Piezo Step Linear Motors / High-Force Linear Actuators

Piezo Ceramic Motor, Vacuum Compatible LInear Motor , Non-magnetic Motor, Linear Actuator

Micrometer to Picometer Precision & Long-Travel RangesHigh-Force Linear ActuatorsPiezo Step Linear Motors /

http://www.physikinstrumente.com/en/products/piezo_motor/nexline.php


2

Piezoelectric / Motorized Actuator Solutions

Nanometer-Precision Actuators and Motors

Piezo Stack Actuators

� PICMA® Multilayer andPICA™ Stack Actuators

� Forces to 100 kN � Sub-Nanometer Resolution � Fast Response (to

Microsecond-Range) � High Reliability and Long

Lifetime� Travel to 200 µm

PI is the leading manufacturerof ultra-high-precision actua-tors for nanopositioning andmicropositioning applicationsin industries such as Semi-conductors; Biotechnology andMedicine; Lasers, Optics, Micros-copy; Aerospace Engineering;Precision Machining; Astronomyand Microsystems Technology.

NEXLINE® Nanopositioning

Actuators

� PiezoWalk® Drive� High-Dynamics Operation

Mode� Forces to 600 N � <0.1 nm Resolution � Self-Locking at Rest� Travel to 20 mm (Basically

Unlimited)� High Reliability and Long

Lifetime� Non-Magnetic

NEXACT® Nano Positioning

Actuators

� PiezoWalk® Drive� Compact Dimensions� Forces to 10 N � <0.1 nm Resolution � Self-Locking at Rest� Travel to 25 mm (Basically

Unlimited) � Velocity to 10 mm/s� Non-Magnetic

PILine® Linear Actuators /

Motors

� Ultrasonic Piezomotors andDrives

� Velocity to 500 mm/s � Compact Dimensions� Travel to 150 mm (Basically

Unlimited)� Forces to 7 N � Self-Locking at Rest� Resolution to 50 nm� Non-Magnetic

Motorized Actuators

� DC & Stepper Motors � Forces to 400 N � Travel to 50 mm � Resolution to 50 nm

Flexure-Guided Piezo

Actuators

� PICMA® PiezoceramicMultilayer Actuators

� Sub-Nanometer Resolution � Fast Response (Millisecond-

Range) � Excellent Guiding Precision � Travel to 2 mm


Piezo • Nano • Positioning

PiezoWalk® Precision Drives –

Millimeter Travel, Nanometer

Resolution, High Forces

PiezoWalk® drives break awayfrom the limitations of conven-tional Nanopositioning actua-tors. They offer a basically

unlimited travel range andstill provide the characteristicfeatures of a piezoelectricactuator: an open-loop resolu-tion down to 30 picometers anda very high stiffness for dynam-ic operation and force genera-tion. PI offers two product lines

� PiezoWalk® drives are availa-ble for non-magnetic appli-cations such as super-con-ductivity experiments. Theydo not create magneticfields nor are they influen-ced by them.

� The active parts inPiezoWalk® drives are madeof vacuum-compatible cera-mics. The drives also workin UV-light environments.

� NEXLINE® drives can surviveshock loads of several gduring transportation.

� PiezoWalk® drives are available in three levels of integration to provide flexibility for OEMs: OEMdrives, packaged actuatorsand integrated into complex positioningsystems such as multi-axistranslation stages or 6-DOFHexapods.

based on different versions of the PiezoWalk® principle: NEXLINE® and NEXACT®. Bothprovide specific advantagesdepending on the application.

PiezoWalk® piezo steppingdrives usually consist of sever-al individual piezo actuatorsand generate motion throughsuccession of coordinatedclamp / unclamp and shear-motion cycles (steps). Eachcycle provides only a fewmicrons of movement, but run-ning at hundreds of hertz, thedrive achieves continuousmotion in the mm/secondrange.

The PiezoWalk® working princi-ple provides high force capabil-ities, resolution and repeatabil-

ity. These properties are typi-cally better for piezo steppingactuators compared to inertiadrives or ultrasonic motors.The operation is possible intwo different modes: a high-resolution, high dynamics ana-log mode within a single step,and a step mode with virtuallyunlimited travel range.

