SMO Catalog 2007, vers 1-0, 61120, RV lo MicroOptics SA, NEUCHATEL MICROLENS ARRAYS SUSS MicroOptics, Neuchâtel Jaquet-Droz 7, CH-2000 Neuchâtel Tel. +41-32-720-5104, -5103 [email protected]

SUSS MicroOptics SA

Catalog 2007

Microlens Arrays

S U S S M i c r o O p t i c s S A , N E U C H A T E L

MICROLENS ARRAYS

SUSS MicroOptics, Neuchâtel Jaquet-Droz 7, CH-2000 Neuchâtel

Tel. +41-32-720-5104, -5103 [email protected]

www.suss-microoptics.com

SUSS MicroOptics SA

Issued: February 07 page 1 SUSS MicroOptics SA

Jaquet-Droz 7 CH-2007 Neuchâtel Switzerland

MICROLENSES

• Microlens arrays for fiber coupling and optical switching

• Microlenses for collimation of laser diodes and VCSELs

• Microlens arrays for imaging and sensor systems

• Beam homogenizers for high-power lasers and illumination

• Array optics with precise lens positioning

• High-class lens quality (aspherical lens profiles)

• Significant reduction of degrees of freedom in the assembly

Introduction Refractive microlenses cover a range of 10 µm to 2 mm lens diameters. Refractive microlenses are an interesting alternative for all applications where miniaturization and reduction of alignment and packaging costs are necessary. A refractive microlens refracts the incident light according to Snell’s law, similar as large-scale glass lenses do. Refractive microlenses are manufactured in Fused Silica or Silicon using standard semiconductor technologies like photolithography, resist processing and reactive ion etching. These wafer-based manufacturing technologies allow a very accurate shaping of the lens profile and a precise positioning of the lenses within an array. SUSS MicroOptics is manufacturing in 200 mm (8’’) wafer technology in cleanroom environment. Optical Properties The basic optical properties of a microlens are the lens diameter Ø = 2a and the effective focal

length ƒE. a) b) c) Additional parameters are the sag at the lens vertex h, the refractive index n1 of the bulk material, the radius of curvature RC, the conic constant k and the numerical aperture NA.

Lens Sag

Substrate

Thickness

Radius of Curvature

Lens Diameter

Focal Length

Object

Distance Image

Distance

SUSS MicroOptics SA

Issued: February 07 page 2 SUSS MicroOptics SA

Jaquet-Droz 7 CH-2007 Neuchâtel Switzerland

For spherical lens profiles the conic constant k is 0, k is -1 for parabolic profiles and k = -(n1)2 for

hyperbolic profiles.

Microlenses are usually manufactured in Fused Silica (refractive index n589nm = 1.458) and Silicon (n1.5µm = 3.478). Microlenses in Fused Silica are well suited for the full wavelength spectra from the DUV to the IR (wavelength range: 150 nm to 4 µm). Microlenses in Silicon are suitable for the infrared wavelength range (wavelength range 1.2 µm to 15 µm). Applications Microlenses are used for the collimation, focusing or imaging of light. For example, a microlens images the light from a bundle of single mode optical fibers onto an optical switching device and back in another fiber bundle. The high precision of the lateral array dimensions (better than ± 0.25 µm) allows a very accurate fiber-to-lens positioning in one step. The high-class lens quality and the exceptional lens-to-lens uniformity ensure optimum coupling efficiencies for all optical channels in parallel. Aspherical lens profiles are used to minimize the spherical aberrations for different optical configurations. a) b) The choice of the optimum parameters of a microlens array depends very much on the actual design and requirements of your optical system. Please contact our sales department ([email protected], +41-32-720-5103 or -5106) for a detailed analysis of your requirements. SUSS MicroOptics SA

Working Distance

Lens on Back-Side Lens on Front-Side

Working Distance

11 −=ƒ

n

RCE h

k

h

aRC

2

)1(

2

2 ++=22 aRRh CC −−=

E

aNA

ƒ≈

M I C R O L E N S A R R A Y S

FUSED SILICA (Quartz)

