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Un
iver
sity
of
Cal
iforn
ia, B
erke
ley
PL
AS
MA
NA
NO
ELEC
TR
ON
ICS
AN
DP
LA
SM
AP
RO
CESSIN
G—
TH
EN
EX
T15
YEA
RS
AN
DB
EY
ON
D
M.A
.Lie
ber
man
Dep
artm
ent
ofEle
ctri
calEngi
nee
ring
and
Com
pute
rSci
ence
sU
niv
ersi
tyof
Cal
ifor
nia
Ber
kele
y,C
A94
720
Dow
nloa
dth
ista
lk:
http
://w
ww
.eec
s.be
rkel
ey.e
du/∼
liebe
r
Lie
berm
anD
AM
OP07
1
Un
iver
sity
of
Cal
iforn
ia, B
erke
ley
PL
AS
MA
OU
TLIN
E
•T
hena
noel
ectr
onic
sre
volu
tion
•D
ualf
requ
ency
capa
citi
vedi
scha
rges
–St
andi
ngw
aves
and
skin
effec
ts
•T
hene
xt15
year
san
dbe
yond
W.P
.A
llis
(1901–1999)
Co-founder
ofth
eG
EC
Lie
berm
anD
AM
OP07
2
Un
iver
sity
of
Cal
iforn
ia, B
erke
ley
PL
AS
MA
TH
EN
AN
OELEC
TR
ON
ICS
REV
OLU
TIO
N
Lie
berm
anD
AM
OP07
3
Un
iver
sity
of
Cal
iforn
ia, B
erke
ley
PL
AS
MA
TH
EN
AN
OELEC
TR
ON
ICS
REV
OLU
TIO
N
•Tra
nsis
tors
/chi
pdo
ublin
gev
ery
11 2–2
year
ssi
nce
1959
•1,
000,
000-
fold
decr
ease
inco
stfo
rth
esa
me
perf
orm
ance
inth
ela
st30
year
s
EQ
UIV
ALEN
TA
UT
OM
OT
IVE
AD
VA
NC
E
•60
mill
ion
mile
s/hr
•20
mill
ion
mile
s/ga
l•
Thr
owaw
ayra
ther
than
pay
park
ing
fees
•3
mm
long
×1
mm
wid
e•
Cra
sh3×
ada
y
Lie
berm
anD
AM
OP07
4
Un
iver
sity
of
Cal
iforn
ia, B
erke
ley
PL
AS
MA
DO
UB
LE/T
RI
GA
TE
TR
AN
SIS
TO
RS
•V
erti
calst
ruct
ures
can
bebu
iltw
ith
curr
ent
fabr
icat
ion
tech
niqu
es•
CM
OS
can
besc
aled
anot
her
15ye
ars
•St
ate
ofth
ear
t(2
005)
:–
Inm
anuf
actu
re:
50nm
(200
atom
s)ga
tele
ngth
1.5
nm(5
atom
s)ga
teox
ide
thic
knes
s–
Smal
lest
fabr
icat
edC
MO
Str
ansi
stor
(NE
C):
5nm
(20
atom
s)ga
tele
ngth
–Lim
itin
gga
tele
ngth
from
sim
ulat
ions
(des
ktop
ic):
4nm
(16
atom
s)ga
tele
ngth
Lie
berm
anD
AM
OP07
5
Un
iver
sity
of
Cal
iforn
ia, B
erke
ley
PL
AS
MA
EV
OLU
TIO
NO
FET
CH
ING
DIS
CH
AR
GES
FIR
STG
EN
-E
RA
TIO
N
SEC
ON
DG
EN
ER
-A
TIO
N
TH
IRD
GE
N-
ER
AT
ION
??
Lie
berm
anD
AM
OP07
6
Un
iver
sity
of
Cal
iforn
ia, B
erke
ley
PL
AS
MA
DU
AL
FR
EQ
UEN
CY
CA
PA
CIT
IVE
DIS
CH
AR
GES
Lie
berm
anD
AM
OP07
7
Un
iver
sity
of
Cal
iforn
ia, B
erke
ley
PL
AS
MA
WH
YD
UA
LFR
EQ
UEN
CY
CA
PA
CIT
IVE
DIS
CH
AR
GES?
