Self-Organized Processes in Semiconductor Heteroepitaxyassets.cambridge.org/97811074/09323/frontmatter/...MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS VOLUM E 794 Self-Organized

Self-Organized Processes inSemiconductor Heteroepitaxy

www.cambridge.org© in this web service Cambridge University Press

Cambridge University Press978-1-107-40932-3 - Materials Research Society Symposium Proceedings: Volume 794:Self-Organized Processes in Semiconductor HeteroepitaxyEditors: Andrew G. Norman, Rachel S. Goldman, Richard Noetzel and Gerald B. StringfellowFrontmatterMore information

http://www.cambridge.org/9781107409323

http://www.cambridge.org







MATERIALS RESEARCH SOCIETYSYMPOSIUM PROCEEDINGS VOLUME 794

Self-Organized Processes inSemiconductor Heteroepitaxy

Symposium held December 1-5, 2003, Boston, Massachusetts, U.S.A.

EDITORS:

Andrew G. NormanNational Renewable Energy Laboratory

Golden, Colorado, U.S.A.

Rachel S. GoldmanUniversity of Michigan

Ann Arbor, Michigan, U.S.A.

Richard NoetzelEindhoven University of Technology

Eindhoven, The Netherlands

Gerald B. StringfellowUniversity of Utah

Salt Lake City, Utah, U.S.A.

Materials Research SocietyWarrendale, Pennsylvania






cambridge university press Cambridge, New York, Melbourne, Madrid, Cape Town, Singapore, São Paulo, Delhi, Mexico City

Cambridge University Press32 Avenue of the Americas, New York ny 10013-2473, USA

Published in the United States of America by Cambridge University Press, New York

www.cambridge.orgInformation on this title: www.cambridge.org/9781107409323

Materials Research Society506 Keystone Drive, Warrendale, pa 15086http://www.mrs.org

© Materials Research Society 2004

This publication is in copyright. Subject to statutory exceptionand to the provisions of relevant collective licensing agreements, no reproduction of any part may take place without the written permission of Cambridge University Press.

This publication has been registered with Copyright Clearance Center, Inc.For further information please contact the Copyright Clearance Center,Salem, Massachusetts.

First published 2004 First paperback edition 2012

Single article reprints from this publication are available throughUniversity Microfilms Inc., 300 North Zeeb Road, Ann Arbor, mi 48106

CODEN: MRSPDH

isbn 978-1-107-40932-3 Paperback

Cambridge University Press has no responsibility for the persistence oraccuracy of URLs for external or third-party internet websites referred to inthis publication, and does not guarantee that any content on such websites is,or will remain, accurate or appropriate.






CONTENTS

Preface xi

Materials Research Society Symposium Proceedings xii

MORPHOLOGICAL EVOLUTION:PA TTERNING AND ISLANDING

Germanium Island Size Distribution by Atomistic Simulation 3Richard J. Wagner and Erdogan Gulari

Fabrication of Two-Dimensional Si/Ge Nanowires andNanorings 9

Midori Kawamura, Bert Voigtlander, Neelima Paul,and Vasily Cherepanov

SEMICONDUCTOR NANOSTRUCTURE

Epitaxial Metallic Islands: Charge Confinement andTemplates for Atomic Wires 17

A.M. Mazzone and G.L. Savini

Facile Fabrication of Nanoparticles in the Nanospace ofUltrathin TiO2-Gel Films: Composition, Morphology andCatalytic Activity 23

Junhui He and Toyoki Kunitake

Synthesis and Characterization of WOX Nanowires andTheir Conversion to WS2 Nanotubes 29

Lifeng Dong, Aitor Maiz, and Jun Jiao

TEM Analysis of Stress in GaInAs/(001)InP EpitaxialSystems 35

Andre Rocher, Martiane Cabie, Anne Ponchet, andNicolas Bertru

Pit Nucleation in Compound Semiconductor Thin Films 41Mathieu Bouville, Michael L. Falk, andJoanna Mirecki Millunchick