Typical Transmission of Schott Lithosil™Q1 including Fresnel reflection losses (10 mm path length)

SUSS MicroOptics SA

Issued: February 07 page 4 SUSS MicroOptics SA The prices included in this catalog are valid from January 2004. Catalog prices effective on the current price list date supersede all previous prices. The information set out in this page is provided in good faith. To the best knowledge of SUSS MicroOptics the information (including that obtained from third parties) is accurate and correct at the date of issue. SUSS MicroOptics reserves the right not to be responsible for the topicality, correctness, completeness or quality of the information provided. Liability claims regarding damage caused by the use of any information provided, including any kind of information, which is incomplete or incorrect, will therefore be rejected. Subject to change without notice.

Jaquet-Droz 7 CH-2007 Neuchâtel Switzerland Tel +41 (0)32 720-5103 Fax +41 (0)32 720-5713 E-mail [email protected] Web www.suss-microoptics.com

Microlens Array

FC-Q-100, -250 rect

Applications Fiber Coupling, Collimation, Imaging…

Substrate Material Fused Silica (Quartz)

Index of Refraction

1.561@248 nm

1.457@633 nm

1.444 @1550 nm

Array Type Regular type

Pitch Accuracy ± 0.25 µm

Lens Type Refractive, Plano-Convex

Lens Diameter 95 µm

Order N° Type Pitch ROC Wave- Numerical Working Array- Price per Unit

length Aperture Distance Size (mm) Euro

39 9901 FC-Q-100 100 µm 120 µm UV – IR 0.19 240 µm 5 x 5 75,00

39 9905 FC-Q-100 100 µm 140 µm UV – IR 0.17 280 µm 10 x 10 300,00

12-1640 FC-Q-250 250 µm 535 µm UV – IR 0.11 1170 µm 10 x 10 300,00

09-1605 FC-Q-250 250 µm 580 µm UV – IR 0.1 1270 µm 12 x 12 432,00

Discounts: 5 – 9 Units: -5%

10 – 24 Units: -10%

25 – 49 Units: -15%

Note: We allow a discount for larger orders; please contact us for further details. On request, we can also provide you microlens arrays with different configuration, array size, AR-coating, alignment marks, apertures etc.

Delivery time: 1 week

Shipment: EXW Incoterms 2000

Payment conditions: Within 30 days following delivery. VAT not included.

Our terms and conditions are valid. Our microlens arrays are unique elements that may not be replicated or copied. An agreement from SUSS MicroOptics is required before these elements can be copied or replicated in any form.

SUSS MicroOptics SA



Microlens Array

Order N° Type Pitch ROC Wave- Numerical Working Array- Price per Unit

length Aperture Distance Size (mm) Euro

39 9910 FC-Q-250 250 µm 350 µm UV – IR 0.17 0.7 mm 5 x 5 75,00

39 9915 FC-Q-250 250 µm 380 µm UV – IR 0.15 0.8 mm 10 x 10 300,00

12-1502 FC-Q-250 250 µm 835 µm UV – IR 0.07 1.8 mm 10 x 10 300,00

09-0329 FC-Q-250 250 µm 450 µm UV – IR 0.12 1.0 mm 10 x 10 300,00

09-1030 FC-Q-250 250 µm 450 µm 800 – 900 nm 0.12 1.0 mm 10 x 10 300,00


10 – 24 Units: -10%

25 – 49 Units: -15%





FC-Q-250 hex

Applications Fiber Coupling, Collimation, Imaging…

Incident light (angle) On-Axis (α = 0°)