•In
the
year
2020
—6n
mga
tew
idth
,6
billi
ontr
ansi
stor
s,73
GH
zon
-chi
pcl
ock
—14
–18
wir
ing
leve
ls(d
iele
ctri
cla
yers
)ne
edto
beet
ched
•W
hyca
paci
tive
disc
harg
e?—
low
surf
ace
area
seen
bypl
asm
a(i
nexp
ensi
ve)
—si
licon
uppe
rel
ectr
ode
(con
trol
ofF/C
Fx
rati
o)—
robu
stun
iform
ity
over
wid
epr
essu
rera
nge
•W
hydu
alfr
eque
ncy
oper
atio
n?—
Inde
pend
ent
cont
rolof
ion
flux
and
ion
bom
bard
ing
ener
gyto
the
subs
trat
e
Hig
hfr
eque
ncy
pow
erco
ntro
lsio
nflu
xLow
freq
uenc
yvo
ltag
eco
ntro
lsio
nen
ergy
Lie
berm
anD
AM
OP07
8
Un
iver
sity
of
Cal
iforn
ia, B
erke
ley
PL
AS
MA
TY
PIC
AL
OP
ER
AT
ING
CO
ND
ITIO
NS
~~
Vl
Vh+ – + –
R∼
15–3
0cm
,L∼
1–3
cmp∼
30–3
00m
Tor
r,C
4F
8/O
2/A
rfe
edst
ock
Hig
hfr
eque
ncy
f h∼
27.1
–160
MH
z,V
h∼
200–
500
VLow
freq
uenc
yf l
∼2–
13.5
6M
Hz,
Vl∼
500–
1500
VA
bsor
bed
pow
ers
Ph,
Pl∼
500–
3000
W
Lie
berm
anD
AM
OP07
9
Un
iver
sity
of
Cal
iforn
ia, B
erke
ley
PL
AS
MA
HIG
HFR
EQ
UEN
CY
ELEC
TR
OM
AG
NET
ICEFFEC
TS
Lie
berm
anD
AM
OP07
10
Un
iver
sity
of
Cal
iforn
ia, B
erke
ley
PL
AS
MA
STA
ND
ING
WAV
ES
AN
DSK
INEFFEC
TS
•H
igh
freq
uenc
yan
dla
rge
area
⇒st
andi
ngw
ave
effec
ts
•H
igh
freq
uenc
y⇒
high
dens
ity⇒
skin
effec
ts
1.M
.A.Lie
ber
man,J.P
.B
ooth
,P.C
haber
t,J.M
.R
ax,and
M.M
.Turn
er,
Pla
sma
Sourc
esSci
.Tec
hnol.
11,283
(2002)
2.P.C
haber
t,J.Phys.
D:A
ppl.
Phys.
40,R
63
(2007)
Lie
berm
anD
AM
OP07
11
Un
iver
sity
of
Cal
iforn
ia, B
erke
ley
PL
AS
MA
CY
LIN
DR
ICA
LC
APA
CIT
IVE
DIS
CH
AR
GE
Con
side
ron
lyth
ehi
ghfr
eque
ncy
sour
ce
~+
–
2R
ss 2d2l
Plas
ma
Vh
z
r
Shea
th
Shea
th
Fie
lds
cann
otpa
ssth
roug
hm
etal
plat
es
(1)
Vs
exci
tes
radi
ally
outw
ard
wav
ein
top
vacu
umga
p(2
)O
utw
ard
wav
eex
cite
sra
dial
lyin
war
dw
ave
inpl
asm
a
Lie
berm
anD
AM
OP07
12
Un
iver
sity
of
Cal
iforn
ia, B
erke
ley
PL
AS
MA
SU
RFA
CE
WAV
EM
OD
E
•Pow
eren
ters
the
plas
ma
via
asu
rfac
ewav
em
ode:
Pla
sma
Stan
ding
wav
e
Dec
ay(w
eak)
Dec
ay
Surf
ace
Wav
eM
ode
λδ
s 2d s
•R
adia
lw
avel
engt
hfo
rsu
rfac
ew
ave
(low
dens
ity
limit
):
λ≈
λ0
√1
+d/s
∼λ
0 3
wit
hλ
0=
c/f
the
free
spac
ew
avel
engt
h•
Axi
alsk
inde
pth
for
surf
ace
wav
e:
δ∼
c ωp
•T
here
are
also
evan
esce
ntm
odes
lead
ing
toed
geeff
ects
near
r=
R
Lie
berm
anD
AM
OP07
13
Un
iver
sity
of
Cal
iforn
ia, B
erke
ley
PL
AS
MA
STA
ND
ING
WAV
EEFFEC
T
•R
=50
cm,d
=2
cm,s
=0.
