U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 1

Pulsed Power Plasma Experiment- Generation of Photons in EUV Region -

Eiki HottaK.Horioka, A.Okino, M.Watanabe, T.Kawamura, K.Yasuoka,

M.Masnavi, S.R.Mohanty

Department of Energy SciencesTokyo Institute of Technology

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 2

Tokyo Institute of TechnologyOutline of Presentation

Z-pinch Based Discharge

Capillary Discharge Ne-like Ar Soft X-ray Laser– Background– Experimental Setup: Low Rep-Rate Operation– Characteristics of Ne-like Ar Soft X-ray Laser

DPP EUV Light Source for Microlithography(This work is supported by NEDO and MEXT Grant-in-aid)– Background: Why EUV? Requirements– Experimental Setup– Characteristics of DPP EUV Source

Summary

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 3

Tokyo Institute of TechnologyApplication of Soft X-ray Laser

X-ray diagnosticsX-ray microscopeX-ray holography

Images of malaria infected red blood cells(c) 2.4nm soft X-ray microscopy(d) Visible light microscopy

Water window (2.33-4.36nm)

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 4

Tokyo Institute of TechnologyPrinciples of soft X-ray laser

Schematic drawing of laser Characteristics of Soft X-ray Laser

•Monochromaticity•Directivity•High intensity•CoherenceLaser Medium

0I I

L

( )GLexpII 0=

One of operational principle of plasma X-ray laser: Collisional excitation scheme

G ∝　Nu – NlEnergy = PL･∆t

u

g

lPumpElectron

Long Lived State

Fastradiativedecay

λλ Laser: Amplified Spontaneous Emission

3p

3s

2p6

P∝ 1/λ4

Tokyo Institute of Technology

Soft X-ray Lasing by Fast Capillary Discharge(V.N.Shlyaptsev, et al., SPIE Vol.2012, pp.99-110, 1993)

3p-3s Ne-like ArIX (λ～40-70 nm)rp～150-250 μm, Ne～(0.5-2)×1019 cm-3, Te～60-90 eVr0～2 mm, p0～0.1-0.2 Torr, Ip～10-12 kA, T/2～60-80 ns

3p-3s Ne-like KrXXVII (λ～17-30 nm)rp～50-100 μm, Ne～(2-5)×1020 cm-3, Te～500-700 eVr0～1 mm, p0～2-4 Torr, Ip～150-180 kA, T/2～15-25 ns

4d-4p Ni-like XeXXVII (λ～9.1-9.5 nm)rp～75-150 μm, Ne～(2-5)×1020 cm-3, Te～300-600 eVr0～1 mm, p0～2-4 Torr, Ip～200-270 kA, T/2～12-20 ns

Radiative Collisional Model

100 101 102 10310-2

10-1

100

101

102

103

Current (kA)

nkT

(GPa

)Ne-like Ar

Ne-like Kr

Ni-like Xe

Experiment

Assuming rp=100μm

J.J.Rocca et al.

Theoretically predicted lasing windows

Bennett’s Relation

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 6

Tokyo Institute of TechnologyExperimental Setup

Schematic Photograph

SF6:1[atm]

　　Reset Circuit

Capillary

H2OSF6:3[atm]

H2O

Gap SwitchWater Capacitor

Pulse Transformer

Marx Generator

XRD

Capillary

X-ray

High Speed Camera2 m

SpecificationWater capacitor: 3nF, Max. 900 kV (1.2 kJ)Current: T/2=110 ns, 9-32 kA, dI/dt = 2-8×1011 A/sCapillary: Polyacetal, Pyrex or Alumina Ceramics, φ3mm, 60-350 mm longFilling gas: 100-1000 mTorr Ar

SpecificationWater capacitor: 3nF, Max. 900 kV (1.2 kJ)Current: T/2=110 ns, 9-32 kA, dI/dt = 2-8×1011 A/sCapillary: Polyacetal, Pyrex or Alumina Ceramics, φ3mm, 60-350 mm longFilling gas: 100-1000 mTorr Ar

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 7

Tokyo Institute of TechnologyStreak photograph

Waveform of discharge current

In order to obtain a laser amplification, it is necessary to produce thin plasma that has a laser gain. Side-on observations of plasma were made using Pyrex glass capillary.