Index of Refraction

1.561@248 nm

1.457@633 nm

1.444 @1550 nm

Substrate Thickness 1.2 mm

Array Type Hexagonal Packed

Lens Pitch in Array (x) 250 µm




SUSS MicroOptics SA




Microlens Array for Fiber Coupling

FC-Q-250, 1 x 48

Application Fiber Coupling, Collimation, Imaging


Index of Refraction

1.561@248 nm

1.457@633 nm

1.444 @1550 nm


Array Type Linear, 1 x 48 lenses





AR-coating on both sides 1250 nm to 1650 nm

Order N° Type ROC Wave- Numerical Conic Working Array- Price per Unit

length Aperture Constant Distance Size (mm) Euro

39 9920 FC-Q-250 330 µm 1250 - 1650 nm 0.17 0 700 µm 14 x 4 180,00


10 – 24 Units: -10%

25 – 49 Units: -15%






SUSS MicroOptics SA



Microlens Array for Shack-Hartmann

FC-Q-SH, Shack-Hartmann

Applications Shack-Hartmann, Adaptive Optics,

Wavefront Sensors, Laser Optics

Substrate Material Fused Silica (Quartz), e.g. Schott Lithosil Q1

Index of Refraction 1.561 (248 nm), 1.457 (633 nm), 1.444 (1550 nm)

Array Type Quadratic grid, Px = Py (or “hex”: hexagonal packed)

Pupils, Apertures Optional: Block dead space in-between lenses



Focal Length, NA Radius of Curvature Sag

See below for details.

Please read our Technical Data Sheet #11 for more details about using microlenses for Shack Hartmann.

Order N° Type Pitch Wavelength Sag ROC NA Pupils Array Size Unit Price

Px = Py Range h RC (mm2) Euro

09-1268 FC-Q-SH30 hex 30 µm UV – IR 2.21 µm 0.042 mm 0.144 - 10 x 10 300

12-1254 FC-Q-SH30 hex 30 µm UV – IR 2.21 µm 0.042 mm 0.144 - 10 x 10 300

12-0571 FC-Q-SH100 100 µm UV – IR 2.82 µm 0.401 mm 0.054 - 15 x 15 675


12-0526 FC-Q-SH110C 110 µm UV – IR 1.24 µm 1.133 mm 0.021 Chrome 12 x 12 432


12-1195 FC-Q-SH110 110 µm AR400-900 0.53 µm 2.650 mm 0.012 - 10 x 10 300

12-1196 FC-Q-SH110 110 µm AR400-900 0.9 µm 1.561 mm 0.015 - 10 x 10 300




12-1195 FC-Q-SH130 130 µm AR400-900 0.45 µm 4.410 mm 0.010 - 10 x 10 300

12-1196 FC-Q-SH130 130 µm AR400-900 0.86 µm 2.308 mm 0.012 - 10 x 10 300




12-1195 FC-Q-SH150 150 µm AR400-900 0.44 µm 6.056 mm 0.008 - 10 x 10 300

12-1196 FC-Q-SH150 150 µm AR400-900 0.87 µm 3.063 mm 0.011 - 10 x 10 300

12-1369 FC-Q-SH650C hex 650µm AR400-900 focal length ƒ = 30 mm 0.01 Chrome 14.5 x 18.5 600

Discounts: 5 – 9 Units: -5%; 10 – 24 Units: -10%; 25 – 49 Units: -15%






Irradiance (x,z)

Irradiance (z)

SUSS MicroOptics SA



High-Power Laser Beam Homogenizer Introduction Most high power lasers like Excimer or YAG suffer from a bad beam quality. In many applications in which high-power lasers are used, e.g. thermal and ablative surface machining, an accurate energy density and very high spatial uniformity on the working spot are required. Fly’s eye condensers are the appropriate mean for any kind of uniform illumination since invention of photography. Microlens Array based laser beam homogenizers provide excellent SUSS MicroOptics manufactures high-quality Microlens Arrays in Fused Silica and Silicon for laser applications from UV to IR wavelengths in 8’’ wafer technology. • Excellent lens quality and array uniformity • Spherical and aspherical lens profiles • Cylindrical, crossed-cylindrical and square microlenses SUSS MicroOptics offers in co-operation Refractive microlenses cover a range of 10 µm to 2 mm lens diameters. Refractive microlenses are an interesting alternative for all applications where miniaturization and reduction of alignment and packaging costs are necessary. A refractive microlens refracts the incident light according to Snell’s law, similar as large-scale glass lenses do.