50 picometer steps with a NEXLINE®

drive, measured with external ultra-high-resolution capacitive sensor.This performance provides a big safetymargin for next generation nano-technology applications

Features and Advantages of

PiezoWalk® Drives

� Very high resolution, limitedtypically only by the sensor.In fine-adjustment, analogmode, resolution of 30 pico-meters has been demonstra-ted.

� High force generation andstiffness. NEXLINE® drivescan hold and generate for-ces to 600 N, NEXACT® to15 N.

� PiezoWalk® drives hold astable position to nanome-ter level in power-off mode.Due to the actuator design,the maximum clampingforce is applied at rest.

� Because a position can beheld with zero operating vol-tage, leakage currents can-not affect the integrity of thepiezo drive.

6-axis parallel-kinematic nanopositioning system (Hexapod) with N-215 based NEXLINE® high-load actuators for use in strong magnetic fields

Custom PiezoWalk® linear actuator

3

NEXLINE® linear actuator principle



4

NEXLINE® High-Force Drives

for Nanopositioning

NEXLINE® systems are basedon very rugged, high-efficiencyshear and clamping actuatorsand incorporate a preloadingmechanism to provide pushingand holding forces up to 600 Nwith high lifetime. The rigiddesign with resonant frequen-cies of hundreds of hertz allowsthe construction of very stiffstructures and helps to sup-press vibration. The analogoperating mode can be usedfor dithering and active vibra-tion cancellation.

Compact NEXACT® Drives for

Moderate Forces

NEXACT® drives use bendingactuators which combine thefeed forward and the clampingcycles. They provide push/pullforces to 15 N with maximumvelocities of more than 10 mm/s at low operating volt-ages of 40 V. The compact andcost-effective NEXACT® drivesare available with various driveelectronics, ranging from cost-effective OEM drives for open-loop operation in steppingmode to the sophisticated E-861 servo-controller for high-resolution, closed-loop lineartranslation stages.


N-215 high-load NEXLINE® linear drive provides holding forces to 600 N and 20 mm travel

5


Selection Guide

PiezoWalk® Drives

Models Description Holding Force Resolution Travel

N-310 NEXACT® 15 N 0.03 nm 20 mmCompact OEM PiezoWalk® Drives (open-loop)

N-111 NEXLINE® 80 N 0.03 nm 6 mmMiniature High-Load Piezo Nanopositioning Drive (open-loop),

5 nm (closed-loop version)

N-214/ NEXLINE® 300 N (N-214) 0.03 nm 20 mmN-215 High-Load Piezo Nanopositioning Drive (open-loop),

600 N (N-215) 5 nm (closed-loop version)

Models Description Resolution Active Axes Travel

N-310K001 Compact NEXACT® 25 nm X 20 mmLinear Nanopositioning Stage (closed-loop)

N-510 NEXLINE® 10 nm Z / Tip / Tilt 1.3 mm (Z)Z, Tip, Tilt Platform, 200 N (closed-loop) (parallel kinematics) 10 mrad

N-511 NEXLINE® 5 nm Z / Tip / Tilt 1 mm (Z)Z, Tip, Tilt Platform, 500 N (closed-loop) (parallel kinematics) 8 mrad

N-512 NEXLINE® 15 nm X, Y 6 x 6 mmX, Y Platform, 100 N, Non-Magnetic (closed-loop)

Positioning Systems with PiezoWalk® Drives


6

N-310 NEXACT® PiezoWalk® lin-ear drives feature travel rangesof 20 mm and push/pull forcecapacities to 10 N in a compactpackage of only 25 x 25 x 12 mm.With their high resolution,NEXACT® drives, are ideal forhigh-precision positioning overlong travel ranges.

The N-310 can be operated inopen-loop and closed-loop mo-de (with the addition of an ex-ternal position sensor). A varie-ty of NEXACT® controllers facil-itates the integration into micro-or nanopositioning applications.

Advantages of PiezoWalk®

piezo stepping drives

NEXLINE® and NEXACT® drivesoffer several advantages overtraditional drive technologies:� Resolution in the picometer

range� Compact dimensions� High drive forces from ten

newtons (NEXACT®) up toseveral hundred newtons(NEXLINE®)

� High dynamic performancewith sub-microsecond res-ponse

� Self-locking when powereddown; no holding current

� Zero backlash, no wear ormaintenance, no mechani-cal components like gearsor leadscrews.

