47
2006/1 2006/10 /0 /03 1 National Central University Ge Quantum Dots and Their Application to Optoelectroncis Cooperator: Prof. David M. T. Kuo (NCU) Prof. Y. C. Chang (UIUC) ERSO/ITRI PhD Students: W. T. Lai, W. M. Liao, S. S. Tseng 李李李 李李李李李李李李李 Pei-Wen Li, National Central University

National Central University 2006/10/031 Ge Quantum Dots and Their Application to Optoelectroncis Cooperator: Prof. David M. T. Kuo (NCU) Prof. Y. C. Chang

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  • Ge Quantum Dots and Their Application to Optoelectroncis Cooperator: Prof. David M. T. Kuo (NCU) Prof. Y. C. Chang (UIUC) ERSO/ITRIPhD Students:W. T. Lai, W. M. Liao, S. S. Tseng Pei-Wen Li, National Central University

  • OutlineMotivation and Status Review

    Formation of Ge QDs by selective oxidation of SiGe-on-insulator

    Ge-QD single electron/hole transistors/resonant tunneling diodesElectronics structure of Ge QD/SiO2 systemPhoto effects on carrier transports in Ge QD/SiO2 system

    Ge Nanocrystals Nonvolatile Memory

    Ge-dot Photodiodes

  • Roadmap of Nano Devices

  • Nano ElectronicsMIT (Bell Lab) fabricated the first SET operating at very low temperature.SET is a Key device to read/write QUANTUM INFORMATION. Dream make ambition become true!! The addition or subtraction of a small number of electrons to/from an electrode can be controlled with one-electron precision using the charging effect. Application: Memory, Precision meter, Quantum computerPauli exclusion principle,and Coulomb blockade.

  • MOSFET vs. SETMOSFETSETQD is weakly coupled to Source/Drain electrodes via tunneling barriers.The operating principle of SET is quite different from that of the MOSFET.

  • Operating principle of SET Drain ModulationIf Uee is smaller than E .Uee : electron-electron interaction at ground state. E : energy separation between E1 and E0. SourceDrainTunneling barrierQ.D.VdVds > 0EfE0E1E0+UeeVds >> 0E0E1E0+UeeVds >>> 0E0E1E0+UeeCoulomb staircase

  • Operating principle of SET Gate modulationSourceDrainEfGateVgCoulomb oscillation

  • 1985SETideaFirst SETmetalDevice0.3mK19871995AlGaAs/GaAs2DEG150nm4K

    GoldE-beam70nm77K

    1997SiSidegate70nm77K

    1997SiE-beam+ etching6nm300K

    19982000SiPatternoxidation

  • Challenge of Room-Temperature SETsSi-based Quantum dot diameter < 10 nm. Fabrication technologyE-beam lithographyEpitaxial growth quantum dots (self-assembled)STM lithographyReproducibility and Scalability Issues!+ isotropic etching

  • State of the Art Si SHT by Hiramoto of U. Tokyo (IEDM 2004)

  • OutlineMotivation and Status Review

    Experimental WorkFormation of Ge QDs by selective oxidation of SiGeGe-dot Single electron/hole TransistorGe-dot Resonant tunneling diodes

    Electronics structure of Ge QD/SiO2 system

    Photo effects on carrier transports in Ge QD/SiO2 system

    Transient current through Ge QD/SiO2 system

  • Fabrication Lab in NCU

  • Thermal Oxidation of SiGe alloys

    During high temperature oxidation, Si will be fully oxidized but Ge will segregate out the growing oxide and pile up along the interface of SiO2/Si substrate!Additional GeO2/GeO will appear at the oxide surface if Ge content in Si1-xGex is larger than 45%

  • Our Idea Selective Oxidation of SGOI planeThermal Oxidation of SiGe/Si-on-InsulatorGe quantum dots would be formed by Ge atoms segregation and agglomeration.The size and distribution of the Ge dots are determined by conditions of thermal oxidation process;Ge content in the alloys. A simple and CMOS compatible method!

  • Ge Dots Formed by Oxidation of Si0.95Ge0.05 planeP. W. Li et al., APL, 83, 4628.

    Oxidation time (min)Dot size (nm)Dot density (cm-2)118.93.51.2x1011206.1 2.07.0x1011303.0 1.02.0x1012

  • Ge Dots Formed by Thermal Oxidation of Si1-xGexFactors to determine atomic agglomeration include: magnitude of the driving force in thermodynamic point of view; mobility of the atoms in kinetic point of view. the size and spatial distribution of the QDs differ depending on the material of Si1-xGex layer, even if the agglomeration is conducted under the same conditions.

  • Growth Mechanism of Ge QDsGe QDsCondensed SiGe layerGe atoms keep moving up and downGe atoms segregation at oxide/remained Si interface form Ge QDsGe atoms diffusion downward condensationP. W. Li, et al., NanoTechnology, 2007

  • Crystallite Morphology

  • Pattern Dependence on Ge QDsNanowires formed using E-beam lithography and dry etchingWet oxidation at 900 oC TEOS oxide deposition 500nmPossible parameters to affect the geometry of Ge QDs by oxidation of SGOI nanowires : (1) Length & Width of nanowires; (2) Oxidation time.

  • Pattern Dependence on Ge QDsEtched RegionNanowires A :L/W = 1um/70 nm;27 min to completely oxidize the nanowire.70nmNanowires C :L/W = 0.16 um/40 nm;14 min to completely oxidize nanowires and 11min to anneal.

  • Unique Properties of Oxidation of SGOI Nanowires(A)(B)Volume A : the volume of total Ge QDs in the nanowires.Volume B : the volume of Ge-rich regions in the end of wire. Volume A + Volume B the total volume of Ge in SiGe alloy. It indicates that the segregated Ge atom would move along the wire direction and squeeze to the end of the wires during oxidation.

  • Growth Mechanism of Ge QDsP. W. Li, et al., NanoTechnology, 2007

  • Schematics of Ge SET Process Flow One or two dots within the nanowire estimated from the dot density

  • Room Temp Coulomb BlockadePeak-to-valley current ratio (PVCR) of 2 is observed at 300 K. Coulomb staircase and negative differential conductance are observable!Addition Energy of 125 meV>> 3kBT!Charging Energy of 75 meV! Energy Level Separation of 50 meV!P. W. Li, et al., APL, 85, 1528.

    Chart1

    0.010.0394474

    0.720.0456855

    0.310.052844

    3.360.0610383

    1.760.0703921

    6.140.0810358

    6.880.0931051

    9.840.106737

    22.340.122068

    39.290.139226

    95.920.158327

    143.850.179467

    294.350.202715

    643.870.228102

    1603.550.255618

    6198.780.285196

    37601.20.316715

    2060460.349985

    6041550.384751

    11361200.420694

    17609100.457427

    24541000.494511

    31891000.531461

    39978200.567757

    48471800.602859

    56978900.636226

    65853300.667324

    73967400.69565

    83127600.720739

    92378300.742183

    100811400.75964

    108408400.772848

    116185000.781635

    0.785925

    0.785749

    0.781247

    0.772674

    0.760392

    0.744871

    0.726676

    0.706455

    0.684927

    0.662859

    0.641053

    0.620326

    0.601497

    0.585372

    0.572733

    0.564337

    0.560904

    0.56312

    0.571628

    0.587033

    0.609885

    0.64068

    0.679839

    0.727693

    0.784455

    0.850196

    0.924811

    1.00798

    1.09915

    1.19748

    1.30185

    1.41083

    1.52271

    1.63551

    1.74702

    1.85489

    1.95667

    2.04997

    2.13249

    2.20218

    2.2573

    2.29652

    2.31899

    2.32439

    2.31288

    2.28518

    2.24247

    2.18634

    2.1187

    2.04173

    1.95774

    1.86909

    1.77812

    1.68709

    1.59811

    1.5131

    1.43381

    1.36179

    1.2984

    1.24486

    1.20221

    1.17142

    1.15334

    1.14875

    1.15839

    1.18293

    1.22299

    1.27913

    1.35181

    1.4414

    1.54809

    1.67188

    1.81253

    1.9695

    2.14192

    2.32858

    2.52787

    2.73781

    2.95609

    3.18007

    3.40687

    3.63345

    3.8567

    4.07353

    4.28102

    4.47648

    4.65759

    4.82248

    4.96982

    5.09896

    5.20993

    5.30357

    5.38152

    5.44629

    5.50123

    5.55045

    5.59881

    5.65166

    5.71475

    5.79395

    5.89493

    6.02293

    6.18239

    6.37661

    6.60752

    6.87535

    7.17851

    7.51345

    7.87464

    8.2547

    8.6446

    9.03397

    9.41154

    9.76557

    10.0845

    10.3573

    10.5742

    10.727

    10.8097

    10.8183

    10.7515

    10.6102

    10.3978

    10.1196

    9.78257

    9.39512

    8.96636

    8.50584

    8.02303

    7.52702

    7.0262

    6.52804

    6.03896

    5.56428

    5.10824

    4.674

    4.26381

    3.87903

    3.52034

    3.1878

    2.88101

    2.59919

    2.34128

    measured

    calculated

    Vg (V)

    Id (pA)

    T = 300K, Vds = 0.05 V

    IdVd_temp modu.

    -0-0-0-0-0.0000000019

    -0-0-0-0-0.000000002

    -0-0-0-0-0.000000002

    -0-0-0-0-0.000000002

    -0-0-0-0-0.000000002

    -0-0-0-0-0.0000000019

    -0-0-0-0-0.0000000018

    -0-0-0-0-0.0000000018

    -00-0-0-0.0000000018

    00-0-0-0.0000000017

    0-0-0-0-0.0000000016

    -0-0-0-0-0.0000000016

    -00-0-0-0.0000000015

    -00-0-0-0.0000000015

    0-00-0-0.0000000014

    0-0-0-0-0.0000000013

    -0-0-0-0-0.0000000013

    -000-0-0.0000000012

    000-0-0.0000000011

    0000-0.0000000011

    0-0-00-0.000000001

    -0-00-0-0.0000000009

    -0000-0.0000000009

    0000-0.0000000009

    00-00-0.0000000008

    0-0-00-0.0000000008

    0-000-0.0000000007

    -0000-0.0000000007

    0000-0.0000000006

    0000-0.0000000006

    0-000-0.0000000006

    0-000-0.0000000005

    0000-0.0000000005

    0000-0.0000000005

    0000-0.0000000004

    0-000-0.0000000004

    0-000-0.0000000004

    0000-0.0000000004

    0000-0.0000000003

    0000-0.0000000003

    0-000-0.0000000003

    0-000-0.0000000003

    0000-0.0000000003

    0000-0.0000000003

    0000-0.0000000002

    0-000-0.0000000002

    0000-0.0000000002

    0000-0.0000000002

    0000-0.0000000002

    0000-0.0000000002

    0-000-0.0000000002

    ID(Vg=3)

    ID(Vg=3)

    ID(Vg=3)

    ID(Vg=3)

    ID(Vg=3)

    Vd

    Id

    IdVd_temp modu. (2)

    -0-0-0-0

    -0-0-0-0

    -0-0-0-0

    -0-0-0-0

    -0-0-0-0

    -0-0-0-0

    -0-0-0-0

    -0-0-0-0

    -00-0-0

    00-0-0

    0-0-0-0

    -0-0-0-0

    -00-0-0

    -00-0-0

    0-00-0

    0-0-0-0

    -0-0-0-0

    -000-0

    000-0

    0000

    0-0-00

    -0-00-0

    -0000

    0000

    00-00

    0-0-00

    0-000

    -0000

    0000

    0000

    0-000

    0-000

    0000

    0000

    0000

    0-000

    0-000

    0000

    0000

    0000

    0-000

    0-000

    0000

    0000

    0000

    0-000

    0000

    0000

    0000

    0000

    0-000

    20K

    77K

    150K

    220K

    Vd

    Id

    gm_Vg(T)

    2.84-10.32-1.321.68

    -1.6474.52-2.72-5.96

    12.216.76-4.2810.92

    -6.4-92.283.84-11.64

    17.52-32.32-2.3613.76

    2.96-4.963.08-7.16

    11.840.56-3.0810.64

    5012.884.6-13.76

    67.8-1.36-5.72-3.4

    226.52-3.56-0.0416.64

    191.725.724.44-18.24

    602-16.92-4.4416.28

    1398.08-0.161.6-12.88

    3838.726.242.80.92

    18380.9220.8-2.6413.8

    125609.68-0.925.96-14.52

    673779.223.1211.2410.96

    1592436-35.88-8.6-1.32

    212786035.92-4.12166468.52

    2499160239477.725.643323248

    27727601316127.62673579.641603756

    2940000117607613080721871600

    3234880110366013681361913440

    3397440120408813024802133040

    3402840114004015190802192000

    3549760122564016027602237480

    3245640124044016285602267960

    3664080118808016490402256440

    3700280127196017083602264240

    3373240138696016692402350040

    3038800130044017594402278200

    3110640134040016306002357240

    8088

    300K

    20K

    77K

    150K

    Gate Voltage (V)

    Transconductance (pS)

    gm - Vg at Vds = 0.05 V

    gm_Vg(T) (2)

    2.84-10.323.72

    -1.6474.52-1.56

    12.216.764.6

    -6.4-92.28-5.36

    17.52-32.326.32

    2.96-4.96-4.96

    11.840.5614.2

    5012.88-10.68

    67.8-1.36-0.72

    226.52-3.562.52

    191.725.72-4.48

    602-16.926.68

    1398.08-0.16-1.84

    3838.726.248.52

    18380.9220.814.2

    125609.68-0.9272.6

    673779.223.12547.6

    1592436-35.8850998.52

    212786035.922418985.6

    2499160239477.722262004

    27727601316127.62360520

    294000011760762563840

    323488011036602633200

    339744012040882788040

    340284011400402844680

    354976012256402899760

    324564012404402955800

    366408011880802987160

    370028012719602737200

    337324013869602843440

    303880013004402763680

    311064013404002509360

    808

    300K

    20K

    220K

    Gate Voltage (V)

    Transconductance (pS)

    gm - Vg at Vds = 0.05 V

    Id_Vg(T) (2)

    13.2100.01

    10.630.930.72

    29.260.540.31

    33.451.693.36

    10.380.351.76

    2.31.936.14

    1.060.696.88

    1.24.249.84

    4.421.5722.34

    4.081.3939.29

    3.192.0295.92

    4.620.9143.85

    0.392.57294.35

    0.352.11643.87

    1.914.241603.55

    7.117.796198.78

    6.8825.9437601.2

    12.66162.84206046

    3.6912912.47604155

    12.67617658.871136120

    59882.11183159.871760910

    3889141773289.872454100

    6829332414249.873189100

    9588483072549.873997820

    12598703769559.874847180

    15448804480729.875697890

    18512905205669.876585330

    21614005944619.877396740

    24584206691409.878312760

    27764107375709.879237830

    31231508086569.8710081140

    34482608777489.8710840840

    37833609404829.8711618500

    20K

    220K

    300K

    Gate Voltage (V)

    Drain Current (pA)

    Id - Vg at Vds = 0.05 V

    Id_Vg(T)

    13.212.12000.01

    10.631.790.420.930.72

    29.261.11-1.070.540.31

    33.450.041.661.693.36

    10.381-1.250.351.76

    2.30.412.191.936.14

    1.061.180.40.696.88

    1.20.413.064.249.84

    4.421.56-0.381.5722.34

    4.080.13-1.231.3939.29

    3.190.122.932.0295.92

    4.621.23-1.630.9143.85

    0.390.122.442.57294.35

    0.350.52-0.782.11643.87

    1.911.22-0.554.241603.55

    7.110.562.97.796198.78

    6.882.05-0.7325.9437601.2

    12.664.862.01162.84206046

    3.692.711.6812912.47604155

    12.671.6841618.81617658.871136120

    59882.13.09872430.811183159.871760910

    3889146683981273369.811773289.872454100

    6829339954161741269.812414249.873189100

    95884813374502219629.813072549.873997820

    125987016630702752889.813769559.874847180

    154488020428403300889.814480729.875697890

    185129024435303860259.815205669.876585330

    216140028506704427249.815944619.877396740

    245842032629304991359.816691409.878312760

    277641036900205557419.817375709.879237830

    312315041073306144929.818086569.8710081140

    344826045471906714479.818777489.8710840840

    378336049548407303789.819404829.8711618500

    20K

    77K

    150K

    220K

    300K

    Gate Voltage (V)

