Product Profile 2010 - ferrite...Anesthesia equipment Blood pressure monitoring Cleaning equipment Consumer Barometric measurements in portable electronics such as mobile phones, personal

Pressure Sensorsfor Industrial, Automotive, Medicaland Consumer Applications

www.epcos.com

Product Profile 2010

EPCOS is a leading manufacturer of electronic components, modules and systems.Our broad portfolio includes capacitors, inductors and ferrites, EMC filters, sensorsand sensor systems, nonlinear resistors, and arresters, as well as SAW and BAWcomponents and RF modules. As an innovative technology-driven company, EPCOSfocuses technologically demanding growth markets in the areas of information andcommunications technology, automotive, industrial, and consumer electronics. Weoffer our customers both standard components as well as application-specificsolutions.

EPCOS has design, manufacturing and marketing facilities in Europe, Asia and the Americas. We are continuously strengthening our global research and development network by expanding R&D activities at our production locations, primarily in Eastern Europe, China and India. With our global presence we are able to provide our customers with local development and manufacturing know-how and support in the early phases of their projects.

EPCOS is continually improving its processes and thus the quality of its products and services. The Group is ISO/TS 16949 certified and remains committed to constantly reviewing and systematically improving its quality management system.

© EPCOS AG 20092

Welcome to the World of Electronic Components and Modules

The high precision of piezoresistive sensor dies and the customization of thepressure sensors to specific requirements allow their versatile use in a wide rangeof applications.

Pressure sensors supply measured data for industrial equipment and systems inorder to control and diagnose hydraulically or pneumatically operated machines.This makes them to key components in measurement and control technology.

Pressure sensors are also used in the automotive industry to minimize emissions ofnoxious exhaust gases and soot particles. Their high reliability is equally vital in airconditioning, engine management, powertrain electronics and brake systems inutility vehicles as well as for measuring pressure in respiratory, anesthesia equip-ment, blood pressure monitoring and cleaning technology in the medical sector.

EPCOS pressure sensors supply exact data within the scope of measuring liquidand gaseous media.

Equipped with miniaturized barometric pressure sensors, navigation devices canmeasure the altitude and – together with a GPS-provided location – very preciselydetermine the 3D position. Applications include navigation devices with 3D mapsor position information accurate to within one story of a building for emergency callsfrom mobile phones.

3© EPCOS AG 2009

Pressure Sensors for Industrial, Automotive, Medical and Consumer Applications

4 © EPCOS AG 2009

Gen

eral

Please read Important notes on page 4 and Cautions and warnings on page 25.

Important Notes

The following applies to all products named in thispublication:

1. Some parts of this publication contain statementsabout the suitability of our products for certainareas of application. These statements are based onour knowledge of typical requirements that are oftenplaced on our products in the areas of application con-cerned. We nevertheless expressly point out that suchstatements cannot be regarded as binding state-ments about the suitability of our products for aparticular customer application. As a rule, EPCOS iseither unfamiliar with individual customer applicationsor less familiar with them than the customers them-selves. For these reasons, it is always ultimately incum-bent on the customer to check and decide whether anEPCOS product with the properties described in theproduct specification is suitable for use in a particularcustomer application.

2. We also point out that in individual cases, a malfunc-tion of electronic components or failure beforethe end of their usual service life cannot be com-pletely ruled out in the current state of the art, even if they are operated as specified. Incustomer applications requiring a very high level ofoperational safety and especially in customer applica-tions in which the malfunction or failure of an electroniccomponent could endanger human life or health (e.g.in accident prevention or life-saving systems), it musttherefore be ensured by means of suitable design of the customer application or other action taken by thecustomer (e.g. installation of protective circuitry orredundancy) that no injury or damage is sustained bythird parties in the event of malfunction or failure of anelectronic component.

3. The warnings, cautions and product-specific notesmust be observed.

4. In order to satisfy certain technical requirements, someof the products described in this publication maycontain substances subject to restrictions in cer-tain jurisdictions (e.g. because they are classed as hazardous). Useful information on this will be found in our Material Data Sheets on the Internet(www.epcos.com/material). Should you have any moredetailed questions, please contact our sales offices.

5. We constantly strive to improve our products. Conse-quently, the products described in this publicationmay change from time to time. The same is true ofthe corresponding product specifications. Pleasecheck therefore to what extent product descriptionsand specifications contained in this publication are stillapplicable before or when you place an order.

We also reserve the right to discontinue productionand delivery of products. Consequently, we cannotguarantee that all products named in this publicationwill always be available.

The aforementioned does not apply in the case of individual agreements deviating from the foregoing forcustomer-specific products.

6. Unless otherwise agreed in individual contracts, allorders are subject to the current version of the“General Terms of Delivery for Products andServices in the Electrical Industry” published bythe German Electrical and Electronics IndustryAssociation (ZVEI).

7. The trade names EPCOS, BAOKE, Alu-X, CeraDiode,CSMP, CSSP, CTVS, DSSP, MiniBlue, MiniCell, MKK, MLSC, MotorCap, PCC, PhaseCap, PhaseCube, PhaseMod, PhiCap, SIFERRIT, SIFI, SIKOREL, SilverCap, SIMDAD, SIMID, SineFormer, SIOV, SIP5D, SIP5K, ThermoFuse, WindCap are trademarks registered or pending in Europe and in other countries.Further information will be found on the Internet atwww.epcos.com/trademarks.

© EPCOS AG 2009 5Please read Important notes on page 4 and Cautions and warnings on page 25.

Gen

eral

General Information

Piezoresistive pressure measurement

The pressure measurement in sen-sor dies operates on the basis of thepiezoresistive effect, occurring in di-aphragm, in which piezoresistors areimplanted onto the surface.

The micromechanical etched di-aphragm contains a wheatstonebridge. The silicon wafer is con-nected with a glass base by anod-ic bonding to ensure the restraint atthe edges.

The mechanical bending stress bypressure application causes achange in the piezoresistors. Theoutput of the powered bridge is avoltage signal (mV range) propor-tional to the pressure.