� Non-Magnetic and VacuumCompatible Operating Prin-ciple

Working Principle for

Application Flexibility

NEXACT® PiezoWalk® technolo-gy overcomes the limitationsof conventional nanoposition-ing drives and combines virtu-ally unlimited travel rangeswith high stiffness in a verysmall package. Furthermore,NEXACT® actuators providepiezo-class resolution (farbelow one nanometer) andmillisecond responsiveness.The special drive designreduces the operating voltageto 40 V and below.

In operation, piezoceramicbending elements act on therunner, which is connected tothe moving part of the applica-tion. The length of the runnerdetermines the travel range.Force capacity, resolution andvelocity are determined bythe piezo geometry anddrive electronics and arescalable. To move the runnerover longer distances thesteping mode is used, whereasfor distances smaller than onestep, the linear (analog) modeenables high-dynamics posi-tioning with resolutions farbelow one nanometer.

Wear and Maintenance-Free

In contrast to ordinary DC orstepper motor drives, thePiezoWalk® drives effect linearmotion directly, without theneed to transform rotation withmechanical elements such as gears, leadscrews and nuts. Therefore, mechanical

limitations such as backlashand wear are eliminated andthe drive is maintenance-free.

Self-Locking PiezoWalk® Piezo

Stepping Drive

NEXLINE® and NEXACT® exhib-it high stiffness and are self-locking even when powereddown due to the clampingaction of the piezo actuators inthe mechanics. This entailsnanometer position stability atrest, with no heat dissipationor servo-dither.

Controller and Drive

Electronics appropriated for

the Application

NEXACT® actuators requirespecial drive electronics tocontrol the complex steppingsequences. The E-860 seriesNEXACT® controllers are avail-able in different open-andclosed-loop versions. Forexample, the E-861 includes acomplete NEXACT® servo-con-troller with low-noise, 24-bitdrivers and a powerful DSP. Italso comes with ample soft-ware for easy integration andhighly effective computer con-trol. For applications which donot require the highest resolu-tion lower-priced drive elec-tronics, ranging all the way toOEM boards, can be ordered.

The products described in thisdocument are in part protectedby the following patents:German Patent No. P4408618.0

N-310Compact NEXACT® OEM Piezo Stepping Drives with Long Travel Ranges

� 20 mm Standard Travel Range, Flexible Choice of the

Runner Length

� Compact and Cost-Effective Design

� 0.03 nm Resolution

� To 10 N Push/Pull Force

� Low Operating Voltage

� Self Locking, with no Head Dissipation, Nanometer Stability

� Non-Magnetic and Vacuum-Compatible Working Principle

Application Examples

� Semiconductor technology

� Wafer inspection

� Nano lithography

� Surface MeasurementTechnique

� Profilometry

� Microscopy

� Motion in strong magneticfields

Ordering Information

N-310.01

NEXACT® OEM linear drive, 20 mm, 10 N

Ask about custom designs

N-310 Actuator with E-861 Servo-Controller (integrated drive electronics)

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Technical Data

Models N-310.01 Tolerance

Active axes X

Motion and positioning

Travel range ±20 mm

Step size (in step mode) 5 nm to 5 µm

Travel range in analog operation 7 µm max.

Open-loop resolution 0.025 nm typ.

Step frequency 1.5 kHz* max.

Max. speed 10 mm/s* max.

Mechanical properties

Push/Pull force (active) 10 N max.

Drive properties

Drive type NEXACT® linear drive

Operating voltage -10 V to +40 V

Miscellaneous

Operating temperature range 0 to 50 °C

Body material Stainless steel

Mass 50 g ±5 %

Cable length 1.5 m ±10 mm

Connector NEXACT® linear drive (D-Sub 15, 3 row)

Recommended controller/driver E-860-series

* Depending on the control electronics.N-310.01 Actuator, dimensions in mm

Translation stage with N-310 NEXACT® drive. The positioner offers 20 mm travelrange with an encoder resolution of 25 nm


88

The innovative N-111 NEX-LINE® OEM drives are compactactuators for nanopositioningwith travel ranges to 5 mm,high resolution, and generatedforces to 50 N.