    Drain Current (pA)

    Vds = 0.05 V

    gd_Vds(T)

    -13.08183.5225.5

    -9.2515114

    -7.77128-66

    -2.9568-12.5

    -0.46-72187.5

    -4.61-68.5116

    -4.86131.524.5

    -3.51120-14

    -1.4-21.5-29.5

    1.3-87131.5

    -2.31-428.585.5

    -4.45521.5-37

    0.0738.5-29

    -0.05-8760

    0.7-46.5-517.5

    0.34445.5646.5

    -3.68-286.5-52.5

    -0.4314-18

    2.99-8086

    0.97-20.5104.5

    -1.3611810.5

    -1.1179-70.5

    -0.56-120.5-35.5

    4.13-45113.5

    1.681054

    -0.096234

    -0.5521.5-42

    1.81-27-48

    3.06-20114

    1.842967

    -0.6259.5-57.5

    0.58-40.5-89

    3.3-32.589

    4.0351.594.5

    1.6926.516

    0.9227.5-40.5

    2.68-52-29

    4.133455.5

    4.12-27.593.5

    1.8330.54.5

    0.8510-119.5

    3.3310.563.5

    4.37-37.563

    3.272555

    1.7716.5-65

    1.37-7.5-18

    3.531768.5

    5.09-1330.5

    1.94-252

    1.8821-98

    2.67.3412.32

    20K

    220K

    300K

    Vds (V)

    gd (pS)

    Id_Vds(T)

    -13.08-12.88-19.27

    -9.25-9.21-14.76

    -7.77-6.19-14.48

    -2.95-3.63-15.8

    -0.46-2.27-16.05

    -4.61-3.71-12.3

    -4.86-5.08-9.98

    -3.51-2.45-9.49

    -1.4-0.05-9.77

    1.3-0.48-10.36

    -2.31-2.22-7.73

    -4.45-10.79-6.02

    0.07-0.36-6.76

    -0.050.41-7.34

    0.7-1.33-6.14

    0.34-2.26-16.49

    -3.686.65-3.56

    -0.430.92-4.61

    2.991.2-4.97

    0.97-0.4-3.25

    -1.36-0.81-1.16

    -1.111.55-0.95

    -0.563.13-2.36

    4.130.72-3.07

    1.68-0.18-0.8

    -0.090.020.28

    -0.551.260.96

    1.811.690.12

    3.061.15-0.84

    1.840.751.44

    -0.621.332.78

    0.582.521.63

    3.31.71-0.15

    4.031.061.63

    1.692.093.52

    0.922.623.84

    2.683.173.03

    4.132.132.45

    4.122.813.56

    1.832.265.43

    0.852.875.52

    3.333.073.13

    4.373.284.4

    3.272.535.66

    1.773.036.76

    1.373.365.46

    3.533.215.1

    5.093.556.47

    1.943.297.08

    1.883.258.12

    2.63.676.16

    20K

    220K

    300K

    Vds (V)

    Ids (pA)

    Vgs = 1 V

    G vs Vg

    0.0002000.0424

    0.01440.01860.00840.0358

    0.00620.0108-0.02140.0222

    0.06720.03380.03320.0008

    0.03520.007-0.0250.02

    0.12280.03860.04380.0082

    0.13760.01380.0080.0236

    0.19680.08480.06120.0082

    0.44680.0314-0.00760.0312

    0.78580.0278-0.02460.0026

    1.91840.04040.05860.0024

    2.8770.018-0.03260.0246

    5.8870.05140.04880.0024

    12.87740.0422-0.01560.0104

    32.0710.0848-0.0110.0244

    123.97560.15580.0580.0112

    752.0240.5188-0.01460.041

    4120.923.25680.04020.0972

    12083.1258.24940.03360.0542

    22722.412353.1774832.37620.0336

    35218.223663.197417448.61620.0618

    4908235465.797425467.396213367.96

    6378248284.997434825.396219908.32

    79956.461450.997444392.596226749

    96943.675391.197455057.796233261.4

    113957.889614.597466017.796240856.8

    131706.6104113.397477205.196248870.6

    147934.8118892.397488544.996257013.4

    166255.2133828.197499827.196265258.6

    184756.6147514.1974111148.396273800.4

    201622.8161731.3974122898.596282146.6

    216816.8175549.7974134289.596290943.8

    232370188096.5974146075.796299096.8

    Vds =50 mV

    300K

    220K

    150K

    77K

    Gate Voltage (V)

    Drain-to-Source Conductance (nS)

    small2

    20KVDID(Vg=-3)ID(Vg=-1)ID(Vg=1)ID(Vg=3)VGId(Vd=-0.05)Id(Vd=0.05)77KVDID(Vg=-3)ID(Vg=-1)ID(Vg=1)ID(Vg=3)VGId(Vd=-0.05)Id(Vd=0.05)150KVDID(Vg=-3)ID(Vg=-1)ID(Vg=1)ID(Vg=3)VGId(Vd=-0.05)Id(Vd=0.05)220KVDID(Vg=-3)ID(Vg=-1)ID(Vg=1)ID(Vg=3)VGId(Vd=-0.05)Id(Vd=0.05)300kVDID(Vg=-3)ID(Vg=-1)ID(Vg=1)ID(Vg=3)VGId(Vd=-0.05)Id(Vd=0.05)

    -0.5-0-0-0-0-80.00000384140.0000039722-0.56.71E-12-9.08E-12-1.28E-11-1.10E-11-85.19E-065.33E-06-0.56.49E-10-1.09E-11-9.55E-12-9.89E-12-87.96E-068.27E-06-0.55.28E-09-1.31E-11-1.29E-11-1.29E-11-81.12E-051.15E-05-0.52.27E-081.45E-11-1.93E-11-1.87E-09-81.42E-051.46E-05

    -0.48-0-0-0-0-7.750.00000351910.0000036403-0.481.52E-11-4.13E-12-4.19E-12-1.08E-11-7.754.71E-064.88E-06-0.487.22E-10-5.98E-12-4.81E-12-7.02E-12-7.757.36E-067.59E-06-0.485.88E-09-8.34E-12-9.21E-12-9.09E-12-7.751.04E-051.06E-05-0.482.33E-08-5.84E-12-1.48E-11-2.00E-09-7.751.32E-051.35E-05

    -0.46-0-0-0-0-7.50.00000318970.0000032858-0.462.03E-11-4.26E-12-7.61E-12-5.30E-12-7.54.27E-064.42E-06-0.468.53E-10-5.93E-12-5.11E-12-6.53E-12-7.56.70E-066.97E-06-0.465.96E-09-7.32E-12-6.19E-12-8.13E-12-7.59.54E-069.73E-06-0.462.55E-08-3.90E-12-1.45E-11-2.02E-09-7.51.22E-051.24E-05

    -0.44-0-0-0-0-7.250.00000285030.0000029664-0.442.14E-11-5.85E-12-8.27E-12-5.20E-13-7.253.82E-063.97E-06-0.449.70E-10-4.09E-12-6.58E-12-5.34E-12-7.256.08E-066.31E-06-0.447.02E-09-3.94E-12-3.63E-12-6.68E-12-7.258.75E-068.92E-06-0.442.71E-08-4.63E-12-1.58E-11-2.04E-09-7.251.12E-051.15E-05

    -0.42-0-0-0-0-70.00000255430.0000026356-0.422.63E-11-6.08E-12-3.56E-12-1.04E-12-73.39E-063.54E-06-0.421.03E-09-2.41E-12-3.98E-12-3.61E-12-75.46E-065.69E-06-0.427.29E-09-5.20E-13-2.27E-12-5.75E-12-77.95E-068.13E-06-0.422.90E-08-5.79E-12-1.61E-11-1.95E-09-71.02E-051.05E-05

    -0.4-0-0-0-0-6.750.00000224160.0000023282-0.42.79E-11-2.86E-127.80E-13-5.23E-12-6.752.98E-063.11E-06-0.41.20E-09-2.36E-12-1.17E-12-2.58E-12-6.754.87E-065.07E-06-0.47.54E-09-4.42E-12-3.71E-12-4.42E-12-6.757.16E-067.35E-06-0.42.99E-08-4.42E-12-1.23E-11-1.93E-09-6.759.23E-069.50E-06

    -0.380-0-0-0-6.50.00000192790.0000020085-0.383.52E-11-7.00E-13-4.40E-13-8.65E-12-6.52.57E-062.70E-06-0.381.28E-09-2.91E-12-1.97E-12-2.77E-12-6.54.30E-064.51E-06-0.387.92E-09-5.23E-12-5.08E-12-4.33E-12-6.56.39E-066.59E-06-0.383.16E-081.08E-12-9.98E-12-1.84E-09-6.58.31E-068.71E-06

    -0.360-0-0-0-6.250.00000162830.0000017161-0.364.03E-11-2.61E-12-5.05E-12-2.02E-12-6.252.20E-062.32E-06-0.361.40E-09-2.65E-12-3.48E-12-3.73E-12-6.253.72E-063.94E-06-0.368.54E-09-3.75E-12-2.45E-12-4.40E-12-6.255.64E-065.84E-06-0.363.41E-083.02E-12-9.49E-12-1.80E-09-6.257.39E-067.81E-06

    -0.340-0-0-0-60.00000133270.0000014214-0.345.03E-11-4.76E-12-5.58E-121.90E-12-61.82E-061.96E-06-0.341.54E-09-1.31E-12-3.39E-12-1.33E-12-63.19E-063.40E-06-0.348.90E-09-1.06E-12-5.00E-14-3.41E-12-64.95E-065.14E-06-0.343.59E-081.52E-12-9.77E-12-1.77E-09-66.52E-066.89E-06

    -0.320-000-5.750.00000104720.0000011396-0.325.03E-11-3.18E-12-7.80E-132.20E-13-5.751.48E-061.61E-06-0.321.79E-09-6.50E-13-5.40E-13-7.60E-13-5.752.68E-062.88E-06-0.329.61E-09-1.30E-13-4.80E-13-1.98E-12-5.754.24E-064.43E-06-0.323.76E-081.46E-12-1.04E-11-1.65E-09-5.755.65E-066.02E-06

    -0.30-0-00-5.50.00000078470.0000008536-0.36.56E-11-3.20E-132.24E-12-3.96E-12-5.51.13E-061.26E-06-0.31.98E-09-1.72E-123.50E-13-1.52E-12-5.52.17E-062.39E-06-0.31.02E-08-2.80E-12-2.22E-12-2.69E-12-5.53.58E-063.77E-06-0.34.05E-085.35E-12-7.73E-12-1.64E-09-5.54.84E-065.21E-06

    -0.280-0-0-0-5.250.00000054510.0000006103-0.286.81E-118.70E-13-8.40E-13-2.69E-12-5.258.06E-079.31E-07-0.282.29E-09-2.64E-12-1.87E-12-3.41E-12-5.251.73E-061.91E-06-0.281.11E-08-3.15E-12-1.08E-11-3.33E-12-5.252.93E-063.13E-06-0.284.10E-089.98E-12-6.02E-12-1.58E-09-5.254.06E-064.41E-06

    -0.260-00-0-50.00000033940.0000004023-0.267.32E-112.08E-11-5.17E-120-55.36E-076.29E-07-0.262.47E-09-1.49E-12-1.95E-12-2.00E-12-51.30E-061.49E-06-0.261.21E-08-6.30E-13-3.60E-13-2.99E-12-52.32E-062.51E-06-0.264.36E-081.09E-11-6.76E-12-1.51E-09-53.30E-063.63E-06

    -0.2400-0-0-4.750.00000018290.0000002216-0.248.69E-11-2.89E-12-3.92E-123.67E-12-4.752.97E-073.75E-07-0.242.65E-094.40E-13-5.30E-13-5.00E-14-4.759.18E-071.08E-06-0.241.30E-081.20E-124.10E-13-1.43E-12-4.751.78E-061.96E-06-0.244.55E-081.06E-11-7.34E-12-1.46E-09-4.752.60E-062.87E-06

    -0.220000-4.50.00000008280.0000001077-0.229.71E-11-2.06E-121.26E-12-6.40E-13-4.51.42E-071.87E-07-0.222.93E-091.52E-121.44E-129.00E-14-4.56.06E-077.28E-07-0.221.43E-08-4.40E-13-1.33E-12-4.50E-13-4.51.28E-061.45E-06-0.224.74E-081.11E-11-6.14E-12-1.39E-09-4.51.97E-062.23E-06

    -0.20000-4.250.00000002830.0000000437-0.21.13E-101.24E-123.26E-12-4.31E-12-4.256.15E-088.23E-08-0.23.19E-09-1.09E-124.40E-13-1.21E-12-4.253.35E-074.41E-07-0.21.50E-08-2.03E-12-2.26E-12-9.50E-13-4.258.68E-071.02E-06-0.25.24E-081.63E-11-1.65E-11-1.34E-09-4.251.41E-061.64E-06

    -0.180-0-0-0-40.00000001020.0000000168-0.181.21E-102.20E-12-5.60E-13-3.14E-12-42.53E-083.30E-08-0.183.48E-09-9.40E-13-1.34E-12-2.10E-12-41.65E-072.31E-07-0.181.52E-08-1.51E-126.65E-12-2.05E-12-45.30E-076.52E-07-0.185.38E-082.11E-11-3.56E-12-1.28E-09-49.53E-071.14E-06

    -0.160-0-0-0-3.750.00000000360.0000000062-0.161.43E-10-7.90E-13-3.73E-121.19E-12-3.759.90E-091.29E-08-0.163.86E-097.50E-13-1.19E-120-3.757.88E-081.06E-07-0.161.65E-082.08E-129.20E-13-2.08E-12-3.753.00E-073.84E-07-0.165.55E-082.24E-11-4.61E-12-1.21E-09-3.755.99E-077.47E-07

    -0.140000-3.50.00000000130.0000000024-0.141.58E-10-2.57E-12-2.34E-124.08E-12-3.53.72E-094.60E-09-0.144.06E-098.70E-137.20E-131.32E-12-3.53.11E-084.55E-08-0.141.80E-081.06E-121.20E-12-2.20E-13-3.51.58E-072.02E-07-0.145.93E-082.15E-11-4.97E-12-1.15E-09-3.53.50E-074.59E-07

    -0.120.0000000001000-3.250.00000000050.0000000008-0.121.99E-10-8.00E-141.77E-124.90E-13-3.251.49E-091.65E-09-0.124.48E-092.10E-132.12E-123.10E-13-3.251.31E-081.88E-08-0.121.96E-08-7.50E-13-4.00E-136.00E-13-3.257.72E-081.02E-07-0.126.40E-082.51E-11-3.25E-12-1.08E-09-3.251.97E-072.66E-07

    -0.10.00000000010-00-30.00000000020.0000000003-0.11.97E-103.03E-123.71E-12-4.14E-12-35.01E-105.77E-10-0.14.76E-09-5.20E-13-1.60E-13-1.40E-12-35.33E-097.78E-09-0.12.09E-08-1.25E-12-8.10E-139.00E-14-33.64E-085.08E-08-0.16.68E-083.15E-11-1.16E-12-1.03E-09-31.12E-071.49E-07

    -0.080.0000000001-0-0-0-2.7500.0000000001-0.082.27E-102.16E-124.20E-13-2.36E-12-2.751.33E-101.49E-10-0.085.25E-093.90E-13-7.10E-133.00E-13-2.751.92E-092.71E-09-0.082.21E-081.57E-121.55E-12-1.21E-12-2.751.66E-082.36E-08-0.087.00E-083.63E-11-9.50E-13-9.39E-10-2.755.85E-087.91E-08

