Screw Dry Pump SDE Series - PolVac Corp All Pumps… · Energy-saving features combine with the reliability, SDE Series achieved lower running cost. - Advanced screw technology allows

e-catalog�SDEJ�Ver2.1/06.6

Dry pumps reliable for all applications.Energy-saving features combine with the reliability, SDE Seriesachieved lower running cost.

- Advanced screw technology allows longer life operation under hard applications.- Anti-corrosion material construction allows pumping of corrosive gasses.- Upgraded screw design and driving system realized 40% reduction in energy

consumption, compared to conventional models.

SDE

SDE SeriesScrew Dry Pump

SCREWDRYPUMPSDESERIES


Specification TableModelSpecification SDE90 SDE120 SDE303 SDE603 SDE1203 SDE2003

Maximum Pumping Speed (L/min) 30,000Ultimate Pressure (Pa)Maximum Inlet Pressure (Pa)Inlet Flange NW40 NW50 NW100 NW160Outlet FlangeWeight(Approx.) (kg) 150 151 260 260 310 470Electric Power SupplyPower in normal operation (kW)* 2.8 3.2 3.0 3.1 3.6 4.0Electric Power Capacity (kVA) 6.5 10.5 13.0 17.6Cooling Water SupplyPurge N2 Gas Supply 0-60SLM

NW80NW40

3 phase AC200-220V 50/60Hz

4L/min and over

20,0001.3 0.5

Atmospheric pressure

1,300 2,000 5,000 10,000

* Power at ultimate pressure.

KASHIYAMA IND., LTD.

Pumping Curve(SP)

Pump Schematics (SDE90,SDE120)

Pump Schematics (SDE303,SDE603,SDE1203,SDE2003)

Note 1) Because we are constantly working to improve performance and upgrade ourproducts, specifications and diagrammatic representations in this catalog may changewithout notice.Note 2) Products displayed in this catalog must be approved for export in accordance withthe Foreign Exchange and Foreign Trade Control Act. Before placing an export order,please contact our Business Department.

-Dry vacuum Pump-Mechanical Booster Pump-Air Discharge System

URL:www.kashiyama.co.jp/mail address for inquiries:[email protected]


e-catalog�SDEJ�Ver2.1/06.6SDE



N W 50N W 40Inle tMode l

S D E 120S D E 90 551

560

HD ime ns ion: mm

E L C BN 2 pre s s ure ga uge

P owe r conne c tor

C a s te r with P IP E -F IT T IN G 1 /4 s tra ight

C ooling wa te r inle t R c3 /8

with s e lf-s e a l couple r


N 2 s upply portC ooling wa te r outle t R c3 /8

D uc t O D 50

O utle t N W 40

Inle t

N 2 control va lve

R e gula tor

E MO

R e mote control conne c tor

C ontrol pa ne l

C ommunica tion ca ble(L =2000mm)

170*80*30

540

(Out

let)

501

H(I

nlet

)

(50)

4244

143

1350

690

54

55 205

370

65 185

N 2 control va lve

O utle t N W 40 C a s te r

C ooling wa te r outle t R c3 /8C ooling wa te r inle t R c3 /8

N 2 s upply port


with P IP E -F IT T IN G 1 /4 s tra ight


N 2 pre s s ure ga ugeR e gula tor

P owe r conne c tor

O utle t N W 40

D uc t

Inle t

( O P T IO N )

( O P T IO N )S ile nce r

C he ck va lve

C ontrol pa ne l170*80*30

E L C B


E MO

H

B(O

utle

t)

A(I

nlet

)

D

C(O

utle

t)

(28) g 42

f

(8)

(90)

5013

(c)

60

ba(89)

(163)

ed

W

10

100

1000

10000

100000

0.1 1 10 100 1000 10000 100000Pressure(Pa)

Pum

ping

Spee

d(L/

1000Pressure (Torr)

1001010.10.010.001

SDE90SDE120SDE303SDE603SDE1203SDE2003

Mode l Inle t D uc t D W H A B C a b c d e f gS D E 303 N W 50S D E 603 N W 80S D E 1203 N W 100 O D 50 900 400 906 945 841 352 195 155 550 200 115 200 59S D E 2003 N W 160 O D 75 1000 500 1090 1165 850 360 155 195 650 250 135 208 108

200 59155 472 200 115O D 50 760 400 906 945 841 352 133


e-catalog�RDJ�Ver2.1/06.6

New lower running cost pump for light to medium applications.RD achieves significant improvements in environmental performance byinnovative power-saving technology.