Absolute pressure sensor diesare bonded to a solid glass baseunder vacuum.

Gauge pressure sensor dies havea glass base with a hole, so that thereference pressure is applicable onthe back side.

Differential pressure

The pressure difference is measuredwith the help of making a hole in theglass base. The polarity of the bridgeoutput signal changes depending on the side, where the pressure ishigher.

A differential pressure sensor can beused for flow measurement by mea-suring the pressure drop along a gasstream.

Gauge pressure

Gauge pressure measurement is acase of differential pressure mea-surement, where the measurementis related to the actual air pressure. Atypical application is the liquid levelindication.

Gauge symmetrical pressure

In case of gauge symmetrical pres-sure, the measurement is related toequally over and under the actual airpressure.

The various arts of pressure measure-ment are due to the reference pres-sure related to measured pressure.

Absolute pressure – application on the front

The glass base encloses the refer-ence pressure for the absolutepressure measurements on theback. The measured mediumcomes into contact with the activeelectronic components. Only dryand non-aggressive media may bemeasured.

Absolute pressure – application on the back

To measure wet media, the referencepressure is enclosed on the front.The pressure is applied to the backwhere is no contact with active elec-tronic components.

Typical applications are altitude mea-surements in ballons or barometricmeasurements for meteorological use.

Alternative types for easy mountingwith glass base on back side are also available.

6 © EPCOS AG 2009Please read Important notes on page 4 and Cautions and warnings on page 25.

Gen

eral

General Information

EPCOS offers various designs ofpiezoresistive pressure measure-ment devices – from simple pressuresensor dies via packaged pressuretransducers and transmitters up tocustomer-specific pressure-sensorsystems.

Every design is based on sensor diesdeveloped and manufactured in ourown cleanrooms.

Bonded and integrated into a standard package, the pressuretransducer is processed directly onthe circuit board.

The pressure transmitters are extended by a signal evaluationmodule and supplied with or with-out a stainless steel case in ready-to-mount form or for simple circuitboard assembly.

Typical applications

Industry

■ Hydraulic and pneumaticsystems

■ Measurement and control technology

■ Environmental and climate protection

■ Gas analyzers and meters■ Heating, ventilation and

air conditioning systems inbuildings

Automotive

■ Exhaust recuperation■ Soot particle filters■ Air conditioning■ Engine management■ Powertrain electronics■ Utility vehicle brakes

Medicine

■ Respiration technology■ Anesthesia equipment■ Blood pressure monitoring■ Cleaning equipment

Consumer

■ Barometric measurements inportable electronics such asmobile phones, personal navi-gation devices and watches

■ Hard disk drives (HDD)■ Cycling computers■ Cameras with altimeter function

Features

■ Piezoresistive silicon technology■ Absolute, differential and

gauge pressure measurement■ Extensive range of pressure

measurements■ High measurement accuracy■ Various packaging forms ■ Sensor elements for humid/

wet operating environments■ RoHS-compatible

© EPCOS AG 2009 Please read Important notes on page 4 and Cautions and warnings on page 25. 7

Pressure Units

Conversion table for pressure units

bar psi kPa cm H2O inch H2O mm Hg lbf/ft2

0.016 0.232 1.6 16.32 6.43 12.0 33.416

0.025 0.363 2.5 25.49 10.04 18.8 52.213

0.040 0.58 4.0 40.79 16.06 30.0 83.54

0.060 0.87 6.0 61.18 24.09 45.0 125.31

0.100 1.45 10.0 101.97 40.15 75.0 208.85

0.160 2.32 16.0 163.2 64.25 120.0 334.16

0.250 3.63 25.0 254.9 100.35 188.0 522.125

0.400 5.8 40.0 407.9 160.59 300.0 835.4

0.600 8.7 60.0 611.8 240.87 450.0 1253.1

1.000 14.5 100.0 1019.7 401.46 750.0 2088.5

1.600 23.2 160.0 1632.0 642.52 1200.0 3341.6

2.500 36.3 250.0 2549.0 1003.54 1875.0 5221.25

4.000 58.0 400.0 4079.0 1605.91 3000.0 8354.0

6.000 87.0 600.0 6118.0 2408.66 4500.0 12531.0

10.00 145.0 1000.0 10197.0 4014.57 7501.0 20885.0

16.00 232.0 1600.0 16316.0 6423.62 12001.0 33416.0

25.00 363.0 2500.0 25494.0 10037.01 18752.0 52212.5

40.00 580.0 4000.0 40790.0 16059.06 30002.0 83540.0

60.00 870.0 6000.0 61184.0 24088.19 45003.0 125310.0

100.0 1450.0 10000.0 101974.0 40147.24 75006.0 208850.0

Pre

ssur

e U

nits


Pressure sensor dies, transducers and transmitters

AK2 gauge pressure transducers are based on piezoresistive siliconpressure sensor dies from our own cleanroom production facility.The robust stainless steel/plastic casing features excellent mechanical decoupling.The output signal is neither calibrated nor temperature compensated.

• Piezoresistive MEMS technology• Whetstone bridge with mV output

ratiometric to supply voltage• RoHS-compatible, halogen-free• Dual-in-line package for PCB mounting

Options• Pressure port 4.8 mm tube fitting• Pressure port M5 thread

Pressure sensor dies consist of a piezoresistive silicon element withan anodically bonded glass base. Gauge pressure sensor dies with pressure to front and back side aswell as absolute pressure sensor dies with pressure to front side areavailable.The C29 and C32 pressure sensor dies were developed for absolutepressure measurements in wet media.The difference to conventional absolute pressure sensor dies is thereference pressure chamber which is bonded to the front side andthe pressure is applied to the back side.