    -0.060.00000000010-0-0-2.5-00-0.063.19E-10-6.60E-13-4.65E-122.39E-12-2.53.34E-112.91E-11-0.065.56E-091.11E-125.90E-131.82E-12-2.55.53E-108.76E-10-0.062.32E-083.06E-123.13E-127.10E-13-2.56.53E-091.03E-08-0.067.49E-083.96E-11-2.36E-12-9.11E-10-2.53.02E-083.97E-08

    -0.040.0000000001000-2.25-00-0.042.65E-10-1.11E-12-1.34E-124.92E-12-2.255.92E-121.32E-12-0.046.21E-091.55E-122.43E-122.24E-12-2.251.33E-102.21E-10-0.042.43E-087.80E-137.20E-131.91E-12-2.252.25E-094.08E-09-0.047.61E-084.26E-11-3.07E-12-8.53E-10-2.251.47E-081.97E-08

    -0.020.0000000001000-2-00-0.022.93E-108.90E-133.33E-123.40E-13-22.90E-137.70E-13-0.026.59E-093.70E-131.47E-12-2.00E-13-22.04E-114.53E-11-0.022.63E-08-4.00E-13-1.80E-135.90E-13-27.06E-101.37E-09-0.028.28E-084.75E-11-8.00E-13-8.33E-10-26.14E-098.20E-09

    00.00000000010-00-1.750-003.14E-102.32E-125.00E-12-1.11E-12-1.75-2.01E-12-2.71E-1207.27E-09-1.44E-122.10E-12-7.50E-13-1.752.66E-123.47E-1202.90E-08-1.50E-132.00E-149.40E-13-1.751.67E-103.62E-1008.85E-085.46E-112.80E-13-7.82E-10-1.752.38E-093.19E-09

    0.020.00000000010-00-1.5000.023.86E-103.21E-124.54E-12-1.66E-12-1.5-1.29E-12-7.60E-130.027.81E-09-2.20E-131.00E-141.04E-12-1.5-1.09E-121.55E-120.022.91E-082.35E-121.26E-126.20E-13-1.52.49E-117.71E-110.028.99E-086.39E-119.60E-13-7.33E-10-1.57.44E-101.15E-09

    0.040.000000000100-0-1.25000.043.88E-10-1.60E-136.70E-132.21E-12-1.25-1.56E-12-1.31E-120.048.28E-091.94E-124.80E-132.11E-12-1.253.00E-13-2.77E-120.043.09E-083.70E-121.69E-125.00E-14-1.255.02E-121.41E-110.049.79E-087.15E-111.20E-13-6.76E-10-1.252.14E-103.63E-10

    0.060.0000000001000-1-0-00.064.93E-10-1.11E-12-1.59E-125.22E-12-1-1.56E-12-1.41E-120.068.74E-092.25E-121.66E-122.67E-12-18.90E-13-3.18E-120.063.30E-081.75E-121.15E-126.30E-13-1-1.71E-122.82E-120.061.01E-077.81E-11-8.40E-13-6.47E-10-14.59E-111.01E-10

    0.080.0000000002000-0.75-0-00.084.11E-102.13E-12-8.00E-131.27E-12-0.75-6.20E-131.31E-120.088.94E-099.90E-132.67E-127.90E-13-0.75-1.33E-121.73E-120.083.55E-084.20E-137.50E-132.27E-12-0.75-1.07E-125.40E-130.081.06E-078.31E-111.44E-12-6.03E-10-0.758.74E-122.41E-11

    0.10.00000000010-00-0.5-0-00.14.63E-104.54E-123.54E-12-1.99E-12-0.5-6.30E-13-1.99E-120.19.98E-095.00E-141.82E-126.80E-13-0.54.80E-13-3.04E-120.13.75E-082.96E-121.33E-121.41E-12-0.51.11E-12-1.41E-120.11.10E-079.54E-112.78E-12-5.72E-10-0.52.73E-124.28E-12

    0.120.0000000001000-0.25-0-00.125.06E-102.96E-124.98E-12-7.80E-13-0.25-4.60E-139.20E-130.121.06E-082.20E-131.00E-132.11E-12-0.25-1.36E-121.36E-120.124.00E-084.29E-122.52E-123.30E-13-0.25-2.14E-128.70E-130.121.18E-071.09E-101.63E-12-5.42E-10-0.25-2.96E-12-1.50E-13

    0.140.0000000002-0000000.145.70E-10-6.00E-131.48E-124.29E-120-2.12E-12-2.31E-120.141.16E-082.17E-12-2.74E-122.85E-120-1.90E-13-2.75E-120.144.08E-083.29E-121.71E-122.10E-130-1.30E-13-2.30E-130.141.24E-071.24E-10-1.50E-13-4.99E-1001.00E-144.50E-13

    0.160.0000000002-0000.25-0-00.166.20E-108.30E-11-1.90E-125.48E-120.25-1.79E-12-1.09E-120.161.25E-083.01E-122.14E-121.67E-120.25-6.10E-13-3.65E-120.164.42E-081.22E-121.06E-122.53E-120.251.06E-121.30E-130.161.32E-071.34E-101.63E-12-4.64E-100.257.20E-13-8.00E-14

    0.180.00000000020000.5-000.186.75E-103.20E-121.90E-131.60E-120.5-1.11E-12-1.60E-120.181.26E-081.28E-122.56E-128.40E-130.58.80E-13-2.28E-120.184.75E-082.06E-122.09E-123.26E-120.56.70E-13-4.90E-130.181.38E-071.46E-103.52E-12-4.32E-100.53.10E-133.50E-13

    0.20.00000000020000.75-0-00.28.80E-105.34E-124.44E-12-2.14E-120.754.00E-141.00E-130.21.39E-086.70E-131.73E-121.79E-120.75-1.85E-122.82E-120.25.06E-085.21E-122.62E-121.64E-120.75-1.82E-125.30E-130.21.48E-071.66E-103.84E-12-4.13E-100.75-3.36E-12-1.42E-12

    0.220.00000000030001-000.228.02E-102.10E-125.56E-12-3.30E-131-1.00E-12-1.15E-120.221.49E-082.94E-121.26E-123.83E-1211.06E-12-2.96E-120.225.40E-086.35E-123.17E-121.76E-121-4.80E-13-1.00E-120.221.50E-071.88E-103.03E-12-3.87E-101-1.76E-12-2.06E-12

    0.240.00000000030001.250-00.249.27E-10-9.70E-131.00E-123.49E-121.25-4.10E-132.12E-120.241.59E-083.80E-121.36E-112.50E-121.25-2.38E-121.91E-120.245.84E-083.97E-122.13E-128.20E-131.25-2.06E-12-7.90E-130.241.59E-072.07E-102.45E-12-3.66E-101.25-6.14E-12-4.20E-12

    0.260.00000000040001.5-000.269.26E-10-7.10E-13-9.70E-136.14E-121.5-1.18E-12-1.90E-120.261.70E-081.20E-123.57E-121.03E-121.5-5.90E-13-3.29E-120.265.86E-083.71E-122.81E-122.43E-121.5-8.20E-13-2.19E-120.261.71E-072.21E-103.56E-12-3.45E-101.5-6.88E-12-6.07E-12

    0.280.00000000040001.750-00.281.18E-094.37E-121.86E-121.70E-121.75-4.10E-131.23E-120.281.76E-082.30E-132.17E-121.71E-121.75-3.25E-121.23E-120.286.27E-086.13E-122.26E-123.75E-121.75-1.19E-12-3.10E-130.281.75E-072.50E-105.43E-12-3.23E-101.75-9.84E-12-1.03E-11

    0.30.00000000060002-000.31.05E-096.49E-126.06E-12-1.58E-122-1.56E-12-1.33E-120.31.94E-081.96E-121.67E-123.04E-1221.90E-13-2.79E-120.36.64E-088.87E-122.87E-122.22E-122-1.70E-12-5.60E-130.31.88E-072.75E-105.52E-12-3.07E-102-2.23E-11-1.83E-11

    0.320.00000000050002.25-0-00.321.21E-093.06E-125.07E-12-3.90E-132.25-1.30E-131.15E-120.322.08E-083.56E-121.78E-124.00E-122.251.04E-12-1.48E-120.327.24E-088.07E-123.07E-121.72E-122.25-1.52E-12-2.40E-130.321.94E-073.05E-103.13E-12-2.92E-102.25-3.93E-11-3.57E-11

    0.340.00000000050002.5-000.341.39E-09-9.60E-136.00E-135.34E-122.5-1.20E-137.20E-130.342.15E-084.37E-123.47E-122.01E-122.5-3.12E-121.94E-120.347.51E-086.66E-123.28E-123.30E-122.5-2.15E-12-1.29E-120.341.99E-073.41E-104.40E-12-2.71E-102.5-9.59E-11-6.78E-11

    0.360.00000000060002.75-000.361.53E-095.80E-13-7.10E-136.79E-122.75-1.23E-12-1.43E-120.362.21E-081.60E-123.39E-122.05E-122.751.44E-12-4.39E-120.368.00E-088.76E-122.53E-123.77E-122.75-1.03E-12-1.09E-120.362.11E-073.71E-105.66E-12-2.56E-102.75-1.44E-10-1.30E-10

    0.380.00000000090003-0-00.381.61E-094.88E-123.60E-121.53E-1231.20E-136.30E-130.382.37E-081.53E-122.80E-122.71E-123-2.63E-127.21E-120.388.03E-081.18E-113.03E-123.63E-123-2.70E-12-1.82E-120.382.31E-074.00E-106.76E-12-2.33E-103-2.94E-10-2.53E-10

    0.40.00000000090003.25-000.41.74E-096.07E-126.44E-12-4.30E-133.25-5.20E-1300.42.70E-083.32E-121.66E-123.97E-123.255.90E-13-3.01E-120.48.71E-081.34E-113.36E-122.50E-123.25-2.24E-12-1.55E-120.42.37E-074.48E-105.46E-12-2.21E-103.25-6.44E-10-5.28E-10

    0.420.00000000080003.5000.422.18E-092.41E-125.03E-123.11E-123.5-1.22E-125.60E-130.422.72E-084.71E-122.86E-123.66E-123.53.60E-13-2.87E-120.429.48E-081.33E-113.21E-121.88E-123.5-4.37E-12-3.86E-120.422.51E-074.91E-105.10E-12-2.06E-103.5-1.60E-09-1.21E-09

    0.440.00000000080003.750-00.442.16E-09-5.30E-131.24E-127.58E-123.755.60E-13-3.02E-120.442.94E-083.13E-124.13E-123.62E-123.75-3.09E-122.18E-120.441.05E-071.45E-113.55E-123.54E-123.75-7.92E-12-5.87E-120.442.64E-075.40E-106.47E-12-1.95E-103.75-6.20E-09-3.32E-09

    0.460.00000000090004000.462.28E-094.90E-13-1.10E-125.89E-124-2.05E-121.23E-120.463.07E-087.70E-133.62E-122.38E-1245.40E-13-3.06E-120.461.06E-071.87E-113.29E-124.76E-124-2.61E-11-2.27E-110.462.87E-075.88E-107.08E-12-1.83E-104-3.76E-08-1.47E-08

    0.480.0000000010004.250-00.482.46E-096.09E-124.23E-121.77E-124.25-4.86E-12-2.45E-120.483.35E-083.41E-121.91E-123.62E-124.25-2.20E-121.09E-120.481.14E-072.26E-113.25E-123.86E-124.25-1.63E-10-1.52E-100.482.92E-076.34E-108.12E-12-1.73E-104.25-2.06E-07-1.29E-07

    0.50.00000000110004.50-00.52.33E-096.36E-127.36E-12-1.10E-124.5-2.71E-123.40E-130.53.75E-085.38E-122.20E-124.22E-124.5-1.87E-12-3.99E-120.51.17E-072.31E-113.67E-121.73E-124.5-1.29E-08-1.42E-080.53.08E-076.95E-106.16E-12-1.55E-104.5-6.04E-07-4.90E-07

    4.750-04.75-1.68E-12-2.58E-124.75-4.16E-08-9.67E-104.75-6.18E-07-4.58E-074.75-1.14E-06-1.03E-06

    5-0.0000000599-0.0000000035-3.09E-12-1.50E-135-8.72E-07-6.85E-075-1.18E-06-9.28E-075-1.76E-06-1.63E-06

    5.25-0.0000003889-0.00000029235.25-6.68E-07-4.03E-125.25-1.27E-06-1.12E-065.25-1.77E-06-1.49E-065.25-2.45E-06-2.32E-06

    5.5-0.0000006829-0.00000054925.5-9.95E-07-8.03E-075.5-1.74E-06-1.58E-065.5-2.41E-06-2.10E-065.5-3.19E-06-3.04E-06

    5.75-0.0000009588-0.0000008425.75-1.34E-06-1.15E-065.75-2.22E-06-2.09E-065.75-3.07E-06-2.71E-065.75-4.00E-06-3.84E-06

    6-0.0000012599-0.00000113526-1.66E-06-1.50E-066-2.75E-06-2.56E-066-3.77E-06-3.40E-066-4.85E-06-4.64E-06

    6.25-0.0000015449-0.00000143276.25-2.04E-06-1.87E-066.25-3.30E-06-3.13E-066.25-4.48E-06-4.09E-066.25-5.70E-06-5.47E-06

    6.5-0.0000018513-0.00000171086.5-2.44E-06-2.26E-066.5-3.86E-06-3.68E-066.5-5.21E-06-4.80E-066.5-6.59E-06-6.36E-06

    6.75-0.0000021614-0.00000201286.75-2.85E-06-2.64E-066.75-4.43E-06-4.24E-066.75-5.94E-06-5.50E-066.75-7.40E-06-7.19E-06

    7-0.0000024584-0.00000234197-3.26E-06-3.05E-067-4.99E-06-4.81E-067-6.69E-06-6.21E-067-8.31E-06-8.06E-06

    7.25-0.0000027764-0.00000265757.25-3.69E-06-3.48E-067.25-5.56E-06-5.39E-067.25-7.38E-06-7.00E-067.25-9.24E-06-8.91E-06

    7.5-0.0000031232-0.00000298687.5-4.11E-06-3.90E-067.5-6.14E-06-5.97E-067.5-8.09E-06-7.64E-067.5-1.01E-05-9.70E-06

    7.75-0.0000034483-0.00000331517.75-4.55E-06-4.35E-067.75-6.71E-06-6.54E-067.75-8.78E-06-8.24E-067.75-1.08E-05-1.04E-05

    8-0.0000037834-0.00000363598-4.95E-06-4.75E-068-7.30E-06-7.08E-068-9.40E-06-8.90E-068-1.16E-05-1.11E-05

    (nS)77K(nS)(nS)(nS)(nS)

    20KVDID(Vg=1)ID(Vg=3)gd(Vg=1)gd(Vg=3)VGId(Vd=-0.05)gm(Vd=-0.05)G (Vd=-0.05)VDID(Vg=1)ID(Vg=3)gd(Vg=1)gd(Vg=3)VGId(Vd=-0.05)gm(Vd=0.05)G (Vd=-0.05)150KVDID(Vg=1)ID(Vg=3)gd(Vg=1)gd(Vg=3)VGId(Vd=-0.05)gm(Vd=0.05)G (Vd=-0.05)220KVDID(Vg=1)ID(Vg=3)gd(Vg=1)gd(Vg=3)VGId(Vd=-0.05)gm(Vd=0.05)G (Vd=-0.05)300KVDID(Vg=-3)ID(Vg=-1)ID(Vg=1)ID(Vg=3)VGId(Vd=-0.05)gm(Vd=0.05)gd(Vd=-0.05)

    20K20K20K20K20K20K20K77K77K77K77K77K77K77K150K150K150K150K150K150K150K220K220K220K220K220K220K220K300K300K300K300K300K300K300K

    -0.5-13.08-9.39191.50.545691906013.21-10.322.64E-01-0.5-12.81-10.954310.020881670502.12E+00-1.324.24E-02-0.5-9.55-9.892370.605485232101.90E-1303.80E-15-0.5-12.88-12.86183.51.027247956401.3E-1302.60E-15-0.5-19.27-1871.67225.5-28.669623059901.00E-1402.00E-16

