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MicroSystems Laboratory (PI: Professor Andrei M. Shkel) Research Group Members Sina Askari Mohammad Asadian Yusheng Wang Yu-Wei Lin Danmeng Wang Daryosh Vatanparvar Chi-Shih Jao AusHn Parrish Snehan Peshin Tian Bao Doreen Hii Yi Zhuang Dania Hassan Andrei M. Shkel (949) 824-3843 [email protected] hSp://mems.eng.uci.edu

MicroSystems Laboratory (PI: Professor Andrei M. Shkel) Andrei.townHall.pdfMicroSystems Laboratory (PI: Professor Andrei M. Shkel) Research Group Members • Sina Askari • Mohammad

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Page 1: MicroSystems Laboratory (PI: Professor Andrei M. Shkel) Andrei.townHall.pdfMicroSystems Laboratory (PI: Professor Andrei M. Shkel) Research Group Members • Sina Askari • Mohammad

MicroSystemsLaboratory(PI:ProfessorAndreiM.Shkel)

ResearchGroupMembers•  SinaAskari•  MohammadAsadian•  YushengWang•  Yu-WeiLin•  DanmengWang•  DaryoshVatanparvar•  Chi-ShihJao•  AusHnParrish•  SnehanPeshin•  TianBao•  DoreenHii•  YiZhuang•  DaniaHassan

AndreiM.Shkel(949)[email protected]://mems.eng.uci.edu

Page 2: MicroSystems Laboratory (PI: Professor Andrei M. Shkel) Andrei.townHall.pdfMicroSystems Laboratory (PI: Professor Andrei M. Shkel) Research Group Members • Sina Askari • Mohammad

ProjectsweareworkingonintheupcomingyearProject/researchsummary•  uNavChip(UlHmateNavigaHonChip):Chip-ScalePersonalNavigaHonSystemIntegraHngDeterminisHcLocalizaHonandProbabilisHcSignalsofOpportunity(Sponsor:NIST)

•  2D/3D-deMIRA(Double-EndedMechanicalIntegratorofRotaHonRejecHngAcceleraHons):developingprecisionchip-scalegyrosfromfusedquartz(Sponsor:DARPA)

uNavChip_v2 (150mm3)

uNavChip_v1 (450mm3)

Page 3: MicroSystems Laboratory (PI: Professor Andrei M. Shkel) Andrei.townHall.pdfMicroSystems Laboratory (PI: Professor Andrei M. Shkel) Research Group Members • Sina Askari • Mohammad

PossibleareasofcollaboraHonwithothergroups

•  ASICforinerHalsensors(Op-Amps,AGC,PLL,etc.)•  On-Chipspectrumanalyzerbased,forexample,onRFMEMSbanks(foron-chipdetecHonofsignalsofopportunityandsubsequentuseforlocalizaHon)

•  Complexmicro-glassstructuresforabroadspectrumofbiomedicalapplicaHons(experHseindeepICPetchingofglassandmicro-glassblowing)

•  AccesstoanimalmodelsforresearchonvesHbularprosthesis(interfacingtovesHbularnerve)