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REPORT DOCUMENTATION PAGE Fomi Approved

OMB NO 070-1-0188

Public Reporting burden for this collection of information is estimated to average 1 hour per response, including the lime for reviewing instructions, searching existing data sources gathering and maintaining the data needed, and completing and reviewing the collection of information. Send comment regarding this burden estimates or anv other aspect of this collection of information. Including suggestions for reducing this burden, to Washington Headquarters Services. Directorate for Information Operations and Reports. 1215 Jefferson Davis Highway, Suite 1204, Arlington. VA 22202-4302, and to the Office of Management and Budget. Paperwork Reduction Project (0704-0188,) Washington, DC 211503 I AGENCY USE ONLY ( Leave Blank) REPORT DATE

5 Apr 11

3 REPORT TYPE AND DATES COVERED

Final Progress Report (25 Feb 10 - 24 Feb 11)

4 TITLE AND SUBTITLE

Compact Modeling of MEMS Resonators

5 FUNDING NUMBERS

Grant W91 INF-10-1-004')

6 AUTHOR(S)

Subrata Haider and James C. M. Hwang

7 PERFORMING ORGANIZATION NAME(S) AND ADDRESS<ES)

Lchigh University, 5 E. Packer Ave., Bethlehem, PA 18015

8. PERFORMING ORGANIZATION REPORT NUMBER

y SPONSORING / MONITORING AGENCY NAME(S) AND ADDRESSES)

U. S. Army Research Office P.O.Box 12211 Research Triangle Park, NC 27709-2211

10. SPONSORING / MOM PORING AGENCY REPORT Nl IMBER

11 SUPPLEMENTARY NOTES

The views, opinions and/or findings contained in this report are those of the author(s) and should not be construed as an official Department of the Army position, policv or decision, unless so designated by other documentation.

12 a DISTRIBUTION / AVAILABILITY STATEMENT

Approved for public release: distribution unlimited.

12 b DISTRIBUTION CODI

13 ABSTRACT (Maximum 200 words)

The main accomplishment of this project was the development, for the first time, of a compact transient large-signal MEMS resonator model for large-scale integration of resonators and transistors. The four quarterly milestones, including electrical/mechanical/thermal characterization, preliminary resonator model, clectrical/mechanical/thennal validation, and extended resonator model, were all. MEMS cantilever resonators were fabricated at Nanyang Technological University in Singapore by using a novel low-temperature wafer bonding process to realize 3D features that could not be realized in a single silicon wafer. The simple and relatively large design facilitated model development and validation. Using well-known characteristics of silicon, only the thickness of the cantilever was fine-tuned to match the modeled and measured resonance frequencies. A compact transient large-signal resonator model was developed and coded in Verilog-A, so that it could be readily installed in different circuit-design environments such as ADS and Cadence. The effects of DC-bias and AC-drive levels and frequencies were simulated in both time and frequency domains. The model validation was mostly through mechanical characterization by using a laser Doppler vibromcter. Electrical validation was more difficult due to high leakage current associated with the silicon substrate Thermal validation was inaccurate due to weak temperature dependence.

1-1 SUBJECT PERMS

Micro-electromechanical systems, radio frequency, resonator, compact modeling

18 SECURITY CLASSIFICATION ON THIS PAGE

UNCI.ASSIFIED

15. NUMBER OF PAGI S

17

lo PRICE CODE

17 SECURITY CLASSIFICATION OR REPORT

UNCLASSIFIED

I si SECURITY CLASSIFICATION OF ABSTRACT

UNCLASSIFIED

20 LIMITATION OF ABSTRACT

UL NSN 7540-01-280-5500 Standard Form 298 (Rev.2-89)

Prescribed b) ANSI Std 234-18 248-102

Enclosure 1

REPORT DOCUMENTATION PAGE (SF298) (Continuation Sheet)

(2) Student/Supported Personnel Metrics for this Reporting Period (25 Aug 10-24 Feb 11) (a) Graduate Students

Ding, Guanghai, 100% supported, 8.33% FTE by this grant Jin. Renfeng, 100% supported, 16.67% FTE by this grant Ning, Yaqing, 100% supported, 16.67% FTE by this grant Wang, Weike, 100% supported, 16.67% FTE by this grant Total: 58.33% FTE by this grant

(3) Technology Transfer Visited Army Research Laboratory in Adelphi, Maryland and gave seminar on 13 Sep 10 Followed the visit with review and comment via e-mail on test-structure designed by ARL

(4) Scientific Progress and Accomplishments Attached

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