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Microwave IC & System Lab Millimeter-wave and THz Circuit and System Byung-Wook Min, Ph.D. Assistant Professor Electrical and Electronic Engineering Yonsei University

Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

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Page 1: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

Millimeter-wave and THzCircuit and System

Byung-Wook Min, Ph.D.

Assistant ProfessorElectrical and Electronic EngineeringYonsei University

Page 2: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

Outline

• Electromagnetics• Communication• MMW/THz Communication• Phased array system

• Si-Based T/R Module- MMW Switches- Phase Shifter- LNA- VGA- Full T/R Module

Page 3: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

Electromagnetic Frequency

1 m300 MHz

10 cm3 GHz

1 mm300 GHz

100 μm3 THz

10 μm30 THz

1 μm300 THz

100 nm3 PHz

1 cm30 GHz

10 nm30 PHz

Analog RF Millimeter-Wave Terahertz IR Visible UV X-ray

1 nm300 PHz

10 m30 MHz

Electronics Photonics

What is electromagnetic wave? (Using to transfer power/signal)E:Coulomb/Gauss, H:Lorentz/Ampere/Biot-Savart, E↔H:Faraday Maxwell

z

λFreq.

(V/m)

(A/m)

Page 4: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

Communications

EH Transmission line theory

Antenna theory

Digital/AnalogCircuit

RF Circuit

RF Freq

RF Circuit

Digital/AnalogCircuit

Page 5: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

Frequency Usage (RF?)

30 GHz

3 GHz

300 MHz

30 MHz

3 MHz

Page 6: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

Data and Comm. Data Rate

Page 7: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

Communication Data Rate

Broad-band Multi-Gbps system is required.

Page 8: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

Millimeter-Wave Frequency

MMWISM60 GHzWirelessHD

94 GHzImagingSensor

ISM122 GHz

77 GHzAutomotiveRadar

ISM24 GHz

74 & 84 GHzWireless Fiber

40 GHzBroadcast

Frequency Congestion at RFMMW Wide Absolute Bandwidth Circuit High Data Rate at MMW

High attenuation Short propagation Small cell size

Page 9: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

5G(B4G) Wireless System

Millimeter-Wave

AntennaArray

Element

Femtocell(small area)

Page 10: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

MMW: Line of Sight

Propagation- Absorption- Reflection- Refraction- Diffraction- Scattering

Line of Sight

Higher frequency More absorption Less diffraction Need LOS comm. Phased Array System

Page 11: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

Phased Antenna Array System

2sin

d

• Beam forming and control

• Spatial power combining(Array directivity ~ N)

• Higher Rx SNR: 10log10N (dB).(Uncorrelated noise from receivers)

• Transmit/Receive modules.

• Ideally, true-time delay needed to compensated or the propagation delay.

• For narrow band system, time delay can be approximated by phase delay.

2

sin 1

d

Page 12: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

MMW Phased Array Systems

Radar for Patriot MissilePhased Array TRacking Intercept Of Target

• Fast beam scanning and electric beam control.

• Many antennas, transmitters, and receivers

Satellite Television for Vehicle

Satellite Broadcast

Defense Sector Commercial Sector

From Track visionFrom Raytheon

To a singleSi Chip

Page 13: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

Si MMW Emerging Applications

60 GHz: WirelessHD77 GHz: Automotive radar74/84 GHz: Wireless Fiber94 GHz: ImagingTHz Imaging/Transceiver

High gain antenna Phased array system

Expensive III-V based hybrid Si based SoC

Page 14: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

Si-based Phased Array T/R Module

Page 15: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

Phased Array Factor

• Antenna array pattern Array factor.

• Continuous scanning with 4-bit digital phase shifter. (<0.1 dB gain drop)

• Amplitude control for tailoring the beam width and side-lobe level.

• Antenna spacing is close to /2.(beam-width, grating lobe)

Page 16: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

CMOS Transistor at MMW

200 GHz

300 GHz

45 nm

CMOS technology is ready for the MMW circuits

Page 17: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

IBM 8HP SiGe BiCMOS Process

• 0.12 μm minimum feature size

• NPN HBT Peak ƒT = 200 GHz• NPN BVceo = 1.8 V• Peak ƒT Ic Density = 1.3 mA/m• Min NF = 2.3 dB @ 40 GHz

• CMOS Peak ƒT = 80 GHz • CMOS VDD = 1.2/1.5 V• Switch loss ≈ 2.5 dB @ 35 GHz

• 7 metal layers• Thick top metal (MA, 4 μm)• MIM capacitor (1 fF/m2, >90 fF)• Spiral inductor (low peak-Q freq)

