REVISION - cores.research.asu.edu Operating... · Web viewDocument Owner: Release Date: Updated 02/072013 EH. Adding 06/10/13 sa. 10/9/13 sa Document Title: AZORES STEPPER. Document

FLEXIBLE DISPLAY CENTER

Document Owner: Release Date:

Updated 02/072013 EHAdding 06/10/13 sa10/9/13 sa

Document Title: AZORES STEPPER

Document No: FDC-OP-0000000000

Document Rev: 01

Arizona State University – Flexible Display Center confidential information. Hardcopy may not be current document.

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SPECIFICATION FORMAT:

EQUIPMENT MANUFACTURER: Rudolph Technologies (formerly Azores)

EQUIPMENT MODEL: Azores 5200 Panel Printer

ASU ASSIGNED TOOL ID NUMBER: 6148168

APPLICATION PROGRAM(S) AND REVISION: Microsoft Word 2003

SIGNATURES FOR RELEASE OR HISTORY ON FILE IN PRODUCT SPECIFICATIONS

Confidential Proprietary

ORIGINATOR: Susan Allen The information contained in this document is the property of the Flexible Display Center at Arizona State University. No information contained in this document may be disclosed outside of the Flexible Display Center at Arizona State University at any time. RESPONSIBLE ENGINEER: Scott Ageno

DIRECTOR OF OPERATIONS: Shawn O’Rourke


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Table of ContentsTable of Contents.....................................................................................................................................................2List of Figures..........................................................................................................................................................21.0 SCOPE.......................................................................................................................................................32.0 EQUIPMENT AND SUPPLIES................................................................................................................33.0 SAFETY.....................................................................................................................................................34.0 OPERATING PROCEDURES..................................................................................................................35.0 LOG SHEETS + SEPARATE DOCUMENTS..........................................................................................96.0 ROUTINE MAINTANENCE..................................................................................................................107.0 ILLUSTRATIONS AND PHOTOS.........................................................................................................308.0 ADDITIONAL REFERENCE SPECIFICATIONS/MATERIAL...........................................................339.0 TROUBLESHOOTING/ERRORS..........................................................................................................35

List of Figures

Figure 6.1 Blank Page for Illustration #1................................................................................................................8Figure 6.2 Blank Page for Illustration #2................................................................................................................8Figure 6.3 Blank Page for Illustration #3................................................................................................................8


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1.0 SCOPE1.1 Definitions

1.2 Documents and Manuals Referenced

2.0 EQUIPMENT AND SUPPLIES 2.1 Test Equipment

2.2 Standard Product + Supplies

2.2.1 Black Pen

2.2.2 Scotch Brite

2.3 Parts and Consumables List (Supplier Information)

2.3.1 Lamps

3.0 SAFETY3.1 Additional Reference Specification

3.1.1 MSDS (located

3.1.2 FDC Safety Specification #

4.0 OPERATING PROCEDURESNOTE: This tool runs G-Line wavelength.


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4.1 Start up Procedure

4.2 Turn on Lights – located at the top front in the center of the tool on the top control panel.

4.3 Open all Doors (refer to step 4.2)

4.4 Check in the tool for plates and pins and chucks, IPH is close to front.

4.5 To Open / Close Doors

4.6 Press peddle on the floor with your foot to open Bottom and Top doors

4.7 The Left Green Square Button when pushed opens the Upper Top Left Door.

4.8 The Right Green Square Button when pushed opens the Top Right Door

4.9 The Center top door opens manually – lift up

4.10 The Bottom Right Door opens manually by opening the top door and then pushing the release button located to the left inside and push the door downward. To close the door lift up until the window locks in place

4.11 The Left Red Square Button closes all of the doors.


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4.12 Do Daily checks at the beginning of the shift –

4.13 Auto Cal (refer to step ___) this is done first thing in the morning

4.14 Best Focus (refer to step__) this is done when needed

4.15 Reticle Check Best Position (refer to step ___) this is done when needed

4.16 Get Cassettes Ready (at touch screen)

4.17 Load Plate in Cassette with notch on panel to the front right hand side – top - standing in front of the cassette with metal rails facing you.

4.18 Load slots 1-10 ONLY

4.19 Place cassette on wheel track – sender.

4.20 Unload receiver cassette.

4.21 Place cassette so that the metal bar goes in notch in cassette.

4.22 To Check Reticles and Barcodes NOT DONE VERY OFTEN skip to 4.37

4.23 On touch screen from the Main menu

4.24 Press Reticle Library

4.25 NOTE: DO NOT PRESS VERIFY RETICLES unless you have a long time to wait.

4.26 Press Verify

4.27 Check Barcodes

4.28 Enter Box #

4.29 Press Done

4.30 To See What Is On The Reticle Wheel

4.31 On the computer on the sheltool-/bin/ash screen

4.32 Type show_rets

4.33 Press Return

4.34 Unload Reticle

4.35 On the touch screen go back to Main

4.36 Manual Ops

4.37 Reticle

4.38 Reticle Library

4.39 If more than one Reticle is on the wheel press Utilities and then Auto Unload

4.40 If only one Reticle is on the wheel press Unload Wheel

4.41 Load Reticle

NOTE: Can be loaded from the computer <0> type in - ld_chuck 0,3 (0 is the camera and 3 is the wheel slot).


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4.41.1 On the touch screen

4.41.2 Touch Manual Ops

4.41.3 Touch Reticle

4.41.4 Reticle Library

4.41.5 Load Wheel

4.41.6 Enter # __ Reticle box (example 19 is the PTR reticle)

4.41.7 Done

4.41.8 Type #__ of slot on wheel to load onto (example 3 is for the PTR reticle)

4.41.9 Type Name of Reticle (example: PTR)

4.41.10 Done

4.42 Continue Getting Cassettes Ready To Run (at touch screen) -

NOTE: Turn screen on by Touching the Corner of the Display Screen.