4cm
,n
e=
109
cm−
3,δ≈
16cm
•P
cap
(das
h),P
ind
(dot
)an
dP
tot
(sol
id)
asa
func
tion
ofr
13.5
6M
Hz
(λ≈
9–10
m)
40.7
MH
z(λ
≈3
m)
Power/area
r (c
m)
025
50
0.51 0
Tota
l
Cap
aciti
ve
Indu
ctiv
eEdg
eef
fect
Power/area
r (c
m)
025
50
0.51 0
Tota
l
Cap
aciti
ve
Indu
ctiv
eEdg
eef
fect
Smal
lsta
ndin
gw
ave
and
skin
effec
ts
Lar
gest
andi
ngw
ave
effec
t;ce
nter
-hig
hpr
ofile
Lie
berm
anD
AM
OP07
14
Un
iver
sity
of
Cal
iforn
ia, B
erke
ley
PL
AS
MA
EX
PER
IMEN
TA
LR
ESU
LTS
FO
RSTA
ND
ING
WAV
ES
20×
20cm
disc
harg
ep
=15
0m
Tor
r50
Wrf
pow
er
The
stan
ding
wav
eef
-fe
ctis
seen
at60
MH
zan
dis
mor
epr
onou
nced
at81
.36
MH
z
(A.Per
ret,
P.C
haber
t,J-P
Booth
,J.Jolly,
J.G
uillo
nand
Ph.
Auvra
y,
Appl.
Phys.
Let
t.83,243,2003)
Lie
berm
anD
AM
OP07
15
Un
iver
sity
of
Cal
iforn
ia, B
erke
ley
PL
AS
MA
SU
PP
RESSIO
NO
FSTA
ND
ING
WAV
EEFFEC
TS
•Sh
aped
elec
trod
e(a
nddi
elpl
ate)
elim
inat
est
andi
ngw
ave
effec
ts
•In
crea
sed
over
allt
hick
ness
ince
nter
com
pare
dto
edge
keep
svo
ltag
eac
ross
disc
harg
ese
ctio
nco
nsta
nt•
The
elec
trod
esh
ape
isa
Gau
ssia
n,in
depe
nden
tof
the
plas
ma
prop
-er
ties
L.Sanso
nnen
sand
J.Sch
mitt,
Appl.
Phys.
Let
t.82,182
(2003)
P.C
haber
t,J.L
.R
aim
bault,J.M
.R
ax,and
A.Per
ret,
Phys.
Pla
smas11,4081
(2004)
Lie
berm
anD
AM
OP07
16
Un
iver
sity
of
Cal
iforn
ia, B
erke
ley
PL
AS
MA
EX
PER
IMEN
TA
LC
ON
FIR
MA
TIO
N
•5–
250
mTor
rar
gon,
50–3
00W
H.Sch
mitt
etal,
J.A
ppl.
Phys.
95,4559
(2004)
Lie
berm
anD
AM
OP07
17
Un
iver
sity
of
Cal
iforn
ia, B
erke
ley
PL
AS
MA
SK
INEFFEC
TS
•R
=50
cm,d
=2
cm,s
=0.
4cm
,f
=13
.56
MH
z,λ≈
9m
•P
cap
(das
h),P
ind
(dot
)an
dP
tot
(sol
id)
asa
func
tion
ofr
ne
=10
9cm
−3
(δ=
16.7
cm)
ne
=10
10
cm−
3(δ
=5.
