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Silicon Photonic 2 X 2 Power Splitter with S-Bend Configuration Erica C. Graham 1 *, Nicholas M. Fahrenkopf 2 Nathaniel C. Cady 2 1 Colleges of Nanoscale Science and Engineering, University at Albany (SUNY), Albany, NY, USA 2 Colleges of Nanoscale Science and Engineering, SUNY Polytechnic Institute, Albany, NY, USA *[email protected]

Silicon Photonic 2 X 2 Power Splitter with S-Bend ...cn.comsol.com/paper/download/679281/graham_rf... · Silicon Photonic 2 X 2 Power Splitter with S-Bend Configuration Erica C. Graham1,

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Page 1: Silicon Photonic 2 X 2 Power Splitter with S-Bend ...cn.comsol.com/paper/download/679281/graham_rf... · Silicon Photonic 2 X 2 Power Splitter with S-Bend Configuration Erica C. Graham1,

Silicon Photonic 2 X 2 Power

Splitter with S-Bend Configuration

Erica C. Graham1*, Nicholas M. Fahrenkopf 2 Nathaniel C. Cady2

1Colleges of Nanoscale Science and Engineering, University at Albany (SUNY), Albany, NY, USA2Colleges of Nanoscale Science and Engineering, SUNY Polytechnic Institute, Albany, NY, USA

*[email protected]

Page 2: Silicon Photonic 2 X 2 Power Splitter with S-Bend ...cn.comsol.com/paper/download/679281/graham_rf... · Silicon Photonic 2 X 2 Power Splitter with S-Bend Configuration Erica C. Graham1,

Outline

❑Introduction❑What is Si Photonics

❑Si Photonic Components

❑Power Splitters

❑Simulation Set-Up

❑Results❑Variation of coupling length

❑Variation of coupling gap

❑Lumerical Mode Solutions comparison

❑Summary/ Future Works

October 3rd, 2019

Page 3: Silicon Photonic 2 X 2 Power Splitter with S-Bend ...cn.comsol.com/paper/download/679281/graham_rf... · Silicon Photonic 2 X 2 Power Splitter with S-Bend Configuration Erica C. Graham1,

Introduction

ELECTRICAL

TRADITIONAL PHOTONICS

October 3rd, 2019 [1] Liehr, Michael. 16 Nov. 2017, Albany.

❑Utilizes semiconductor infrastructure and supply chain

❑Delivers low cost solutions ❑Applications:

❑Performance Computing❑Data Centers❑Defense❑Life Sciences

[1]

3.

Page 4: Silicon Photonic 2 X 2 Power Splitter with S-Bend ...cn.comsol.com/paper/download/679281/graham_rf... · Silicon Photonic 2 X 2 Power Splitter with S-Bend Configuration Erica C. Graham1,

Si Photonic Components

October 3rd, 2019

❑ High refractive index contrast ❑ Low loss propagation❑ Light confinement❑ Compact footprint❑ Small bend radii

[1] “Intel® Silicon Photonics.” Intel, http://www.intel.com/content/www/us/en/ architecture-and -technology/silicon-photonics/silicon-photonics-overview.html. 4.

Electrical

Logic Cell

Electrical

Logic Cell

Driver Amplifier

Modulator Optical InterconnectPhoto

detector

Transmitter Receiver

Electrical Components

Optical Components

IC Chip IC Chip

Driver Amplifier

Modulator WaveguideLaserPhoto-

detector

Photonic Link

Laser

Laser

Laser

Laser

LASER: Light Amplification by Stimulated Emission of RadiationIC Chip: Integrated Circuit Chip

Page 5: Silicon Photonic 2 X 2 Power Splitter with S-Bend ...cn.comsol.com/paper/download/679281/graham_rf... · Silicon Photonic 2 X 2 Power Splitter with S-Bend Configuration Erica C. Graham1,

Waveguides

October 3rd, 2019

gc

lc

Input port

Cross port

S-bends

Through port

S-bends

Input port

Top-down view

SiO2 Cladding

400 nm 400 nm

220 nm

gcSi Core Si Core

Waveguide 1 Waveguide 2

Cross-section view

BOX

Si Substrate

❑Design Parameters:❑Coupling Gap (gc): separation distance between waveguides❑Coupling Length (lc): length of the parallel coupling region❑S-bends: compact footprint and controlling coupling region

5.

Page 6: Silicon Photonic 2 X 2 Power Splitter with S-Bend ...cn.comsol.com/paper/download/679281/graham_rf... · Silicon Photonic 2 X 2 Power Splitter with S-Bend Configuration Erica C. Graham1,

❑Objective❑Validate COMSOL’s ability to reproduce results from

Lumerical Mode®, a popular optical modeling software❑Parametric sweep of lc and gc❑Compare power splitting ratio

Modeling of Power Splitter

October 3rd, 2019

❑Wave Optics Module

❑Electomagnetic Waves,

Beam Envelope (ewbe)

❑Model Solutions

❑ 2.5D varFDTD (Finite

Difference Time

Domain)

6.