- Multistage configuration optimizes pumping efficiency, minimizes power consumption.- Applicable from light processes such as load rock and transfer, to etching and other medium

processes.- Upgraded roots element and driving system realized 70% reduction in energy consumption,

compared to conventional models.(RD90)

RD

RD SeriesRoots Dry Pump

Specification TableModel RD90(RDE90) RD120 RD303 RD603 RD1203

Maximum Pumping Speed (L/min) 1,300 2,000 5,000 10,000 20,000Ultimate Pressure (Pa)Maximum Inlet Pressure (Pa)Inlet Flange NW40 NW80 NW100Outlet FlangeWeight(Approx.) (kg) 130 140 240 300Electric Power SupplyPower in normal operation (kW)* 1.3 (0.65) 1.7 1.5 1.6 1.7Electric Power Capacity (kVA) 4.0 8.0 10.5

RD200330,000

NW160

475

2.115.1

Cooling Water SupplyPurge N2 Gas Supply

2.7 2.0 0.5Atmospheric pressure

NW40

3 phase AC200-220V 50/60Hz

3.5L/min and over0-50SLM

Specification

ROOTSDRYPUMPRDSERIES


*Power at ultimate pressure.

Pumping Curve(SP)

Pump Schematics (RD90,RD120)

Pump Schematics (RD303,RD603,RD1203,RD2003)





e-catalog�RDJ�Ver2.1/06.6RD



735R D 90785R D 120

Mode l LD ime ns ion: mm

E L C B

N 2 pre s s ure ga uge

N 2 s upply port

C a s te r

with s e lf-s e a l couple r with s e lf-s e a l couple rC ooling wa te r inle t R c3 /8

P owe r conne c tor

C ooling wa te r outle t R c3 /8

Inle t N W 40

D uc t O D 50

O utle t N W 40

R e mote controlconne c tor

E MOR e gula tor

N 2 control va lve



170*80*30C ontrol pa ne l

33

(35)

415

437

(Inl

et)

515

(Out

let)

125

432822

50

230

L

80 197

50

50

380

65 140

N 2 control va lve

S ile nce r

O utle t N W 40 C a s te r

C ooling wa te r outle t R c3 /8C ooling wa te r inle t R c3 /8

N 2 s upply port





P owe r conne c tor

O utle t N W 40

D uc t

Inle t

( O P T IO N )

( O P T IO N )

C he ck va lve

C ontrol pa ne l170*80*30

E L C B

R e mote control conne ctor

E MO

H

(163)

B(O

utle

t)A(I

nlet

)

D

C(O

utle

t)

(28) g 42

f

(8)

(90)

5013

(c)

60

ba(89)

ed

W

10

100

1000

10000

100000

0.1 1 10 100 1000 10000 100000Pressure(Pa)

RD90RD120RD303RD603RD1203RD2003

1000Pressure (Torr)

1001010.10.010.001

Pum

ping

Spee

d(L/

min

)

Mode l Inle t D uc t D W H A B C a b c d e f gR D 303 N W 50R D 603 N W 80R D 1203 N W 100 O D 50 900 400 906 945 705 206 195 155 550 200 115 200 59R D 2003 N W 160 O D 75 1000 500 1090 1165 704 214 155 195 650 250 135 208 108

200 59155 472 200 115O D 50 760 400 906 945 705 206 133

e-catalog�SDLJ�Ver2.1/06.6

- Maximized the pumping speed in the atmospheric side to achieve higherthroughput.

- The combination with large booster pump allows higher pumping speed up to35,000L/min.

- Applicable for clean processes.

SDL

SDL SeriesHigh Throughput Dry Pump



Higher pumping speed.Support larger diameter wafer and larger FPD substrate applications.Higher pumping speed minimizes the tact time for large load lockchamber.