Optical Properties of Quantum-Wires Grown Using LateralComposition Modulation Induced by (InP)i/(GaP)! Short-Period Superlattices 47

J.D. Song, J.M. Kim, and Y.T. Lee

v






Effects of Growth Sequence on Optical and StructuralProperties of InAs/GaAs Quantum Dots Grown by AtomicLayer Molecular Beam Epitaxy 53

J.D. Song, Y.M. Park, J.C. Shin, J.G. Lim, YJ. Park,WJ. Choi, I.K. Han, WJ. Cho, J.I. Lee, H.S. Kim, andC.G. Park

Site-Control Technology for InAs Quantum Dot Formation byDirect Deposition of Indium Nano-Dots With a Nano-Jet Probe 59

Shunsuke Ohkouchi, Yusui Nakamura,Hitoshi Nakamura, and Kiyoshi Asakawa

InNAs and GalnNAs Self-Assembled Quantum Dots andLasers Grown by Solid Source Molecular Beam Epitaxy 65

Z.Z. Sun, S.F. Yoon, K.C. Yew, and B.X. Bo

Preparation of Ge (100) Substrates for High-QualityEpitaxial Growth of Group IV Materials 71

Mark Nowakowski, Jordana Bandaru, L.D. Bell, andShouleh Nikzad

Controlled Fabrication by LPCVD of LuminescentSiGe/SiO2 (LTO) Very Thin Multilayers 77

A. Rodriguez, J. Sangrador, T. Rodriguez, M. Avella,A.C. Prieto, J. Jimenez, M.I. Ortiz, and C. Ballesteros

Self Organized Compound Semiconductor NanocrystalliteDistributions in SiO2 on Silicon Synthesized by Ion Implantation 83

H. Karl, I. GroBhans, and B. Stritzker

Room Temperature Resonant Tunneling and CoulombBlockade in Nanocrystalline Si With Double SiO2 Barriers 89

L.C. Wu, KJ. Chen, M. Dai, W. Li, L.W. Yu, andX.F. Huang

Charging Effects in Si Quantum Dots for Non VolatileMemories Applications Monitored by Electrostatic ForceMicroscopy 95

R.A. Puglisi, G. Nicotra, S. Lombardo, C. Spinella,G. Ammendola, and C. Gerardi

VI






QUANTUMDOTS:ORDERING AND PA TTERNING

(In,Ga)As Quantum Dot Array Formation by Self-OrganizedAnisotropic Strain Engineering of an (In,Ga)As/GaAsQuantum Wire Template: Shallow-Pattern Effects 105

T. Mano, R. Notzel, G.J. Hamhuis, T.J. Eijkemans,E. Smalbrugge, and J.H. Wolter

Systematic Studies of SiGe/Si Islands Nucleated viaSeparate In Situ, or Ex Situ, Ga+ Focused Ion Beam-Guided Growth Techniques I l l

T.E. Vandervelde, S. Atha, T.L. Pernell, R. Hull, andJ.C. Bean

III-V SELF-ORGANIZEDNANOSTRUCTURES

Size and Critical Thickness Evolution During Growth ofStacked Layers of InAs/InP(001) Quantum Wires Studiedby In Situ Stress Measurements 119

David Fuster, Maria Ujue Gonzalez, Luisa Gonzalez,Yolanda Gonzalez, Teresa Ben, Arturo Ponce, andSergio I. Molina

Microanalysis of Self-Assembled InAs Quantum DotStructures Grown for Infrared Detector Applications 125

W.L. Sarney, J.W. Little, and S. Svensson

Optical Properties of InGaAs QDs Grown in a GaAsMatrix by MOCVD, Emitting at 1300 nm at RoomTemperature 131