Page 7: Silicon Photonic 2 X 2 Power Splitter with S-Bend ...cn.comsol.com/paper/download/679281/graham_rf... · Silicon Photonic 2 X 2 Power Splitter with S-Bend Configuration Erica C. Graham1,

❑Wavelength Dispersion

❑Port Excitation ❑TE Mode propagation

❑Unidirectional

Model Set-Up: Boundary Conditions

October 3rd, 2019

Power Input

Scattering Boundary

Power Through

Power Cross

Port Boundary

7.

Page 8: Silicon Photonic 2 X 2 Power Splitter with S-Bend ...cn.comsol.com/paper/download/679281/graham_rf... · Silicon Photonic 2 X 2 Power Splitter with S-Bend Configuration Erica C. Graham1,

Model Set-Up: Meshing

October 3rd, 2019

❑Max mesh element size must be a fraction of a wavelength❑Max: 0.4 um

Fine transition region meshLower curvature factor:0.3

Large # of edge elements

8.

Page 9: Silicon Photonic 2 X 2 Power Splitter with S-Bend ...cn.comsol.com/paper/download/679281/graham_rf... · Silicon Photonic 2 X 2 Power Splitter with S-Bend Configuration Erica C. Graham1,

E-field Coupling Gap (gc)

October 3rd, 2019

❑ Normalized E-field profiles @1550 nm:

❑ Parametric sweep from 0.1 um to 0.4 um

gc: 0.3 um

gc: 0.2 umgc: 0.4 um

gc: 0.1 um

9.

Page 10: Silicon Photonic 2 X 2 Power Splitter with S-Bend ...cn.comsol.com/paper/download/679281/graham_rf... · Silicon Photonic 2 X 2 Power Splitter with S-Bend Configuration Erica C. Graham1,

Power Splitting Separation Gap (gc)

October 3rd, 2019

0

0.1

0.2

0.3

0.4

0.5

0.6

0.7

0.8

0.9

1

1.5 1.52 1.54 1.56 1.58 1.6

Through g=0.4 um Cross g=0.4 um

Through g= 0.3 um Cross g= 0.3 um

Through g=0.2 um Cross g=0.2 um

Through g=0.1 um Cross g=0.1 um

Po

wer

Sp

litt

ing

Ra

tio

Wavelength (um)

Waveguide Gap vs Wavelength

𝑃𝑡ℎ𝑟𝑜𝑢𝑔ℎ

𝑃𝑡ℎ𝑟𝑜𝑢𝑔ℎ + 𝑃𝑐𝑟𝑜𝑠𝑠

Through Port:

𝑃𝑐𝑟𝑜𝑠𝑠𝑃𝑡ℎ𝑟𝑜𝑢𝑔ℎ + 𝑃𝑐𝑟𝑜𝑠𝑠

Cross Port:

10.

Page 11: Silicon Photonic 2 X 2 Power Splitter with S-Bend ...cn.comsol.com/paper/download/679281/graham_rf... · Silicon Photonic 2 X 2 Power Splitter with S-Bend Configuration Erica C. Graham1,

COMSOL & Lumerical Comparison

October 3rd, 2019

0

0.1

0.2

0.3

0.4

0.5

0.6

0.7

0.8

0.9

1

0.1 0.15 0.2 0.25 0.3 0.35 0.4

Po

we

r S

pli

ttin

g R

ati

o

Gap (um)

Comsol: Through

Comsol: Cross

Lumerical: Through

Lumerical: Cross

Coupling Gap

(um)

COMSOL

Multiphysics®

Lumerical

Mode

Solutions®

Through Port

0.1 0.711 0.684

0.2 0.481 0.2937

0.3 0.935 0.829

0.4 0.993 0.966

Cross Port

0.1 0.288 0.314

0.2 0.519 0.704

0.3 0.065 0.170

0.4 0.007 0.033

COMSOL vs Lumerical: Separation Gap

* 1550 nm wavelength

11.

~0.12 um ~0.2 um ~0.24 um

~0.15um

~0.4 um

Page 12: Silicon Photonic 2 X 2 Power Splitter with S-Bend ...cn.comsol.com/paper/download/679281/graham_rf... · Silicon Photonic 2 X 2 Power Splitter with S-Bend Configuration Erica C. Graham1,

E-field Coupling Length (lc)

October 3rd, 2019

❑ Normalized E-field profiles @1550 nm:

❑ Parametric sweep from 0 um to 30 um

lc: 10 um

lc: 20 umlc: 0 um

gc: 30 um

12.

