fields of Expertise

Custom Analyses(>130 analyses per year)

Reports(>60 reports per year)

Costing Tools

Trainings

Page 15: Spectral Engines Nirone Sensor X - System Plus Consulting · Physical Analysis 14 o Summary of the Physical Analysis o Nirone Sensor X Spectral Sensor disassembly 17 Module Disassembly

©2020 by System Plus Consulting |SP20558 Spectral Engines Nirone Sensor X | Sample 15

Overview / Introduction

Company Profile

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Physical & Cost Comparison

Selling Price Analysis

Feedbacks

Related Reports

About System Pluso Company serviceso Contact

Contact

Headquarters22 bd Benoni Goullin44200 NantesFRANCE+33 2 40 18 09 [email protected]

Europe Sales OfficeLizzie LEVENEZFrankfurt am MainGERMANY+49 151 23 54 41 [email protected]

www.systemplus.fr

NANTESHeadquarter

FRANKFURT/MAINEurope Sales Office

LYONYOLE HQ

TOKYOYOLE KK

GREATER CHINAYOLE

CORNELIUSYOLE Inc.

KOREAYOLE

Asia Sales OfficeTakashi ONOZAWATokyoJAPANT : +81 804 371 [email protected]

Mavis WANGTAIWANT :+886 979 336 809CN: [email protected]

America Sales OfficeSteve LAFERRIEREWESTERN UST : +1 310 600 [email protected]

Chris YOUMANEASTERN US & CANADAT : +1 919 607 9839 [email protected]