4.42.1 Press Stop – if it hasn’t been pressed.

4.42.2 Edit Cassette

4.42.3 Make Full

4.42.4 Click on slots where no plates are present to run on the load side

4.42.5 Press Unload side.

4.42.6 Press Make Empty

4.42.7 Place empty cassette on receiver side

4.42.8 Press Done – Verify screen for correct count


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4.43 Load Job / Select Program to run (at touch screen)

4.43.1 Touch lower right corner to wake up monitor.

4.43.2 Touch Job Execution

4.43.3 Touch Load Job

4.43.4 Type in Job Name

4.43.5 Press Done

4.43.6 Press Set Params

4.43.7 Press Set # of Plts

4.43.8 Type in # running

4.43.9 Press Done

4.43.10 Press Back

4.43.11 Open Doors – check pins, for panels, forks facing inward (refer to steps 4.2_)

4.43.12 Close Doors (refer to step 4.2_)

4.43.13 Run Job

4.43.14 TEMP. problem – do = No Initial, Quit, Run Job again

4.43.15 At the Handler screen - Verify slots that have panels loaded to what is on the screen

4.43.16 Operate

4.43.17 Yes – even if job has not been selected

4.43.18 Watch the Alignment marks on the monitor in chamber if Aligning Note: If a plate does not run for any reason it will be rejected into the receiver cassette and a red line will appear showing which panel did not expose on the Handler screen.4.43.19 When All plates have been exposed and in the receiver cassette press OK

4.43.20 Press Stop

4.43.21 Remove the Receiver cassette

4.43.22 Unload the panels

4.43.23 Develop the panels (refer to Develop Spec # )

4.44 Load / Remove Reticle Manually in Reticle Box

NOTE: Green Indicator lights show reticles present and Red Indicator lights show no reticle present.IMPORTANT: In Slot #3 the PTR Reticle is kept – used for tests


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4.44.1 At the touch screen Press Main

4.44.2 Press Manual Ops

4.44.3 Press Reticles

4.44.4 Press Reticle Library

4.44.5 Press Unload Box

4.44.6 Press # wanting to remove

4.44.7 Press DoneNOTE; Once reticle loader moves out of the way green light flashes4.44.8 Push Black Button Down by # wanted to remove or Add.

4.44.9 Remove or Add Reticle by pulling out the reticle stack or pushing the reticle stack in.

4.44.10 Want reticle stack to be lit green or red – do the following if it is not:

4.44.11 Status

4.44.12 Stack Status

4.44.13 Quit

4.44.14 Press Main

NOTE: In Reticle Directory you can Verify, UnloadIn Utilities you can get a list of reticles loaded

4.45 To Print

4.45.1 Double left Click on Camera icon at the bottom of the screen

4.45.2 Click on Snap

4.45.3 Click on Discard snapshot

4.45.4 Move the arrow to the window with the data and click on the screen

4.45.5 Click on Print to print the data on the screen.

4.45.6 Click on Close

4.45.7 Press Return – to get 0 prompt


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4.46 Shut down for the Night

4.46.1 Turn Lights Off on the top control panel

4.46.2 Turn Off the monitor on the computer4.47 Fix Loose Reticle on Wheel

4.47.1 On the touch screen go to Main Menu

4.47.2 Manual Ops

4.47.3 Reticles

4.47.4 Manual Operations

4.47.5 #_ slot

4.47.6 Type in PTR

4.47.7 Done

4.47.8 Type PTR

4.47.9 Done

4.47.10 Hold Reticle in position – push Reticle against the wheel VERY CARFULLY (can break Pelical membrane)

4.47.11 Touch Continue - the orange box on screen while holding the Reticle in place

4.47.12 Once Vacuum is set the screen will display

4.47.13 Unload Reticle and Reload (refer to steps 4.5 and 4.6)

5.0 LOG SHEETS + SEPARATE DOCUMENTS5.1 Data Entry

5.1.1 At the computer - Log In

5.1.2 Open AZORES Control Charts

5.1.3 Enter Uniformity, DAC, Auto Focus (don’t enter negative sign)

5.1.4 Go to Summary when done

5.1.5 Click Here to Update

5.1.6 Click on plots and verify in spec.


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6.0 ROUTINE MAINTANENCE6.1 Morning Checks

6.1.1 Check the temperature of the Chamber (temp. should be 21 – upper temp. actual). This is located on the top front of the tool.

6.2 Clean Tool - Weekly Checks (Done when Needed – not often can create problems)

6.2.1 At the touch screen from the Main Menu press Stage Position

6.2.2 Press Hand Load to move stage front for easy access.

6.2.3 (?get to XY stage Move Options)

6.2.4 Wipe the Banking Pins (push the brass bearings toward the outer edge) on the Plate Stage use Acetone and Q-Tip.

6.2.5 At the computer type in <0> no hold_all

6.2.6 Using a soft wipe and IPA wipe down the following: Temperature plate, Vacuum Pucks on Paddles (Do not clean Pucks on Handlers, if these pucks get dirty clean with DI water only).

6.2.7 Using a soft wipe and IPA wipe down the following: , Granite, All flat surfaces (be careful not to touch the Mirror (white strip).

6.2.8 In back of tool remove doors____

6.2.9 Wipe down using soft wipe and IPA _____

6.2.10 Vacuum Pucks

6.3 Verify What Reticles are on the wheel

6.3.1 On the computer on the sheltool-/bin/csh screen

6.3.2 Type show_rets

6.3.3 Press Return


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6.4 Put the Calibration (PTR) Reticle on the Wheel


6.4.2 Press Reticle

6.4.3 Reticle Library

6.4.4 Load Wheel

6.4.5 Enter Reticle Box #19

6.4.6 Press Done

6.4.7 Type # 3 of wheel position

6.4.8 Enter Reticle Name PTR

6.4.9 Press Done

6.5 Run Auto Cal (done at touch screen) Do every morning

6.5.1 Check to insure PTR Reticle is on the wheel (refer to step _6.4__)

6.5.2 Press Main

6.5.3 Press Calibrate

6.5.4 Automatic Scenario

6.5.5 Close Doors if open

6.5.6 Wait until Done, approx. 2-3 minutes – Baseline Spec. is 0.1

6.5.7 Press Quit (will be displayed)

6.5.8 Press Back to get back to the Main menu

6.6 Run Best Focus (Done on Monday morning SPC)

NOTE: NEVER do #5 – Bootstrap Calibration

6.6.1 At the computer <0> type unld_chuck on the sheltool-/bin/csh (Scroll Script Folder)

6.6.2 Press Return

6.6.3 Move the arrow on the screen to the calibration screen. (RMI)NOTE: May have to type Q to go back to the Setup and Calibration Scenarios (Single Camera) screen