Large Flat-top, Excellent Uniformity

Function Beam Homogenizing

Far-Field Intensity Distribution

Flat-Top

Light Sources Laser, wavelength range 193nm to 2 µm


Array Type Cylindrical Microlenses

Lens Pitch in Array 250µm


AR-Coating

SUSS MicroOptics SA



Beam Homogenizer – Line Generators

Large Flat-top, Excellent Uniformity

Function Beam Homogenizing

Far-Field Intensity Distribution

Flat-Top

Light Sources Laser, wavelength range 193nm to 2 µm





AR-Coating

Order N° Type, Pitch Divergence Radius of Wave- Array- Price per Unit

Angle Curvature length Size (mm) Euro

Pitch 300 µm

12-1393 CC-Q-300S, 2° ±2° 2.2 mm DUV – IR 10 x 10 300,00

39-9962 CC-Q-300S, 1° ± 1° 4 mm DUV – IR 10 x 10 300,00

39-9961 CC-Q-300S, 1° ± 1° 4 mm DUV – IR 5 x 10 150,00

39-9960 CC-Q-300S, 0.5° ± 0.5° 8.6 mm DUV – IR 10 x 10 300,00


10 – 24 Units: -10%

25 – 49 Units: -15%

Note: We allow a discount for larger orders; please contact us for further details. On request, we also provide microlens arrays and beam homogenizers with different configuration, array size, AR-coating, alignment marks, apertures etc. on request. If not stated differently all shop items are uncoated. AR-coatings are available for all wavelengths on request.





SUSS MicroOptics SA



Beam Homogenizer System – LINOS

Compact-Systems, LINOS MicroBench

Application Beam Homogenizing and Shaping


Array Type Square Microlenses


Lens Profile Parabolic

Far-Field Flat-Top

Order N° System Type Microlens Arrays* Fourier Lens Wavelength Price per Unit, EUR

506073 Homogenizer System, Custom to be defined to be defined UV - IR 1’480,00

506076 Homogenizer System, Q50 12-1393, CC-Q-300S, 2° Quartz, ƒ = 50mm DUV - IR 1’480,00 506077 Homogenizer System, Q100 12-1393, CC-Q-300S, 2° Quartz, ƒ = 100mm DUV - IR 1’480,00 506078 Homogenizer System, Q200 12-1393, CC-Q-300S, 2° Quartz, ƒ = 200mm DUV - IR 1’480,00 506079 Homogenizer System, Q400 12-1393, CC-Q-300S, 2° Quartz, ƒ = 400mm DUV - IR 1’480,00

*Different microlens arrays from the catalog on request.





Achromat €120

#063144, ƒ = 100mm #063148, ƒ = 200mm #063149, ƒ = 400mm

Quartz €150

#063319, ƒ = 50mm #063321, ƒ = 100mm #063323, ƒ = 200mm #063117, ƒ = 300mm #063367, ƒ = 400mm

#506072, €190 #061025, €130

#063651

€20

#506071, €100 #061010, €40

#061010, €40

Ø25mm

Homogenizer System ready to use

2x Microlens Arrays

1x Fourier Lens

Mounted and tested

€ 1’480,00 #063651

€20

#065220

€40

#065220

€40

SUSS MicroOptics SA



Beam Homogenizer System - BLZ

Professional Systems, Customized

Application Beam Homogenizing, Beam Shaping

Substrate Material Fused Silica (Quartz), Silicon

Array Type Square Microlenses, Cross-Cylindrical,

Cylindrical Microlenses



Far-Field Flat-Top

Please specify

• Laser, type

• Laser, wavelength

• Laser, beam diameter/width

• Laser, beam divergence

• Laser, energy, pulse length/cw

• Flat-top, size

• Flat-top, position/free working distance

• Flat-top, divergence/angles

• System, overall length constriction

Please provide drawings or design files.