• Piezoresistive MEMS technology• Square diaphragm• Whetstone bridge with mV output

ratiometric to supply voltage• Anodically bonded glass base

Options• Temperature sensing diode• HPSP

High-performance solder joint pressuredie (back side solderable die) in development

Overview

Type Description Characteristics

Pressure sensor dies Page 10-13

Pressure sensor transducers Page 14-15

Ove

rvie

w

Type Rated pressure range Pressure measurement

C41 0.025 … 0.060 bar Gauge, back side

C27 0.250 … 1.000 bar Absolute, front side0.100 … 1.000 bar Gauge, back side

C28 2.500 … 25.00 bar Absolute, front sideGauge, back sideGauge, front side

C29 1.000 … 10.00 bar Absolute, back side

C32 1.600 … 25.00 bar Absolute, back sideAbsolute, front sideGauge, back side

C33 1.200 bar Absolute, front side


AK2 0.025 … 25.00 bar Gauge

AT2 absolute pressure transducers are based on piezoresistive sili-con pressure sensor dies from our own cleanroom production facility.The robust stainless steel casing features excellent mechanicaldecoupling.The output signal is not calibrated nor temperature compensated.


ratiometric to supply voltage• RoHS-compatible, halogen-free• TO39 package for PCB mounting


AT2 1.600 … 25.00 bar Absolute

The ASB 1200 E is an SMT-mountable gel-protected barometricpressure transducer with a stainless steel pressure port. The output signal is neither calibrated nor temperature compensated.


ratiometric to supply voltage• RoHS-compatible, halogen-free• SMT ceramic package for PCB mounting


ASB 1200 E 1.200 bar Absolute

T5100 pressure transducers are based on C33 pressure sensor dies.The bridge signal is available uncalibrated and without temperaturecompensation.

• Piezoresistive full bridge• Smallest CSMPTM package• For high-volume consumer applications• RoHS-compatible, halogen-free


T5100 1.200 bar Absolute

Selection ofdifferent diegeometries.


Ove

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w

Overview

Pressure sensor dies, transducers and transmitters

CAU-T pressure transmitters with and without stainless steel casingrepresent temperature compensated and calibrated precision pressure sensors.The electronics of the CAU-T series compensate linearity and temperature errors of the piezo-resistive measurement circuit.

• Piezoresistive MEMS technology• RoHS-compatible, halogen-free

Options• Stainless steel casing (pressure port

G1/8” thread)• Without casing (pressure port M5 thread)• Voltage output 0.5 ... 4.5 V • Current output 4 ... 20 mA

Type Description Characteristics

Pressure sensor transmitters Page 16-23


CAU-T 1.000 … 25.00 bar Absolute0.100 … 25.00 bar Gauge0.100 … 1.000 bar Gauge, symmetrical


AC-T 1.000 … 2.500 bar Absolute0.100 … 25.00 bar Gauge0.100 … 1.000 bar Gauge, symmetrical

• Piezoresistive MEMS technology• Voltage output: 0.5 ... 4.5 V• RoHS-compatible, halogen-free• Dual-in-line package for PCB mounting

Options• Pressure port 4.8 mm tube fitting• Pressure port M5 thread

The AC-T pressure transmitters offer all advantages of the CAU-Tseries. They are completely calibrated and simply to replace, hencesuitable for integration in control blocks and circuit boards.


ASB 1200 V1 0.200 … 1.200 bar AbsoluteASB 1200 VR 0.200 … 1.200 bar Absolute

• Piezoresistive MEMS technology• Voltage output:

0 ... 1 V or ratiometric to VCC

• RoHS-compatible, halogen-free• SMT ceramic package for PCB mounting

The ASB 1200 V1 and ASB 1200 VR are SMT-mountable gel-protected barometric pressure transmitters with a stainless steelpressure port. The heart of these new transmitters is a piezoresistivesensor die, which is mounted in hybrid technology together with a semiconductor ASIC. The voltage output is calibrated andtemperature compensated.

• Digital output, serial interface• Smallest CSMPTM package• For high-volume consumer applications• RoHS-compatible, halogen-free

Options• Customized calibrated pressure range• Customized accuracy

T5300/T5400 pressure transmitters, temperature-compensated andcalibrated with digital (I2C and SPI) interface


T5300 0.3 … 1.1 bar AbsoluteT5400 0.3 … 1.1 bar Absolute


Die

s

Pressure Sensor Dies

Technical data

Type C41 C27

Pressure measurement Gauge AbsoluteMeasured media Non-aggressive fluids and gases Dry non-aggressive gases

Output signal mV, not calibrated, not temperature-compensated

Pressure from Back side Front side

Construction

Dimensions

Die size mm 5.05 � 5.05 3.05 � 3.05

Total height mm 0.9 0.9

Glass thickness mm 0.5 0.5

Hole diameter mm 1.6 –

Maximum ratings

Storage temperature Tst °C –40 … +150 –40 … +150

Operating temperature Ta °C –40 … +135 –40 … +135

Supply voltage (max.) VDD V 10 10

Temperature characteristics VDD = 5 V

Temperature coefficients aRS 10–3/K 2.4 2.4of the bridge resistance (typ.)bRS 10–6/K2 6 6

Temperature coefficients aS 10–3/K –2.2 –2.2of the sensitivity (typ.) bS 10–6/K2 5 5

Temperature coefficient TCVF mV/K –2.2 –2.2of diode flow voltage (typ.)

Characteristics Ta = 25 °C, VDD = 5 V

Bridge resistance (min./max.) RS kV 4.0 … 6.0 2.6 … 4.0

Offset voltage (min./max.) V0 mV –25 … +25 –30 … +30

Diode flow voltage (typ.) VF mV 600 600 at IF = 50 μA

Nonlinearity (typ.) L %FS ±1 ±0.75 ±0.2 ±0.3

Sensitivity (typ.) S mV/bar 1000 700 400 300 120

Output span (typ.) VSp@pr mV 25 42 100 120 120

Rated pressure pr bar 0.025 0.060 0.250 0.400 1.000

Ordering code1)

