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Nano-Materials Characterization. Nano. Systems. Characterization. Design and. Growth and. Modeling. Processing. and Analysis. Yoram Shapira, EE Nano-bio-electronics 18.12.01. Nano-Materials Characterization. Nano-Materials Characterization. - PowerPoint PPT Presentation
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Nano-Materials Characterization
Yoram Shapira, EE Nano-bio-electronics 18.12.01
Growth and
Processing
Characterization
and Analysis
Design and
Modeling
Nano
Systems
Nano-Materials Characterization
Analytical Technique
Typical Application
Signal Detected Elements
Detection Limits
Depth Resolution
Lateral Probe Size
TXRF Metal contamination
X-rays S - U 109-1012
Atoms/cm2 10 mm
RBS Thin film composition
He atoms Li - U 1 - 10 at% (Z<20) 0.01 - 1 (Z>20)
2-20 nm 2 mm
XPS Surface analysis Depth profiling
Photo- electrons
Li - U 0.01 - 1 at% 1-10 nm 10 m – 2 mm
EDAX (EDS)
elemental microanalysis
X-rays B - U 0.1 - 1 at% 1 – 5 m 1 m
Quad SIMS
Dopant profiling Surface microanalysis
Secon- dary ions
H - U 1014-1017
Atoms/cm3 <5 nm 1 m (Imaging)
30 m (D Profiling)
TOF SIMS
Surface microanalysis
Secon- dary ions
H - U 108
Atoms/cm2 <1 monolayer
0.1 m (Imaging)
Nano-Materials CharacterizationAnalyticalTechnique
TypicalApplication
Signal DetectedElements
DetectionLimits
DepthResolution
Lateral ProbeSize
AES Surface analysisand depthprofiling
Augerelectrons
Li U 0.1 - 1 at% <2 nm 100 nm
HRAES Surfaceanalysis, microarea depthprofiling
---“--- Li U 0.01 - 1 at% 2 - 6 nm <15 nm
SEM Surface imaging Secondary &backscatteredelectrons
3 nm
AFM Surface imaging Atomic forces 0.01 nm 1.5 5 nm
HRSEM High resolutionsurface imaging
Secondary &backscatteredelectrons
0.7 nm
STM Surface imaging Tunnelingcurrents
0.01 nm 0.1 nm
Nano-Materials Characterization
Analytical Technique
Typical Application
Signal Detection Limits
Depth Resolution
Lateral Probe Size
FTIR Dopants and contamination
Infrared photons
1011-1012
Atoms/cm3 1-10 mm 2 mm
PL Dopants and contamination
Photons 1011-1012
Atoms/cm3 1 - 3 m >5 m
Raman Dopants and contamination
Photons 1019
Atoms/cm3 1 m 1 m
XRD Structure and contamination
X-rays
1020
Atoms/cm3 3 mm 15 m
HEED Structure and contamination
X-rays
1020
Atoms/cm3 5 nm 0.1-10 m
ION micro- probe
Dopants and contamination
Ions
5x1017
Atoms/cm3 5 nm 0.1 mm
HRTEM [TED] [EDS]
Nano-structure [Xtal structure] [element analysis]
Electrons [Electrons]
1m-1nm
10m-0.5nm
Nano-Materials Characterization
Analytical Technique
Typical Application
Signal Depth Resolution
Probe Size
HRTEM [TED] [EDS]
Nano-structure Xtal structure Element analysis]
Electrons Electrons
1m-1nm
10m-0.5nm
Courtesy Yossi LEREAH
Transmission Electron Microscope
• Electron source: W, LaB6, FEG• Condenser Lenses (Electromagnetic)• Sample• Objective Lens (determine the point resolution)• Post Sample Lenses• Detector: electron- light converter
• Chemical analysis: EDS, GIF
Wavelength at 200KV - 0.0025nm
Bragg’s Law2dsinq=lL
Nano-Materials Characterization
Courtesy Yossi LEREAH
Objective Lens The Core of TEM
• Back Focal Plane: Diffraction Pattern• Image Plane• Diffraction Contrast: Bright Field or Dark Field by
excluding one of the beams (in the back focal plane)• Phase Contrast by including all beams
Courtesy Yossi LEREAH
Crystallization of Ge:Al (1)
A branched Morphology in Material Science that is relevant to Life Science
Contrast: Mass thickness, Bragg Conditions
Diffraction: Polycrystalline, Preferred orientation
•
Yossi LEREAH TEL AVIV University
Yossi LEREAH TEL AVIV University
Crystallization of Ge:Al (2)
• Phase Contrast reveals the periodicity of the atoms.
• The interface is rough down to atomic scale
Courtesy Yossi LEREAH
Melting of Nano-Particles
• Melting temperature depends on the particle size.
• Existence of surface melting.