    -0.48-9.25-7.3740.32432432430.2510.6374.522.13E-01-0.48-4.19-10.77-171-1.59941520470.251.79E+00-2.723.58E-02-0.48-4.81-7.02-15-1.63333333330.256.10E-1301.22E-14-0.48-9.21-9.091510.31788079470.251.1E-12-02.12E-14-0.48-14.76-2000.9714-78.250.257.20E-13-01.44E-14

    -0.46-7.77-6.822410.2551867220.529.2616.765.85E-01-0.46-7.61-5.3-33-7.24242424240.51.11E+00-4.282.22E-02-0.46-5.11-6.53-73.5-0.80952380950.58.80E-1301.76E-14-0.46-6.19-8.131280.566406250.56.7E-1301.34E-14-0.46-14.48-2022.88-6611.59090909090.53.10E-1306.20E-15

    -0.44-2.95-5.59124.50.8594377510.7533.45-92.286.69E-01-0.44-8.27-0.52235.5-0.1104033970.754.00E-023.848.00E-04-0.44-6.58-5.341300.66538461540.751.85E-12-03.70E-14-0.44-3.63-6.68680.68382352940.751.8E-12-03.64E-14-0.44-15.8-2038.18-12.5-350.80.753.36E-12-06.72E-14

    -0.42-0.46-3.45-207.5-0.2795180723110.38-32.322.08E-01-0.42-3.56-1.04217-0.96543778811.00E+00-2.362.00E-02-0.42-3.98-3.61140.50.366548042711.06E-1202.12E-14-0.42-2.27-5.75-72-0.923611111114.8E-1309.60E-15-0.42-16.05-1950.48187.56.397333333311.76E-1203.52E-14

    -0.4-4.61-2.29-12.51.641.252.3-4.964.60E-02-0.40.78-5.23-612.80327868851.254.10E-013.088.20E-03-0.4-1.17-2.58-400.23751.252.38E-12-04.76E-14-0.4-3.71-4.42-68.5-0.06569343071.252.1E-12-04.12E-14-0.4-12.3-1926.4911636.29741379311.256.14E-1201.23E-13

    -0.38-4.86-2.767.5-1.12592592591.51.060.562.12E-02-0.38-0.44-8.65-230.5-1.43817787421.51.18E+00-3.082.36E-02-0.38-1.97-2.77-75.50.63576158941.55.90E-1301.18E-14-0.38-5.08-4.33131.5-0.02661596961.58.2E-1301.64E-14-0.38-9.98-1842.2824.594.65306122451.56.88E-1201.38E-13

    -0.36-3.51-4.22105.51.22274881521.751.212.882.40E-02-0.36-5.05-2.02-26.5-7.39622641511.754.10E-014.68.20E-03-0.36-3.48-3.734.526.66666666671.753.25E-12-06.50E-14-0.36-2.45-4.41200.41251.751.2E-1202.38E-14-0.36-9.49-1795.9-14-98.10714285711.759.84E-1201.97E-13

    -0.34-1.4-1.641350.651851851924.42-1.368.84E-02-0.34-5.581.9240-0.3521.56E+00-5.723.12E-02-0.34-3.39-1.33142.50.221.90E-1303.80E-15-0.34-0.05-3.41-21.5-3.325581395321.7E-12-03.40E-14-0.34-9.77-1768.43-29.5-200.644067796622.23E-110.00000000014.47E-13

    -0.321.30.12-180.5-0.01939058172.254.08-3.568.16E-02-0.32-0.780.22151-1.38410596032.251.30E-01-0.042.60E-03-0.32-0.54-0.7644.5-0.85393258432.251.04E-1202.08E-14-0.32-0.48-1.98-870.4080459772.251.5E-1203.04E-14-0.32-10.36-1650.05131.54.57414448672.253.93E-110.00000000027.86E-13

    -0.3-2.310.19-1070.78971962622.53.195.726.38E-02-0.32.24-3.96-154-0.41233766232.51.20E-014.442.40E-03-0.30.35-1.52-1110.85135135142.53.12E-12-06.24E-14-0.3-2.22-2.69-428.50.07467911322.52.2E-12-04.30E-14-0.3-7.73-1638.0285.532.24561403512.59.59E-110.00000000021.92E-12

    -0.28-4.45-1.5226-0.15044247792.754.62-16.929.24E-02-0.28-0.84-2.69-216.5-0.62124711322.751.23E+00-4.442.46E-02-0.28-1.87-3.41-4-17.6252.751.44E-1202.88E-14-0.28-10.79-3.33521.50.03259827422.751.0E-1202.06E-14-0.28-6.02-1582.88-37-92.63513513512.751.44E-100.00000000062.88E-12

    -0.260.07-2.18-6-11.166666666730.39-0.167.80E-03-0.26-5.17062.52.93631.20E-011.62.40E-03-0.26-1.95-2711.373239436632.63E-12-05.26E-14-0.26-0.36-2.9938.52.02597402632.7E-12-05.40E-14-0.26-6.76-1514.33-29-98.551724137932.94E-100.00000000145.89E-12

    -0.24-0.05-0.8437.52.443.250.356.247.00E-03-0.24-3.923.67259-0.8320463323.255.20E-012.81.04E-02-0.24-0.53-0.0598.50.07106598983.255.90E-13-01.18E-14-0.240.41-1.43-87-0.56321839083.252.2E-1204.48E-14-0.24-7.34-1457.176058.63.256.44E-100.00000000381.29E-11

    -0.220.70.99-182.16666666673.51.9120.83.82E-02-0.221.26-0.64100-1.8353.51.22E+00-2.642.44E-02-0.221.440.09-501.33.53.60E-1307.20E-15-0.22-1.33-0.45-46.50.53763440863.54.4E-1208.74E-14-0.22-6.14-1386.85-517.5-4.41062801933.51.60E-090.00000001843.21E-11

    -0.20.340.21-2010.58706467663.757.11-0.921.42E-01-0.23.26-4.31-191-0.30628272253.755.60E-015.961.12E-02-0.20.44-1.21-890.53.753.09E-12-06.18E-14-0.2-2.26-0.95445.5-0.12345679013.757.9E-120.00000000011.58E-13-0.2-16.49-1341.2646.54.88089713843.756.20E-090.00000012561.24E-10

    -0.18-3.68-2.15162.50.301538461546.8823.121.38E-01-0.18-0.56-3.14-158.5-1.365930599442.05E+0011.244.10E-02-0.18-1.34-2.17.51445.40E-1301.08E-14-0.186.65-2.05-286.50.005235602142.6E-110.00000000055.21E-13-0.18-3.56-1278.09-52.5-67.038095238143.76E-080.00000067387.52E-10

    -0.16-0.43-1.171710.57894736844.2512.66-35.882.53E-01-0.16-3.731.1969.52.07913669064.254.86E+00-8.69.72E-02-0.16-1.19095.50.69109947644.252.20E-12-04.40E-14-0.160.92-2.08146.64285714294.251.6E-100.0000000513.26E-12-0.16-4.61-1207.7-18-161.02777777784.252.06E-070.00000159244.12E-09

    -0.142.990.81-101-0.42574257434.53.6935.927.38E-02-0.14-2.344.08205.5-0.87347931874.52.71E+00-4.125.42E-02-0.140.721.3270-0.72142857144.51.87E-120.00000016653.74E-14-0.141.2-0.22-80-0.51254.51.3E-080.0000024192.58E-10-0.14-4.97-1149.738638.39534883724.56.04E-070.00000212791.21E-08

    -0.120.971.67-116.50.55364806874.7512.67239477.722.53E-01-0.121.770.4997-2.38659793814.751.68E+005.643.36E-02-0.122.120.31-1140.754.754.16E-080.00000332328.32E-10-0.12-0.40.6-20.51.2439024394.756.2E-070.0000022621.24E-08-0.12-3.25-1083.69104.526.09090909094.751.14E-060.00000249922.27E-08

    -0.1-1.360.3812.5-5.28559882.11316127.61.20E+03-0.13.71-4.14-164.5-0.541033434753.09E+002673579.646.18E-02-0.1-0.16-1.4-27.5-3.090909090958.72E-070.00000160381.74E-08-0.1-0.810.09118-0.550847457651.2E-060.00000236052.37E-08-0.1-1.16-1029.1610.5431.047619047651.76E-060.00000277283.52E-08

    -0.08-1.11-0.9427.50.36363636365.2538891411760767.78E+03-0.080.42-2.36-253.5-0.93688362925.256.68E+0513080721.34E+04-0.08-0.710.3651.16923076925.251.27E-060.00000187162.55E-08-0.081.55-1.21791.21518987345.251.8E-060.00000256383.55E-08-0.08-0.95-938.64-70.5-19.39716312065.252.45E-060.000002944.91E-08

    -0.06-0.56-0.74234.50.56503198295.568293311036601.37E+04-0.06-4.652.39165.50.76435045325.59.95E+0513681361.99E+04-0.060.591.82920.22826086965.51.74E-060.00000191343.48E-08-0.063.130.71-120.5-0.49792531125.52.4E-060.00000263324.83E-08-0.06-2.36-911.29-35.5-81.42253521135.53.19E-060.00000323496.38E-08

    -0.044.131.91-122.5-0.20816326535.7595884812040881.92E+04-0.04-1.344.92233.5-0.98072805145.751.34E+0613024802.67E+04-0.042.432.24-482.54166666675.752.22E-060.0000021334.44E-08-0.040.721.91-451.46666666675.753.1E-060.0000027886.15E-08-0.04-3.07-853.48113.58.84140969165.754.00E-060.00000339748.00E-08

    -0.021.682.42-88.50.05649717516125987011400402.52E+04-0.023.330.3483.5-0.868263473161.66E+0615190803.33E+04-0.021.47-0.231.5-0.87301587362.75E-060.0000021925.51E-08-0.02-0.180.59101.7563.8E-060.00000284477.54E-08-0.02-0.8-833.415447.472222222264.85E-060.00000340289.69E-08

    0-0.092.32-233.21739130436.25154488012256403.09E+0405-1.11-231.19565217396.252.04E+0616027604.09E+0402.1-0.75-104.5-0.85645933016.253.30E-060.00000223756.60E-0800.020.9462-0.25806451616.254.5E-060.00000289988.96E-0800.28-782.143472.11764705886.255.70E-060.00000354981.14E-07

    0.02-0.550.84118-0.44915254246.5185129012404403.70E+040.024.54-1.66-193.5-16.52.44E+0616285604.89E+040.020.011.0423.52.27659574476.53.86E-060.0000022687.72E-080.021.260.6221.5-1.32558139536.55.2E-060.00000295581.04E-070.020.96-733.1-42-67.92857142866.56.59E-060.00000324561.32E-07

    0.041.81-0.2262.51.0486.75216140011880804.32E+040.040.672.21-113-1.33185840716.752.85E+0616490405.70E+040.040.482.11590.47457627126.754.43E-060.00000225648.85E-080.041.690.05-27-1.07407407416.755.9E-060.00000298721.19E-070.040.12-676.04-48-30.52083333336.757.40E-060.00000366411.48E-07

    0.063.061.09-61-1.67213114757245842012719604.92E+040.06-1.595.2239.5-573.26E+0617083606.53E+040.061.662.6750.5-1.861386138674.99E-060.00000226429.98E-080.061.150.63-20-4.176.7E-060.00000273721.34E-070.06-0.84-646.7411419.043859649178.31E-060.00000370031.66E-07

    0.081.843.13-1230.23983739847.25277641013869605.55E+040.08-0.81.27217-0.75115207377.253.69E+0616692407.38E+040.082.670.79-42.50.12941176477.255.56E-060.000002351.11E-070.080.752.2729-1.48275862077.257.4E-060.00000284341.48E-070.081.44-603.326723.41044776127.259.24E-060.00000337321.85E-07

    0.1-0.622.5460-1.10833333337.5312315013004406.25E+040.13.54-1.99720.84027777787.54.11E+0617594408.21E+040.11.820.68-86-0.83139534887.56.14E-060.00000227821.23E-070.11.331.4159.5-0.90756302527.58.1E-060.00000276371.62E-070.12.78-571.95-57.5-25.9478260877.51.01E-050.00000303882.02E-07

    0.120.581.21136-0.34191176477.75344826013404006.90E+040.124.98-0.78-175-1.44857142867.754.55E+0616306009.09E+040.120.12.11-142-0.26056338037.756.71E-060.00000235721.34E-070.122.520.33-40.50.14814814817.758.8E-060.00000250941.76E-070.121.63-542.11-89-24.21348314617.751.08E-050.00000311062.17E-07

    0.143.30.2836.53.01369863018378336007.57E+040.141.484.29-169-0.352071005984.95E+069.91E+040.14-2.742.85244-0.241803278787.30E-061.46E-070.141.710.21-32.5-3.569230769289.4E-061.88E-070.14-0.15-499.018919.90449438281.16E-052.32E-07

    0.164.032.48-117-0.00427350430.16-1.95.48104.5-1.85645933010.162.141.6721-1.97619047620.161.062.5351.50.70873786410.161.63-463.5894.516.5132275132

    0.181.692.49-38.50.58441558440.180.191.6212.5-0.880.182.560.84-41.5-1.14457831330.182.093.2626.5-3.05660377360.183.52-432.371660.625

    0.20.922.0488-0.29545454550.24.44-2.14561.61607142860.21.731.79-23.5-4.34042553190.22.621.6427.50.21818181820.23.84-412.97-40.5-32.2839506173

    0.222.681.5272.50.02068965520.225.56-0.33-228-0.83771929820.221.263.83619-0.10743134090.223.171.76-520.90384615380.223.03-386.82-29-36.1034482759

    0.244.131.55-0.5-900.2413.49-98.5-1.3451776650.2413.642.5-503.50.14597815290.242.130.82342.36764705880.242.45-365.8855.518.5945945946

    0.264.122.45-114.5-0.47161572050.26-0.976.14141.5-1.56890459360.263.571.03-70-0.48571428570.262.812.43-27.5-2.40.263.56-345.2493.511.8288770053

    0.281.833.53-490.92857142860.281.861.7210-0.7809523810.282.171.71-25-2.660.282.263.7530.5-2.50819672130.285.43-323.124.5181.6666666667

    0.30.852.62124-0.29032258060.36.06-1.58-49.5-1.2020202020.31.673.045.58.72727272730.32.872.2210-2.50.35.52-306.77-119.5-6.2092050209

    0.323.331.9520.8750.325.07-0.39-223.5-1.28187919460.321.78484.5-1.17751479290.323.071.7210.57.52380952380.323.13-291.9363.516.842519685

    0.344.372.81-55-0.40.340.65.34-65.5-1.1068702290.343.472.01-4-0.50.343.283.3-37.5-0.62666666670.344.4-270.546311.1666666667

    0.363.273.25-75-0.40666666670.36-0.716.79215.5-1.22041763340.363.392.05-29.5-1.11864406780.362.533.7725-0.280.365.66-256.475521.6818181818

    0.381.773.86-202.40.383.61.53142-0.69014084510.382.82.71-57-1.10526315790.383.033.6316.5-3.42424242420.386.76-232.62-65-8.9692307692

    0.41.372.9108-0.36111111110.46.44-0.43-70.5-2.51063829790.41.663.9760-0.25833333330.43.362.5-7.54.13333333330.45.46-220.96-18-40.6944444444

    0.423.532.12780.58974358970.425.033.11-189.5-1.17941952510.422.863.6663.5-0.0314960630.423.211.88174.88235294120.425.1-206.3168.58.2189781022

    0.445.093.04-157.5-0.35555555560.441.247.58-1170.72222222220.444.133.62-25.52.4313725490.443.553.54-13-4.69230769230.446.47-195.0530.520.1639344262

    0.461.944.16-350.46-1.15.89266.5-0.77298311440.463.622.38-85.5-0.72514619880.463.294.76-222.50.467.08-182.75529.6153846154

    0.481.883.8636-1.08333333330.484.231.77156.5-0.91693290730.481.913.6214.52.06896551720.483.253.8621-5.07142857140.488.12-172.75-98-9.1581632653