Two versions are available, theN-111.3A closed-loop modeland N-111.30 open-loop mo-

del. Both can be operatedwith the sophisticated E-755NEXLINE® motion controller.The N-111.3A is equipped witha 5 nm resolution linear enco-der for long-range positioncontrol. Due to its low-noise,24 bit D/A converters, the E-755controller can provide pico-meter level resolution in thehighly-dynamic short-range /dithering mode.

NEXLINE® Working Principle

for Application Flexibility

NEXLINE® PiezoWalk® drivescan be used wherever highloads must be positioned veryprecisely over long distancesand then perhaps subjected tosmall-amplitude dynamic ad-justment, as for active vibra-tion control. By varying thecombination of longitudinaland shear piezo elements, thestep size, dynamic operatingrange (analog travel), clampingforce, speed and stiffness can

all be optimized for a particularapplication.

NEXLINE® PiezoWalk® Piezo-ceramic clamping and shearelements act directly on a mov-ing runner that is coupled tothe moved object. While therunner can be moved largerdistances in step mode, analogoperation over a distance ofless than one step enableshigh-dynamics positioningwith resolutions far below onenanometer. The patentedPiezoWalk® overcomes thelimitations of conventionalnanopositioning actuators andcombines long travel rangeswith high resolution and stiff-ness.

Advantages of PiezoWalk®

Piezo Stepping Drives

NEXLINE® and NEXACT® drivesoffer several advantages overtraditional drive technologies:

� Resolution in the picometerrange

� Compact dimensions� High drive forces from ten

newtons (NEXACT®) up toseveral hundred newtons(NEXLINE®)

� High dynamic performancewith sub-microsecond res-ponse

� Self-locking when powereddown; no holding current

� Zero backlash, no wear ormaintenance, no mechanicalcomponents like gears orleadscrews.

� Non-magnetic and vacuumcompatible operating prin-ciple

NEXLINE® Actuators are

distinguished by a number of

unique outstanding features:

� Cleanroom compatibility � Vacuum compatibility� Operation under conditions,

which prohibit usage ofmagnetic drives

Notes

The products described in thisdocument are in part protectedby the following patents:German Patent No. 10148267US Patent No. 6,800,984

N-111NEXLINE® OEM Piezo Nanopositioning Stepping Drive


N-111.30

NEXLINE® OEM NanopositioningDrive, 5 mm, 50 N

N-111.3A

NEXLINE® OEM NanopositioningDrive, 5 mm, 50 N, Closed-Loop,5 nm Resolution

Ask about custom designs



� Semiconductor testing



� Nano imprint

� Nanometrology

� Active vibration damping

� Motion in strong magnetic fields

� 5 mm Travel

� To 50 N Pull / Push Force and 80 N Holding Force

� Self Locking at Rest, no Heat Generation


Z / tip / tilt platform with NEXLINE® drives and position sensors; 300 mm (12”) diameter, 200 N load capacity, 1.3 mm travel range, 10 mrad tilt range

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N-111 compact high-load OEM nanopositioning actuator


99

Technical Data

Models N-111.30 N-111.3A Tolerance

Active axes X X


Travel range 5 mm 5 mm

Step size (in step mode) 10 nm to 4 µm 10 nm to 4 µm

Integrated sensor - Linear encoder

Sensor resolution - 5 nm

Analog mode travel range 2.5 µm 2.5 µm Max.

Open-loop resolution 0.025 nm 0.025 nm Typ.

Closed-loop resolution - 5 nm

Step frequency 100 Hz 100 Hz Max.

Max. velocity 0.2 mm/s* 0.2 mm/s* Max.


Stiffness in motion direction 15 N/µm 15 N/µm ±20 %

Push / Pull force (active) 50 N 50 N Max.

Holding force (passive) 80 N 80 N Min.

