MP0593-ICPS

Pre-installation Guide

1-1

CUSTOMER DETAILS

CUSTOMER: HI-TECH (VIETNAM)

SERIAL No: MP0593-ICP

SALES CONTACT: FRANK FEILI

TYPE OF SYSTEM: LPX ICP (SR)

DATE GUIDE WAS PREPARED: 18th JANUARY 2008

ISSUE: 01

DATE GUIDE WAS UPDATED:


IMPO• The

• The ves 9 metres between rack & other system parts. How other obstructions or if cables are routed via cable trays

• STS o gasbox. Only fit correctly rated regulators. It is also reco line. Failure to provide this equipment may result in unne

• In or p.

• A he se to commission the equipment. Failure to provide this e

• All fa ent.

• STS ing the pumps in the grey area away from the oper

• If this quirements of the latest issue of STS quality docu stallation tester. These documents are available from STS notified if an appropriate electrical tester is available to pr

• The responsibility of the customer to ensure it is suitably rated

• A su pplied electronics rack.

• An in

1-2

RTANT NOTESinformation contained within this guide is accurate at time of placement of order.

electronics rack is supplied with 10 metres cables as standard, which allowing for cable drops, leaever, please note that the effective distance between parts may be reduced even further to avoid .

only recommend the use of orbitally welded VCR fittings for all gas line installations from source tmmended a wall-mounted isolation valve, high flow valve & non return valve be fitted in each gas cessary delays in the commissioning of the system.

der to check the foreline for leaks, STS recommend fitting an isolation valve on the chamber pum

lium leak detector or similar equipment must be made available for STS’s appointed engineer to uquipment may result in unnecessary delays in the commissioning of the system.

cilities points of connection to have flexibility designed in to allow for vibration due to a seismic ev

recommend a noise survey assessment as part of the installation. STS also recommend positionators point of use, if possible.

system is to be electrically installed by non STS personnel, it must be installed in line with the rements: Q000130, Q000131, Q000135 & electrical drawing ED322778, using a suitable electrical in by mailing the address below. If STS engineers are to electrically install this system they must beevent any delay.

supply cable to this tool must be sized in accordance with local electrical rules/regulations & is the prior to installation.

itably rated mains circuit breaker should be installed up stream of the main breaker on the STS su

put from a fire system can be linked in to the STS EMO circuit if required.


CE DEPARTMENT AT:

1-3

FOR FURTHER INFORMATION PLEASE CONTACT STS SERVI

[email protected]


CONT

SECTIO

SECTIO

SECTIO

SECTIO

1-4

ENTS

N 1 SYSTEM ENVIRONMENT & FOOTPRINT

N 2 SYSTEM INSTALLATION DRAWINGS

N 3 DATA SHEETS

N 4 SYSTEM SERVICES INSTALLATION CHECKLIST


ABOUThis gui safely to the specifications, qualified personnel must install e

• Elec

• Cool

• Gas

• Extra

• Com

1-5

T THIS GUIDEde describes the facilities requirements of the LPX ICP system. In order for the system to operateach of the following user-supplied services prior to the arrival of an STS service engineer:

trical facilities

ing water facilities

supply facilities

ction requirement

pressed air


ENTAL

1-6

SECTION 1SYSTEMS ENVIRONM

CONDITIONS


SYSTEAir parti

ROOM

Maximu

Minimum

RELAT

Maximu

Minimum

SYSTE

Air parti

ROOM

Maximu

Minimum

RELAT

Maximu

Minimum

1-7

MS ENVIRONMENTAL CONDITIONS (CLEAN ROOM)cle count local to the system Class 1,000 or better

TEMPERATURE

m 25oC

5oC

IVE HUMIDITY AT 20oC

m 75%

25%

MS ENVIRONMENTAL CONDITIONS (GREY AREA)

cle count local to the system Class 10,000 or better

TEMPERATURE

m 25oC

5oC

IVE HUMIDITY AT 20oC

m 75%

25%


1-8

FOOTPRINT LAYOUT


TION

2-1

SECTION 2SYSTEM INSTALLA

INFORMATION


HOW TThe Sysincludedshow a requiredshow whconnectprovide CUSTOmade toparticula

In the excustomeprovide the fittinby referThe spesupply c2.3 of threquiremon pageSystemreferringbe able servicesof conne

2-2

O USE THIS GUIDEtem Services Diagrams in this section each

different service for the system. They ere the service is to be

ed & who should it (i.e. STS or the MER). Reference is the tables for the r service.

ample shown here, the r will be required to the nitrogen supply to g at conditions shown ring to the table ref. (A). cification for this air an be found on page is section. The exhaust ents (M) are detailed

2.9. By examining the s Service Diagrams & to the tables you will to determine the required & the points ction.


NITRO

E

FLOW RATE SUPPLIER

) 22 SLPM Customer

ired.