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6.6.4 On the computer type #6 – Camera Fine Tuning

6.6.5 Type #3 – Find Right Camera Best Focus

6.6.6 Type r – Return to Previous Menu or Collect the Data and Run Analysis

6.6.7 Wait – approx 3 minutes – will display Script Complete, hit (cr) to continue

6.6.8 Press the Return key on the keyboard

6.6.9 Record – New Best Z Camera DAC setting and New Best Center Auto Focus Pixel settings in the log book

6.6.10 Press the Return key – to default to N for Add Focus Plane Pixels offset

6.6.11 Press the Y key – to write the changes to the data base

6.6.12 Press the Return key

6.6.13 Wait – approx. 15 seconds - screen will change when done.

6.6.14 Open bin/csh window

6.6.15 Type focusplot rookmid.r.auto

6.6.16 Return

6.6.17 Left click on Print at the top left of the screen – wait for printer to print approx. 1 min.

6.6.18 Move arrow to the top of the blue background at the top of the screen by Sunplot

6.6.19 Right click and hold

6.6.20 Click on Quit

6.6.21 Left click on the left corner and close bin/csh window

6.6.22 Punch holes in the copy and place copy in the Book

6.6.23 Skip to step 6.8

6.7 Reticle Chuck Best Position (Done when needed not done much anymore)

6.7.1 Go to sheltool-/bin/csh screen – place arrow on window

6.7.2 Type unld-noret

6.7.3 Press Return

6.7.4 Open RMI window on the computer if needed otherwise place arrow on the window

Note: Q will Back Up the Screen to Setup and Calibration Sceneries (Single Camera)


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6.7.5 Type #3 – Fine Camera Set-Up Wheel

6.7.6 Type #6 – Find and Adjust Right Camera Reticle Chuck Best Position

6.7.7 Type r – Collect the Data and Run Analysis

6.7.8 Wait Approx. 5 minutes – screen will display Script complete when done.

6.7.9 Press Return

6.7.10 Y – Update the Optical Axis Position

6.7.11 Press Return

6.7.12 Y – Correct the Chuck Theta Error

6.7.13 Press Return

6.7.14 Y- Correct the Chuck Mag and Trap Errors

6.7.15 Press Return

6.7.16 Double left Click on Camera icon at the bottom of the screen (ONLY if a print out wanted)


6.7.18 Click on Discard snapshot

6.7.19 Move the arrow to the window with the data and click on the screen

6.7.20 Click on Print to print the data on the screen.

6.7.21 Wait approx. 1 minute for printing to start.

6.7.22 Write the date on the print out.

6.7.23 Click on Close

6.7.24 Press Return – to get 0 prompt

6.8 Uniformity (Done Monday morning SPC)

Note: Spec is 6.0 Percent6.8.1 On the computer move the arrow to the sheltool-/bin/csh screen.

6.8.2 Move the arrow to the RMI screen (Calibration Screen)

6.8.3 Press Return


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6.8.4 Type Q – Setup and Calibration Scenarios (Single Camera Screen)

6.8.5 Type #2 Illuminator Set-Up

6.8.5.1 NOTE: For new Lamp do #3 Peak

6.8.6 Type #4 Measure Right Camera Illuminator Uniformity

6.8.7 Type r – Collect the Data and Run the Analysis

6.8.8 Wait approx. 15 minutes – Script complete will be displayed on screen when done.

6.8.9 Press Return when completed

6.8.10 Record Uniformity reading in log book

6.8.11 Print out Uniformity Data:

6.8.12 Click on the Snapshot (Camera icon) to open


6.8.14 Click on Discard Snapshot

6.8.15 Move the arrow on the Calibration screen and left click mouse button

6.8.16 Click on Print – wait approx. 30 sec.

6.8.17 Close snapshot by clicking on the left corner

6.8.18 Write the date on the print out from the printer.

6.8.19 Open bin/csh window located at the bottom of the screen (if bin/csh is not at the bottom of the screen refer to step 9.0

6.8.20 Place arrow on this screen

6.8.21 Type uniwave

6.8.22 Return

6.8.23 Type r

6.8.24 Return

6.8.25 Press Control D after the plot shows up on the screen

6.8.26 Type y – Do you want a hard copy? (if a print out is needed otherwise press return)

6.8.27 Return

6.8.28 Write the date on the print out of the Uniformity graph.

6.8.29 Move the arrow to bin/csh window to close

6.8.30 Left Click at the left top corner to close the window


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6.8.31 Place the arrow on the sheltool….calibration screen