3mm

Time[ns]0 50 100 150

Side-on Streak photograph

Pylex Capillary

Pylex Capillary0 50 100-40

-30-20-10

010203040

Curr

ent[k

A]

Time[ns]

Ar: 150 mTorrCapillary: φ = 3mm, l = 60 mmPredischarget: 10 A

1st pinch 2nd pinch

Framing

Framing

Discharge conditions•Pyrex Capillary: l = 60 mm, d = 3mm•Argon: 150 mTorr•Predischarge: 10 A

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 8

Tokyo Institute of TechnologyEffect of Pre-Ionization

With pre-ionizationcurrent of (10 A)

With pre-ionizationcurrent of (10 A)

Without pre-ionizationWithout pre-ionization0 50 100-40

-30-20-10

010203040

Cur

rent

[kA

]

Time[ns]

Ar: 150 mTorrCapillary: φ = 3mm, Predischarge: 0 A

l = 60 mm

Pre-ionization is essential for production of stable plasma.

(A) 20 - 30 ns

(B) 30 - 40 ns

(C) 40 - 50 ns

(D) 50 - 60 ns

l = 20 mm

Plasma ColumnCapillary Tube

φ = 3 mm

(A) 10 - 20 ns

(B) 20 - 30 ns

(C) 30 - 40 ns

(D) 40 - 50 ns

l = 20 mm

φ = 3 mm

Plasma ColumnCapillary Tube

•Helical instabilities are observed•Poor reproducibility

•Stable•Highly reproducible•Diameter of pinched plasma:

300µm

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 9

Tokyo Institute of TechnologyDirectivity of Spike Output

Discharge condition・ Capillary length : 150 mm,

diameter : 3 mm・ Filling Ar pressure : 450 mTorr・ Preionization current : 10 A

0 50 100

30

60

Cur

rent

[kA

]

0

0

1

1

Time [ns]

XR

D si

gnal

[V]

Pinhole - XRD: 120 mm

Pinhole - XRD: 600 mm

Argon: 450mTorrCapillary: φ = 3 mm, l = 150 mmPredischarge: 10 A

XRD output dependence on distance between capillary and detector

Sharp peaks have directivity. It’s a characteristics of laser.

To confirm the directivity of laser, the distance from the capillary to the XRD is changed from 120mm to 600mm

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 10

Tokyo Institute of TechnologyGain-Length Product

Maximum gain-length product gl of 12 (g = 0.8 cm-1) andLaser output energy of 5 - 6 µJ are obtained.

Background at 80ns

Laser

XRD output dependence on capillary length

0 50 100

01020304050

Time [ns]

Cur

rent

[kA

]

XR

D si

gnal

[V]

0

0

0

3

6

3

2

Capillary: φ = 3mmAr: 500 mTorrPredischarge: 16 A

l = 150 mm

l = 120 mm

l = 90 mm

laser

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 11

Tokyo Institute of TechnologySpectroscopic Measurement

Laser 46.9 nm

Measured spectrum

Capillary

Spectrometer

Label Series Transition λ (Å)

1 3s 3P1 – 3p 1S0 431.1232 3p 1P1 – 3d 1P1 450.660

3 3p 1P1 – 3d 1P1 465.118

4 3s 1P1 – 3p 1S0 468.7935 3s3p – 3s3d

(J = 0-1)473.934

6 3s3p – 3s3d (J = 1-2)

475.654

7 3s3p – 3s3d(J = 2-3)

479.379

Ar VII

Ar IX

Grazing Incidence Spectrometer(McPherson 248/310G)

Discharge conditionCapillary : φ3, l =150 mmI = 22 kAp = 300 mTorr

After P.S.Antsiferov et al., Physica Scripta, Vol.62, pp.127-131, 2000

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 12

Tokyo Institute of TechnologyDouble-Slit Interference Fringes

Discharge current pulse: ~23kA Ar pressure: ~340 mTorrCapillary length = 350 mm Capillary diameter = 3 mmL1 = 250 mm L2 = 1070 mm Detector: X-CCD

Slit separation b = 100 μmExperimental λ = 45.9 ± 1.2 nm

Slit separation b = 50 μmExperimental λ = 46.5 ± 0.9 nm

Ne-like Ar laserλ = 46.9 nm

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 13

Tokyo Institute of TechnologyMeasurement of the spatial coherence

)2

exp( 22

cLd∆−=Coherence degree: where Lc is coherence length

μ12(50 μm)=0.60±0.05 Measured coherence length is 50 µm

Imax

Imin

Coherence length reported by other group is Lc= 190µm for 450 mm capillaryPHYSICAL REVIEW A 70, 023818 (2004)

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 14

Tokyo Institute of TechnologyAnother Lasing?

