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4) Once your mask size is selected opening Write field control
you will have another window named ScannedManager. There u shou
select 1
stWritefield Alignment Procedures and then Manual and selecting
* um WF
Manual ALWF * um marks u need to drag into the New
positionlist.
As a whole you can see up to this.
5) Then scanning the dragged item a window will open to align
writefield. Do itfor each selected item like
say(200X40,200X20,200X5). After dragging one
item do writefield alignment then delete it from position list
and drag another
one if you have
Opened window is like this
This ends the basic writefield alignment we do.
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Exposure:
Now you need to measure beam current.
1) Click stage Control from control bar2) Go to its Position and
select Faraday Cup on holder
there. Then stage will move such a way gun will reach
near Faraday cup.
3) Then you should manually place Gun on Faraday cup &zoom
so that ur sreen is totally dark (It ensures all
electrons are captured by Faraday Cup and hence proper
measurement).
4) Next measure current going Exposoure option fromcontrol as
shown.
(It is good practice to save the position before moving stage to
faraday
cup,so that the position where I did write field alignment is
not lost.
5) Now you can set exposure parameters. Like beam current
windowsimultaneously other windows are created like exposure
parameter where
just clicking the calculator exposure parameter calculation will
appear.
6) opens the Exposure Parameter Calculation as said earlier just
now.7) selects which layers in the pattern that is going to be
written (exposed).8) opens a window (called Exposure parameter
calculation) with
parameters that is sometimes useful to change, e.g. the beam
settling time,
the FBMS beam width, etc.
9) Entre required Step size & Dose and calculate the dwell
time and press ok.Note:
1. Step size - the length the beam is moved between each dwell
time, when the beam is still, making theexposure. Usually 5 - 15 nm
for W.F. size of 60 - 100 m and 100 - 200 nm for W.F. size of 800 -
1500 m
(bonding pads).
2. Dwell time - the time the beam is still at each location.3.
Beam current - the e--current reaching the sample. This should
already be correct since the earlier
measurement should have put the measured value here.
4. Area dose - the dose required for an area to fully develop
that area, i.e. fully remove all resist but not more.Sometimes
wrongly referred to as "Sensitivity". It is rather the inverse of
sensitivity.
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These four parameters are interdependent according to this
formula:Writing:
1) Again open New position list.2) Open your GDS database from
where you can drop the GDS file that you wanna write into the new
positionlist.3) Select properties from Drop down list. Select
layers to be written and define boundaries..You can see these.
If you click edit button as shown here you can find
Then go to property.A new windo will be popped up where you can
select the working area and position list.