1) Rated pressure range 0.025 … 25.00 bar.Other values on request. B

5860

1G50

10A

001

B58

601G

5010

A00

2

B58

600C

5010

A00

3

B58

600C

5010

A00

4

B58

600C

5010

A00

5


Die

s

C27 C28 C28 C28

Gauge Absolute Gauge GaugeNon-aggressive fluids and gases Dry non-aggressive gases Non-aggressive fluids and gases Dry non-aggressive gases

mV, not calibrated, not temperature-compensated

Back side Front side Back side Front side

3.05 � 3.05 2.05 � 2.05 2.05 � 2.05 2.05 � 2.05

0.9 1.2 1.2 1.2

0.5 0.8 0.8 0.8

0.7 – 0.4 0.4

–40 … +150 –40 … +150 –40 … +150 –40 … +150

–40 … +135 –40 … +135 –40 … +135 –40 … +135

10 10 10 10

2.4 2.4 2.4 2.46 6 6 6

–2.2 –2.2 –2.2 –2.25 5 5 5

–2.2 –2.2 –2.2 –2.2

2.6 … 4.0 2.7 … 3.7 2.7 … 3.7 2.7 … 3.7

–25 … +25 –30 … +30 –30 … +30 –30 … +30

600 600 600 600

±0.5 ±0.35 ±0.2 ±0.2 ±0.2 ±0.2 ±0.2

500 400 300 120 48 20 12 4.8 48 20 12 4.8 48 20 12 4.8

50 100 120 120 120 120 120

0.100 0.250 0.400 1.000 2.500 6.000 10.00 25.00 2.500 6.000 10.00 25.00 2.500 6.000 10.00 25.00

B58

601C

5010

A00

6

B58

601C

5010

A00

7

B58

601C

5010

A00

8

B58

601C

5010

A00

9

B58

600D

8010

A01

1

B58

600D

8010

A01

2

B58

600D

8010

A01

3

B58

600D

8010

A01

4

B58

601D

8010

A01

6

B58

601D

8010

A01

7

B58

601D

8010

A01

8

B58

601D

8010

A01

9

B58

601D

8010

A02

4

B58

601D

8010

A02

5

B58

601D

8010

A02

6

B58

601D

8010

A02

7


Die

s

Pressure Sensor Dies

Technical data

Type C29 C29

Pressure measurement Absolute AbsoluteMeasured media Non-aggressive fluids and gases


Pressure from Back side Back side

Construction

Dimensions

Die size mm 2.2 � 2.7 2.2 � 2.7

Total height mm 0.8 1.6

Glass thickness mm 0.4 0.4 front, 0.8 back

Hole diameter mm – 0.4

Maximum ratings







Temperature coefficient TCVF mV/K –2.2 –2.2of diode flow voltage (typ.)


Bridge resistance (min./max.) RS kV 2.1 … 3.3 2.1 … 3.3

Offset voltage (min.) V0 mV –65 –55 –45 –35 –65 –55 –45 –35

Offset voltage (max.) V0 mV +30 +30 +30 +30 +30 +30 +30 +30

Diode flow voltage (typ.) VF mV 600 600 at IF = 50 μA

Nonlinearity (typ.) L %FS ±0.2 ±0.2

Sensitivity (typ.) S mV/bar 85 50 30 13 85 50 30 13

Output span (typ.) VSp@pr mV 85 125 120 130 85 125 120 130

Rated pressure pr bar 1.000 2.500 4.000 10.00 1.000 2.500 4.000 10.00

Ordering code1)


5860

0E04

10A

020

B58

600E

0410

A02

1

B58

600E

0410

A02

2

B58

600E

0410

A02

3

B58

600E

0410

A00

2

B58

600E

0410

A00

3

B58

600E

0410

A00

4

B58

600E

0410

A00

5


Die

s

C32 C32 C32 C33

Absolute Absolute Gauge AbsoluteNon-aggressive fluids and gases


Back side Front side Back side Front side

1.65 � 1.65 1.65 � 1.65 1.65 � 1.65 1.00 � 1.00

1.5 1.1 1.1 0.4

0.4 front, 0.8 back 0.8 0.8 –

0.4 – 0.4 –

–40 … +150 –40 … +150 –40 … +150 –40 … +150

–40 … +135 –40 … +135 –40 … +135 –40 … +135

10 10 10 10

2.3 2.3 2.3 2.45 5 5 6

–2.2 –2.2 –2.2 –2.25 5 5 5

– – – –

2.6 … 4.0 2.6 … 4.0 2.6 … 4.0 2.6 … 4.0

–50 –40 –35 –30 –30 –25 –30

+25 +25 +25 +25 +30 +25 +30

– – – –

±0.2 ±0.2 ±0.2 ±0.3

70 30 12 4.8 70 30 12 4.8 70 30 12 4.8 100

112 120 120 120 112 120 120 120 112 120 120 120 120

1.600 4.000 10.00 25.00 1.600 4.000 10.00 25.00 1.600 4.000 10.00 25.00 1.200

B58

600H

8400

A03

7

B58

600H

8400

A03

9

B58

600H

8400

A03

8

B58

600H

8400

A04

0

B58

600H

8000

A00

1

B58

600H

8000

A00

2

B58

600H

8000

A00

3

B58

600H

8000

A00

4

B58

601H

8000

A03

5

B58

601H

8000

A03

3

B58

601H

8000

A03

6

B58

601H

8000

A03

4

B58

600

I000

0A00

1


Tran

sduc

ers

Pressure Transducers

Technical data

Type AK2, KD types AK2, KC types

Pressure measurement GaugeMeasured media Non-aggressive fluids and gases


Terminal assignment Supply voltage VDD+: Pin 1, Output voltage Vout+: Pin 2,Supply voltage VDD–: Pin 3, Output voltage Vout–: Pin 4

Dimensional drawings in mm KD type, tube fitting KC type, thread connection

Maximum ratings








Bridge resistance (typ.) RS kV 5.0 5.0 3.3 3.3 3.3 3.3 3.2 3.2 3.2 3.2

Offset voltage (min./max.) V0 mV –25 … +25

Nonlinearity (typ.) L %FS ±1 ±0.75 ±0.5 ±0.25

Output span (typ.) VSp@pr mV 25 42 50 100 120 120

Rated pressure pr bar 0.025 0.060 0.100 0.250 0.400 1.000 2.500 6.000 10.00 25.00

Ordering code for KD types1)

Ordering code for KC types1)

1) Rated pressure range 0.025 … 25.00 bar.Other values on request.