Specification TableModelSpecification

Maximum Pumping Speed (L/min)(Upper 50Hz / Lower 60Hz)Ultimate Pressure (Pa) 50/60HzMaximum Inlet Pressure (Pa)Inlet FlangeOutlet FlangeWeight(Approx.) (kg)Electric Power SupplyPower in normal operation (kW)Electric Power Capacity (kVA)Cooling Water SupplyPurge N2 Gas Supply

5L/min and over0-50SLM0 or 8SLM


3 phase AC200 50/60Hz AC220V 60Hz


6L/min and over

3 phase AC200-220V 50/60Hz

SD150L SD220L SDL25K SDL40K2,000 3,100

25,0002,400 3,700

4/2 4/3 0.5

NW50 NW100 NW160

325 450 620 910

3.6 5.06.1 8.3

NW40

SDL60K

40,000 55,000

6.917.0

7.023.6

7.428.1

NW50750

Pumping Curve(SP)

Pump Schematics

e-catalog�SDLJ�Ver2.1/06.6SDL

*1: T he pre s s ure re gula tor la yout va rie s from the dia gra m in the S D 150L a nd S D 220L mode ls .

W 2S D 150LS D 220L

Mode l950960

L 1492606 72

60H 1 H 2

661626

518630

H 3 H 4432402

L 34341

L 2440524

4345

W 1177217

4362

W 3 W 46774

3557

a b184152

135130

c d109143

3515

e fD ime ns ion: mm

E MO

R e mote control conne ctor

P owe r conne c torD uc t O D 50

Inle t N W 50

O utle t N W 40

C a s te r

C ooling wa te r outle t R c3 /8N 2 pre s s ure ga uge

C ooling wa te r inle t R c3 /8with s e lf-s e a l couple r

N 2 s upply portwith P IP E -F IT T IN G 1 /4 s tra ight

E L C B

with s e lf-s e a l couple rR e gula tor

170*80*30C ontrol pa ne l


(46)

L 3

H2

L 2

L 1

H3

(Inl

et)

H4

(Out

let)

H1

e

a b

d

c

f

85

W2

W1

W4

W3

* 1





10

100

1000

10000

100000

0.1 1 10 100 1000 10000 100000Pressure(Pa)

Pum

ping

Spee

d(L/

min

SD150L(50Hz)SD150L(60Hz)SD220L(50Hz)SD220L(60Hz)SDL25KSDL40KSDL60K

Pressure (Torr)1001010.10.010.001 1000

SD150L,SD220L

ＥＭＯ

Inle t N W 100

1000

Inle

t111

0

27

Out

let6

33

C a s te r

O utle t N W 50

D uc t port O D 50

60

355155

C ontrol pa ne l

E L C B

1050

N 2 s upply port

C ooling wa te r Inle t R c1 /2

C ooling wa te r O utle tR c1 /2

5080

182

13

(44)

P ipe fitting 1 /4


170*80*30

40

E MO

R e gula torN 2 pre s s ure ga uge

N 2 control va lve


P owe r conne c tor

520

260 140


30

P ipe fitting 1 /4


C ooling wa te r O utle t R c1 /2

C ooling wa te r Inle t R c1 /2

1250

Inle

t131

5

1200

C a s te r

65

Out

let6

33

O utle t N W 50

(72)

424

D uc t port O D 50

141Inle t N W 160

60


C ontrol pa ne l

E L C B

E MO

P owe r conne c tor30

100 70

30

N 2 s upply port


N 2 control va lve

207

R e gula tor

170

700

170*80*30

180


E MO

C ooling wa te r Inle t R c1 /2with s e lf-s e a l couple r

C ontrol pa ne l

1660

Inle

t172

0

1180

Out

let6

33

C a s te r

O utle t N W 50

D uc t port O D 50

355255Inle t N W 160

60

E MO


P owe r conne c tor

E L C B

P ipe fitting 1 /4N 2 s upply port80

182

N 2 control va lve


170*80*30

375

750

140

C ooling wa te r O utle t R c1 /2with s e lf-s e a l couple r

13

30

80

50

40

SDL25K

SDL40K SDL60K


e-catalog HCJ Ver1.1/06.6

All-purpose dry pump.High performance and low cost together in a compact, lightweightpackage.Smaller footprint enables easy installation anywhere.

- Innovative horizontal screw configuration in a compact design- Lightweight aluminum construction.- Applicable from light processes such as load rock and transfer, tolight etching processes.