12 SLPM (Dry pump)

Customer

) 1 SLPM Customer

) 22 SLPM Customer

2-3

GEN REQUIREMENTS

TABLE REF

LETTER

SERVICEREQUIRED PURITY INLET

PRESSURE

MAX SAFETY

PRESSUR

A Loadlock vent 99.99% 2-6 Bar (g) 10 Bar (g

B Loadlock pump purge Varian SH100

No purge requ

FITTING FOR THE ABOVE SUPPLY IS 8MM PUSH FIT

C Process pump purgeEdwards iH80

99.99% 2.8-3.2 Bar (g) 7 Bar (g)

FITTINGS FOR THE ABOVE SUPPLIES ARE 1/4” SWAGELOK COMPRESSION

D Anti-condensation 99.99% 2-6 Bar (g) 10 Bar (g

FITTING FOR THE ABOVE SUPPLY IS 1/4" PUSH FIT

E Chamber vent, turbo purge & gas line purges

99.9995% 1 Bar (g) 10 Bar (g

FITTING FOR THE ABOVE SUPPLY IS 1/4” VCR MALE


WATERECOM

NOTE• Plea

OW RATE SUPPLIER

300 l/h Customer

120 l/h Customer

Air cooled.

340 l/h Customer

2-4

R REQUIREMENTSMENDED CONDITIONS OF HOUSE COOLING WATER:-RESISTIVITY: 10 Kohm.cm

SOLID CONTENT: 30 ppm

PH VALUE: 6 - 8

TEMPERATURE: 15oC - 25oC

se also refer to the "Cooling Requirements" section of this document, page 2-9.

TABLE REF

LETTERSERVICE REQUIRED PURITY INLET

PRESSURE FL

FMachine supply 100 Microns 2-4 Bar (g)

FITTING SIZE 3/8” QUICK COUPLING

G

Process chamber dry pump

Edwards iH80100 Microns 2-4 Bar (g)

FITTING SIZE 1/2” QUICK COUPLING

HLoadlock chamber

dry pumpVarian SH100

No water required.

I RF generators in cabinet 100 Microns 2-4 Bar (g)

FITTING SIZE 3/8” SWAGELOK COUPLING


COMP

Y RE

FLOW RATE SUPPLIER

g) 10 SLPMCustomer

2-5

RESSED AIR REQUIREMENTS

TABLE REF

LETTER

SERVICE REQUIRED CONTAMINANTS INLET

PRESSURE

MAXSAFET

PRESSU

JCompressed air

supply unit <5 micron particles 5 Bar (g) 10 Bar (

FITTING SIZE 8MM PUSH FIT


PROC

NOTES• Proc & BCl3). In order to minimise this effect, thought

shou e).

• Shou sing an electrostatic clamp.

FLOW RATE SUPPLIER

Process dependant Customer

2-6

ESS GASES REQUIREMENTS

ess performance can be influenced by pressure variation in certain gases (particularly C4F8, SiCl4ld be given to their storage conditions (for instance, store indoors to maintain a stable temperatur

ld Argon not be required as a process gas, it must still be made available for de-chucking when u

TABLE REF

LETTER

SERVICE REQUIRED PURITY INLET

PRESSURE

MAXSAFETY

PRESSURE

KProcess gases

99.995%EXCEPT GASES

SiCl4 & BCl31 Bar (g) 6 Bar (g)

FITTTING SIZE 1/4” VCR MALE CONNECTION


HELIU

FLOW RATE SUPPLIER

50 SCCM Customer

2-7

M BACKSIDE COOLING REQUIREMENTS

TABLE REF

LETTER

SERVICE REQUIRED PURITY INLET

PRESSUREMAX SAFETY PRESSURE

LHelium gas 99.999% 1 Bar (g) 6 Bar (g)

FITTING SIZE 1/4” VCR FEMALE CONNECTION


EXHA

TYPE OF EXHAUST WHO SUPPLIES

Factory Customer

Factory Customer

.pipe Factory Customer

2-8

UST REQUIREMENTS

TABLE REF

LETTER

SERVICE REQUIRED

EXTRACTIONRATE FITTING

M Loadlock pump >40 l/m @ 13789 Pa less than atmospheric pressure

NW40

N Process chamber pump

>50 l/m @ 13789 Pa less than atmospheric pressure

NW40

O Gas box >550 l/m @ 100 Pa less than atmospheric pressure

89mm (3.5”) dia


COOL

NOTE• Plea

WHO SUPPLIES

120 l/h at 25oC Customer

2-9

ING REQUIREMENTS

se also refer to the "Water Requirements" section of this document, page 2-4.