TDS0019-1

1234 5

6

87

SW10

M5

6.2

14

0.25

14

15

1.5

0.42

3.5

TDS0018-2

3

4.8ø10

1.5

4.5

912

1.53.5

0.42

14

15321

4

8

67

5

0.25

B58

611K

1100

A00

1

B58

611K

1100

A00

2

B58

611K

1100

A00

3

B58

611K

1100

A00

4

B58

611K

1100

A00

5

B58

611K

1100

A00

6

B58

611K

1500

A00

7

B58

611K

1500

A00

8

B58

611K

1500

A00

9

B58

611K

1500

A01

0

B58

611K

1500

A01

1

B58

611K

1500

A01

2

B58

611K

1100

A00

7

B58

611K

1100

A00

8

B58

611K

1100

A00

9

B58

611K

1100

A01

0

B58

611K

1500

A01

3

B58

611K

1500

A01

4

B58

611K

1500

A01

5

B58

611K

1500

A01

6

Top view Top view


Tran

sduc

ers

AT2 ASB 1200 E T5100

AbsoluteNon-aggressive gases Non-aggressive gases Non-aggressive gases


Supply voltage VDD+: Pin 2, Output voltage Vout+: Pin 5, Supply voltage VDD+: Pad 4, Output voltage Vout+: Pad 1, Output voltage Vout+: Pin 1, Ground GND: Pin 2,Supply voltage VDD–: Pin 4, Output voltage Vout–: Pin 3 Supply voltage VDD–: Pad 2, Output voltage Vout–: Pad 3 Output voltage Vout–: Pin 3, Supply voltage VDD: Pin 4

–40 … +125 –40 … +125 –40 … +125

–30 … +85 –40 … +85 –40 … +85

10 10 10

2.3 2.4 2.45 6 6

–2.2 –2.2 –2.25 5 5

2.6 … 4.0 2.6 … 4.0 2.6 … 4.0

–30 … +30 –30 … +30 0 … +30

±0.2 ±0.3 ±0.3

120 120 120

1.600 2.500 4.000 6.000 10.00 16.00 25.00 1.200 1.200

B58

610T

4600

A00

1

B58

610T

4600

A00

2

B58

610T

4600

A00

3

B58

610T

4600

A00

4

B58

610T

4600

A00

5

B58

610T

4600

A00

6

B58

610T

4600

A00

7

B58

610A

0000

A00

1

Upo

n re

ques

t


Tran

smitt

ers

Pressure Transmitters

Technical data

Type CAU-T with stainless steel casing, voltage output

Pressure measurement Absolute Gauge Gauge, symmetr.Measured media Non-aggressive gases Non-aggressive fluids and gases

Output signal 0.5 V … 4.5 V, calibrated and temperature-compensated

Terminal assignment Supply voltage VCC: Pin 1 (brown), Output voltage VA: Pin 2 (white)Ground GND: Pin 3 (blue), Ground (Kelvin guidance) GND: Pin 4 (black)

Dimensional drawings in mm

Maximum ratings

Storage temperature Tst °C –30 … +85 –30 … +85 –30 … +85

Operating temperature Ta °C –25 … +85 –25 … +85 –25 … +85

Compensated range TC °C 0 … +70 0 … +70 0 … +70

DC breakdown voltage (min.) Vis V 500 500 500

Supply voltage (min./max.) VCC V 7.5 … 30 7.5 … 30 7.5 … 30

Supply current (max.) ICC (IA=0) mA 7 7 7

Signal output current (max.) IA mA 2 2 2

Max. output signal VERR V 0.01 0.01 0.01at sensor failure

Temperature characteristics VCC = 15 V within TC

Temperature coefficient of offset (typ.) TCVA0 %FS/K ±0.015 ±0.015 ±0.015

Temperature coefficient of span (typ.) TCVFS %FS/K ±0.015 ±0.015 ±0.015

Characteristics Ta = 25 °C, VCC = 15 V, IA < 0.1 mA

Response time (typ.) t10–90 ms 1 1 1

Offset VA0 V 0.5 ±0.015 0.5 ±0.015 2.5 ±0.015

Nonlinearity (typ.) L %FS ±0.1 ±0.1 ±0.25

Output span VFS V 4.0 ±0.015 4.0 ±0.015 4.0 ±0.015

Rated pressure pr bar 1.000 2.500 6.000 10.00 25.00 0.100 0.250 0.400 1.000 2.500 6.000 10.00 25.00 0.100 0.250 0.400 1.000

Ordering code1)


5862

0H58

10A

018

B58

620H

5810

A01

9

B58

620H

5810

A02

0

B58

620H

5810

A02

1

B58

620H

5810

A02

2

B58

621H

5810

A02

3

B58

621H

5810

A02

4

B58

621H

5810

A02

5

B58

621H

5810

A02

6

B58

621H

5810

A02

7

B58

621H

5810

A02

8

B58

621H

5810

A02

9

B58

621H

5810

A03

0

B58

623H

5810

A03

1

B58

623H

5810

A03

2

B58

623H

5810

A03

3

B58

623H

5810

A03

4

A shielded 4-pole cable (2 m) with amodified (pressure equalisation) femaleM12 locking plug is included in delivery


Tran

smitt

ers

CAU-T without casing, voltage output

Absolute Gauge Gauge, symmetr.Non-aggressive gases Non-aggressive fluids and gases

0.5 V … 4.5 V, calibrated and temperature-compensated

Supply voltage: VCC, Ground: GND,Output signal (reference to GND): VA

–40 … +105 –40 … +105 –40 … +105

–25 … +85 –25 … +85 –25 … +85

0 … +70 0 … +70 0 … +70

500 500 500

4.75 … 5.5 4.75 … 5.5 4.75 … 5.5

7 7 7

2 2 2

0.01 0.01 0.01


±0.015 ±0.015 ±0.015

±0.015 ±0.015 ±0.015


1 1 1

0.5 ±0.015 0.5 ±0.015 2.5 ±0.015

±0.1 ±0.1 ±0.25

4.0 ±0.015 4.0 ±0.015 4.0 ±0.015

1.000 2.500 6.000 10.00 25.00 0.100 0.250 0.400 1.000 2.500 6.000 10.00 25.00 0.100 0.250 0.400 1.000