    0.52.63.085.21.18461538460.57.36-1.114.72-0.14945652170.52.24.224.41.91818181820.53.671.737.340.47138964580.56.16-154.812.32-25.1298701299

    small

    20KVDID(Vg=-3)ID(Vg=-1)ID(Vg=1)ID(Vg=3)VGId(Vd=-0.05)Id(Vd=0.05)77KVDID(Vg=-3)ID(Vg=-1)ID(Vg=1)ID(Vg=3)VGId(Vd=-0.05)Id(Vd=0.05)150KVDID(Vg=-3)ID(Vg=-1)ID(Vg=1)ID(Vg=3)VGId(Vd=-0.05)Id(Vd=0.05)220KVDID(Vg=-3)ID(Vg=-1)ID(Vg=1)ID(Vg=3)VGId(Vd=-0.05)Id(Vd=0.05)300kVDID(Vg=-3)ID(Vg=-1)ID(Vg=1)ID(Vg=3)VGId(Vd=-0.05)Id(Vd=0.05)

    -0.5-0-0-0-0-80.00000384140.0000039722-0.56.71E-12-9.08E-12-1.28E-11-1.10E-11-85.19E-065.33E-06-0.56.49E-10-1.09E-11-9.55E-12-9.89E-12-87.96E-068.27E-06-0.55.28E-09-1.31E-11-1.29E-11-1.29E-11-81.12E-051.15E-05-0.52.27E-081.45E-11-1.93E-11-1.87E-09-81.42E-051.46E-05

    -0.48-0-0-0-0-7.750.00000351910.0000036403-0.481.52E-11-4.13E-12-4.19E-12-1.08E-11-7.754.71E-064.88E-06-0.487.22E-10-5.98E-12-4.81E-12-7.02E-12-7.757.36E-067.59E-06-0.485.88E-09-8.34E-12-9.21E-12-9.09E-12-7.751.04E-051.06E-05-0.482.33E-08-5.84E-12-1.48E-11-2.00E-09-7.751.32E-051.35E-05

    -0.46-0-0-0-0-7.50.00000318970.0000032858-0.462.03E-11-4.26E-12-7.61E-12-5.30E-12-7.54.27E-064.42E-06-0.468.53E-10-5.93E-12-5.11E-12-6.53E-12-7.56.70E-066.97E-06-0.465.96E-09-7.32E-12-6.19E-12-8.13E-12-7.59.54E-069.73E-06-0.462.55E-08-3.90E-12-1.45E-11-2.02E-09-7.51.22E-051.24E-05

    -0.44-0-0-0-0-7.250.00000285030.0000029664-0.442.14E-11-5.85E-12-8.27E-12-5.20E-13-7.253.82E-063.97E-06-0.449.70E-10-4.09E-12-6.58E-12-5.34E-12-7.256.08E-066.31E-06-0.447.02E-09-3.94E-12-3.63E-12-6.68E-12-7.258.75E-068.92E-06-0.442.71E-08-4.63E-12-1.58E-11-2.04E-09-7.251.12E-051.15E-05

    -0.42-0-0-0-0-70.00000255430.0000026356-0.422.63E-11-6.08E-12-3.56E-12-1.04E-12-73.39E-063.54E-06-0.421.03E-09-2.41E-12-3.98E-12-3.61E-12-75.46E-065.69E-06-0.427.29E-09-5.20E-13-2.27E-12-5.75E-12-77.95E-068.13E-06-0.422.90E-08-5.79E-12-1.61E-11-1.95E-09-71.02E-051.05E-05

    -0.4-0-0-0-0-6.750.00000224160.0000023282-0.42.79E-11-2.86E-127.80E-13-5.23E-12-6.752.98E-063.11E-06-0.41.20E-09-2.36E-12-1.17E-12-2.58E-12-6.754.87E-065.07E-06-0.47.54E-09-4.42E-12-3.71E-12-4.42E-12-6.757.16E-067.35E-06-0.42.99E-08-4.42E-12-1.23E-11-1.93E-09-6.759.23E-069.50E-06

    -0.380-0-0-0-6.50.00000192790.0000020085-0.383.52E-11-7.00E-13-4.40E-13-8.65E-12-6.52.57E-062.70E-06-0.381.28E-09-2.91E-12-1.97E-12-2.77E-12-6.54.30E-064.51E-06-0.387.92E-09-5.23E-12-5.08E-12-4.33E-12-6.56.39E-066.59E-06-0.383.16E-081.08E-12-9.98E-12-1.84E-09-6.58.31E-068.71E-06

    -0.360-0-0-0-6.250.00000162830.0000017161-0.364.03E-11-2.61E-12-5.05E-12-2.02E-12-6.252.20E-062.32E-06-0.361.40E-09-2.65E-12-3.48E-12-3.73E-12-6.253.72E-063.94E-06-0.368.54E-09-3.75E-12-2.45E-12-4.40E-12-6.255.64E-065.84E-06-0.363.41E-083.02E-12-9.49E-12-1.80E-09-6.257.39E-067.81E-06

    -0.340-0-0-0-60.00000133270.0000014214-0.345.03E-11-4.76E-12-5.58E-121.90E-12-61.82E-061.96E-06-0.341.54E-09-1.31E-12-3.39E-12-1.33E-12-63.19E-063.40E-06-0.348.90E-09-1.06E-12-5.00E-14-3.41E-12-64.95E-065.14E-06-0.343.59E-081.52E-12-9.77E-12-1.77E-09-66.52E-066.89E-06

    -0.320-000-5.750.00000104720.0000011396-0.325.03E-11-3.18E-12-7.80E-132.20E-13-5.751.48E-061.61E-06-0.321.79E-09-6.50E-13-5.40E-13-7.60E-13-5.752.68E-062.88E-06-0.329.61E-09-1.30E-13-4.80E-13-1.98E-12-5.754.24E-064.43E-06-0.323.76E-081.46E-12-1.04E-11-1.65E-09-5.755.65E-066.02E-06

    -0.30-0-00-5.50.00000078470.0000008536-0.36.56E-11-3.20E-132.24E-12-3.96E-12-5.51.13E-061.26E-06-0.31.98E-09-1.72E-123.50E-13-1.52E-12-5.52.17E-062.39E-06-0.31.02E-08-2.80E-12-2.22E-12-2.69E-12-5.53.58E-063.77E-06-0.34.05E-085.35E-12-7.73E-12-1.64E-09-5.54.84E-065.21E-06

    -0.280-0-0-0-5.250.00000054510.0000006103-0.286.81E-118.70E-13-8.40E-13-2.69E-12-5.258.06E-079.31E-07-0.282.29E-09-2.64E-12-1.87E-12-3.41E-12-5.251.73E-061.91E-06-0.281.11E-08-3.15E-12-1.08E-11-3.33E-12-5.252.93E-063.13E-06-0.284.10E-089.98E-12-6.02E-12-1.58E-09-5.254.06E-064.41E-06

    -0.260-00-0-50.00000033940.0000004023-0.267.32E-112.08E-11-5.17E-120-55.36E-076.29E-07-0.262.47E-09-1.49E-12-1.95E-12-2.00E-12-51.30E-061.49E-06-0.261.21E-08-6.30E-13-3.60E-13-2.99E-12-52.32E-062.51E-06-0.264.36E-081.09E-11-6.76E-12-1.51E-09-53.30E-063.63E-06

    -0.2400-0-0-4.750.00000018290.0000002216-0.248.69E-11-2.89E-12-3.92E-123.67E-12-4.752.97E-073.75E-07-0.242.65E-094.40E-13-5.30E-13-5.00E-14-4.759.18E-071.08E-06-0.241.30E-081.20E-124.10E-13-1.43E-12-4.751.78E-061.96E-06-0.244.55E-081.06E-11-7.34E-12-1.46E-09-4.752.60E-062.87E-06

    -0.220000-4.50.00000008280.0000001077-0.229.71E-11-2.06E-121.26E-12-6.40E-13-4.51.42E-071.87E-07-0.222.93E-091.52E-121.44E-129.00E-14-4.56.06E-077.28E-07-0.221.43E-08-4.40E-13-1.33E-12-4.50E-13-4.51.28E-061.45E-06-0.224.74E-081.11E-11-6.14E-12-1.39E-09-4.51.97E-062.23E-06

    -0.20000-4.250.00000002830.0000000437-0.21.13E-101.24E-123.26E-12-4.31E-12-4.256.15E-088.23E-08-0.23.19E-09-1.09E-124.40E-13-1.21E-12-4.253.35E-074.41E-07-0.21.50E-08-2.03E-12-2.26E-12-9.50E-13-4.258.68E-071.02E-06-0.25.24E-081.63E-11-1.65E-11-1.34E-09-4.251.41E-061.64E-06

    -0.180-0-0-0-40.00000001020.0000000168-0.181.21E-102.20E-12-5.60E-13-3.14E-12-42.53E-083.30E-08-0.183.48E-09-9.40E-13-1.34E-12-2.10E-12-41.65E-072.31E-07-0.181.52E-08-1.51E-126.65E-12-2.05E-12-45.30E-076.52E-07-0.185.38E-082.11E-11-3.56E-12-1.28E-09-49.53E-071.14E-06

    -0.160-0-0-0-3.750.00000000360.0000000062-0.161.43E-10-7.90E-13-3.73E-121.19E-12-3.759.90E-091.29E-08-0.163.86E-097.50E-13-1.19E-120-3.757.88E-081.06E-07-0.161.65E-082.08E-129.20E-13-2.08E-12-3.753.00E-073.84E-07-0.165.55E-082.24E-11-4.61E-12-1.21E-09-3.755.99E-077.47E-07

    -0.140000-3.50.00000000130.0000000024-0.141.58E-10-2.57E-12-2.34E-124.08E-12-3.53.72E-094.60E-09-0.144.06E-098.70E-137.20E-131.32E-12-3.53.11E-084.55E-08-0.141.80E-081.06E-121.20E-12-2.20E-13-3.51.58E-072.02E-07-0.145.93E-082.15E-11-4.97E-12-1.15E-09-3.53.50E-074.59E-07

    -0.120.0000000001000-3.250.00000000050.0000000008-0.121.99E-10-8.00E-141.77E-124.90E-13-3.251.49E-091.65E-09-0.124.48E-092.10E-132.12E-123.10E-13-3.251.31E-081.88E-08-0.121.96E-08-7.50E-13-4.00E-136.00E-13-3.257.72E-081.02E-07-0.126.40E-082.51E-11-3.25E-12-1.08E-09-3.251.97E-072.66E-07

    -0.10.00000000010-00-30.00000000020.0000000003-0.11.97E-103.03E-123.71E-12-4.14E-12-35.01E-105.77E-10-0.14.76E-09-5.20E-13-1.60E-13-1.40E-12-35.33E-097.78E-09-0.12.09E-08-1.25E-12-8.10E-139.00E-14-33.64E-085.08E-08-0.16.68E-083.15E-11-1.16E-12-1.03E-09-31.12E-071.49E-07

    -0.080.0000000001-0-0-0-2.7500.0000000001-0.082.27E-102.16E-124.20E-13-2.36E-12-2.751.33E-101.49E-10-0.085.25E-093.90E-13-7.10E-133.00E-13-2.751.92E-092.71E-09-0.082.21E-081.57E-121.55E-12-1.21E-12-2.751.66E-082.36E-08-0.087.00E-083.63E-11-9.50E-13-9.39E-10-2.755.85E-087.91E-08

    -0.060.00000000010-0-0-2.5-00-0.063.19E-10-6.60E-13-4.65E-122.39E-12-2.53.34E-112.91E-11-0.065.56E-091.11E-125.90E-131.82E-12-2.55.53E-108.76E-10-0.062.32E-083.06E-123.13E-127.10E-13-2.56.53E-091.03E-08-0.067.49E-083.96E-11-2.36E-12-9.11E-10-2.53.02E-083.97E-08

    -0.040.0000000001000-2.25-00-0.042.65E-10-1.11E-12-1.34E-124.92E-12-2.255.92E-121.32E-12-0.046.21E-091.55E-122.43E-122.24E-12-2.251.33E-102.21E-10-0.042.43E-087.80E-137.20E-131.91E-12-2.252.25E-094.08E-09-0.047.61E-084.26E-11-3.07E-12-8.53E-10-2.251.47E-081.97E-08

    -0.020.0000000001000-2-00-0.022.93E-108.90E-133.33E-123.40E-13-22.90E-137.70E-13-0.026.59E-093.70E-131.47E-12-2.00E-13-22.04E-114.53E-11-0.022.63E-08-4.00E-13-1.80E-135.90E-13-27.06E-101.37E-09-0.028.28E-084.75E-11-8.00E-13-8.33E-10-26.14E-098.20E-09

    00.00000000010-00-1.750-003.14E-102.32E-125.00E-12-1.11E-12-1.75-2.01E-12-2.71E-1207.27E-09-1.44E-122.10E-12-7.50E-13-1.752.66E-123.47E-1202.90E-08-1.50E-132.00E-149.40E-13-1.751.67E-103.62E-1008.85E-085.46E-112.80E-13-7.82E-10-1.752.38E-093.19E-09

    0.020.00000000010-00-1.5000.023.86E-103.21E-124.54E-12-1.66E-12-1.5-1.29E-12-7.60E-130.027.81E-09-2.20E-131.00E-141.04E-12-1.5-1.09E-121.55E-120.022.91E-082.35E-121.26E-126.20E-13-1.52.49E-117.71E-110.028.99E-086.39E-119.60E-13-7.33E-10-1.57.44E-101.15E-09

    0.040.000000000100-0-1.25000.043.88E-10-1.60E-136.70E-132.21E-12-1.25-1.56E-12-1.31E-120.048.28E-091.94E-124.80E-132.11E-12-1.253.00E-13-2.77E-120.043.09E-083.70E-121.69E-125.00E-14-1.255.02E-121.41E-110.049.79E-087.15E-111.20E-13-6.76E-10-1.252.14E-103.63E-10

    0.060.0000000001000-1-0-00.064.93E-10-1.11E-12-1.59E-125.22E-12-1-1.56E-12-1.41E-120.068.74E-092.25E-121.66E-122.67E-12-18.90E-13-3.18E-120.063.30E-081.75E-121.15E-126.30E-13-1-1.71E-122.82E-120.061.01E-077.81E-11-8.40E-13-6.47E-10-14.59E-111.01E-10

    0.080.0000000002000-0.75-0-00.084.11E-102.13E-12-8.00E-131.27E-12-0.75-6.20E-131.31E-120.088.94E-099.90E-132.67E-127.90E-13-0.75-1.33E-121.73E-120.083.55E-084.20E-137.50E-132.27E-12-0.75-1.07E-125.40E-130.081.06E-078.31E-111.44E-12-6.03E-10-0.758.74E-122.41E-11

    0.10.00000000010-00-0.5-0-00.14.63E-104.54E-123.54E-12-1.99E-12-0.5-6.30E-13-1.99E-120.19.98E-095.00E-141.82E-126.80E-13-0.54.80E-13-3.04E-120.13.75E-082.96E-121.33E-121.41E-12-0.51.11E-12-1.41E-120.11.10E-079.54E-112.78E-12-5.72E-10-0.52.73E-124.28E-12

    0.120.0000000001000-0.25-0-00.125.06E-102.96E-124.98E-12-7.80E-13-0.25-4.60E-139.20E-130.121.06E-082.20E-131.00E-132.11E-12-0.25-1.36E-121.36E-120.124.00E-084.29E-122.52E-123.30E-13-0.25-2.14E-128.70E-130.121.18E-071.09E-101.63E-12-5.42E-10-0.25-2.96E-12-1.50E-13

    0.140.0000000002-0000000.145.70E-10-6.00E-131.48E-124.29E-120-2.12E-12-2.31E-120.141.16E-082.17E-12-2.74E-122.85E-120-1.90E-13-2.75E-120.144.08E-083.29E-121.71E-122.10E-130-1.30E-13-2.30E-130.141.24E-071.24E-10-1.50E-13-4.99E-1001.00E-144.50E-13