M.T. Todaro, M. De Giorgi, V. Tasco, M. DeVittorio,A. Passaseo, and R. Cingolani

QUANTUM DOTS AND WIRES:STRUCTURE, SPECTROSCOPY, AND TRANSPORT

Polarization Spectroscopy of Charged Single Self-AssembledQuantum Dots 139

Morgan E. Ware, Allan Bracker, Daniel Gammon, andDavid Gershoni

vn






Growth Structure, and Optical Properties of Ill-NitrideQuantum Dots 145

Hadis Morko^, Arup Neogi, and Martin Kuball

Diffuse X-ray Scattering From InGaAs/GaAs Quantum Dots 165Rolf Kohler, Daniil Grigoriev, Michael Hanke,Martin Schmidbauer, Peter Schafer, Stanislav Besedin,Udo W. Pohl, Roman L. Sellin, Dieter Bimberg,Nikolai D. Zakharov, and Peter Werner

Near-Field Magneto-Photoluminescence of Single Self-Organized Quantum Dots 171

A.M. Mintairov, A.S. Vlasov, and J.L. Merz

QUANTUM DOTS AND WIRES:DEVICES

* Quantum Dot Lasers and Amplifiers 179Udo W. Pohl and Dieter Bimberg

1.5 micron In As Quantum Dot Lasers Based on MetamorphicInGaAs/GaAs Heterostructures 189

V.M. Ustinov, A.E. Zhukov, A.R. Kovsh, N.A. Maleev,S.S. Mikhrin, A.P. Vasil'ev, E.V. Nikitina, E.S. Semenova,N.V. Kryzhanovskaya, Yu.G. Musikhin, Yu.M. Shernyakov,M.V. Maximov, N.N. Ledentsov, D. Bimberg, and Zh.I. Alferov

Nanoengineered Quantum Dot Active Medium forThermally-Stable Laser Diodes 195

V. Tokranov, M. Yakimov, A. Katsnelson, M. Lamberti,G. Agnello, and S. Oktyabrsky

First Electrically Injected QD-MCLED Emitting at 1.3 jwm,Grown by Metal Organic Chemical Vapor Deposition 201

V. Tasco, M.T. Todaro, M. De Giorgi, M. DeVittorio,R. Cingolani, and A. Passaseo

Growth and Characterization of In As Quantum Dots onGaAs (100) Emitting at 1.31 jim 207

V. Celibert, B. Salem, G. Guillot, C. Bru-Chevallier,L. Grenouillet, P. Duvaut, P. Gilet, and A. Million

*Invited Paper

Vlll






SPINS IN SEMICONDUCTORNANOSTRUCTURES

* Application of Diluted Magnetic Semiconductors and QuantumDots to Spin Polarized Light Sources 215

Pallab Bhattacharya, Sasan Fathpour, Subhananda Chakrabarti,Michael Holub, and Siddhartha Ghosh

* Effects of Clustering and Dimensionality on the MagneticProperties of Diluted Magnetic Semiconductors 227

R.N. Bhatt, Malcolm P. Kennett, Mona Berciu, andAdel Kassaian

COMPOSITION MODULATION

* Instabilities, Elasticity, and Wetting Effect in MultilayerHeteroepitaxial Growth 241

Zhi-Feng Huang and Rashmi C. Desai

On the Manipulation of Nanoscale Self-Assembly byElastic Field 253

Y.F. Gao

* Self-Organized Superlattices in GalnAsSb Grown onVicinal Substrates 259

C.A. Wang, CJ. Vineis, and D.R. Calawa

Optical and Structural Properties of InAs/GaSbNanostructures 271

D.W. Stokes, J.H. Li, R.L. Forrest, S.L. Ammu, J.C. Lenzi,S.C. Moss, B.Z. Nosho, E.H. Aifer, B.R. Bennett, andLJ. Whitman

A TO MIC ORDERING

* Effects Due to and Derived From Spontaneous Orderingin III-V Semiconductor Alloys 279

Yong Zhang and A. Mascarenhas

Effects of Surfactants N and Br on Ordering in GalnP 291D.C. Chapman, A.D. Howard, L. Rieth, R.R. Wixom,and G.B. Stringfellow

*Invited Paper

IX






* Quadruple-Period Ordering in MBE GaAsSb Alloys 297Iskander G. Batyrev, Andrew G. Norman,Shengbai Zhang, and Su-Huai Wei