B58

620T

0510

A00

1

B58

620T

0510

A00

2

B58

620T

0510

A00

3

B58

620T

0510

A00

4

B58

620T

0510

A00

5

B58

621K

0510

A00

6

B58

621K

0510

A00

7

B58

621K

0510

A00

8

B58

621K

0510

A00

9

B58

621K

0510

A01

0

B58

621K

0510

A01

1

B58

621K

0510

A01

2

B58

621K

0510

A01

3

B58

623K

0510

A01

4

B58

623K

0510

A01

5

B58

623K

0510

A01

6

B58

623K

0510

A01

7

TDS0022-8

AT

M5

+10ø18 _

6±1

17_ 0+1

TDS0024-6

CCV

AV

GND

Solderingpins

TDS0023-7

AK

M5

6±1

+1 _19

0_+1ø18 0

TDS0024-6

CCV

AV

GND

Solderingpins


Tran

smitt

ers


Technical data

Type CAU-T with stainless steel casing, current output


Output signal 4 mA … 20 mA, calibrated and temperature-compensated

Terminal assignment Positive supply voltage I+ (VCC): Pin 1 (brown),Negative supply voltage I–: Pin 3 (blue)


Maximum ratings





Supply voltage (min./max.) VCC V 10 … 30 10 … 30 10 … 30

Current limit ICCmax mA 23 23 23

Max. working resistance RL V 1000 1000 1000RL = (VS–10 V) / 0.02 A

Max. output signal IERR mA 3 3 3at sensor failure


Temperature coefficient of offset (typ.) TCICC0 %FS/K ±0.015 ±0.015 ±0.015

Temperature coefficient of span (typ.) TCIFS %FS/K ±0.015 ±0.015 ±0.015

Characteristics Ta = 25 °C, VCC = 15 V, RL = 100 VV


Offset ICC0 mA 4 ±0.08 4 ±0.08 12 ±0.08


Output span IFS mA 16 ±0.08 16 ±0.08 16 ±0.08

Rated pressure pr bar 1.000 2.500 6.000 10.00 25.00 0.100 0.250 0.400 1.000 2.500 6.000 10.00 25.00 0.100 0.250 0.400 1.000

Ordering code1)


5862

0H58

20A

035

B58

620H

5820

A03

6

B58

620H

5820

A03

7

B58

620H

5820

A03

8

B58

620H

5820

A03

9

B58

621H

5820

A04

0

B58

621H

5820

A04

1

B58

621H

5820

A04

2

B58

621H

5820

A04

3

B58

621H

5820

A04

4

B58

621H

5820

A04

5

B58

621H

5820

A04

6

B58

621H

5820

A04

7

B58

623H

5820

A04

8

B58

623H

5820

A04

9

B58

623H

5820

A05

0

B58

623H

5820

A05

1

A shielded 4-pole cable (2 m) with amodified (pressure equalisation) femaleM12 locking plug is included in delivery

TDS0021-9

pI

I + (VCC)

I -

LR

+

VS

GND

RLV_


Tran

smitt

ers

CAU-T without casing, current output

Absolute Gauge Gauge, symmetr.Non-aggressive gases Non-aggressive fluids and gases

4 mA … 20 mA, calibrated and temperature-compensated

Positive supply voltage: I+Negative supply voltage: I–

–40 … +105 –40 … +105 –40 … +105

–25 … +85 –25 … +85 –25 … +85

0 … +70 0 … +70 0 … +70

500 500 500

10 … 30 10 … 30 10 … 30

23 23 23

1000 1000 1000

3 3 3

±0.015 ±0.015 ±0.015

±0.015 ±0.015 ±0.015

1 1 1

4 ±0.08 4 ±0.08 12 ±0.08

±0.1 ±0.1 ±0.25

16 ±0.08 16 ±0.08 16 ±0.08

1.000 2.500 6.000 10.00 25.00 0.100 0.250 0.400 1.000 2.500 6.000 10.00 25.00 0.100 0.250 0.400 1.000

B58

620T

0520

A00

1

B58

620T

0520

A00

2

B58

620T

0520

A00

3

B58

620T

0520

A00

4

B58

620T

0520

A00

5

B58

621K

0520

A00

1

B58

621K

0520

A00

2

B58

621K

0520

A00

3

B58

621K

0520

A00

4

B58

621K

0520

A00

5

B58

621K

0520

A00

6

B58

621K

0520

A00

7

B58

621K

0520

A00

8

B58

623K

0520

A00

1

B58

623K

0520

A00

2

B58

623K

0520

A00

3

B58

623K

0520

A00

4

TDS0022-8

AT

M5

+10ø18 _

6±1

17_ 0+1

Solderingpins

TDS0023-7

AK

M56±

1+1 _

190

_+1ø18 0

Solderingpins

TDS0021-9

pI

I + (VCC)

I -

LR

+

VS

GND

RLV_


Tran

smitt

ers


Technical data

Type AC-T series, LN types, voltage output AC-T series, KD types, voltage output


Output signal 0.5 V … 4.5 V, calibrated and temperature-compensated

Terminal assignment Supply voltage VCC: Pin 1, Ground GND: Pin 2,Output signal (reference to GND) VA: Pin 3


Maximum ratings





Supply voltage (min./max.) VCC V 4.75 … 5.5 4.75 … 5.5 4.75 … 5.5

Supply current (max.) ICC (IA=0) mA 7 7 7

Signal output current (max.) IA mA 2 2 2

Max. output signal VERR V 0.01 0.01 0.01at sensor failure


Temperature coefficient of offset (typ.) TCVA0 %FS/K ±0.015 ±0.015 ±0.015

Temperature coefficient of span (typ.) TCVFS %FS/K ±0.015 ±0.015 ±0.015



Offset VA0 V 0.5 ±0.015 0.5 ±0.015 2.5 ±0.015


Output span VFS V 4.0 ±0.015 4.0 ±0.015 4.0 ±0.015

Rated pressure pr bar 1.000 2.500 0.100 0.250 0.400 1.000 0.100 0.250 0.400 1.000

Ordering code1)


5862

0L11

10A

052

B58

620L

1110

A05

3

B58

621K

1110

A05

4

B58

621K

1110

A05

5

B58

621K

1110

A05

6

B58

621K

1110

A05

7

B58

623K

1110

A05

8

B58

623K

1110

A05

9

B58

623K

1110

A06

0

B58

623K

1110

A06

1

TDS0027-3

18.8

6.2

7.8

ø4.8

TDS0026-4

4

1

5

8

14.6 (575 mil)7.