We will the analyze your requirements

and send a detailed proposal and offer.

SUSS MicroOptics SA



Beam Homogenizer – Square Microlens Arrays

CC-Q-300S, -500S, -1000S; Square Lenses

Application Beam Homogenizing


Array Type Quadratic Microlenses Up to 98% Fill Factor

Lens Pitch in Array 300 µm, 500 µm, 1015µm


Lens Type Refractive, Plano-Convex, Square


Divergence Angles ±0.5°, ± 1°, ± 2°

Far-Field Flat-Top



Pitch 300 µm

12-1393 CC-Q-300S, 2° ±2° 2.2 mm DUV – IR 10 x 10 300,00

39-9962 CC-Q-300S, 1° ± 1° 4 mm DUV – IR 10 x 10 300,00

39-9961 CC-Q-300S, 1° ± 1° 4 mm DUV – IR 5 x 10 150,00

39-9960 CC-Q-300S, 0.5° ± 0.5° 8.6 mm DUV – IR 10 x 10 300,00

Pitch 500 µm

39-9964 CC-Q-500S, 1° ± 1° 7 mm DUV – IR 10 x 10 300,00

12-1530 CC-Q-500S, 0.75° ± 0.75° 10 mm DUV – IR 11 x 16 528,00

39-9963 CC-Q-500S, 0.5° ± 0.5° 15 mm DUV – IR 10 x 10 300,00

12-1524 CC-Q-500S, 0.25° ± 0.25° 20 mm DUV – IR 10 x 10 300,00

Pitch 1015 µm

12-1521 CC-Q-1015S, 0.5° ± 0.5° 28 mm DUV – IR 10 x 10 300,00

12-1516 CC-Q-1015S, 0.2° ± 0.2° 70 mm DUV – IR 10 x 10 300,00

12-1518 CC-Q-1015S, 0.15° ± 0.15° 100 mm DUV – IR 10 x 10 300,00


10 – 24 Units: -10%

25 – 49 Units: -15%






• Maximum Fill Factor • Excellent Profile and Surface Quality

• Diffraction Limited Optical Performance

SUSS MicroOptics SA



Beam Homogenizer – Crossed Cylindrical Arrays

CC-Q-300, -1015, Crossed-Cylindrical Lenses




Array Type Crossed-Cylindrical Microlenses

Lens Pitch in Array 300 µm, 1015 µm


Lens Type Refractive, Plano-Convex, Cylindrical


Far-Field Flat-Top



39 9931 CC-Q-300, 1° ± 1° 3.6 mm DUV - IR 5 x 10 150,00

39 9936 CC-Q-300, 1° ± 1° 3.6 mm DUV – IR 10 x 10 300,00

39 9930 CC-Q-300, 0.5° ± 0.5° 6.8 mm DUV – IR 5 x 10 150,00

39 9935 CC-Q-300, 0.5° ± 0.5° 6.8 mm DUV – IR 10 x 10 300,00

12-1520 CC-Q-1015, 0.25° ± 0.25° 55 mm DUV – IR 10 x 10 300,00


10 – 24 Units: -10%

25 – 49 Units: -15%





Our terms and conditions are valid. Our microlens arrays are unique elements that may not be replicated or copied. An agreement from SUSS MicroOptics is required

before these elements can be copied or replicated in any form.

SUSS MicroOptics SA



Beam Homogenizer – Cylindrical Arrays

C-Q-500, -1015, Cylindrical Lenses





Lens Pitch in Array 500 µm


Lens Type Refractive, Plano-Convex, Cylindrical


Far-Field Flat-Top

Order N° Type, Pitch Pitch Divergence Radius of Wave- Array- Price per Unit


12-1367 C-Q-500, 5° 500 µm ± 5° 1.5 mm DUV - IR 10 x 10* 300,00

12-1368 C-Q-500, 2.5° 500 µm ± 2.5° 3 mm DUV - IR 10 x 10* 300,00

12-1369 C-Q-500, 1.5° 500 µm ± 1.5° 5 mm DUV - IR 10 x 10* 300,00

12-1218 C-Q-1015, 0.8° 1015 µm ± 0.8° 16.7 mm DUV - IR 35 x 35* 2’450,00

*Microlens arrays in Ø12 mm, Ø18 mm and Ø25 mm available on request.