6.8.32 Press Return

6.8.33 Place arrow on the sheltool/bin/csh screen <0>

6.8.34 Press Return (for prompt)

6.8.35 Type unld_noret

6.8.36 Press Return

6.8.37 Unload Reticles back to boxes:

6.8.38 At the touch screen press Main


6.8.40 Press Utilities

6.8.41 Press Auto Unload

6.8.42 Record all of the data in the log book in the computer (located by the 8800 coater) (Refer to step 5.1)

6.9 Banking – Offsets (Not done anymore – per Jesmin data not needed 2012) SKIP TO 6.10

6.9.1.1 NOTE: Done every Monday

6.9.2 Load 10 panels in the send cassette (panels are numbered – located on rack shelving)

6.9.3 Set up 10 panels to be run on Azores

6.9.4 Load the job BANK-L2

6.9.5 Set plts (10)

6.9.6 Run Job

6.9.7 Write down X, Y and Rotation offset numbers (can write down all 6 numbers)

6.9.8 When done switch panel carts and run job PASS-THRU this will put the panels back in the cassette correctly.

6.9.9 Put the cassette back in its holding station.

6.9.10 Enter data in the computer by going to Operation, Photo, Gen ll SPC, Azores SPC, IPH + Banking SPC

6.9.11 Enter today’s date the first number is X the second number is Y and the third number is Rotation.

6.9.12 Click on Summary

6.9.13 Click on Update

6.9.14 Click on File


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6.9.15 Click on Save

6.9.16 Print out graphs

6.9.17 Exit/close the screen

6.10 Precision + Stitching (Done Monday morning SPC)

6.10.1 Remove Sender Cassette from Stepper

6.10.2 Place 1 new coated plate in the bottom slot (flat corner to the right of you)

6.10.3 Place cassette on the Sender – make sure cassette is seated properly

6.10.4 At the Touch Screen – touch Main

6.10.5 Press Job Execution

6.10.6 Press Load Job

6.10.7 Press screen and type in PSO-L1 (manual load – box 19, wheel position 3)

6.10.8 Press Done

6.10.9 Press Set Param


6.10.11 Press #1 – one plate to be run only

6.10.12 Press Done

6.10.13 Press Back

6.10.14 Press Run Job

6.10.15 Program Handler – at wafer handling screen

6.10.16 Press Edit Cassette

6.10.17 Press Load

6.10.18 Select locations of the plates to run on the screen

6.10.19 Press Unload


6.10.21 Press Done – wait for reticles to load on the wheel – if not completed

6.10.22 Press Operate

6.10.23 Press Yes

6.10.24 When plate is completed an alarm will beep

6.10.25 Press Ok

6.10.26 Press Stop


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6.10.27 Unload the plate from the receiver cassette – be careful to keep right side up.

6.10.28 Develop the 1 plate on the EVG Developer – job to run is DAS Standard Process

6.10.29 Same plate to be run with the overlay job.6.11 Overlay (Done Monday morning SPC)

6.11.1 Load the same plate that was used for Precision in the sender cassette – slot 1 on the Azores send cassette making sure the photoresist side is up.

6.11.2 At the touch screen Press Back to Main

6.11.3 Press Job Execution

6.11.4 Press Load Job

6.11.5 Type in PSO-L2 (reticle will still be on the wheel from box 19)

6.11.6 Press Done

6.11.7 Press Set Param


6.11.9 Type #1

6.11.10 Press Done

6.11.11 Press Back

6.11.12 Press Edit Cassette at wafer monitor

6.11.13 Press Load

6.11.14 Touch screen indicating where plate is loaded to run (bottom #1 slot)

6.11.15 Press Unload


6.11.17 Press Done

6.11.18 On the touch screen press Run Job

6.11.19 At the Cassette monitor Press Operate

6.11.20 Press YesNOTE: Plate will align to the previous crosses – watch the monitor in the tool.

6.11.21 When complete an alarm will sound Press Ok

6.11.22 Press Stop

6.11.23 Unload the Plate from the receiver cassette

6.11.24 At the Sun ComputerPress Return for a <0> prompt


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Type in unld_noretPress Return6.11.25 Develop the plate – job to run is Standard Process

6.11.26 Inspection – Overlay the Right Die and Precision and Stitching the Left Die’s

6.11.27 Place the plate on the Olympus Microscope – the flat corner will be located at the lower left – butt edges up against the pins on the stage.

6.11.28 Inspection: Place the plate on the Olympus Microscope – the flat corner will be located at the lower left – butt edges up against the pins on the stage.

6.11.29 For Precision and Stitching the Left Die’s will be recorded (only die 1, 3, 5 are read)

Stitching will be read for the Vertical on the Left Die as well in the same area as Precision and the Horizontal Stitching is at the right side of that die as well.

6.11.30 Move to the left die (1) at the top of the plate

Die 1 Die 2

Die 3 Die 4 Die 5

6.11.31 Move objective to the middle – top of the die and look for R01, C64

Refer to 7.1, 7.2, 7.3 photo of location to be recorded.

6.11.32 Create a folder for photos to be put into.

6.11.33 Open Operation server (Q)

6.11.34 Open Photo

6.11.35 Open Gen 11 SPC

6.11.36 Open Azore SPC folder

6.11.37 Create New Folder with a title of the date (example: 012117 PSO CD day/month/year Prescision/Stitching/Overlay)

6.11.38 Take photo and save 2 times name PV1,SV1 for each die (do for die 2 and 3 as well example PV2 etc, PV3 etc)

6.11.39 Taking the same photo Click on Edit and Rotate Right then save name PH1(do for die 2 and 3 as well example PH2 etc, PH3 etc)

REMEMBER: Stitching Horizontal is the Left Die move to the right upper corner of the die and then go down to R01, C64

Take a photo of the Stitching Horizontal lines, Click on Edit and Rotate Right then save name as SH1, (see photo 7.2 for location) Take a photo of the Stitching Horizontal lines for the next two location, Click on Edit and Rotate Right each of them labeling them accordingly SH2, for the second location and SH3 for the third location.


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NOTE: Refer to photo 7.2 for location

6.11.40 Use objective 5

6.11.41 Open Spot Advance

6.11.42 Take photo

6.11.43 Save As

6.11.44 Repeat same locations for each die 1, 3 and 5 repeat steps 6.9.45 to this step and save photos for Overlay using the Right Die

Die 1 Die 2

Die 3 Die 4 Die 5

6.11.45 Inspect and take photos.

6.11.46 Take 1 photo and save the first photo as OV1, taking the same photo and Click on Edit and Rotate Right then name and save as OH1 for die 1 repeat for die 2 and 3 (OV2 etc, OV3 etc)

NOTE: There will be a total of 6 photos OV1 through OV3, OH1 through OH3 (Overlay Vertical and Horizontal for Die 1, 3 and 5).