62 (3

00 m

il)

ø0.8 (ø32 mil)

TDS0028-2

ø3

ø4.8

1.5 9

3.1

9

0.25

14.6±0.5

18.8

TDS0026-4

4

1

5

8

14.6 (575 mil)

7.62

(300

mil)

ø0.8 (ø32 mil)

For PCB mounting. Terminal assignment For PCB mounting. Terminal assignment


Tran

smitt

ers

AC-T series, KC types, voltage output

Gauge Gauge, symmetr.Non-aggressive fluids and gases

0.5 V … 4.5 V, calibrated and temperature-compensated

Supply voltage VCC: Pin 1, Ground GND: Pin 2,Output signal (reference to GND) VA: Pin 3

–40 … +105 –40 … +105

–25 … +85 –25 … +85

0 … +70 0 … +70

500 500

4.75 … 5.5 4.75 … 5.5

7 7

2 2

0.01 0.01

±0.015 ±0.015

±0.015 ±0.015

1 1

0.5 ±0.015 2.5 ±0.015

±0.1 ±0.25

4.0 ±0.015 4.0 ±0.015

0.100 0.250 0.400 1.000 2.500 6.000 10.00 25.00 0.100 0.250 0.400 1.000

B58

621K

1510

A06

2

B58

621K

1510

A06

3

B58

621K

1510

A06

4

B58

621K

1510

A06

5

B58

621K

1510

A06

6

B58

621K

1510

A06

7

B58

621K

1510

A06

8

B58

621K

1510

A06

9

B58

623K

1510

A07

0

B58

623K

1510

A07

1

B58

623K

1510

A07

2

B58

623K

1510

A07

3

TDS0025-5

M510

5.2

6±1

3.7

0.46

3 x 2.54

17.8

1

For PCB mounting. Terminal assignment

TDS0026-4

4

1

5

8

14.6 (575 mil)

7.62

(300

mil)

ø0.8 (ø32 mil)


Tran

smitt

ers


Technical data

Type ASB 1200 V1 ASB 1200 VR

Pressure measurement Absolute AbsoluteMeasured media Non-aggressive gases Non-aggressive gases

Output signal 0…1V, calibrated and temperature-compensated 10 … 90% VCC, calibrated and temp.-compensat.

Terminal assignment Supply voltage VCC: Pad 4, Output voltage VA: Pad 3,Ground GND: Pad 2


Maximum ratings



Compensated range TC °C 0 … +70 0 … +70

DC breakdown voltage (min.) Vis V 500 500

Supply voltage (min./max.) VCC V 2.7 … 5.5 2.7 … 5.5

Supply current (max.) ICC (IA=0) mA 5 5

Signal output current (max.) IA mA 2 2

Resolution bit 11 11


Temperature coefficient of offset (typ.) TCVA0 %FS/K ±0.015 ±0.015

Temperature coefficient of span (typ.) TCVFS %FS/K ±0.015 ±0.015


Response time (typ.) t10–90 ms 2 2

Offset VA0 V 0 @ 200 mbar 10% VCC@ 200 mbar

Nonlinearity (typ.) L %FS ±0.1 ±0.1

Output span VFS V 1 80% VCC

Rated pressure range bar 0.2 … 1.2 0.2 … 1.2

Ordering code1)

1) Rated pressure range 1.200 bar.Other values on request. B

5862

0A00

10A

001

B58

620A

0010

A00

2


Tran

smitt

ers

T5300 T5400

Absolute AbsoluteNon-aggressive gases Non-aggressive gases

Serial bus, I2C, SPI Serial bus, I2C, SPI

Ground GND: Pad 1 and 4, INT/SS: Pad 2, VDD: Pad 1, CAP: Pad 2, Ground GND: Pad 3, PROG: Pad 4,VDD: Pad 3, SCL/SCLK: Pad 5, SDA/MISO: Pad 6 RST/SS: Pad 5, MOSI: Pad 6, SDA/MISO: Pad 7, SCL/SCLK: Pad 8

–40 … +125 –40 … +125

–40 … +85 –40 … +85

customer-specific customer-specific

– –

2.7 … 5.5 1.8 … 3.6

3 2

– –

14 16

– –

– –

– –

– –

– –

– –

0.3 … 1.1 0.3 … 1.1

Upo

n re

ques

t

Upo

n re

ques

t


Term

s

Description of Terms

Characteristic curve

The key parameters of the character-istic curve are described below:

Offset voltage V0 = VA(p0)

The output voltage VA at zero pres-sure, known as the offset voltage,typically varies between ±25 mV1)

due to the spread of the technologi-cal parameters.

Sensitivity S = (Vr–V0) / (pr–p0)

The sensitivity is the quotient of the changes of the output voltageand the applied pressure. Thinnerdiaphragms and larger surfacesincrease the sensitivity and decreasethe loadbearing capacity of thediaphragm. Every design is thereforea compromise between high sensi-tivity and a sufficient pressure over-load factor.Depending on the pressure range,the sensitivity extends between 0.5and 1800 mV/bar1). The spread of the technological parameters meansthat the sensitivity varies within a single pressure range.