Page 13: Silicon Photonic 2 X 2 Power Splitter with S-Bend ...cn.comsol.com/paper/download/679281/graham_rf... · Silicon Photonic 2 X 2 Power Splitter with S-Bend Configuration Erica C. Graham1,

Power Splitting Coupling Length (lc)

October 3rd, 2019

0

0.1

0.2

0.3

0.4

0.5

0.6

0.7

0.8

0.9

1

1.5 1.52 1.54 1.56 1.58 1.6

Through l = 0 um Cross l=0 um

Through l= 10 um Cross l = 10 um

Through l = 20 um Cross l = 20 um

Through l = 30 um Cross l = 30 um

Po

wer

Sp

litt

ing

Ra

tio

Wavelength (um)

Coupling Length vs Wavelength

𝑃𝑡ℎ𝑟𝑜𝑢𝑔ℎ

𝑃𝑡ℎ𝑟𝑜𝑢𝑔ℎ + 𝑃𝑐𝑟𝑜𝑠𝑠

Through Port:

𝑃𝑐𝑟𝑜𝑠𝑠𝑃𝑡ℎ𝑟𝑜𝑢𝑔ℎ + 𝑃𝑐𝑟𝑜𝑠𝑠

Cross Port:

13.

Page 14: Silicon Photonic 2 X 2 Power Splitter with S-Bend ...cn.comsol.com/paper/download/679281/graham_rf... · Silicon Photonic 2 X 2 Power Splitter with S-Bend Configuration Erica C. Graham1,

COMSOL & Lumerical Comparison

October 3rd, 2019

0

0.1

0.2

0.3

0.4

0.5

0.6

0.7

0.8

0.9

1

0 5 10 15 20 25 30

Po

we

r S

plitt

ing

Rati

o

Length (um)

Comsol: Through

Comsol: Cross

Lumerical: Through

Lumerical: Cross

Coupling

Length (um)

COMSOL

Multiphysics®

Lumerical

Mode

Solutions®

Through Port

0 0.995 0.993

10 0.897 0.903

20 0.734 0.718

30 0.538 0.482

Cross Port

0 0.004 0.005

10 0.102 0.096

20 0.266 0.280

30 0.461 0.514

COMSOL vs Lumerical: Coupling Length

* 1550 nm wavelength

14.

~30 um

Page 15: Silicon Photonic 2 X 2 Power Splitter with S-Bend ...cn.comsol.com/paper/download/679281/graham_rf... · Silicon Photonic 2 X 2 Power Splitter with S-Bend Configuration Erica C. Graham1,

❑Simulations show results from COMSOL and Lumerical are in good agreement

❑Characterize stress induced fabrication shifts

❑Couple Structural Mechanics Module❑Solid Mechanics Interface

❑Fabrication using 300mm wafer processing facility

Through-Oxide-Via (TOV)

15.

Summary/ Future Work

Page 16: Silicon Photonic 2 X 2 Power Splitter with S-Bend ...cn.comsol.com/paper/download/679281/graham_rf... · Silicon Photonic 2 X 2 Power Splitter with S-Bend Configuration Erica C. Graham1,

References

16.

[1] Z. Lu et al., “Broadband silicon photonic directional coupler using asymmetric-waveguide based phase control,” (eng), Optics express, vol. 23, no. 3, pp. 3795–3806, 2015.

[2] R. K. Gupta, S. Chandran, and B. K. Das, “Wavelength-Independent Directional Couplers for Integrated Silicon Photonics,” J. LightwaveTechnol., vol. 35, no. 22, pp. 4916–4923, 2017.

[3] G. F. R. Chen et al., “Broadband Silicon-On-Insulator directional couplers using a combination of straight and curved waveguide sections,” (eng), Scientific reports, vol. 7, no. 1, p. 7246, 2017.

[4] COMSOL Multiphysics, "The Wave Optics User's Guide", 2019

[5] Lumerical Solutions," Stress and Strain", 2019.

Page 17: Silicon Photonic 2 X 2 Power Splitter with S-Bend ...cn.comsol.com/paper/download/679281/graham_rf... · Silicon Photonic 2 X 2 Power Splitter with S-Bend Configuration Erica C. Graham1,

Acknowledgments

❑Nicholas Fahenkopf, Ph.D. (Co-Advisor)❑Nathaniel Cady, Ph.D. (Co-Advisor)❑Douglas Coolbaugh, Ph.D. ❑Eng Wen Ong, Ph.D. ❑COMSOL Technical Support

October 3rd, 2019

Page 18: Silicon Photonic 2 X 2 Power Splitter with S-Bend ...cn.comsol.com/paper/download/679281/graham_rf... · Silicon Photonic 2 X 2 Power Splitter with S-Bend Configuration Erica C. Graham1,

Thank You

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