    0.160.0000000002-0000.25-0-00.166.20E-108.30E-11-1.90E-125.48E-120.25-1.79E-12-1.09E-120.161.25E-083.01E-122.14E-121.67E-120.25-6.10E-13-3.65E-120.164.42E-081.22E-121.06E-122.53E-120.251.06E-121.30E-130.161.32E-071.34E-101.63E-12-4.64E-100.257.20E-13-8.00E-14

    0.180.00000000020000.5-000.186.75E-103.20E-121.90E-131.60E-120.5-1.11E-12-1.60E-120.181.26E-081.28E-122.56E-128.40E-130.58.80E-13-2.28E-120.184.75E-082.06E-122.09E-123.26E-120.56.70E-13-4.90E-130.181.38E-071.46E-103.52E-12-4.32E-100.53.10E-133.50E-13

    0.20.00000000020000.75-0-00.28.80E-105.34E-124.44E-12-2.14E-120.754.00E-141.00E-130.21.39E-086.70E-131.73E-121.79E-120.75-1.85E-122.82E-120.25.06E-085.21E-122.62E-121.64E-120.75-1.82E-125.30E-130.21.48E-071.66E-103.84E-12-4.13E-100.75-3.36E-12-1.42E-12

    0.220.00000000030001-000.228.02E-102.10E-125.56E-12-3.30E-131-1.00E-12-1.15E-120.221.49E-082.94E-121.26E-123.83E-1211.06E-12-2.96E-120.225.40E-086.35E-123.17E-121.76E-121-4.80E-13-1.00E-120.221.50E-071.88E-103.03E-12-3.87E-101-1.76E-12-2.06E-12

    0.240.00000000030001.250-00.249.27E-10-9.70E-131.00E-123.49E-121.25-4.10E-132.12E-120.241.59E-083.80E-121.36E-112.50E-121.25-2.38E-121.91E-120.245.84E-083.97E-122.13E-128.20E-131.25-2.06E-12-7.90E-130.241.59E-072.07E-102.45E-12-3.66E-101.25-6.14E-12-4.20E-12

    0.260.00000000040001.5-000.269.26E-10-7.10E-13-9.70E-136.14E-121.5-1.18E-12-1.90E-120.261.70E-081.20E-123.57E-121.03E-121.5-5.90E-13-3.29E-120.265.86E-083.71E-122.81E-122.43E-121.5-8.20E-13-2.19E-120.261.71E-072.21E-103.56E-12-3.45E-101.5-6.88E-12-6.07E-12

    0.280.00000000040001.750-00.281.18E-094.37E-121.86E-121.70E-121.75-4.10E-131.23E-120.281.76E-082.30E-132.17E-121.71E-121.75-3.25E-121.23E-120.286.27E-086.13E-122.26E-123.75E-121.75-1.19E-12-3.10E-130.281.75E-072.50E-105.43E-12-3.23E-101.75-9.84E-12-1.03E-11

    0.30.00000000060002-000.31.05E-096.49E-126.06E-12-1.58E-122-1.56E-12-1.33E-120.31.94E-081.96E-121.67E-123.04E-1221.90E-13-2.79E-120.36.64E-088.87E-122.87E-122.22E-122-1.70E-12-5.60E-130.31.88E-072.75E-105.52E-12-3.07E-102-2.23E-11-1.83E-11

    0.320.00000000050002.25-0-00.321.21E-093.06E-125.07E-12-3.90E-132.25-1.30E-131.15E-120.322.08E-083.56E-121.78E-124.00E-122.251.04E-12-1.48E-120.327.24E-088.07E-123.07E-121.72E-122.25-1.52E-12-2.40E-130.321.94E-073.05E-103.13E-12-2.92E-102.25-3.93E-11-3.57E-11

    0.340.00000000050002.5-000.341.39E-09-9.60E-136.00E-135.34E-122.5-1.20E-137.20E-130.342.15E-084.37E-123.47E-122.01E-122.5-3.12E-121.94E-120.347.51E-086.66E-123.28E-123.30E-122.5-2.15E-12-1.29E-120.341.99E-073.41E-104.40E-12-2.71E-102.5-9.59E-11-6.78E-11

    0.360.00000000060002.75-000.361.53E-095.80E-13-7.10E-136.79E-122.75-1.23E-12-1.43E-120.362.21E-081.60E-123.39E-122.05E-122.751.44E-12-4.39E-120.368.00E-088.76E-122.53E-123.77E-122.75-1.03E-12-1.09E-120.362.11E-073.71E-105.66E-12-2.56E-102.75-1.44E-10-1.30E-10

    0.380.00000000090003-0-00.381.61E-094.88E-123.60E-121.53E-1231.20E-136.30E-130.382.37E-081.53E-122.80E-122.71E-123-2.63E-127.21E-120.388.03E-081.18E-113.03E-123.63E-123-2.70E-12-1.82E-120.382.31E-074.00E-106.76E-12-2.33E-103-2.94E-10-2.53E-10

    0.40.00000000090003.25-000.41.74E-096.07E-126.44E-12-4.30E-133.25-5.20E-1300.42.70E-083.32E-121.66E-123.97E-123.255.90E-13-3.01E-120.48.71E-081.34E-113.36E-122.50E-123.25-2.24E-12-1.55E-120.42.37E-074.48E-105.46E-12-2.21E-103.25-6.44E-10-5.28E-10

    0.420.00000000080003.5000.422.18E-092.41E-125.03E-123.11E-123.5-1.22E-125.60E-130.422.72E-084.71E-122.86E-123.66E-123.53.60E-13-2.87E-120.429.48E-081.33E-113.21E-121.88E-123.5-4.37E-12-3.86E-120.422.51E-074.91E-105.10E-12-2.06E-103.5-1.60E-09-1.21E-09

    0.440.00000000080003.750-00.442.16E-09-5.30E-131.24E-127.58E-123.755.60E-13-3.02E-120.442.94E-083.13E-124.13E-123.62E-123.75-3.09E-122.18E-120.441.05E-071.45E-113.55E-123.54E-123.75-7.92E-12-5.87E-120.442.64E-075.40E-106.47E-12-1.95E-103.75-6.20E-09-3.32E-09

    0.460.00000000090004000.462.28E-094.90E-13-1.10E-125.89E-124-2.05E-121.23E-120.463.07E-087.70E-133.62E-122.38E-1245.40E-13-3.06E-120.461.06E-071.87E-113.29E-124.76E-124-2.61E-11-2.27E-110.462.87E-075.88E-107.08E-12-1.83E-104-3.76E-08-1.47E-08

    0.480.0000000010004.250-00.482.46E-096.09E-124.23E-121.77E-124.25-4.86E-12-2.45E-120.483.35E-083.41E-121.91E-123.62E-124.25-2.20E-121.09E-120.481.14E-072.26E-113.25E-123.86E-124.25-1.63E-10-1.52E-100.482.92E-076.34E-108.12E-12-1.73E-104.25-2.06E-07-1.29E-07

    0.50.00000000110004.50-00.52.33E-096.36E-127.36E-12-1.10E-124.5-2.71E-123.40E-130.53.75E-085.38E-122.20E-124.22E-124.5-1.87E-12-3.99E-120.51.17E-072.31E-113.67E-121.73E-124.5-1.29E-08-1.42E-080.53.08E-076.95E-106.16E-12-1.55E-104.5-6.04E-07-4.90E-07

    4.750-04.75-1.68E-12-2.58E-124.75-4.16E-08-9.67E-104.75-6.18E-07-4.58E-074.75-1.14E-06-1.03E-06

    5-0.0000000599-0.0000000035-3.09E-12-1.50E-135-8.72E-07-6.85E-075-1.18E-06-9.28E-075-1.76E-06-1.63E-06

    5.25-0.0000003889-0.00000029235.25-6.68E-07-4.03E-125.25-1.27E-06-1.12E-065.25-1.77E-06-1.49E-065.25-2.45E-06-2.32E-06

    5.5-0.0000006829-0.00000054925.5-9.95E-07-8.03E-075.5-1.74E-06-1.58E-065.5-2.41E-06-2.10E-065.5-3.19E-06-3.04E-06

    5.75-0.0000009588-0.0000008425.75-1.34E-06-1.15E-065.75-2.22E-06-2.09E-065.75-3.07E-06-2.71E-065.75-4.00E-06-3.84E-06

    6-0.0000012599-0.00000113526-1.66E-06-1.50E-066-2.75E-06-2.56E-066-3.77E-06-3.40E-066-4.85E-06-4.64E-06

    6.25-0.0000015449-0.00000143276.25-2.04E-06-1.87E-066.25-3.30E-06-3.13E-066.25-4.48E-06-4.09E-066.25-5.70E-06-5.47E-06

    6.5-0.0000018513-0.00000171086.5-2.44E-06-2.26E-066.5-3.86E-06-3.68E-066.5-5.21E-06-4.80E-066.5-6.59E-06-6.36E-06

    6.75-0.0000021614-0.00000201286.75-2.85E-06-2.64E-066.75-4.43E-06-4.24E-066.75-5.94E-06-5.50E-066.75-7.40E-06-7.19E-06

    7-0.0000024584-0.00000234197-3.26E-06-3.05E-067-4.99E-06-4.81E-067-6.69E-06-6.21E-067-8.31E-06-8.06E-06

    7.25-0.0000027764-0.00000265757.25-3.69E-06-3.48E-067.25-5.56E-06-5.39E-067.25-7.38E-06-7.00E-067.25-9.24E-06-8.91E-06

    7.5-0.0000031232-0.00000298687.5-4.11E-06-3.90E-067.5-6.14E-06-5.97E-067.5-8.09E-06-7.64E-067.5-1.01E-05-9.70E-06

    7.75-0.0000034483-0.00000331517.75-4.55E-06-4.35E-067.75-6.71E-06-6.54E-067.75-8.78E-06-8.24E-067.75-1.08E-05-1.04E-05

    8-0.0000037834-0.00000363598-4.95E-06-4.75E-068-7.30E-06-7.08E-068-9.40E-06-8.90E-068-1.16E-05-1.11E-05

    (nS)77K(nS)(nS)(nS)(nS)

    20KVDID(Vg=1)ID(Vg=3)gd(Vg=1)gd(Vg=3)VGId(Vd=-0.05)gm(Vd=-0.05)G (Vd=-0.05)VDID(Vg=1)ID(Vg=3)gd(Vg=1)gd(Vg=3)VGId(Vd=-0.05)gm(Vd=0.05)G (Vd=-0.05)150KVDID(Vg=1)ID(Vg=3)gd(Vg=1)gd(Vg=3)VGId(Vd=-0.05)gm(Vd=0.05)G (Vd=-0.05)220KVDID(Vg=1)ID(Vg=3)gd(Vg=1)gd(Vg=3)VGId(Vd=-0.05)gm(Vd=0.05)G (Vd=-0.05)300KVDID(Vg=-3)ID(Vg=-1)ID(Vg=1)ID(Vg=3)VGId(Vd=-0.05)gm(Vd=0.05)gd(Vd=-0.05)

    20K20K20K20K20K20K20K77K77K77K77K77K77K77K150K150K150K150K150K150K150K220K220K220K220K220K220K220K300K300K300K300K300K300K300K

    -0.5-13.08-9.39191.50.545691906013.21-10.322.64E-01-0.5-12.81-10.954310.020881670502.12E+00-1.324.24E-02-0.5-9.55-9.892370.605485232100.00E+001.680.00E+00-0.5-12.88-12.86183.51.027247956400.0E+003.720.00E+00-0.5-19.27-1871.67225.5-28.669623059901.00E-022.842.00E-04

    -0.48-9.25-7.3740.32432432430.2510.6374.522.13E-01-0.48-4.19-10.77-171-1.59941520470.251.79E+00-2.723.58E-02-0.48-4.81-7.02-15-1.63333333330.254.20E-01-5.968.40E-03-0.48-9.21-9.091510.31788079470.259.3E-01-1.561.86E-02-0.48-14.76-2000.9714-78.250.257.20E-01-1.641.44E-02

    -0.46-7.77-6.822410.2551867220.529.2616.765.85E-01-0.46-7.61-5.3-33-7.24242424240.51.11E+00-4.282.22E-02-0.46-5.11-6.53-73.5-0.80952380950.5-1.07E+0010.92-2.14E-02-0.46-6.19-8.131280.566406250.55.40E-014.61.08E-02-0.46-14.48-2022.88-6611.59090909090.53.10E-0112.26.20E-03

    -0.44-2.95-5.59124.50.8594377510.7533.45-92.286.69E-01-0.44-8.27-0.52235.5-0.1104033970.754.00E-023.848.00E-04-0.44-6.58-5.341300.66538461540.751.66E+00-11.643.32E-02-0.44-3.63-6.68680.68382352940.751.69E+00-5.363.38E-02-0.44-15.8-2038.18-12.5-350.80.753.36E+00-6.46.72E-02

    -0.42-0.46-3.45-207.5-0.2795180723110.38-32.322.08E-01-0.42-3.56-1.04217-0.96543778811.00E+00-2.362.00E-02-0.42-3.98-3.61140.50.36654804271-1.25E+0013.76-2.50E-02-0.42-2.27-5.75-72-0.923611111113.50E-016.327.00E-03-0.42-16.05-1950.48187.56.397333333311.76E+0017.523.52E-02

    -0.4-4.61-2.29-12.51.641.252.3-4.964.60E-02-0.40.78-5.23-612.80327868851.254.10E-013.088.20E-03-0.4-1.17-2.58-400.23751.252.19E+00-7.164.38E-02-0.4-3.71-4.42-68.5-0.06569343071.251.93E+00-4.963.86E-02-0.4-12.3-1926.4911636.29741379311.256.14E+002.961.23E-01

    -0.38-4.86-2.767.5-1.12592592591.51.060.562.12E-02-0.38-0.44-8.65-230.5-1.43817787421.51.18E+00-3.082.36E-02-0.38-1.97-2.77-75.50.63576158941.54.00E-0110.648.00E-03-0.38-5.08-4.33131.5-0.02661596961.56.90E-0114.21.38E-02-0.38-9.98-1842.2824.594.65306122451.56.88E+0011.841.38E-01

    -0.36-3.51-4.22105.51.22274881521.751.212.882.40E-02-0.36-5.05-2.02-26.5-7.39622641511.754.10E-014.68.20E-03-0.36-3.48-3.734.526.66666666671.753.06E+00-13.766.12E-02-0.36-2.45-4.41200.41251.754.24E+00-10.688.48E-02-0.36-9.49-1795.9-14-98.10714285711.759.84E+00501.97E-01

    -0.34-1.4-1.641350.651851851924.42-1.368.84E-02-0.34-5.581.9240-0.3521.56E+00-5.723.12E-02-0.34-3.39-1.33142.50.22-3.80E-01-3.4-7.60E-03-0.34-0.05-3.41-21.5-3.325581395321.57E+00-0.723.14E-02-0.34-9.77-1768.43-29.5-200.644067796622.23E+0167.84.47E-01

    -0.321.30.12-180.5-0.01939058172.254.08-3.568.16E-02-0.32-0.780.22151-1.38410596032.251.30E-01-0.042.60E-03-0.32-0.54-0.7644.5-0.85393258432.25-1.23E+0016.64-2.46E-02-0.32-0.48-1.98-870.4080459772.251.39E+002.522.78E-02-0.32-10.36-1650.05131.54.57414448672.253.93E+01226.527.86E-01

    -0.3-2.310.19-1070.78971962622.53.195.726.38E-02-0.32.24-3.96-154-0.41233766232.51.20E-014.442.40E-03-0.30.35-1.52-1110.85135135142.52.93E+00-18.245.86E-02-0.3-2.22-2.69-428.50.07467911322.52.02E+00-4.484.04E-02-0.3-7.73-1638.0285.532.24561403512.59.59E+01191.721.92E+00