Effects of Substrate Orientation on the Spontaneous Orderingof GaAsSb Epilayers Grown by Molecular Beam Epitaxy 309

Brian P. Gorman, Andrew G. Norman, Reiko Lukic-Zrnic,Terry D. Golding, and Chris L. Littler

Author Index 315

Subject Index 319

* Invited Paper






PREFACE

This volume contains a compilation of papers presented in Symposium T, "Self-OrganizedProcesses in Semiconductor Epitaxy," held December 1-5 at the 2003 MRS Fall Meeting inBoston, Massachusetts. The proceedings includes papers presented in joint sessions withSymposium N, "Quantum Dots, Nanoparticles, and Nanowires," and Symposium Z, "Progress inCompound Semiconductor Materials III—Electronic and Optoelectronic Applications." The goalof this symposium was to address issues related to the understanding, control, and applications ofseveral self-organized processes in semiconductor epitaxy, including strain-induced self-assembly;clustering, alloy phase separation, and compositional modulation; and long- and short-rangeordering. The symposium was extremely successful in meeting the above goal and attractedparticipants from around the world. We hope that the symposium and the proceedings willstimulate further research into the above areas. This symposium forms part of a highly successfulseries of symposia held on these topics that also includes symposia previously held at the 1995 and1999 MRS Fall Meetings.

We wish to thank all of the authors of the symposium for their efforts in preparing manuscripts,as well as the participants of the symposium for their excellent presentations and stimulatingquestions and discussions. The organizers are grateful for the financial support of the NationalScience Foundation, under Grant Number DMR-0404630, administered by Dr. LaVerne Hess. Wealso acknowledge MRS, the National Renewable Energy Laboratory, Omicron NanoTechnologyU.S.A, and Veeco Instruments Inc. (MBE Operations) for additional financial support. We alsowish to thank the session chairs, the 2003 MRS Fall Meeting Chairs, and the MRS support staff fortheir encouragement and help with the symposium and proceedings. Finally, we wish to thank theDOE Office of Basic Energy Sciences, Division of Materials Sciences, for their long and continuedsupport of research in the areas of quantum dots, composition modulation, and spontaneous atomicordering, without which the striking progress in these areas evident at the symposium would nothave been possible.

Andrew G. NormanRachel S. GoldmanRichard NoetzelGerald B. Stringfellow

February 2004

XI






MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS

Volume 762— Amorphous and Nanocrystalline Silicon-Based Films—2003, J.R. Abelson, G. Ganguly,H. Matsumura, J. Robertson, E. Schiff, 2003, ISBN: 1-55899-699-0

Volume 763— Compound Semiconductor Photovoltaics, R. Noufi, D. Cahen, W. Shafarman, L. Stolt,2003, ISBN: 1-55899-700-8

Volume 764— New Applications for Wide-Bandgap Semiconductors, SJ. Pearton, J. Han, A.G. Baca,J-I. Chyi, W.H. Chang, 2003, ISBN: 1-55899-701-6

Volume 765— CMOS Front-End Materials and Process Technology, T-J. King, B. Yu, RJ.P. Lander,S. Saito, 2003, ISBN: 1-55899-702-4

Volume 766— Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics—2003, A. McKerrow, J. Leu, O. Kraft, T. Kikkawa, 2003, ISBN: 1-55899-703-2

Volume 767— Chemical-Mechanical Planarization, M. Oliver, D. Boning, D. Stein, K. Devriendt, 2003,ISBN: 1-55899-704-0

Volume 768— Integration of Heterogeneous Thin-Film Materials and Devices, H.A. Atwater, M. Levy,M.I. Current, T. Sands, 2003, ISBN: 1-55899-705-9

Volume 769— Flexible Electronics—Materials and Device Technology, B.R. Chalamala, B.E. Gnade,N. Fruehauf, J. Jang, 2003, ISBN: 1-55899-706-7

