PRODUCT NOTE 201-14!VORTEX 2000 FULLY AUTOMATED INTELLIGENT PROCESS SYSTEM™

!MicroTech Systems, Inc.!49040 Milmont Dr., Freemont, CA 94538!PH: 510.651.5277 • FAX: 510.651.3374!www.microtechprocess.com

The MicroTech Vortex 2000 IPS™ moves wafer cassettes in any number of pre-

programmed destinations incorporating both linear and rotational robotics. The system

robotics can operate side to side in a linear fashion, including front to back, or back to

front in a rotational fashion. This provides for a system footprint that is half the length in

size of a linear robotics tool. The Vortex 2000 IPS™ is in a class of its own. !(See reverse for Product Specifications.) !!—Product Description

Linear + Rotational Robotics eclipse inline processing…

!MicroTech Systems, Inc.!49040 Milmont Dr., Freemont, CA 94538!PH: 510.651.5277 • FAX: 510.651.3374!www.microtechprocess.com

Specifications

Configurable to customer’s specific process requirements!!Fully automated robotics!!Chemical distribution system ready!!Modules!!Custom process tanks!for each chemical!!Temperature controlled!process!!Megasonics or ultrasonics!

Platform!!Wafer sizes up to!300 mm!!Flush mount or ballroom design options!!Chemical compatible components!!Compliant with SEMI standards; S2-93!!CE certifications NFPA 79!!Factory Mutual-4910 Compliant

Recirculation & filtration of process chemistry!!Quick Dump Rinse (QDR)!!Surface tension gradient!dryer option!!Software!!GUI-based PC Microsoft XP!!Touch screen!!Recipe controlled!!SECS-GEM compliant

SMALL FOOTPRINT • HIGH PERFORMANCE PRODUCTION • HIGH PERFORMANCE PROCESS CONTROL MULTI-TASKING • LINEAR + ROTATIONAL ROBOTICS • HIGHEST RELIABILITY • FLEXIBILITY IN DESIGN CUSTOM CONFIGURATIONS • FRIENDLY GRAPHIC USER INTERFACE™ (GUI™) • BEST IN CLASS

Vortex 2000 Small Footprint

Linear Design Larger Footprint