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S300高速晶圆Sorter/EFEM
本公司的S300系列高速晶圆分拣机，采用独家专
利的核心部件，提供兼具高性能、低维修成本及
灵活的配件组合，是您最佳的晶圆传送方案。
分拣机可快速平稳地对晶圆进行转移、整理、分
割及合并等。
·高速机器手加双抓手、双对位器及双OCR，拣
片传送效率极大化，并能够双面读取晶圆ID。
·具特殊SoftTouch软接触的夹爪及对位器，可提
供高度安全、
无污染、高达
50μm／0.03°的
重现度。
·具HEPA -
High Efficiency
Particulate Air
Fan Filter Untis
(FFU) 高效颗粒
污染控制。
·可用FOUP、FOSB、SMIF及cassette。
·简易人机介面，可灵活设置运送规则。
·使用SECS/GEM 通讯
可升级无接触“SoftTouch”
三点真空预对准器
Copy right ®
2010-2016 Quartet M
echacnics. All rights reserved.R
ev 2016/10
技术参数
THIRD ANGLE PROJECTION
32
1924
AA
1842
860
SECTION A-ASCALE 1 : 8
REVISIONS
ECO REV. DESCRIPTION DATE APPROVED
D
C
B
A
B
C
D
12345678
8 7 6 5 4 3 2 1
E
F
E
F
REV
Sort
er H
TD
Sheet1 OF 1NOT TO SCALE
REVDWG. NO.
DSIZE
TITLE:
NAME DATE
MFG APPR.
ENG APPR.
DRAWN
SEE NOTESFINISH
MATERIAL
SURFACE FINISH
DIMENSIONS ARE IN INCHES.UNSPECIFIED DIMENSIONS ARE FROM THE SOLID MODEL.TOLERANCES: H11, h11,
IT II2
APPLICATION
SolidWorks File NamePROJECT
PROPRIETARY AND CONFIDENTIAL
THE INFORMATION CONTAINED IN THIS DRAWING IS THE SOLE
PROPERTY OF QUARTET MECHANICS ANY REPRODUCTION IN PART OR AS
A WHOLE WITHOUT THE WRITTEN PERMISSION OF QUARTET MECHANICS
IS PROHIBITED.
00
SEE NOTES
WEIGHT:
CHECKED
2343 Bering DriveSan Jose, CA 95131U.S.A.
UNLESS OTHERWISE SPECIFIED:
S. IVANKOV 1800/1/2
1800/1/2
1800/1/2
1800/1/2
Sorter HT
ANGULAR TOLERANCES: MACH 30'
THIRD ANGLE PROJECTION
32
1924
AA
860
1842
SECTION A-ASCALE 1 : 8
REVISIONS
ECO REV. DESCRIPTION DATE APPROVED
D
C
B
A
B
C
D
12345678
8 7 6 5 4 3 2 1
E
F
E
F
REV
Sort
er J
D
Sheet1 OF 1NOT TO SCALE
REVDWG. NO.
DSIZE
TITLE:
NAME DATE
MFG APPR.
ENG APPR.
DRAWN
SEE NOTESFINISH
MATERIAL
SURFACE FINISH
DIMENSIONS ARE IN INCHES.UNSPECIFIED DIMENSIONS ARE FROM THE SOLID MODEL.TOLERANCES: H11, h11,
IT II2
APPLICATION
SolidWorks File NamePROJECT
PROPRIETARY AND CONFIDENTIAL
THE INFORMATION CONTAINED IN THIS DRAWING IS THE SOLE
PROPERTY OF QUARTET MECHANICS ANY REPRODUCTION IN PART OR AS
A WHOLE WITHOUT THE WRITTEN PERMISSION OF QUARTET MECHANICS
IS PROHIBITED.
00
SEE NOTES
WEIGHT:
CHECKED
2343 Bering DriveSan Jose, CA 95131U.S.A.
UNLESS OTHERWISE SPECIFIED:
S. IVANKOV 1800/1/2
1800/1/2
1800/1/2
1800/1/2
Sorter J
ANGULAR TOLERANCES: MACH 30'
S300 Dual Wrist S300 Dual Arm
Standard Configuration PERFORMANCE
Model # S300
Wafer size Diameter 300mm
Carrier FOUP & SEMI-STD FOSB
Platform Auto Port # 3
Specification Auto Port with RFID & Mapper; class 10 cleanliness, ESD
Speed Throughput 200~400 WPH
Component Robot Dual Wrist/ Dual Arm
End Effector Vacuum, optional Edge grip (2 ea)
Aligner Vacuum, optional Edge grip (2 ea)
OCR 2 ea
Software OS Manufacturer's standard operation system
User Interface English or/and Chinese GUI
Equipment Interface CAN, TCP/IP or RS232
Factory Interface SECS/GEM communication
QUARTET MECHANICS INC. www.quartetmechanics.com
1040 Di Giulio Ave, Ste 100, Santa Clara, CA 95050, USAP +1.408.564.8901
Email: [email protected]