1

2

Experimental λ = 45.9 ± 1.2 nm

Ne-like Ar laserλ1 = 46.9 nm(Ar8+ 3s – 3p)

1Experimental λ = 44.1 ± 3.0 nm

Be-like Ar laserλ2 = 42.6 nm ?(Ar14+ 2p – 2s)

2

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 15

Tokyo Institute of TechnologyMHD Simulation 1

Plasma is compressed and heated

Highly ionized plasma expandsto the capillary wall being cooled

Space-Time development of Te

Space-Time development of Ne　　　　　(P.Vrba, et al., CTU)

At 33.2 ns : Ne=4.3x1018 cm-3, Te=100 eVAr8+ : Ne-like

At 37.0 ns : Ne= 3.14x1018 cm-3, Te=105 eVAr14+ : Be-like

34.8 ns

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 16

Tokyo Institute of TechnologyMHD Simulation 2

The evaluated spectrum predicts another strong lasing at the wavelength of

λ= 42.6 nm at t = 37 ns, when Te = 105 eV, Ne = 3.14Χ1018 cm-3

The lasing occurs by the transition 2p - 2s

Be-like argon (Ar14+).

20 ns/Div

Current XRD

Capillary length = 330 mm

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 17

Tokyo Institute of TechnologyCurrent and Pressure Range of Lasing

0 200 400 600 8000

2

4

6

Pressure [mTorr]

Ener

gy [µ

J]32kA

18kA

9kA

Capillary: φ = 3mm, l = 150 mm,Predischarge: 10 A

Lasing may be obtained with a current of below 9kA and over 32 kA,with adequate gas pressure.

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 18

Tokyo Institute of TechnologySummary (soft X-ray laser)

Ne-like Ar (3p-3s) Soft X-ray Lasing was confirmedCurrent of 9-32kA and half period of 110nsCeramic capillary : φ=3mm, l = 150 – 350 mmArgon gas pressure: 150-800mTorrMaximum gl =12 (g=0.8cm-1) at 32kA, 500mTorrPre-discharge current: 5-15A

Sufficient pre-discharge current is essential forProduction of uniform pre-ionized plasmaSuppression of instabilities of pinched plasmaIncrease of laser output and improvement of reproducibility

Possibility of another lasing transition was shownBe-like Ar (2p-2s) ?

Lasing at current of less than 10 kA may be possibleLower laser output energyCompact power supplyHigher rep-rate operation

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 19

Tokyo Institute of TechnologyOutline of Presentation

Z-pinch Based Discharge

Capillary Discharge Ne-like Ar Soft X-ray Laser– Background– Experimental Setup: Low Rep-Rate Operation– Characteristics of Ne-like Ar Soft X-ray Laser

DPP EUV Light Source for Microlithography(This work is supported by NEDO and MEXT Grant-in-aid)– Background: Why EUV? Requirements– Experimental Setup– Characteristics of DPP EUV Source

Summary

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 20

Tokyo Institute of TechnologyITRS Roadmap Potential AccelerationWhy EUV (13.5 nm) ?

YearInternational Technology Roadmap for Semiconductor

2002(New 2-year cycle to 45 nm)

Hg-I (365 nm)

KrF (248 nm)ArF (193 nm)

F2 (157 nm)

Moore’s law2-year cycle : 70 % reduction every 2 years

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 21

Tokyo Institute of TechnologyRequirements for EUV Light Source

Item RequirementWavelength 13.5 nm

115 W(100 Wafers/hour)

> 10-7 kHzIntegrated Energy Stability ±0.3 %

(3σ over 50 pulses)Etendue 1-3.3 mm2srSource Cleanliness(lifetime of illuminator)

≧ 30,000 hours(after intermediate focus)

EUV Power at IF(2% in-band @13.5 nm)

Repetition Frequency

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 22

Tokyo Institute of TechnologyDPP Light Sources

Shock wave heating, magnetic confinement, position stability

Xe or Sn Discharge

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 23

Tokyo Institute of TechnologyDependence of Ion Fraction on Te in Steady State

Optimum Xe plasma condition for EUV emission at 13.5 nmTe = 20 – 40 eVne = 1018 – 1019 cm-3 (optically thin)

