Precision Linear Motorized Stages

Proteep MallikOPTI 521 Tutorial Presentation

December 4, 2006

OPTI 521 Tutorial Presentation 2April 19, 2023

Precision Linear Motorized Stages

Long travel (~2m) High precision (~nm level) Stepper drives Parker Motion products

OPTI 521 Tutorial Presentation 3April 19, 2023

Outline Motion Control

what, where and why? System Components

stage (long range) motor (servo vs stepper) controller computer/software

Examples vendors specifications cost

Parker Motion System Linear sliders and stages 6K controller Computer & monitor

Null test system Conclusions

OPTI 521 Tutorial Presentation 4April 19, 2023

Motion Control Precise positioning of optics and mechanics Used in:

laser machining, weldingprinting, patterningwafer fabrication, lithography robotics… and of course, in many optical systems

OPTI 521 Tutorial Presentation 5April 19, 2023

Motion Control Why motorized?

repeatable, precise and smooth moving heavy parts automation easy to manage complex systems less manpower

OPTI 521 Tutorial Presentation 6April 19, 2023

System Components-overall system

ROTARY BRAKE

SHAFT BRAKE

OPTI 521 Tutorial Presentation 7April 19, 2023

System Components-stage

•Range of travel (~ 2m)

•Precision (~ nm)

•Repeatability (~ sub nm)

•Stiffness (extruded Al, excellent)

•Motor requirements (torque, efficiency)

•Cost (~$5000)

•Ease of operation (cabling, computer control)

•Mount on large, flat surface (minimum deflection)

OPTI 521 Tutorial Presentation 8April 19, 2023

System Components-motor

Servo Ironcore, ironless, slotless Typical repeatability ~1nm, resolution ~0.01nm Needs position encoders Very smooth, fast motion for large loads AC or DC, high voltage Expensive (~$5000 +)

Stepper Multi-pole motors N-bit encoders (2N bits/step) Repeatability ~10nm, resolution ~sub nm No need for position encoder Easier maintenance and lower cost than servo

OPTI 521 Tutorial Presentation 9April 19, 2023

System Components-controllers

•Interfaces user to linear stage

•via computer or remote control

•Drive, encoder, limit and communication inputs

•Programmable

OPTI 521 Tutorial Presentation 10April 19, 2023

System Components-computer

•RS-232 or ethernet communication

•Software from manufacturer

•Programming via Active X or other windows platforms

•Industrial computers, touchscreen control monitors

OPTI 521 Tutorial Presentation 11April 19, 2023

Vendors

Parker Automation (Parker Hannifin, Daedal Positioning, Compumotor)

Aerotech Velmex Newmark

OPTI 521 Tutorial Presentation 12April 19, 2023

Specifications

Image

$1800$800$5000$2000$25,000$15,000Cost

150kg16kg630kg1000kg50kg135kgMax Load

4μm2.5μm1.3μm0.1nm0.4μm0.5μmRepeatability

6μm(not given)(not given)0.06nm0.001μmResolution

2m0.8m2m1.5m1.2m1mTotal Travel

BiSlideXSlide406XR400STABL2000ALS5000

Velmex(stepper)

Parker(stepper)

Aerotech(servo)

OPTI 521 Tutorial Presentation 13April 19, 2023

Parker Automation400ST Square Rail Sliders 406XR Series Sliders

Drive and Motor Screw with stepper motor Linear bearing, ballscrew & motor

Total Travel 1.5m 2m

Max acceleration 20m/s2 20m/s2

Repeatability 0.1nm 1.3μm

Maximum Load 1000kg 630kg

Stage Weight 25kg 2.7kg

Size 2m X 0.2m X 0.12m 2.3m X 0.15m X 0.05m

Cost $2000 Up to $5000

www.parkermotion.com

OPTI 521 Tutorial Presentation 14April 19, 2023

Parker Automation

•Workstations

•Ethernet communication with controllers

•Controllers can be used in client-server modes

•Controllers can be connected to each other via ethernet hub

•Touchscreen monitors

OPTI 521 Tutorial Presentation 15April 19, 2023

Null Test System

3-axis stage

Tilt stage

CGH positioning stage

OPTI 521 Tutorial Presentation 16April 19, 2023

Null Test System

6K8 Controller

Drivers (7)

Computer communication

Input Power Supply

•5A drivers/motors

•20A, 120V AC input power

OPTI 521 Tutorial Presentation 17April 19, 2023

Conclusions

Precision motion control a reality and necessity

3 choices to make: stage, motor, controller Complete automation via computer and

available software