Optromix - CLS-7000

High pulse energy

Metal ceramic design

Long lifetime premix

Reliable thyratron switch

Built-in Energy monitor

Energy stabilization

Air-cooled Air-cooled versions up to 20 Hz

KEY FEATURES

DIMENSIONS

ParameterWavelength (cm)1

Maximum pulse energy (mJ)Maximum repetition rate (Hz)

CL 7020CL 7050CL 7100

Pulse duration (ns)Stability of pulse energy (sigma, %)

Beam divergency (FWHM, V x H, mm)Average power (W)

CL 7020CL 7050CL 7100

Preionization

Beam size (V x H, mm)

ArF KrF XeCl248193 308400250 300 2050100

17 20 20< 2

20 x 6 21 x 6 22 x 61.5 x 4.5 (stable resonator)

51525

82035spark

61525

Specifications

Electrical / Mechanical / Environmental

ParameterWeight

Dimensions (L x W x H, mm)

CoolingCL 7020CL 7050CL 7100

Power consumptionCL 7020CL 7050CL 7100GasControl

Tube material

Optromix-CLS 5000170 kg

1423 x 375 x 760

AirWater < 1 l / minWater < 3 l / min

220 V, 50 Hz, 1.5 kW1220 V, 50 Hz, 1.8 kW1380V, 50 Hz, 3.5 kW1

1 premix cylinderRS 232, Windows

Metal and ceramic

Notes

1. Option wavelength 157 nm

Notes

1. Option 110 V (220 V)/60 Hz

Warranty: Standard Warranty - 12 months from the date of delivery.

Information in this document is a subject to change without notice.

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