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Chapter 1.
Crystal Properties and Growth of Semiconductors
( )
Chap. 1. Crystal Properties and Growth of Semiconductors
1.1 ?
, ,
.
.
Chap. 1. Crystal Properties and Growth of Semiconductors
1.1 ?
) , ,
) ,
!!!
) , ,
Chap. 1. Crystal Properties and Growth of Semiconductors
(a) II III IV V VI
Zn
Cd
B
Al
Ga
In
C
Si
Ge
N
P
As
Sb
S
Se
Te
(b)
Elemental IV compounds
Binary III-V
compounds
Binary II-VI
compounds
Si
Ge
SiC
SiGe
AlP
AlAs
AlSb
GaN
GaP
GaAs
GaSb
InP
InAs
InSb
ZnS
ZnSe
ZnTe
CdS
CdSe
CdTe
Table. 1-1 (a) (b)
Chap. 1. Crystal Properties and Growth of Semiconductors
?
Si, Ge : , , Tr, ,
,
GaN, GaP, GaAs (Binary III-V) LED
GaAsP(ternary), InGaAsP(quaternary)
TV ZnS (II-VI)
Light detector InSb, CdSe, PbTe, HgCdTe
Gunn diode GaAs, InP
GaAs, AlGaAs, 3, 4
Energy band gap
.
Doping
,
: doping
Chap. 1. Crystal Properties and Growth of Semiconductors
1.2
(a) Crystalline solid :
.
(b) Amorphous solid : .
(c) Polycrystalline solid : .
Fig. 1-1
(a) (b) ,
(c) (a) .
Chap. 1. Crystal Properties and Growth of Semiconductors
1.2.1
Fig. 1-2 r=3a+2b 2
(lattice) :
(unit cell) :
(primitive cell) :
Chap. 1. Crystal Properties and Growth of Semiconductors
1.2.2
Fig. 1-3
.
Chap. 1. Crystal Properties and Growth of Semiconductors
1.2.2
Fig. 1-4 fcc
Chap. 1. Crystal Properties and Growth of Semiconductors
1.2.3
Miller index
.
, .
( ) .
{100} :
.
[100] :
:
Chap. 1. Crystal Properties and Growth of Semiconductors
1.2.3
Fig. 1-7
Chap. 1. Crystal Properties and Growth of Semiconductors
FCC ( , , )
FCC .
() Zincblende (III-V )
1.2.3
Fig. 1-8 : (a) , (b)(100)
a
Chap. 1. Crystal Properties and Growth of Semiconductors
1.2.3
Chap. 1. Crystal Properties and Growth of Semiconductors
1.2.3
Chap. 1. Crystal Properties and Growth of Semiconductors
SiO2(solid)+2C Si(solid) +2CO(gas)
Si(solid) +3HCl(gas) SiHCl3(gas)+H2(gas)
SiHCl3(gas)+H2(gas) Si(solid) +3HCl(gas)
Czochralski technique.
.
MGS
EGS
Metallurgical Grade Si
Electronic Grade Si
Fig. 1-10 Si ( )
1.3.1
Chap. 1. Crystal Properties and Growth of Semiconductors
.
.
.
1.3.2
Chap. 1. Crystal Properties and Growth of Semiconductors
1.3.2
Chap. 1. Crystal Properties and Growth of Semiconductors
1.3.3 (wafer)
(IC) (single-crystal)
.
,
, .
,
, (Flatness) .
Slicing, lapping, polishing .
Chap. 1. Crystal Properties and Growth of Semiconductors
1.3.3
Chap. 1. Crystal Properties and Growth of Semiconductors
1.3.4
EGS .
Si Si
(dopant) .
2
.
.
L
Sd
C
Ck
kd :
CS :
CL :
Chap. 1. Crystal Properties and Growth of Semiconductors
1.4 (epitaxy)
epi()+taxis()
()
()
()
Chap. 1. Crystal Properties and Growth of Semiconductors
1.4.1
Homoepitaxy
Heteroepitaxy
.
(liquid-phase epitaxy; LPE)
(vapor-phase epitaxy; VPE)
(molecular beam epitaxy; MBE)
Chap. 1. Crystal Properties and Growth of Semiconductors
Chap. 1. Crystal Properties and Growth of Semiconductors
1.4.1
Chap. 1. Crystal Properties and Growth of Semiconductors
(liquid-phase epitaxy; LPE)
Ex. GaAs melting point of 1238
Mixture of GaAs With Ga metal
Considerably lower melting point
Si, GaAs, AlGaAs, GaP
Chap. 1. Crystal Properties and Growth of Semiconductors
Chap. 1. Crystal Properties and Growth of Semiconductors
1.4.2
SiCl4+2H2 Si+4HCl(g)
SiCl4 1150-1250
Si epitaxial layer
HCl epitaxy layer .
SiH4 Si+2H2
(1000 ) epitaxial layer
impurities migration.
Chap. 1. Crystal Properties and Growth of Semiconductors
MOCVD or MOVPE
(CH3)3Ga+AsH3GaAs+3CH4 (700 )
GaAs
InP 2 AlGaAs 3, 4
.
III-V 1960 InP .
, .
1.4.2
Chap. 1. Crystal Properties and Growth of Semiconductors
1.4.2
Chap. 1. Crystal Properties and Growth of Semiconductors
1.4.3 (molecular beam epitaxy; MBE)
(physical vapor deposition; PVD)
10-9 Torr
.
(GaAs 600 )
(superlattice) (multi-layer)
Chap. 1. Crystal Properties and Growth of Semiconductors
1.4.3
Chap. 1. Crystal Properties and Growth of Semiconductors
1.4.3
Chap. 1. Crystal Properties and Growth of Semiconductors
, , LED
LED
Network VCSEL (photo-diode) ,
HBT/HEMT
Homework #1
6
Chapter 1.
1, 3, 5, 6
Chap. 1. Crystal Properties and Growth of Semiconductors
1.5 Q : In Sb 1.44 1.36.
, InSb()
. (100) ?
( : fcc .)
Chap. 1. Crystal Properties and Growth of Semiconductors
1.6 2.5
5.42. .
Chap. 1. Crystal Properties and Growth of Semiconductors