6.11.47 When all data is collected close the window

6.11.48 Remove the plate from the microscope

6.11.49 Place the plate in the cassette on the rack marked to be Asher

6.11.50 Unload all of the reticles

6.11.51 At the touch screen Press Manual Ops (if not displayed press Back or Main)

6.11.52 Press Reticles

6.11.53 Press Reticle Library

6.11.54 Press Utilities

6.11.55 Press Auto UnloadNOTE: All of the reticles should remove and placed back in the boxes automatically.NOTE: Once all the reticles are off continue with step 6.11 finishing the data collected


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6.12 Data from Precision, Stitching and Overlay Saved

6.12.1 On the computer by the microscope:

6.12.2 Log ON

6.12.3 Open operations on ‘Operation Server 01 (fdcsrvfs01)’ (Q:)

6.12.4 Open Photo

6.12.5 Open Gen 11 SPC

6.12.6 Open Azores SPC

6.12.7 Open today’s dated folder (example: 012117 PSO CD) - view

6.12.8 Review all Pictures open the screen full.

6.12.9 Make sure all horizontal photos have been rotate the 90 degrees, Close file

6.12.10 Click on Scope Measure 20050830

6.12.11 Go back one folder

6.12.12 Open Today’s Date PSO CD folder

6.12.13 Click on OK for CD Summary

6.12.14 Click on and open the first photo

6.12.15 Move the screen so you see the image (photo)

6.12.16 Click and hold on the screen and drag the invisible box over the lines (click at upper left corner and drag to bottom right corner of lines)

NOTE: Do not put rounded edges in the boxIMPORTANT : Make sure there are measurement readings at the bottom of the log if not repeat invisible box over the lines may need to change size of box.


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6.12.17 Click on Next Image

6.12.18 Repeats for the next photo for a total of 18 photo’s

6.12.19 Click on Exit To Windows

6.12.20 Open CD Summary

6.12.21 Go up one folder

6.12.22 Open folder at the bottom of the photo’s

6.12.23 Open PSO Template 3 data points

6.12.24 Enable Macros

6.12.25 Open Excel CD Summary with today’s date

6.12.26 Click on Hold and cover all of the data points (to be copied) A2

6.12.27 Click on Edit

6.12.28 Click on Copy

6.12.29 Click on PSO Template at bottom at the screen

6.12.30 Click on Data at the bottom of the screen

6.12.31 Click once on Paste Here (B2 click only on this square)

6.12.32 Click on Edit

6.12.33 Click on Paste

6.12.34 Click Windows symbol

6.12.35 Click on Save As

6.12.36 Open Today’s Folder

6.12.37 Click on Summary Excel CD and change name to Summary_2

6.12.38 Open AZORES SPC

6.12.39 Open 03282012 PSO SPC

6.12.40 Click on Option & Select (enable this content)

6.12.41 Start at CD

6.12.42 Enter Data

6.12.43 Click on PSO SPC Template 3

6.12.44 Copy CD data

6.12.45 Open 03282012 PSC SPC

6.12.46 Click on first space


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6.12.47 Paste Special

6.12.48 Click Value

6.12.49 Click on OK

6.12.50 Repeat 6.12.47 for Precision, Stitching and Overlay

6.12.51 When done click on Summary – this will update all data click here to update workbook

6.12.52 Right click on Directory in upper left corner in the upper left corner of the computer screen

6.12.53 Click on Exit Excel located at the bottom of the window right side

6.12.54 Click on Yes to All

6.12.55 Close out screen

6.12.56 Check plots Click on PSO SPC Template 3 look at each graph

6.12.56.1 NOTE: Stitching and Overlay is 1/2um spec and Precision is 1/4um spec

6.12.56.2 NOTE: For Overlay adjustment tell Engineer

6.13 Resolution6.13.1

6.14 Registration6.14.1

6.15 To bring Stage out from under the Exposure Lamp

6.15.16.16 Back UP when prompted to do so.

6.16.16.17 SPC Particle check

6.17.16.18 Programming Procedure

6.18.16.19 To Change Exposure

6.19.16.20 Set-Up Program

6.20.1


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6.21 Editing a Job

6.21.1 At the computer open PCAD screen by clicking on the folder.

6.21.2 Click on File

6.21.3 Click on Open Layer

6.21.4 Choose Job to Run (example RAS2-ALL) and (ALL-TEST)

6.21.5 Click on Open

6.21.6 Make changes needed to job……ADD INFO here

6.21.7 File

6.21.8 Compile

6.21.9 Compile

6.21.10 OK – Wait a second

6.21.11 OK – to Compile and Exported Job Name6.22 To Fix Plate Size in job ADD INFO here

6.22.1 View

6.22.2 Plate Width 470

6.22.3 Plate Height 370

6.22.4 Ok or Enter ?

6.22.5 File

6.22.6 Save layer

6.22.7 Save

6.22.8 Yes – override

6.22.9 Compile

6.22.10 Compile

6.22.11 Ok -

6.22.12 Ok -

6.22.13 Ok -6.23 To Manually Unload Panels from tool – Load side

6.23.1 Unload the Panel using the front screen in Reticle Directory

6.23.2 Open Doors (refer to step )

6.23.3 Manually remove plate from Temp. chuck


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6.23.4 Press the white area to continue on the touch screen

6.23.5 If plate loads wrong the second time touch last plate on touch screen

6.23.6 Once screen indicates processing complete

6.23.7 Open all doors check all plates are off.

6.23.8 Remove sender cassette.

6.23.9 Press Stop on handler screen

6.23.10 Press Scenario

6.23.11 Press Load Side

6.23.12 Robot

6.23.13 Put cassette A

6.23.14 Do Robot Op

6.23.15 Catch by hand the plate coming out at the sender

6.23.16 Press Done

6.23.17 At the touch screen press Manual Ops

6.23.18 1PH (Internal Plate Handler)

6.23.19 Init.

6.23.20 Load Side

6.23.21 Initialize External Interface

6.23.22 At the Handler screen

6.23.23 Press Load Side showing

6.23.24 Robot Showing

6.23.25 Stop

6.23.26 Do Robot Op

6.23.27 Vac. Off showing

6.23.28 Home

6.23.29 Touch Do Robot Op6.24 Lamp Change – Removing old lamp

6.24.1 Keep Power Supply and Cooling controller ON for now

6.24.2 Press Lamp OFF (located in back left of machine in the Power supply panel) wait 20 minutes for Lamp to cool

6.24.3 Feel Exhaust Duck in back of tool that it is cool.


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6.24.4 When Lamp is cool Flip Breaker OFF for Power (located in indented box in the power supply panel)

6.24.5 Flip Cooling Controller OFF

6.24.6 Flip Breaker OFF on Power – located at the bottom of the panel labeled Right Illuminator

6.24.7 Take off back panel door located on the left of tool (lamp housing)

6.24.8 Unscrew back panel – turn panel door upside down and place edge on floor.

6.24.9 Remove inside panel by unscrewing 6 screws by hand

6.24.10 Place door panel inside on the bottom of the camber so that no screws or anything falls down

6.24.11 Using a wrench remove the ground cable screw (lead screw) on the lamp.

6.24.12 Remove the ground cable.

6.24.13 Unscrew the Lamp from the housing – hold lamp securely not to hit the sides – remove straight down ward and tilt slightly and out. NEVER TOUCH THE GLASS ON THE LAMP.

