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  • SEMI International Standards: Compilation of Terms (Updated 0614) Contents Abbreviations and Acronyms 2 Definitions 33 Symbols 297

  • SEMI 1978, 2014 COMPILATION OF TERMS (Updated 0614)

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    Table 1 Abbreviations and Acronyms

    Term Meaning Standard(s)

    %F.S. percent full scale SEMI E77, SEMI E80 -> indicates a mapping of an argument to its contents or its meaning. SEMI P39 2D two dimensional, 2-dim. SEMI D59, E159, M80 3D three dimensional, 3-dim. SEMI D59 3DMAS tris(dimethylamino) silane SEMI C81 3DS-IC three dimensional stacked integrated circuit SEMI 3D3 alpha probability SEMI E35 A elongation at rupture SEMI PV18, PV19 beta probability SEMI E35 -PCD microwave photoconductance decay SEMI PV22 in micro inch (= 10-6 inch) SEMI F19 m micrometer (= 10-6 meter) SEMI F19 -2 a scanning axis where the detector angle (2) is scanned at twice the rate of

    the sample axis () SEMI M63

    A absorbance SEMI C1 angstrom (s) SEMI C1, F19 A actuator (a CDM class definition) SEMI E54.2 A measured value SEMI E56 Aa average measured value (units of flow) SEMI E56 Aafs average measured value at full scale set point (units of flow) SEMI E56 AA active area of the device SEMI E35 AAS atomic absorption spectroscopy SEMI M59 AAS/GFAAS atomic absorption spectroscopy/graphite furnace atomic absorption

    spectroscopy SEMI F48

    AC alternating current SEMI E136, E149 ACAS anti-counterfeiting authentication system SEMI T20 ACID atomicity consistency isolation durability SEMI E96 ACL access control list SEMI E147 ACR average picture level contrast ratio SEMI D64 AD accuracy of the DUT (%) SEMI E56 ADC analog to digital converter SEMI PV10 addn. addition SEMI C1 ADF accuracy of the flow standard (%) SEMI E56 AE active element (a CDM class definition) SEMI E54.2 AE analysis engine SEMI E133 AED atomic emission detector SEMI MF1982 AED automated external defibrillator SEMI S21 AES auger electron spectroscopy SEMI F19, F72 AEV additional exhaust ventilation SEMI S18 AFM atomic force microscope SEMI E163, M59 AFM atomic force microscopy SEMI C78 AGT automated guided transport SEMI E82, E87, E109 AGV automatic guided vehicle (cart) SEMI E87, E98, E101, E109

  • COMPILATION OF TERMS SEMI 1978, 2014 (Updated 0614)

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    Term Meaning Standard(s)

    AGV automated guided vehicle SEMI G92, G95, S17 AHE automated handling equipment SEMI E43 AIAG Automotive Industry Action Group SEMI E89 AIM association for automatic identification and mobility SEMI T20.1 AIST National Institute of Advanced Industrial Science and Technology SEMI F110 AIT autoignition temperature SEMI S3 Al measured value, down cycle (units of flow) SEMI E56 alc. alcohol(ic) SEMI C1 ALD atomic layer deposition SEMI F57 AM acoustic microscopy SEMI 3D4 AMHS automated material handling system SEMI D43, D44, E81, E82,

    E85, E87, E88, E92, E98, E109, E153, E156, E168, F107, S17, S26

    amp. ampere(s) SEMI C1 AMSAA Army Materials Systems Analysis Activity SEMI E10 amt. amount SEMI C1 Amu atomic mass unit SEMI F48 A/N alphanumeric. SEMI M59 ANOVA analysis of variance SEMI E89 ANSI American National Standards Institute, the American member of ISO. SEMI M59 ANSI American National Standards Institute SEMI E43, E78, E129, E163,

    T20.1 AOI angle of incidence SEMI PV40, PV42, PV51 AOV air-operated valves SEMI F22 APC advanced process control SEMI E81, E98, E133, E151 APCFI advanced process control framework initiative SEMI E81 API applications programming interface SEMI E54, E81 API application process identifier SEMI E54.14 APIMS atmospheric pressure ionization mass spectrometer SEMI F27, F33, F67, F68,

    F80 APIMS atmospheric pressure ionization mass spectrometry SEMI F30, F58 APL average picture level SEMI D64, D71 pprox.. approximate(ly) SEMI C1 APDU application protocol data unit SEMI E54.8, E54.14, E54.16 aq. aqueous SEMI C1 Ar argon SEMI E49 AR anti-reflective SEMI PV47 ARAMS Automated Reliability, Availability, and Maintainability Standard SEMI E10, E58, E79, E98,

    M59 AREP application reference endpoint SEMI E54.8, E54.14 ARHS automated reticle handling system SEMI E109 ARLS angular resolved light scatter SEMI PV15 As arsenic, an n-type dopant in silicon. SEMI M59 AS accuracy of set point (%) SEMI E56 ASB authentication service body SEMI T20, T20.1, T22

  • SEMI 1978, 2014 COMPILATION OF TERMS (Updated 0614)

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    Term Meaning Standard(s)

    ASCII American Standard Code for Information Interchange SEMI M59, E149 ASE application service element SEMI E54.8, E54.14. E54.23 ASK amplitude shift keying SEMI E144 ASO automatic shutoff valve SEMI F22 ASTM ASTM International, previously the American Society for Testing and

    Materials, an American organization that developed standards for silicon technology between 1964 and 2002; these standards, though developed primarily by American experts have been used world-wide.