10 – 24 Units: -10%

25 – 49 Units: -15%


Delivery time: 2-3 weeks




M I C R O L E N S A R R A Y S

SILICON

SUSS MicroOptics SA

Issued: 06-05 page 16 SUSS MicroOptics SA The prices included in this catalog are valid from January 2004. Catalog prices effective on the current price list date supersede all previous prices. The information set out in this page is provided in good faith. To the best knowledge of SUSS MicroOptics the information (including that obtained from third parties) is accurate and correct at the date of issue. SUSS MicroOptics reserves the right not to be responsible for the topicality, correctness, completeness or quality of the information provided. Liability claims regarding damage caused by the use of any information provided, including any kind of information, which is incomplete or incorrect, will therefore be rejected. Subject to change without notice.



FC-Si-1250, 1 x 8, Silicon


Substrate Material Silicon

Index of Refraction 3.478 @1550 nm







AR-coating on both sides 1250 nm to 1650 nm

Order N° Type ROC Wave- Numerical Conic Array- Price per Unit

length Aperture Constant Size (mm) Euro

39 9940 FC-Si-1250 900 µm 1250 - 1650 nm 0.68 -3.3 12.0 x 3 120,00

39 9941 FC-Si-1250 950 µm 1250 - 1650 nm 0.65 0 12.0 x 3 120,00

39 9942 FC-Si-1250 2350 µm 1250 - 1650 nm 0.26 -4 12.0 x 3 120,00


10 – 24 Units: -10%

25 – 49 Units: -15%






SUSS MicroOptics SA




FC-Si-250, 1 x 48, ROC 1650 µµµµm, Silicon



Index of Refraction 3.478 @1550 nm







AR-coating None

Order N° Type ROC Wave- Numerical Conic Array- Price per Unit

length Aperture Constant Size (mm) Euro

39 9950 FC-Si-250 1650 µm 1.2 µm – 10 µm 0.18 0 14.0 x 4 170,00


10 – 24 Units: -10%

25 – 49 Units: -15%






SUSS MicroOptics SA



Square Microlens Arrays in Silicon

CC-Si-1015S; Square Lenses

Application Beam Homogenizing, Wavefront

Sensors, Laser Beam Testing


Array Type Quadratic Microlenses Up to 98% Fill Factor



Lens Type Refractive, Plano-Convex, Square


Divergence Angles ± 0.75°, ± 1.5°

Far-Field Flat-Top

AR-coating on both sides 3 µm to 5 µm

Order N° Type, Pitch Divergence Focal Wave- Array- Price per Unit

Angle Length length Size (mm) Euro

Pitch 1015 µm

500.053 CC-Si-1015S, 1.5° ± 1.5° 20 mm IR 3-5µm 14 x 14 588,00

500.102 CC-Si-1015S, 0.75° ± 0.75° 40 mm IR 3-5µm 14 x 14 588,00


10 – 24 Units: -10%

25 – 49 Units: -15%






• Fill Factor up to 98% • Excellent Profile and Surface Quality • Diffraction Limited Optical Performance