Drive properties

Drive type NEXLINE® linear drive NEXLINE® linear drive

Operating voltage ±250 V ±250 V

Miscellaneous

Operating temperature range -40 to 80 °C -40 to 80 °C

Material Al (anodized), steel Al (anodized), steel

Mass 115 g 135 g ±5 %

Cable length 1.5 m 1.5 m ±10 mm

Connector Sub-D NEXLINE® connector, Sub-D NEXLINE® connector,

single-channel single-channel; sensor connector

Recommended controller / driver E-755.101: E-755.1A1

* The maximum speed in stepping mode is set so as to allow the greatest possible velocity constancy, so that no velocity fluctuations occur duringstep motion.

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N-111 dimensions in mm

10

Application example


� Semiconductor testing



� Nano imprint

� Nanometrology

� Active vibration damping

� Motion in strong magnetic fields

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N-214 · N-215NEXLINE® High-Load Piezo Nanopositioning Stepping Drive

The innovative N-214 / N-215NEXLINE® OEM linear drivesare ultra-precision nanoposi-tioning actuators with travelranges to 20 mm and push /pull forces to 400 N. The novel,patented NEXLINE® PiezoWalk®

drive design combines longtravel ranges with highmechanical stiffness and piezo-class resolution of better than0.1 nm.

PiezoWalk® supports two differ-ent motion modes: a high-reso-lution, high-dynamics shortrange (analog) mode and astepping mode with virtuallyunlimited travel range.

Two versions are available, theN-214 closed-loop model andN-215 open-loop model. Bothcan be operated with thesophisticated E-755 NEXLINE®

motion controller. The N-214 isequipped with a 5 nm resolu-tion linear encoder for long-range position control. Due toits low-noise, 24 bit D/A conver-ters, the E-755 controller canprovide picometer level resolu-tion in the highly-dynamicshort-range / dithering mode.

NEXLINE® Working Principle

for Application Flexibility

NEXLINE® PiezoWalk® drivescan be used wherever highloads must be positioned veryprecisely over long distancesand then perhaps subjected tosmall-amplitude dynamic ad-

justment, as for active vibra-tion control. By varying thecombination of longitudinaland shear piezo elements, thestep size, dynamic operatingrange (analog travel), clampingforce, speed and stiffness canall be optimized for a particularapplication.

NEXLINE® PiezoWalk® Piezo-ceramic clamping and shearelements act directly on a mov-ing runner that is coupled tothe moved object. While therunner can be moved largerdistances in step mode, analogoperation over a distance ofless than one step enableshigh-dynamics positioningwith resolutions far below one nanometer. The patentedPiezoWalk® overcomes the limi-tations of conventional nanopo-sitioning actuators and com-bines long travel ranges withhigh resolution and stiffness.

High-Resolution Dynamic

Operation

In analog mode the motion iseffectuated exclusively by thevery stiff shear elements, pro-viding a resonant frequency inthe direction of motion of sev-eral kilohertz. The motion reso-lution here is limited only bythe stability of the drive elec-tronics, or, in closed-loop oper-ation, by the sensor.

Basically Unlimited Travel

Range

Step mode involves a sequenceof coordinated shear and

clamping moves. That is whypiezo stepping drives have nointrinsic travel limitation andcan be used flexibly. The max.step frequency of 100 Hz and isdetermined by the controller.It allows velocities up to1 mm/s, depending on the stepsize and / or analog range.

Unlimited Lifetime

The application area of NEX-LINE® drives often lies in thedifficult-to-access internals ofmachines, where nanometer-realm adjustment and vibrationcancellation are required.

Long lifetime is therefore abasic requirement for NEX-LINE® actuators. To promotelong lifetime, the controller canreduce the operating voltageon all the piezo elements tozero at any position and stillmaintain the full holding force.

Note

The products described in thisdocument are in part protectedby the following patents:German Patent No. 10148267US Patent No. 6,800,984