TABLE REF

LETTER

SERVICE REQUIRED TYPE OF COOLING

PLower electrode

coolingFed from the SMC HRZ chiller

This unit requires house cooling water at 4 bar (g) &

FITTING SIZE 1/2” SWAGELOK COMPRESSION.


SYSTE

NOTE• If this quirements of the latest issue of STS quality

docu stallation tester. These documents are available from STS notified if an appropriate electrical tester is available to pr

• The responsibility of the customer to ensure it is suitably rated

• A su pplied electronics rack.

SUPPLIER

Amps/Phase Customer

sed connection Customer

2-10

M ELECTRICAL SUPPLY REQUIREMENTS

system is to be electrically installed by non STS personnel, it must be installed in line with the rements: Q000130, Q000131, Q000135 & electrical drawing ED322778, using a suitable electrical in by mailing the address below. If STS engineers are to electrically install this system they must beevent any delay.

supply cable to this tool must be sized in accordance with local electrical rules/regulations & is the prior to installation.

itably rated mains circuit breaker should be installed up stream of the main breaker on the STS su

TABLE REF

LETTERSERVICE REQUIRED RATING

R 3 phase supply, neutral & protective earth (PE).Noiseless earth not required (TE).

380 Volts 50 Hz 56

S Country of origin phone connection to RG45 connection to rack.

10/100 mbs internet ba


TURB

CAUT

orrectly (see page 24 of the operating instructions).

ts a burn hazard. While this flange is protected by an h care to avoid burns.

2-11

O INFORMATION

ION WHEN USING THE TURBO

If you are involved in removing the turbo, it is essential that the splinter guard is re-installed c

When the turbo is in use the basic flange can become so hot (>80oC, >176oF) that it represeninsulated collar (which should not be removed) the rest of the body should also be treated wit


3-1

SECTION 3DATA SEETS


4-1

SECTION 4CHECK LIST


re

STS

r the

e.

4-2

SYSTEM SERVICES

CHECK LIST

To enable STS to commission your new system you a

asked to complete and sign the services checklist.

After completion please fax the complete section back to

on the fax number shown on Page 4.6. Arrangements fo

Commissioning Engineer to visit you can then be mad


LOAD

ELECT

N

OCUSTOMERS SIGNATURE

N


4-3

LOCK PUMP

RICAL INCOMING SUPPLY

SYSTEM SERVICESERVICE CONNECTIO

FITTEDPLEASE ANSWER YES/N

Loadlock pump to system flexible connection pipe

Loadlock pump exhaust connection

Loadlock pump nitrogen purge supply inlet (if required)



Electrical supply into the electronics cabinet


GAS B

PROC

ONNECTION TEDWER YES/NO

CUSTOMERS SIGNATURE

ONNECTION TEDWER YES/NO

CUSTOMERS SIGNATURE

4-4

OX

ESS CHAMBER

SYSTEM SERVICESERVICE C

FITPLEASE ANS

All process gas lines to the gas box

All process gas line nitrogen purge (if required)

Gas box process chamber vent

Gas box exhaust

SYSTEM SERVICESERVICE C

FITPLEASE ANS

Helium backside cooling supply

Nitrogen supply

Water cooling supply (house water)

Water cooling supply for chillers & pumps (house water)

Compressed air


PROC

N


4-5

ESS CHAMBER BACKING PUMP



Backing pump to system flexible connection pipe

Backing pump exhaust connection

Backing pump nitrogen purge supply inlet (if required)

Water cooling supply (if required)


CUSTO

SYSTE

All servi me to commission the system.

Signed

Print Na

Date:

er.

4-6

MER DECLARATION

M No..........................…………….

ces have been installed to the system and the system is ready for a STS approved engineer to co

.................................................

me: .................................................

.................................................

After completing this form and signing it please

fax a copy of the complete document back to

STS on +44 1633 652437

Please address it for the attention of the Service Manag

Documents

MP0593-ICPS