• Strict metal-density rules

SiGe BiCMOS Process

Collector Current (A)1e-4 1e-3 1e-2 1e-1

fT (G

Hz)

0

50

100

150

200

Min

Noi

se F

igur

e (d

B)

0

2

4

6

81 m 6 m 12 m

60 GHz

40 GHz

20 GHz10 GHz

ƒT,, emitter length = 1, 6, & 12 m

Min NF, emitter length = 12 m

Page 18: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

MMW Passive Devices on CMOS

• Foundry filling and cheesing(hole) • Shielded microstrip line • Side ground for compact layout• Bottom ground for lossy substrate

Lumped (L, transformer & C) vs. Distributed (T-line, coupler, combiner)

Page 19: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

CMOS Switches

• RG to prevent signal leaking and oxide breakdown.• Rch = channel resistance• Cs = Cgs + Cgd• Cjs and Cjd limit the bandwidth.• Rsub = Rbc + Rv + Rbf + Rbh (poor model, uncertainty)

Page 20: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

SPDP Switch w/ DNW NMOS

Page 21: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

Phase Shifter Topologies

Low-Pass

• Delay Elements (ƒO, ZO)

High-Pass High-Pass Low-Pass

Page 22: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

CMOS Phase Shifter

- Ls = 240 pH- Cp = 70 fF - Lr = 350 pH

- T1 width = 23 m- T2 width = 34 m

35 GHz• difference = 90.6• I.L < 3.2 dB• R.L < -15 dB

Frequency (GHz)30 32 34 36 38 40

S21

Pha

se (d

egre

e)

-135

-90

-45

0

0 degree90 degree

90.6

Frequency (GHz)30 32 34 36 38 40

Inse

rtion

Los

s (d

B)

-6.0

-4.5

-3.0

-1.5

0.00 degree Sim.90 degree Sim.0 degree Meas. 90 degree Meas.

Page 23: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

4 Bit CMOS Phase Shifter

250 m

Chip size: 0.14 mm2

Page 24: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

4 Bit CMOS Phase Shifter Results

Frequency (GHz)30 32 34 36 38 40

S21

Pha

se (d

egre

e)

-540

-360

-180

0

360

0

Frequency (GHz)30 32 34 36 38 40

Inse

rtion

Los

s (d

B)

-20

-15

-10

-5

0

12 + 1.5 dB

Frequency (GHz)30 32 34 36 38 40

Ret

urn

Loss

(dB)

-30

-20

-10

0S11S22

R.L. < -14 dB@ 35 GHz

Input Power (dBm)-5 0 5 10 15

Inse

rtion

Los

s (d

B)

-9.0

-6.0

-3.0

0.0

BypassLow-pass @ 35 GHz

22.5o Bit

45o Bit

90o Bit

P1dB = 10 dBm

Page 25: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

LNA Design Procedure

Page 26: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

BiCMOS LNA

Page 27: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

Differential Variable Gain LNA

• LNA + VGA• 8 gain states(linear in mag.)

• Low phase imbalance (<2.5˚)• NF = 3.4 ~ 4.3 dB• 33 mW power consumption

Page 28: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

Differential Phased Array RX Front-End

• LNA + VGA + Differential Phase shifter

Page 29: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

Ka-Band T/R Module

• RX Gain = 19 ± 0.4 dB, NF < 4.3 dB• TX Pout = 5.5 dBm• RMS gain variation < 0.3 dB (@ 33-36 GHz)• RMS phase error < 5° (@ 33-36 GHz)• RX (28 mW), TX (58 mW) power consumption

Page 30: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

4-Element Array T/R Module

Page 31: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

Other Work (8 Elements System)

Page 32: Millimeter-wave and THz Circuit and Systemtera.yonsei.ac.kr/class/2013_1/lecture/Topic2 Mm_Thz.pdf · Microwave IC & System Lab Millimeter-wave / THz CMOS Phased Array System (Low

Microwave IC & System Lab

Millimeter-wave / THzCMOS Phased Array System

(Low Cost, Multi-Gbps, P2MP)

Module Technology(Platform, Packaging, 3D Integration)

MMW CMOS IC Technology (Circuit, Microwave Eng., Si Process)

Phased Array Antenna Technology(Beam Steering, Aligning)

Communication Technology(PHY-MAC, Gbps Signal Processing)

Thank you.