N-214.00

NEXLINE® High-Load Actuator,20 mm, 200 N, linear encoder, 5 nm resolution

N-215.00

NEXLINE® High-Load Actuator,20 mm, 400 N, open-loop

� 20 mm Travel Range

� 0.03 nm Resolution Open-Loop and 5 nm Closed-Loop

� To 400 N Push / Pull Force and 600 N Holding Force

� Self Locking when Power down, No Heat Generation


N-215 NEXLINE® high-load actuator

Train of 1 nm steps in open-loop analog mode with an N-215 NEXLINE® actuator


11


Models N-214.00 N-215.00

Active Axes Z Z


Travel range 20 mm 20 mm

Step size in stepping mode 10 nm to 6 µm 10 nm to 6 µm

Integrated sensor Linear encoder -

Sensor resolution 5 nm -

Travel range in analog mode 3 µm 3 µm

Open-loop resolution 0.03 nm 0.03 nm

Closed-loop resolution 5 nm -

Step frequency 100 Hz* 100 Hz*

Max. velocity 0.5 mm/s** 0.5 mm/s**


Stiffness in motion direction 75 N/µm 150 N/µm

Drive force (active) 200 N 400 N

Holding force (passive) 300 N 600 N

Drive properties

Drive type NEXLINE® linear drive NEXLINE® linear drive

Operating voltage ±250 V ±250 V

Miscellaneous

Operating temperature range -40 to 80 °C -40 to 80 °C

Material Al (anodized), steel Al (anodized), steel

Mass 1050 g 1150 g

Cable length 4.0 m 2.0 m

Connector D-sub single-channel D-sub single-channel

NEXLINE® connector, NEXLINE® connector

plus separate sensor connector

Recommended controller / driver E-755.1A1 E-755.101

* Depends on control electronics** Depends on control electronics. The maximum speed in step mode is set so as to ensure the highest possible velocity constancy, with no speed

fluctuations while steps are being performed.

Six-axis parallel-kinematics Hexapod with N-215-based NEXLINE® high-load actuators for use in strong magnetic fields.


12

E-755 digital nanopositioningcontrollers are designed todrive the novel, patented,NEXLINE® nanopositioning lin-ear drives. Combining ad-vanced control technologyand sensor signal processingwith special drive algorithms,the E-755 can provide preci-sion motion control over hun-dreds of millimeters with pico-meter-range resolution.

Coordinated action of shear-ing and clamping piezo ele-ments is what allows NEX-LINE® to break through thebarriers of conventional nano-positioning actuators.

The E-755 offers two differentcontrol modes: a high-resolu-tion, high dynamics directpiezo mode, with basically un-limited resolution, and a long-range mode with virtuallyunlimited travel range.

High-Resolution Closed-Loop

Control

E-755 controllers are based onpowerful 32-bit DSPs andcome in open- and closed-loop versions. Both versionsfeature four high-resolution(24-bit) linear amplifiers withan output range of ±250 Vrequired to control a single-axis NEXLINE® drive. For theclosed-loop models, high-res-olution incremental positionsensors to sub-nanometer res-olution are supported by spe-

cial excitation and read-outelectronics. A power-downroutine in the E-755 firmwaresaves the current position,allowing a closed-loop systemto be ready for use withoutreferencing next time it ispowered up.

Zero-Voltage Control Mode

Promotes Extreme Actuator

Lifetime

NEXLINE® nanopositioning ac-tuators can often be found ininaccessible locations deepinside complex equipment,where nanometer-precise alignment and vibration can-cellation are required. Thismakes the long lifetime ofNEXLINE® drives especiallyadvantageous. The E-755 firm-ware incorporates a specialprocedure to bring the NEX-LINE® actuator to a full-hold-ing-force zero-drive-voltagecondition, no matter where itis along its travel range. Thiseliminates long-term offsetvoltages, which can limit thelifetime of conventional piezodrives.

Linearization

E-755-controlled nanoposi-tioning systems provide out-standing linearity, achieved bydigital polynomial lineariza-tion. The linearization canimprove linearity to 0.001 %over the full travel range.

The products described in thisdatasheet are in part protectedby the following patents: US-patent No. 6,800,984 Germanpatent No. 10148267

E-755Digital Controller for NEXLINE® Nanopositioning Linear Drives

5 nm steps performed by a system consisting of the N-214 NEXLINE® nanopositionerand the E-755.1A1 controller, measured by a Zygo ZMI 2000 interferometer. Note theexcellent system response to consecutive 5 nm step commands. In this case the closed-loop resolution is limited by the linear encoder in the N-214 (5 nm / incre-ment); the E-755 can work with linear encoders with sub-nanometer resolution.