6.25 Lamp Change – Installing new lamp

6.25.1 Remove the lamp from box – handle carefully – do not touch glass

6.25.2 Place the new lamp in the center of the ellipse

6.25.3 Screw Lamp into the top of the lamp motion assembly – hand tighten.

6.25.4 Attach ground cable lead screw and tighten with fingers then tighten slightly with wrench.

6.25.5 Remove Back cover from inside that is lying on the bottom.

6.25.6 Shine flash light down on the mirror and check for dirt/particles. If it is dirty wipe down with 50% IPA on a soft cloth. Wipe gently and in one sweep motion.

6.25.7 Recheck using the Flashlight for dirt particles.

6.25.8 Put back (silver cover) On and tighten screw by hand onlyNOTE: Behind the door is located a shut off safety switch which will shut off the lamp.


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6.25.9 Place Back (Black) cover on Lamp housing – tighten screws by hand

6.25.10 Close Top Hatch

6.25.11 Flip ON Right Illuminator Power

6.25.12 Flip Breaker - Cooling Controller ON

6.25.13 Flip Lamp Power Breaker Run (black) up – ON (located in indented box)

6.25.14 Press Lamp ON

6.25.15 Zero out the Lamp Hours

6.25.16 Wait 15 minutes to stabilize

6.25.17 Continue with step 6.25 (peak lamp)

6.26 Peak Lamp

6.26.1 <0> on computer type unld_noret – this will unload any reticle.

6.26.2 At touch screen – Main Menu

6.26.3 Calibrate

6.26.4 Right Illuminator Peak

6.26.5 Wait for message to come up – Adjust Illuminator to max ---NOTE: Can be done at the computer by typing

Type #2 - Illuminator Set-UpType #3 - Peak Right Camera Illuminator LampType r – to run


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6.26.6 Using the lamp meter to peak do the following on meter:

6.26.7 Plug in the Meter

6.26.8 Flip to DC

6.26.9 Flip to FIXED

6.26.10 Offset – ON

6.26.11 Power – ON

6.26.12 Flip toggle switch to X select

6.26.13 Set meter to 0 using the control knob (offset knob)

6.26.14 Set gain to 5X

6.26.15 Adjust meter to 0

6.26.16 Located in the cabinet at the top behind the top panel in the center – Loosen the locking knob

6.26.17 Sideways are X and Y

6.26.18 Peak the lamp by using these screws (note X and Y do not work on the tool so you have to move the lamp housing unit – watch the meter and peak the lamp.

6.26.19 Open the door for only 45 seconds then shut the door for 15 seconds and then adjust again.

6.26.20 Repeat opening and closing door and adjusting until the lamp is peaked.

6.26.21 Do Z peak with the spoke knob (only after X and Y are in)

6.26.22 Do not decrease 5% as it states on the meter instructions – leave lamp peaked

6.26.23 Place doors back on by removing the bottom door and put top door on then replace the bottom door on.

6.26.24 Flip the meter OFF – (this takes 2 DD batteries)

6.26.25 On the touch screen – touch QUIT

6.26.26 Run the Calibrations (refer to step 6.0).


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6.27 Reboot the Azores

6.27.1.1 NOTE: Remove all plates from the tool before reboot

6.27.2 On the touch screen press Main

6.27.3 Press Reticle


6.27.5 Press Reticle

6.27.6 Unload Chuck

6.27.7 Flip off Y

6.27.8 Flip off X

6.27.9 Flip on X

6.27.10 Flip on Y

6.28 After Reboot Do the following:

6.28.1 If you Stage Origin do Course, Center, Theta

6.28.2 Load the PTR Reticle on the wheel 3

6.28.3 On the computer open RMI Calibration Folder

6.28.4 Place the arrow in the box

6.28.5 Click on #1 – Gross Camera Set-Up

6.28.6 Click on #4 – Find and set Right Camera Course, Center and Theta

6.28.7 R – Collect the data and Run the Alalysis (Takes approximately 3 minutes)

6.28.8 Type Q

6.28.9 Return to Backup

6.28.10 When done Press Return

6.28.11 Run Calibration

6.28.11.1 NOTE: If the Theta is not working right Type S (Saving data Base to host)


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6.29 Complete Power Down and Power Up-Restart of the Azores

6.29.1.1 NOTE: Remove all plates from the wheel before reboot

6.29.2 Complete Power Down

6.29.2.1 On the touch screen press “Main” or “Back” to display Main Menu

6.29.2.2 Press “Manual Ops”

6.29.2.3 Press “Reticles”

6.29.2.4 Press “Reticle Library”

6.29.2.5 Press “Utilities”

6.29.2.6 Press “Auto Unload”

6.29.2.7 Wait for all reticles to be unloaded from wheel and into appropriate boxes

6.29.2.8 UV Lamp Shut Down

6.29.2.8.1 Keep Power Supply and Cooling controller ON for now

6.29.2.8.2 Press “LAMP OFF” (located in back left of machine in the Lamp Power Supply Tower) wait 20 minutes for Lamp to cool

6.29.2.8.3 Feel Exhaust Duck in back of tool and make sure it is cool to the touch

6.29.2.8.4 When Lamp exhaust duck is cool Flip Breaker labeled “POWER” to OFF on the MECURY LAMP POWER SUPPLY box (located in an indented area)

6.29.2.8.5 Flip COOLING CONTOLLER breaker to “OFF”


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6.29.2.9 Flip off Z breaker (Laser)

