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Real-time Ellipsometry on Cesium-Telluride Photocathode Formation. Martijn Tesselaar & Peter van der Slot CARE07. Contents. Introduction Electron Accelerator Photoelectric Effect Ellipsometry on Cs 2 Te Photocathodes Photocathode preparation Rotating Compensator Ellipsometry - PowerPoint PPT Presentation
Citation preview
1/20
Real-time Ellipsometry on Cesium-Telluride Photocathode Formation
Martijn Tesselaar & Peter van der Slot CARE07
2/20
ContentsIntroduction• Electron Accelerator• Photoelectric Effect
Ellipsometry on Cs2Te Photocathodes• Photocathode preparation• Rotating Compensator Ellipsometry• RCE measurement results Conclusions
3/20
Electron Accelerator Applications
External Beam Radiotherapy
Electron collider experiments Free Electron Laser
Synchrotron radiation
4/20
Linear Accelerator
• Laser pulse on photocathode => short electron bunch
• Radio Frequency Electromagnetic waves accelerate the bunch
• Magnets are used for confinement
5/20
Photoelectric Effect
P
I
e
hfQE phQuantum Efficiency = Number of electrons emitted per photon
Kinetic energy
6/20
Cs2Te Photocathode Preparation
1. Substrate at 120°C
2. Deposit Tellurium by Physical Vapor Deposition (PVD) for about 30 minutes
3. Deposit Cesium by PVD until cathode is completed
4. Cs and Te mixing produces multiple CsxTey layers
7/20
Quantum Efficiency
• Photocathode irradiated by UV lamp during deposition
• Photocurrent measured using picoamperemeter
• Photocathode considered finished at maximum QEStart Cesium Deposition
8/20
Ellipsometry on Cs2Te Photocathodes
• To study the deposition process
• Optical method: photocathode stays inside, measurement device outside
• Real-time measurements register steps in the deposition process
Preparation Chamber
Ellipsometer
9/20
Reflection from thin film structures
2
1
A
B
C
D
n2
n1
d
22 cos2 dn
122
2 sintan2cos
2
dd
n
22 cos4
2dnOPL
• Path length difference:
• Resulting in phase difference:
ADBCABnOPL 2
Fresnel Reflection Coefficients give change in amplitude and phase determined by film thickness d, refractive index n and absorption coefficient of the thin film material
10/20
Sample & Polarization
• Sample optical properties contained in the ellipsometric quantities and :
and also depend on film thickness, refractive index and absorption coefficient
j
p
s eR
Rtan
4~
2 inN
11/20
Rotating Compensator Ellipsometry
• Compensator (QWP) rotates continuously
• Sample properties influence reflected beam characteristics
• Reflected beam characteristics influence intensity after analyzer
• Correlation between compensator angle and detector signal gives information about sample properties
Polarizer
Analyzer
HeNe laser
QWP
Faraday Isolator
BS D1
Sample
Copper mirror
HWP
Window
12/20
Quarter Waveplate Rotation
13/20
Stokes VectorBeam characteristics:
1. Intensity
2. Polarization angle
3. Polarization ellipticity
4. Polarization rotation direction (CW or CCW)
a
b
a2
a1 x
y
ba
22
21 aaI
These 4 characteristics may be represented in a 4 element vector called the Stokes vector:
2sin
2cos2sin
2cos2cos
4
3
2
1
I
I
I
I
S
S
S
S
S
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Mueller MatrixEach optical element may be represented by a 4x4 matrix called a Mueller matrix, for example for a sample with properties and :
So that the exiting Stokes vector is:
For a quarter wave plate (with vertical fast axis) :And a rotation matrix:
The total Mueller matrix of the system with two reflections and without window is found as:
cos2sinsin2sin00
sin2sincos2sin00
0012cos
002cos1
SM
0100
1000
0010
0001
CM
PRMPRCRMCRMMMARMARM PCSMSAT
inout MSS
1000
02cos2sin0
02sin2cos0
0001
R
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Psi-Delta Calculation• S1 in the outgoing stokes
vector is the intensity after the Analyzer
• It is a Fourier series of the compensator angle C
• Fitting to measurement data gives Fourier coefficients An and Bn
and are derived from An and Bn by calculations depending on the setup used
I
C (°)Intensity after Analyzer as a function of compensator angle C
CBCACBCAACI 4sin4cos2sin2cos 44220
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Arrows indicate corresponding points in time
Ellipsometry Measurements 1
17/20
Ellipsometry Measurements 2
Arrows indicate corresponding points in time
18/20
Ellipsometry Measurement 3• Calculation of , values for double reflection from sample (without
taking into account the window) results in complex values • As an illustration of what , values could be the graphs below are
calculated using an assumed single reflection from sample
19/20
Conclusions
• Rotating Compensator Ellipsometry is a feasible method for studying photocathode growth
• Different preparation conditions result in different measured Fourier coefficients
• Ellipsometry results remain difficult to interpret