3cm
)
Power/area
r (c
m)
025
50
0.51 0
Tota
l
Cap
aciti
ve
Indu
ctiv
eEdg
eef
fect
Power/area
r (c
m)
025
50
0.51 0
Tota
l
Cap
aciti
ve
Indu
ctiv
e
Edg
eef
fect
Smal
lsta
ndin
gw
ave
and
skin
effec
ts
Lar
gesk
ineff
ects
;ce
nter
-low
profi
le
Lie
berm
anD
AM
OP07
18
Un
iver
sity
of
Cal
iforn
ia, B
erke
ley
PL
AS
MA
SK
INEFFEC
TS
•Sk
ineff
ects
=⇒
radi
alno
nuni
form
itie
sat
high
dens
itie
sw
hen
δ< ∼
0.45
√d
R
δ∝
1 √n
=co
llisi
onal
orco
llisi
onle
sssk
inde
pth
d=
bulk
plas
ma
half-
thic
knes
sR
=di
scha
rge
radi
us•
Use
1Dtr
ansm
issi
onlin
ean
alys
is+
glob
al(l
owpr
essu
re)
orlo
cal(h
igh
pres
sure
)po
wer
bala
nce
=⇒
self-
cons
iste
ntst
andi
ngw
ave/
skin
effec
ts
(P.C
haber
t,J.L
.R
aim
bault,P.Lev
if,J.M
.R
ax,and
M.A
.Lie
ber
man,
Pla
sma
Sourc
es:Sci
.Tec
hnol.
15,S130,2006)
Lie
berm
anD
AM
OP07
19
Un
iver
sity
of
Cal
iforn
ia, B
erke
ley
PL
AS
MA
TH
EN
EX
T15
YEA
RS
AN
DB
EY
ON
D
Lie
berm
anD
AM
OP07
20
Un
iver
sity
of
Cal
iforn
ia, B
erke
ley
PL
AS
MA
TH
EEX
PER
TS
SP
EA
K†
•“T
here
isno
tth
esl
ight
est
indi
cati
onth
at[n
ucle
ar]e
nerg
yw
illev
erbe
obta
ined
”—
Alber
tEin
stei
n,19
32•
“Any
one
who
expe
cts
aso
urce
ofpo
wer
from
the
tran
sfor
mat
ion
ofth
ese
atom
sis
talk
ing
moo
nshi
ne.”
—Ern
estRut
herf
ord,
1933
•“A
few
deca
des
henc
e,[w
hen
cont
rolle
dfu
sion
isac
hiev
ed],
ener
gyw
illbe
free
—ju
stlik
eth
eun
met
ered
air.
”—
John
von
Neu
man
n,19
56•
“Rad
ioha
sno
futu
re.”
—Lo
rdK
elvi
n,18
97•
“Ith
ink
ther
eis
aw
orld
mar
ket
for
abou
tfiv
eco
mpu
ters
.”—
Tho
mas
J.W
atso
n,19
43•
Whe
rea
calc
ulat
orlik
eE
NIA
Cis
equi
pped
wit
h18
,000
vacu
umtu
bes
and
wei
ghs
30to
ns,
com
pute
rsin
the
futu
rem
ayha
veon
ly1,
000
vacu
umtu
bes
and
perh
aps
only
wei
gh1
1 2to
ns.”
—Pop
ular
Mec
hani
cs,M
arch
1949
•“6
40k
ough
tto
been
ough
for
anyb
ody.
”—
BillG
ates
,19
81†
C.C
erfand
V.N
avask
y,V
illa
rd,N
ewYork
,1998
Lie
berm
anD
AM
OP07
21
Un
iver
sity
of
Cal
iforn
ia, B
erke
ley
PL
AS
MA
INT
ER
NA
TIO
NA
LT
EC
HN
OLO
GY
RO
AD
MA
PFO
RSEM
ICO
ND
UC
TO
RS
(IT
RS
2005
)
Yea
r20
0620
0920
1120
1320
1520
1720
20H
alf-pi
tch
(nm
)70
5040
3225
2014
Gat
ele
ngth
(nm
)28
2016
1310
86
•A
bove
limit
sim
pose
dby
ther
mod
ynam
ics
and
quan
tum
mec
hani
cs•
Maj
oris
sues
are
tran
sist
orph
ysic
s,m
ater
ials
limit
atio
ns,a
ndpo
wer
diss
ipat
ion
–D
opin
gpr
ofile
s,si
licon
-on-
insu
lato
r,Fin
FE
T’s
,tri
-gat
est
ruct
ures
–H
igh-
κga
tedi
elec
tric
s,m
etal
gate
s,st
rain
edSi
,Si
-Ge,
low
-κin
terc
onne
ctdi
elec
tric
s–
Pas
sive
heat
sunk
pow
erlim
itat
ion
ofar
ound
200
W/c
m2
•Fo
rmid
able
man
ufac
turi
ngis
sues
rem
ain;
eg,l
itho
grap
hy,m
etro
logy
“You
can
scal
eC
MO
Sdo
wn
anot
her
10–1
5ye
ars;
noth
ing
touc
hes
the
econ
omic
sof
it.”