6.29.2.10 Flip off Y breaker (Electronics)

6.29.2.11 Flip off X breaker (Power supplies)

6.29.2.12 Press Stop button on ECU

6.29.2.13 Press Stop button on Main Power Control Box

6.29.2.14 Move main power Lever to OFF position6.30 Power Up or Restart of the Azores

6.30.1 Move main power Lever to ON position

6.30.2 Press Start button on Main Power Control Box

6.30.3 Press ON button on ECU

6.30.3.1 Wait 2X the time power was off for ECU to stabilize the temperature inside the Azores

6.30.3.1.1 Minimum is 2 hours and maximum is 120 hours

6.30.4 Flip on X (Power Supplies) and wait 5 minutes

6.30.5 Flip on Z and verify Laser power is on at laser HEAD

6.30.6 Turn on UV Lamp

6.30.6.1 Flip COOLING CONTROLLER breaker to “ON” position

6.30.6.2 Flip MECURY LAMP POWER breaker to “ON” (located in indented box)

6.30.6.3 Press LAMP “ON” button, if needed press “RESET” button then press LAMP “ON”

6.30.6.4 Wait 20 minutes for Laser and UV Lamp to thermally stabilize

6.30.6.4.1 Verify Laser ON green LED is lit and Stable LED is lit on Laser HEAD

6.30.7 Turn on Y breaker

6.30.7.1 Wait until System Reboots and Touch Screen Displays “Reboot Successful without errors”

6.30.8 Complete all items in sections 6.1, 6.2, 6.3, 6.4, 6.5, 6.6, 6.8, 6.10, 6.11 and 6.12 to calibrate and verify equipment operation.

7.0 ILLUSTRATIONS AND PHOTOS7.1 Precision reading locations (LEFT DIE), Stitching Vertical top set of lines


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7.2 Stitching location - Horizontal (LEFT DIE) located on the right side of the die down ½ way


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7.3 Overlay reading locations (RIGHT DIE) – located at the top in the middle.


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8.0 ADDITIONAL REFERENCE SPECIFICATIONS/MATERIAL8.1.1 Exposure Programs List (what they are used for) 1. ALL-TEST (not-used)2. ASU-1-UP (Test pattern large array – for show – display on screen only)


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3. ASU-LAYER1 (Test pattern 4 arrays – for show – display on screen only)4. ASU-LAYER2 (Test pattern 4 arrays 2nd layer – for show – display on screen only)5. CYCLE (Azores program – not used)6. CYCLE1 (Azores program – not used)7. EXP-ALL (exposes all of the plate to remove all resist in the developer)8. FDC-PROMO (Flexible Display Center – resist everywhere except letters)9. FDC-PROMO-CLEAR (Flexible Display Center – resist only where letters are)10. INT-TEST (not-used)11. LIFE-TEST (not-used)12. LIFE-TEST2 (not-used)13. MSR-AXIS (not-used)14. MSR17FOC (not-used)15. MSR9FOC (not-used)16. PR-THICK-DOSE (Different Dose – resist process set-up) 17. PR-THICKNESS (Same Dose everywhere – Linewidth /Resist Thk. /Uniformity)18. PS-ALL (not-used)19. PSO-L1 (Precision + Stitching)20. PSO-L2 (Overlay)21. PTR1 (not-used)22. PTR1-380X320 (not-used)23. PTR1-PRETEST (not-used)24. RAS1 (not-used)25. RAS2 (not-used)26. RAS2-380-320 (not-used)27. RAS2-ALL (2nd level for Alignment and Stitching - not used now)28. RAS23-370-470 (not-used)29. RAS2A (Alignment + Stitching) not used now30. RAS2B (not-used)31. RAS2C (not-used)32. RAS2D (not-used)33. RAS2E (not-used)34. RAS2F (not-used)35. RAS3 (not-used)36. REVERSE (Reverses the plates in the cassette ready for develop – corner in right

position)37. TPUT1 (not-used)38. TPUT1-230 (not-used)39. TPUT1-250 (not-used)40. TPUT2-230 (not-used)41. TPUT2-230A (not-used)42. Z-TEST (not-used)

43. EDGE-REMOVAL (Exposes resist around the edge of the panel)44. DIST-BASELINE (Distortion test for alignment keys)45. DIST-L1-01 (Distortion test for alignment keys)46. DIST-L2-0 (Distortion test for alignment keys)47.


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9.0 TROUBLESHOOTING/ERRORS9.1 bin/csh isn’t at the bottom of the screen:

9.1.1 Right click and hold on the blue background (off of windows opened)

9.1.2 Highlight and release on UNIX

9.1.3 Place the arrow on the Sheltool screen

9.1.4 <0> Type cd $cdat

9.1.5 Press Return

9.1.6 Type PWD – this should be in cj data

9.2 If <0> is not on the screen (sheltool-/bin/csh) (Scroll Script Folder)

9.2.1 Right click on the Blue Background on the screen

9.2.2 Click on MRS Panel/Printer Operation Tools

9.2.3 Click on MRS Script

9.2.4 Type in tip stepper

9.2.5 Press Return

9.2.6 Press Return

9.3 Grid Mismatch Error

NOTE: 2 grippers on Reticle robot inside (middle) and 2 grippers on Reticle Box all should be closed.

9.3.1 On the computer <0> type grip

9.3.2 Press Return

9.3.3 Type ungrip (Make sure no Reticle in on)

9.3.4 Press Return

9.3.5 Type rl_rob_stat (Reticle Robot Status)

9.3.6 Press Return

9.3.7 Check Wrist, Door, Reticle, Gripper, and Banker

9.4 If Beam is broken

NOTE: Stage will float. ADD INFO HERE HOW TO FIX


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9.5 Check Error Log

9.5.1 On the computer Right click on Blue part of the Screen

9.5.2 Open sheltool

9.5.3 type cd $cdat/../he

9.5.4 Press Return

9.5.5 Type ls (list all error files)

9.5.6 Type dcbn he_log.rial …………

9.5.7 Press Return

9.5.8 Shift G –

9.5.9 Press the letter U to scroll up the screen, Press the Space Bar to skip page to page,Or Press the Return key to go down error by error

9.6 Error – No Carrier – Transceiver Cable Problem? Appears on screen

(this error comes on when the log gets full)

NOTE: This whole procedure must be completed in 6 seconds or redo all steps again.