    -0.28-4.45-1.5226-0.15044247792.754.62-16.929.24E-02-0.28-0.84-2.69-216.5-0.62124711322.751.23E+00-4.442.46E-02-0.28-1.87-3.41-4-17.6252.75-1.63E+0016.28-3.26E-02-0.28-10.79-3.33521.50.03259827422.759.00E-016.681.80E-02-0.28-6.02-1582.88-37-92.63513513512.751.44E+026022.88E+00

    -0.260.07-2.18-6-11.166666666730.39-0.167.80E-03-0.26-5.17062.52.93631.20E-011.62.40E-03-0.26-1.95-2711.373239436632.44E+00-12.884.88E-02-0.26-0.36-2.9938.52.02597402632.57E+00-1.845.14E-02-0.26-6.76-1514.33-29-98.551724137932.94E+021398.085.89E+00

    -0.24-0.05-0.8437.52.443.250.356.247.00E-03-0.24-3.923.67259-0.8320463323.255.20E-012.81.04E-02-0.24-0.53-0.0598.50.07106598983.25-7.80E-010.92-1.56E-02-0.240.41-1.43-87-0.56321839083.252.11E+008.524.22E-02-0.24-7.34-1457.176058.63.256.44E+023838.721.29E+01

    -0.220.70.99-182.16666666673.51.9120.83.82E-02-0.221.26-0.64100-1.8353.51.22E+00-2.642.44E-02-0.221.440.09-501.33.5-5.50E-0113.8-1.10E-02-0.22-1.33-0.45-46.50.53763440863.54.24E+0014.28.48E-02-0.22-6.14-1386.85-517.5-4.41062801933.51.60E+0318380.923.21E+01

    -0.20.340.21-2010.58706467663.757.11-0.921.42E-01-0.23.26-4.31-191-0.30628272253.755.60E-015.961.12E-02-0.20.44-1.21-890.53.752.90E+00-14.525.80E-02-0.2-2.26-0.95445.5-0.12345679013.757.79E+0072.61.56E-01-0.2-16.49-1341.2646.54.88089713843.756.20E+03125609.681.24E+02

    -0.18-3.68-2.15162.50.301538461546.8823.121.38E-01-0.18-0.56-3.14-158.5-1.365930599442.05E+0011.244.10E-02-0.18-1.34-2.17.5144-7.30E-0110.96-1.46E-02-0.186.65-2.05-286.50.005235602142.59E+01547.65.19E-01-0.18-3.56-1278.09-52.5-67.038095238143.76E+04673779.27.52E+02

    -0.16-0.43-1.171710.57894736844.2512.66-35.882.53E-01-0.16-3.731.1969.52.07913669064.254.86E+00-8.69.72E-02-0.16-1.19095.50.69109947644.252.01E+00-1.324.02E-02-0.160.92-2.08146.64285714294.251.63E+0250998.523.26E+00-0.16-4.61-1207.7-18-161.02777777784.252.06E+0515924364.12E+03

    -0.142.990.81-101-0.42574257434.53.6935.927.38E-02-0.14-2.344.08205.5-0.87347931874.52.71E+00-4.125.42E-02-0.140.721.3270-0.72142857144.51.68E+00166468.523.36E-02-0.141.2-0.22-80-0.51254.51.29E+042418985.62.58E+02-0.14-4.97-1149.738638.39534883724.56.04E+0521278601.21E+04

    -0.120.971.67-116.50.55364806874.7512.67239477.722.53E-01-0.121.770.4997-2.38659793814.751.68E+005.643.36E-02-0.122.120.31-1140.754.754.16E+0433232488.32E+02-0.12-0.40.6-20.51.2439024394.756.18E+0522620041.24E+04-0.12-3.25-1083.69104.526.09090909094.751.14E+0624991602.27E+04

    -0.1-1.360.3812.5-5.28559882.11316127.61.20E+03-0.13.71-4.14-164.5-0.541033434753.09E+002673579.646.18E-02-0.1-0.16-1.4-27.5-3.090909090958.72E+0516037561.74E+04-0.1-0.810.09118-0.550847457651.18E+0623605202.37E+04-0.1-1.16-1029.1610.5431.047619047651.76E+0627727603.52E+04

    -0.08-1.11-0.9427.50.36363636365.2538891411760767.78E+03-0.080.42-2.36-253.5-0.93688362925.256.68E+0513080721.34E+04-0.08-0.710.3651.16923076925.251.27E+0618716002.55E+04-0.081.55-1.21791.21518987345.251.77E+0625638403.55E+04-0.08-0.95-938.64-70.5-19.39716312065.252.45E+0629400004.91E+04

    -0.06-0.56-0.74234.50.56503198295.568293311036601.37E+04-0.06-4.652.39165.50.76435045325.59.95E+0513681361.99E+04-0.060.591.82920.22826086965.51.74E+0619134403.48E+04-0.063.130.71-120.5-0.49792531125.52.41E+0626332004.83E+04-0.06-2.36-911.29-35.5-81.42253521135.53.19E+0632348806.38E+04

    -0.044.131.91-122.5-0.20816326535.7595884812040881.92E+04-0.04-1.344.92233.5-0.98072805145.751.34E+0613024802.67E+04-0.042.432.24-482.54166666675.752.22E+0621330404.44E+04-0.040.721.91-451.46666666675.753.07E+0627880406.15E+04-0.04-3.07-853.48113.58.84140969165.754.00E+0633974408.00E+04

    -0.021.682.42-88.50.05649717516125987011400402.52E+04-0.023.330.3483.5-0.868263473161.66E+0615190803.33E+04-0.021.47-0.231.5-0.87301587362.75E+0621920005.51E+04-0.02-0.180.59101.7563.77E+0628446807.54E+04-0.02-0.8-833.415447.472222222264.85E+0634028409.69E+04

    0-0.092.32-233.21739130436.25154488012256403.09E+0405-1.11-231.19565217396.252.04E+0616027604.09E+0402.1-0.75-104.5-0.85645933016.253.30E+0622374806.60E+0400.020.9462-0.25806451616.254.48E+0628997608.96E+0400.28-782.143472.11764705886.255.70E+0635497601.14E+05

    0.02-0.550.84118-0.44915254246.5185129012404403.70E+040.024.54-1.66-193.5-16.52.44E+0616285604.89E+040.020.011.0423.52.27659574476.53.86E+0622679607.72E+040.021.260.6221.5-1.32558139536.55.21E+0629558001.04E+050.020.96-733.1-42-67.92857142866.56.59E+0632456401.32E+05

    0.041.81-0.2262.51.0486.75216140011880804.32E+040.040.672.21-113-1.33185840716.752.85E+0616490405.70E+040.040.482.11590.47457627126.754.43E+0622564408.85E+040.041.690.05-27-1.07407407416.755.94E+0629871601.19E+050.040.12-676.04-48-30.52083333336.757.40E+0636640801.48E+05

    0.063.061.09-61-1.67213114757245842012719604.92E+040.06-1.595.2239.5-573.26E+0617083606.53E+040.061.662.6750.5-1.861386138674.99E+0622642409.98E+040.061.150.63-20-4.176.69E+0627372001.34E+050.06-0.84-646.7411419.043859649178.31E+0637002801.66E+05

    0.081.843.13-1230.23983739847.25277641013869605.55E+040.08-0.81.27217-0.75115207377.253.69E+0616692407.38E+040.082.670.79-42.50.12941176477.255.56E+0623500401.11E+050.080.752.2729-1.48275862077.257.38E+0628434401.48E+050.081.44-603.326723.41044776127.259.24E+0633732401.85E+05

    0.1-0.622.5460-1.10833333337.5312315013004406.25E+040.13.54-1.99720.84027777787.54.11E+0617594408.21E+040.11.820.68-86-0.83139534887.56.14E+0622782001.23E+050.11.331.4159.5-0.90756302527.58.09E+0627636801.62E+050.12.78-571.95-57.5-25.9478260877.51.01E+0730388002.02E+05

    0.120.581.21136-0.34191176477.75344826013404006.90E+040.124.98-0.78-175-1.44857142867.754.55E+0616306009.09E+040.120.12.11-142-0.26056338037.756.71E+0623572401.34E+050.122.520.33-40.50.14814814817.758.78E+0625093601.76E+050.121.63-542.11-89-24.21348314617.751.08E+0731106402.17E+05

    0.143.30.2836.53.01369863018378336007.57E+040.141.484.29-169-0.352071005984.95E+069.91E+040.14-2.742.85244-0.241803278787.30E+061.46E+050.141.710.21-32.5-3.569230769289.40E+061.88E+050.14-0.15-499.018919.90449438281.16E+072.32E+05

    0.164.032.48-117-0.00427350430.16-1.95.48104.5-1.85645933010.162.141.6721-1.97619047620.161.062.5351.50.70873786410.161.63-463.5894.516.5132275132

    0.181.692.49-38.50.58441558440.180.191.6212.5-0.880.182.560.84-41.5-1.14457831330.182.093.2626.5-3.05660377360.183.52-432.371660.625

    0.20.922.0488-0.29545454550.24.44-2.14561.61607142860.21.731.79-23.5-4.34042553190.22.621.6427.50.21818181820.23.84-412.97-40.5-32.2839506173

    0.222.681.5272.50.02068965520.225.56-0.33-228-0.83771929820.221.263.83619-0.10743134090.223.171.76-520.90384615380.223.03-386.82-29-36.1034482759

    0.244.131.55-0.5-900.2413.49-98.5-1.3451776650.2413.642.5-503.50.14597815290.242.130.82342.36764705880.242.45-365.8855.518.5945945946

    0.264.122.45-114.5-0.47161572050.26-0.976.14141.5-1.56890459360.263.571.03-70-0.48571428570.262.812.43-27.5-2.40.263.56-345.2493.511.8288770053

    0.281.833.53-490.92857142860.281.861.7210-0.7809523810.282.171.71-25-2.660.282.263.7530.5-2.50819672130.285.43-323.124.5181.6666666667

    0.30.852.62124-0.29032258060.36.06-1.58-49.5-1.2020202020.31.673.045.58.72727272730.32.872.2210-2.50.35.52-306.77-119.5-6.2092050209

    0.323.331.9520.8750.325.07-0.39-223.5-1.28187919460.321.78484.5-1.17751479290.323.071.7210.57.52380952380.323.13-291.9363.516.842519685

    0.344.372.81-55-0.40.340.65.34-65.5-1.1068702290.343.472.01-4-0.50.343.283.3-37.5-0.62666666670.344.4-270.546311.1666666667

    0.363.273.25-75-0.40666666670.36-0.716.79215.5-1.22041763340.363.392.05-29.5-1.11864406780.362.533.7725-0.280.365.66-256.475521.6818181818

    0.381.773.86-202.40.383.61.53142-0.69014084510.382.82.71-57-1.10526315790.383.033.6316.5-3.42424242420.386.76-232.62-65-8.9692307692

    0.41.372.9108-0.36111111110.46.44-0.43-70.5-2.51063829790.41.663.9760-0.25833333330.43.362.5-7.54.13333333330.45.46-220.96-18-40.6944444444

    0.423.532.12780.58974358970.425.033.11-189.5-1.17941952510.422.863.6663.5-0.0314960630.423.211.88174.88235294120.425.1-206.3168.58.2189781022

    0.445.093.04-157.5-0.35555555560.441.247.58-1170.72222222220.444.133.62-25.52.4313725490.443.553.54-13-4.69230769230.446.47-195.0530.520.1639344262

    0.461.944.16-350.46-1.15.89266.5-0.77298311440.463.622.38-85.5-0.72514619880.463.294.76-222.50.467.08-182.75529.6153846154

    0.481.883.8636-1.08333333330.484.231.77156.5-0.91693290730.481.913.6214.52.06896551720.483.253.8621-5.07142857140.488.12-172.75-98-9.1581632653

    0.52.63.085.21.18461538460.57.36-1.114.72-0.14945652170.52.24.224.41.91818181820.53.671.737.340.47138964580.56.16-154.812.32-25.1298701299

    IdVd

    -0.0393358-0.0393385-0.0393426-0.0393398-0.0393434

    -0.0372889-0.0372913-0.0372951-0.0372921-0.0372931

    -0.0352121-0.0352139-0.0352179-0.0352145-0.0352167

    -0.0331231-0.0331253-0.0331288-0.0331252-0.0331272

    -0.0310408-0.0310427-0.031046-0.0310423-0.0310448

    -0.0289614-0.0289629-0.0289664-0.0289625-0.0289646

    -0.0268854-0.0268869-0.02689-0.026886-0.0268882

    -0.0248151-0.0248162-0.0248192-0.0248148-0.0248171

    -0.0227521-0.0227537-0.022756-0.0227517-0.0227537

    -0.0206923-0.0206932-0.0206955-0.0206909-0.0206931

    -0.0186496-0.0186511-0.018653-0.0186482-0.0186499

    -0.0166217-0.0166226-0.0166246-0.0166195-0.0166214

    -0.0146114-0.0146122-0.014614-0.014609-0.0146103

    -0.0126246-0.0126255-0.0126267-0.0126216-0.0126231

    -0.0106677-0.010668-0.0106694-0.0106639-0.0106651

    -0.00873714-0.0087377-0.00873924-0.00873405-0.00873494

    -0.00687041-0.00687084-0.00687215-0.00686704-0.00686773

    -0.0050869-0.00508728-0.00508844-0.00508333-0.00508392

    -0.00342242-0.00342288-0.00342378-0.00341896-0.00341934

    -0.00195093-0.00195118-0.00195203-0.00194782-0.00194775

    -0.000800501-0.000800748-0.000801493-0.000798513-0.000798763

    -0.0001536-0.000153905-0.000154645-0.000153802-0.000154537

    -0.0000073896-0.0000076899-0.0000084256-0.0000088963-0.0000098616

    -0.0000004736-0.0000007053-0.0000013518-0.0000018047-0.0000026115

    -0.0000000385-0.0000001748-0.0000007667-0.0000011049-0.0000017737

    -0.0000000002-0.0000000002-0.0000000703-0.0000005469-0.0000011255

    -0-0-0-0.0000000631-0.0000005713

    00-0-0.0000000005-0.0000001941

    000-0-0.0000000437

    000-0-0.0000000105

    0000-0.0000000041

    0000-0.0000000019

    0000-0.0000000008

    0000-0.0000000003

    -0000-0.0000000001

    0000-0.0000000001

    0000-0

    00000

    00000

    0.00000000010.00000000010.00000000010.00000000010.0000000001

    0.00000000270.00000000270.00000000270.00000000260.0000000027

    0.00000011150.00000011150.00000011130.00000010940.0000001094

    0.00000493770.00000493640.00000493140.00000485590.0000048593

    0.0001190550.000119010.0001189460.0001177870.000117904

    0.0007162120.0007161090.0007160230.000712790.000713132

    0.001839110.001838940.001838850.001834270.0018348

    0.0032960.003295740.003295720.003290430.00329096

    0.00495260.004952430.00495240.00494680.00494719

    0.006737990.006737760.006737640.006731830.00673233

    0.008598490.008598270.008598190.008592330.0085927

    0.00926590.009265120.009264660.009263350.00926339

    0.00933430.009333460.009333160.009331870.00933189

    0.009381360.009380550.009380170.009378920.00937888

    0.009420540.009419670.009419370.00941810.0094181

    0.009455690.009454890.009454540.009453310.00945325

    0.009488450.009487620.009487260.009486040.00948599

    0.009519630.009518850.00951850.009517270.00951722

    0.009549630.009548810.009548460.009547260.00954717

    0.009578840.009578070.009577690.00957650.00957643

    0.00960760.009606790.009606430.009605240.00960513

    20k

    77k

    150k

    220k

    300k

    Vd

    Id

    IdVd (2)

