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Silane What’s the Big Deal?

Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but

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Page 1: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but

SilaneWhat’s the Big

Deal?

Page 2: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but

Silane

Page 3: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but

Silane SiH4Pyrophoric• Flammable Range 1.37-96%

• TLV = 5ppm

• High concentrations may not autoignite but may detonate

• Turns into Silicon Dioxide SiO2

– Crusting, powder

• Dichlorosilane, Trichlorosilane 04

1

Page 4: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but

November 23, 2005

Taiwan Semiconductor Fab

Page 5: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but

Could Be YOUR Fab

Page 6: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but
Page 7: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but
Page 8: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but
Page 9: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but
Page 10: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but
Page 11: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but
Page 12: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but
Page 13: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but
Page 14: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but
Page 15: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but
Page 16: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but
Page 17: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but
Page 18: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but
Page 19: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but
Page 20: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but

SilaneMaintenance Activities

Page 21: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but

Silane Maintenance

• Routine bottle change procedures

• Troubleshooting bottle/cabinet problems

• PPE

Page 22: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but
Page 23: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but
Page 24: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but
Page 25: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but
Page 26: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but

Who: Chem Techs

When: Silane bottle change-out, cabinet maintenance, troubleshooting

PPE: Flame-resistant suits and hood, heat resistant gloves

Who: EPI Techs:

When: Exhaust material open to atmosphere

PPE: Flame-resistant cleanroom garments, safety glasses, face shield and FR gloves (use arc flash material)

Who: ERT

When: Silane emergency response

PPE: Aluminized suits, hood & gloves

Page 27: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but

Emergency Response

Page 28: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but

Silane Monitoring & Response Strategy

• UV/IR flame detection and…

• Hydride detection - TLV 5ppm– Level 1 (warning – ½ TLV) 2.5ppm

• Chemical Services response?

• ERT response?

– Level 2 (Evacuation 1TLV)• ERT response?

Page 29: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but
Page 30: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but

Silane Emergency Response

Flame Showing– Flame has been seen up to 3 feet long

• Do NOT extinguish flame

• (sprinklers to cool bottle not extinguish flame)

• SiO2 crust will form and most likely close leak– Watch detection system for decrease/stop of hydride

– Full PPE protection, close valve if possible

• Standard size bottle could take 4 hours to empty (where there is no VAC)

• Remotely vent pigtail to thermal destruct unit e.g., guardian, etc.

• Keep people out of the bunker/room

• Work with local FD to develop response plan

Page 31: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but

Silane Emergency Response

Flame Response PPE• Nomex Suits

– Operator burned wearing Nomex when trying to turn off leaking valve

• Aluminized suits, hood, leather gloves, hearing protection, or…

• Full fire/proximity suits

Page 32: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but

Silane Emergency Response

No Flame• Hydride detection

• Crusting at leak

• Remote shut down through ACV, automated control valve

• Vent through thermal destruct unit

• Do NOT open cabinet

• Keep people out of room

• At 10 ppm, not significant (low level) remotely vent

• PPE: Aluminized suits, hoods, leather gloves?

Page 33: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but
Page 34: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but
Page 35: Silane What’s the Big Deal?...Silane What’s the Big Deal? Silane Silane SiH4 Pyrophoric • Flammable Range 1.37-96% • TLV = 5ppm • High concentrations may not autoignite but

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