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 24

Tokyo Institute of TechnologyPinch Dynamics

Pre-ionized Uniform Plasma

J x B

Implosion Phase

Joule (Resistive) Heating

Compression : Adiabatic Heating

Shock Wave Heating

Kinetic Energy to Thermal Energy

Thin, high-temperature and High-densty plasma

Te = 20 – 40 eVne = 1018 – 1019 cm-3

TemperatureD

ensi

ty

I

B B

IEUV

Lorentz force

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 25

Tokyo Institute of Technology

Experimental Setup

EUV Light

Vacuum ChamberMagnetic Switch

PFN

Xe Gas

BaratronGas Supply

Valve

Rotary Pump＋

Turbo molecularDischarge Head Vacuum

SystemThyristor Stack

Vacuum Chamber

Magnetic Switch

Coolant

Capillary

Anode

Gas Flow Controller

Power Supply

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 26

Tokyo Institute of TechnologyPulse power supply system

SI Thyristor Stack・3 thyristors connected in series・Blocking voltage : 12.0 kV・Conducting current : 400A・Surge On current : > 10 kA・di/dt : > 100 A/ns

PFN (Pulse Forming Network)・ 4 nF, 20kV Ceramic capacitor・ Capacitors connected in parallel・ Total Capacitance : 403 nF・ Impedance : 0.44 Ω

HV

L L

C C

Anode Cathode

430 nF

Reset circuit

Magnetic switch

SI thyristor

stack

Capillary

PFN

DR

Direct pulse method

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 27

Tokyo Institute of TechnologyEffect of dI/dt on Pinch Time and Plasma Radius

Wall

Wall

Axis

1.0 mm

0.0 mm

Streak PhotographOutput of Photodiode

0 1 2 3 40

5

10

15

0

2

4

6

8

10

Cur

rent

[kA

]

Phot

odio

de [V

]Time [µs]

Photodiode(5-18 nm)

IL

5 Torr Xe

-0.2 0 0.2 0.40

10

20

30

0

5

10

15

Phot

odio

de [V

]

Cur

rent

[kA

]Time [µs]

Photodiode(5-18 nm)

IL

5 Torr Xe

Magnetic Switch

Current Pulse Width～ 1µs 　　300 nsMagnetic Pulse Compression

　（Reduction of Inductance）

403 nF

K

A

HVAnode Reactor

HV 403 nF

K

A

PT1:3

40 nF

SI Thy

SI Thy

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 28

Tokyo Institute of TechnologyAbsolute in-band EUV power

EUV mini calorimeter

Zr filter

Mo/SiMultilayer

Mirror

Photodiode

Low dI/dt pulse High dI/dt pulseEUV output energy [mJ/sr/2%BW/pulse] 2.5 3.3

Conversion efficiency [%] 0.28 0.44

Max. solid angle [sr] 2π 2πEUV energy at the source [mJ/pulse] 15.7 20.7Input energy [J/pulse] 5.6 4.7

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 29

Tokyo Institute of TechnologyEffect of dI/dt on the visible spectra

400 450 500 550 600 650 7000

2000

4000

6000

8000

10000

Wavelength [nm]

Inten

sity

[a.u.

]Xe II

Xe IIXe II

Xe II

Al IIIAl III

Al III

Al IIH I

O II

Xe IIIO III

Al IIIO II

Al III

O IIO II

O II

O II

High dI/dt pulse

Low dI/dt pulse

♦ Visible emission lines are identified in the each pulse system♦ Impurities O and Al in low dI/dt pulse come mostly from the capillary : plasma - capillary wall interaction♦ Contact time between plasma and capillary in high dI/dt pulse is short enough to prevent impurities from being ablated

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 30

Tokyo Institute of TechnologyEffect of dI/dt and pressure on EUV pinhole images

Low dI/dt pulse High dI/dt pulse

Pressure 0° 45° 0° 45°

3 Torr

4 Torr

5 Torr

6 Torr

7 Torr

8 Torr

For higher dI/dtSource size is smallerPosition stability is better

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 31

Tokyo Institute of TechnologyEffect of dI/dt on position stability

low dI/dt pulse High dI/dt pulse

X

Y 2 mm

Center position of individual shots

X

Y 2 mm

X：±0.018mmY：±0.013mm

X：±0.16 mmY：±0.13 mm

Standard deviation σ

♦ Peak intensity positions of 20 pinhole image were recorded♦ Position stability of fast pulse is better than that of slow one

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 32

Tokyo Institute of TechnologyFor the higher power and steady state operation

Ordinary Z-pinch and Gas Curtain Tapered Pinch

Gas Curtain

K A

Gas Curtain

Radial collection of EUV

Gas Curtain

Diffuser

Nozzle Diffuser

Collector

Normal incidence

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 33

Tokyo Institute of TechnologyGas jet type Z-pinch discharge system

♦ Cathode (nozzle)- Xe nozzle diameter: 2 mm- He nozzle diameter

Inner diameter: 11.6 mmOuter diameter: 12 mm

♦ Anode (diffuser)- Inner diameter: 6 mm- Outer diameter: 20 mm♦ Conditions- V charge = 9 kV- Xe gas supplying pressure