• Diffraction Contrast between solid and liquid phases
Yossi LEREAH TEL AVIV University
Nano-Materials Characterization
Nano-Materials Characterization
Courtesy Yossi LEREAH
Nano-Materials Characterization
Analytical Technique
Typical Application
Signal Probe Size
SEM Surface imaging
Secondary & backscattered electrons
3 nm
HRSEM High resolution imaging
Secondary & backscattered electrons
0.8 nm
Collected signals in SEM
Sample
Incident beam
Secondary electrons (SE)
Backscattered electrons (BSE)
Cathodoluminescence(CL)
X-rays
Absorbed current
Courtesy Z. Barkay
Energy distribution of SE and BSE
Courtesy Z. Barkay
Signal emission from interaction volume
Rp
Courtesy Z. Barkay
The origin of high SE spatial resolution
• High resolution SE(1): 1 nm• Lower resolution SE(2): 0.1-1 m
Courtesy Z. Barkay
Composition dependenceE=30keV
Usually 0.1, at 30KeV=(z)
Courtesy Z. Barkay
Basic SEM modes of operation - summary
(*) usually sizes of 1cm, dependent on SEM configuration
(**) voltage and Z dependent
Additional modes: Voltage contrast (VC) and EBIC - usually used in devices and p-n junctions.
Signal/Mode Information Material Resolution
Secondary electrons (SE)
Morphology All (*) ~1nm
Backscattered electrons (BSE)
Atomic number
All (*) 0.1-0.5m(**)
X-ray (EDS or WDS)
Atomic composition
All (flat) ~1m
(CL)Cathodo- luminescence
Bandgap, impurities, lifetimes
Insulators and semi- conductors
~ 1m
Courtesy Z. Barkay
AntHuman hairEye of an ant
Courtesy A. Merson
Nano-Materials Characterization
Surface, Atomic number, Element imaging
BSE
Cu
SE
Courtesy Z. Barkay
Nano-Materials Characterization
Courtesy Z. Barkay
Nano-Materials Characterization
Courtesy Z. Barkay
Nano-Materials Characterization
Analytical Technique
Typical Application
Signal Detected Elements
Detection Limits
Depth Resolution
Probe Size
EDAX elemental microanalysis
X-rays B - U 0.1 - 1 at% 1 – 5 m 1 m
Atomic mapping and analysis
Cl
Brr
Agr
EDS analysis of AgClBr fiber cross section
0102030405060
0 0.2 0.4 0.6 0.8 1
fiber diameter (mm)
% a
tom
ic
BrClAg
Courtesy Z. Barkay
Nano-Materials Characterization
Courtesy CEA
Nano-Materials Characterization
Analytical Technique
Typical Application
Signal Detected Elements
Detection Limits
Depth Resolution
Probe Size
AES Surface analysis and depth profiling
Auger electrons
Li U 0.1 - 1 at% <2 nm 100 nm
FE-AES Surface analysis, micro area profiling
---“--- Li U 0.01 - 1 at% <2 nm <15 nm
Nano-Materials Characterization
Auger process
Courtesy A. Merson
Courtesy A. Merson
Auger Emission
a. X-ray fluorescenceb. Auger emission
Courtesy A. Merson
Courtesy PHI
Courtesy PHI
Nano-Materials Characterization
Courtesy PHI
Courtesy PHI
Nano-Materials Characterization
Courtesy PHI
Nano-Materials Characterization
Courtesy PHI
Nano-Materials Characterization
Courtesy PHI
Nano-Materials Characterization
Nano-Materials Characterization
Analytical Technique
Typical Application
Signal Detected Elements
Detection Limits
Depth Resolution
Probe Size
XPS Surface analysis Depth profiling
Photo- electrons
Li - U 0.01 - 1 at% 1-10 nm 10 m – 2 mm
Nano-Materials Characterization
Courtesy PHI
Nano-Materials Characterization
Courtesy PHI
Nano-Materials Characterization
Courtesy PHI
Nano-Materials Characterization
Courtesy PHI
Nano-Materials Characterization
Courtesy PHI
Nano-Materials Characterization
Analytical Technique
Typical Application
Signal Detected Elements
Detection Limits
Depth Resolution
Probe Size
Quad SIMS Dopant profiling Surface microanalysis
Secon- dary ions
H - U 1014-1017
Atoms/cm3 <5 nm 1 m (Imaging)
30 m (D Profiling)
TOF SIMS Surface microanalysis
Secon- dary ions
H - U 108
Atoms/cm2 <1 monolayer
0.1 m (Imaging)
Nano-Materials Characterization
Courtesy A. Merson
Uac
L
מטרהגלאי
vm
2
22L
TUzm ac=
Courtesy A. Merson
Nano-Materials Characterization
Courtesy PHI
Nano-Materials Characterization
Courtesy PHI
Nano-Materials Characterization
Courtesy A. Merson
I~exp(-2kd)
Courtesy A. Merson
Non-contact mode
Courtesy A. Merson
Nano-Materials Characterization
Courtesy Y. Rosenwaks
Nano-Materials Characterization
Materials Characterization
Courtesy Dr. Z. Barkai
Courtesy Dr. Z. Barkai
Nano-Materials Characterization
STM: Si(7x7)
Nano-Materials Characterization
A superlattice of alternating GaSb (12 ml) and InAs (14 ml) was MBE grown by W. Barvosa-Carter, B. R. Bennett, and L. J. Whitman. Only every-other lattice plane [Sb (reddish) and As (blueish)] is exposed on the (110) surface.
Materials Characterization
Iron (on Cu) “Coral”
Nano-Materials Characterization
Courtesy Z. Barkay
Nano-Materials Characterization
Courtesy Z. Barkay
Courtesy Y. Rosenwaks
Materials Characterization
Courtesy Y. Rosenwaks
Materials Characterization
Courtesy Dr. S. Richter
Materials Characterization
Courtesy Dr. S. Richter
Materials Characterization
Courtesy Dr. S. Richter