—In
telC
EO
Cra
igB
arre
tt
Lie
berm
anD
AM
OP07
22
Un
iver
sity
of
Cal
iforn
ia, B
erke
ley
PL
AS
MA
BEY
ON
D20
20
•M
oore
’sla
w(m
inia
turi
zati
on)
ends
,bu
tpr
oduc
tsim
prov
efo
rm
any
year
s
•M
OS-
FE
T’s
cont
inue
for
fast
swit
ches
Ver
tica
lCM
OS
tran
sist
ors→
silic
on/c
arbo
nna
now
ires
/nan
otub
es?
•C
oppe
r/lo
w-κ
diel
ectr
icla
yers
cont
inue
for
inte
rcon
nect
sC
oppe
r→
carb
onna
notu
bes?
Opt
ical
inte
rcon
nect
s?
•C
MO
Sm
emor
ym
igra
tes
toco
mpa
tibl
em
agne
tic
mem
ory
“Spi
ntro
nics
:”el
ectr
onch
arge
→el
ectr
onsp
in
Fla
sh(s
low
)an
dD
RA
M(v
olat
ile)→
MR
AM
(fas
t,no
n-vo
lati
le)?
⇒1s
tpr
oduc
tin
2006
:Fr
eesc
ale
MR
AM
(4M
b,35
ns)
Lie
berm
anD
AM
OP07
23
Un
iver
sity
of
Cal
iforn
ia, B
erke
ley
PL
AS
MA
PIE
INT
HE
SK
Y†
•“3
Dch
ips”
(hea
tre
mov
allim
itof
200
W/c
m2)
•“S
ingl
e-m
olec
ule
tran
sist
ors”
(not
muc
hsm
alle
rth
anC
MO
Str
an-
sist
ors)
•“S
ingl
e-el
ectr
ontr
ansi
stor
s”(n
eed
low
tem
pera
ture
s)
•“C
ross
-bar
com
puti
ng”
(rep
lace
relia
ble
CM
OS
swit
ches
wit
hde
fect
-pr
one
nano
wir
esw
itch
es)
•“S
elf-as
sem
bled
,DN
A-b
ased
com
pute
rs”
(we
each
own
one
alre
ady)
•“Q
uant
umco
mpu
ting
”(e
xpon
enti
ally
fast
erco
mpu
tati
onfo
rni
che
appl
icat
ions
;e.
g.co
debr
eaki
ng)
†Fro
ma
Joe
Hillunio
nso
ng,The
Pre
ach
erand
the
Sla
ve,1911
Lie
berm
anD
AM
OP07
24
Un
iver
sity
of
Cal
iforn
ia, B
erke
ley
PL
AS
MA
CO
NC
LU
SIO
NS
•C
MO
Ssc
ales
to24
-ato
mga
tele
ngth
sin
2020
•C
MO
Spr
oduc
tim
prov
emen
tsco
ntin
uefa
rbe
yond
2020
•P
lasm
are
acto
rre
sear
chan
dde
velo
pmen
tw
illin
tens
ifyto
mee
tth
ese
need
s
•D
ispl
acin
gC
MO
Sbe
yond
2020
isun
likel
y;ot
her
tech
nolo
gies
will
bein
tegr
ated
into
the
CM
OS
plat
form
Dow
nloa
dth
ista
lk:
http
://w
ww
.eec
s.be
rkel
ey.e
du/∼
liebe
r
W.P
.A
llis
(1901–1999)
Co-founder
ofth
eG
EC
Lie
berm
anD
AM
OP07
25
