LithoWorks PEBLithoWorks PEBLithoWorks PEBLithoWorks PEB

PEB Plate repeatability

Dataset: 3 data sets, each one 2 days apart from previous

Metrology: On-Wafer analysis

TEA Systems Corp.65 Schlossburg St.Alburtis, PA 18011

610 682 4146TZavecz@enter.net

August 27,2003

Sept. 2003 LithoWorks PEB Page -2-SLS Inc. Confidential

Project Summary

• Program: LithoWorks PEB

• Situation: Three data sets have been presented from PEB Bake 8:

• July 16,18 & 21 of 2003

• Objective of this analysis: Determine PEB stability Note: Activation temperatures are set at 100 oC

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July 16 PEB 8

• Thermal variation from wafer mean vs time

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July 16: Total THERMAL Energy

Integrated area under the time-temp curve

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July 16; Energy Variation

Integrated area under the time-temp curve showing temperature delta from wafer average

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July 16; Range & rise times

Rise/Fall TimesStart Time Start TempRise Delta Time Delta TempSlope

20.1310 22.6110 TRUE 27.9870 95.0070 3.3947123.2410 118.8310 FALSE 2.4550 -1.0650 -0.4338127.6600 116.9710 FALSE 38.7890 -90.4370 -2.3315

Plot of range of temperature about the mean temperature

AND mean temperature

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July 16: Thermal Maps

Temperature before heating (left) and at end of maximum temperature period (right)

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July 18; PEB 8

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July 18; Energy Total

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July 18; Energy Variation

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July 18; Thermal Range

Rise/Fall TimesStart Time Start TempRise Delta Time Delta TempSlope

11.7840 22.3390 TRUE 27.0050 95.4200 3.5334112.9300 119.0630 FALSE 38.7890 -93.4470 -2.4091

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July 18; hi/low steady state

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July 21; PEB 8

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July 21; Thermal Energy Total

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July 21; Variation in Thermal Energy

Sept. 2003 LithoWorks PEB Page -16-SLS Inc. Confidential

July 21; Thermal Range over Time

Rise/Fall TimesStart Time Start TempRise Delta Time Delta TempSlope

16.6940 22.3740 TRUE 25.5320 94.9420 3.7185119.3130 118.0440 FALSE 33.3880 -91.1410 -2.7298

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July 21; Steady state temperature profiles

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July 21; Thermal Heating

Click on image to play movie of thermal

heating.Press esc to exit.

Sept. 2003 LithoWorks PEB Page -19-SLS Inc. Confidential

Comparison of Rise/Fall Cycles

Rise/Fall TimesDate Start Time Start Temp Rise Delta Time Delta Temp Slope Min Temp Max Temp

July 16,2003 20.13 22.61 TRUE 27.99 95.01 3.3947 22.04 120.04123.24 118.83 FALSE 2.46 -1.07 -0.4338127.66 116.97 FALSE 38.79 -90.44 -2.3315

July 18,2003 11.78 22.34 TRUE 27.01 95.42 3.5334 22.05 120.00112.93 119.06 FALSE 38.79 -93.45 -2.4091

July 21,2003 16.69 22.37 TRUE 25.53 94.94 3.7185 22.04 120.03119.31 118.04 FALSE 33.39 -91.14 -2.7298

Recall that the July 16 cycle had a slightly larger range/rise in temperature at 127 seconds.

Notice that none of the 3 ranges achieved steady state during at the

high temperature cycle. Range across the wafer was still at about 1

oC when cooling started.Start of cooling