HC

HC SeriesLight Conpact Dry Pump

LIGHTCONPACTDRYPUMPHCSERIES


Specification TableSpecification HC60A/B HC250 HC450Maximum Pumping Speed (L/min) 900 3,300 6,300(Upper 50Hz / Lower 60Hz) 1,100 4,000 7,600Ultimate Pressure (Pa) 1Maximum Inlet Pressure (Pa)Inlet Flange NW50 NW80Outlet FlangeWeight(Approx.) (kg) 77 160 195Electric Power SupplyPower in normal operation (kW)Electric Power Capacity (kVA) 3.0 5.1 5.8

2.1 2.5 2.9

Cooling Water SupplyPurge N2 Gas Supply (Type B only) 0-12SLM12SLM

NW40

3 phase AC200 50/60Hz AC220V 60Hz

3.5L/min and over

0.5Atmospheric pressure 1,300

NW40

Model

Pumping Curve(SP)

Pump Schematics (HC60)

Pump Schematics (HC250,HC450)





e-catalog HCJ Ver1.1/06.6HC



Dimension:mm

Inlet L3L1 L2Model

NW80HC 450

HC 250 NW50

120860 358

105750 265

W3W2W1

340190430

160400 315

C ooling water flow meter

N2 flow meter

C aster C ooling water inlet R c3/8

C ooling water outlet R c3/8R emote control connector

P ower connector N2 supply port R c1/4

N2 pressure gauge

R egulator

Duct OD50Inlet Outlet NW40

E LC B

C ontrol panel

720

750

(Inl

et)

778

750

(Out

let)

673540

104

L1

L365 L2

W1

W3

W2 155

745

170

C ontroller P C 100

20

11

222

240

90 6

2050

22010 10

5

2

204 78

Outlet NW40

(OP T ION)

S ilencer

Inlet NW40

Duct OD50

C ooling water flow meter

C oolin water outlet R c3/8R egulator for N2

C ooling water inlet R c3/8

S ignal connector

P ower connector

(attached to T ype B )

N2 supply port R c1/4

(attached to T ype B )

(63)

328

(Out

let)

497

(Out

let)

304

40

320

(Inl

et)

150

58

285

142.5142.5

(28)

25 23

5010

0

(63)

10

100

1000

10000

0.1 1 10 100 1000 10000 100000Pressure(Pa)

Pum

ping

Speed(L/min)

HC60(50Hz)HC60(60Hz)HC250(50Hz)HC250(60Hz)HC450(50Hz)

HC450(60Hz)

1000Pressure (Torr)

1001010.10.010.001

e-catalog KMBJ Ver2.0/04.6

- High efficiency motor and driving system realized significant downsize compare toconventional models.

- Canned motor is adapted to improve reliability.- Improvements of the driving system and mechanical efficiency allow minimizing the power.- Rotation speed control achieves continuous operation under the atmospheric pressure.- Synchronous motor enables consistent pumping performance at any power supply

frequency. (03 series)

KMB

KMB SeriesBooster Pump

BOOSTERPUMPKMBSERIES


Can be used in combination with the dry pumps to enhance pumpingcapacity.Rotational speed control enables operation from atmosphericpressure.

Specification TableKMB603 KMB1203 KMB2003

Maximum Pumping Speed (L/min)* 30,000Ultimate Pressure (Pa)*Maximum Inlet Pressure (Pa)Inlet Flange VG80 VG100 VG150Outlet Flange VF65 VF100 VF150Weight(Approx.) (kg) 85 110 230Electric Power SupplyPower in normal operation (kW)** 0.3 0.4 0.8Electric Power Capacity (kVA) 6.5 11.1Cooling Water SupplyPurge N2 Gas Supply

*The values shown here represent operation in combination with the dry pump as recommended by Kashiyama.

10,000 20,0000.5

0 or 20SCCM


3 phase AC200-220V 50/60Hz

4.03L/min and over

Specification Model

**Power at ultimate pressure.


Pumping Curve(SP)

Pump Schematics (KMB603,KMB1203)

Pump Schematics (KMB2003)

e-catalog KMBJ Ver2.0/04.6KMB



D ime ns ion: mm

V F 100 607 . 5 305746K MB 1203 V G 100

V G 80

Inle t

K MB 603

Mode l

V F 65

O utle t

596 457 . 5

L 1 L 2

230

L 3

O il dra in plug

Inle t

with P IP E -F IT T IN G 3 /8

C ooling wa te r O utle t

with P IP E -F IT T IN G 3 /8

C ooling wa te r inle tO utle t

O il le ve l ga uge

O il s upply plugwith P IP E -F IT T IN G 1 /4

N 2 s upply port

32

230

114

(Inl

et)