= 10 Torr- Gap distance: d = 4 mm

Xe

Curtain Gas(Ar, He) EUV

EUVCurtain Gas(Ar, He)

AnodeCathode

Front view

Side view

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 34

Tokyo Institute of TechnologyFraming photographs (10 ns resolution)

- 0 .2 0 0 . 2 0 . 4

0

1

2

3

0

2

4

6

8

1 0

T im e [ µ s ]

Phot

odio

de [V

]

Cur

rent

[kA

]

Anode Cathode

-180 ns -20 nsWithout DCpreionization

With DCpreionization

♦ Conditions- V charge = 9 kV- Xe gas supplying pressure = 10 Torr- Gap distance: d = 4 mm- Without gas curtain

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 35

Tokyo Institute of TechnologyEffect of gas curtain (EUV pinhole image)

W/o Gas Curtain 10 kV, Xe 10 Torr

He 12 sccmAr 12 sccm

With Gas Curtain　(w/o diffuser)

Confinement by curtain gasis observed

Pinch cannot be observed in case of Ar gas curtain

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 36

Tokyo Institute of TechnologyAbsolute in-band EUV energy

d

θ

Zr filterMo/Si mirror

Photodiode

♦ Vcharge = 9 kV, Xe = 10 Torr, d = 4 mm, 100 Hz operation, without gas curtain♦ The EUV output in 2 % bandwidth at 13.5 nm is 5.1 mJ/pulse (at 2π sr)♦ The available observation angle (±8 degree) may lead to partial obscuration of the source♦ In spite of the low output energy, we believe that increasing the discharge current and improving the present nozzle design can achieve the high EUV yield

-10 -5 0 5 100

0.2

0.4

0.6

0.8

1

Angle [degree]

EUV

ene

rgy

[mJ /

sr /

2% B

W]

Angular distribution of EUV

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 37

Tokyo Institute of TechnologyVisible spectra

♦ The observed impurity lines of different ionization states of O and Al in capillary discharge come mostly from the alumina capillary wall♦ No significant impurity contribution from the electrode materials is marked in the gas jet type Z-pinch discharge

Capillary Z-pinch Gas jet Z-pinch

400 450 500 550 600 650 7000

2000

4000

6000

8000

10000

Wavelength [nm]

Inte

nsity

[a.u

.]

Xe II

Xe IIXe II

Xe II

Al IIIAl III

Al III

Al IIH I

O II

Xe IIIO III

Al IIIO II

Al III

O IIO II

O II

O II

Capillary Z pinch with slow pulse

Capillary Z pinch with fast pulse

Gas jet Z pinchwith fast pulse

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 38

Tokyo Institute of TechnologySummary (EUV light source)

Higher energy transfer efficiencyLower stray inductanceHigher dI/dt

Debris mitigationTube less structure : radial collection Gas curtain, Debris shield

Future planXenon Tin (higher efficiency)

U.S.-Japan Workshop on Heavy Ion Fusion and High Energy Density Physics, Sep. 28-30, 2005 at Utsunomiya University 39

Tokyo Institute of Technology

Thank You for Your Attention

Pulsed Power Plasma Experiment- Generation of Photons in EUV Region -Outline of PresentationApplication of Soft X-ray LaserPrinciples of soft X-ray laserSoft X-ray Lasing by Fast Capillary Discharge(V.N.Shlyaptsev, et al., SPIE Vol.2012, pp.99-110, 1993)Experimental SetupStreak photographEffect of Pre-IonizationGain-Length ProductSpectroscopic MeasurementDouble-Slit Interference FringesMeasurement of the spatial coherenceAnother Lasing?MHD Simulation 1MHD Simulation 2Current and Pressure Range of LasingSummary (soft X-ray laser)Outline of PresentationITRS Roadmap Potential AccelerationRequirements for EUV Light SourceDPP Light SourcesDependence of Ion Fraction on Te in Steady StatePinch DynamicsPulse power supply systemEffect of dI/dt on Pinch Time and Plasma RadiusAbsolute in-band EUV powerEffect of dI/dt on the visible spectraEffect of dI/dt and pressure on EUV pinhole imagesEffect of dI/dt on position stabilityFor the higher power and steady state operationGas jet type Z-pinch discharge systemFraming photographs (10 ns resolution)Effect of gas curtain (EUV pinhole image)Absolute in-band EUV energyVisible spectraSummary (EUV light source)