9.6.1 Right Click on Blue Background on the screen

9.6.2 Highlight UNIX TOOLS

9.6.3 Highlight CONSOLE

9.6.4 Close out All windows on the Screen

9.6.5 Open RMI Program

9.6.6 Open shel/bin/csh program9.7 To Center the Cross in Monitor and Focus

NOTE: Done during PM every 6 months or if Auto Calib. Fails

9.7.1 In Calibration ….

9.7.2 Type #4 - Ras Set-Up

9.7.3 Type #1 – Course Ras Baseliine + Focus


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9.8 No Camera Box on the Screen

9.8.1 Right click in the Blue background on the screen

9.8.2 Click on Unix Tools

9.8.3 Drag to Snap Shot (open)9.9 If RMI is not on the screen

9.9.1 Right click on the blue background on the screen

9.9.2 Left click and hold on MRS Panel Printer RMI

9.9.3 Highlight and release mouse button on CALIBRATION9.10 If RMI is locked up

9.10.1 Close the program by clicking on the left corner of the folder

9.10.2 Repeat steps in 9.9

9.11 If you have to remove the panel from the Azores when started – need to clear the job.

9.11.1 Press Stop 9.11.2 Press Abort

9.11.3 Press Quit9.11.4 On the Sun computer type iPress Return

9.11.6 The list will come up look for je_exec # (of the error # 27, 28 etc)Type td 0x (the error # found from 9.11.6) example: td 0x28

9.11.7 Press Enter

9.11.8 Retype i and check for je_exec (error # again)

9.12 For Error log screen

9.12.1 Right Click Background

9.12.2 Highlight Application Engineering tool

9.12.2 Highlight Error Tool

9.13 To Clean Error log screen


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9.13.1 Close out the screen and reopen or control C, return, return

9.14 If bin/csh not working reopen

9.14.1 Close out the screen

9.14.2 Type cd $cdat

9.14.3 Press Return

9.15 If the Sun computer locks up – reboot

9.15.1 In the cabinet behind the Sun Computer in large cabinet press the reset button (little red button) on the top panel.

9.15.2 Wait 20 minutes

9.16 If reticle retrieving arm gets stuck in the reticle box

9.16.1 At the Sun Computer type in ungrip

9.16.2 Type rl_rob_stat

9.16.3 Type rl_y_nohold

9.16.4 Manually pull arm out of the box – no reticle should be attached be very careful.

9.16.5 Type rl_originate_y

9.16.6 return

9.16.7 Type rl_move_door 0

9.16.8 return

9.16.9 type rl_powerup

9.16.10 Type rl_move_x 2

9.16.11 type rl_originate_wrist (if the wrist is not horizontal or vertical – off)

9.16.12 If still not working call Azores service


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9.17 If job quits during run

9.17.1 Press Abort on the touch screen9.17.2 Quit on the touch screen9.17.3 Auto unload reticles9.17.4 Check for any job running on Sun system 9.17.5 On the Sun type cm_stat (this checks the wheel, chuck and camera) (check vacuum – all

off) should have wheel out and blade out9.17.6 Type show rets 9.17.7Return (should have no vacuum)9.17.8 Calibrate Wheel type in rw_originate 0 9.17.9 Return (make sure wheel moves) (should have 0=0x0 on screen when done)9.17.10 Calibrate the Z type in rw_originate_z 09.17.11 Return (watch the wheel goes in and out very slight movement) (should have 0=0x0

when done)9.17.12 Calibrate the Camera type cm_originate 09.17.13 Return (moves up and down) (should have 0=0x0 on screen when done NOTE: if a #

comes up – not good)9.17.14 Repeat type in cm_originate 0 (if # still comes up have to hard reboot tool – turn off

breakers) NOTE: make sure all reticles and panels are off the machine before rebooting

9.18 If job stops running during PSO-L1 JOB 9.18.1 Press Abort9.18.2 Press Quit9.18.3 Auto Unload reticles9.18.4 Type in cm stat (checks the wheel/chuck/camera)

Note: should have the wheel and blade out / check the vacuum on all should be off9.18.5 Press Return9.18.6 Type in show rets

Note: should show none no vacuum9.18.7 Press Return9.18.8 Calibrate the wheel by typing in rw_originate 0 (make sure wheel moves)9.18.9 Press Return (should have 0=0x0 prompt)9.18.10 Calibrate the Z - type in rw_originate_z 09.18.11 Press Return (watch will go in and out – may be very slight movement)9.18.13 Calibrate the Camera – type in cm_originate 09.18.14 Press Return (moves up and down will have 0=0x0 prompt when corrected if a # comes

up it is not correct) Note: If a # comes up repeat step from 9.18.13 if a # still comes up hard reboot

9.19 If Reticle is not set on wheel – no vacuum (CHECK THIS SEQUENCE BEFORE USING – Sue did this on the phone with service rep may have missed some things)

9.19.1 Press Quit9.19.2 On the Sun type cm_stat9.19.3 Try to set the reticle


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9.19.4 If no vacuum check the hoses9.19.5 Type rw_vac 0,0,19.19.6 Press reticle on wheel – check vacuum9.19.7 Type rw_vac 0,0,09.19.8 When set type rw_rotate 0,39.19.9 Return9.19.10 Type cm_stat9.19.11 Type rw_rotate 0,09.19.12 Type cm_stat9.19.13 Type rw_rotate 0,39.19.14 Type cm_stat

9.20 Calibrate / Originate the Wheel when reticle does not mount correctly9.20.1 Type rw_originate_z 0 (originate wheel in/out)9.20.2 Press Return9.20.3 Type show_rets9.20.4 Press Return

9.21 If Send Cassette computer screens is off or needs to be rebooted:9.21.1 Open the front panel - turn the computer off9.21.2 Turn the computer on9.21.3 Type in Engineer on the screen9.21.4 Type in x9.21.5 Click on Initilize

9.22 Gripping Problem9.22.1 Type ungrip9.22.2 Press Return9.22.3 Type grip9.22.4 Press Return9.22.5 Type ungrip9.22.6 Press Return9.22.7


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