    -0.0393358-0.0393385-0.0393426-0.0393398-0.0393434

    -0.0372889-0.0372913-0.0372951-0.0372921-0.0372931

    -0.0352121-0.0352139-0.0352179-0.0352145-0.0352167

    -0.0331231-0.0331253-0.0331288-0.0331252-0.0331272

    -0.0310408-0.0310427-0.031046-0.0310423-0.0310448

    -0.0289614-0.0289629-0.0289664-0.0289625-0.0289646

    -0.0268854-0.0268869-0.02689-0.026886-0.0268882

    -0.0248151-0.0248162-0.0248192-0.0248148-0.0248171

    -0.0227521-0.0227537-0.022756-0.0227517-0.0227537

    -0.0206923-0.0206932-0.0206955-0.0206909-0.0206931

    -0.0186496-0.0186511-0.018653-0.0186482-0.0186499

    -0.0166217-0.0166226-0.0166246-0.0166195-0.0166214

    -0.0146114-0.0146122-0.014614-0.014609-0.0146103

    -0.0126246-0.0126255-0.0126267-0.0126216-0.0126231

    -0.0106677-0.010668-0.0106694-0.0106639-0.0106651

    -0.00873714-0.0087377-0.00873924-0.00873405-0.00873494

    -0.00687041-0.00687084-0.00687215-0.00686704-0.00686773

    -0.0050869-0.00508728-0.00508844-0.00508333-0.00508392

    -0.00342242-0.00342288-0.00342378-0.00341896-0.00341934

    -0.00195093-0.00195118-0.00195203-0.00194782-0.00194775

    -0.000800501-0.000800748-0.000801493-0.000798513-0.000798763

    -0.0001536-0.000153905-0.000154645-0.000153802-0.000154537

    -0.0000073896-0.0000076899-0.0000084256-0.0000088963-0.0000098616

    -0.0000004736-0.0000007053-0.0000013518-0.0000018047-0.0000026115

    -0.0000000385-0.0000001748-0.0000007667-0.0000011049-0.0000017737

    -0.0000000002-0.0000000002-0.0000000703-0.0000005469-0.0000011255

    -0-0-0-0.0000000631-0.0000005713

    00-0-0.0000000005-0.0000001941

    000-0-0.0000000437

    000-0-0.0000000105

    0000-0.0000000041

    0000-0.0000000019

    0000-0.0000000008

    0000-0.0000000003

    -0000-0.0000000001

    0000-0.0000000001

    0000-0

    00000

    00000

    0.00000000010.00000000010.00000000010.00000000010.0000000001

    0.00000000270.00000000270.00000000270.00000000260.0000000027

    0.00000011150.00000011150.00000011130.00000010940.0000001094

    0.00000493770.00000493640.00000493140.00000485590.0000048593

    0.0001190550.000119010.0001189460.0001177870.000117904

    0.0007162120.0007161090.0007160230.000712790.000713132

    0.001839110.001838940.001838850.001834270.0018348

    0.0032960.003295740.003295720.003290430.00329096

    0.00495260.004952430.00495240.00494680.00494719

    0.006737990.006737760.006737640.006731830.00673233

    0.008598490.008598270.008598190.008592330.0085927

    0.00926590.009265120.009264660.009263350.00926339

    0.00933430.009333460.009333160.009331870.00933189

    0.009381360.009380550.009380170.009378920.00937888

    0.009420540.009419670.009419370.00941810.0094181

    0.009455690.009454890.009454540.009453310.00945325

    0.009488450.009487620.009487260.009486040.00948599

    0.009519630.009518850.00951850.009517270.00951722

    0.009549630.009548810.009548460.009547260.00954717

    0.009578840.009578070.009577690.00957650.00957643

    0.00960760.009606790.009606430.009605240.00960513

    20k

    77k

    150k

    220k

    300k

    Vd

    Id

    gm_Vg

    10.128.363.044.0811.28

    -8.44-6.080.04-2.929.8

    8.04-25.8831.52-18.420.16

    -21.2822.88-28.6421.7269.04

    7.68-30.2831.32-18.5687.8

    -8.9227.6-35.3618.68223.52

    20.4-25.2434.96-16.48410.48

    -13.5626.12-34.7219.2818.72

    16.12-29.566.6-3.281904.8

    -21.525.631.083.284864.04

    14.418.92-114.8841.2420438.36

    -11.04-16.6118.44110.28116096.56

    14.3219.52-352024.12648050.4

    0.241.7212.04208635.481832160

    -8.24-23.8489837.361873175.62549768

    32077.625.92284819022064682794880

    1354783.762234186.12194344420660403017440

    11249201505060185752024498803256400

    11267561384932195628025122403236800

    11440161384240206720027663603536160

    11475201479040225364027972403588240

    12382801612400233556028053603367280

    12389201661160230144029410003497120

    13891201670040236044030074803812680

    13866001790600249768029828403988600

    12957201773920243276030860003597360

    12409601832440248644031295203539240

    13963201874480249748030395603602400

    12966401745280251980032722403825600

    14333601857880262220031068003519200

    14454801842360248140029229603784400

    13781201873280265964032444003354399.99999999

    645925860041.251256592.51575637.52015412.5

    20K

    77K

    150K

    220K

    300K

    Gate Voltage (V)

    Transconductance (pS)

    Id_Vg at Vds = 1 V

    Id_Vg

    2.085.68-2.954.4916.76

    4.617.77-2.195.5119.58

    2.56.25-2.184.7822.03

    4.51-0.225.70.1827.07

    -0.815.5-1.465.6144.33

    1.11-2.076.370.9766.28

    -1.124.83-2.475.64122.16

    3.98-1.486.271.52224.78

    0.595.05-2.416.32429.46

    4.62-2.34-0.765.5905.66

    -0.76-0.947.016.322121.67

    2.843.79-21.7116.637231.26

    0.08-0.367.944.236255.4

    3.664.52-0.85550.23198268

    3.724.952.1652709.1656308

    1.66-1.0122461.55210031293750

    8021.065.4773450910726201992470

    346717558552122037015891302746830

    627947934817168475022016003560930

    9096361281050217382028296604370130

    11956401627110269062035212505254170

    14825201996870325403042205606151230

    17920902399970383792049219006993050

    21018202815260441328056571507867330

    24491003232770500339064090208820500

    27957503680420562781071547309817650

    311968041239006236000792623010716990

    342992045820106857610870861011601800

    377900050506307481980946850012502400

    4103160548695081119301028656013458800

    4461500595142087674801106326014338600

    4822870641201093878301179400015284700

    51674006880330100527401260510016123300

    20K

    77K

    150K

    220K

    300K

    Gate Voltage (V)

    Drain Current (nA)

    Id_Vg at Vds = 1 V

    big

    20KVDID(Vg=-3)ID(Vg=-1)ID(Vg=1)ID(Vg=3)VGID(Vd=-3)ID(Vd=-1)ID(Vd=1)ID(Vd=3)77KVDID(Vg=-3)ID(Vg=-1)ID(Vg=1)ID(Vg=3)VGID(Vd=-3)ID(Vd=-1)ID(Vd=1)ID(Vd=3)150KVDID(Vg=-3)ID(Vg=-1)ID(Vg=1)ID(Vg=3)VGID(Vd=-3)ID(Vd=-1)ID(Vd=1)ID(Vd=3)220KVDID(Vg=-3)ID(Vg=-1)ID(Vg=1)ID(Vg=3)VGID(Vd=-3)ID(Vd=-1)ID(Vd=1)ID(Vd=3)300KVDID(Vg=-3)ID(Vg=-1)ID(Vg=1)ID(Vg=3)VGID(Vd=-3)ID(Vd=-1)ID(Vd=1)ID(Vd=3)

    -8-0.0392666-0.039298-0.0393251-0.0393358-8-0.0007247532.56E-065.31E-060.000709073-8-0.0392662-0.0393106-0.0393147-0.0393385-8-0.0007496983.47E-067.18E-060.000731859-8-0.0392676-0.039314-0.0393175-0.0393426-8-0.0007204295.67E-061.09E-050.000713895-8-0.0392591-0.0393079-0.0393135-0.0393398-8-0.0007224337.95E-061.45E-050.000721243-8-0.0392612-0.0393107-0.0393172-0.0393434-8-0.0007135821.05E-051.88E-050.000720349

    -7.75-0.0372112-0.0372615-0.0372813-0.0372889-7.75-0.0007254762.25E-064.95E-060.000709552-7.75-0.037208-0.0372687-0.0372756-0.0372913-7.75-0.0007505063.07E-066.70E-060.000732211-7.75-0.0372091-0.0372716-0.0372778-0.0372951-7.75-0.0007213585.08E-061.02E-050.000714056-7.75-0.0372006-0.0372654-0.0372734-0.0372921-7.75-0.0007234757.16E-061.37E-050.000721219-7.75-0.0372024-0.0372682-0.0372767-0.0372931-7.75-0.0007147719.58E-061.77E-050.000719647

    -7.5-0.0351326-0.0351844-0.0352035-0.0352121-7.5-0.0007259121.95E-064.60E-060.000709687-7.5-0.0351299-0.0351909-0.0351981-0.0352139-7.5-0.0007510432.66E-066.21E-060.000732156-7.5-0.0351309-0.0351939-0.0352002-0.0352179-7.5-0.0007220454.49E-069.56E-060.000713787-7.5-0.0351226-0.0351875-0.035196-0.0352145-7.5-0.0007243446.32E-061.28E-050.000720763-7.5-0.035124-0.03519-0.035199-0.0352167-7.5-0.0007157938.65E-061.66E-050.000719246

    -7.25-0.0330441-0.0330961-0.0331139-0.0331231-7.25-0.0007263041.65E-064.27E-060.000709701-7.25-0.0330413-0.0331022-0.0331095-0.0331253-7.25-0.0007514332.29E-065.74E-060.000732073-7.25-0.0330426-0.0331042-0.0331112-0.0331288-7.25-0.0007226013.90E-068.88E-060.000713445-7.25-0.0330339-0.0330977-0.0331063-0.0331252-7.25-0.0007249825.59E-061.20E-050.000720308-7.25-0.0330348-0.0331004-0.0331093-0.0331272-7.25-0.000716667.71E-061.56E-050.000718524

    -7-0.0309626-0.0310141-0.0310316-0.0310408-7-0.0007265791.35E-063.92E-060.000709639-7-0.0309607-0.0310195-0.0310271-0.0310427-7-0.0007516961.93E-065.26E-060.000731892-7-0.0309615-0.0310219-0.0310287-0.031046-7-0.0007230423.36E-068.20E-060.000713106-7-0.030953-0.0310152-0.0310241-0.0310423-7-0.0007255524.85E-061.12E-050.000719573-7-0.0309539-0.0310174-0.0310265-0.0310448-7-0.0007173626.81E-061.46E-050.000717796

    -6.75-0.0288847-0.0289349-0.0289521-0.0289614-6.75-0.0007268241.08E-063.58E-060.000709568-6.75-0.0288825-0.0289399-0.0289474-0.0289629-6.75-0.0007518951.57E-064.81E-060.000731658-6.75-0.0288836-0.0289416-0.028949-0.0289664-6.75-0.0007233542.84E-067.57E-060.0007126-6.75-0.0288751-0.028935-0.0289439-0.0289625-6.75-0.0007259994.18E-061.03E-050.000719048-6.75-0.0288757-0.0289369-0.0289465-0.0289646-6.75-0.0007179635.93E-061.36E-050.000716934

    -6.5-0.0268103-0.0268595-0.0268758-0.0268854-6.5-0.0007269938.15E-073.25E-060.000709455-6.5-0.0268087-0.0268639-0.0268715-0.0268869-6.5-0.0007520731.23E-064.36E-060.000731425-6.5-0.0268092-0.0268657-0.0268731-0.02689-6.5-0.0007235572.35E-066.94E-060.000712227-6.5-0.0268008-0.0268584-0.0268677-0.026886-6.5-0.0007263243.54E-069.48E-060.00071846-6.5-0.0268016-0.0268611-0.0268702-0.0268882-6.5-0.0007183945.12E-061.26E-050.000716127

    -6.25-0.0247418-0.0247891-0.0248055-0.0248151-6.25-0.0007271185.76E-072.91E-060.000709337-6.25-0.0247396-0.0247933-0.024801-0.0248162-6.25-0.0007521579.12E-073.92E-060.000731198-6.25-0.0247405-0.0247948-0.0248021-0.0248192-6.25-0.0007237161.89E-066.29E-060.000711737-6.25-0.0247326-0.0247878-0.0247968-0.0248148-6.25-0.0007265842.92E-068.71E-060.000717795-6.25-0.0247331-0.0247893-0.0247988-0.0248171-6.25-0.0007187874.29E-061.15E-050.00071532

    -6-0.0226809-0.0227267-0.0227424-0.0227521-6-0.0007272663.68E-072.59E-060.000709211-6-0.0226789-0.0227303-0.0227386-0.0227537-6-0.000752326.12E-073.52E-060.000730926-6-0.02268-0.0227319-0.0227396-0.022756-6-0.0007238681.42E-065.68E-060.000711289-6-0.0226714-0.0227242-0.0227338-0.0227517-6-0.0007267572.35E-067.94E-060.000717191-6-0.0226722-0.0227262-0.022736-0.0227537-6-0.0007190063.51E-061.05E-050.000714362

    -5.75-0.0206228-0.0206669-0.0206826-0.0206923-5.75-0.0007273871.99E-072.28E-060.000709058-5.75-0.0206212-0.0206705-0.0206785-0.0206932-5.75-0.0007524493.70E-073.08E-060.000730626-5.75-0.0206222-0.0206716-0.0206793-0.0206955-5.75-0.0007240421.04E-065.06E-060.000710777-5.75-0.0206136-0.0206643-0.0206737-0.0206909-5.75-0.000726931.79E-067.19E-060.000716541-5.75-0.0206142-0.0206661-0.0206752-0.0206931-5.75-0.0007191752.78E-069.55E-060.000713594

    -5.5-0.0185828-0.0186252-0.0186397-0.0186496-5.5-0.0007275168.73E-081.98E-060.000708936-5.5-0.0185805-0.0186287-0.0186364-0.0186511-5.5-0.0007525811.99E-072.69E-060.000730331-5.5-0.0185819-0.0186292-0.0186368-0.018653-5.5-0.0007241766.87E-074.46E-060.000710278-5.5-0.0185732-0.0186215-0.018631-0.0186482-5.5-0.0007270561.31E-066.41E-060.000715803-5.5-0.0185741-0.018623-0.0186326-0.0186499-5.5-0.0007193492.13E-068.60E-060.000712725

    -5.25-0.0165566-0.0165979-0.0166119-0.0166217-5.25-0.0007276073.31E-081.68E-060.00070877-5.25-0.0165553-0.0166007-0.0166083-0.0166226-5.25-0.0007525938.81E-082.30E-060.000730037-5.25-0.0165559-0.016602-0.0166091-0.0166246-5.25-0.0007242634.03E-073.88E-060.000709815-5.25-0.0165472-0.0165937-0.0166028-0.0166195-5.25-0.0007271588.77E-075.65E-060.00071516-5.25-0.0165479-0.0165951-0.0166043-0.0166214-5.25-0.0007194561.53E-067.66E-060.00071181

    -5-0.0145487-0.0145882-0.0146018-0.0146114-5-0.0007277231.29E-081.38E-060.000708609-5-0.0145463-0.0145908-0.0145978-0.0146122-5-0.0007526953.42E-081.94E-060.000729728-5-0.0145476-0.0145916-0.0145983-0.014614-5-0.0007243822.09E-073.33E-060.000709318-5-0.0145392-0.0145837-0.0145923-0.014609-5-0.000727275.41E-074.94E-060.000714516-5-0.0145397-0.0145845-0.014593-0.0146103-5-0.0007196171.04E-066.61E-060.000710968

    -4.75-0.0125638-0.012602-0.0126148-0.0126246-4.75-0.0007278144.77E-091.09E-060.000708442-4.75-0.0125622-0.0126046-0.0126115-0.0126255-4.75-0.0007527911.33E-081.59E-060.000729431-4.75-0.012563-0.0126055-0.0126115-0.0126267-4.75-0.0007244729.87E-082.79E-060.000708822-4.75-0.0125545-0.0125975-0.0126052-0.0126216-4.75-0.0007273792.88E-074.25E-060.000713869-4.75-0.0125549-0.0125983-0.0126066-0.0126231-4.75-0.0007196976.52E-075.72E-060.000710035