L 3

L 2

L 1

116

113

(Out

let)

27

7272





344

150 150

330

229 100 100

329

842

C ooling wa te r fe e d wa te r F IN E L O K 3 /8

O il le ve l che ck

172(

Inle

t)16

5(O

utle

t)

C ooling wa te r dra in outle t F IN E L O K 3 /8 O utle t V F 150

Inle t V G 150F lle r ne ck

10

100

1000

10000

100000

0.1 1 10 100 1000 10000 100000Pressure(Pa

Pum

ping

Spee

d(L/

mi

KMB603 (DP:SDE90)KMB1203(DP : SDE120)KMB2003(DP : SDE120)

1000 1000Pressure (Torr)

1001010.10.010.001


e-catalog MUJ Ver1.0/04.6

The world smallest and least power consumption.You can integrate into any equipment easily.

- Kashiyama ultimate space save design has realized the pumping speed of1660l/min with the small body 230 mm x 450 mm.

- The MU series are perfect for load locks, clean exhaust for transfer rooms andany light process application of semiconductor manufacturing.

MU

MU Series / For Tool Mount /

Micro Dry Pump

MU100 MU3001,660 5,000

NW50

60 100

1.5 0.5

NW25

MICRODRYPUMPMUSERIES


2.2 2.2+2.20.7 0.9

Specification TableModelSpecification

Maximum Pumping Speed (L/min)Ultimate Pressure (Pa)Maximum Inlet Pressure (Pa)

Inlet FlangeOutlet FlangeWeight(Approx.) (kg)

Power in normal operation (kW)Electric Power Capacity(kW)


Pump Schematics (MU100)

Pump Schematics (MU300)





e-catalog MUJ Ver1.0/04.6MU



520 55

0

199

62.5

22

115

96 . 540

14

25

150 150

50

40 40

2-M8 2-M8

85 . 5 25219 413

202 202

230

N 2 C ontrol V a lve

279450

109

(99)(102) 89

125

26

4293

35

4042

194194

P owe r S upply L E D (L E D 1 /gre e n)R un L E D (L E D 2 /gre e n)

E rror W a rning L E D (L E D 3 /ora nge )E rror A la rm L E D (L E D 4 /re d)

H a ndhe ld controlle rC a ble


N 2 R e gula torP owe r inputconne c tor(C N 1)

R e mote controlconne c tor(C N 2)

H a ndhe ld controlle rconne c tor(C N 3)

C ooling wa te r inle t R c3 /8( with s e lf-s e a l couple r)

C ooling wa te r outle t R c3 /8( with s e lf-s e a l couple r)

N 2 G a s inle t( with T ube F itting 1 /4 s tra ight)

Ma in s witch

(for ca s e purge )

R igid C a s te r( O D 40*4)

A djus te r( O D 24*4)

O utle t N W 25

Inle t N W 50B ox D uc t ( O D 50)

L ifting B olt(M8*4)

Ma in s witch

P owe r input

Inle t N W 50

O utle t N W 25

N 2 G a s inle t

R e gula torN 2 pre s s ure ga uge

H a ndhe ld controlle r

conne c tor(C N 1)R e mote controlconne c tor(C N 2)

( with T ube F itting 1 /4 s tra ight)

C a ble

H a ndhe ld controlle rconne c tor(C N 3)

230

275

450

R igid C a s te r ( O D 40*4)

6 25217 414

22

185

64 27

131

A djus te r ( O D 24*4)

C ooling wa te r inle t R c1 /4( with s e lf-s e a l couple r)

C ooling wa te r outle t R c1 /4( with s e lf-s e a l couple r)

22

(115) 11585

43

190202

818

33

90

33

902-M6

2-M6

76

P owe r S upply L E D (L E D 1 /gre e n)R un L E D (L E D 2 /gre e n)

E rror W a rning L E D (L E D 3 /ora nge )E rror A la rm L E D (L E D 4 /re d)

L ifting B ra cke t(*2)

a fte r ins ta lling the pump)(R e moving the bra cke ts is pos s ible

52

6637

13

60

(29)

(a tta che d to MU 100N )

(a tta che d to MU 100N )

89

125

26

Documents

Screw Dry Pump SDE Series - PolVac Corp All Pumps… · Energy-saving features combine with the reliability, SDE Series achieved lower running cost. - Advanced screw technology allows