    SEMI M59

    ATE automatic test equipment SEMI G79, G80, G91 ATL accredited testing laboratory SEMI F107, S3, S7 atm. atmosphere(s) SEMI C1, C3, F74 ATM atmospheric SEMI F51 Au measured value, up cycle (units of flow) SEMI E56 AUF A-LINK user forum SEMI E54.17 av. average SEMI C1 Avg. average SEMI F19 AVI audio visual interleave SEMI E149 AWG American Wire Gauge SEMI E136 B bias (units of flow) SEMI E56 B boron, a p-type dopant in silicon. SEMI M59 BCC block check character SEMI E144 BCDS bulk chemical distribution system SEMI F41, F51 B-Cz boron-doped Czochralski silicon SEMI PV13 BGA ball grid array SEMI G93 BI BOLTS interface surface SEMI E154, HB3 BIST built-in self test SEMI G91 BM black matrix SEMI D45 BMD bulk micro defect SEMI M59 BNF Backus-Naur form SEMI P39 BOX buried oxide layer SEMI M59 b.p. boiling point SEMI C1, C3 BP buffer port SEMI E88 BP bilateral plane SEMI E154, E156, E158,

    E159, G92, G95, HB3, M80 BRDF bidirectional reflectance distribution function SEMI M59, PV15 BSC brick slice code SEMI PV32, PV48 BSDF bidirectional scatter distribution function SEMI PV15 BTDF bidirectional transmittance distribution function SEMI PV15 BUB backside micro-bump SEMI 3D6 BVP electronic pump components named Basic Vacuum Pump SEMI E54.18 BVR backside via reveal SEMI 3D6 BWS bonded stack wafer SEMI 3D4 C controller (a CDM class definition) SEMI E54.2 C compression test system SEMI PV44 C16 n-hexadecane (n-C16H34) SEMI MF1982

  • COMPILATION OF TERMS SEMI 1978, 2014 (Updated 0614)

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    Term Meaning Standard(s)

    C2C chip to chip SEMI 3D7 C2W chip to wafer SEMI 3D7 ca. circa (i.e., about or approximately) SEMI C1 CA certification authority SEMI T21 cal. calorie(s) SEMI C1 CAN controller area network SEMI E54.4, E54.15 CB communication block SEMI PV35.1 CBI color breakup index SEMI D65 CBU color breakup SEMI D58, D65 CCBRDF cosine corrected bidirectional reflectance distribution function SEMI PV15 CCBTDF cosine corrected bidirectional transmittance distribution function SEMI PV15 CCD charge coupled device SEMI G93 CCFL cold cathode fluorescent lamp SEMI D35, D47 CCT correlated color temperature SEMI D71 CCU copper cross section SEMI PV19 CCW counterclockwise SEMI M59 c.d. current density SEMI C1 CD compact disk SEMI E149 CD critical dimension SEMI 3D4, E163, P46, P47,

    P48 CDA clean, dry air SEMI F28, F59, F101, S12 CDF cumulative distribution function SEMI E35, M59 CDL charging dissipation layer SEMI P48 CDM common device model SEMI E54, E54.2, E54.4,

    E54.8, E54.9, E54.12, E54.13, E54.14, E54.15, E54.16, E54.17, E54.19, E54.21, E54.23

    CDM charged device model SEMI E43, E78, E129, E163 CDM chemical dispensing module SEMI F31 CDS chemical distribution system SEMI F107 CD-SEM critical dimension scanning electron microscope SEMI E79 CDU chemical dispensing unit SEMI F31 CE European conformity SEMI F107 CEM common equipment model SEMI E120 CEO cost of equipment ownership SEMI E35 CF cost footprint (of the equipment) SEMI E35, E140 CF (gasA/gasB) conversion factor from Gas A to Gas B SEMI E77 CFR Code of Federal Regulations (United States) SEMI S4 CFU colony-forming units SEMI F75 CGA compressed gas association SEMI C3, S4 CGPM general conference on weights and measures SEMI E145 CGS centimeter-gram-second system SEMI E145 CIDRW carrier ID reader/writer SEMI E99, E99.1 CIH certified industrial hygienist SEMI S7

  • SEMI 1978, 2014 COMPILATION OF TERMS (Updated 0614)

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    Term Meaning Standard(s)

    CIM computer integrated manufacturing SEMI E81, E98, F107 CIP control and information protocol SEMI E54.13 CJM control job management SEMI E98 CL centerline SEMI E158, E159 CL center line SEMI M80, PV32 CLSO Certified Laser Safety Officer SEMI S7 CM connection manager object SEMI E54.13 CM context matching SEMI E133 CM contrast modulation SEMI D64 cm2 square centimeter(s) SEMI C1 CMC critical micelle concentration SEMI F110 CMD command SEMI E144 CMOS complementary metal oxide semiconductor SEMI MS2, MS4, M59 CMP chemical mechanical polish SEMI E79 CMP chemical mechanical polishing SEMI F107 CMP chemical mechanical planarization SEMI MS4 CMS carrier management standard SEMI E98 CNC condensation nucleus counter SEMI C6.2, C6.4, E66, F43,

    F70 CNC computerized numeric control SEMI G93 COB center of brightness SEMI PV40, PV42 CoE CANopen over EtherCAT SEMI E54.20 compd. compound SEMI C1 compn. composition SEMI C1 concn. concentration SEMI C1 CONWIP constant work in process SEMI E124 COO cost of ownership SEMI E10, E35, E78, E129,

    E140, E124 COP crystal originated particle/pit SEMI E146 COP crystal originated particles SEMI M51 COP crystal originated pit SEMI M59 COV coefficient of variation SEMI E104 CP configuration parameter SEMI E54.16 cp process capacity SEMI G93 CPC condensation particle counter SEMI F111 Cpd cycle per degree SEMI D65 Cpk process capability index SEMI M59 Cpk process capability SEMI G93 CPR cardiopulm