Volume 770— Optoelectronics of Group-IV-Based Materials, T. Gregorkiewicz, R.G. Elliman,P.M. Fauchet, J.A. Hutchby, 2003, ISBN: 1-55899-707-5

Volume 771— Organic and Polymeric Materials and Devices, P.W.M. Blom, N.C. Greenham,CD. Dimitrakopoulos, CD. Frisbie, 2003, ISBN: 1-55899-708-3

Volume 772— Nanotube-Based Devices, P. Bernier, S. Roth, D. Carroll, G-T. Kim, 2003,ISBN: 1-55899-709-1

Volume 773— Biomicroelectromechanical Systems (BioMEMS), C. Ozkan, J. Santini, H. Gao, G. Bao,2003, ISBN: 1-55899-710-5

Volume 774— Materials Inspired by Biology, J.L. Thomas, L. Gower, K.L. Kiick, 2003,ISBN: 1-55899-711-3

Volume 775— Self-Assembled Nanostructured Materials, CJ. Brinker, Y. Lu, M. Antonietti, C Bai,2003, ISBN: 1-55899-712-1

Volume 776— Unconventional Approaches to Nanostructures with Applications in Electronics, Photonics,Information Storage and Sensing, O.D. Velev, T.J. Bunning, Y. Xia, P. Yang, 2003,ISBN: 1-55899-713-X

Volume 777— Nanostructuring Materials with Energetic Beams, S. Roorda, H. Bernas, A. Meldrum,2003, ISBN: 1-55899-714-8

Volume 778— Mechanical Properties Derived from Nanostructuring Materials, H. Kung, D.F. Bahr,N.R. Moody, K.J. Wahl, 2003, ISBN: 1-55899-715-6

Volume 779— Multiscale Phenomena in Materials—Experiments and Modeling Related to MechanicalBehavior, K.J. Hemker, D.H. Lassila, L.E. Levine, H.M. Zbib, 2003,ISBN: 1-55899-716-4

Volume 780— Advanced Optical Processing of Materials, I.W. Boyd, M. Dinescu, A.V. Rode,D.B. Chrisey, 2003, ISBN: 1-55899-717-2

Volume 78IE—Mechanisms in Electrochemical Deposition and Corrosion, J.C. Barbour, R.M. Penner,P.C. Searson, 2003, ISBN: 1-55899-718-0

Volume 782— Micro- and Nanosystems, D. LaVan, M. McNie, A. Ayon, M. Madou, S. Prasad, 2004,ISBN: 1-55899-720-2

Volume 783— Materials, Integration and Packaging Issues for High-Frequency Devices, P. Muralt, Y.S. Cho,J-P. Maria, M. Klee, C Hoffmann, C.A. Randall, 2004, ISBN: 1-55899-721-0

Volume 784— Ferroelectric Thin Films XII, S. Hoffmann-Eifert, H. Funakubo, A.I. Kingon, I.P. Koutsaroff,V. Joshi, 2004, ISBN: 1-55899-722-9






MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS

Volume 785— Materials and Devices for Smart Systems, Y. Furuya, E. Quandt, Q. Zhang, K. Inoue,M. Shahinpoor, 2004, ISBN: 1-55899-723-7

Volume 786— Fundamentals of Novel Oxide/Semiconductor Interfaces, C.R. Abernathy, E. Gusev,D.G. Schlom, S. Stemmer, 2004, ISBN: 1-55899-724-5

Volume 787— Molecularly Imprinted Materials—2003, P. Kofinas, MJ. Roberts, B. Sellergren, 2004,ISBN: 1-55899-725-3

Volume 788— Continuous Nanophase and Nanostructured Materials, S. Komarneni, J.C. Parker, J. Watkins,2004, ISBN: 1-55899-726-1

Volume 789— Quantum Dots, Nanoparticles and Nanowires, P. Guyot-Sionnest, N.J. Halas, H. Mattoussi,Z.L. Wang, U. Woggon, 2004, ISBN: 1-55899-727-X