SUSS MicroOptics SA



GENERAL TERMS AND CONDITIONS OF SALE (English version) 1. General 1.1 All supplies and services of SUSS MicroOptics SA are subject to the conditions stated hereafter. General Conditions and Terms of Sale of the customer are of no validity. 2. Quotation/Order Confirmation 2.1 Unless otherwise clearly stated in writing, quotations made by SUSS MicroOptics are free of any commitment. The contract is concluded only when SUSS MicroOptics confirms an order. 2.2 Orders without prior quotation are binding for SUSS MicroOptics only when SUSS MicroOptics confirms the order. This applies also if a customer modifies a quotation made by SUSS MicroOptics. 2.3 The customer shall, at the latest when receiving the quotation, draw the attention of SUSS MicroOptics to the standards and regulations applicable to the execution of the supplies and services, to their operation as well as to the health and safety of the personnel. 3. Documentation 3.1 Information given in catalogues, on data sheets or other paper work in accompaniment of the quotation are mere indications and as such are not binding, unless otherwise specified. 3.2 In special cases SUSS MicroOptics shall be entitled to make constructive changes and employ other materials in case of deficient base material, provided such changes do not contradict the outweighing interests of the customer previously notified to SUSS MicroOptics. 3.3 SUSS MicroOptics shall retain all rights of property and copy right on documents put at the disposition of the customer; the customer shall not use nor copy nor show them to a third party for a purpose different from the one intended by SUSS MicroOptics. These documents do not entitle to copy single parts of the devices. These documents shall be returned to SUSS MicroOptics on its first request. 4. Prices, Packing, Insurance 4.1 Unless otherwise clearly agreed upon in writing, all prices shall be calculated in CHF (VAT excluded) and shall be deemed to be net ex works excluding packing, without any deduction whatsoever (ex works, Incoterms 2000). Any and all additional charges, such as, but not limited to, freight charges, insurance premiums, fees for export, transit, import and other permits, as well as for certifications, shall be borne by the customer. Likewise, the customer shall bear any and all taxes, fees, levies, customs duties and the like which are levied out of or in connection with the contract, or shall refund them to SUSS MicroOptics against adequate evidence in case SUSS MicroOptics is liable for them. 4.2 The customer shall inform SUSS MicroOptics, with the order at the latest, of special wishes regarding forwarding, transport and insurance. Transport shall be at the risk and at the expense of the customer. Objections regarding forwarding or transport shall be immediately submitted upon receipt of the supplies or of the shipping documents by the customer to the last carrier. 4.3 The customer shall be responsible for taking insurance against risks of any kind. 5. Passing of benefit and risk 5.1 The benefit and the risk of the supplies shall pass to the customer at latest by the date of their leaving the works. The same applies for partial deliveries. 5.2 If dispatch is delayed due to reasons beyond SUSS MicroOptics’ control, the risk of the supplies shall pass to the customer at the time when SUSS MicroOptics notifies the customer that supplies are ready for dispatch. 6. Lead times / delivery time 6.1 Lead time shall start on the day when all commercial and technical points for the fulfillment of the order have been settled with the customer, all official formalities have been completed, all payments due up front have been credited to an account of SUSS MicroOptics and SUSS MicroOptics has received all documentation to be provided by the customer. Lead time shall be deemed to be observed - provided the customer has fulfilled all his contractual obligations - if by that time SUSS MicroOptics has handed supplies over to the first carrier or alternatively has sent a notice to the customer informing him that supplies are ready for dispatch. Partial deliveries shall be authorized. Any delay of delivery does not entitle the customer to any rights or claims. 6.2 If dispatch is delayed upon request of the customer or for any other reason beyond the SUSS MicroOptics’ control, SUSS MicroOptics shall store the supplies at the risk and at the expense of the customer and invoice it as dispatched net ex works. Furthermore SUSS MicroOptics shall be entitled - passed an acceptable delay - to dispose otherwise of the supplies and to deliver the customer with an accordingly extended delivery time. 6.3 If delivery is delayed by force majeure delivery time is accordingly extended. Cases of force majeure are reputed to be serious events or circumstances which cannot be attributed to the supplier, such as but not limited to total or partial suspension of activity of SUSS MicroOptics’ suppliers, mobilization, war, terrorism, natural disaster, strikes, fire, blocking of import or export, lack of authorization or permission, as well as all other unforeseeable events.

