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Accelerometer
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29/10/2013 HET232 Embedded Microcontrollers 2
Physical Structure
The sensor is a micro-machined structure created in silicon. Ithas a moveable element that is deflected by gravity oracceleration. Its position is measured by having the moveableelement form the centre component in three-element capacitor.The capacitance of the two capacitors formed changes as thecentral element is deflected.
The capacitors are incorporated into a switched capacitormeasurement system that allows these changes to be convertedinto a voltage.
This means that the accelerometer may be used to measureacceleration or the component of gravitational force in one axis
Stationary Plates
Moveable Platedeflected by acceleration
C1
C2
Sensitive Axis
D
AC
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Physical Structure
Micro-machined in silicon very shallow 3-Dstructure
Flexible tethers
Measurement
Acceleration
Suspended Mass
Measurement
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Self-test
Accelerometers are often incorporatedin critical applications e.g. car air-bagsensors.
Need mechanicalself-test function. This can be achieved by
electrostatically deflecting the beam!
This tests the entire system includingthe mechanical elements.
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Output Choices
Internally, the accelerometer produces ananalogue voltage that represents theacceleration.
For some accelerometer (e.g. MMA1260D)
this voltage is amplified and becomes theoutput of the sensor.
Other accelerometers (e.g. AD702A) may
use a pulsed digital output where the periodis related to the acceleration.
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Applications
Car Airbag sensors Pedometers
Measurement of vibration in machines.
Novelty input devices e.g. a mobile phonethat shuts up when you tap or shake it!
Inclinometers (measures gravity component).
Inertial guidance systems.
Computer game controllers (Wii, PS3)
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g
Measuring Tilt using Gravity
Measures Force in thisdirection
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