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Microwave IC & System Lab
Millimeter-wave and THzCircuit and System
Byung-Wook Min, Ph.D.
Assistant ProfessorElectrical and Electronic EngineeringYonsei University
Microwave IC & System Lab
Outline
• Electromagnetics• Communication• MMW/THz Communication• Phased array system
• Si-Based T/R Module- MMW Switches- Phase Shifter- LNA- VGA- Full T/R Module
Microwave IC & System Lab
Electromagnetic Frequency
1 m300 MHz
10 cm3 GHz
1 mm300 GHz
100 μm3 THz
10 μm30 THz
1 μm300 THz
100 nm3 PHz
1 cm30 GHz
10 nm30 PHz
Analog RF Millimeter-Wave Terahertz IR Visible UV X-ray
1 nm300 PHz
10 m30 MHz
Electronics Photonics
What is electromagnetic wave? (Using to transfer power/signal)E:Coulomb/Gauss, H:Lorentz/Ampere/Biot-Savart, E↔H:Faraday Maxwell
z
λFreq.
(V/m)
(A/m)
Microwave IC & System Lab
Communications
EH Transmission line theory
Antenna theory
Digital/AnalogCircuit
RF Circuit
RF Freq
RF Circuit
Digital/AnalogCircuit
Microwave IC & System Lab
Frequency Usage (RF?)
30 GHz
3 GHz
300 MHz
30 MHz
3 MHz
Microwave IC & System Lab
Data and Comm. Data Rate
Microwave IC & System Lab
Communication Data Rate
Broad-band Multi-Gbps system is required.
Microwave IC & System Lab
Millimeter-Wave Frequency
MMWISM60 GHzWirelessHD
94 GHzImagingSensor
ISM122 GHz
77 GHzAutomotiveRadar
ISM24 GHz
74 & 84 GHzWireless Fiber
40 GHzBroadcast
Frequency Congestion at RFMMW Wide Absolute Bandwidth Circuit High Data Rate at MMW
High attenuation Short propagation Small cell size
Microwave IC & System Lab
5G(B4G) Wireless System
Millimeter-Wave
AntennaArray
Element
Femtocell(small area)
Microwave IC & System Lab
MMW: Line of Sight
Propagation- Absorption- Reflection- Refraction- Diffraction- Scattering
Line of Sight
Higher frequency More absorption Less diffraction Need LOS comm. Phased Array System
Microwave IC & System Lab
Phased Antenna Array System
2sin
d
• Beam forming and control
• Spatial power combining(Array directivity ~ N)
• Higher Rx SNR: 10log10N (dB).(Uncorrelated noise from receivers)
• Transmit/Receive modules.
• Ideally, true-time delay needed to compensated or the propagation delay.
• For narrow band system, time delay can be approximated by phase delay.
2
sin 1
d
Microwave IC & System Lab
MMW Phased Array Systems
Radar for Patriot MissilePhased Array TRacking Intercept Of Target
• Fast beam scanning and electric beam control.
• Many antennas, transmitters, and receivers
Satellite Television for Vehicle
Satellite Broadcast
Defense Sector Commercial Sector
From Track visionFrom Raytheon
To a singleSi Chip
Microwave IC & System Lab
Si MMW Emerging Applications
60 GHz: WirelessHD77 GHz: Automotive radar74/84 GHz: Wireless Fiber94 GHz: ImagingTHz Imaging/Transceiver
High gain antenna Phased array system
Expensive III-V based hybrid Si based SoC
Microwave IC & System Lab
Si-based Phased Array T/R Module
Microwave IC & System Lab
Phased Array Factor
• Antenna array pattern Array factor.
• Continuous scanning with 4-bit digital phase shifter. (<0.1 dB gain drop)
• Amplitude control for tailoring the beam width and side-lobe level.