� Special Control Algorithms for NEXLINE® Nanopositioning

Linear Drives

� 32-Bit Digital Filters

� 24-Bit DAC Resolution

� Fully Programmable Low-Pass and Notch Filters

� Non-Volatile User Settings and Last-Position Data

� PI General Command Set Compatible


� Semiconductor manufacturing

� Quality control in thesemiconductor industry

� Astronomical telescopes

� Truss structures

� Active vibration control

� Alignment in high mag-netic fields, as in particlephysics, atomic fusion and superconductivityresearch

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E-755.1A1

Digital Controller for Closed-LoopNEXLINE® Nanopositioning LinearDrives with Incremental Encoder

E-755.101

Digital Controller for Open-LoopNEXLINE® Nanopositioning LinearDrives

E-755 digital NEXLINE® controller with N-214 nanopositioner, 20 mm travel range.



13

Technical Data

Models E-755.1A1 E-755.101

Function Digital controller for NEXLINE® linear Digital controller for NEXLINE® linear drives, incremental encoder drives, open-loop

Sensor channels 1 incremental sensor -

Logical axes 1 1

Piezo linear amplifier channels 4 4

Processor DSP 32-bit floating point, 50 MHz DSP 32-bit floating point, 50 MHz

Sensor sampling time 0.1 ms -

Servo update time 0.2 ms -

Dynamic cycle time 0.2 ms 0.1 ms

Effective DAC Resolution 24-bit 24-bit

Maximum output power 15 W / channel 15 W / channel

Average output power 3 W / channel, limited by temperature 3 W / channel, limited by temperature sensor sensor

Peak output current (20 ms) 60 mA / channel 60 mA / channel

Average output current 25 mA / channel, limited by temperature 25 mA / channel, limited by temperature sensor sensor

Current limitation Short-circuit proof Short-circuit proof

Temperature sensor max. 70 °C, high voltage output is max. 70 °C, high voltage output is automatically deactivated if temperature automatically deactivated if temperature out of range out of range

Output voltage -250 to +250 V -250 to +250 V

PZT voltage output socket Sub-D special Sub-D special

Sensor socket Sub-D 15 (m) -

Interfaces RS-232 RS-232

Dimensions 264 x 260 x 47 mm 264 x 260 x 47 mm

Weight 2.3 kg 2.3 kg

Operating voltage 24 V (E-750.PS power supply 24 V (E-750.PS power supply 20 to 30 V DC, 1.25 A, 5 A / 0.1 ms) 20 to 30 V DC, 1.25 A, 5 A / 0.1 ms)

Six-axis nonmagnetic Hexapod with N-215-based NEXLINE® high-loadactuators for use in high magnetic fields. The system is driven by six E-755 controllers and additional hardware / software to automatically

perform the parallel kinematics coordinate transformation. 50 picometer steps with a NEXLINE® drive in open-loop mode.Measured with external, ultra-high-resolution, capacitive sensor.


N-310K001Compact NEXACT® Linear Nanopositioning Stage

� Travel Range 20 mm

� Linear Encoder for Direct Metrology, 25 nm Resolution

� Drive Force 10 N

� Compact Design

� Velocity 10 mm/s

N-510High-Force NEXLINE® Z, Tip, Tilt Platform

� Parallel-Kinematic-Design

� 1.3 mm Vertical Travel, 10 mrad Tip / Tilt Angle

� 300 mm Diameter

� 200 N Load Capacity

� For Semiconductor Industry, Wafer Alignment

N-512Non-Magnetic, High-Force NEXLINE® Open-Frame Stage


� 6 x 6 mm Travel Range

� Linearencoder for Direct Metrology, 5 nm Resolution

� For Superconductivity Experiments

N-511High-Force NEXLINE® XYZ Platform


� 1 mm Vertical Travel / 8 mrad Tip / Tilt Angle

� Linear Encoder for Direct Metrology, 5 nm Resolution

� With Special 3-Channel NEXLINE® Electronics

14

15


Cutting-Edge Solutions for Industry and Research

Micropositioning,Nanopositioning,NanoAutomation®

Positioning Technology -

30 Years Ahead of its Time

PI has been a world market lea-der in nanopositioning techno-logy and ultra-high-precisionmotion-control systems formany years. The first nanopo-sitioning systems served re-search centers working ininterferometry and laser tech-nology. Today, entire branchesof industry – such as the semi-conductor industry, biotechno-logy and, increasingly, themachine-tool industry – are de-pendent on progress in nano-positioning.