SUSS MicroOptics SA



7. Terms of payment 7.1 In the absence of contrary provisions, indicated in writing in the quotation or the order confirmation, invoices are to be settled net, without any deduction, within 10 days of receipt. Partial deliveries will be invoiced accordingly. 7.2 Payments shall be credited exclusively to an account of SUSS MicroOptics. Additional fees or other expenses resulting from a different mode of payment previously agreed upon (e.g. cheque or bill of exchange) shall be borne by the customer. 7.3 If the customer does not pay according to due date, he shall be in default without formal notice and shall be liable for default interest at a rate of 4 per cent above the current discount rate of the Swiss National Bank. The right to claim further damage caused by default is reserved. 8. Retention of Title 8.1 SUSS MicroOptics retains all rights of property on all sold products until receipt of full payment of the purchase price. If in the country of the supplier the validity of retention of title is subject to special formal regulations or other conditions, the customer shall be responsible for taking them into account and fulfill them. 8.2 All products of SUSS MicroOptics are unique elements that may not be replicated or copied in any form. An agreement from SUSS MicroOptics is required before these elements can be copied or replicated in any form. A license fee will apply. 9. Warranty 9.1 The warranty period of SUSS MicroOptics is 12 months and runs from the day of delivery or upon termination of assembly and during the specified time. The warranty shall extend and be limited to all defects which occur as a proven result from bad quality material, faulty design or poor workmanship. It is however limited to replacement or repair of defective parts or products or to refunding of the invoice price of non-replaceable or - according to SUSS MicroOptics’ choice, non-replaced products. Any other claim not expressly mentioned such as damage, reduction in price, termination of or withdrawal from the contract is excluded. SUSS MicroOptics accepts no further responsibility. This in particular refers, but shall not be limited to, loss of production, loss of use, loss of orders, loss of profit and other direct or indirect or consequential damage or third parties damage. 9.2 SUSS MicroOptics can assume no responsibility for modifications or repairs which have not been carried out by SUSS MicroOptics’ personnel or by specialists appointed by SUSS MicroOptics. The customer looses all claims of warranty if any modifications or repairs have been carried out by people not specifically appointed by SUSS MicroOptics. 10. Claims 10.1 The customer shall inspect the supplies and services thoroughly within 14 days after receipt and shall immediately notify SUSS MicroOptics in writing of any deficiencies; the same applies to possible hidden deficiencies which only appear later. If the customer fails to do so, the supplies and services shall be deemed to have been accepted and all respective warranty claims become extinct. 10.2 Shipments damaged during transport must be accepted without guarantee and immediately be reported to the shipping agent in order to establish a certified report. Otherwise the customer shall loose all and any warranty claim. 10.3 If protected rights of third parties are infringed by drawings or information passed on to SUSS MicroOptics by the customer, only the customer shall be liable for this infringement and shall liberate SUSS MicroOptics from all claims. 11. Exclusion of further liability 11.1 All cases of breach of contract as well as all rights and claims on the part of the customer, irrespective on what legal grounds they are based, are exhaustively covered by these general terms and conditions of sale. 12. Export, Re-Export 12.1 SUSS MicroOptics supplies are intended for use in the indicated country. Any export, re-export or re-import thereof is prohibited without written authorization from SUSS MicroOptics. This more particularly applies to products whose export is prohibited by the Swiss, the German or the US-government or to equipment comprising material whose export, re-export or re-import is prohibited by the applicable law. 13. Place of Legal Venue and Applicable Law 13.1 The contract shall be governed by Swiss substantive law. The applicability of the UN Agreement dated April 11th, 1980 for contracts governing international Purchase of Goods is excluded. 13.2 Exclusive place of jurisdiction shall be in the Commercial Court in CH-8000 Zürich. SUSS MicroOptics SA

Documents

SMO Catalog 2007, vers 1-0, 61120, RV lo MicroOptics SA, NEUCHATEL MICROLENS ARRAYS SUSS MicroOptics, Neuchâtel Jaquet-Droz 7, CH-2000 Neuchâtel Tel. +41-32-720-5104, -5103 [email protected]