Nonlinearity

L = (Vz–V0) / (Vr–V0) – (pz–p0) / (pr–p0)

The nonlinearity describes the deflec-tion of the characteristic curve or thedeviation from an ideal straight line.The above formula calculates thenonlinearity by the end-point method.Depending on the pressure range,the nonlinearity typically varies from±0.1 to ±1.0% FS2). In many cases,the nonlinearity is preserved despitethe hysteresis error, as this is verysmall in comparative terms.

Hysteresis

For an output signal indicating thesame pressure, this represents thegreatest difference between mea-surements made in the direction ofincreasing and (subsequently) de-creasing pressure. This error cannotbe determined or compensated.However, the effect is very small andcan be neglected in most applica-tions.

Temperature effects

The offset, sensitivity and bridgeresistance are functions of the tem-perature:

Offset V0

V0 = V0(25 °C) +TCV0· (ϑ–25 °C)· VDD

The temperature coefficient of the off-set voltage typically varies between±4 μV/VK depending on the techno-logical parameters. This effect can beneglected in most applications.

Sensitivity S

S(ϑ ) = S(25 °C) · [1+αS · (ϑ–25 °C) +βS · (ϑ–25 °C)2]

The temperature coefficient of thesensitivity is much more significant.Depending on the technological para-meters, a typical value of αS rangesbetween –3.1 and –1.8 · 10-3/K. Thesensitivity thus decreases with tem-perature rise. A typical value of βS is 6 · 10-6/K2.

Bridge resistance RS

RS(ϑ ) = RS(25 °C) · [1 + αRS · (ϑ–25 °C) + βRS · (ϑ–25 °C)2]

The bridge resistance is directly pro-portional to the temperature (at25 °C, 3 kV and 5 kV). Dependingon the technological parameters, atypical value of αRS ranges between2.0 and 2.5 · 10-3/K. A typical valueof bRS is 6 · 10-6/K2.

1) At VDD = 5 V voltage source2) FS = Vr–V0 (full scale)


Cau

tions

Cautions and Warnings

Storage (general)

All pressure sensors should be stored in their originalpackaging. They should not be placed in harmful environ-ments such as corrosive gases nor exposed to heat ordirect sunlight, which may cause deformations. Similareffects may result from extreme storage temperaturesand climatic conditions. Avoid storing the sensor dies inan environment where condensation may form or in alocation exposed to corrosive gases, which will adverse-ly affect their performance. Plastic materials should not beused for wrapping/packing when storing or transportingthese dies, as they may become charged. Pressuresensor dies should be used soon after opening their sealand packaging.

Operation (general)

Media compatibility with the pressure sensors must beensured to prevent their failure. The use of other mediacan cause damage and malfunction. Never use pressuresensors in atmospheres containing explosive liquids orgases.

Ensure pressure equalization to the environment, if gauge pressure sensors are used. Avoid operating the pressure sensors in an environment where condensationmay form or in a location exposed to corrosive gases.These environments adversely affect their performance.

If the operating pressure is not within the rated pressurerange, it may change the output characteristics. This mayalso happen with pressure sensor dies if an incorrectmounting method is used. Be sure that the applicablepressure does not exceed the overpressure, as it maydamage the pressure sensor.

Do not exceed the maximum rated supply voltage nor therated storage temperature range, as it may damage thepressure sensor.

Temperature variations in both the ambient conditionsand the media (liquid or gas) can affect the accuracy ofthe output signal from the pressure sensors. Be sure tocheck the operating temperature range and thermal errorspecification of the pressure sensors to determine theirsuitability for the application.

Connections must be wired in accordance with the terminal assignment specified in the data sheets. Careshould be taken as reversed pin connections can damage the pressure transmitters or degrade their performance. Contact between the pressure sensor terminals and metals or other materials may cause errorsin the output characteristics.

Design notes (dies)

This specification describes the mechanical, electricaland physical requirements of a piezoresistive sensor diefor measuring pressure. The specified parameters arevalid for the pressure sensor die with pressure applicationeither to the front or back side of the diaphragm asdescribed in the data sheet. Pressure application to the other side may result in differing data. Most of theparameters are influenced by assembly conditions.Hence these parameters and the reliability have to bespecified for each specific application and tested over itstemperature range by the customer.

Handling/Mounting (dies)

Pressure sensor dies should be handled appropriatelyand not be touched with bare hands. They should only bepicked up manually by the sides using tweezers. Their topsurface should never be touched with tweezers. Latexgloves should not be used for handling them, as this willinhibit the curing of the adhesive used to bond the die to the carrier. When handling, be careful to avoid cutscaused by the sharp-edged terminals. The sensor diemust not be contaminated during manufacturingprocesses (gluing, soldering, silk-screen process).

The package of pressure sensor dies should not to beopened until the die is mounted and should be closed after use. The sensor die must not be cleaned. The sensor die must not be damaged during the assemblyprocess (especially scratches on the diaphragm).

Soldering (transducers, transmitters)

The thermal capacity of pressure sensors is normally low,so steps should be taken to minimize the effects of external heat. High temperatures may lead to damage orchanges in characteristics.

A non-corrosive type of flux resin should normally be usedand complete removal of the flux is recommended.

Avoid rapid cooling due to dipping in solvent. Note thatthe output signal may change if pressure is applied to theterminals during soldering.

This listing does not claim to be complete, but merelyreflects the experience of EPCOS AG.

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08/09

The addresses of our worldwide distributors and regional sales offices are available at www.epcos.com/sales

© EPCOS AG 2009, Corporate Center, P.O.Box 80 17 09, 81617 Munich, Germany, T +49 89 636 09, F +49 89 636 226 89Reproduction, publication and dissemination of this publication and the information contained therein without EPCOS' prior express consent is prohibited.

26 © EPCOS AG 2009

© E P C O S A G 2 0 0 9 · C o r p o r a t e C e n t e r · E d i t i o n 0 8 / 2 0 0 9O r d e r i n g N o . E P C : 6 9 0 0 4 - 7 6 0 0 · P r i n t e d i n G e r m a n y · P P 0 8 0 9 5 .

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