• Antenna spacing is close to /2.(beam-width, grating lobe)
Microwave IC & System Lab
CMOS Transistor at MMW
200 GHz
300 GHz
45 nm
CMOS technology is ready for the MMW circuits
Microwave IC & System Lab
IBM 8HP SiGe BiCMOS Process
• 0.12 μm minimum feature size
• NPN HBT Peak ƒT = 200 GHz• NPN BVceo = 1.8 V• Peak ƒT Ic Density = 1.3 mA/m• Min NF = 2.3 dB @ 40 GHz
• CMOS Peak ƒT = 80 GHz • CMOS VDD = 1.2/1.5 V• Switch loss ≈ 2.5 dB @ 35 GHz
• 7 metal layers• Thick top metal (MA, 4 μm)• MIM capacitor (1 fF/m2, >90 fF)• Spiral inductor (low peak-Q freq)
• Strict metal-density rules
SiGe BiCMOS Process
Collector Current (A)1e-4 1e-3 1e-2 1e-1
fT (G
Hz)
0
50
100
150
200
Min
Noi
se F
igur
e (d
B)
0
2
4
6
81 m 6 m 12 m
60 GHz
40 GHz
20 GHz10 GHz
ƒT,, emitter length = 1, 6, & 12 m
Min NF, emitter length = 12 m
Microwave IC & System Lab
MMW Passive Devices on CMOS
• Foundry filling and cheesing(hole) • Shielded microstrip line • Side ground for compact layout• Bottom ground for lossy substrate
Lumped (L, transformer & C) vs. Distributed (T-line, coupler, combiner)
Microwave IC & System Lab
CMOS Switches
• RG to prevent signal leaking and oxide breakdown.• Rch = channel resistance• Cs = Cgs + Cgd• Cjs and Cjd limit the bandwidth.• Rsub = Rbc + Rv + Rbf + Rbh (poor model, uncertainty)
Microwave IC & System Lab
SPDP Switch w/ DNW NMOS
Microwave IC & System Lab
Phase Shifter Topologies
Low-Pass
• Delay Elements (ƒO, ZO)
High-Pass High-Pass Low-Pass
Microwave IC & System Lab
CMOS Phase Shifter
- Ls = 240 pH- Cp = 70 fF - Lr = 350 pH
- T1 width = 23 m- T2 width = 34 m
35 GHz• difference = 90.6• I.L < 3.2 dB• R.L < -15 dB
Frequency (GHz)30 32 34 36 38 40
S21
Pha
se (d
egre
e)
-135
-90
-45
0
0 degree90 degree
90.6
Frequency (GHz)30 32 34 36 38 40
Inse
rtion
Los
s (d
B)
-6.0
-4.5
-3.0
-1.5
0.00 degree Sim.90 degree Sim.0 degree Meas. 90 degree Meas.
Microwave IC & System Lab
4 Bit CMOS Phase Shifter
250 m
Chip size: 0.14 mm2
Microwave IC & System Lab
4 Bit CMOS Phase Shifter Results
Frequency (GHz)30 32 34 36 38 40
S21
Pha
se (d
egre
e)
-540
-360
-180
0
360
0
Frequency (GHz)30 32 34 36 38 40
Inse
rtion
Los
s (d
B)
-20
-15
-10
-5
0
12 + 1.5 dB
Frequency (GHz)30 32 34 36 38 40
Ret
urn
Loss
(dB)
-30
-20
-10
0S11S22
R.L. < -14 dB@ 35 GHz
Input Power (dBm)-5 0 5 10 15
Inse
rtion
Los
s (d
B)
-9.0
-6.0
-3.0
0.0
BypassLow-pass @ 35 GHz
22.5o Bit
45o Bit
90o Bit
P1dB = 10 dBm
Microwave IC & System Lab
LNA Design Procedure
Microwave IC & System Lab
BiCMOS LNA
Microwave IC & System Lab
Differential Variable Gain LNA
• LNA + VGA• 8 gain states(linear in mag.)
• Low phase imbalance (<2.5˚)• NF = 3.4 ~ 4.3 dB• 33 mW power consumption
Microwave IC & System Lab
Differential Phased Array RX Front-End
• LNA + VGA + Differential Phase shifter
Microwave IC & System Lab
Ka-Band T/R Module
• RX Gain = 19 ± 0.4 dB, NF < 4.3 dB• TX Pout = 5.5 dBm• RMS gain variation < 0.3 dB (@ 33-36 GHz)• RMS phase error < 5° (@ 33-36 GHz)• RX (28 mW), TX (58 mW) power consumption
Microwave IC & System Lab
4-Element Array T/R Module
Microwave IC & System Lab
Other Work (8 Elements System)
Microwave IC & System Lab
Millimeter-wave / THzCMOS Phased Array System
(Low Cost, Multi-Gbps, P2MP)
Module Technology(Platform, Packaging, 3D Integration)
MMW CMOS IC Technology (Circuit, Microwave Eng., Si Process)
Phased Array Antenna Technology(Beam Steering, Aligning)
Communication Technology(PHY-MAC, Gbps Signal Processing)
Thank you.