Volume 790— Dynamics in Small Confining Systems—2003, J.T. Fourkas, P. Levitz, M. Urbakh, KJ. Wahl,2004, ISBN: 1-55899-728-8

Volume 791— Mechanical Properties of Nanostructured Materials and Nanocomposites, R. Krishnamoorti,E. Lavernia, I. Ovid'ko, C.S. Pande, G. Skandan, 2004, ISBN: 1-55899-729-6

Volume 792— Radiation Effects and Ion-Beam Processing of Materials, L. Wang, R. Fromknecht, L.L. Snead,D.F. Downey, H. Takahashi, 2004, ISBN: 1-55899-730-X

Volume 793— Thermoelectric Materials 2003—Research and Applications, G.S. Nolas, J. Yang, T.P. Hogan,D.C. Johnson, 2004, ISBN: 1-55899-731-8

Volume 794— Self-Organized Processes in Semiconductor Heteroepitaxy, R.S. Goldman, R. Noetzel,A.G. Norman, G.B. Stringfellow, 2004, ISBN: 1-55899-732-6

Volume 795— Thin Films—Stresses and Mechanical Properties X, S.G. Corcoran, Y-C. Joo, N.R. Moody,Z. Suo, 2004, ISBN: 1-55899-733-4

Volume 796— Critical Interfacial Issues in Thin-Film Optoelectronic and Energy Conversion Devices,D.S. Ginley, S.A. Carter, M. Gratzel, R.W. Birkmire, 2004, ISBN: 1-55899-734-2

Volume 797— Engineered Porosity for Microphotonics and Plasmonics, R. Wehrspohn, F. Garcial-Vidal,M. Notomi, A. Scherer, 2004, ISBN: 1-55899-735-0

Volume 798— GaN and Related Alloys—2003, H.M. Ng, M. Wraback, K. Hiramatsu, N. Grandjean, 2004,ISBN: 1-55899-736-9

Volume 799— Progress in Compound Semiconductor Materials III—Electronic and OptoelectronicApplications, D. Friedman, M.O. Manasreh, I. Buyanova, F.D. Auret, A. Munkholm, 2004,ISBN: 1-55899-737-7

Volume 800— Synthesis, Characterization and Properties of Energetic/Reactive Nanomaterials,R.W. Armstrong, N.N. Thadhani, W.H. Wilson, J.J. Gilman, Z. Munir, R.L. Simpson, 2004,ISBN: 1-55899-738-5

Volume 801— Hydrogen Storage Materials, M. Nazri, G-A. Nazri, R.C. Young, C. Ping, 2004,ISBN: 1-55899-739-3

Volume 802— Actinides—Basic Science, Applications and Technology, L. Soderholm, J. Joyce, M.F. Nicol,D. Shuh, J.G. Tobin, 2004, ISBN: 1-55899-740-7

Volume 803— Advanced Data Storage Materials and Characterization Techniques, J. Ahner, L. Hesselink,J. Levy, 2004, ISBN: 1-55899-741-5

Volume 804— Combinatorial and Artificial Intelligence Methods in Materials Science II, R.A. Potyrailo,A. Karim, Q. Wang, T. Chikyow, 2004, ISBN: 1-55899-742-3

Volume 805— Quasicrystals 2003—Preparation, Properties and Applications, E. Belin-Ferre, M. Feuerbacher,Y. Ishii, D. Sordelet, 2004, ISBN: 1-55899-743-1

Volume 806— Amorphous and Nanocrystalline Metals, R. Busch, T. Humagel, J. Eckert, A. Inoue,W. Johnson, A.R. Yavari, 2004, ISBN: 1-55899-744-X

Volume 807— Scientific Basis for Nuclear Waste Management XXVII, V.M. Oversby, L.O. Werme, 2004,ISBN: 1-55899-752-0

Prior Materials Research Society Symposium Proceedings available by contacting Materials Research Society






Documents

Self-Organized Processes in Semiconductor Heteroepitaxyassets.cambridge.org/97811074/09323/frontmatter/...MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS VOLUM E 794 Self-Organized