Key Technologies Under One

Roof: A Plus for Our

Customers

PI has a strategy of verticalintegration with all key techno-logies developed and maintai-ned in one company. This per-mits direct control over everystep from conception to ship-ment, optimizing quality andcost. As a customer, you, too,can profit from our over 30years experience in micro- andnanopositioning. PI can react quickly to devel-opment and production needsof OEM customers – even forhighly complex custom pro-ducts and assemblies.

PI headquarters

Applications

Today PI delivers Micro- &NanoPositioning solutionsfor all important high-techmarkets:

� Semiconductors

� Data Storage

� Photonics, Fiber Optics,Telecom

� Life Sciences

� Lasers, Optics, Microscopy

� Aerospace Engineering

� Precision Machining

� Astronomy

www.pi.ws


Headquarters

GERMANY

Physik Instrumente (PI)

GmbH & Co. KG

Auf der Römerstr. 1D-76228 Karlsruhe/PalmbachTel: +49 (721) 4846-0 Fax: +49 (721) [email protected] · www.pi.ws

Subsidiaries

JAPAN

PI Japan Co., Ltd.

Akebono-cho 2-38-5Tachikawa-shiJ-Tokyo 190Tel: +81 (42) 526 7300Fax: +81 (42) 526 [email protected]://www.pi-japan.jp

PI Japan Co., Ltd.

Hanahara Dai-ni Building, #7034-11-27 Nishinakajima,Yodogawa-ku, Osaka-shiJ-Osaka 532Tel: +81 (6) 6304 5605Fax: +81 (6) 6304 [email protected]

CHINA

Physik Instrumente

(PI Shanghai) Co., Ltd.

Building No. 7-301Longdong Avenue 3000201203 Shanghai, ChinaTel: +86 (21) 687 900 08Fax: +86 (21) 687 900 [email protected]://www.pi-china.cn

FRANCE

Polytec PI/RMP S.A.

32 rue DelizyF-93694 Pantin CedexTel: +33 (1) 481 039 30Fax: +33 (1) 481 008 [email protected]://www.polytec-pi.fr

PI Ceramic GmbH

Lindenstr.D-07589 LederhoseTel: +49 (36604) 882-0Fax: +49 (36604) [email protected]://www.piceramic.de

BR

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USA (East) & CANADA

PI (Physik Instrumente) L.P.

16 Albert St. Auburn, MA 01501Tel: +1 (508) 832 3456Fax: +1 (508) 832 [email protected]://www.pi-usa.us

USA (West) & MEXICO

PI (Physik Instrumente) L.P.

5420 Trabuco Rd., Suite 100 Irvine, CA 92620Tel: +1 (949) 679 9191Fax: +1 (949) 679 [email protected]

GREAT BRITAIN

Lambda Photometrics Ltd.

Lambda HouseBatford MillGB-Harpenden, HertfordshireAL5 5BZTel: +44 (1582) 764 334Fax: +44 (1582) 712 [email protected]

ITALY

Physik Instrumente (PI) S.r.l.

Via G. Marconi, 28I-20091 Bresso (MI)Tel: +39 (02) 665 011 01Fax: +39 (02) 665 014 [email protected]://www.pionline.it

Program Overview

� Piezoelectric Actuators

� Piezo Nanopositioning Systems and Scanners

� Active Optics / Tip-Tilt Platforms

� Capacitive Sensors

� Piezo Electronics: Amplifiers and Controllers

� Hexapods

� Micropositioners

� Positioning Systems for Fiber Optics, Photonicsand Telecommunications

� Motor Controllers

� PILine® High-Speed Ceramic Linear Motors

Request the hardbound PI Catalog

Call or go to: http://www.pi.ws

http://www.pi-japan.jp

http://www.pi-china.cn

http://www.polytec-pi.fr

http://www.piceramic.de

http://www.pi-usa.us

http://www.pionline.it

http://www.pi.ws

http://www.pi.ws

Documents

Piezo Step Linear Motors / High-Force Linear Actuators